CN201158722Y - 砷化镓晶体生长用热场装置 - Google Patents
砷化镓晶体生长用热场装置 Download PDFInfo
- Publication number
- CN201158722Y CN201158722Y CNU2008200044067U CN200820004406U CN201158722Y CN 201158722 Y CN201158722 Y CN 201158722Y CN U2008200044067 U CNU2008200044067 U CN U2008200044067U CN 200820004406 U CN200820004406 U CN 200820004406U CN 201158722 Y CN201158722 Y CN 201158722Y
- Authority
- CN
- China
- Prior art keywords
- heater
- crucible
- heat
- preservation cylinder
- gallium arsenide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 229910001218 Gallium arsenide Inorganic materials 0.000 title claims abstract description 22
- 239000013078 crystal Substances 0.000 title abstract description 14
- 238000004321 preservation Methods 0.000 claims description 34
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 239000010439 graphite Substances 0.000 claims description 12
- 229910002804 graphite Inorganic materials 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 229910052582 BN Inorganic materials 0.000 claims description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000007770 graphite material Substances 0.000 claims description 2
- 240000003936 Plumbago auriculata Species 0.000 claims 1
- 238000000034 method Methods 0.000 description 10
- 229910052733 gallium Inorganic materials 0.000 description 8
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 7
- 241000209456 Plumbago Species 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2008200044067U CN201158722Y (zh) | 2008-01-30 | 2008-01-30 | 砷化镓晶体生长用热场装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CNU2008200044067U CN201158722Y (zh) | 2008-01-30 | 2008-01-30 | 砷化镓晶体生长用热场装置 |
Publications (1)
Publication Number | Publication Date |
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CN201158722Y true CN201158722Y (zh) | 2008-12-03 |
Family
ID=40109314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNU2008200044067U Expired - Fee Related CN201158722Y (zh) | 2008-01-30 | 2008-01-30 | 砷化镓晶体生长用热场装置 |
Country Status (1)
Country | Link |
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CN (1) | CN201158722Y (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105063745A (zh) * | 2015-07-15 | 2015-11-18 | 中国电子科技集团公司第四十六研究所 | 一种GaSb单晶生长位错密度控制技术 |
CN107385514A (zh) * | 2017-07-27 | 2017-11-24 | 晶科能源有限公司 | 一种单晶硅炉退火装置 |
CN108950677A (zh) * | 2017-05-19 | 2018-12-07 | 上海新昇半导体科技有限公司 | 一种单晶提拉炉热场结构 |
CN114686963A (zh) * | 2022-03-16 | 2022-07-01 | 北京通美晶体技术股份有限公司 | 一种GaAs单晶生长设备及GaAs单晶生长工艺 |
-
2008
- 2008-01-30 CN CNU2008200044067U patent/CN201158722Y/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105063745A (zh) * | 2015-07-15 | 2015-11-18 | 中国电子科技集团公司第四十六研究所 | 一种GaSb单晶生长位错密度控制技术 |
CN108950677A (zh) * | 2017-05-19 | 2018-12-07 | 上海新昇半导体科技有限公司 | 一种单晶提拉炉热场结构 |
CN107385514A (zh) * | 2017-07-27 | 2017-11-24 | 晶科能源有限公司 | 一种单晶硅炉退火装置 |
CN107385514B (zh) * | 2017-07-27 | 2023-11-28 | 晶科能源股份有限公司 | 一种单晶硅炉退火装置 |
CN114686963A (zh) * | 2022-03-16 | 2022-07-01 | 北京通美晶体技术股份有限公司 | 一种GaAs单晶生长设备及GaAs单晶生长工艺 |
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Owner name: DAQING JIACHENG JINGNENG INFORMATION MATERIALS CO. Free format text: FORMER OWNER: DAQING JIACHANG SCIENCE AND TECHNOLOGY CO., LTD. Effective date: 20130301 |
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Effective date of registration: 20130301 Address after: 163316 No. 1 Xinfa street, 3 District, hi tech industry, Heilongjiang, Daqing, China Patentee after: DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD. Address before: 163316 room 322, block A, Pioneer Center, hi tech Zone, Heilongjiang, Daqing Patentee before: Daqing Jiachang Science and Technology Co., Ltd. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Thermal field device for gallium arsenide crystal growth Effective date of registration: 20140418 Granted publication date: 20081203 Pledgee: Keli technology investment Company limited by guarantee in Heilongjiang Province Pledgor: DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD. Registration number: 2014230000009 |
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Date of cancellation: 20150417 Granted publication date: 20081203 Pledgee: Keli technology investment Company limited by guarantee in Heilongjiang Province Pledgor: DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD. Registration number: 2014230000009 |
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Denomination of utility model: Thermal field device for gallium arsenide crystal growth Effective date of registration: 20150429 Granted publication date: 20081203 Pledgee: Keli technology investment Company limited by guarantee in Heilongjiang Province Pledgor: DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD. Registration number: 2015230000006 |
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Date of cancellation: 20160727 Granted publication date: 20081203 Pledgee: Keli technology investment Company limited by guarantee in Heilongjiang Province Pledgor: DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD. Registration number: 2015230000006 |
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PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Thermal field device for gallium arsenide crystal growth Effective date of registration: 20160810 Granted publication date: 20081203 Pledgee: Keli technology investment Company limited by guarantee in Heilongjiang Province Pledgor: DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD. Registration number: 2016230000018 |
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PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20171225 Granted publication date: 20081203 Pledgee: Keli technology investment Company limited by guarantee in Heilongjiang Province Pledgor: DAQING JIACHANG JINGNENG INFORMATION MATERIALS CO., LTD. Registration number: 2016230000018 |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081203 Termination date: 20170130 |