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CN209492015U - A kind of segmentizing unit for wafer flow manufacture - Google Patents

A kind of segmentizing unit for wafer flow manufacture Download PDF

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Publication number
CN209492015U
CN209492015U CN201821687847.1U CN201821687847U CN209492015U CN 209492015 U CN209492015 U CN 209492015U CN 201821687847 U CN201821687847 U CN 201821687847U CN 209492015 U CN209492015 U CN 209492015U
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CN
China
Prior art keywords
groups
threaded rod
plate
respectively arranged
holes
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Expired - Fee Related
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CN201821687847.1U
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Chinese (zh)
Inventor
王昌华
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Jiangsu Ying Rui Semiconductor Co Ltd
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Jiangsu Ying Rui Semiconductor Co Ltd
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Priority to CN201821687847.1U priority Critical patent/CN209492015U/en
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Expired - Fee Related legal-status Critical Current
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Abstract

The utility model relates to the technical fields of wafer flow manufacture auxiliary equipment can be convenient the monocrystalline silicon section that silicon single crystal rod is cut into specific length as requested more particularly to a kind of segmentizing unit for wafer flow manufacture, reduces and uses limitation;And the phenomenon that can be convenient the mobile direction of control cutter, reducing cutting offset, reduces the wasting of resources, improves use reliability;Including workbench, four groups of supporting legs, cutter and two groups of knife handles;It further include left arc pressuring plate, right arc pressuring plate, four groups of limit threaded rods, support plate and four groups of fixture nuts, it further includes pressing plate, four groups of fixed springs and cushion that workbench, which includes upper mounting plate and lower platform,;Threaded rod is adjusted before further including, adjusts threaded rod, two groups of front gears, two groups of backgears, two groups of transmission gears, two groups of fixed links and two groups of fixed balls afterwards, is respectively arranged with two groups of shift(ing) rings on two groups of knife handles.

Description

A kind of segmentizing unit for wafer flow manufacture
Technical field
The utility model relates to the technical fields of wafer flow manufacture auxiliary equipment, are used for wafer flow more particularly to one kind The segmentizing unit of piece manufacture.
Background technique
It is well known that the segmentizing unit for wafer flow manufacture is that one kind is used for during the wafer flow manufacturing, After melting polysilicon and pulling out silicon single crystal rod, dissection processing is carried out to it, to facilitate its subsequent to be cut into the attached of wafer flow Belong to device, is widely used in a variety of applications in the field of wafer flow production;The existing dissection for wafer flow manufacture Device includes workbench, four groups of supporting legs, cutter and two groups of knife handles, and it is left front that four groups of supporting leg tops are separately mounted to workbench bottom Side, left rear side, forward right side and right lateral side, two groups of knife handles are separately mounted to cutter front-end and back-end;It is existing to be used for wafer flow The segmentizing unit of piece manufacture is in use, the required silicon single crystal rod for carrying out dissection is placed on workbench, staff is hand-held Knife handle carries out dissection processing to silicon single crystal rod using cutter by cutter close to silicon single crystal rod;It is existing to be used for wafer flow It being found in the segmentizing unit use of manufacture, silicon single crystal rod is cut into the monocrystalline silicon section of specific length by inconvenience as requested, It is higher using limitation;And it is inconvenient to the phenomenon that controlling the mobile direction of cutter, being easy to appear cutting offset, causes to provide Source waste, it is poor so as to cause its use reliability.
Utility model content
It can be convenient in order to solve the above technical problems, the utility model provides one kind and be cut into silicon single crystal rod as requested The monocrystalline silicon section of specific length reduces and uses limitation;And it can be convenient the mobile direction of control cutter, it is inclined to reduce cutting The phenomenon that shifting, reduces the wasting of resources, improves the segmentizing unit for wafer flow manufacture of use reliability.
A kind of segmentizing unit for wafer flow manufacture of the utility model, including workbench, four groups of supporting legs, cutter With two groups of knife handles, two groups of knife handles are separately mounted to cutter front-end and back-end;It further include left arc pressuring plate, the connection of right arc Plate, four groups of limit threaded rods, support plate and four groups of fixture nuts, the workbench include upper mounting plate and lower platform, the left arc Shape connecting plate and right arc pressuring plate both ends are connect with upper mounting plate and lower platform left end and right end respectively, four groups of supporting leg tops Connect respectively with lower platform bottom front left side, left rear side, forward right side and right lateral side, four groups of limit threaded rod tips respectively with Lower platform bottom front left side, left rear side, forward right side are connected with right lateral side, the support plate front left side, left rear side, forward right side and the right side Rear side is respectively arranged with four groups of through-holes, and four groups of limit threaded rods bottom end is each passed through four groups of through-holes, described four groups fixed spiral shells The other spiral shell of mother stock is filled on four groups of limit threaded rods, is respectively arranged in multiple groups on the upper mounting plate and lower platform under perforation and multiple groups Perforation, further includes pressing plate, four groups of fixed springs and cushion, four groups of fixed spring tops and bottom end respectively with pressing plate bottom It is connected with upper mounting plate top left front side, left rear side, forward right side with right lateral side, the cushion is mounted on pressing plate bottom;Further include Preceding adjusting threaded rod, afterwards adjusting threaded rod, two groups of front gears, two groups of backgears, two groups of transmission gears, two groups of fixed links and two groups Fixed ball, the left arc pressuring plate and right arc pressuring plate first half region and later half region are respectively arranged with two groups of left connecting holes With two groups of right connecting holes, adjusted before described threaded rod and it is rear adjust threaded rod left end and right end be each passed through two groups of left connecting holes and Two groups of right connecting holes, two groups of front gears and two groups of backgears adjust threaded rod before being separately mounted to and rear adjusting threaded rod is left End and right end, the left arc pressuring plate and right arc pressuring plate middle section are respectively arranged with two groups of fixation holes, and described two groups Fixed link one end is connect with two groups of transmission gear middle sections respectively, and two groups of fixed link other ends are each passed through two groups and fix Two groups of Kong Bingyu fixed ball connections, two groups of transmission gears are engaged with two groups of front gears and two groups of backgears respectively, and described two Rotating handles after rotating handles and two groups before being respectively arranged with two groups on group front gear and two groups of backgears, on two groups of knife handles Two groups of shift(ing) rings are respectively arranged with, are respectively arranged on two groups of shift(ing) rings and preceding adjusting threaded rod and rear adjusting threaded rod phase Corresponding internal screw thread, adjusts threaded rod before described and the rear threaded rod difference spiral shell dress that adjusts passes through two groups of shift(ing) rings, the cutter Between upper mounting plate and lower platform.
A kind of segmentizing unit for wafer flow manufacture of the utility model further includes two groups of Zola's ropes, two groups of right drawings Rope, two groups of fixed plates and spool, the pressing plate left area and right half area are respectively arranged with two groups of left drawing holes and two groups right Drawing hole, two groups of Zolas rope and two groups of right drawstring one end be each passed through two groups of left drawing holes and two groups of right drawing holes and with it is upper Mesa top connection, two groups of fixed plates are separately mounted to first half region and later half region at the top of pressing plate, and fix at two groups Two groups of circular holes are respectively arranged on plate, the front end and rear end are each passed through two groups of circular holes, and in front end and rear end Two groups of swivel plates are respectively arranged with, two groups of swivel plate bottoms are respectively arranged with two groups of swing handles, two groups of Zolas rope It is fastened on spool with two groups of right drawstring other ends.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes the first ball of multiple groups, and described two The first arc groove of multiple groups, the multiple groups are respectively arranged on the left connecting hole of group, two groups of right connecting holes and two groups of fixation hole inner sidewalls First ball is located in the first arc groove of multiple groups, and the first ball of multiple groups respectively with preceding adjusting threaded rod, adjust spiral shell afterwards Rasp bar and two groups of fixed link outer wall contacts.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes connection gear, connecting shaft and gear Block, the support plate middle section are provided with connecting hole, the connecting shaft top pass through connecting hole and with stop bottom central area Domain connection, the connection gear is mounted on connecting shaft bottom end, is provided on four groups of fixture nut outer walls and connection gear Corresponding groove, and four groups of fixture nuts are engaged with connection gear.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes the second ball of multiple groups, the gear The second arc groove of multiple groups is respectively arranged on block bottom and connection hole inner sidewall, second ball of multiple groups is located at multiple groups In second arc groove, and the second ball of multiple groups is contacted at the top of support plate with connecting shaft outer wall respectively.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes multiple groups non-slip mat, the multiple groups Non-slip mat is separately mounted to perforate on inner sidewall under perforation and multiple groups in multiple groups.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes four groups of baffles, four groups of gears Plate is separately mounted to four groups of limit threaded rod bottom ends.
A kind of segmentizing unit for wafer flow manufacture of the utility model further includes that two groups of left neonychiums and two groups are right Neonychium, two groups of left neonychiums and two groups of right neonychiums are separately mounted on the inside of two groups of left drawing holes and two groups of right drawing holes On wall, and two groups of left neonychiums and two groups of right neonychiums are contacted with two groups of Zola's ropes and two groups of right drawstrings respectively.
Compared with prior art the utility model has the following beneficial effects: pressing plate can be lifted above, four groups of fixed springs are stretched, it will Multiple groups silicon single crystal rod is each passed through in multiple groups and perforates under perforation and multiple groups, connects multiple groups silicon single crystal rod bottom end with support plate top Touching, and loosen pressing plate, pressing plate is moved down under the elastic force effect of four groups of support springs and is contacted at the top of multiple groups silicon single crystal rod, And four groups of fixture nuts are rotated simultaneously, it moves up or down support plate along four groups of limit threaded rods, adjusts silicon single crystal rod bottom The distance between end and required cut place, i.e., it is identical as specific length, and then can be convenient and cut silicon single crystal rod as requested It is cut into the monocrystalline silicon section of specific length, reduces and uses limitation;And can be behind the position of fixed multiple groups silicon single crystal rod, rotation Rotating handles after rotating handles or two groups before two groups, thus two groups of front gears of rotation or two groups of backgears, make two groups of backgears or Two groups of front gears rotate under the drive of two groups of transmission gears with two groups of front gears and two groups of backgears together, so as to so that two Group shift(ing) ring is moved to the left along preceding adjusting threaded rod and the rear threaded rod that adjusts, so as to so that two groups of knife handles drive cutter before It adjusts threaded rod and the rear threaded rod that adjusts moves between upper mounting plate and lower platform, the direction for facilitating control cutter mobile leads to It crosses cutter to cut multiple groups silicon single crystal rod, cutter will not shift in moving process, cut so as to reduce The phenomenon that cutting offset reduces the wasting of resources, improves use reliability.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is left arc pressuring plate, transmission gear, fixed link, the connection schematic diagram of fixed ball and the first ball;
Fig. 3 is the connection signal top view of cutter, two groups of knife handles and two groups of shift(ing) rings;
Fig. 4 is the partial enlarged view in the portion A in Fig. 1;
It is attached marked in the figure: 1, supporting leg;2, cutter;3, knife handle;4, left arc pressuring plate;5, threaded rod is limited;6, it supports Plate;7, fixture nut;8, upper mounting plate;9, pressing plate;10, fixed spring;11, cushion;12, preceding adjusting threaded rod;13, nipper Wheel;14, transmission gear;15, fixed link;16, fixed ball;17, preceding rotating handles;18, shift(ing) ring;19, right drawstring;20, fixed Plate;21, spool;22, swing handle;23, the first ball;24, connection gear;25, connecting shaft;26, block;27, the second ball; 28, non-slip mat;29, baffle;30, right neonychium;31, swivel plate.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.
As shown in Figures 1 to 4, a kind of segmentizing unit for wafer flow manufacture of the utility model, including workbench, Four groups of supporting legs 1, cutter 2 and two groups of knife handles 3, two groups of knife handles 3 are separately mounted to 2 front-end and back-end of cutter;It further include left arc Shape connecting plate 4, right arc pressuring plate, four groups of limit threaded rods 5, support plate 6 and four groups of fixture nuts 7, workbench include upper flat Platform 8 and lower platform, left arc pressuring plate 4 and right arc pressuring plate both ends connect with upper mounting plate 8 and lower platform left end and right end respectively It connects, four groups of 1 tops of supporting leg are connect with lower platform bottom front left side, left rear side, forward right side and right lateral side respectively, four groups of limit screw threads 5 top of bar is connect with lower platform bottom front left side, left rear side, forward right side and right lateral side respectively, 6 front left side of support plate, left rear side, Forward right side and right lateral side are respectively arranged with four groups of through-holes, and four groups of 5 bottom ends of limit threaded rod are each passed through four groups of through-holes, and four groups are fixed Spiral shell is filled on four groups of limit threaded rods 5 nut 7 respectively, and perforation and multiple groups in multiple groups are respectively arranged on upper mounting plate 8 and lower platform Lower perforation, further includes 9, four groups of fixed springs 10 of pressing plate and cushion 11, four groups of 10 tops of fixed spring and bottom end respectively with pressure 9 bottom of plate is connected with 8 top left front side of upper mounting plate, left rear side, forward right side with right lateral side, and cushion 11 is mounted on 9 bottom of pressing plate; Threaded rod 12 is adjusted before further including, adjusts threaded rod, two groups of front gears, 13, two groups of backgears, two groups 14, two groups of transmission gear afterwards Fixed link 15 and two groups of fixed balls 16, left arc pressuring plate 4 and right arc pressuring plate first half region and later half region are respectively set There are two groups of left connecting holes and two groups of right connecting holes, preceding adjusting threaded rod 12 and rear adjusting threaded rod left end and right end are each passed through two The left connecting hole of group and two groups of right connecting holes, two groups of front gears 13 and two groups of backgears adjust threaded rod 12 with after before being separately mounted to It adjusts threaded rod left end and right end, left arc pressuring plate 4 and right arc pressuring plate middle section is respectively arranged with two groups of fixation holes, Two groups of 15 one end of fixed link are connect with two groups of 14 middle sections of transmission gear respectively, and two groups of 15 other ends of fixed link are worn respectively Cross two groups of fixation holes and connect with two groups of fixed balls 16, two groups of transmission gears 14 respectively with two groups of front gears 13 and two groups of backgears Engagement, rotating handles after rotating handles 17 and two groups before being respectively arranged with two groups on two groups of front gears 13 and two groups of backgears, two Group knife handle 3 on be respectively arranged with two groups of shift(ing) rings 18, be respectively arranged on two groups of shift(ing) rings 18 with preceding adjusting threaded rod 12 and after The corresponding internal screw thread of threaded rod is adjusted, preceding adjusting threaded rod 12 and the rear threaded rod difference spiral shell dress that adjusts pass through two groups of shift(ing) rings 18, cutter 2 are between upper mounting plate 8 and lower platform;Pressing plate can be lifted above, four groups of fixed springs are stretched, by multiple groups monocrystalline silicon Stick is each passed through in multiple groups and perforates under perforation and multiple groups, contacts multiple groups silicon single crystal rod bottom end with support plate top, and loosen Pressing plate, pressing plate is moved down under the elastic force effect of four groups of support springs and is contacted at the top of multiple groups silicon single crystal rod, and is turned simultaneously Move four groups of fixture nuts, move up or down support plate along four groups of limit threaded rods, adjust silicon single crystal rod bottom end with it is required Want the distance between cut place, i.e., it is identical as specific length, and then can be convenient and silicon single crystal rod is cut into regulation as requested The monocrystalline silicon section of length reduces and uses limitation;And it can be revolved before two groups of rotation behind the position of fixed multiple groups silicon single crystal rod Rotating handles after handle hand or two groups, so that two groups of front gears of rotation or two groups of backgears, make two groups of backgears or two groups of nippers Wheel rotates under the drive of two groups of transmission gears with two groups of front gears and two groups of backgears together, so as to so that two groups of shift(ing) rings It is moved to the left along preceding adjusting threaded rod and the rear threaded rod that adjusts, so as to so that two groups of knife handles drive cutter along preceding adjusting screw thread Bar and the rear threaded rod that adjusts move between upper mounting plate and lower platform, and the direction for facilitating control cutter mobile passes through cutter Multiple groups silicon single crystal rod is cut, cutter will not shift in moving process, so as to reduce cutting offset Phenomenon reduces the wasting of resources, improves use reliability.
A kind of segmentizing unit for wafer flow manufacture of the utility model further includes two groups of Zola's ropes, two groups of right drawings 19, two groups of fixed plates 20 of rope and spool 21,9 left area of pressing plate and right half area are respectively arranged with two groups of left drawing holes and two groups Right drawing hole, two groups of Zolas rope and two groups of right 19 one end of drawstring be each passed through two groups of left drawing holes and two groups of right drawing holes and with it is upper Mesa top connection, two groups of fixed plates 20 are separately mounted to 9 top first half region of pressing plate and later half region, and in two groups of fixed plates Two groups of circular holes are respectively arranged on 20,21 front-end and back-end of spool are each passed through two groups of circular holes, and in 21 front-end and back-end of spool Be respectively arranged with two groups of swivel plates 31, two groups of 31 bottoms of swivel plate are respectively arranged with two groups of swing handles 22, two groups of Zolas' ropes and Two groups of right 19 other ends of drawstring are fastened on spool 21;When silicon single crystal rod is shorter, two groups of rotating handles can be rotated, Two groups of swivel plates are made to drive spool rotation and two groups of Zola's ropes and two groups of right drawstrings are wrapped on spool, so that pressing plate be made to compress Four groups of support springs facilitate the position of fixed shorter silicon single crystal rod.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes the first ball of multiple groups 23, and two groups The first arc groove of multiple groups is respectively arranged on left connecting hole, two groups of right connecting holes and two groups of fixation hole inner sidewalls, multiple groups first are rolled Pearl 23 is located in the first arc groove of multiple groups, and the first ball of multiple groups 23 respectively with preceding adjusting threaded rod 12, adjust spiral shell afterwards Rasp bar and two groups of 15 outer wall of fixed link contacts;Threaded rod is adjusted before rotation, rear when adjusting threaded rod and two groups of fixed links, it can be with Threaded rod, rear adjusting threaded rod and two groups of fixed links and left arc pressuring plate are adjusted before reducing by the rolling of the first ball of multiple groups Frictional force between right arc pressuring plate, so as to convenient preceding adjusting threaded rod, rear adjusting threaded rod and two groups of fixed links Rotation.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes connection gear 24, connecting shaft 25 With block 26,6 middle section of support plate is provided with connecting hole, 25 top of connecting shaft pass through connecting hole and with 26 bottom center of block Region connection, connection gear 24 are mounted on 25 bottom end of connecting shaft, are provided with and connection gear 24 on four groups of 7 outer walls of fixture nut Corresponding groove, and four groups of fixture nuts 7 are engaged with connection gear 24;Since connection gear and four groups of fixture nuts are same When engage, therefore when rotating any one group of fixture nut, connection gear rotates together with one group of fixture nut of rotation, thus band It moves other three groups of fixture nuts while rotating, four groups of fixture nuts can be made while rising or falling equivalent distance, with convenient Support plate level rises or falls.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes the second ball of multiple groups 27, block The second arc groove of multiple groups is respectively arranged on 26 bottoms and connection hole inner sidewall, the second ball of multiple groups 27 is located at multiple groups In two arc grooves, and the second ball of multiple groups 27 is contacted with 6 top of support plate and 25 outer wall of connecting shaft respectively;It is rotated in tooth connection When dynamic, it can be reduced by the rolling of the second ball of multiple groups between connecting shaft and connection hole inner sidewall and block and support plate top Frictional force between portion, so as to facilitate the rotation of connection gear.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes multiple groups non-slip mat 28, and multiple groups are anti- Skidding 28 is separately mounted to perforate on inner sidewall under perforation and multiple groups in multiple groups;Insertion multiple groups can be enhanced by multiple groups non-slip mat It is upper perforation and multiple groups under perforation in silicon single crystal rod and multiple groups on perforate and multiple groups under perforate inner sidewall between frictional force, and The double swerve of silicon single crystal rod can be reduced, cutting effect is improved.
A kind of segmentizing unit for wafer flow manufacture of the utility model, further includes four groups of baffles 29, four groups of baffles 29 are separately mounted to four groups of 5 bottom ends of limit threaded rod;It can reduce by four groups of fixture nuts by four groups of baffles by four groups of limit spiral shells It is fallen on rasp bar.
A kind of segmentizing unit for wafer flow manufacture of the utility model further includes that two groups of left neonychiums and two groups are right Neonychium 30, two groups of left neonychiums and two groups of right neonychiums 30 are separately mounted on the inside of two groups of left drawing holes and two groups of right drawing holes On wall, and two groups of left neonychiums and two groups of right neonychiums 30 are contacted with two groups of Zola's ropes and two groups of right drawstrings 19 respectively;It can be with It is restricted by two groups of left neonychiums and two groups of right neonychiums to two groups of Zolas and two groups of right drawstrings plays a certain protective role, two When group Zola rope and two groups of right drawstrings iterate through two groups of left drawing holes and two groups of right drawing holes, reduce to two groups of Zola's ropes and two The damage of the right drawstring of group.
A kind of segmentizing unit for wafer flow manufacture of the utility model can lift pressing plate at work above, draw Four groups of fixed springs are stretched, multiple groups silicon single crystal rod is each passed through in multiple groups under perforation and multiple groups and is perforated, multiple groups silicon single crystal rod bottom is made End with contacted at the top of support plate, and loosen pressing plate, pressing plate moved down under the elastic force effect of four groups of support springs and with it is more Contact at the top of group silicon single crystal rod, and rotates four groups of fixture nuts simultaneously, make support plate along four groups of limit threaded rods upward or downward It is mobile, adjust the distance between silicon single crystal rod bottom end and required cut place, i.e., it is identical as specific length, so can be convenient by Silicon single crystal rod is cut into the monocrystalline silicon section of specific length as requested, reduces and uses limitation;And it can be in fixed multiple groups list Behind the position of crystalline silicon rod, rotating handles after rotating handles or two groups before two groups of rotation, thus after two groups of front gears of rotation or two groups Gear makes two groups of backgears or two groups of front gears under the drive of two groups of transmission gears with two groups of front gears and two groups of backgears one With rotation, so as to so that two groups of shift(ing) rings are moved to the left along preceding adjusting threaded rod and the rear threaded rod that adjusts, so as to so that two Group knife handle drives cutter to move between upper mounting plate and lower platform along preceding adjusting threaded rod and the rear threaded rod that adjusts, and facilitates control The mobile direction of cutter, cuts multiple groups silicon single crystal rod by cutter, cutter will not occur in moving process Offset reduces the wasting of resources so as to reduce the phenomenon that cutting deviates, and improves use reliability, when silicon single crystal rod is shorter, Two groups of rotating handles can be rotated, two groups of swivel plates is made to drive spool rotation and be wrapped in two groups of Zola's ropes and two groups of right drawstrings On spool, so that pressing plate be made to compress four groups of support springs, facilitates the position of fixed shorter silicon single crystal rod, spiral shell is adjusted before rotation It is rasp bar, rear when adjusting threaded rod and two groups of fixed links, adjusted before being reduced by the rolling of the first ball of multiple groups threaded rod, after The frictional force between threaded rod and two groups of fixed links and left arc pressuring plate and right arc pressuring plate is adjusted, before convenience Threaded rod, the rear rotation for adjusting threaded rod and two groups of fixed links are adjusted, since connection gear engages simultaneously with four groups of fixture nuts, Therefore when rotating any one group of fixture nut, connection gear rotates together with one group of fixture nut of rotation, to drive in addition Three groups of fixture nuts rotate simultaneously, can make four groups of fixture nuts while rise or fall equivalent distance, to facilitate support plate Level rises or falls, and in connection gear rotation, can reduce connecting shaft and connecting hole by the rolling of the second ball of multiple groups Locate the frictional force between inner sidewall and at the top of block and support plate, so as to facilitate the rotation of connection gear, Ke Yitong Cross multiple groups non-slip mat enhancing insertion multiple groups on perforation and multiple groups under perforation in silicon single crystal rod and multiple groups on perforation and multiple groups under wear Frictional force between the inner sidewall of hole, and the double swerve of silicon single crystal rod can be reduced, cutting effect is improved, four groups can be passed through Baffle reduces by four groups of fixture nuts by falling on four groups of limit threaded rods, can pass through two groups of left neonychiums and two groups of right neonychiums Two groups of Zola's ropes and two groups of right drawstrings are played a certain protective role, iterate through two in two groups of Zola's ropes and two groups of right drawstrings When the left drawing hole of group and two groups of right drawing holes, the damage to two groups of Zolas ropes and two groups of right drawstrings is reduced.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change It also should be regarded as the protection scope of the utility model into modification.

Claims (8)

1. a kind of segmentizing unit for wafer flow manufacture, including workbench, four groups of supporting legs (1), cutter (2) and two groups of knives Handle (3), two groups of knife handles (3) are separately mounted to cutter (2) front-end and back-end;It is characterized in that, further including left arc pressuring plate (4), right arc pressuring plate, four groups of limit threaded rods (5), support plate (6) and four groups of fixture nuts (7), the workbench include Upper mounting plate (8) and lower platform, the left arc pressuring plate (4) and right arc pressuring plate both ends respectively with upper mounting plate (8) He Xiaping Platform left end is connected with right end, four groups of supporting legs (1) top respectively with lower platform bottom front left side, left rear side, forward right side and the right side Rear side connection, four groups of limit threaded rods (5) top is respectively and behind lower platform bottom front left side, left rear side, forward right side and the right side Side connection, support plate (6) front left side, left rear side, forward right side and right lateral side are respectively arranged with four groups of through-holes, four groups of limits Position threaded rod (5) bottom end is each passed through four groups of through-holes, and spiral shell is filled to four groups of limit threaded rods to four groups of fixture nuts (7) respectively (5) on, be respectively arranged in multiple groups under perforation and multiple groups and perforate on the upper mounting plate (8) and lower platform, further include pressing plate (9), Four groups of fixed springs (10) and cushion (11), four groups of fixed springs (10) top and bottom end respectively with pressing plate (9) bottom It is connected with upper mounting plate (8) top left front side, left rear side, forward right side with right lateral side, the cushion (11) is mounted on pressing plate (9) bottom Portion;Threaded rod (12) are adjusted before further including, adjust threaded rod, two groups of front gears (13), two groups of backgears, two groups of transmission gears afterwards (14), two groups of fixed links (15) and two groups of fixed balls (16), the left arc pressuring plate (4) and right arc pressuring plate first half region Two groups of left connecting holes and two groups of right connecting holes are respectively arranged with later half region, threaded rod (12) and rear adjusting spiral shell are adjusted before described Rasp bar left end and right end are each passed through two groups of left connecting holes and two groups of right connecting holes, tooth after two groups of front gears (13) and two groups Wheel adjusts threaded rod (12) and rear adjusting threaded rod left end and right end, the left arc pressuring plate (4) and the right side before being separately mounted to Arc pressuring plate middle section is respectively arranged with two groups of fixation holes, described two groups of fixed links (15) one end respectively with two groups of driving cogs Take turns (14) middle section connection, and two groups of fixed link (15) other ends be each passed through two groups of fixation holes and with two groups of fixed balls (16) it connects, two groups of transmission gears (14) are engaged with two groups of front gears (13) and two groups of backgears respectively, before described two groups Rotating handles, two groups of knives after rotating handles (17) and two groups before being respectively arranged with two groups on gear (13) and two groups of backgears It is respectively arranged with two groups of shift(ing) rings (18) on handle (3), is respectively arranged on two groups of shift(ing) rings (18) and preceding adjusting threaded rod (12) and afterwards the corresponding internal screw thread of threaded rod is adjusted, threaded rod (12) are adjusted before described and rear adjusting threaded rod difference spiral shell dress is logical Two groups of shift(ing) rings (18) are crossed, the cutter (2) are located between upper mounting plate (8) and lower platform.
2. a kind of segmentizing unit for wafer flow manufacture as described in claim 1, which is characterized in that further include two groups of left sides Drawstring, two groups of right drawstrings (19), two groups of fixed plates (20) and spool (21), pressing plate (9) left area and right half area point It is not provided with two groups of left drawing holes and two groups of right drawing holes, two groups of Zolas rope and two groups of right drawstring (19) one end are each passed through Two groups of left drawing holes and two groups of right drawing holes are simultaneously connect with upper table surface top, and two groups of fixed plates (20) are separately mounted to pressing plate (9) top first half region and later half region, and two groups of circular holes are respectively arranged on two groups of fixed plates (20), the spool (21) Front-end and back-end are each passed through two groups of circular holes, and are respectively arranged with two groups of swivel plates (31), institute in spool (21) front-end and back-end It states two groups of swivel plate (31) bottoms and is respectively arranged with two groups of swing handles (22), two groups of Zolas rope and two groups of right drawstrings (19) The other end is fastened on spool (21).
3. a kind of segmentizing unit for wafer flow manufacture as claimed in claim 2, which is characterized in that further include multiple groups the One ball (23) is respectively arranged with multiple groups on two groups of left connecting holes, two groups of right connecting holes and two groups of fixation hole inner sidewalls One arc groove, first ball of multiple groups (23) are located in the first arc groove of multiple groups, and the first ball of multiple groups (23) point It is not contacted with preceding adjusting threaded rod (12), rear adjusting threaded rod and two groups of fixed link (15) outer walls.
4. a kind of segmentizing unit for wafer flow manufacture as claimed in claim 3, which is characterized in that further include tooth connection Wheel (24), connecting shaft (25) and block (26), support plate (6) middle section are provided with connecting hole, the connecting shaft (25) Top passes through connecting hole and connect with block (26) bottom central zones, and the connection gear (24) is mounted on connecting shaft (25) bottom It holds, is provided with groove corresponding with connection gear (24), and four groups of fixed spiral shells on four groups of fixture nuts (7) outer wall Female (7) are engaged with connection gear (24).
5. a kind of segmentizing unit for wafer flow manufacture as claimed in claim 4, which is characterized in that further include multiple groups the Two balls (27) are respectively arranged with the second arc groove of multiple groups on block (26) bottom and connection hole inner sidewall, described more Group the second ball (27) is located in the second arc groove of multiple groups, and the second ball of multiple groups (27) is pushed up with support plate (6) respectively Portion and the contact of connecting shaft (25) outer wall.
6. a kind of segmentizing unit for wafer flow manufacture as claimed in claim 5, which is characterized in that further include that multiple groups are anti- Skidding (28), the multiple groups non-slip mat (28) are separately mounted to perforate on inner sidewall under perforation and multiple groups in multiple groups.
7. a kind of segmentizing unit for wafer flow manufacture as claimed in claim 6, which is characterized in that further include four groups of gears Plate (29), four groups of baffles (29) are separately mounted to four groups of limit threaded rod (5) bottom ends.
8. a kind of segmentizing unit for wafer flow manufacture as claimed in claim 7, which is characterized in that further include two groups of left sides Neonychium and two groups of right neonychiums (30), two groups of left neonychiums and two groups of right neonychiums (30) are separately mounted to two groups of left pumpings On pulling eye and two groups of right drawing hole inner sidewalls, and two groups of left neonychiums and two groups of right neonychiums (30) are restricted with two groups of Zolas respectively With two groups of right drawstring (19) contacts.
CN201821687847.1U 2018-10-17 2018-10-17 A kind of segmentizing unit for wafer flow manufacture Expired - Fee Related CN209492015U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109304818A (en) * 2018-10-17 2019-02-05 江苏英锐半导体有限公司 A slicing device for wafer tape-out manufacturing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109304818A (en) * 2018-10-17 2019-02-05 江苏英锐半导体有限公司 A slicing device for wafer tape-out manufacturing
CN109304818B (en) * 2018-10-17 2024-10-22 盐城苏高汽睿科技有限公司 A section device for wafer piece makes

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