CN209411790U - A kind of Finestill energy-saving apparatus purified for restoring chlorosilane - Google Patents
A kind of Finestill energy-saving apparatus purified for restoring chlorosilane Download PDFInfo
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- CN209411790U CN209411790U CN201822177720.1U CN201822177720U CN209411790U CN 209411790 U CN209411790 U CN 209411790U CN 201822177720 U CN201822177720 U CN 201822177720U CN 209411790 U CN209411790 U CN 209411790U
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- distillation column
- reboiler
- pipeline connection
- tower
- outlet
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- 239000005046 Chlorosilane Substances 0.000 title claims abstract description 31
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 238000004821 distillation Methods 0.000 claims abstract description 89
- 238000010992 reflux Methods 0.000 claims abstract description 38
- 238000000746 purification Methods 0.000 claims abstract description 23
- 238000003860 storage Methods 0.000 claims abstract description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 17
- 239000007791 liquid phase Substances 0.000 claims abstract description 15
- 230000009467 reduction Effects 0.000 claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract description 7
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical group Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 18
- 239000005052 trichlorosilane Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 7
- 239000005049 silicon tetrachloride Substances 0.000 claims description 7
- 230000008676 import Effects 0.000 claims description 3
- 238000009835 boiling Methods 0.000 claims description 2
- 229920005591 polysilicon Polymers 0.000 abstract description 12
- 238000005265 energy consumption Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000008901 benefit Effects 0.000 abstract description 4
- 239000000463 material Substances 0.000 description 15
- 239000007789 gas Substances 0.000 description 11
- 239000000047 product Substances 0.000 description 6
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 5
- 238000007670 refining Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 239000007792 gaseous phase Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910003822 SiHCl3 Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910003910 SiCl4 Inorganic materials 0.000 description 2
- 229910003818 SiH2Cl2 Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 238000011946 reduction process Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910021487 silica fume Inorganic materials 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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- Silicon Compounds (AREA)
Abstract
The utility model discloses a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, including liquid-phase reduction chlorosilane storage tank, first rectifying column, Second distillation column, third distillation column, the first reboiler, the first tower reactor pump, the second return tank, the first reflux pump, the second reflux pump, third reboiler, third condenser, third return tank, third reflux pump, third tower reactor pump；The discharge port of liquid-phase reduction chlorosilane storage tank is connected to the feed inlet of first rectifying column by delivery pump, the cold medium entrance of first rectifying column tower reactor liquid outlet and the first reboiler passes through pipeline connection, the outlet of first reboiler cold medium passes through pipeline connection with first rectifying column air inlet, the thermal medium entrance and heat source of first reboiler pass through pipeline connection, the utility model realizes production of polysilicon closed cycle, thus, heat, which rationally utilizes, to be accomplished to the Finestill energy-saving apparatus of reduction chlorosilane purification, save considerably energy consumption, resource, good economical benefit are saved.
Description
Technical field:
It is the utility model relates to the technical field of chlorosilane purification, in particular to a kind of for restoring the essence of chlorosilane purification
Evaporate energy saver.
Background technique:
Polysilicon is a kind of superelevation pure material, is used for integrated circuit, electronic device and solar battery, be human society into
The fields such as step, each department of national economy and defense technology equipment are indispensable and the most important functional material and basic material of substitution
Material, the production technology of polysilicon are mainly improved Siemens and silane thermal decomposition process, and the main production process of current country's polysilicon is
Improved Siemens.Siemens Method is that column of polysilicon is produced by way of vapor deposition, in order to improve raw material availability and
It is environmental-friendly, on the basis of the former use closed loop production technology, that is, improved Siemens, the technique by industrial silica fume with
HCl reaction, is processed into SiHCI3, then allow SiHCl3In H2Reduction deposition obtains polysilicon, reduction furnace discharge in the reduction furnace of atmosphere
Tail gas H2、SiHCl3、SiCl4、SiH2Cl2Enter exhaust gas recovery system with HCl, the recycling after separation.Pass through tail
After the processing of gas disposal process, the liquid phase material condensed out is known as restoring chlorosilane, is transported to rectification working process and carries out separating-purifying,
High-purity refining trichlorosilane is obtained after separating by rectifying column, is transported to reduction process and is continued to use.
Conventional rectification technique is used to carry out the purification of reduction chlorosilane for two tower series connection, two towers have been respectively coupled again
Device and condenser are boiled, needing to consume more steam (or hot water) and the rectifying column of recirculated water, especially first will realize
SiH2Cl2、SiHCl3、SiCl4Separation, rectifying column overall height is higher, and the number of plates is more, energy consumption is larger, once invests huge.
The energy consumption of purification process is one of main energy consumption of polysilicon system, therefore the energy consumption for reducing purification process is to reduce polysilicon life
One of the most effective approach for producing cost, solves the problems, such as that energy consumption is high in production of polysilicon purification process, further promotes polysilicon
Industry reach energy conservation, consumption reduction, safe and environment-friendly target it is increasingly important with it is urgent.
Utility model content:
The purpose of this utility model is to provide one kind to economize on resources, and good economical benefit is used to restore what chlorosilane purified
Finestill energy-saving apparatus.
The utility model is implemented by following technical solution: it is a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification,
Including liquid-phase reduction chlorosilane storage tank, first rectifying column, Second distillation column, third distillation column, the first reboiler, the first tower reactor
Pump, the reflux of the second return tank, the first reflux pump, the second reflux pump, third reboiler, third condenser, third return tank, third
Pump, third tower reactor pump；The discharge port of the liquid-phase reduction chlorosilane storage tank and the feed inlet of the first rectifying column pass through conveying
The cold medium entrance of pump connection, the first rectifying column tower reactor liquid outlet and first reboiler is described by pipeline connection
The outlet of first reboiler cold medium passes through pipeline connection, the thermal medium of first reboiler with the first rectifying column air inlet
By pipeline connection, the feed inlet of the first rectifying column tower reactor outlet and silicon tetrachloride storage tank passes through described for entrance and heat source
The pump connection of one tower reactor, the gas outlet of the first rectifying column tower top and the air inlet of the Second distillation column pass through pipeline connection,
The Second distillation column tower reactor liquid outlet and the refluxing opening of the first rectifying column are connected by first reflux pump
Logical, the thermal medium entrance of the Second distillation column tower top outlet and the third reboiler is by pipeline connection, and the third is again
Boil the thermal medium outlet of device and the entrance of second return tank by pipeline connection, the outlet of second return tank with it is described
The refluxing opening of Second distillation column is connected to by second reflux pump, and the discharge port of second reflux pump is also smart with the third
The feed inlet for evaporating tower passes through pipeline connection,
The cold medium entrance of third distillation column tower reactor outlet and the third reboiler is by pipeline connection, and described the
By pipeline connection, the third distillation column tower reactor goes out for the cold medium outlet of three reboilers and the air inlet of the third distillation column
Material mouth is connected to secondary trichlorosilane reservoir inlet port by third tower reactor pump, third distillation column tower top gas outlet and institute
The air inlet for stating third condenser passes through pipeline connection, the condensate outlet of the third condenser and the third return tank
Entrance passes through pipeline connection by pipeline connection, the cold source import of the third condenser and cold source, the third return tank
Outlet be connected to the refluxing opening of the third distillation column by the third reflux pump, the discharge port of the third reflux pump also with
Refining trichlorosilane reservoir inlet port passes through pipeline connection.
Further, the first rectifying column and the Second distillation column are plate column.
Further, the third distillation column is packed tower.
Further, the first rectifying column tower top pressure is 0.28~0.35MPa, the first rectifying column tower top temperature
90~98 DEG C, the first rectifying column tower reactor pressure be 0.35~0.40MPa, the first rectifying column bottom temperature be 112~
117℃。
Further, the Second distillation column tower top pressure is 0.20~0.29MPa, the Second distillation column tower top temperature
66~75 DEG C, the Second distillation column tower reactor pressure is 0.27~0.34MPa, and the Second distillation column bottom temperature is 88~95
℃。
Further, the third distillation column tower top pressure is 0.06~0.14MPa, the third distillation column tower top temperature
44~58 DEG C, the third distillation column tower reactor pressure is 0.08~0.15MPa, the third distillation column bottom temperature 51~60
℃。
Further, the heat source that first reboiler uses is that polycrystalline silicon device restores thermogenetic low pressure steaming more than process
Vapour, the low-pressure steam pressure are 0.17~0.22MPa, and the low-pressure steam temperature is 130~136 DEG C.
Further, the cold source that the third condenser uses is recirculated water, and circulating water temperature is 22~25 DEG C.
The advantages of the utility model: (1) conventional multi-crystalline silicon is produced into purification process first rectifying column two series connection
Rectifying column replacement, significantly reduce the overall height of rectifying column, greatly reduce the overall investment of equipment, reduce people
The danger coefficient of work installation, maintenance；(2) the utility model adds Second distillation column tower top tail gas as the heat source of third reboiler
The material of hot third distillation column tower reactor forms the pipeline of the recyclable recycling heat of steam, reduces the investment of reboiler, with biography
Two tower process of uniting are compared, and can be saved steam about 40~50%, can be saved recirculated water 40~50%, solve in polysilicon system and mention
The problem of pure process high energy consumption, reduce enterprise's production cost；(3) the utility model realizes production of polysilicon closed cycle,
Heat, which rationally utilizes, to be accomplished to the Finestill energy-saving apparatus of reduction chlorosilane purification as a result, energy consumption is saved considerably, has saved money
Source, good economical benefit have reached the zero-emission of chlorosilane tail gas, harmless treatment, have protected environment.
Detailed description of the invention:
Fig. 1 is the overall structure diagram of the utility model.
Wherein: first rectifying column 1, Second distillation column 2, third distillation column 3, the first reboiler 4, the first tower reactor pump 5, second
Return tank 6, the first reflux pump 7, the second reflux pump 8, third reboiler 9, third condenser 10, third return tank 11, third are returned
Stream pump 12, third tower reactor pump 13, delivery pump 14, liquid-phase reduction chlorosilane storage tank 15, silicon tetrachloride storage tank 16, refining trichlorosilane
Storage tank 17, secondary trichlorosilane storage tank 18, heat source 19.
Specific embodiment:
As shown in Figure 1, a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification comprising the storage of liquid-phase reduction chlorosilane
Slot 15, first rectifying column 1, Second distillation column 2, third distillation column 3, the first reboiler 4, the first tower reactor pump the 5, second return tank 6,
First reflux pump 7, the second reflux pump 8, third reboiler 9, third condenser 10, third return tank 11, third reflux pump 12,
Three tower reactors pump 13.
The discharge port of liquid-phase reduction chlorosilane storage tank 15 is connected to the feed inlet of first rectifying column 1 by delivery pump 14, the
The cold medium entrance of one rectifying column, 1 tower reactor liquid outlet and the first reboiler 4 is gone out by pipeline connection, 4 cold medium of the first reboiler
With 1 air inlet of first rectifying column by pipeline connection, the thermal medium entrance and heat source 19 of the first reboiler 4 pass through pipeline and connect mouth
Logical, the heat source 19 that the first reboiler 4 uses is that polycrystalline silicon device restores thermogenetic low-pressure steam more than process, low-pressure steam pressure
For 0.17~0.22MPa, low-pressure steam temperature is 130~136 DEG C, the outlet of 1 tower reactor of first rectifying column and silicon tetrachloride storage tank 16
Feed inlet by the first tower reactor pump 5 connection, the gas outlet of 1 tower top of first rectifying column and the air inlet of Second distillation column 2 pass through
Pipeline connection, first rectifying column 1 are plate column, and 1 tower top pressure of first rectifying column is 0.28~0.35MPa, 1 tower of first rectifying column
Top 90~98 DEG C of temperature, 1 tower reactor pressure of first rectifying column be 0.35~0.40MPa, 1 bottom temperature of first rectifying column be 112~
117℃。
2 tower reactor liquid outlet of Second distillation column is connected to the refluxing opening of first rectifying column 1 by the first reflux pump 7, in order to have
Effect saves energy, and 2 tower top outlet of Second distillation column and the thermal medium entrance of third reboiler 9 pass through pipeline connection, and third is boiled again
The entrance of the thermal medium outlet of device 9 and the second return tank 6 passes through pipeline connection, the outlet of the second return tank 6 and Second distillation column 2
Refluxing opening be connected to by the second reflux pump 8, feed inlet of the discharge port of the second reflux pump 8 also with third distillation column 3 pass through pipe
Road connection, Second distillation column 2 are plate column, and 2 tower top pressure of Second distillation column is 0.20~0.29MPa, 2 tower top of Second distillation column
66~75 DEG C of temperature, 2 tower reactor pressure of Second distillation column is 0.27~0.34MPa, and 2 bottom temperature of Second distillation column is 88~95
℃。
The outlet of 3 tower reactor of third distillation column and the cold medium entrance of third reboiler 9 pass through pipeline connection, third reboiler 9
Cold medium outlet pass through pipeline connection, 3 tower reactor discharge port of third distillation column and second level trichlorine with the air inlet of third distillation column 3
18 entrance of hydrogen silicon storage tank passes through 13 connection of third tower reactor pump, the air inlet of third distillation column 3 tower top gas outlet and third condenser 10
Mouth passes through pipeline connection, third by pipeline connection, the condensate outlet of third condenser 10 and the entrance of third return tank 11
By pipeline connection, the cold source that third condenser 10 uses is recirculated water, circulating water temperature for the cold source import of condenser 10 and cold source
Degree is 22~25 DEG C, and the outlet of third return tank 11 is connected to the refluxing opening of third distillation column 3 by third reflux pump 12, third
For the discharge port of reflux pump 12 also with 17 entrance of refining trichlorosilane storage tank by pipeline connection, third distillation column 3 is packed tower, the
Three rectifying columns, 3 tower top pressure is 0.06~0.14MPa, 44~58 DEG C of 3 tower top temperature of third distillation column, 3 tower reactor of third distillation column
Pressure is 0.08~0.15MPa, 51~60 DEG C of 3 bottom temperature of third distillation column.
Because the heat source 19 that the first reboiler 4 uses is that polycrystalline silicon device restores thermogenetic low-pressure steam more than process,
Temperature is 130~136 DEG C, and to improve rectification efficiency, 1 bottom temperature of first rectifying column is otherwise warm in principle no more than 120 DEG C
Source 19 and bottom temperature difference are too small, it will and cause reboiler area too big, so that equipment purchase is costly, but due to first
Rectifying column 1 is connected with Second distillation column 2, and too low 2 tower top pressure of Second distillation column that will lead to of 1 kettle temperature degree of first rectifying column is low, right
Answer tower top temperature relatively low, so that 9 heat exchange area of third reboiler is too big；In order to guarantee that 9 heat exchange area of third reboiler is suitable,
The temperature difference that need to be controlled between 3 kettle temperature degree of third distillation column and 2 tower top temperature of Second distillation column is preferably not less than 15 DEG C；Third condenser
10 are cooled down using recirculated water, and to reduce cold source load, third distillation column 3 pushes up on temperature and recirculated water water temperature difference not in principle
Lower than 15 DEG C, 51~60 DEG C of 3 bottom temperature of third distillation column, in order to improve 3 tower top temperature of third distillation column, third distillation column 3
Regular silk screen packed tower is selected, so as to be substantially reduced tower top and tower reactor pressure difference, improves 3 tower top temperature of third distillation column.
Process flow is as follows: raw material initially enters first rectifying column 1, and kettle material is heated gas by the first reboiler 4
Change, so that gaseous phase materials silicon tetrachloride, trichlorosilane and dichlorosilane is risen to tower tray, with four chlorination of liquid phase material on tower tray
Silicon, trichlorosilane and dichlorosilane carry out heat and mass, realize the separating-purifying of material, are realized also by first rectifying column 1
The initial gross separation of former chlorosilane material, 1 tower reactor of first rectifying column produces the silicon tetrachloride that purity is 99wt% or more, into tetrachloro
SiClx storage tank 16, the gaseous products main component of 1 overhead extraction of first rectifying column be silicon tetrachloride (content be 10~15wt%),
Trichlorosilane (content is 81~88%), dichlorosilane (content is 2~4wt%), the gas phase of 1 overhead extraction of first rectifying column
Product enters the further separating-purifying of Second distillation column 2 by pipeline.
2 top gaseous phase product main component of Second distillation column is trichlorosilane (content is 94~97wt%) and dichloro-dihydro
Silicon (content is 3~6wt%), for effectively save energy, the top gaseous phase product of Second distillation column 2 enters third as heat source
3 reboiler of rectifying column is condensed into liquid phase back to 2 return tank of Second distillation column, in 2 return tank of Second distillation column after exchanging heat
Material a part enters Second distillation column 2 as phegma, and another part enters third distillation column 3 as intermediate products, makees
For the charging of third distillation column 3, which is trichlorosilane (content is 94~97wt%), dichlorosilane
(content is 3~6wt%), 2 tower reactor liquid phase material of Second distillation column returns to first rectifying column 1 as phegma by pipeline.
3 top gaseous phase product component of third distillation column is that (content (contains trichlorosilane for 93~96wt%), dichlorosilane
Amount is 4~7wt%), 3 overhead extraction of third distillation column enters third condenser 10, enters third return tank after being condensed into liquid phase
11, liquid phase material a part returns to third distillation column 3 as phegma in third return tank 11, and a part is used as product purification three
Chlorine hydrogen silicon is transported to refining trichlorosilane storage tank 17, then is transported to reduction process by pump and uses, the extraction of 3 tower reactor of third distillation column
Trichlorosilane is delivered to secondary trichlorosilane storage tank 18 by third tower reactor pump 13 as secondary trichlorosilane, then using height
Boiling system carries out further purification processes.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this
Within novel spirit and principle, any modification, equivalent replacement, improvement and so on should be included in the guarantor of the utility model
Within the scope of shield.
Claims (8)
1. a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, which is characterized in that it includes the storage of liquid-phase reduction chlorosilane
Slot, first rectifying column, Second distillation column, third distillation column, the first reboiler, the first tower reactor pump, the second return tank, the first reflux
Pump, the second reflux pump, third reboiler, third condenser, third return tank, third reflux pump, third tower reactor pump；The liquid phase
The discharge port of reduction chlorosilane storage tank is connected to the feed inlet of the first rectifying column by delivery pump, the first rectifying column tower
The cold medium entrance of liquid from reactor mouth and first reboiler passes through pipeline connection, the first reboiler cold medium outlet and institute
First rectifying column air inlet is stated by pipeline connection, the thermal medium entrance and heat source of first reboiler pass through pipeline connection,
The first rectifying column tower reactor outlet is connected to the feed inlet of silicon tetrachloride storage tank by first tower reactor pump, first essence
The air inlet of the gas outlet and the Second distillation column that evaporate column overhead passes through pipeline connection,
The Second distillation column tower reactor liquid outlet is connected to the refluxing opening of the first rectifying column by first reflux pump, institute
The thermal medium entrance for stating Second distillation column tower top outlet and the third reboiler passes through pipeline connection, the third reboiler
The entrance of thermal medium outlet and second return tank passes through pipeline connection, the outlet of second return tank and second essence
The refluxing opening of tower is evaporated to be connected to by second reflux pump, the discharge port of second reflux pump also with the third distillation column
Feed inlet passes through pipeline connection,
The third distillation column tower reactor outlet and the cold medium entrance of the third reboiler pass through pipeline connection, and the third is again
The air inlet of the cold medium outlet and the third distillation column of boiling device passes through pipeline connection, the third distillation column tower reactor discharge port
Be connected to secondary trichlorosilane reservoir inlet port by third tower reactor pump, third distillation column tower top gas outlet and described the
The air inlet of three condensers passes through pipeline connection, the entrance of the condensate outlet of the third condenser and the third return tank
By pipeline connection, the cold source import of the third condenser and cold source pass through pipeline connection, the outlet of the third return tank
Be connected to the refluxing opening of the third distillation column by the third reflux pump, the discharge port of the third reflux pump also with purification
Trichlorosilane reservoir inlet port passes through pipeline connection.
2. according to claim 1 a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, which is characterized in that described
First rectifying column and the Second distillation column are plate column.
3. according to claim 1 a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, which is characterized in that described
Third distillation column is packed tower.
4. according to any one of claims 1 to 3 a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, feature exists
In the first rectifying column tower top pressure is 0.28~0.35MPa, and 90~98 DEG C of the first rectifying column tower top temperature is described
First rectifying column tower reactor pressure is 0.35~0.40MPa, and the first rectifying column bottom temperature is 112~117 DEG C.
5. according to claim 4 a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, which is characterized in that described
Second distillation column tower top pressure is 0.20~0.29MPa, 66~75 DEG C of the Second distillation column tower top temperature, second rectifying
Tower tower reactor pressure is 0.27~0.34MPa, and the Second distillation column bottom temperature is 88~95 DEG C.
6. according to claim 5 a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, which is characterized in that described
Third distillation column tower top pressure is 0.06~0.14MPa, 44~58 DEG C of the third distillation column tower top temperature, the third rectifying
Tower tower reactor pressure is 0.08~0.15MPa, 51~60 DEG C of the third distillation column bottom temperature.
7. according to claim 1 a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, which is characterized in that described
The heat source that first reboiler uses is that polycrystalline silicon device restores thermogenetic low-pressure steam more than process, and the low-pressure steam pressure is
0.17~0.22MPa, the low-pressure steam temperature are 130~136 DEG C.
8. according to claim 1 a kind of for restoring the Finestill energy-saving apparatus of chlorosilane purification, which is characterized in that described
The cold source that third condenser uses is recirculated water, and circulating water temperature is 22~25 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822177720.1U CN209411790U (en) | 2018-12-24 | 2018-12-24 | A kind of Finestill energy-saving apparatus purified for restoring chlorosilane |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822177720.1U CN209411790U (en) | 2018-12-24 | 2018-12-24 | A kind of Finestill energy-saving apparatus purified for restoring chlorosilane |
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| CN209411790U true CN209411790U (en) | 2019-09-20 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114195098A (en) * | 2022-01-06 | 2022-03-18 | 新地能源工程技术有限公司 | Electronic grade hydrogen bromide preparation device and process |
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2018
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114195098A (en) * | 2022-01-06 | 2022-03-18 | 新地能源工程技术有限公司 | Electronic grade hydrogen bromide preparation device and process |
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