Summary of the invention
In view of the above problems, the utility model provide it is a kind of for chip sampling observation machine chip strip band fetch and deliver dress
It sets, pusher can release the chip strip band in material box mechanism from material box mechanism, and material fetching mechanism can will be pushed away by pusher
In chip strip band clamping to transport establishment out;Chip strip band can be transported under microscope mechanism by transport establishment to be observed or transports
Cutting or mark under to laser cutting mechanism, avoid with hand contact chip band, artificial secondary damage are caused to chip.
The technical solution adopted in the utility model is as follows:
A kind of chip strip band fetching and sending devices for chip sampling observation machine, which is characterized in that including material box mechanism, pusher
Structure, material fetching mechanism, transport establishment, the position energy of material box mechanism is upper and lower, X-direction, Y-direction are adjusted;Pusher can be by magazine machine
Chip strip band in structure is released from material box mechanism;Material fetching mechanism can clamp the chip strip band released by pusher to transport
In mechanism;Chip strip band can be transported to designated position by transport establishment.
Pusher can release the chip strip band in material box mechanism from material box mechanism, and material fetching mechanism energy will be by pusher
In the chip strip band clamping to transport establishment that structure is released;Transport establishment chip strip band can be transported under microscope mechanism observation or
It is transported under laser cutting mechanism cutting or mark, avoids with hand contact chip band, artificial secondary damage is caused to chip
Evil.Magazine ontology is multilayer, after the selected chip strip band for examining certain layer, the position of material box mechanism can flexible modulation, so as to
Pusher can accurately shift the chip strip band of the selected number of plies onto.
Further, material box mechanism includes X-direction regulating mechanism one, Y-direction regulating mechanism one, upper and lower adjustment mechanism, material
Box body, X-direction regulating mechanism one are adjustable the position of magazine ontology in the X direction;Y-direction regulating mechanism one is adjustable magazine
The position of ontology in the Y direction;Upper and lower adjustment mechanism are adjustable the upper and lower position of magazine ontology.
Magazine ontology is multilayer, after the selected chip strip band for examining certain layer, the position of material box mechanism can flexible modulation,
So that pusher can accurately shift the chip strip band of the selected number of plies onto.
Further, upper and lower adjustment mechanism include magazine lifting motor, the output end of magazine lifting motor and lead screw one
One end connection, the other end of lead screw one connect with svertical sliding plate, when magazine lifting motor rotates, svertical sliding plate can
It is slided up and down on upright guide rail one;Upright guide rail one is fixed in fixed plate one;X-direction regulating mechanism one includes being mounted on up and down
Cylinder one on sliding panel, cylinder one can drive X to move in X direction to movable plate;Y-direction regulating mechanism one includes being mounted on X
Magazine fixed datum on movable plate, is equipped with rodless cylinder on magazine fixed datum, and rodless cylinder can drive Y-direction
Mobile face is moved along Y-direction, and magazine ontology is fixed on the mobile face of Y-direction.
Upper and lower adjustment mechanism adjust the upper and lower position of magazine ontology with the principle of screw slider, and structure is simple and adjusts essence
Degree is high.The piston rod movement of cylinder one can drive X to move in X direction to movable plate, to adjust magazine ontology in the X direction
Position.Rodless cylinder can drive the mobile face of Y-direction to move along Y-direction, to adjust the position of magazine ontology in the Y direction.
Further, pusher includes bracket, cylinder of pushing pin, needle pushing-up device, pushes pin cylinder and needle pushing-up device is mounted on
On bracket, cylinder of pushing pin can drive needle pushing-up device is mobile to push chip strip band.
Further, needle pushing-up device includes rack-mount track two, bracket two, and bracket two is in the work of cylinder of pushing pin
It can be slided on track two under;Fixed block is installed, fixed block connect with cylinder of pushing pin, pushes pin across fixed block on bracket two
It is connected with buffer, buffer is fixed on bracket two;The pressure that pusher abnormal detector energy detection buffer is subject to.
Buffer includes shell and is mounted on the intracorporal spring of shell, and pusher abnormal detector can detect what spring was subject to
Pressure, so that judgement pushes pin whether be directed at chip strip band.
Further, bracket includes vertical supporting plate, Y-direction support plate, X to support plate, and vertical supporting plate is fixed on frame body
On, vertical supporting plate, Y-direction support plate are connected by connecting plate, and the junction of connecting plate and vertical supporting plate is vertical kidney slot;
The junction of Y-direction support plate and connecting plate is the kidney slot of Y-direction;X is mounted in Y-direction support plate to support plate, and X is to support plate
It is the waist-shaped hole of X-direction with Y-direction support plate junction.
Vertical supporting plate, Y-direction support plate, X to the junction of support plate be waist-shaped hole, to adjust the position of needle pushing-up device,
To adapt to different magazine body sizes.
Further, transport establishment include stage apparatus, the track-type facilities that are mounted on stage apparatus, stage apparatus can be
It is moved in X-direction and Y-direction;The width of track-type facilities can be according to the width adjusting of chip strip band.
Stage apparatus can move in the x-direction and the z-direction, chip strip band to be transported under microscope mechanism or laser
It is handled under cutting mechanism.The width of track-type facilities can be according to the width adjusting of chip strip band, so that track is suitable for not
With the chip strip band of width.
Further, stage apparatus includes platform, platform X-motor, platform Y-motor, and platform Y-motor is fixedly mounted, platform Y
The output end of motor is connected with one end of Y lead screw, and the other end of Y lead screw passes through sliding part;Platform X electricity is fixed on sliding part
The output end of machine, platform X-motor is connected with one end of X screw rod, and the other end of X screw rod is connected with platform.
Further, track-type facilities include fixed guide rail, slide rail, guide rail motor, and fixed guide rail and guide rail motor are solid
On platform, one end of guide rail screw rod is connected with guide rail motor for Dingan County, and the other end of guide rail screw rod passes through slide rail;Guide rail
Motor rotation can drive slide rail mobile.
Using the position of screw rod slide block structure adjustment slide rail, so as to adjust the width of track-type facilities, to adapt to difference
The chip strip band of width.
Further, material fetching mechanism is mounted on platform, and material fetching mechanism includes reclaimer robot, feeding motor, feeding electricity
The output end of machine is connected with chain, and reclaimer robot is connected with chain, and chain rotation can drive reclaimer robot in feeding guide rail
Upper sliding.
In conclusion the beneficial effects of the utility model are:
1. pusher can release the chip strip band in material box mechanism from material box mechanism, material fetching mechanism can will be pushed away
Expect that the chip strip band that mechanism releases is clamped onto transport establishment;Chip strip band can be transported to microscope mechanism Xia Guan by transport establishment
Cutting or mark are examined or be transported under laser cutting mechanism, avoids with hand contact chip band, artificial two is caused to chip
Secondary damage;
2. the position of material box mechanism can flexible modulation, so that pusher can accurately shift the chip strip of the selected number of plies onto
Band;
3. the position of needle pushing-up device can up and down, X-direction, Y-direction adjust, to adapt to different magazine sizes;
4. the width of track-type facilities can be according to the width adjusting of chip strip band, so that track is suitable for different in width
Chip strip band.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain this
Utility model is not used to limit the utility model.
A kind of chip strip band fetching and sending devices for chip sampling observation machine, which is characterized in that including material box mechanism, pusher
Structure, material fetching mechanism, transport establishment, the position energy of material box mechanism is upper and lower, X-direction, Y-direction are adjusted;Pusher can be by magazine machine
Chip strip band in structure is released from material box mechanism;Material fetching mechanism can clamp the chip strip band released by pusher to transport
In mechanism;Chip strip band can be transported to designated position by transport establishment.Material box mechanism includes X-direction regulating mechanism one, Y-direction tune
Mechanism one, upper and lower adjustment mechanism, magazine ontology are saved, X-direction regulating mechanism one is adjustable the position of magazine ontology in the X direction;Y
Direction adjustment organization one is adjustable the position of magazine ontology in the Y direction;Upper and lower adjustment mechanism are adjustable the upper and lower of magazine ontology
Position.Upper and lower adjustment mechanism include the magazine lifting motor 2 being fixed on frame body 100, the output end and silk of magazine lifting motor 2
One end of thick stick one connects, and the other end and svertical sliding plate 3 connection of lead screw one are slided up and down when magazine lifting motor 2 rotates
Plate 3 can be slided up and down on upright guide rail 1;Upright guide rail 1 is fixed in fixed plate 1, and fixed plate 1 is fixed on frame
On body 100.X-direction regulating mechanism one includes the cylinder one being mounted in svertical sliding plate 3, and cylinder one can drive X to movable plate 6
It moves in X direction.Y-direction regulating mechanism one includes being mounted on magazine fixed datum 7 of the X on movable plate 6, is fixed in magazine
Rodless cylinder is installed, rodless cylinder can drive the mobile face 8 of Y-direction to move along Y-direction, and magazine ontology is fixed on Y-direction on datum level 7
On mobile face 8.
Pusher includes the bracket being fixed on frame body 100, push pin cylinder 9, needle pushing-up device, pushes pin and cylinder 9 and pushes pin
Device is rack-mount, and cylinder 9 of pushing pin can drive needle pushing-up device is mobile to push chip strip band.Needle pushing-up device includes being mounted on branch
Track 2 10, bracket 2 11 on frame, bracket 2 11 can slide under the action of pushing pin cylinder 9 on track 2 10;Bracket two
Fixed block 12 is installed on 11, fixed block 12 is connect with cylinder 9 of pushing pin, push pin 13 pass through fixed block 12 be connected with buffer 52,
Buffer 52 is fixed on bracket 2 11;The pressure that 50 energy detection buffer 52 of pusher abnormal detector is subject to.Bracket includes
Vertical supporting plate 14, Y-direction support plate 15, X are to support plate 16, and vertical supporting plate 14 is fixed on frame body 100, vertical supporting plate
14, Y-direction support plate 15 is connected by connecting plate 17, and the junction of connecting plate 17 and vertical supporting plate 14 is vertical kidney slot;Y-direction
The junction of support plate 15 and connecting plate 17 is the kidney slot of Y-direction;X is mounted in Y-direction support plate 15 to support plate 16, X to
Support plate 16 and 15 junction of Y-direction support plate are the waist-shaped hole of X-direction.
The track-type facilities that transport establishment includes the stage apparatus being mounted on frame body 100, is mounted on stage apparatus, platform
Device can move in the x-direction and the z-direction;The width of track-type facilities can be according to the width adjusting of chip strip band.Stage apparatus
Including platform 18, platform X-motor 19, platform Y-motor 20, platform Y-motor 20 is fixedly mounted on frame body 100, platform Y-motor 20
Output end connected with one end of Y lead screw 21, the other end of Y lead screw 21 passes through sliding part 22;Platform X is fixed on sliding part 22
The output end of motor 19, platform X-motor 19 is connected with one end of X screw rod 23, the other end and platform 18 connection of X screw rod 23.It leads
Rail device includes fixed guide rail 24, slide rail 25, guide rail motor 26, and fixed guide rail 24 and guide rail motor 26 are fixedly mounted on flat
On platform 18, one end of guide rail screw rod and guide rail motor 26 are connected, and the other end of guide rail screw rod passes through slide rail 25;Guide rail motor
26 rotations can drive slide rail 25 mobile.Material fetching mechanism is mounted on platform 18, and material fetching mechanism includes reclaimer robot 27, takes
Expect that motor 28, the output end of feeding motor 28 are connected with chain, reclaimer robot 27 is connected with chain, and chain rotation, which can drive, to be taken
Material manipulator 27 slides on feeding guide rail 29.
The utility model is better understood for convenience, and the IC chip optics sampling observation machine with laser cutting function is now done into letter
Single description.
A kind of IC chip optics sampling observation machine of band laser cutting function, including frame body 100 and the core being mounted on frame body 100
Piece band fetching and sending devices, microscope mechanism, laser cutting mechanism, microscope mechanism and laser cutting mechanism material are arranged side by side;Core
Piece band fetching and sending devices include material box mechanism, pusher, material fetching mechanism, transport establishment;It the position of material box mechanism can upper and lower, X
Direction, Y-direction are adjusted;Pusher can release the chip strip band in material box mechanism from material box mechanism;Material fetching mechanism can incite somebody to action
In the chip strip band clamping to transport establishment released by pusher;Chip strip band can be transported to microscope mechanism by transport establishment
Lower observation is transported to cutting or mark under laser cutting mechanism.
Material box mechanism includes X-direction regulating mechanism one, Y-direction regulating mechanism one, upper and lower adjustment mechanism, magazine ontology, the side X
The position of magazine ontology in the X direction is adjustable to regulating mechanism one;Y-direction regulating mechanism one is adjustable magazine ontology in the side Y
Upward position;Upper and lower adjustment mechanism are adjustable the upper and lower position of magazine ontology.Upper and lower adjustment mechanism include being fixed on frame body 100
On magazine lifting motor 2, the output end of magazine lifting motor 2 connects with one end of lead screw one, the other end of lead screw one and upper
Downslide movable plate 3 connects, and when magazine lifting motor 2 rotates, svertical sliding plate 3 can be slided up and down on upright guide rail 1;It is perpendicular
Straight guide 1 is fixed in fixed plate 1, and fixed plate 1 is fixed on frame body 100.X-direction regulating mechanism one includes being mounted on
Cylinder one in svertical sliding plate 3, cylinder one can drive X to move in X direction to movable plate 6.Y-direction regulating mechanism one includes peace
Mounted in magazine fixed datum 7 of the X on movable plate 6, rodless cylinder, rodless cylinder are installed on magazine fixed datum 7
The mobile face 8 of Y-direction can be driven to move along Y-direction, magazine ontology is fixed on the mobile face 8 of Y-direction.
Pusher includes the bracket being fixed on frame body 100, push pin cylinder 9, needle pushing-up device, pushes pin and cylinder 9 and pushes pin
Device is rack-mount, and cylinder 9 of pushing pin can drive needle pushing-up device is mobile to push chip strip band.Needle pushing-up device includes being mounted on branch
Track 2 10, bracket 2 11 on frame, bracket 2 11 can slide under the action of pushing pin cylinder 9 on track 2 10;Bracket two
Fixed block 12 is installed on 11, fixed block 12 is connect with cylinder 9 of pushing pin, push pin 13 pass through fixed block 12 be connected with buffer 52,
Buffer 52 is fixed on bracket 2 11;The pressure that 50 energy detection buffer 52 of pusher abnormal detector is subject to.Bracket includes
Vertical supporting plate 14, Y-direction support plate 15, X are to support plate 16, and vertical supporting plate 14 is fixed on frame body 100, vertical supporting plate
14, Y-direction support plate 15 is connected by connecting plate 17, and the junction of connecting plate 17 and vertical supporting plate 14 is vertical kidney slot;Y-direction
The junction of support plate 15 and connecting plate 17 is the kidney slot of Y-direction;X is mounted in Y-direction support plate 15 to support plate 16, X to
Support plate 16 and 15 junction of Y-direction support plate are the waist-shaped hole of X-direction.
The track-type facilities that transport establishment includes the stage apparatus being mounted on frame body 100, is mounted on stage apparatus, platform
Device can move in the x-direction and the z-direction;The width of track-type facilities can be according to the width adjusting of chip strip band.Stage apparatus
Including platform 18, platform X-motor 19, platform Y-motor 20, platform Y-motor 20 is fixedly mounted on frame body 100, platform Y-motor 20
Output end connected with one end of Y lead screw 21, the other end of Y lead screw 21 passes through sliding part 22;Platform X is fixed on sliding part 22
The output end of motor 19, platform X-motor 19 is connected with one end of X screw rod 23, the other end and platform 18 connection of X screw rod 23.It leads
Rail device includes fixed guide rail 24, slide rail 25, guide rail motor 26, and fixed guide rail 24 and guide rail motor 26 are fixedly mounted on flat
On platform 18, one end of guide rail screw rod and guide rail motor 26 are connected, and the other end of guide rail screw rod passes through slide rail 25;Guide rail motor
26 rotations can drive slide rail 25 mobile.Material fetching mechanism is mounted on platform 18, and material fetching mechanism includes reclaimer robot 27, takes
Expect that motor 28, the output end of feeding motor 28 are connected with chain, reclaimer robot 27 is connected with chain, and chain rotation, which can drive, to be taken
Material manipulator 27 slides on feeding guide rail 29.
The light that microscope mechanism includes microscope 30, installation turntable 31 under the microscope, is mounted under turntable 31
Source 54, turntable 31 can rotate in the horizontal direction under the driving of rotating electric machine 32, and being equipped in turntable 31 can be vertical
The vertical distance of the reflective mirror rotated on direction, microscope 30 and turntable 31 is adjustable.Reflective mirror includes reflective mirror 1
With reflective mirror 2 34, eyeglass motor one can drive reflective mirror 1 to rotate, and eyeglass motor two can drive reflective mirror 2 34 to rotate.Rotation
Fluted 31001 are opened up on turntable 31, belt 35 is set in groove 31001 and on the output end of rotating electric machine 32.Turntable
31 are equipped with the retention device for preventing belt 35 from skidding off from groove 31001.Retention device includes rubber pad 36 and fixed rubber
The screw of pad 36, turntable 31 are equipped with the threaded hole of installation screw.CCD camera 37, CCD is installed at the eyepiece of microscope 30
Camera 37 is connected with monitoring screen display.Microscope 30 is mounted on elevating mechanism 38, and elevating mechanism 38 is adjustable microscope
30 with the vertical distance of turntable 31;Elevating mechanism 38 is mounted on frame body 100.Laser cutting mechanism includes galvanometer 40 and optical fiber
Laser 41, optical fiber laser 41 are mounted on frame body 100, and galvanometer 40 and optical fiber laser 41 connect.Chip sampling observation machine also wraps
Include two-dimensional code scanning mechanism, operation interface display connected to the controller.
A kind of method of inspection of the chip sampling observation machine of band laser cutting, comprising the following steps:
Step 1: being packed into magazine ontology for chip strip band, presses start button, and operation interface display reminds input sampling observation
The number of plies;
Step 2: the input sampling observation number of plies, controller control lifting motor 2, cylinder one, rodless cylinder movement, allow magazine sheet
The alignment of sampling observation layer that body is selected pushes pin 13;
Step 3: it pushes pin and 13 releases chip material strip;
Step 4: controller control platform X-motor 19 and platform Y-motor 20 act, and platform 18 is allowed to be moved to suitable position
It sets, then controller control feeding motor 28 acts, and reclaimer robot 27 is allowed to be directed at the chip strip band being pushed out;
Step 5: the clamping of chip strip band is put into track-type facilities by reclaimer robot 27, and during which controller controls guide rail
Motor action makes the width of track-type facilities and chip strip width match;
Step 6: two-dimensional code scanning mechanism reads the two dimensional code on chip strip band;
Step 7: controller control platform X-motor 19 and platform Y-motor 20 act, and chip strip band is transported to microscope
Under;
Step 8: whether observation Die is normal;If Die is abnormal, controller control platform X-motor 19 and platform Y-motor
Chip strip band is moved to cutting or mark under laser light mechanism, is then moved back under microscope again and judges whether to have observed by 20 movements
Finish;If Die is normal, directly judge whether that observation finishes;
Step 9: if observation finishes, ten are thened follow the steps;If observation does not finish, eight are thened follow the steps;
Step 10: controller control platform X-motor 19, platform Y-motor 20, feeding motor 28 act, reclaimer robot 27
Chip strip band is put back into magazine ontology;
Step 11: judging whether to continue to inspect by random samples other layers, if to continue to inspect other layers by random samples, thens follow the steps two;Such as
Fruit does not continue to inspect other layers by random samples, then sampling observation terminates.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.