CN207765472U - A kind of whole line of monocrystalline making herbs into wool is slotting to divide biplate to automate charging ＆ discharging machine - Google Patents
A kind of whole line of monocrystalline making herbs into wool is slotting to divide biplate to automate charging ＆ discharging machine Download PDFInfo
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- CN207765472U CN207765472U CN201820274157.7U CN201820274157U CN207765472U CN 207765472 U CN207765472 U CN 207765472U CN 201820274157 U CN201820274157 U CN 201820274157U CN 207765472 U CN207765472 U CN 207765472U
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- Prior art keywords
- biplate
- silicon chip
- line
- basket
- blanking
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
A kind of whole line of monocrystalline making herbs into wool of the utility model offer, which is inserted, divides biplate to automate charging ＆ discharging machine, including：Lamination stock shelf charging belt line which is provided with independent transport mechanism and gear basket structure；Caching box, if there are one silicon chip cache bits；Six-joint robot is equipped with hand grip thereon；Double suction enters disk transverse moving structure, is made of three groups of sliding machine hands, and sliding machine hand described in every group is set there are two sucker position；Sliding machine hand described in every group enters dribbling lifting structure with double suction and connect respectively；Lamination stock shelf charging belt line is equipped with three groups of mutually independent lamination stock shelf charging belt lines；Lamination blanking rack return-flow structure is equipped with three groups of mutually independent lamination blanking rack return-flow structures.The beneficial effects of the utility model are that the automatic production line for connecting together feeder, cleaning, blanking reduces personnel and space waste, and stabilization of equipment performance is good, high degree of automation；Fragment rate is low, small to wafer contamination, and working efficiency effectively improves.
Description
Technical field
It inserts and divides the utility model is related to solar cell manufacturing equipment design field more particularly to a kind of whole line of monocrystalline making herbs into wool
Biplate automates charging ＆ discharging machine.
Background technology
Monocrystalline silicon piece is anisotropic, the corrosion on different crystal orientations when being corroded in the aqueous slkali of a certain concentration range
Rate is different.Using this principle, the monocrystalline silicon piece of particular crystal orientation is put into aqueous slkali and is corroded, you can is permitted in silicon face generation
Mostly tiny pyramid shape appearance, monocrystalline making herbs into wool are completed.
Include multiple processes, such as Wafer Cleaning, making herbs into wool, in above-mentioned work at present in solar cell manufacturing process
It is required for silicon chip being fitted into basket tool in sequence and is replaced mutually in magazine.In the prior art, all custom uses artificial side
Formula operates, and which is susceptible to the problems such as fragment rate is high, big to the pollution of silicon chip, efficiency is low, wasting manpower and material resources.
It would therefore be highly desirable to which those skilled in the art capture above-mentioned technical problem.
Utility model content
Problem to be solved in the utility model, which is to provide a kind of whole line of monocrystalline making herbs into wool, inserts biplate is divided to automate charging ＆ discharging machine, energy
Enough solve above-mentioned technical problem.
In order to solve the above technical problems, what the technical solution of the utility model was realized in：
A kind of whole line of monocrystalline making herbs into wool is slotting to divide biplate to automate charging ＆ discharging machine, including lamination stock shelf charging belt line, thereon
Equipped with independent transport mechanism and gear basket structure；Caching box, if there are one silicon chip cache bits；Six-joint robot is installed organic thereon
Tool hand handgrip；Double suction enters disk transverse moving structure, is made of three groups of sliding machine hands, and sliding machine hand described in every group is set there are two sucker
Position；Sliding machine hand described in every group enters dribbling lifting structure with double suction and connect respectively；Lamination stock shelf charging belt line is equipped with three
The mutually independent lamination stock shelf charging belt line of group；Lamination blanking rack return-flow structure is equipped with three groups of mutually independent institutes
State lamination blanking rack return-flow structure.
Preferably, further include changing basket structure comprising：Correction mechanism and gaily decorated basket silicon chip supporting mechanism.
Preferably, further include：Belt line stretcher, which is provided with telescopic mechanism and inductor；Empty rack lifting structure,
It is equipped with lateral belt line, resistance gear air cylinder and belt up and down motion module.
Preferably, further include：Blowing structure, including air blowing mouth structure and material folding machinery；The pairs of phase of air blowing mouth structure
To setting；The stock shelf that the material folding machinery flows into the lamination stock shelf charging belt line group is clamped；Topsheet structures,
It is made of six independent elevation and subsidence mechanical hands, the silicon chip in upper magazine is ejected, feeding is carried out with the blowing nozzle respective outer side edges；
Chip architecture is kicked, is connect respectively with biplate testing agency and unfilled corner testing agency.
Preferably, further include：Gaily decorated basket fixed bit fixes full basket on the table；Blanking gaily decorated basket positioning device, according to institute
It states the blanking gaily decorated basket positioning device gaily decorated basket that blanking mechanical hand carrying comes is fixed on gaily decorated basket fixed bit；Feeding robot deposits piece
Robot point is taken silicon chip to be stored in box by box, and it is 8 that the feeding robot, which deposits film magazine setting quantity,；Blanking divides biplate sucker
With divide biplate sucker transverse-moving mechanism by a piece of fixation in biplate.
Preferably, further include：Silicon chip is carried out 90 degree of rotations by four 90 degree of sucker silicon chip rotating mechanisms, is equipped with two groups, every group
There are four suckers.
Preferably, further include：CCD light source assemblies, including two sets of vision cameras and a light source；CCD detects workbench, by
Two sets of servo structures and feed belt structure are constituted；Silicon chip sorts module, and setting number is four groups.
Preferably, further include：Magazine is sorted, is made of four groups of mutually independent elevating mechanisms, every group by two pulp-collecting box
Composition；Each pulp-collecting box silicon chip placement amount is 100.
Preferably, further include：Silicon chip is imported in blanking flow box the granting for completing blanking silicon chip by blanking belt group；It is empty
Magazine pipeline docks AGV trolleies, and AGV, which is carried the gaily decorated basket to come, is docked to sky magazine pipeline.
Preferably, further include：Basket line actuating unit is returned, the empty gaily decorated basket that elevator conveying comes is docked to return wire；Return basket
Line belt adjusting mechanism makes back basket line stabilization tide over to elevator；Basket line rack is returned, is made of proximate matter and PE wear ribs.
The utility model has the advantages and positive effects of：
1) the utility model is reasonable for structure, and stability is good, high degree of automation, reduces space waste, realizes unmanned vehicle
Between.
2) the utility model fragment rate is low, small to wafer contamination, and working efficiency effectively improves.
Description of the drawings
Fig. 1 is the utility model main structure diagram.
Fig. 2 is the utility model overlooking structure diagram.
Fig. 3 is the utility model main structure diagram.
Fig. 4 is the utility model overlooking structure diagram.
Fig. 5 is the utility model overlooking structure diagram.
Fig. 6 is the utility model overlooking structure diagram.
Fig. 7 is the utility model main structure diagram.
Fig. 8 is the utility model overlooking structure diagram.
Specific implementation mode
It should be noted that in the case where not colliding, the feature in the embodiments of the present invention and embodiment
It can be combined with each other.
It elaborates below in conjunction with the accompanying drawings to specific embodiment of the utility model.
As shown in Fig. 1~8, a kind of whole line of monocrystalline making herbs into wool of embodiment offer as the utility model, which is inserted, divides biplate automatic
Changing charging ＆ discharging machine includes：Lamination blanking rack return-flow structure 1, lamination stock shelf charging belt line 2, double suction enter disk transverse moving structure 3, kick
Chip architecture 4, caching box 5, robot take piece caching box 6, hand grip 7, gaily decorated basket silicon chip correction mechanism 8, gaily decorated basket pressing device
9, gaily decorated basket silicon chip supporting mechanism 10, six-joint robot 11, belt line stretcher 12, empty rack lifting structure 13, top flat mechanical structure
14, gaily decorated basket lodging bench blowing structure 15, feeding robot deposit film magazine 16, silicon chip pipeline 17, blanking gaily decorated basket positioning device 18, under
Material divides biplate sucker 19, divides biplate sucker transverse-moving mechanism 20, gaily decorated basket fixed bit 21, four sucker silicon chips 90 ° of rotating mechanisms 22, CCD
Light source assembly 23, CCD detections workbench 24, silicon chip sorting module 25, sorting magazine 26, blanking belt group 27, stacked blanking
Box 28, full magazine return wire 30, returns basket line actuating unit 31, returns basket line belt adjusting mechanism 32, returns basket at empty magazine pipeline 29
Line belt module 33 and time basket line rack 34.Lamination stock shelf charging belt line 2 is equipped with independent transport mechanism and gear basket structure.
There is AGV to interface in wire body, realizes automation and working efficiency.Three stand alone type feedings, robot take piece caching box 6 to have above
One silicon chip cache bit can reduce the robot working time, and one shares three independence cache mechanisms.Six-joint robot 11, on
Hand grip 7 is installed to take silicon chip to substitute to be accomplished manually and be inserted into the gaily decorated basket, instead of manually taking slotting silicon chip.Gaily decorated basket silicon chip is rectified
Positive mechanism 8, gaily decorated basket silicon chip supporting mechanism 10 are accomplished manually the silicon chip insertion gaily decorated basket to substitute.It is traversing that double suction enters disk transverse moving structure 3
Band double suction enters dribbling lifting structure above manipulator, and altogether there are three sliding machine hand, per pass independent control is inhaled 2, inhaled every time
Inductive switch is respectively arranged on disk, for detecting whether silicon chip picks up.It is only that lamination stock shelf charging belt line 2 shares three per pass
It is vertical to control, inductor and resistance gear air cylinder are equipped with above wire body.Lamination blanking rack return-flow structure 1, one shares three per pass and independently controls
It makes, inductor is equipped with above wire body.Belt line stretcher 12 is equipped with telescopic mechanism and for detecting whether silicon chip enters machine
People takes piece to deposit one group of inductor of film magazine, can be properly inserted silicon chip in depositing film magazine per lattice.Blowing structure 15 is equipped with two pairs above
Air blowing mouth structure and material folding machinery, wherein blowing structure are used for detaching silicon chip, and feeding clip mechanism is for by charging belt stream
The stock shelf to come over clamps.Empty rack lifting structure 13 is equipped with lateral belt line, resistance gear air cylinder, belt up and down motion module,
Wherein lateral belt line is to take over empty magazine, and the rising of shelves basket cylinder positions empty magazine, and belt up and down motion mold expects sky
Decline is transported to sky basket recirculation water.Chip architecture 4 is kicked including biplate testing agency and unfilled corner testing agency, kick chip architecture be by
The piece of biplate and the detection of unfilled corner testing agency that biplate detection structure detected is kicked out of.Top flat mechanical structure 14, six solely
Liter drops manipulator and is used to the silicon chip inside upper magazine living in ejection, in conjunction with blow gun structure feeding.Blanking gaily decorated basket positioning device
18, blanking mechanical hand is carried the gaily decorated basket to come and is steadily accurately fixed on fixed bit by gaily decorated basket fixed bit 21.Feeding robot
Depositing film magazine 16 takes silicon chip to be stored in box in robot point, after the completion drops down onto on conveyer belt silicon chip, which is provided with eight and deposit film magazine.
Gaily decorated basket fixed bit 21 precisely fixes full basket on the table.Blanking divides biplate sucker 19, divides biplate sucker transverse-moving mechanism 20 will
A piece of fixation in biplate, robot take another side silicon chip, to replace manually taking a point biplate.Four 90 ° of sucker silicon chip whirlers
Silicon chip is carried out 90 ° of rotations by structure 22, is equipped with two groups, every group there are four suckers.CCD light source assemblies 23 are furnished with two sets of vision cameras,
One light source, belt conveyor line, camera fine adjustment stage, line put down one group of platform, can accurately detect the spot on silicon chip, lack
More than ten kinds bad, angle etc..CCD detects workbench 24 by two sets of servo structures and feed belt structure composition, can smoothly by
Silicon chip is sent to CCD camera detection error of taking pictures and reaches 0.05.Silicon chip sorting module 25 is made of four sets of independent sorting modules will
The good class of silicon chip point.Sorting magazine 26 is made of four sets of independent-lifting mechanisms, and each material is formed by two pulp-collecting box on every group of module
100 silicon chips can be stored on box, servo-control system can be connected accurately per a piece of silicon chip, be risen after filling 100 silicon chips
Basket work is cut in drop manipulator behavior completion.Blanking belt group 27 adds transmission motor form by elastic webbing, can steadily lead silicon chip
Enter to complete the distribution process of blanking silicon chip in blanking flow box.The every blanking machine of stacked blanking box 28 is expected equipped with ten switchings
Box, magazine can facilitate commissioning staff rationally to debug with any rotation.Empty magazine pipeline 29 docks AGV trolleies, and AGV is removed
It transports the gaily decorated basket to come and is docked to the unmanned workshop of sky magazine pipeline realization.Full magazine return wire 30 switches the magazine for filling silicon chip
The unattended unmanned workshop of realization is completed to full magazine return wire.It returns basket line actuating unit 31 and elevator is conveyed to the sky to come
The gaily decorated basket smoothly docks return wire.The completion belt of basket line belt adjusting mechanism 32 is returned smoothly to adjust.Make back basket line smooth transition
To elevator.Basket line belt module 33 is returned to be made of synchronous belt and transmission mechanism.Basket line rack 34 is returned by proximate matter and PE wear ribs
Composition.
When it is implemented, as shown above, material loading part is for example following, and the lamination magazine for installing 800 is put into feeding skin
It takes, after the completion of waiting for feeding, belt moves forward, and rack is clipped double suction disc mechanism and traversed over to carry out suction piece and be laterally moved to belt conveyor
On line, for the second section belt line by silicon chip after clamping piece structure is crossed in the warp let-off forward, clamping sheet mechanism intermediate plate will enter buffering material after silicon chip correcting
Box, then robot is packed by third section belt (belt telescopic band) and is taken in film magazine, through six axis machine taking silicon chip after filling
It walks to be put into the slotting biplate gaily decorated basket.It inserts biplate mechanism and stores position, silicon chip supporting mechanism group by inserting biplate silicon chip correction mechanism, the empty gaily decorated basket
At.Silicon chip is inserted into silicon chip support by six-joint robot, silicon chip correction mechanism corrects silicon chip, and general who has surrendered's silicon chip is put into flower under silicon chip support
Basket, the gaily decorated basket are inserted into two panels silicon chip per lattice.Blanking part is for example following, and blanking divides biplate mechanism by full basket fixed bit, biplate is divided to fix
Sucker feeding robot discharging box is constituted.Biplate sucker is divided to fix one side silicon chip, six-joint robot extraction another side silicon chip is put into
Robot discharging box.By dividing biplate mechanism that silicon chip is placed upper material position, the rotation of four 90 ° of sucker rotating mechanisms places silicon chip defeated
Band is sent to be delivered to CCD detection modules, the silicon chip classification sorted out by CCD flows into magazine, and non-defective unit is by belt line by silicon
Piece, which is sent into magazine, to be dropped to magazine by the magazine for filling silicon chip by lifting structure and flows back wire body, and waiting AGV trolleies come pair
It connects.
The automatic production line that the utility model connects together feeder, cleaning, blanking reduces personnel and space wave
Take, stabilization of equipment performance is good, high degree of automation, realizes unmanned workshop；Fragment rate is low, small to wafer contamination, and working efficiency has
Effect improves.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this practicality is new in other specific forms
Type.
Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this
The range of utility model is indicated by the appended claims rather than the foregoing description, it is intended that being wanted falling in the equivalent of claim
All changes in the meaning and scope of part are embraced therein.Any reference numeral in claim should not be regarded
To limit the claims involved.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (10)
- Biplate is divided to automate charging ＆ discharging machine 1. a kind of whole line of monocrystalline making herbs into wool is inserted, it is characterised in that：IncludingLamination stock shelf charging belt line which is provided with independent transport mechanism and gear basket structure；Caching box, if there are one silicon chip cache bits；Six-joint robot is equipped with hand grip thereon；Double suction enters disk transverse moving structure, is made of three groups of sliding machine hands, and sliding machine hand described in every group is set there are two sucker position；Often The group sliding machine hand enters dribbling lifting structure with double suction and connect respectively；Lamination stock shelf charging belt line is equipped with three groups of mutually independent lamination stock shelf charging belt lines；Lamination blanking rack return-flow structure is equipped with three groups of mutually independent lamination blanking rack return-flow structures.
- Biplate is divided to automate charging ＆ discharging machine 2. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that：Also Including changing basket structure comprising：Correction mechanism and gaily decorated basket silicon chip supporting mechanism.
- Biplate is divided to automate charging ＆ discharging machine 3. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that：Also Including：Belt line stretcher, which is provided with telescopic mechanism and inductor；Empty rack lifting structure which is provided with lateral belt line, resistance gear air cylinder and belt up and down motion module.
- Biplate is divided to automate charging ＆ discharging machine 4. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that：Also Including：Blowing structure, including air blowing mouth structure and material folding machinery；The air blowing mouth structure is oppositely arranged in pairs；The material folding machinery The stock shelf flowed into the lamination stock shelf charging belt line group is clamped；Topsheet structures are made of six independent elevation and subsidence mechanical hands, the silicon chip in upper magazine are ejected, with the air blowing mouth structure Cooperation carries out feeding；Chip architecture is kicked, is connect respectively with biplate testing agency and unfilled corner testing agency.
- Biplate is divided to automate charging ＆ discharging machine 5. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that：Also Including：Gaily decorated basket fixed bit fixes full basket on the table；Blanking mechanical hand is carried the gaily decorated basket to come according to the blanking gaily decorated basket positioning device and is fixed on by blanking gaily decorated basket positioning device On gaily decorated basket fixed bit；Feeding robot deposits film magazine, takes silicon chip to be stored in box in robot point, and it is 8 that the feeding robot, which deposits film magazine setting quantity, It is a；Blanking divides biplate sucker and divides biplate sucker transverse-moving mechanism by a piece of fixation in biplate.
- Biplate is divided to automate charging ＆ discharging machine 6. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that：Also Including：Silicon chip is carried out 90 degree of rotations by four 90 degree of sucker silicon chip rotating mechanisms, is equipped with two groups, every group there are four suckers.
- Biplate is divided to automate charging ＆ discharging machine 7. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that：Also Including：CCD light source assemblies, including two sets of vision cameras and a light source；CCD detects workbench, is made of two sets of servo structures and feed belt structure；Silicon chip sorts module, and setting number is four groups.
- Biplate is divided to automate charging ＆ discharging machine 8. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that：Also Including：Magazine is sorted, is made of four groups of mutually independent elevating mechanisms, every group is made of two pulp-collecting box；Each pulp-collecting box Silicon chip placement amount is 100.
- Biplate is divided to automate charging ＆ discharging machine 9. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that：Also Including：Silicon chip is imported in blanking flow box the granting for completing blanking silicon chip by blanking belt group；Empty magazine pipeline docks AGV trolleies, and AGV, which is carried the gaily decorated basket to come, is docked to sky magazine pipeline.
- Biplate is divided to automate charging ＆ discharging machine 10. a kind of whole line of monocrystalline making herbs into wool according to claim 1 is inserted, it is characterised in that： Further include：Basket line actuating unit is returned, the empty gaily decorated basket that elevator conveying comes is docked to return wire；Basket line belt adjusting mechanism is returned, basket line stabilization is made back to tide over to elevator；Basket line rack is returned, is made of proximate matter and PE wear ribs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820274157.7U CN207765472U (en) | 2018-02-27 | 2018-02-27 | A kind of whole line of monocrystalline making herbs into wool is slotting to divide biplate to automate charging ＆ discharging machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820274157.7U CN207765472U (en) | 2018-02-27 | 2018-02-27 | A kind of whole line of monocrystalline making herbs into wool is slotting to divide biplate to automate charging ＆ discharging machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207765472U true CN207765472U (en) | 2018-08-24 |
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ID=63180250
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820274157.7U Expired - Fee Related CN207765472U (en) | 2018-02-27 | 2018-02-27 | A kind of whole line of monocrystalline making herbs into wool is slotting to divide biplate to automate charging ＆ discharging machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN207765472U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109607200A (en) * | 2018-11-29 | 2019-04-12 | 无锡市江松科技有限公司 | Silicon wafer transfer device |
| CN109638112A (en) * | 2018-12-29 | 2019-04-16 | 无锡尚品高自动化设备有限公司 | A kind of biplate making herbs into wool wafer separator |
| CN110053969A (en) * | 2019-04-23 | 2019-07-26 | 浙江金麦特自动化系统有限公司 | A kind of robot automatic transporting cleaning system and method |
| CN113716258A (en) * | 2021-10-17 | 2021-11-30 | 东莞东华医院有限公司 | Intelligent medicine dispensing system and method based on intelligent medicine basket |
-
2018
- 2018-02-27 CN CN201820274157.7U patent/CN207765472U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109607200A (en) * | 2018-11-29 | 2019-04-12 | 无锡市江松科技有限公司 | Silicon wafer transfer device |
| CN109638112A (en) * | 2018-12-29 | 2019-04-16 | 无锡尚品高自动化设备有限公司 | A kind of biplate making herbs into wool wafer separator |
| CN110053969A (en) * | 2019-04-23 | 2019-07-26 | 浙江金麦特自动化系统有限公司 | A kind of robot automatic transporting cleaning system and method |
| CN113716258A (en) * | 2021-10-17 | 2021-11-30 | 东莞东华医院有限公司 | Intelligent medicine dispensing system and method based on intelligent medicine basket |
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| GR01 | Patent grant | ||
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| CP02 | Change in the address of a patent holder |
Address after: 523000 Room 101, building 2, No.1, Chibu Road, Zhangmutou town, Dongguan City, Guangdong Province Patentee after: GUANGDONG QITIAN AUTOMATIC INTELLIGENT EQUIPMENT Co.,Ltd. Address before: 523637, building 8, two bamboo street, Sassafras community, Zhangmutou town, Dongguan, Guangdong Patentee before: GUANGDONG QITIAN AUTOMATIC INTELLIGENT EQUIPMENT Co.,Ltd. |
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| CP02 | Change in the address of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180824 Termination date: 20210227 |
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| CF01 | Termination of patent right due to non-payment of annual fee |