CN208270415U - Spectrum widening device based on digital micromirror array (DMD) - Google Patents
Spectrum widening device based on digital micromirror array (DMD) Download PDFInfo
- Publication number
- CN208270415U CN208270415U CN201820729807.2U CN201820729807U CN208270415U CN 208270415 U CN208270415 U CN 208270415U CN 201820729807 U CN201820729807 U CN 201820729807U CN 208270415 U CN208270415 U CN 208270415U
- Authority
- CN
- China
- Prior art keywords
- module
- dispersion
- digital micromirror
- micromirror array
- dmd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001228 spectrum Methods 0.000 title claims abstract description 40
- 239000006185 dispersion Substances 0.000 claims abstract description 111
- 230000003595 spectral effect Effects 0.000 claims abstract description 37
- 230000003287 optical effect Effects 0.000 claims abstract description 20
- 230000006835 compression Effects 0.000 claims abstract description 14
- 238000007906 compression Methods 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 abstract description 11
- 238000005452 bending Methods 0.000 abstract description 2
- 230000005494 condensation Effects 0.000 abstract 2
- 238000009833 condensation Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 description 12
- 101100277917 Caenorhabditis elegans dmd-3 gene Proteins 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000000985 reflectance spectrum Methods 0.000 description 1
- 230000003362 replicative effect Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
Abstract
The utility model relates to a spectrum widening device based on digital micromirror array DMD. The device comprises a first collimation module, a first dispersion module, a digital micromirror array (DMD), a first condensation module, a second collimation module, an interference module, a light compression module, a third collimation module, a second dispersion system and a detector; the first collimation module expands the point target into surface parallel light which enters the first dispersion module for light splitting, the surface parallel light is dispersed along the row or column direction of the digital micromirror array DMD, the digital micromirror array DMD cuts the dispersed light beam, the first condensation module converges the reflected light beam of the digital micromirror array DMD, the converged light beam is collimated by the second collimation module and then enters the interference module; the optical compression module compresses the interference fringes, collimates the interference fringes through the third collimation module, enters the second dispersion system, performs secondary dispersion, and obtains the interference fringes of each spectral band in different areas of the detector. The spectrum broadening of the detection system is realized while the problems of fringe bending, contrast reduction and the like caused by cross dispersion are avoided.
Description
Technical field
The utility model belongs to astronomicalc optics observation field, in particular to a kind of spectrum based on digital micromirror array DMD
Broaden device.
Background technique
Polychromatic light is after dispersion system (such as prism, grating) light splitting, and the monochromatic light opened by dispersion is by wavelength (or frequency)
Size and the pattern being arranged successively, full name are optical spectrum, abbreviation spectrum.Spectral measurement is as the important hand for obtaining material information
Section, application range cover high-energy physics, astronomy, environment, atmospheric physics, Marine Sciences, life science, chemical industry and material,
The multiple fields such as agricultural sciences.
Interference spectrum measuring technique is a kind of optical interferometry technology and spectral technique to be combined to obtain measurement method, quilt
It is widely used in being outer fixed star feature detection, is outer planet detection, universe Detection of Weak Signals, the neck such as atmosphere wind field on the middle and senior level
Domain, the measurement for doppler shifted signal.
The measurement of Doppler signal mainly passes through radial velocity method, currently, there are two types of the modes of realization this method.First,
The crossed dispersion method combined by high-precision echelon and prism, directly measures the spectrum frequency displacement of target, obtains target
The radial velocity.Another kind is the dispersion fixed delay interferometric method that interference and dispersion combine, and interferes item by measuring signal
The phase change of line measures the radial velocity of target indirectly.But the method for current high-precision echelon crossed dispersion, there are energy
Amount utilization efficiency is low, and noise is relatively low；Requirement of the detected with high accuracy to environment is extremely harsh, and cost of observation is high；It can only be single
Target observation, inefficiency；Equipment development technology is complicated, somewhat expensive, it is difficult to the disadvantages of replicating.Dispersion fixed delay technology is more
Disadvantages mentioned above is mended, earliest dispersion fixed delay technical solution is by Michelson's interferometer in, low resolution echelon
The scheme of crossed dispersion is realized.Wherein crossed dispersion mainly solves the problems, such as spectrum widening and resolution ratio.But due to crossed dispersion
The problems such as direction is consistent with spectral interference fringe distribution direction, is bent to introduce striped, and intetference-fit strengthening declines.Make
The detection accuracy for the system of obtaining reduces.Later, it is based on dispersion fixed delay technology, by using Sagnac interferometer and Dyson color
The relevant dispersion detection mode that module combines is dissipated, it is poor to optimize system environment resistant interference performance present in above scheme, energy
The problems such as loss, and can be realized Multiple targets observation.But the program only use a dispersion, spectral region and resolution ratio by
The limitation of detector pixel number.To affect the detection accuracy of system and the population-wide of detectable target.Picture is used at present
Spectrum widening may be implemented in the scheme of sheer, and the reflection angle by the planes of reflection different in image slicer is different, to dispersion
Spectrum segment be split.Theoretically, think in optical design each reflecting surface approximation of image slicer same as plane,
But under actual conditions, each plane of reflection is not entirely in same plane, closer to image slicer reflecting surface both ends, each plane
It is bigger with the gap of theoretical center plane.Such case causes in Multiple targets observation mode, the mistake of partial target observed result
Difference is larger.
Utility model content
The purpose of this utility model is to propose a kind of spectrum widening device based on spatial light modulator DMD.It is avoiding handing over
The spectrum widening of detection system is realized while the problems such as striped bending caused by fork dispersion and contrast decline, and is solved
For image slicer method for widening in multiple target detection, reflecting surface is not in same asking as plane when spectrum narrowband cutting
Topic.
Digital micromirror array DMD is a kind of spatial light modulator part, is multiple small reflecting optics and digital circuit
Integrated MEMOS device can carry out the deflection of different angle by each small eyeglass of Digital Circuit Control.It is commonly used for
In electronic projection apparatus, or for light field regulation instrument, it is used for light path switch.
Compared to image slicer, the rotary shaft of each eyeglass of digital micromirror array DMD is generally aligned in the same plane, so that it is to same
The modulation capability of one image planes light is more outstanding.And its reflection angle can be realized 8bit control, and degree of regulation is high, controllability
By force.
The technical solution adopted in the utility model is to provide a kind of spectrum widening device based on spatial light modulator DMD,
It is characterized in that including set gradually along optical path the first dispersion system, digital micromirror array DMD, the first concentration module,
Second collimating module, intervention module, light compression module, third collimating module, the second dispersion system and detector；
Above-mentioned first dispersion system includes the first collimating module and the first dispersion compensation module set gradually along optical path；
Point target is extended to face directional light and is divided into the first dispersion compensation module by the first collimating module, the first dispersion mould
For block by face directional light along detector row pixel or column pixel orientational dispersion, dispersed light beam propagates to digital micromirror array DMD, number
Micro mirror array DMD cuts dispersed light beam, reflects different spectral coverage along different angle, reflection direction is perpendicular to the first dispersion
Module dispersion direction and the reflected beams are respectively positioned on same plane；First concentration module is by the reflected light as digital micromirror array DMD
Enter the second collimating module after Shu Jinhang convergence to be collimated, obtains the collimated light beam of different spectral coverage；The directional light of different spectral coverage
Beam enters intervention module acquisition perpendicular to the interference fringe of the first dispersion compensation module dispersion direction；Light compression module goes out intervention module
The interference fringe penetrated enters the second color after collimating after detector row pixel or the compression of column pixel direction by third collimating module
Directional light is carried out secondary dispersion along detector row pixel or column pixel direction by the system of dissipating, the second dispersion system, detector not
With the interference fringe for obtaining each spectral coverage on region.
It preferably, can also include converging lenses, above-mentioned converging lenses between the first dispersion compensation module and digital micromirror array DMD
It is converged for the light beam to the first dispersion compensation module according to different spectral coverage.
Preferably, above-mentioned second dispersion system may include the second dispersion compensation module and the second optically focused set gradually along optical path
Module；
Directional light is carried out secondary dispersion along detector row pixel or column pixel direction and gathered into second by the second dispersion compensation module
After optical module convergence, the interference fringe of each spectral coverage is obtained in detector different zones.
Preferably, above-mentioned second dispersion system can also be curved surface grating.
Preferably, the first dispersion compensation module and the second dispersion compensation module are grating or prism, can also use other one-dimensional dispersions
Element replaces, and the resolution ratio of the second dispersion compensation module is greater than the resolution ratio of the first dispersion compensation module.
Preferably, above-mentioned first concentration module is convex lens or convex lens group, and the incident parallel light of different angle is converged
Gather in different spatial.
Preferably, above-mentioned second collimating module is micro lens group, and the light of different spectral coverage is collimated；Above-mentioned optical pressure contracting
Module is cylindrical mirror, and interference pattern is compressed along spectral dispersion direction.
Preferably, above-mentioned interference module is that Sagnac interferometer, Michelson's interferometer or Mach-Zehnder interferometer etc. are dry
Interferometer device.
The invention also discloses a kind of spectrum widening methods based on digital micromirror array DMD, comprising the following steps:
Step 1: after target light is collimated in dispersion to digital micromirror array DMD row unit or column unit, the row of DMD or
It arranges consistent with the direction of detector row or column；
Step 2: using digital micromirror array DMD by the light of the dispersion along digital micromirror array DMD row unit or column unit
Spectrum reflexes to conplane different location according to different spectral coverage；
Step 3: interference fringe is obtained by intervention module is entered after the reflected beams collimation in step 2；
Step 4: interference fringe is compressed along with interference fringe vertical direction；
Step 5: interference fringe compressed in step 4 is carried out two along detector row pixel direction or column pixel direction
Secondary dispersion obtains high-resolution spectra interference fringe.
Preferably, above-mentioned target is single or multiple point light sources.
The beneficial effects of the utility model are:
1, the spectrum widening under detector pixel limited situation is realized；
When grating is to target optical spectrum dispersion, detector row or column pixel number determine in the case where, spectral resolution and
Spectral dispersion range is inversely proportional, and cannot achieve high-resolution wide spectrum spectral measurement.Method used by the utility model is first
By grating or prism by target dispersion to digital micromirror array DMD, then will be along row or column color by digital micromirror array DMD
Scattered spectral reflectance so that different spectral coverage is arranged in detector difference row or column, then leads to conplane different location
It crosses high-resolution dispersion element and secondary colours is carried out along the direction of row or column to the narrow-band spectrum for being generally aligned in the same plane different row or column
It dissipates, obtains wide spectrum high-resolution spectroscopy spectral line.
2, the utilization rate of detector pixel is high；
Digital micromirror array DMD has very outstanding optical path modulation ability, and the angle control of each of which eyeglass is 8bit,
Angular deflection range is up to 12 ° so that in multi-target imaging, can by adjusting the reflection angle to narrow-band spectrum so that
The distribution of different narrow-band spectrum interference fringes on the detector is more compact, increases the utilization rate of detector pixel.
3, it is convenient for miniaturization and lightweight；
Compared to image slicer, digital micromirror array has smaller size and lighter quality, is conducive to the small of optical path
Type and lightweight.
It 4, being capable of optimal imaging quality
Compared to image slicer, digital micromirror array DMD have preferably it is handling, pass through adjust digital micromirror array DMD
Reflection angle can be realized the quality optimization to system imaging.
5, technology maturation, at low cost
Image slicer is a kind of dedicated devices, no batch production, therefore to carry out spectrum widening and need according to index request
It is designed development, price is high, and the period is long.And digital micromirror array DMD is mass product, in contrast, price is lower, and
And procurement cycle is short.In addition, the strong operability of the reflection angle of DMD, reduces the design difficulty of spectrum widening optical path.
6, multiple target detection performance is more preferable
Image slicer is converged after different target dispersion due to the difference of each mirror angle in multiple target observations
Optic spectrum line reflection position in same plane, not will cause system aberration or other image-quality problems.The device is using number
Micro mirror array DMD, the yawing axis of each reflecting mirror are generally aligned in the same plane, and avoid the above problem, have better multiple target
The performance of detection.
Detailed description of the invention
Fig. 1 is the utility model one embodiment schematic device；
Fig. 2 is the second dispersion system schematic diagram；
Appended drawing reference in figure are as follows: the first collimating module of 1-, the first dispersion compensation module of 2-, 3- digital micromirror array DMD, 4- first
Concentration module, the second collimating module of 5-, 6- intervention module, 7- light compression module, 8- third collimating module, the second dispersion of 9- system
System；
The second dispersion compensation module of 91-, the second concentration module of 92-.
Specific embodiment
The utility model is further described below in conjunction with drawings and the specific embodiments.
The utility model is using the measurement method for interfering dispersion again after a kind of first dispersion, firstly, extremely by target optical spectrum dispersion
On digital micromirror array DMD row or column direction, DMD row or column direction is consistent with detector row or column direction；Secondly, passing through number
Micro mirror array DMD will cut according to different spectral coverage along the spectrum of detector row pixel or column pixel dispersion and reflex to same plane
Different location, realize spectrum widening；Again, the different spectral coverage after segmentation is compressed into collimation, is interfered into intervention module
Striped；Finally, interference fringe, which is carried out secondary dispersion along detector row or column direction, realizes that high-precision is divided, high-resolution light is obtained
Spectral interference fringe.
It can be measured by device shown in FIG. 1 in the embodiment, be can be seen that from Fig. 1 and Fig. 2 along optical path successively
It is provided with the first collimating module 1, the first dispersion compensation module 2, digital micromirror array DMD3, the first concentration module 4, the second collimating module
5, intervention module 6, light compression module 7, third collimating module 8, the second dispersion system 9 and detector；The first dispersion compensation module with
It can also include converging lenses between digital micromirror array DMD, the light beam of the first dispersion compensation module is converged according to different spectral coverage.
In this embodiment, figure it is seen that the second dispersion system 9 includes the second dispersion set gradually along optical path
Module 91 and the second concentration module 92, can also directly be replaced with curved surface grating；First dispersion compensation module 2 and the second dispersion compensation module 91
Be grating, can also with prism or other replaced with one-dimensional dispersion element；Digital micromirror array DMD3, by controllable micro- of angle
Small reflector composition, its main feature is that the light that will propagate to mirror surface is reflected along certain angle, reflection angle passes through number electricity
Road control, angle control precision are high；And all micro-reflectors are respectively positioned on same plane.First concentration module 4 is by different angles
The incident parallel light of degree converges in different spatial, the equivalent optically focused optical path of convex lens；Second collimating module 5 be cylindrical mirror or
Path-splitting micro lens；Intervention module 6 can be Sagnac interferometer, Michelson's interferometer, and Mach-Zehnder interferometer etc. is done
Interferometer device；The resolution ratio of second dispersion compensation module 91 represents spectrometer true resolution, second of dispersion and first time dispersion direction
Unanimously.
Specific measurement process is as follows:
1), wherein target is single or multiple point light sources, is imaged on focal plane by object lens, will by optical fiber or object lens
Target introduces the first collimating module 1, and then point target is extended to face directional light and is divided into the first dispersion compensation module 2.Pass through
First dispersion compensation module 2 will input directional light along detector row pixel or column pixel orientational dispersion, and it is micro- that dispersed light beam propagates to number
Lens array DMD3.
2), by control digital micromirror array DMD3 each micro-reflector reflection angle, by target dispersion spectral line into
Row cutting, reflects different spectral coverage along different angle, dispersion direction and reflectance spectrum of the reflection direction perpendicular to the first dispersion compensation module 2
Section is respectively positioned on same plane.
3), the reflection light of digital micromirror array DMD3 is converged by the first concentration module 4, due to digital micromirror array
The angle that each reflecting mirror of DMD3 reflects spectral coverage light is different, and different micro-reflectors correspond to wave band and are compressed in different spaces position
It sets, light beam enters the second collimating module 5 after compression.
4), incident beam is collimated by the second collimating module 5, obtains the collimated light beam of different spectral coverage, into dry
Relate to module 6.
5) interference, is carried out by intervention module 6 and obtains interference fringe, interference fringe direction is along detector column pixel or row picture
First directional spreding, perpendicular to first time dispersion direction.
6) energy centralization, is incident to along first time dispersion direction by compression of images by third standard by light compression module 7
Straight module 8.
7), incident beam is collimated by third collimating module 8, is divided into the second dispersion compensation module 91.
8), input directional light is entered the by the second dispersion compensation module 91 after carrying out secondary dispersion perpendicular to interference fringe direction
Two concentration modules 92.
9), after the second concentration module will converge, the interference fringe of each spectral coverage is obtained in detector different zones.
Claims (8)
1. a kind of spectrum widening device based on digital micromirror array DMD, it is characterised in that: including set gradually along optical path
One dispersion system, digital micromirror array DMD, the first concentration module, the second collimating module, intervention module, light compression module, third
Collimating module, the second dispersion system and detector；
First dispersion system includes the first collimating module and the first dispersion compensation module set gradually along optical path；
Point target is extended to face directional light and is divided into the first dispersion compensation module by the first collimating module, and the first dispersion compensation module will
For face directional light along digital micromirror array DMD row or column orientational dispersion, dispersed light beam propagates to digital micromirror array DMD, and number is micro-
Lens array DMD cuts dispersed light beam, reflects different spectral coverage along different angle, reflection direction is perpendicular to the first dispersion mould
Block dispersion direction and the reflected beams are respectively positioned on same plane；First concentration module is by the reflected beams as digital micromirror array DMD
Enter the second collimating module after being converged to be collimated, obtains the collimated light beam of different spectral coverage；The collimated light beam of different spectral coverage
The interference fringe perpendicular to the first dispersion compensation module dispersion direction is obtained into intervention module；Intervention module is emitted by light compression module
Interference fringe along detector row pixel or column pixel direction compression after by third collimating module collimate after enter the second dispersion
Directional light is carried out secondary dispersion along detector row pixel or column pixel direction by system, the second dispersion system, in detector difference
The interference fringe of each spectral coverage is obtained on region.
2. the spectrum widening device according to claim 1 based on digital micromirror array DMD, it is characterised in that: first
Converging lenses are equipped between dispersion compensation module and digital micromirror array DMD, converging lenses are used for the light beam of the first dispersion compensation module according to not
It is converged with spectral coverage.
3. the spectrum widening device according to claim 1 or 2 based on digital micromirror array DMD, it is characterised in that: described
Second dispersion system includes the second dispersion compensation module and the second concentration module set gradually along optical path；
Directional light is carried out secondary dispersion along detector row pixel or column pixel direction and enters the second optically focused mould by the second dispersion compensation module
After block convergence, the interference fringe of each spectral coverage is obtained in detector different zones.
4. the spectrum widening device according to claim 1 or 2 based on digital micromirror array DMD, it is characterised in that: described
Second dispersion system is curved surface grating.
5. the spectrum widening device according to claim 3 based on digital micromirror array DMD, it is characterised in that: the first color
It dissipates module and the second dispersion compensation module is grating or prism.
6. the spectrum widening device according to claim 5 based on digital micromirror array DMD, it is characterised in that: described
One concentration module is convex lens or convex lens group, and the incident parallel light of different angle is converged in different spatial.
7. the spectrum widening device according to claim 6 based on digital micromirror array DMD, it is characterised in that: described
Two collimating modules are micro lens group, and the light of different spectral coverage is collimated；The smooth compression module is cylindrical mirror, by interference pattern
It is compressed along spectral dispersion direction.
8. the spectrum widening device according to claim 7 based on digital micromirror array DMD, it is characterised in that: described dry
Relating to module is that Sagnac interferometer, Michelson's interferometer or Mach-Zehnder interferometer interfere instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820729807.2U CN208270415U (en) | 2018-05-16 | 2018-05-16 | Spectrum widening device based on digital micromirror array (DMD) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820729807.2U CN208270415U (en) | 2018-05-16 | 2018-05-16 | Spectrum widening device based on digital micromirror array (DMD) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208270415U true CN208270415U (en) | 2018-12-21 |
Family
ID=64681616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820729807.2U Active CN208270415U (en) | 2018-05-16 | 2018-05-16 | Spectrum widening device based on digital micromirror array (DMD) |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208270415U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110501289A (en) * | 2018-05-16 | 2019-11-26 | 中国科学院西安光学精密机械研究所 | A kind of spectrum widening method and device based on digital micromirror array DMD |
-
2018
- 2018-05-16 CN CN201820729807.2U patent/CN208270415U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110501289A (en) * | 2018-05-16 | 2019-11-26 | 中国科学院西安光学精密机械研究所 | A kind of spectrum widening method and device based on digital micromirror array DMD |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110501289A (en) | A kind of spectrum widening method and device based on digital micromirror array DMD | |
| CN103913227B (en) | Based on Infrared Imaging Spectrometer and the method for making of light-duty beam splitter | |
| CN104040308B (en) | Spectroscopic instrument and process for spectral analysis and system for coherence tomography imaging | |
| CN104568765B (en) | Miniature spectroscopic ellipsometer device and measuring method | |
| CN201666783U (en) | White light interferometer with a quick zero-setting system | |
| CN107949776B (en) | Static Fourier transform spectrometer | |
| CN104949630B (en) | A kind of adjustable point-diffraction interference device of large-numerical aperture fringe contrast | |
| CN208270077U (en) | High-flux wide-spectrum-band high-resolution coherent dispersion spectrum imaging device | |
| CN101819069A (en) | White light interferometer with fast zero-setting system | |
| CN105333815B (en) | A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the scanning of spectrum colour loose wire | |
| CN208270415U (en) | Spectrum widening device based on digital micromirror array (DMD) | |
| CN109579995B (en) | Method and device for enhancing static birefringence interference spectrum resolution | |
| CN104006883A (en) | Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof | |
| CN106352985B (en) | Asymmetric spatial heterodyne spectrometer structure | |
| CN110501074A (en) | The high-resolution relevant dispersed light spectrum imaging method of high-throughput wide spectrum and device | |
| CN101251420A (en) | Novel double-movable-mirror interferometer | |
| CN108507679A (en) | Wide-spectrum high-resolution spectral interferometry method and device | |
| CN208012761U (en) | Wide-spectrum high-resolution spectral interference measuring device | |
| CN101782433A (en) | Static all-optical interference imaging spectrum full-polarization detection method | |
| CN106323197B (en) | The big working distance autocollimation of portable array zeroing high-precision laser and method | |
| CN106225725B (en) | The big working distance autocollimation of portable array zeroing laser and method | |
| CN105954286A (en) | Visibility measuring instrument based on rotary-light-filter monochromator | |
| CN106017362B (en) | A kind of big working distance autocollimation of portable high dynamic precision and method | |
| CN108871572B (en) | Birefringent Fourier transformation imaging spectral band extension method and its imaging device | |
| CN108362379A (en) | Wide-spectrum high-resolution spectral dispersion method and device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |