CN207730671U - Hand-held LIBS optical systems - Google Patents
Hand-held LIBS optical systems Download PDFInfo
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- CN207730671U CN207730671U CN201721921922.1U CN201721921922U CN207730671U CN 207730671 U CN207730671 U CN 207730671U CN 201721921922 U CN201721921922 U CN 201721921922U CN 207730671 U CN207730671 U CN 207730671U
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Abstract
The utility model is related to a kind of hand-held LIBS optical systems, including laser, detector, the optical system further includes：Dichroic mirror, the first lens, the second lens, the third lens, hot spot is focused on into sample surfaces through the convergence of the first lens after the laser light dichroic mirror of laser transmitting, the characteristic light that sample is sent out is converged by the first lens, reaches slit after the second Lens Coupling, optical fiber transmission, the third lens convergence after dichroic mirror reflection；Concave grating, the characteristic light that slit is emitted by the concave grating are divided, and are entered detector after the 4th lens and detected；The both ends of the slit, concave grating and detector are located at diameter equal on the Rowland circle circumference of the concave grating radius of curvature；4th lens, the 4th lens make the characteristic light after light splitting reach the light path of detector and from concave grating directly to the equivalent optical path of Rowland circle circumference through the 4th lens from concave grating.The utility model has many advantages, such as that small, high resolution, Detection wavelength range are wide.
Description
Technical field
The utility model is related to spectrum analysis field, more particularly to a kind of compact hand-held LIBS optical systems.
Background technology
Laser induced breakdown spectrograph, abbreviation LIBS are that a kind of generated using pulse laser and is excited plasma ablation
Substance in sample obtains the spectrum that is emitted by the atom of plasma exciatiaon by spectrometer, is identified in sample with this
Element composition, and then carry out the identification of material, classification, qualitative and quantitative analysis instrument, both can be used for laboratory,
It can be applied to the on-line checking of industry spot.For the ease of Site Detection, hand-held LIBS comes into being.But current is hand-held
Formula LIBS has the following defects：
1. mostly use symmetrical or asymmetric Czerny-Turner type optical systems, this system need multiple collimating mirrors,
Imaging lens cause apparatus structure complicated, and volume is larger；Or shorten focal length to reduce volume, and resolution ratio is caused to reduce；
2. optical system wave-length coverage is relatively narrow, all band can not be covered, Element detection type is few.
Utility model content
In order to solve the deficiency in above-mentioned prior art, the utility model provide it is a kind of it is simple in structure, small,
The wide hand-held LIBS optical systems of high resolution, wave-length coverage.
The purpose of this utility model is achieved through the following technical solutions：
A kind of hand-held LIBS optical systems, including laser, detector, the optical system further include：
Dichroic mirror, dichroic mirror described in the laser light of laser transmitting；
First lens converge through first lens through the dichroiscopic laser, hot spot are focused on sample surfaces；
Second lens, the characteristic light that sample surfaces are sent out are converged by the first lens, are saturating through described second after dichroic mirror reflection
Mirror is coupled into optical fiber；
The third lens converge to slit from the characteristic light of the optical fiber output through the third lens；
Concave grating, the characteristic light that slit is emitted by the concave grating are divided, and enter detector after the 4th lens
Detection；The both ends of the slit, concave grating and detector are located at the Rowland circle that diameter is equal to the concave grating radius of curvature
On circumference；
4th lens, the 4th lens on light path difference compensate so that the characteristic light after light splitting is passed through from concave grating
4th lens reach detector light path with from concave grating without the 4th lens directly to the equivalent optical path of Rowland circle circumference.
According to above-mentioned optical system, it is preferable that the 4th lens are cylindrical lens, and the both ends of the cylindrical lens are in wedge
Shape.
According to above-mentioned optical system, it is preferable that the cylindrical lens are plano-convex cylindrical lens, and the side of neighbouring concave grating is
Curved surface converges the characteristic light.
According to above-mentioned optical system, optionally, the focal length of the cylindrical lens namely the cylindrical lens are imaged to detector
The distance f=R/ (n-1) in face, R are the radius of curvature of cylindrical lens curved surface, and n is the refractive index of cylindrical lens material.
According to above-mentioned optical system, it is preferable that the cylindrical lens are fixed on the surface of detector.
According to above-mentioned optical system, it is preferable that the concave grating, the 4th lens and detector constitute one group of measurement light
Road, the optical system include at least two groups of optical paths, and the incident light of first group of optical path is the characteristic light of slit outgoing,
The incident light of other group of optical path is 0 grade of light of concave grating in previous group optical path.
According to above-mentioned optical system, it is preferable that position of the detector both ends on Rowland circle circumference is surveyed by wavelength
Range is measured to determine.
According to above-mentioned optical system, it is preferable that the detector is detector array.
Compared with prior art, the utility model have the advantage that for：
1, the utility model is designed using Rowland circle, does not need collimating mirror and imaging lens, simple in structure, small；Pass through
In front of the detector plus the wedge shaped cylindrical lens in a both ends, it realizes and is all imaged on Rowland circle by the spectrum after grating, increased
Light intensity is detected, the signal-to-noise ratio of spectrometer is improved, improves resolution ratio.
2, the utility model is detected using detector array, and primary acquisition can obtain the spectrum letter of a level
Breath, spectra collection speed are fast.
3, the utility model realizes that 170-800nm is composed entirely by the superposition of multiple concave gratings, cylindrical lens and detector
Acquisition.
Description of the drawings
With reference to attached drawing, the disclosure of the utility model will be easier to understand.Skilled addressee readily understands that
It is：These attached drawings are used only for illustrating the technical solution of the utility model, and are not intended to the protection to the utility model
Range is construed as limiting.In figure：
Fig. 1 is the index path of the hand-held LIBS optical systems of the utility model embodiment 1.
Specific implementation mode
Fig. 1 and following description describe the optional embodiments of the utility model to instruct those skilled in the art how real
Apply and reproduce the utility model.In order to instruct technical solutions of the utility model, some conventional aspects are simplified or have been omitted.Ability
Field technique personnel should be appreciated that modification from these embodiments or replacement will be in the scope of the utility model.This field skill
Art personnel should be appreciated that following characteristics can be combined in various ways to form multiple modifications of the utility model.This reality as a result,
Following embodiments are not limited to novel, and are only limited by the claims and their equivalents.
Embodiment 1
Fig. 1 schematically illustrates the index path of the hand-held LIBS optical systems of the present embodiment, as shown in Figure 1, described
Optical system includes：
Laser 1, the laser send out laser to dichroic mirror；
Dichroic mirror 2, dichroic mirror described in the laser light；
First lens 3 converge through first lens through the dichroiscopic laser, hot spot are focused on 4 table of sample
Face；
Second lens 4, the characteristic light that sample surfaces are sent out are converged by the first lens, are saturating through described second after dichroic mirror reflection
Mirror is coupled into optical fiber 5；
The third lens 6 converge to slit 7 from the characteristic light of the optical fiber output through the third lens；
Concave grating 8, the characteristic light that slit is emitted by the concave grating are divided, and enter detection after the 4th lens 9
Device 10 detects；The both ends of the slit 7, concave grating 8 and detector 10 are located at diameter and are equal to the concave grating radius of curvature
Rowland circle circumference on；
4th lens 9, the 4th lens are cylindrical lens, and the cylindrical lens both ends 91,92 are wedge shaped；4th lens
Optical path difference is compensated so that characteristic light after light splitting from concave grating through the 4th lens reach the light path of detector with from recessed
Concave grating directly arrives the equivalent optical path of Rowland circle circumference without the 4th lens；
Detector 10, the detector are detector array, are detected to the characteristic light of sample element.
The detection zone of array detector is smaller, in order to increase detection light intensity, improves signal-to-noise ratio, therefore：
Further, the cylindrical lens are plano-convex cylindrical lens, and the side of neighbouring concave grating is curved surface, to the characteristic light
It is converged；To the distance f=R/ (n-1) of detector imaging surface, R is column for the focal length of the cylindrical lens namely the cylindrical lens
The radius of curvature of lens curved surface, n are the refractive index of cylindrical lens material.
Preferably, the cylindrical lens are fixed on the surface of detector, simplify structure.
The wavelength of secondary element to be measured is corresponded with its image space in detector, and therefore, detector both ends are in rowland
Position on round week is determined by wavelength measurement range.However, the limitation of examined device length, the inspection that single detector can measure
It is relatively narrow to survey range, therefore：
Further, the concave grating, the 4th lens and detector constitute one group of optical path, the optical system packet
Include at least two groups of optical paths, the incident light of first group of optical path is the characteristic light of slit outgoing, other group of optical path
Incident light is 0 grade of light of concave grating in previous group optical path.That is, previous group optical path determines next group of measurement light
Position of the concave grating on Rowland circle circumference in road, the position of detector is by wave-length coverage to be measured in next group of optical path
It determines, the measurable wave-length coverage of previous group optical path can be connected.
The present embodiment is had an advantage that：It is designed using Rowland circle, spectrometer architecture is simple, small, high resolution, can survey
The wave-length coverage of amount is wide.
Claims (8)
1. a kind of hand-held LIBS optical systems, including laser, detector, it is characterised in that：The optical system further includes：
Dichroic mirror, dichroic mirror described in the laser light of laser transmitting；
First lens converge through first lens through the dichroiscopic laser, hot spot are focused on sample surfaces；
Second lens, through the second lens coupling after the characteristic light that sample surfaces are sent out is converged by the first lens, dichroic mirror reflects
It closes and enters optical fiber；
The third lens converge to slit from the characteristic light of the optical fiber output through the third lens；
Concave grating, the characteristic light that slit is emitted by the concave grating are divided, and are entered detector after the 4th lens and detected；
The both ends of the slit, concave grating and detector are located at the Rowland circle circumference that diameter is equal to the concave grating radius of curvature
On；
4th lens, the 4th lens on light path difference compensate so that the characteristic light after light splitting is from concave grating through the 4th
Lens reach detector light path with from concave grating without the 4th lens directly to the equivalent optical path of Rowland circle circumference.
2. optical system according to claim 1, it is characterised in that：4th lens are cylindrical lens, the cylindrical lens
Both ends it is wedge shaped.
3. optical system according to claim 2, it is characterised in that：The cylindrical lens are plano-convex cylindrical lens, neighbouring concave surface
The side of grating is curved surface, is converged to the characteristic light.
4. optical system according to claim 3, it is characterised in that：Distance f of the cylindrical lens to detector imaging surface
=R/ (n-1), R are the radius of curvature of cylindrical lens curved surface, and n is the refractive index of cylindrical lens material.
5. optical system according to claim 4, it is characterised in that：The cylindrical lens are fixed on the surface of detector.
6. optical system according to claim 1, it is characterised in that：The concave grating, the 4th lens and detector structure
At one group of optical path, the optical system includes at least two groups of optical paths, and the incident light of first group of optical path is slit
The characteristic light of outgoing, the incident light of other group of optical path are 0 grade of light of concave grating in previous group optical path.
7. optical system according to claim 6, it is characterised in that：Position of the detector both ends on Rowland circle circumference
It sets and is determined by wavelength measurement range.
8. according to any optical systems of claim 1-7, it is characterised in that：The detector is detector array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721921922.1U CN207730671U (en) | 2017-12-30 | 2017-12-30 | Hand-held LIBS optical systems |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721921922.1U CN207730671U (en) | 2017-12-30 | 2017-12-30 | Hand-held LIBS optical systems |
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| CN207730671U true CN207730671U (en) | 2018-08-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108037111A (en) * | 2017-12-30 | 2018-05-15 | 杭州谱育科技发展有限公司 | Hand-held LIBS optical systems |
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- 2017-12-30 CN CN201721921922.1U patent/CN207730671U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108037111A (en) * | 2017-12-30 | 2018-05-15 | 杭州谱育科技发展有限公司 | Hand-held LIBS optical systems |
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