CN209737186U - Clamping and feeding mechanism for adjusting cylindricity of semiconductor silicon rod - Google Patents
Clamping and feeding mechanism for adjusting cylindricity of semiconductor silicon rod Download PDFInfo
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- CN209737186U CN209737186U CN201920177926.6U CN201920177926U CN209737186U CN 209737186 U CN209737186 U CN 209737186U CN 201920177926 U CN201920177926 U CN 201920177926U CN 209737186 U CN209737186 U CN 209737186U
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Abstract
The utility model discloses a centre gripping feed mechanism for adjusting semiconductor silicon rod cylindricity, this centre gripping feed mechanism is including feeding the slip table, the adjustment subassembly, swivelling joint platform and the fixture of swivelling joint bench of arranging in, but swivelling joint bench arranges in on feeding the slip table and under the drive of adjustment subassembly horizontal rotation, it is provided with a plurality of clamp plates on the slip table to feed, the clamp plate sets up to "L" type structure, the one end detachable of clamp plate installs on feeding the slip table, the swivelling joint bench is arranged in to the other end, fixture includes headstock subassembly and tailstock subassembly that set up relatively, the swivelling joint platform is provided with protruding piece along bar direction of feed's one end, headstock subassembly fixed ann changes on protruding piece, tailstock subassembly can follow bar direction of feed and make a round trip the gliding installation in swivelling joint bench. The clamping and feeding mechanism not only can clamp the bar and drive the bar to rotate, but also can adjust the axis direction of the bar, realizes the grinding of the round bar of the bar and meets the requirement of cylindricity.
Description
Technical Field
The utility model relates to a silicon rod processing equipment accessory technical field especially relates to a centre gripping feed mechanism for adjusting semiconductor silicon rod cylindricity.
Background
When the semiconductor rounding machine grinds the bar, the clamping mechanism clamps the bar and rotates the silicon rod to carry out rounding grinding. The angle of the axis of the bar material relative to the grinding feeding direction in the existing clamping mechanism of the semiconductor rounding machine is a fixed value and cannot be adjusted, and the angle completely depends on the state of equipment during assembly. When the round bar needs to be ground, the working condition that the axis of the bar deviates from the grinding feeding direction occurs, the angle adjustment of the axis of the bar cannot be realized, the requirement on the cylindricity of the silicon bar cannot be met, and the production requirement cannot be met. To the above-mentioned problem, put forward the utility model discloses specially.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a centre gripping feed mechanism for adjusting semiconductor silicon rod cylindricity, this centre gripping feed mechanism not only can press from both sides tight bar and drive the bar rotatory, but also can adjust bar axis direction, realizes the round bar grinding to the bar, satisfies the cylindricity requirement.
In order to achieve the above object, the utility model provides a following technical scheme:
The utility model provides a centre gripping feed mechanism for adjusting semiconductor silicon rod cylindricity, including feeding the slip table, the swivelling joint platform with arrange the swivelling joint bench in and be used for pressing from both sides tight and the fixture of rotatory bar, but the swivelling joint platform horizontal rotation arrange in the axis that is used for adjusting the bar on feeding the slip table and makes its direction of feed that is on a parallel with the bar, it is provided with a plurality of clamp plates to feed on the slip table, the clamp plate sets up to "L" type structure, the one end detachable of clamp plate is installed on feeding the slip table, the other end is arranged in on the swivelling joint bench and is used for compressing tightly the swivelling joint.
Preferably, the clamping mechanism comprises a head frame assembly and a tail frame assembly which are arranged oppositely, a protruding block is arranged at one end of the rotary connecting table along the bar feeding direction, the head frame assembly is fixedly mounted on the protruding block in a fixed mode, and the tail frame assembly can be mounted on the rotary connecting table in a back-and-forth sliding mode along the bar feeding direction.
Preferably, the number of the pressing plates is 2, the pressing plates are respectively arranged on two sides of the rotary connecting table along the feeding direction of the bar stock, and protruding edges matched with the pressing plates are reserved on the outer sides of the protruding blocks.
Preferably, the middle part of feeding the slip table is provided with the location axle, the lower extreme of swivelling joint platform is provided with the mounting hole with location axle assorted, the one end fixed mounting of location axle is on feeding the slip table, and the mounting hole on the swivelling joint platform is arranged in to the other end, and the swivelling joint platform can be rotatory around the location axle.
Preferably, still include and be used for driving the rotatory adjustment subassembly of swivelling joint platform around the location axle, the adjustment subassembly includes removal pivot, adjusting screw and pivot groove block, it is provided with the first recess of rectangular shape to feed the slip table upper end along its length direction's one end, first recess is on a parallel with the width direction who feeds the slip table, it is provided with the second recess to feed on the slip table along its length direction's the side, the position of second recess corresponds with the position of first recess, be provided with the through-hole between second recess and the first recess, the other end of first recess is provided with the circular port, adjusting screw's head sets up to interior hexagonal cylinder head, the afterbody sets up to the smooth cylindrical structure in surface, adjusting screw's middle part is provided with the external screw thread, adjusting screw's afterbody passes the through-hole rotatable and arranges in the circular port in, adjusting screw's head is arranged in the second recess, the rotating shaft groove block is sleeved on the adjusting screw and is in threaded connection with the adjusting screw, a strip-shaped third groove perpendicular to the adjusting screw is formed in the upper end of the rotating shaft groove block, a second mounting hole matched with the upper portion of the moving rotating shaft is formed in the lower end of the rotary connecting table, one end of the moving rotating shaft is arranged in the third groove, the other end of the moving rotating shaft is arranged in the second mounting hole, and the moving rotating shaft 105 and the second mounting hole are in gapless fit.
Preferably, the adjusting screw is sleeved with a screw sleeve, the screw sleeve is fixed on the adjusting screw, and the screw sleeve and the head of the adjusting screw are respectively arranged at the outer sides of the two ends of the through hole.
Preferably, the screw sleeve is fixed to the adjusting screw by a taper pin.
Preferably, the shape of the second groove is adapted to the head structure of the adjusting screw rod, and the head of the adjusting screw rod can rotate in the second groove.
The adjusting component is arranged at one end, close to the tailstock component, of the feeding sliding table.
Preferably, the outer side surface of the protruding block along the bar feeding direction is of an arc surface structure, the edges of the two sides of the rotating connecting table along the bar feeding direction and the end part of one end of the pressing plate pressing the rotating connecting table are of arc structures, and the arc surfaces of the protruding block, the arcs of the edges of the two sides of the rotating connecting table and the arcs of the end part of the pressing plate are all centered on the axis of the positioning shaft.
Preferably, the swivelling joint bench is provided with slide, guide rail and lead screw, and on the slide was arranged in to the tailstock subassembly, guide rail and lead screw were on a parallel with the direction setting that the bar fed, the lower extreme fixedly connected with slider and the nut fixing base of slide, slide pass through the slider and connect on the guide rail, and the slide passes through the nut fixing base and connects on the lead screw, and the one end and the motor output of lead screw are connected.
Preferably, the headstock assembly and the tailstock assembly both comprise a chuck and a motor, and the output end of the motor is connected with the chuck.
Preferably, the hubs of the head and tail assemblies are coaxial.
Compared with the prior art, the beneficial effects of the utility model are as follows:
The utility model provides a centre gripping feed mechanism for adjusting semiconductor silicon rod cylindricity, this centre gripping feed mechanism not only can press from both sides tight bar and drive the bar rotatory, but also can be through adjusting the angle of swivelling joint platform for feeding the slip table, indirectly adjusts bar axis direction, makes the direction of bar axis parallel with bar direction of feed, realizes the round bar grinding to the bar, satisfies the cylindricity requirement.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings described below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
fig. 1 is a schematic structural view of a clamping and feeding mechanism for adjusting the cylindricity of a semiconductor silicon rod according to the present invention.
Fig. 2 is a cross-sectional view of the clamping and feeding mechanism for adjusting the cylindricity of the semiconductor silicon rod according to the present invention.
Fig. 3 is a cross-sectional view of the adjusting assembly of the present invention.
fig. 4 is a schematic structural diagram of the adjusting assembly of the present invention.
In the figure: 1-feeding sliding table, 2-rotary connecting table, 21-convex block, 22-guide rail, 23-lead screw fixing seat, 24-lead screw, 25-nut fixing seat, 26-convex edge, 3-positioning shaft, 4-pressing plate, 5-sliding plate, 51-sliding block, 6-motor, 7-headstock assembly, 8-tailstock assembly, 9-bar, 10-adjusting assembly, 101-adjusting screw, 102-screw sleeve, 103-conical pin, 104-rotating shaft groove block, 105-moving rotating shaft, 106-first groove, 107-third groove.
Detailed Description
The core of the utility model lies in providing a centre gripping feed mechanism for adjusting semiconductor silicon rod cylindricity, this centre gripping feed mechanism not only can press from both sides tight bar and drive the bar rotatory, but also can adjust bar axis direction, realizes the round bar grinding to the bar, satisfies the cylindricity requirement.
In order to make the technical solution of the present invention better understood by those skilled in the art, the following description is given with reference to the accompanying drawings of the present invention for clear and complete description of the technical solution of the present invention. Based on the embodiments in the present application, other similar embodiments obtained by persons of ordinary skill in the art without any creative effort shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for the purpose of illustrating the present invention and not for the purpose of limiting the same.
As shown in fig. 1 to 4, the clamping and feeding mechanism for adjusting the cylindricity of a semiconductor silicon rod provided in the present embodiment includes a feeding sliding table 1, an adjusting assembly 10, a rotary connecting table 2 and a clamping mechanism disposed on the rotary connecting table 2 for clamping and rotating a rod 9, a positioning shaft 3 is disposed on the middle portion of the feeding sliding table 1, a mounting hole matched with the positioning shaft 3 is disposed in the middle portion of the lower end of the rotary connecting table 2, one end of the positioning shaft 3 is fixedly mounted on the feeding sliding table 1 by a screw, and the other end is disposed in the mounting hole on the rotary connecting table 2.
The adjusting assembly 10 comprises a moving rotating shaft 105, an adjusting screw 101 and a rotating shaft groove block 104, wherein one end of the upper end of the feeding sliding table 1 along the length direction is provided with a first strip-shaped groove 106, preferably, the first groove 106 is arranged at one end of the feeding sliding table 1 close to the tailstock assembly 8, the first groove 106 is parallel to the width direction of the feeding sliding table 1, the side surface of the feeding sliding table 1 along the length direction is provided with a second groove, the position of the second groove corresponds to the position of the first groove 106, a through hole is arranged between the second groove and the first groove 106, the other end of the first groove 106 is provided with a circular hole, the head of the adjusting screw 101 is provided with an inner hexagonal cylinder head, the tail is provided with a cylindrical structure with a smooth surface, the middle part of the adjusting screw 101 is provided with an external thread, the tail of the adjusting screw 101 passes through the through hole and is rotatably arranged in the, the shape of the second groove is adapted to the head structure of the adjusting screw 101, so that the end of the head of the adjusting screw 101 is flush with the outer side surface of the feeding sliding table 1, the aesthetic feeling of the whole device is increased, and meanwhile, the situation that an operator is accidentally injured by the extending part of the adjusting screw 101 because the head of the adjusting screw 101 extends out of the side surface of the feeding sliding table 1 is avoided. The head of the adjusting screw 101 can rotate in the second groove, the adjusting screw 101 can rotate freely in the through hole, the rotating shaft groove block 104 is sleeved on the adjusting screw 101 and is in threaded connection with the adjusting screw 101, the rotating shaft groove block 104 moves left and right along the adjusting screw 101 when the adjusting screw 101 rotates, a strip-shaped third groove 107 perpendicular to the adjusting screw 101 is arranged at the upper end of the rotating shaft groove block 104, a second mounting hole matched with the upper portion of the moving rotating shaft 105 is arranged at the lower end of the rotary connecting table 2, one end of the moving rotating shaft 105 is arranged in the third groove 107, the other end of the moving rotating shaft 105 is arranged in the second mounting hole, and the moving rotating shaft 105 and the second mounting hole are in gapless fit.
The adjusting screw 101 is sleeved with a screw sleeve 102, the screw sleeve 102 is fixed on the adjusting screw 101 through a taper pin 103, the heads of the screw sleeve 102 and the adjusting screw 101 are respectively arranged at the outer sides of the two ends of the through hole, the position of the adjusting screw 101 is limited in this way, so that the adjusting screw cannot move left and right when rotating, the rotating position of the tail part of the adjusting screw 101 in the circular hole is not changed, so that when the adjusting screw 101 rotates, the rotating shaft slot block 104 can move left and right along the adjusting screw 101, the lower part of the moving rotating shaft 105 moves along the length direction of the first groove 106 and the length direction of the third groove 107, the upper part of the moving rotating shaft 105 drives the rotary connecting table 2 to rotate around the positioning shaft 3, the clamping and feeding mechanism indirectly adjusts the axial direction of the bar 9 by adjusting the angle of the rotary connecting table 2 relative to the feeding sliding table 1, so that the axial direction of the bar 9 is parallel to the feeding direction of the bar 9.
Feed and be provided with a plurality of clamp plates 4 on the slip table 1, clamp plate 4 sets up to "L" type structure, it is preferred, clamp plate 4 sets up to 2, set up respectively in swivelling joint platform 2 along bar 9 direction of feed's both sides, the one end detachable of clamp plate 4 installs on feeding slip table 1, the other end is arranged in and is used for compressing tightly swivelling joint platform 2 on swivelling joint platform 2 and fix on feeding slip table 1, swivelling joint platform 2 is provided with protruding piece 21 along bar 9 direction of feed's one end, protruding piece 21's the outside is left with clamp plate 4 complex protruding limit 26.
The outer side surface of the protruding block 21 in the feeding direction of the bar 9 is set to be an arc surface structure, the two side edges of the rotary connecting table 2 in the feeding direction of the bar 9 and the end part of the pressing plate 4 pressing one end of the rotary connecting table 2 are all set to be arc structures, the arc surfaces of the protruding block 21, the arcs of the two side edges of the rotary connecting table 2 and the arcs of the end part of the pressing plate 4 all use the axis of the positioning shaft 3 as the center of a circle, the arc surfaces of the protruding block 21, the arcs of the two side edges of the rotary connecting table 2 and the arcs of the end part of the pressing plate 4 enable the rotary connecting table 2 to rotate around the positioning shaft 3 more smoothly, and the use of materials can be saved due to the design, and.
Preferably, as a preferred embodiment, one end of the pressing plate 4 is connected to the feeding sliding table 1 through a bolt, when the axial direction of the bar 9 needs to be adjusted, the bolt is loosened, the adjusting screw 101 is rotated by using an allen key according to the angle of deviation of the axial direction of the bar 9 relative to the feeding direction of the bar 9 in production, and then the angle of the rotary connecting table 2 relative to the feeding sliding table 1 is adjusted, so that the axial direction of the bar 9 is parallel to the feeding direction of the bar 9, after the adjustment is completed, the bolt on the pressing plate 4 is screwed, the pressing plate 4 is fixed on the feeding sliding table 1, and then the rotary connecting table 2 is pressed and fixed on the feeding sliding table 1.
Fixture is including relative headstock subassembly 7 and tailstock subassembly 8 that sets up, be provided with slide 5 on the swivelling joint platform 2, lead screw fixing base 23, guide rail 22 and lead screw 24, guide rail 22 sets up two, guide rail 22 and lead screw 24 are on a parallel with the direction setting that bar 9 fed, lead screw fixing base 23 sets up the one end that is close to protruding piece 21 on swivelling joint platform 2, lead screw fixing base 23 is arranged in to lead screw 24's one end, the other end is connected with 6 output of motor, slide 5's lower extreme fixedly connected with slider 51 and nut fixing base 25, slide 5 passes through slider 51 and connects on guide rail 22, connect on lead screw 24 through nut fixing base 25, slide 5 can follow guide rail 22 and lead screw 24 and make a round trip to slide under the drive of motor. The headstock assembly 7 is fixedly mounted on the protruding block 21, the tailstock assembly 8 is arranged on the sliding plate 5, and under the driving of the sliding plate 5, the tailstock assembly 8 can slide back and forth relative to the headstock assembly 7, so that the distance between the headstock assembly 7 and the tailstock assembly 8 is changed, and bar materials 9 with different lengths can be clamped. The headstock assembly 7 and the tailstock assembly 8 both comprise chucks and motors, the output ends of the motors are connected with the chucks, the chucks of the headstock assembly 7 and the chucks of the tailstock assembly 8 are the same in axle center, the headstock assembly 7 and the tailstock assembly 8 clamp the bar 9, and the bar 9 is driven to rotate by the motors.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. The utility model provides a centre gripping feed mechanism for adjusting semiconductor silicon rod cylindricity, a serial communication port, including feeding the slip table, swivelling joint platform and arrange the swivelling joint bench in and be used for pressing from both sides the fixture of tight and rotatory bar, but swivelling joint platform horizontal rotation arrange in the axis that is used for adjusting the bar on feeding the slip table and make its direction of feed that is on a parallel with the bar, it is provided with a plurality of clamp plates to feed on the slip table, the clamp plate sets up to "L" type structure, the one end detachable of clamp plate is installed on feeding the slip table, the other end is arranged in on the swivelling joint bench and is used for compressing tightly the swivelling joint platform.
2. The clamping and feeding mechanism for adjusting the cylindricity of the semiconductor silicon rod as recited in claim 1, wherein the clamping mechanism comprises a head frame assembly and a tail frame assembly which are oppositely arranged, a protruding block is arranged at one end of the rotary connecting table along the feeding direction of the rod material, the head frame assembly is fixedly arranged on the protruding block, and the tail frame assembly is arranged on the rotary connecting table in a manner of sliding back and forth along the feeding direction of the rod material.
3. The clamping and feeding mechanism for adjusting the cylindricity of the semiconductor silicon rod as claimed in claim 2, wherein the number of the pressing plates is 2, the pressing plates are respectively arranged at two sides of the rotary connecting table along the feeding direction of the rod material, and the outer side of the convex block is provided with a convex edge matched with the pressing plate.
4. The clamping and feeding mechanism for adjusting the cylindricity of the semiconductor silicon rod according to claim 2 or 3, wherein a positioning shaft is arranged at the middle part of the feeding sliding table, a mounting hole matched with the positioning shaft is arranged at the lower end of the rotary connecting table, one end of the positioning shaft is fixedly arranged on the feeding sliding table, the other end of the positioning shaft is arranged in the mounting hole on the rotary connecting table, and the rotary connecting table can rotate around the positioning shaft.
5. The clamping and feeding mechanism for adjusting the cylindricity of the semiconductor silicon rod according to claim 4, further comprising an adjusting component for driving the rotary connecting table to rotate around the positioning shaft, wherein the adjusting component comprises a movable rotating shaft, an adjusting screw rod and a rotating shaft groove block, one end of the upper end of the feeding sliding table along the length direction of the feeding sliding table is provided with a first elongated groove, the first groove is parallel to the width direction of the feeding sliding table, the side surface of the feeding sliding table along the length direction of the feeding sliding table is provided with a second groove, the position of the second groove corresponds to the position of the first groove, a through hole is arranged between the second groove and the first groove, the other end of the first groove is provided with a circular hole, the head of the adjusting screw rod is arranged to be an inner hexagonal cylinder head, the tail of the adjusting screw rod is arranged to be a cylindrical structure with a smooth surface, the middle part of the adjusting screw rod, the head of the adjusting screw is arranged in the second groove, the adjusting screw can freely rotate in the through hole, the rotating shaft groove block is sleeved on the adjusting screw and is in threaded connection with the adjusting screw, a strip-shaped third groove perpendicular to the adjusting screw is arranged at the upper end of the rotating shaft groove block, a second mounting hole matched with the upper portion of the moving rotating shaft is arranged at the lower end of the rotary connecting table, one end of the moving rotating shaft is arranged in the third groove, the other end of the moving rotating shaft is arranged in the second mounting hole, and the moving rotating shaft and the second mounting hole are in gapless fit.
6. The clamping and feeding mechanism for adjusting the cylindricity of the semiconductor silicon rod as recited in claim 5, wherein the adjusting screw is sleeved with a screw sleeve, the screw sleeve is fixed on the adjusting screw, and the screw sleeve and the head of the adjusting screw are respectively arranged at the outer sides of the two ends of the through hole.
7. The clamping and feeding mechanism for adjusting the cylindricity of semiconductor silicon rods as recited in claim 6, wherein the second groove is shaped to accommodate the head structure of the adjusting screw, and the head of the adjusting screw is rotatable in the second groove.
8. The clamping and feeding mechanism for adjusting the cylindricity of the semiconductor silicon rod as recited in claim 6, wherein the adjusting assembly is arranged at one end of the feeding sliding table close to the tailstock assembly.
9. The clamping and feeding mechanism for adjusting the cylindricity of the semiconductor silicon rod as claimed in any one of claims 5 to 8, wherein the outer side surface of the convex block along the feeding direction of the rod is provided with an arc surface structure, the edges of the two sides of the rotary connecting table along the feeding direction of the rod and the end part of one end of the pressing plate pressing the rotary connecting table are provided with arc structures, and the arc surface of the convex block, the arcs of the edges of the two sides of the rotary connecting table and the arc of the end part of the pressing plate are all centered on the axis of the positioning shaft.
10. The clamping and feeding mechanism for adjusting the cylindricity of the silicon rod as claimed in claim 9, wherein the rotary connecting table is provided with a slide plate, a guide rail and a lead screw, the tailstock assembly is arranged on the slide plate, the guide rail and the lead screw are arranged in parallel with the feeding direction of the rod material, the lower end of the slide plate is fixedly connected with a slide block and a nut fixing seat, the slide plate is connected on the guide rail through the slide block, the slide plate is connected on the lead screw through the nut fixing seat, and one end of the lead screw is connected with the output end of the motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920177926.6U CN209737186U (en) | 2019-01-31 | 2019-01-31 | Clamping and feeding mechanism for adjusting cylindricity of semiconductor silicon rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920177926.6U CN209737186U (en) | 2019-01-31 | 2019-01-31 | Clamping and feeding mechanism for adjusting cylindricity of semiconductor silicon rod |
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| Publication Number | Publication Date |
|---|---|
| CN209737186U true CN209737186U (en) | 2019-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920177926.6U Active CN209737186U (en) | 2019-01-31 | 2019-01-31 | Clamping and feeding mechanism for adjusting cylindricity of semiconductor silicon rod |
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| CN (1) | CN209737186U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109648409A (en) * | 2019-01-31 | 2019-04-19 | 青岛高测科技股份有限公司 | It is a kind of for adjusting the grip(per) feed mechanism of semiconductor silicon rod cylindricity |
-
2019
- 2019-01-31 CN CN201920177926.6U patent/CN209737186U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109648409A (en) * | 2019-01-31 | 2019-04-19 | 青岛高测科技股份有限公司 | It is a kind of for adjusting the grip(per) feed mechanism of semiconductor silicon rod cylindricity |
| CN109648409B (en) * | 2019-01-31 | 2024-05-31 | 青岛高测科技股份有限公司 | Clamping and feeding mechanism for adjusting cylindricity of semiconductor silicon rod |
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