CN201240837Y - Hydrogen purifying apparatus by carbon adsorption - Google Patents
Hydrogen purifying apparatus by carbon adsorption Download PDFInfo
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- CN201240837Y CN201240837Y CNU2008200383795U CN200820038379U CN201240837Y CN 201240837 Y CN201240837 Y CN 201240837Y CN U2008200383795 U CNU2008200383795 U CN U2008200383795U CN 200820038379 U CN200820038379 U CN 200820038379U CN 201240837 Y CN201240837 Y CN 201240837Y
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Abstract
The utility model relates to a carbon absorbing and cleaning device of hydrogen, comprising two or more than two carbon towers (32); the device is characterized in that: a cooling heat conducting oil inlet pipe (1) is connected with cooling tubes in each carbon towers (32) and jackets outside of the carbon towers (32), the cooling tubes are arranged in a dielectric layer (36), the output ends of the cooling tubes are connected with a main cooling heat conducting oil output pipe (29); a thermal heat conducting oil inlet pipe (2) is connected with the input ends of the cooling tubes in each carbon towers (32) and jackets outside of the carbon towers (32), the output end of a heating jacket is connected with a main thermal heat conducting oil output pipe (30); the inlet pipe (3) of crude hydrogen is connected with the carbon towers (32), distributors (35) are arranged in the carbon towers (32), the outlet pipe (7) of resolving hydrogen with a valve, which is communicated with the main output pipe (31) of the resolving hydrogen, is connected at the lower ends of the carbon towers (32), the other ends of the carbon towers (32) are provided with an outlet pipe (8) of pure hydrogen with a valve, an air return pipe (9) is connected in parallel between the outlet pipe (8) of pure hydrogen with a valve and a main pure hydrogen outlet pipe (28). The device has the advantages of simple technique, good absorption effect and high hydrogen purity.
Description
Technical field
The utility model relates to a kind of chemical plant installations, and especially high-purity hydrogen purifies adsorption unit, specifically a kind of carbon adsorption cleaning hydrogen device.
Background technology
As everyone knows, in polysilicon production process, contain H in the CVD reaction discharging tail gas
2, HCl, SiHCl
3, SiCl
4, CO
2, CO, N
2, component such as AR, must separate.Removing HCl, SiHCl through the condensation washing
3, SiCl
4, CO
2, CO, N
2, the hydrogen behind the AR etc. is essential before returning the CVD reactor further purifies, the high-purity hydrogen that obtains, and at present the most frequently used be to adopt the activated carbon adsorption purified hydrogen, according to the difference of suction type, it can be divided into transformation and two kinds of adsorption methods of alternating temperature again, wherein:
(1) transformation absorption.This method adsorption efficiency is lower, is difficult to reach requirement of high purity.
(2) alternating temperature absorption.When this method adopts alternating temperature absorption, generally adopt raw hydrogen cooling activated carbon to adsorb; Heat activated carbon with hydrogen by activated carbon again during parsing.This just causes activated carbon in the process of being cooled, and not reach the hydrogen purity of producing when requiring not high when temperature.Can influence hydrogen recovery rate again if discharge this strand hydrogen.In heat-processed, reproduction speed was not low when the activated carbon temperature was high, can many consumption hydrogen.Also have rare gas elementes such as adopting nitrogen to do cooling or heating medium, this method also can influence the purity and the rate of recovery of hydrogen.
These two kinds of methods all exist absorption the beginning initial stage can not produce high-purity hydrogen, and because of consuming the problem of hydrogen with hydrogen heating activated carbon, and adsorption effect is undesirable, purity is not high or the rate of recovery is not high more in the regenerative process.
Summary of the invention
The purpose of this utility model is that the adsorption effect that exists at existing adsorption unit is poor, purity is not high and the problem of hydrogen recovery rate, design a kind of carbon adsorption cleaning hydrogen device that can realize cryogenic absorption, high temperature parsing based on the alternating temperature absorption principle.
The technical solution of the utility model is:
A kind of carbon adsorption cleaning hydrogen device, comprise two or more carbon tower oil delivery trunks, thermal conductance deep fat delivery trunk reconciliation liberation of hydrogen gas delivery trunk, it is characterized in that described cold thermal oil input tube links to each other with the cooling tubulation of each carbon tower inside or chuck, coil pipe or the honeycomb structure of coil pipe and outside by input tube, cooling tubulation or coil pipe are arranged in medium layer, and the output terminal of cooling tubulation or coil pipe links to each other with cold thermal oil delivery trunk by the cold output tube of band valve; Described thermal conductance deep fat input tube by hot input tube and each carbon tower inside the cooling tubulation or the input terminus of coil pipe and outside chuck, coil pipe or honeycomb structure link to each other, the output terminal of heating jacket, coil pipe or honeycomb structure links to each other with thermal conductance deep fat delivery trunk by the thermal output pipe; Described raw hydrogen input tube links to each other with the lower end of carbon tower by band valve raw hydrogen input tube, the sparger relative with the raw hydrogen input tube is installed in the lower end of carbon tower, also be connected with the band valve in the lower end of carbon tower and resolve hydrogen output tube or parsing muffler, resolve the hydrogen output tube and communicate with parsing hydrogen delivery trunk; Do not install at the carbon tower on the other end of sparger the pure hydrogen output tube is installed, each pure hydrogen output tube all links to each other with the pure hydrogen delivery trunk, between each pure hydrogen output tube and pure hydrogen delivery trunk all and be connected to muffler (9) or separate the gassing output tube.
The valve of installing on described each pipeline is switch-valve and/or the variable valve with automatic regulatory function.
Described cooling tubulation and external jacket are an electric heating element.
The beneficial effects of the utility model:
The utility model adopts active tower alternating temperature absorption to obtain high-purity hydrogen; With built-in tubulation with add intensification and the cooling that chuck is finished active tower, recycle absorption and the desorb that has effectively guaranteed under the stable situation of treatment capacity with a plurality of carbon tower series, parallel (general 2 to 6).Solved absorption commonly used tie up to the absorption beginning initial stage can not the output high-purity hydrogen, in the regenerative process because of consume the problem of hydrogen with hydrogen heating activated carbon more.
The utility model is simple in structure, advantages of good adsorption effect, the purity height of hydrogen.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
Below in conjunction with drawings and Examples the utility model is further described.
As shown in Figure 1.
A kind of carbon adsorption cleaning hydrogen device, comprise two or more carbon towers 32, cold thermal oil input tube 1, thermal conductance deep fat input tube 2, raw hydrogen input tube 3, cold thermal oil output tube 29, thermal conductance deep fat output tube 30 is conciliate liberation of hydrogen gas output tube 31, described cold thermal oil input tube 1 (also can be coil pipe by the cooling tubulation of the cold input tube 5 of band valve and each carbon tower 32 inside, down with) and outside chuck (also can be coil pipe or honeycomb structure, link to each other down together), the cooling tubulation is arranged in medium layer 36, and the output terminal of cooling tubulation links to each other with cold thermal oil delivery trunk 29 by the cold output tube 11 of band valve; Described thermal conductance deep fat input tube 2 by the hot input tube 4 of band valve and each carbon tower 32 inside the cooling tubulation and the input terminus of outside chuck link to each other, the output terminal of heating jacket links to each other with thermal conductance deep fat delivery trunk 30 by being with valve thermal output pipe 10; Described raw hydrogen input tube 3 links to each other with lower end in the carbon tower 32 by band valve raw hydrogen input tube 6, in the lower end of carbon tower 32, be equipped with the relative sparger 35 of valve raw hydrogen input tube 6, also be connected with the band valve in the lower end of carbon tower 32 and resolve hydrogen output tube 7, the band valve is resolved hydrogen output tube 7 and is communicated with parsing hydrogen delivery trunk 31; Do not install at carbon tower 32 band valve pure hydrogen output tube 8 is installed on the other end of sparger 35, each is with valve pure hydrogen output tube 8 all to link to each other with pure hydrogen delivery trunk 28, between each band valve pure hydrogen output tube 8 and pure hydrogen delivery trunk 28, all and be connected to band valve muffler 9, be used for the regeneration of carbon tower.
During concrete enforcement; for the ease of automatic control; the valve of installing on each pipeline (resolving the valve of installing on the pipelines such as hydrogen output tube 7, band valve pure hydrogen output tube 8 as band valve thermal output pipe 10, band valve raw hydrogen input tube 6, band valve) can adopt switch-valve and/or variable valve, sequencing valve etc. with automatic regulatory function, adopts manual valve or self-acting valve, sequencing valve all among protection category of the present utility model no matter be.
In addition, when specifically implementing, the band valve is resolved hydrogen output tube 7 and is resolved with the installation site of muffler 9 also interchangeable.
The utility model is applicable to that hydrogen is removed HCl, SiHCl in the polysilicon production process
3, SiCl
4, CO
2, CO, N
2, component such as AR process.Can adopt electric-controlled switch valve (or variable valve) to finish in whole technological process with the valve on each pipeline with automatic adjusting.The sorbent material of carbon tower inside can adopt activated carbon or carbon fiber.Establish tubulation (or coil pipe) in the inside of carbon tower, outside with chuck (can be cellular or coil-like), adopt thermophore heating, cooling activated carbon, and carry out cryogenic absorption, high temperature and resolve, operating pressure in the tower is 0.3-1.2MPa, adsorption temp is-10 ℃～40 ℃, and resolution temperature is 30 ℃～400 ℃.
Working process of the present utility model is:
The circulation step of each carbon tower 32 of the present utility model is: contain small amount of H Cl, SiHCl
3, SiCl
4, N
2, CO
2, component such as CO hydrogen through intake ducting 6 enters No. 1 carbon tower 32 under low temperature (10 ℃～20 ℃), mesolow (approximately 0.3-1.2MPa) in, disperse to pass activated carbon bed 36, HCl, SiHCl by the sparger in the tower 35
3, SiCl4N
2, CO
2, component such as CO is by activated carbon adsorption, goes out the hydrogen impurity content＜1ppm of No. 1 carbon tower 32, send through pipeline 8.After the foreign matter content in the hydrogen that goes out carbon tower 32 (pipeline 8) is increased to a certain degree, close raw hydrogen and enter valve on the pipeline 6 of carbon tower 32, open the intake ducting 6 of carbon tower 32 or the intake ducting 6 on No. 3 carbon towers, raw hydrogen is switched to by cold carrier refrigerative carbon tower 33,34, subsequently 200 ℃～350 ℃ coil pipe and chucks in pipeline 4 enters carbon tower 32 of thermal conductance deep fat, after heating carbon tower 32 reaches certain temperature, this carbon tower is resolved with a small amount of pure hydrogen (pipeline 9).After to be resolved the finishing, use cold thermal oil (pipeline 5) that carbon tower 32 is cooled off again, to be cooled behind lesser temps (0 ℃～60 ℃), to carbon tower 32 logical raw hydrogens (through pipeline 6), a circulation leaves it at that once more.Carbon tower 33,34 is as 32 circulation absorption and the desorbs of carbon tower.
The heating of heat conductor in above-mentioned adsorption process, cooling activated carbon process and raw hydrogen adsorption cleaning process and all should adopt program-controlled valve to operate with the pure hydrogen regenerative process.
The utility model does not relate to the part prior art that maybe can adopt all same as the prior art to be realized.
Claims (3)
1, a kind of carbon adsorption cleaning hydrogen device, comprise two or more carbon towers (32), cold thermal oil input tube (1), thermal conductance deep fat input tube (2), raw hydrogen input tube (3), cold thermal oil delivery trunk (29), thermal conductance deep fat delivery trunk (30) is conciliate liberation of hydrogen gas delivery trunk (31), it is characterized in that described cold thermal oil input tube (1) is by input tube (5) and each carbon tower (32) inner cooling tubulation or coil pipe and outside chuck, coil pipe or honeycomb structure link to each other, cooling tubulation or coil pipe are arranged in medium layer (36), and the output terminal of cooling tubulation or coil pipe links to each other with cold thermal oil delivery trunk (29) by the band cold output tube of valve (11); Described thermal conductance deep fat input tube (2) links to each other by the input terminus of the inner cooling tubulation of hot input tube (4) and each carbon tower (32) or coil pipe and outside chuck, coil pipe or honeycomb structure, and the output terminal of heating jacket, coil pipe or honeycomb structure links to each other with thermal conductance deep fat delivery trunk (30) by thermal output pipe (10); Described raw hydrogen input tube (3) links to each other with the lower end of carbon tower (32) by band valve raw hydrogen input tube (6), the sparger (35) relative with raw hydrogen input tube (6) is installed in the lower end of carbon tower (32), also be connected with the band valve in the lower end of carbon tower (32) and resolve hydrogen output tube (7) or resolve, resolve hydrogen output tube (7) and communicate with parsing hydrogen delivery trunk (31) with muffler (9); Do not install at carbon tower (32) on the other end of sparger (35) pure hydrogen output tube (8) is installed, each pure hydrogen output tube (8) all links to each other with pure hydrogen delivery trunk (28), between each pure hydrogen output tube (8) and pure hydrogen delivery trunk (28) all and be connected to muffler (9) or separate gassing output tube (7).
2, carbon adsorption cleaning hydrogen device according to claim 1 is characterized in that the valve of installing on described each pipeline is switch-valve and/or the variable valve with automatic regulatory function.
3, carbon adsorption cleaning hydrogen device according to claim 1 is characterized in that described cooling tubulation and external jacket are an electric heating element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200383795U CN201240837Y (en) | 2008-07-15 | 2008-07-15 | Hydrogen purifying apparatus by carbon adsorption |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200383795U CN201240837Y (en) | 2008-07-15 | 2008-07-15 | Hydrogen purifying apparatus by carbon adsorption |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201240837Y true CN201240837Y (en) | 2009-05-20 |
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ID=40714130
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200383795U Expired - Lifetime CN201240837Y (en) | 2008-07-15 | 2008-07-15 | Hydrogen purifying apparatus by carbon adsorption |
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|---|---|
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102491272A (en) * | 2011-12-09 | 2012-06-13 | 华东理工大学 | Process and device for purifying high-purity hydrogen |
| CN103157342A (en) * | 2012-11-09 | 2013-06-19 | 中国科学院理化技术研究所 | Natural gas/coal bed gas adsorption purification method and device with forced heat exchange structure |
| CN103463926A (en) * | 2013-07-04 | 2013-12-25 | 中国科学院理化技术研究所 | Molecular sieve adsorption tower with heat exchange medium channel |
| CN103736358A (en) * | 2014-01-22 | 2014-04-23 | 唐山亚捷机械有限公司 | Industrial gas further purifying device capable of regenerating purifying agent |
| WO2017211264A1 (en) * | 2016-06-06 | 2017-12-14 | 成都赛普瑞兴科技有限公司 | Adsorption tower, adsorption purifying system and purifying method |
| CN112619357A (en) * | 2019-10-09 | 2021-04-09 | 新疆新特晶体硅高科技有限公司 | Method and device for improving efficiency of hydrogen adsorption column and hydrogen recovery system |
-
2008
- 2008-07-15 CN CNU2008200383795U patent/CN201240837Y/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102491272A (en) * | 2011-12-09 | 2012-06-13 | 华东理工大学 | Process and device for purifying high-purity hydrogen |
| CN102491272B (en) * | 2011-12-09 | 2013-04-17 | 华东理工大学 | Process and device for purifying high-purity hydrogen |
| CN103157342A (en) * | 2012-11-09 | 2013-06-19 | 中国科学院理化技术研究所 | Natural gas/coal bed gas adsorption purification method and device with forced heat exchange structure |
| CN103463926A (en) * | 2013-07-04 | 2013-12-25 | 中国科学院理化技术研究所 | Molecular sieve adsorption tower with heat exchange medium channel |
| CN103736358A (en) * | 2014-01-22 | 2014-04-23 | 唐山亚捷机械有限公司 | Industrial gas further purifying device capable of regenerating purifying agent |
| WO2017211264A1 (en) * | 2016-06-06 | 2017-12-14 | 成都赛普瑞兴科技有限公司 | Adsorption tower, adsorption purifying system and purifying method |
| CN112619357A (en) * | 2019-10-09 | 2021-04-09 | 新疆新特晶体硅高科技有限公司 | Method and device for improving efficiency of hydrogen adsorption column and hydrogen recovery system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SINOPEC NANJING ENGINEERING COMPANY LIMITED Free format text: FORMER NAME: NANJING INST. OF DESIGN, SINOPEC |
|
| CP03 | Change of name, title or address |
Address after: 211100, No. 1189, Jian Jian Road, Dongshan Town, Jiangning District, Jiangsu, Nanjing Patentee after: Sinopec Nanjing Engineering & Construction Inc. Address before: 210048 Jiangsu Province, Nanjing city Liuhe District Dachang geguan Road No. 268 Patentee before: Nanjing Inst. of Design, SINOPEC |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090520 |