A kind of laser scoring system of flexible thin-film solar cell
Technical field
The utility model relates to a kind of laser scoring system of flexible thin-film solar cell, especially one kind is used for
The system for providing arbitrary shape pattern line with laser scribe on flexible solar battery, belongs to thin-film solar cells system
Make technical field.
Background technology
Energy crisis and environmental pollution are the two big basic problems that the current whole world is faced.Solar energy it is inexhaustible with it not
It exhausts, is a kind of important channel for solving energy crisis.In general, solar cell module, such as Thinfilm solar cell assembly are
The battery interconnected by using the monolithic of machinery/laser scribe is formed.
Fig. 1 show the conventional scribing technique for being used for CIGS solar cells in the prior art, and the routine scribing technique is total
Co-exist in three scribing line, i.e. P1, P2 and P3 line;Due to wasting solar radiation, so the region of P1 to P3 lines is referred to as extremely
Area.If mechanically crossed to P2 and P3 lines, entire dead zone ordinarily is about 0.2-0.3mm;If by using full laser scribing
Lithography crosses to them, then entire dead zone can be reduced within 0.2mm, such as 0.14-0.2mm.
For the Thinfilm solar cell assembly such as based on polyimides or stainless steel flexible substrate, by using routine
Laser scribe technology to carry out scribing be extremely difficult;This is because P1 lines are straight line at the beginning, also may be used in subsequent technique
It can be bent due to substrate by thermal deformation;If direct scribing P2 lines, easily intersect beside the P1 of bending, hair
Raw intersection be easy to cause component efficiency and reduces, even fails;In the case of P2 and P3 lines also will appear identical.
Invention content
The purpose of the utility model is to overcome the shortcomings of the prior art, and the one kind provided can be produced and be had
Different shape and various sizes of flexible thin-film solar cell component, greatly improve solar cell module yield and efficiency
Flexible thin-film solar cell laser scribing system.
The purpose of this utility model is completed by following technical solution, and a kind of flexible thin-film solar cell swashs
Light scoring system, it includes:
One is arranged on above absorption platform, believes for obtaining P1 lines or P2 line positions on the flexible thin-film solar cell
The pattern recognition device of breath, described image identification device include the first CCD camera and the second CCD camera, and the first CCD camera and
Angle between second CCD camera is 30 ° -150 °;
The absorption platform is used to fix flexible thin-film solar cell;
One is used for the location information according to the P1 lines or P2 lines, continues the laser on the flexible thin-film solar cell
Scribing P2 lines or P3 lines so that by the line of scribing and the P1 lines or P2 lines be of similar shape and with the P1 lines or P2
The laser scribe device of distance is remained fixed between line;The laser scribe device includes to guide control laser beam inclined
Turn the scanning galvanometer in direction, the scanning galvanometer is located at the center of the first CCD camera and the second CCD camera;
The laser scribe device is also included by laser, attenuator, beam expanding lens, frame of climbing, speculum and focus lamp
The flight light path of composition, from the picosecond pulse laser that laser exports by flight light path, using scanning galvanometer incidence
To the flexible thin-film solar cell being fixed on absorption platform;
One is used to control the motion control device that pattern recognition device, laser scribe device are moved in plane coordinate system.
As preferred:It is additionally provided with above the absorption platform and dust and smog is generated in scratching process for removing
Dust-extraction unit and ensure the high-brightness LED illumination of image clearly and accuracy of identification for supplementing brightness;The focus lamp is swept
It retouches galvanometer, the first CCD camera and the second CCD camera, high-brightness LED illumination and dust-extraction unit and is fixed on same hanging plate
On, and hanging plate is fixed in a linear guides X-axis;Movement of the linear guides X-axis in y-axis direction can pass through linear guides Y-axis
It completes, to ensure translation of the track in X-Y directions of laser beam.
The utility model is mainly used in the Thinfilm solar cell assembly based on CIGS, CZTS, CdTe etc. and is based on
The flexible solar battery pack of the substrate of polyimides, Ti foils and stainless steel foil etc.;It with can produce with
Different shape and various sizes of flexible thin-film solar cell component, it is special to improve solar cell module yield and efficiency etc.
Point.
Description of the drawings
Fig. 1 is a kind of CIGS solar cells conventional laser scribing artwork of the prior art.
Fig. 2 is the system composition figure of the full laser scribe of solar cell described in the utility model.
Fig. 3 is the laser platform schematic diagram of the full laser scribe of solar cell described in the utility model.
Specific embodiment
The application is further elaborated with embodiment below in conjunction with the accompanying drawings.Fig. 2, shown in 3, the utility model
The laser scoring system of the flexible thin-film solar cell, including:
One is arranged on 11 top of absorption platform, believes for obtaining P1 or P2 line positions on the flexible thin-film solar cell
The pattern recognition device of breath, described image identification device include the first CCD camera 801 and the second CCD camera 802, and the first CCD
Angle between 801 and second CCD camera 802 of camera is 30 ° -150 °;
The absorption platform 11 is used to fix flexible thin-film solar cell;
One is used for the location information according to P1 the or P2 lines, continues the laser scribing on the flexible thin-film solar cell
Carve P2 or P3 lines so that be of similar shape and protected between P1 the or P2 lines by the line of scribing and P1 the or P2 lines
Hold the laser scribe device of fixed range;The laser scribe device includes to guide control laser beam deflection direction
Scanning galvanometer 7, the scanning galvanometer 7 are located at the center of the first CCD camera 801 and the second CCD camera 802;
The laser scribe device is also included by laser 1, attenuator 2, beam expanding lens 3, frame 5 of climbing, speculum 4 and is gathered
The flight light path that burnt mirror 6 forms from the picosecond pulse laser that laser 1 exports by flight light path, shakes using the scanning
Mirror 7 is incident on the flexible thin-film solar cell being fixed on absorption platform 11;
One is used to control the motion control device that pattern recognition device, laser scribe device are moved in plane coordinate system.
Shown in figure, 11 top of absorption platform is additionally provided with generates dust and cigarette for removing in scratching process
The dust-extraction unit 10 of mist and ensure the high-brightness LED illumination 9 of image clearly and accuracy of identification for supplementing brightness;The focusing
Mirror 6, scanning galvanometer 7, CCD camera 801 and 802, high-brightness LED illumination 9 and dust-extraction unit 10 are fixed on same hanging plate
On 14, and hanging plate 14 is fixed in a linear guides X-axis 12;Movement of the linear guides X-axis 12 in y-axis direction can be by linear
Guide rail Y-axis 13 is completed, to ensure translation of the track in X-Y directions of laser beam.
A kind of laser scribe method that flexible thin-film solar cell is carried out using the system, the laser scribing side
Method is:
a)The image of P1 on the flexible thin-film solar cell is enrolled using pattern recognition device CCD camera, and is obtained
The location information of P1 lines;
b)According to the location information of the P1 lines of the acquisition, continue the laser scribe on the flexible thin-film solar cell
P2 lines so that the distance for being of similar shape and being remained fixed between the P1 lines by the line of scribing and the P1 lines;
c)On the other hand, P1 lines and the image of scribing P2 lines are enrolled using CCD camera, compares the location information of P1 and P2
Judge the quality of scribing P2 lines, and be modified the scribing that feedback continues to complete remaining P2 lines;
d)The image of P2 on the flexible thin-film solar cell is enrolled using pattern recognition device CCD camera, and is obtained
The location information of P2 lines;
e)According to the location information of the P2 lines of the acquisition, continue the laser scribe on the flexible thin-film solar cell
P3 lines so that the distance for being of similar shape and being remained fixed between the P2 lines by the line of scribing and the P2 lines;
f)On the other hand, P2 lines and the image of scribing P3 lines are enrolled using CCD camera, compares the location information of P2 and P3
Judge the quality of scribing P3 lines, and be modified the scribing that feedback continues to complete remaining P3 lines.
When carrying out laser scribe, the CCD devices in pattern recognition device, a position letter for being used to identify P1 or P2 lines
The scribing coordinate of the P2 or P3 to determine to need scribing are ceased, another is used for P2 the or P3 lines for detecting scribing, and is fed back;
Before scribe line is obtained, need to be corrected the CCD camera and scanning galvanometer, including system platform school
Just and scanning galvanometer corrects;
The scribe line can be straight line, broken line, wave.
Embodiment:First, one layer of Mo film is deposited on PI substrates as back electrode, is then divided Mo films by laser scribe
From into equally spaced width lines;Further, deposit absorbent layer CIGS, buffer layer CdS and i-ZnO film on Mo films;In P1 lines
Scribing another P2 lines in side are to remove CIGS, CdS and i-ZnO film;Further, AZO films are deposited on i-ZnO films as preceding electricity
Pole, at this time AZO deposit in P2 wire casings, between Mo layers and AZO layers formed conducting interconnection;Then another P3 of scribing beside P2 lines
Line is to remove CIGS, CdS, i-ZnO, AZO film(Or only remove AZO films).
Fig. 2,3 show scribing system 2000, export picosecond pulse laser from laser 1, which passes through beam attenuation
Device 2 enters beam expanding lens 3, and then light beam passes through beam expanding lens 3 and by being climbed the flight light that frame 5 etc. forms by speculum 4, optics
Road, then by focus lamp 6, scanning galvanometer 7 and be incident on the solar cell being fixed on absorption platform 11.Meanwhile laser
The deflection direction of light beam is controlled by scanning galvanometer 7, by the movement of light beam, to realize scribing line function.
In order to ensure P2 lines and P3 lines keep the same shape with P1 lines, the first CCD camera 801 or the 2nd CCD phases are used
Machine 802 carries out high-speed capture to scribe line, obtains the location information of scribe line;In the first CCD camera 801 or the 2nd CCD
When camera 802 captures capture images, high-brightness LED illumination 9 is disposed in solar cell adjacent position, true to supplement brightness
Protect image clearly and accuracy of identification.In addition, dust and smog that setting dust-extraction unit 10 generates for removing in scratching process.
The focus lamp 6, scanning galvanometer 7, CCD camera 801 and 802, high-brightness LED illumination 9, dust-extraction unit 10 are fixed
On same hanging plate 14, and hanging plate 14 is fixed in a linear guides X-axis 12;Linear guides X-axis 12 is in the movement in y-axis direction
It can be completed by linear guides Y-axis 13, it is possible thereby to ensure translation of the track in X-Y directions of laser beam.
In one embodiment, cage system can be added in flight light path for adjusting flight light path;It can also add in
Diaphragm, beam shaping, for improving scribing effect.
In another embodiment, when X-axis positive direction is crossed, the first CCD camera 801 enrolls the image of P1 lines, passes through meter
Calculation machine algorithm process can obtain the location information that P1 lines are each put;Then the location information each put according to the P1 lines of acquisition, profit
The opening of laser beam of computerizeing control and the deflection direction of scanning galvanometer 7 carry out laser scribe P2 lines;Meanwhile the
Two CCD cameras 802 can detect the quality of scribing P2 lines, and carry out feedback modifiers adjusting scanning galvanometer scribing parameter and continue to draw
Carve rest part P2 lines.
In yet another embodiment, when X-axis negative direction is crossed, the second CCD camera 802 enrolls the image of P1 lines, passes through meter
Calculation machine algorithm process can obtain the location information that P1 lines are each put;Then the location information each put according to the P1 lines of acquisition, profit
The opening of laser beam of computerizeing control and the deflection direction of scanning galvanometer 7 carry out laser scribe P2 lines.Meanwhile the
One CCD camera 801 can detect the quality of scribing P2 lines, and carry out feedback modifiers adjusting scanning galvanometer scribing parameter and continue to draw
Carve rest part P2 lines.
In other embodiments, due to having between the first CCD camera 801 and the second CCD camera 802 and scanning galvanometer 7
A certain amount of initial offset, therefore can realize and cross in scan image;Simultaneously because the first CCD camera 801 and the 2nd CCD phases
802 function of machine is consistent, therefore can realize back and forth round-trip scribing line, improves scribing line efficiency.
Above description is only the description to the principle of the application preferred embodiment and application technology.Those skilled in the art
It will be understood that in the case where conceiving without departing from utility model, the range of claimed scheme disclosed herein is unlimited
In those schemes being made of the specific combination of features described above, and any combinations by preceding feature or its equivalent feature should be covered
Other schemes formed, for example, being disclosed in this application by the way that the one or more features being discussed above are replaced with(But
It is not limited to)The one or more features with similar functions and the scheme that is formed.