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CN209233796U - Sensor-based system - Google Patents

Sensor-based system Download PDF

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Publication number
CN209233796U
CN209233796U CN201822227517.0U CN201822227517U CN209233796U CN 209233796 U CN209233796 U CN 209233796U CN 201822227517 U CN201822227517 U CN 201822227517U CN 209233796 U CN209233796 U CN 209233796U
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China
Prior art keywords
sensor
transistor
based system
type
voltage
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CN201822227517.0U
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Chinese (zh)
Inventor
王龙伟
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Suzhou Novosense Microelectronics Co ltd
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WUHAN SCIENCE and TECHNOLOGY Co Ltd
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Abstract

This application discloses a kind of sensor-based systems, comprising: sensor, the input terminal of sensor receive operating voltage, and the output end of sensor provides transducing signal;Sensor bias provides operating voltage, and provides capacitance structure between the input terminal and ground reference of sensor;Buffer circuit, the input terminal of buffer circuit are connected with the output end of sensor, and the output end according to transducing signal in sensor-based system provides output signal;And feedback capacity, it is connected between the output end of sensor-based system and the input terminal of sensor.The sensor-based system realizes the gain of the output signal of sensor-based system by the capacitance structure in feedback capacity and Sensor bias, reduces the device in sensor-based system.

Description

Sensor-based system
Technical field
The utility model relates to sensor fields, more particularly, to a kind of sensor-based system.
Background technique
MEMS (Micro-Electro-Mechanical System, MEMS) has in microelectronics technology It is widely applied, such as passed for making mems accelerometer, MEMS microphone, micro motor, Micropump, micro-oscillator, MEMS optics Sensor, MEMS pressure sensor, MEMS gyroscope, MEMS humidity sensor, MEMS gas sensor etc..
In the prior art, Sensor bias 10 provides voltage signal, MEMS sensor 20 to MEMS sensor 20 Output signal need to first pass through input buffer 30 and then the output signal put via variable gain amplifier 40 Greatly, therefore, required device is more during handling signal, and circuit connection is more complicated, as shown in Figure 1.
In addition, needing to improve power supply rejection ratio (Power supply rejection ratio, PSRR) variable Low pressure difference linear voltage regulator (low dropout regulator, LDO) is arranged inside gain amplifier 40 to be powered, increases Power consumption and area.
Utility model content
The utility model provides a kind of sensor-based system for the above problem in the presence of the prior art, passes through feedback electricity Hold the gain for realizing the output signal of sensor-based system with the capacitance structure in Sensor bias, reduces in sensor-based system Device.
The utility model embodiment provides sensor-based system, comprising: the input terminal of sensor, the sensor receives work The output end of voltage, the sensor provides transducing signal;Sensor bias provides the operating voltage, and described Capacitance structure is provided between the input terminal and ground reference of sensor;Buffer circuit, the input terminal of the buffer circuit and institute The output end for stating sensor is connected, and the output end according to the transducing signal in the sensor-based system provides output signal;With And feedback capacity, it is connected between the output end of the sensor-based system and the input terminal of the sensor.
Preferably, the feedback capacity includes tunable capacitor.
Preferably, the buffer circuit includes: biasing circuit, for generating bias voltage;And amplifier, with it is described partially Circuits are connected to receive the bias voltage, and using the feedback capacity and the capacitance structure to the transducing signal into Row amplification is buffered to generate the output signal.
Preferably, the amplifier is unit gain amplifier.
Preferably, the amplifier includes: drive module, generates driving electricity according to feedback voltage and the bias voltage Pressure;And the second transistor and first resistor of the first transistor of p-type, p-type, it is sequentially connected in series in power supply potential and with reference to ground electricity Between position, the ungrounded end of the first resistor provides the feedback voltage, and the first transistor is in the driving voltage The lower conducting of effect, the control terminal of the second transistor receive the transducing signal.
Preferably, the amplifier further include: the third transistor of N-type, be connected to the sensor-based system output end and Between ground reference, control terminal receives the feedback voltage.
Preferably, the bias voltage includes the first bias voltage and the second bias voltage, and the drive module includes: P 4th transistor of type and the 5th transistor of N-type, be sequentially connected in series the ungrounded end of power supply potential and the first resistor it Between, the control terminal of the 4th transistor and the control terminal of the 5th transistor receive first bias voltage and institute respectively Second bias voltage, the series connection end offer driving voltage of the 4th transistor and the 5th transistor are provided.
Preferably, the biasing circuit include: the 6th transistor of p-type, the 7th transistor of p-type, N-type the 8th crystal Pipe, the 9th transistor of N-type and second resistance, the 6th transistor and the 8th transistor are sequentially connected in series in power supply electricity Between position and ground reference, the 7th transistor and the 9th transistor are sequentially connected in series in power supply potential and described second Between the ungrounded end of resistance, the series connection end of the 7th transistor and the 9th transistor is brilliant with the described 6th respectively The control terminal of body pipe and the control terminal of the 7th transistor are connected, and provide first bias voltage, and the described 6th is brilliant The series connection end of body pipe and the 8th transistor respectively with the control terminal of the 8th transistor and the 9th crystal The control terminal of pipe is connected, and provides second bias voltage.
Preferably, the sensor includes MEMS microphone sensor, and the transducing signal includes the exchange of audio-frequency information Electric signal.
According to sensor-based system provided by the embodiment of the utility model, operating voltage is provided by Sensor bias, is led to It crosses the reception operating voltage of sensor and transducing signal is provided, transducing signal is received by buffer circuit and in the defeated of sensor-based system Outlet provides output signal, and the capacitance structure in feedback capacity and Sensor bias realizes the output letter of sensor-based system Number gain, reduce the device in sensor-based system.
Further, feedback capacity is tunable capacitor, and the parameter by adjusting feedback capacity realizes the increasing of output signal Benefit is variable.
Detailed description of the invention
By referring to the drawings to the description of the utility model embodiment, the above-mentioned and other purposes of the utility model Feature and advantage will be apparent from.
Fig. 1 shows the sensor-based system schematic diagram of the prior art.
Fig. 2 shows the structural schematic diagrams of the sensor-based system of the utility model embodiment.
Fig. 3 shows the structural schematic diagram of the biasing circuit in Fig. 2.
Fig. 4 shows the structural schematic diagram of the buffer module in Fig. 2.
Specific embodiment
Hereinafter reference will be made to the drawings is more fully described the utility model.In various figures, identical element is using similar Appended drawing reference indicate.For the sake of clarity, the various pieces in attached drawing are not necessarily to scale.Furthermore, it is possible to be not shown Certain well known parts.
Many specific details of the utility model are described hereinafter, to be more clearly understood that the utility model. But it just as the skilled person will understand, can not realize that this is practical new according to these specific details Type.
Fig. 2 shows the structural schematic diagrams of the sensor-based system of the utility model embodiment.
As shown in Fig. 2, the sensor-based system of the utility model embodiment include: Sensor bias 100, sensor 200, Buffer circuit 300, feedback capacity Cf.Wherein, the sensor-based system of the utility model embodiment can be encapsulated in same chip.
Sensor bias 100 provides operating voltage Vbias, and in the input terminal and ground reference of sensor 200 Between capacitance structure is provided.The circuit model of Sensor bias 100 is shown in Fig. 2, and capacitor Cb is equivalent to sensor Resistance Rbias is equivalent to electric resistance structure in Sensor bias 100 by the capacitance structure in biasing circuit 100, wherein electricity Resistance Rbias is serially connected between the input terminal of sensor-based system and the input terminal of sensor 200, for receiving operating voltage Vbias;Electricity Hold that Cb is serially connected in the input terminal of sensor 200 and between reference location is, resistance Rbias and capacitor Cb are used for smooth operating voltage Vbias。
The input terminal of sensor 200 receives operating voltage Vbias, and the output end of sensor 200 provides transducing signal Vin, Wherein, sensor 200 includes MEMS microphone sensor, and transducing signal Vin includes audio-frequency information.Sensor is shown in Fig. 2 200 circuit model, sensor 200 can be equivalent to variable capacitance Cm, and variable capacitance Cm is serially connected in Sensor bias 100 Between output end and the input terminal of buffer circuit 300, and the capacitance of variable capacitance Cm changes according to the audio received.
Feedback capacity packet Cf is tunable capacitor, is connected between the output end of sensor-based system and the input terminal of sensor 200.
The input terminal of buffer circuit 300 is connected with the output end of sensor 200, and is in sensing according to transducing signal Vin The output end of system provides output signal Vout.Wherein, buffer circuit 300 includes biasing circuit 310 and amplifier 320.Biased electrical For generating bias voltage, 320 biasing circuit 310 of amplifier is connected to receive bias voltage, and utilizes feedback capacity Cf on road 310 Transducing signal Vin is amplified or buffered to generate output signal Vout with capacitance structure Cb.In the particular embodiment, it puts Big device 320 is unit gain amplifier, since 320 input terminal of amplifier and ground terminal are there are parasitic capacitance Cp, sensor Input signal Vin have loss in sensor, sensor is output to the gain of amplifier input less than 1.
In the present embodiment, the resistance value of resistance Rbias is not less than 100MOhm, and capacitor Cb can regard Sensor bias as 100 load capacitance.Output signal Vout is positively correlated the gain of transducing signal Vin and feedback capacity Cf, biases with sensor The capacitance structure Cb that circuit provides is negatively correlated.
The ratio between output signal Vout and transducing signal Vin are as follows:
Wherein, due to Cm > > Cp, so the ratio between output signal Vout and input signal Vin are as follows:
Since capacitor Cb is load capacitance, capacitance is generally fixed, therefore the capacitance for adjusting feedback capacity Cf can change The gain of the output signal Vout of sensor-based system, i.e. output gain signal are by feedback capacity and the provided electricity of Sensor bias Hold structure to determine.
Fig. 3 shows the structural schematic diagram of the biasing circuit in Fig. 2.
As shown in figure 3, biasing circuit 310 include: the 6th transistor M6 of p-type, the 7th transistor M7 of p-type, N-type The 9th transistor M9 and second resistance R2 of eight transistor M8, N-type, the 6th transistor M6 and the 8th transistor M8 are sequentially connected in series Between power supply potential (receiving power supply signal VDD) and ground reference, the 7th transistor M7 and the 9th transistor M9 are successively gone here and there It is associated between power supply potential and the ungrounded end of second resistance R2, the series connection end of the 7th transistor M7 and the 9th transistor M9 It is connected respectively with the control terminal of the control terminal of the 6th transistor M6 and the 7th transistor M7, and the first bias voltage Vbp is provided, The series connection end of 6th transistor M6 and the 8th transistor M8 respectively with the control terminal and the 9th crystal of the 8th transistor M8 The control terminal of pipe M9 is connected, and provides the second bias voltage Vbn.
Fig. 4 shows the structural schematic diagram of the buffer module in Fig. 2.
As shown in figure 4, amplifier 320 includes: the 321, first to the 5th transistor (M1 to M5) and first of drive module Resistance R1.
Drive module 321 is produced according to feedback voltage and bias voltage (the first bias voltage Vbp and the second bias voltage Vbn) Raw driving voltage.The first transistor M1 of p-type, the second transistor M2 of p-type and first resistor R1, are sequentially connected in series in power supply potential Between ground reference, the ungrounded end of first resistor R1 provides feedback voltage, work of the first transistor M1 in driving voltage Transducing signal Vin is received with the control terminal of lower conducting, second transistor M2.The third transistor M3 of N-type is connected to sensor-based system Output end and ground reference between, control terminal receive feedback voltage.
According to sensor-based system provided by the embodiment of the utility model, mentioned by Sensor bias 100 to sensor 200 Smoothed out operating voltage Vbias has been supplied, has been realized using the capacitance structure Cb in feedback capacity Cf and Sensor bias 100 The variable gain of the output signal Vout of sensor-based system.Scheme compared to the prior art, the biography of the utility model embodiment Sensing system reduces one step gain amplifier, reduces the power consumption of sensor-based system, reduces the noise level of sensor-based system, thus Improve the performance of sensor-based system.
According to embodiment provided by the utility model, pass through the 6th to the 9th transistor (M6 to M9) and second resistance R2 The biasing circuit unrelated with power supply is constituted, the first offset signal Vbp and the second offset signal Vbn is generated.Therefore input buffering Circuit 300 is powered without internal LDO, can directly be powered using external power supply, and the power consumption and encapsulation chip of sensor-based system are saved Area.
According to embodiment provided by the utility model, biasing, second transistor M2 conduct are provided by the 4th transistor M4 Input pipe, third transistor M3 provide enough pull-down capabilities, and it is negative anti-that third transistor M3 and second transistor M2 form part Feedback.The first transistor M1, second transistor M2, the 5th transistor M5 and first resistor R1 form a loop, to provide Loop gain, therefore, the loop provide enough PSRR performances, power without internal LDO.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that There is also other identical elements in process, method, article or equipment including the element.
It is as described above according to the embodiments of the present invention, these embodiments details all there is no detailed descriptionthe, Also not limiting the utility model is only the specific embodiment.Obviously, as described above, many modification and change can be made Change.These embodiments are chosen and specifically described to this specification, is in order to preferably explain the principles of the present invention and actually to answer With so that skilled artisan be enable to utilize the utility model and repairing on the basis of the utility model well Change use.The utility model is limited only by the claims and their full scope and equivalents.

Claims (9)

1. a kind of sensor-based system, which is characterized in that the sensor-based system includes:
Sensor, the input terminal of the sensor receive operating voltage, and the output end of the sensor provides transducing signal;
Sensor bias provides the operating voltage, and mentions between the input terminal and ground reference of the sensor For capacitance structure;
Buffer circuit, the input terminal of the buffer circuit are connected with the output end of the sensor, and according to the transducing signal Output signal is provided in the output end of the sensor-based system;And
Feedback capacity is connected between the output end of the sensor-based system and the input terminal of the sensor.
2. sensor-based system according to claim 1, which is characterized in that the feedback capacity includes tunable capacitor.
3. sensor-based system according to claim 1, which is characterized in that the buffer circuit includes:
Biasing circuit, for generating bias voltage;And
Amplifier is connected to receive the bias voltage with the biasing circuit, and utilizes the feedback capacity and the sensing The capacitance structure that device biasing circuit provides is amplified or is buffered to the transducing signal to generate the output signal.
4. sensor-based system according to claim 3, which is characterized in that the amplifier is unit gain amplifier.
5. sensor-based system according to claim 3, which is characterized in that the amplifier includes:
Drive module generates driving voltage according to feedback voltage and the bias voltage;And
The first transistor of p-type, the second transistor of p-type and first resistor, are sequentially connected in series in power supply potential and ground reference Between, the ungrounded end of the first resistor provides the feedback voltage, work of the first transistor in the driving voltage The transducing signal is received with the control terminal of lower conducting, the second transistor.
6. sensor-based system according to claim 5, which is characterized in that the amplifier further include:
The third transistor of N-type is connected between the output end and ground reference of the sensor-based system, described in control terminal reception Feedback voltage.
7. sensor-based system according to claim 5, which is characterized in that the bias voltage includes the first bias voltage and the Two bias voltages, the drive module include:
4th transistor of p-type and the 5th transistor of N-type are sequentially connected in series in the ungrounded of power supply potential and the first resistor Between end, the control terminal of the 4th transistor and the control terminal of the 5th transistor receive first bias voltage respectively With second bias voltage, the series connection end of the 4th transistor and the 5th transistor provides the driving electricity Pressure.
8. sensor-based system according to claim 7, which is characterized in that the biasing circuit includes: the 6th crystal of p-type The 9th transistor and second resistance of pipe, the 7th transistor of p-type, the 8th transistor of N-type, N-type,
6th transistor and the 8th transistor are sequentially connected in series between power supply potential and ground reference,
7th transistor and the 9th transistor are sequentially connected in series the ungrounded end in power supply potential and the second resistance Between,
The series connection end of 7th transistor and the 9th transistor respectively with the control terminal of the 6th transistor with And the control terminal of the 7th transistor is connected, and provides first bias voltage,
The series connection end of 6th transistor and the 8th transistor respectively with the control terminal of the 8th transistor with And the control terminal of the 9th transistor is connected, and provides second bias voltage.
9. sensor-based system according to claim 1, which is characterized in that the sensor includes MEMS microphone sensor, The transducing signal includes audio-frequency information.
CN201822227517.0U 2018-12-27 2018-12-27 Sensor-based system Active CN209233796U (en)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114222232A (en) * 2021-12-31 2022-03-22 杭州士兰微电子股份有限公司 MEMS system and signal processing circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114222232A (en) * 2021-12-31 2022-03-22 杭州士兰微电子股份有限公司 MEMS system and signal processing circuit
CN114222232B (en) * 2021-12-31 2024-06-28 杭州士兰微电子股份有限公司 MEMS system and signal processing circuit

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Effective date of registration: 20190822

Address after: 10 000 07 Building 5-1106, 6 East Street, Jiaotoukou, Dongcheng District, Beijing

Patentee after: Zhu Jiahui

Address before: 430000 Three Floors of Henglong Building D in Huazhong Dawn Software Park, No. 1 Guanshan Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province

Patentee before: Wuhan Science & Technology Co., Ltd.

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Patentee after: Haojun Technology (Beijing) Co.,Ltd.

Address before: 10 000 07 Building 5-1106, 6 East Street, Jiaotoukou, Dongcheng District, Beijing

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