CN205382208U

CN205382208U - Silicon chip mounting fixture

Info

Publication number: CN205382208U
Application number: CN201521038992.3U
Authority: CN
Inventors: 史公彬; 金重玄
Original assignee: Hangzhou Dahe Thermo Magnetics Co Ltd
Current assignee: Hangzhou Dahe Thermo Magnetics Co Ltd
Priority date: 2015-12-14
Filing date: 2015-12-14
Publication date: 2016-07-13
Anticipated expiration: 2025-12-14

Abstract

The utility model discloses a silicon chip mounting fixture, including the crosspiece, be equipped with the clamping bar group that a plurality of orientations are the same and distribute evenly on the crosspiece, the clamping bar component do not corresponds many silicon chips that load in the graphite boat, and clamping bar group is including two clamping bars, and the interval of two clamping bars identical and insert the silicon chip with silicon chip thickness, and the distance on clamping bar length and graphite boat and the silicon chip is identical, the utility model discloses setting up the anchor clamps of fixed silicon chip on the silicon chip top, through the corresponding silicon chip of centre gripping respectively of the clamping bar in the anchor clamps, making the silicon chip all have the fixed point all around, silicon chip upper portion just can not the bending deformation when the high temperature coating film, and simultaneously, the silicon chip also keeps unanimous with the distance of graphite boat, reduces the electrically conductive difference of each position in the silicon chip, and messenger PECVD coating film homogeneity is effectively promoted.

Description

A kind of silicon chip stationary fixture

Technical field

This utility model relates to a kind of silicon chip film-coated technical field, refers more particularly to a kind of silicon chip stationary fixture that can improve silicon chip film-coated quality.

Background technology

PECVD tubular film plating operation in the manufacture of current solar battery sheet, silicon chip inserts in graphite boat, graphite boat is respectively arranged with a bail and is fixed by silicon chip in left and right and bottom, bail position is as shown in Figure 1, silicon chip contacts with graphite boat well, conduction is better, but the top of silicon chip top margin and a side is then owing to needs stay insertion passage can not arrange bail for silicon chip, silicon chip flexural deformation it is easily caused under high temperature action in coated stove, distance between silicon chip top and graphite boat piece changes, affect the electric conductivity between silicon chip and graphite boat, the spacing of silicon chip is different, also electric field intensity can be affected, thus affecting coating effects, reduce Si wafer quality.

Utility model content

This utility model mainly solves silicon chip top in existing graphite boat and cannot arrange bail and easily cause silicon chip flexural deformation, affect the technical problem of coating effects；The silicon chip stationary fixture providing a kind of energy silicon chip film-coated quality of raising is notable.

In order to solve the technical problem of above-mentioned existence, this utility model mainly adopts following technical proposals:

nullA kind of silicon chip stationary fixture of the present utility model，For the silicon chip clamping in solaode PECVD coated graphite boat，Described stationary fixture includes strut rail，Described strut rail is provided with the clamping bar group that some directions are identical and are evenly distributed，The more than one piece silicon chip loaded in described clamping bar group corresponding described graphite boat respectively，Clamping bar group includes two clamping bars，Described clamping bar spacing matches with silicon wafer thickness and inserts in silicon chip，Clamping bar length and graphite boat match with the distance of silicon chip upper end，The fixture of fixing silicon chip is set on silicon chip top，Corresponding silicon chip is clamped respectively by the clamping bar in fixture，Silicon chip surrounding is made all to have fixing point，Silicon chip top would not flexural deformation when high temperature plated film，Simultaneously，Silicon chip also keeps consistent with the distance of graphite boat，The conduction difference of each position in minimizing silicon chip，PECVD plated film uniformity is made effectively to be promoted.

As preferably, described clamping bar group and described strut rail integrative-structure and be perpendicular to strut rail.

As preferably, described strut rail axial cross section is rectangle or square, and described clamping bar axial cross section is rectangle or square, it is simple to the making of fixture and assembling, also allows for fixture fixing on silicon chip.

As preferably, the longitudinal cross-section of described clamping bar leading section is triangular shape, and its inclined-plane is corresponding also contacts against silicon chip edge, and triangular ramp is few with silicon chip contact area, for point cantact, without influence on the coating effects of silicon chip.

As preferably, the material of described stationary fixture is ceramic material, when stationary fixture uses, will not conduct electricity, nor affect on the electric discharge of graphite boat between silicon chip.

The beneficial effects of the utility model are: the silicon chip top loaded in graphite boat arranges the fixture of fixing silicon chip, corresponding silicon chip is clamped respectively by the clamping bar in fixture, silicon chip surrounding is made all to have fixing point, silicon chip top would not flexural deformation when high temperature plated film, simultaneously, silicon chip also keeps consistent with the distance of graphite boat, the conduction difference of each position in minimizing silicon chip, makes PECVD plated film uniformity effectively be promoted.

Accompanying drawing explanation

Fig. 1 is the fixing schematic diagram of silicon chip of prior art.

Fig. 2 is a kind of silicon chip fixing jig structure schematic diagram of the present utility model.

Fig. 3 adopts silicon chip fixed structure schematic diagram of the present utility model.

Fig. 4 adopts silicon chip fixed structure top view of the present utility model

1. graphite boat in figure, 2. silicon chip, 3. stationary fixture, 31. strut rails, 32. clamping bar groups, 321. clamping bars, 33. clamping bar spacing, 4. bails.

Detailed description of the invention

By the examples below, and in conjunction with accompanying drawing, the technical solution of the utility model is described in further detail.

Embodiment: a kind of silicon chip stationary fixture of the present embodiment, clamp for the silicon chip 2 in solaode PECVD coated graphite boat 1, as shown in Figure 2, the material of stationary fixture 3 is ceramic material, stationary fixture includes strut rail 31, strut rail axial cross section is rectangle, strut rail is provided with the clamping bar group 32 that some directions are identical and are evenly distributed, clamping bar group and strut rail integrative-structure and be perpendicular to strut rail, the more than one piece silicon chip loaded in clamping bar group corresponding graphite boat respectively, clamping bar group includes two clamping bars 321, clamping bar spacing 33 matches with silicon wafer thickness and inserts in silicon chip, clamping bar length and graphite boat match with the distance of silicon chip upper end, clamping bar axial cross section is rectangle, the longitudinal cross-section of clamping bar leading section is triangular shape, its inclined-plane is corresponding and contacts against silicon chip edge.

During use, as shown in Figure 3 and Figure 4, silicon chip is inserted in graphite boat respectively, silicon chip fixed by the bail 4 of about silicon chip and bottom, then, stationary fixture is inserted silicon chip top, make the inclined-plane of clamping bar end be pressed against silicon chip upper end, make silicon chip upper end also be fixed, complete whole loading silicon chip loading in graphite boat.

In description of the present utility model, technical term " on ", D score, " front ", " afterwards ", " left side ", " right side ", " indulge ", " horizontal stroke ", " interior ", " outward " etc. represent that direction or position relationship are based on direction shown in the drawings or position relationship, it is for only for ease of description and understands the technical solution of the utility model, described above is not that this utility model has been done restriction, this utility model is also not limited to the citing of described above, the change that those skilled in the art are made in essential scope of the present utility model, remodeling, increase or replace, it is regarded as protection domain of the present utility model.

Claims

1. a silicon chip stationary fixture, clamp for the silicon chip (2) in solaode PECVD coated graphite boat (1), it is characterized in that: described stationary fixture (3) includes strut rail (31), described strut rail is provided with the clamping bar group (32) that some directions are identical and are evenly distributed, the more than one piece silicon chip loaded in described clamping bar group corresponding described graphite boat respectively, clamping bar group includes two clamping bars (321), described clamping bar spacing (33) matches with silicon wafer thickness and inserts in silicon chip, and clamping bar length and graphite boat match with the distance of silicon chip upper end.

2. a kind of silicon chip stationary fixture according to claim 1, it is characterised in that: described clamping bar group (32) and described strut rail (31) integrative-structure and be perpendicular to strut rail.

3. a kind of silicon chip stationary fixture according to claim 1 and 2, it is characterised in that: described strut rail (31) axial cross section is rectangle or square, and described clamping bar (321) axial cross section is rectangle or square.

4. a kind of silicon chip stationary fixture according to claim 3, it is characterised in that: the longitudinal cross-section of described clamping bar (321) leading section is triangular shape, and its inclined-plane is corresponding and contacts against silicon chip edge.

5. a kind of silicon chip stationary fixture according to claim 1, it is characterised in that: the material of described stationary fixture (3) is ceramic material.