CN206751972U - A kind of improved polycrystalline furnace - Google Patents
A kind of improved polycrystalline furnace Download PDFInfo
- Publication number
- CN206751972U CN206751972U CN201720518855.2U CN201720518855U CN206751972U CN 206751972 U CN206751972 U CN 206751972U CN 201720518855 U CN201720518855 U CN 201720518855U CN 206751972 U CN206751972 U CN 206751972U
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- polycrystalline furnace
- main body
- furnace main
- bell
- crucible
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Abstract
The utility model discloses a kind of improved polycrystalline furnace,Including support column,Support block and polycrystalline furnace main body,The support column has four,The square corner distribution of four support columns,Polycrystalline furnace main body is arranged on four support columns by support block,And polycrystalline furnace main body is provided with bell,Two spiral lifts are provided with the both sides of polycrystalline furnace main body,Spiral lift is connected by threaded support bar with connecting plate,Connecting plate is connected by thermal insulation board with charging crucible,So that spiral lift can drive charging crucible to rise by threaded rod,Reduce the distance of crucible and conveyer belt,So that material reduces to the impulsive force of crucible bottom,Crucible bottom will not be caused to damage,The diminution of other distance causes material not fall into easily on the outside of crucible,Improve the operating efficiency of polycrystalline furnace,Projection and inserted block are provided with bell,Seal convexity is provided with polycrystalline furnace main body,Inserted block insertion seal convexity can seal the connecting portion of polycrystalline furnace main body and bell.
Description
Technical field
Production of polysilicon equipment correlative technology field is the utility model is related to, specially a kind of improved polycrystalline furnace.
Background technology
Polycrystalline silicon ingot or purifying furnace is the necessary equipment that polycrystalline silicon material is converted into during polysilicon ingot process, and polycrystal silicon ingot passes through
It is the basic material in photovoltaic generation and semicon industry again after PROCESS FOR TREATMENT.Key of the polycrystal silicon ingot as advanced information society
Backing material, it is one of current polycrystalline material most important in the world, it is not only to develop the main of computer and integrated circuit
Functional material, and photovoltaic generation utilize the major function material of solar energy.In general polycrystalline furnace is all first by stove in charging
Lid is opened, and material is poured into body of heater from conveyer belt, and because conveyer belt and body of heater have some distances, material is when falling into body of heater
Impact can be produced to furnace bottom, may result in furnace bottom rupture, polycrystalline furnace is caused to damage, also have some materials not pour into stove
Body and can fall into outside body of heater, reduce the operating efficiency of polycrystalline furnace.
Utility model content
The purpose of this utility model is to provide a kind of improved polycrystalline furnace, asked with solve to propose in above-mentioned background technology
Topic.
To achieve the above object, the utility model provides following technical scheme：A kind of improved polycrystalline furnace, including support
Post, support block and polycrystalline furnace main body, the support column have four, and the square corner of four support columns is distributed, polycrystalline furnace main body
It is arranged on by support block on four support columns, and polycrystalline furnace main body is provided with bell, peace is fixed in the upper surface of the support block
Equipped with spiral lift, the lower end of threaded support bar is plugged with the screwed hole in spiral lift, the threaded support bar
Upper end is fixedly connected with one end of connecting plate, and the other end of connecting plate and one end of thermal insulation board connect, and the upper and lower ends of thermal insulation board are equal
For arcwall face structure, the other end of thermal insulation board is fixedly connected with the upper end flange of charging crucible, and the charging crucible is located at polycrystalline furnace
In main body, and the outside for the crucible that feeds is provided with heater, and heater is located on the inwall of polycrystalline furnace main body, the charging earthenware
The top of crucible is provided with heat conductivity heat-insulating plate, and heat conductivity heat-insulating plate is connected by the inwall of heater and bell, the opening edge of the bell
Projection is provided with the inside of edge, one end of inserted block, the other end insertion polycrystalline furnace main body of inserted block are fixedly connected with the downside of the end of projection
In the seal groove on seal convexity on the inside of edge of opening.
Preferably, the connection end surface of the polycrystalline furnace main body and bell is equipped with cushion, polycrystalline furnace main body and stove
The opening both ends of lid are arranged with two notches, and the notch on polycrystalline furnace main body and bell complements each other to form rectangular channel
Mouthful, connecting plate runs through rectangular notch.
Preferably, the outside of the connecting plate is provided with elastic seal ring, elastic seal ring be fitted and connected polycrystalline furnace main body and
Notch on bell, and projection is provided with the inside of the notch on polycrystalline furnace main body and bell, raised end is provided with heat-insulated cushion pad,
Heat-insulated cushion pad is fitted and connected with thermal insulation board.
Preferably, the projection, inserted block and seal convexity are loop configuration, and the both ends of inserted block are equipped with link slot, even
The opening both sides of access slot are set to arcuate structure, and the inner cavity top of link slot is provided with buffering articulamentum, thermal insulation board insertion link slot
It is interior.
Compared with prior art, the beneficial effects of the utility model are：The utility model is rational in infrastructure, simple and practical,
The both sides of polycrystalline furnace main body are provided with two spiral lifts, and spiral lift is connected by threaded support bar with connecting plate, connection
Plate is connected by thermal insulation board with charging crucible so that spiral lift can drive charging crucible to rise by threaded rod, make crucible
Reduced with the distance of conveyer belt so that material reduces to the impulsive force of crucible bottom, and crucible bottom will not be caused to damage, in addition away from
From diminution material will not be fallen on the outside of crucible easily, improve the operating efficiency of polycrystalline furnace, projection be provided with bell
And inserted block, seal convexity is provided with polycrystalline furnace main body, inserted block insertion seal convexity can be by the connection of polycrystalline furnace main body and bell
Portion seals, and solves weak point of the prior art well.
Brief description of the drawings
Fig. 1 is the utility model structure diagram；
Fig. 2 is the utility model polycrystalline furnace agent structure diagrammatic cross-section；
Fig. 3 is the utility model connecting board structure diagrammatic cross-section；
Fig. 4 is the utility model connecting board structure side elevational cross-section schematic diagram；
Fig. 5 is the utility model inserted block structural profile illustration.
In figure：Support column 1, support block 2, polycrystalline furnace main body 3, bell 4, spiral lift 5, threaded support bar 6, connecting plate
7th, elastic seal ring 71, thermal insulation board 8, charging crucible 9, heater 10, heat conductivity heat-insulating plate 11, projection 12, inserted block 13, sealing are convex
Play 14, link slot 15.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
Fig. 1-5 are referred to, the utility model provides a kind of technical scheme：A kind of improved polycrystalline furnace, including support column 1,
Support block 2 and polycrystalline furnace main body 3, support column 1 have four, and four 1 square corner of support column distributions, polycrystalline furnace main body 3 leads to
Support block 2 is crossed on four support columns 1, and polycrystalline furnace main body 3 is provided with bell 4, the upper surface of support block 2 is fixedly mounted
Have a spiral lift 5, be plugged with the lower end of threaded support bar 6 in the screwed hole in spiral lift 5, threaded support bar 6 it is upper
End is fixedly connected with one end of connecting plate 7, and the connection end surface of polycrystalline furnace main body 3 and bell 4 is equipped with cushion, polycrystalline furnace master
The opening both ends of body 3 and bell 4 are arranged with two notches, and the notch mutual cooperation shape on polycrystalline furnace main body 3 and bell 4
Rectangular notch, connecting plate 7 run through rectangular notch, and the other end of connecting plate 7 is connected with one end of thermal insulation board 8, outside connecting plate 7
Side is provided with elastic seal ring 71, and elastic seal ring 71 is fitted and connected the notch on polycrystalline furnace main body 3 and bell 4, and polycrystalline furnace master
Projection is provided with the inside of notch on body 3 and bell 4, raised end is provided with heat-insulated cushion pad, and heat-insulated cushion pad pastes with thermal insulation board 8
Connection is closed, the upper and lower ends of thermal insulation board 8 are arcwall face structure, and the other end of thermal insulation board 8 is fixedly connected with the upper end of charging crucible 9
Flange, charging crucible 9 are located in polycrystalline furnace main body 3, and the outside for the crucible 9 that feeds is provided with heater 10, heater 10
In on the inwall of polycrystalline furnace main body 3, the top of charging crucible 9 is provided with heat conductivity heat-insulating plate 11, and heat conductivity heat-insulating plate 11 passes through heater
It is connected with the inwall of bell 4, projection 12 is provided with the inside of the edge of opening of bell 4, is fixedly connected with the downside of the end of projection 12 slotting
One end of block 13, the other end of inserted block 13 are inserted in the seal groove on the seal convexity 14 on the inside of the edge of opening of polycrystalline furnace main body 3,
Projection 12, inserted block 13 and seal convexity 14 are loop configuration, and the both ends of inserted block 13 are equipped with link slot 15, and link slot 15 is opened
Mouth both sides are set to arcuate structure, and the inner cavity top of link slot 15 is provided with buffering articulamentum, and thermal insulation board 8 is inserted in link slot 15.
When polycrystalline furnace works, first bell 4 is opened, then starts spiral lift 5, spiral lift 5 drives screw thread
Support bar 6 moves up, and threaded support bar 6 drives charging crucible 9 to rise by connecting plate 7 and thermal insulation board 8, draws in charging crucible
9 with the distance of conveyer belt, after the completion of material dispensing, declined by the crucible 9 that will feed of spiral lift 5, now connecting plate 7 moves
Move to the notch on polycrystalline furnace main body 3, then bell 4 is covered, the notch on bell 4 is fitted and connected with connecting plate 7, is now inserted
Link slot 15 on block 13 is inserted on thermal insulation board 8, because the opening of link slot 15 is is obliquely installed, facilitate link slot 15 with it is heat-insulated
The connection of plate 8, then in the seal groove on the insertion of inserted block 13 seal convexity 14.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art,
It is appreciated that these embodiments can be carried out with a variety of changes in the case where not departing from principle of the present utility model and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (4)
1. a kind of improved polycrystalline furnace, including support column (1), support block (2) and polycrystalline furnace main body (3), the support column (1) have
Four, the square corner distribution of four support columns (1), polycrystalline furnace main body (3) is arranged on four support columns by support block (2)
(1) on, and polycrystalline furnace main body (3) is provided with bell (4), it is characterised in that：The upper surface of the support block (2) is installed with
Spiral lift (5), the lower end of threaded support bar (6), the threaded support are plugged with the screwed hole in spiral lift (5)
The upper end of bar (6) is fixedly connected with one end of connecting plate (7), and the other end of connecting plate (7) is connected with one end of thermal insulation board (8), every
The upper and lower ends of hot plate (8) are arcwall face structure, and the upper end that the other end of thermal insulation board (8) is fixedly connected with the crucible (9) that feeds is convex
Edge, the charging crucible (9) are located in polycrystalline furnace main body (3), and the outside for the crucible (9) that feeds is provided with heater (10), adds
Thermal (10) is located on the inwall of polycrystalline furnace main body (3), and the top of the charging crucible (9) is provided with heat conductivity heat-insulating plate (11),
Heat conductivity heat-insulating plate (11) is connected by heater with the inwall of bell (4), and projection is provided with the inside of the edge of opening of the bell (4)
(12) one end of inserted block (13), the other end insertion polycrystalline furnace master of inserted block (13), are fixedly connected with the downside of the end of projection (12)
In the seal groove on seal convexity (14) on the inside of body (3) edge of opening.
A kind of 2. improved polycrystalline furnace according to claim 1, it is characterised in that：The polycrystalline furnace main body (3) and bell
(4) connection end surface is equipped with cushion, and the opening both ends of polycrystalline furnace main body (3) and bell (4) are arranged with two
Notch, and the notch on polycrystalline furnace main body (3) and bell (4) complements each other to form rectangular notch, connecting plate (7) runs through rectangular channel
Mouthful.
A kind of 3. improved polycrystalline furnace according to claim 1 or 2, it is characterised in that：Set on the outside of the connecting plate (7)
Flexible sealing ring (71), elastic seal ring (71) are fitted and connected the notch on polycrystalline furnace main body (3) and bell (4), and polycrystalline
Be provided with projection on the inside of notch on furnace main body (3) and bell (4), raised end is provided with heat-insulated cushion pad, heat-insulated cushion pad and
Thermal insulation board (8) is fitted and connected.
A kind of 4. improved polycrystalline furnace according to claim 1, it is characterised in that：The projection (12), inserted block (13) and
Seal convexity (14) is loop configuration, and the both ends of inserted block (13) are equipped with link slot (15), the opening both sides of link slot (15)
Arcuate structure is set to, and the inner cavity top of link slot (15) is provided with buffering articulamentum, thermal insulation board (8) insertion link slot (15) is interior.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720518855.2U CN206751972U (en) | 2017-05-11 | 2017-05-11 | A kind of improved polycrystalline furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720518855.2U CN206751972U (en) | 2017-05-11 | 2017-05-11 | A kind of improved polycrystalline furnace |
Publications (1)
| Publication Number | Publication Date |
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| CN206751972U true CN206751972U (en) | 2017-12-15 |
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| CN201720518855.2U Active CN206751972U (en) | 2017-05-11 | 2017-05-11 | A kind of improved polycrystalline furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112501683A (en) * | 2020-11-16 | 2021-03-16 | 连城凯克斯科技有限公司 | Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment |
-
2017
- 2017-05-11 CN CN201720518855.2U patent/CN206751972U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112501683A (en) * | 2020-11-16 | 2021-03-16 | 连城凯克斯科技有限公司 | Height adjusting device for quartz crucible in single crystal furnace of semiconductor equipment |
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