CN207255698U - A kind of ultraprecise air supporting locating platform - Google Patents
A kind of ultraprecise air supporting locating platform Download PDFInfo
- Publication number
- CN207255698U CN207255698U CN201720936788.6U CN201720936788U CN207255698U CN 207255698 U CN207255698 U CN 207255698U CN 201720936788 U CN201720936788 U CN 201720936788U CN 207255698 U CN207255698 U CN 207255698U
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- CN
- China
- Prior art keywords
- slide unit
- side plate
- base
- column
- locating platform
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Linear Motors (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The utility model discloses a kind of ultraprecise air supporting locating platform, including horizontal base, the slide unit being located on base, it is used to support the column of slide unit, for driving the linear motor of slide unit, and it is fixed on base side and the vertical side plate extended along slide unit moving direction, the stator of linear motor is fixed on base, the mover of linear motor is fixedly connected with the bottom surface of slide unit, column is fixed on the bottom surface of slide unit, and column bottom is provided with for producing positive pressure so that the positive pressure air bearing of slide unit vertical suspension, slide unit is fixed with for ensureing its positive/negative-pressure air bearing moved along side plate extending direction close to the side of the side plate；Ultraprecise air supporting locating platform provided by the utility model, it is simple in structure, it is easy to process, bearing capacity is strong, slide unit small volume, ensure that moving direction can produce air film gap again by positive/negative-pressure air bearing, can realize the high speed of slide unit, high-accuracy positioning trip.
Description
Technical field
Air supporting locating platform technical field is the utility model is related to, more particularly to a kind of ultraprecise air supporting locating platform.
Background technology
High-precision and high-resolution accurate displacement work system is in high-tech such as modern military project, navigation, electronic manufactures
Occupy particularly important status in industry and field of scientific study, some precision, Ultra-precision machining, Precision measurement, super larges
High-precision accurate displacement workbench is all used in scale integrated circuit production.
Separated between workbench and guide rail with one layer of very thin gas, the air-flotation workbench using gas as lubricant, can be with
Realize workbench without friction, at high speed, high accuracy operation, and there is long lifespan, pollution-free, therefore be often applied to
In precision optical machinery.Generally use has orifice restriction guide rail air-flotation workbench and porous material air-flotation workbench at present, but small
Hole throttling guide rail air-flotation workbench orifice restriction bearing capacity is not strong, and the larger processed complex of platform, and porous material air supporting
Workbench processing technology is complicated, and platform is also larger.
Therefore how to solve the problems, such as air-flotation workbench is complicated, bearing capacity is low etc., be that those skilled in the art are current
The technical issues that need to address.
Utility model content
The purpose of this utility model is to provide a kind of ultraprecise air supporting locating platform, its is simple in structure, positioning accuracy is high and
Bearing capacity is strong.
In order to solve the above technical problems, a kind of ultraprecise air supporting locating platform of the utility model offer, including horizontal base,
The slide unit being located on the base, is used to support the column of the slide unit, for driving the linear motor of the slide unit, Yi Jigu
It is scheduled on the base side and the vertical side plate extended along the slide unit moving direction, the stator of the linear motor is fixed on institute
State on base, the mover of the linear motor is fixedly connected with the bottom surface of the slide unit, and the column is fixed on the slide unit
Bottom surface, and the column bottom is provided with for producing positive pressure so that the positive pressure air bearing of the slide unit vertical suspension, described
Slide unit is fixed with for ensureing its positive/negative-pressure air bearing moved along the side plate extending direction close to the side of the side plate.
Preferably, the grating scale for measuring the slide unit displacement is installed, the grating scale is equipped with the side plate
Grating reading head.
Preferably, the limiting photoelectric switch for limiting the slide unit displacement is also equipped with the base.
Preferably, including four columns, four columns are respectively provided at the corner of the slide unit bottom surface, wherein two
A column is close to the side plate, and the positive/negative-pressure air bearing is fixed on column described in above-mentioned two close to the side plate
Side.
Preferably, the base is marble base, and the side plate is marble side plate.
Preferably, the base is connected with the side plate bolt, the slide unit and the column and the linear motor
Mover be bolted.
Ultraprecise air supporting locating platform provided by the utility model, including horizontal base, the slide unit that is located on base, are used for
The column of slide unit is supported, for driving the linear motor of slide unit, and base side is fixed on and extends along slide unit moving direction
Vertical side plate, the stator of linear motor is fixed on base, and the mover of linear motor is fixedly connected with the bottom surface of slide unit, column
It is fixed on the bottom surface of slide unit, and column bottom is provided with for producing positive pressure so that the positive pressure air bearing of slide unit vertical suspension,
Slide unit is fixed with for ensureing its positive/negative-pressure air bearing moved along side plate extending direction close to the side of the side plate.
When slide unit works normally, the positive pressure air bearing ventilation of column bottom produces positive pressure, positive pressure air bearing and base
Between form air film gap, slide unit is suspended in z-direction, and the positive/negative-pressure air bearing ventilation positioned at slide unit side is produced at the same time
Raw positive pressure and negative pressure, negative pressure make the side of slide unit hold side plate, and the free degree of limitation slide unit in the X direction, prevents slide unit from moving
When shift, the positive pressure of generation makes to form air film gap between slide unit side and side plate, then controls straight-line electric in the Y direction
The i.e. controllable slide unit of the movement of machine realizes precision positioning.
In conclusion ultraprecise air supporting locating platform provided by the utility model, simple in structure, and it is easy to process, carry energy
Power is strong, slide unit small volume, ensure that moving direction can produce air film gap again by positive/negative-pressure air bearing, can realize
The high speed of slide unit, high-accuracy positioning trip.
Brief description of the drawings
Fig. 1 is a kind of structural representation of embodiment of ultraprecise air supporting locating platform provided by the utility model
Figure.
Embodiment
The core of the utility model is to provide a kind of ultraprecise air supporting locating platform, its is simple in structure, positioning accuracy is high and
Bearing capacity is strong.
In order to make those skilled in the art more fully understand the utility model, below in conjunction with the accompanying drawings and it is embodied
The utility model is described in further detail for mode.
Please refer to Fig.1, Fig. 1 is a kind of embodiment of ultraprecise air supporting locating platform provided by the utility model
Structure diagram.
The ultraprecise air supporting locating platform that the utility model embodiment provides, including horizontal base 1, it is located at base
Slide unit 3 on 1, for the linear motor 4 for driving slide unit 3 to move, and is fixed on the vertical side plate 2 of 1 side of base, vertical side
Plate 2 extends along 3 moving direction of slide unit, and the stator of linear motor 4 is fixed on the base 1, the mover and slide unit of linear motor 4
3 bottom surface is fixedly connected, and slide unit 3 is supported by column 5, and the top of column 5 is fixed on the bottom surface of slide unit 3, and 5 bottom of column is installed
There is positive pressure air bearing 6, slide unit 3 is fixed with positive/negative-pressure air bearing 7 by the side of proximal panel 2.
For convenience of description, the side that extending direction, that is, linear motor 4 of horizontal direction epipleural 2 can be driven slide unit 3 to move
To Y-direction is set to, the direction vertical with Y-direction is X-direction in horizontal direction, and vertical direction is set to Z-direction.
Slide unit 3 work normally when, 5 bottom of column positive pressure air bearing 6 ventilation produce positive pressure, positive pressure air bearing 6 with
Air film gap is formed between base 1, slide unit 3 is suspended in z-direction, and the positive/negative-pressure air bearing 7 positioned at 3 side of slide unit is logical
Gas produces positive pressure and negative pressure at the same time, and negative pressure makes the side of slide unit 3 hold side plate 2, and the free degree of limitation slide unit 3 in the X direction, prevents
On-slip platform 3 shifts when moving, and the positive pressure of generation makes to form air film gap between 3 side of slide unit and side plate 2, then in Y side
The i.e. controllable slide unit 3 of the movement of control linear motor 4 realizes precision positioning upwards.
In conclusion ultraprecise air supporting locating platform provided by the utility model, simple in structure, and it is easy to process, carry energy
Power is strong, 3 small volume of slide unit, ensure that moving direction can produce air film gap, Neng Goushi again by positive/negative-pressure air bearing 7
The high speed of existing slide unit 3, high-accuracy positioning trip.
On the basis of above-mentioned embodiment, the ultraprecise air supporting that the utility model embodiment provides positions
Platform, can be provided with the grating scale 8 for measuring 3 displacement of slide unit on side plate 2, and grating scale 8 is equipped with grating reading head 9；
When slide unit 3 moves under the drive of linear motor 4, the displacement of slide unit 3 is read in the measurement in real time of grating reading head 9, and can be by cunning
3 displacement of platform is uploaded to the controller of control locating platform.
Further, the ultraprecise air supporting locating platform that the utility model embodiment provides, may be used also on base 1
To be provided with the limiting photoelectric switch 10 for limiting 3 displacement of slide unit；Limiting photoelectric switch 10 can be connected with controller, and can
With previously according to the limit displacement value for needing to set slide unit 3 on the controller, when slide unit 3 moves under the drive of linear motor 4, grating
Grating reading head 9 on ruler 8 measures the displacement of slide unit 3 and is uploaded to controller in real time, when slide unit 3 is moved to default displacement limit
During value, controller control limiting photoelectric switch 10 is opened, and slide unit 3 can not move again, so as to fulfill spacing.
On the basis of above-mentioned each embodiment, slide unit 3 is usually square, to ensure the balance of slide unit 3 and holding
Loading capability, the ultraprecise air supporting locating platform that the utility model embodiment provides, can set four to be used to support
Column 5, four columns 5 can be respectively provided at the corner of 3 bottom surface of slide unit, and each 5 bottom of column is respectively and fixedly provided with a positive pressure sky
Gas bearing 6；In addition, two in four columns 5 are leaned on proximal panel 2, positive/negative-pressure air bearing 7 can be fixed on above-mentioned two and stood
Column 5 leans on the side of proximal panel 2, to facilitate the setting of positive/negative-pressure air bearing 7, and ensures not influencing slide unit 3.
On the basis of above-mentioned each embodiment, the ultraprecise air supporting that the utility model embodiment provides is determined
Bit platform, to ensure the positioning accuracy of slide unit 3 and mobile stationarity, it is desirable to which the surface of base 1 and side plate 2 is smooth surface, tool
Body, base 1 can be marble base 1, and side plate 2 is marble side plate 2；It is of course also possible to select other light such as glass plate
Slide plate material, within the scope of protection of the utility model.
The ultraprecise air supporting locating platform that the utility model embodiment provides, specifically may be used between base 1 and side plate 2
It to be bolted, can be connected by screw bolts, be bolted simple between slide unit 3 and the mover of column 5 and linear motor 4
It is convenient, it is reliable and stable, and detachably, it is of course also possible to use other connection modes such as welding, clamping, in the utility model
Protection domain within.
Ultraprecise air supporting locating platform provided by the utility model is described in detail above.It is used herein
Specific case is set forth the principle and embodiment of the utility model, and the explanation of above example is only intended to help to manage
Solve the method and its core concept of the utility model.It should be pointed out that for those skilled in the art, not
On the premise of departing from the utility model principle, some improvement and modification can also be carried out to the utility model, these improve and repair
Decorations are also fallen into the protection domain of the utility model claims.
Claims (6)
1. a kind of ultraprecise air supporting locating platform, it is characterised in that including horizontal base, the slide unit being located on the base, use
In the column for supporting the slide unit, for driving the linear motor of the slide unit, and the base side is fixed on and along institute
The vertical side plate of slide unit moving direction extension is stated, the stator of the linear motor is fixed on the base, the linear motor
Mover be fixedly connected with the bottom surface of the slide unit, the column is fixed on the bottom surface of the slide unit, and the column bottom is pacified
Equipped with for producing positive pressure so that the positive pressure air bearing of the slide unit vertical suspension, the slide unit is close to the side of the side plate
It is fixed with for ensureing its positive/negative-pressure air bearing moved along the side plate extending direction.
2. ultraprecise air supporting locating platform according to claim 1, it is characterised in that be provided with the side plate for surveying
The grating scale of the slide unit displacement is measured, the grating scale is equipped with grating reading head.
3. ultraprecise air supporting locating platform according to claim 2, it is characterised in that be also equipped with being used on the base
Limit the limiting photoelectric switch of the slide unit displacement.
4. the ultraprecise air supporting locating platform according to claims 1 to 3 any one, it is characterised in that including four institutes
State column, four columns are respectively provided at the corner of the slide unit bottom surface, column described in two of which close to the side plate, and
The positive/negative-pressure air bearing is fixed on column described in above-mentioned two close to the side of the side plate.
5. ultraprecise air supporting locating platform according to claim 4, it is characterised in that the base is marble base,
The side plate is marble side plate.
6. ultraprecise air supporting locating platform according to claim 5, it is characterised in that the base and the side plate bolt
Connection, the slide unit are bolted with the mover of the column and the linear motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720936788.6U CN207255698U (en) | 2017-07-28 | 2017-07-28 | A kind of ultraprecise air supporting locating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720936788.6U CN207255698U (en) | 2017-07-28 | 2017-07-28 | A kind of ultraprecise air supporting locating platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207255698U true CN207255698U (en) | 2018-04-20 |
Family
ID=61927535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720936788.6U Expired - Fee Related CN207255698U (en) | 2017-07-28 | 2017-07-28 | A kind of ultraprecise air supporting locating platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207255698U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107214530A (en) * | 2017-07-28 | 2017-09-29 | 广东工业大学 | A kind of ultraprecise air supporting locating platform |
-
2017
- 2017-07-28 CN CN201720936788.6U patent/CN207255698U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107214530A (en) * | 2017-07-28 | 2017-09-29 | 广东工业大学 | A kind of ultraprecise air supporting locating platform |
| CN107214530B (en) * | 2017-07-28 | 2024-04-19 | 广东工业大学 | Ultra-precise air floatation positioning platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180420 Termination date: 20200728 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |