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CN204807233U - Temperature sensor of photonic crystal optic fibre michelson interferometer based on corrosion treatment - Google Patents

Temperature sensor of photonic crystal optic fibre michelson interferometer based on corrosion treatment Download PDF

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CN204807233U
CN204807233U CN201520438068.8U CN201520438068U CN204807233U CN 204807233 U CN204807233 U CN 204807233U CN 201520438068 U CN201520438068 U CN 201520438068U CN 204807233 U CN204807233 U CN 204807233U
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fiber
photonic crystal
transmission
circulator
michelson interferometer
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黄然
倪凯
马启飞
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China Jiliang University
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Abstract

本实用新型提供了一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于:由宽带光源1、传输光纤2、环形器3、传输光纤4、传感头5、温度控制箱6、传输光纤7、光谱仪8组成;经过腐蚀并在端面镀石墨烯膜和金膜的光子晶体光纤构成传感头5,传感头5的一端通过传输光纤4与环形器3的b端相连,传感头5置于温度控制箱6中;环形器的a端通过传输光纤2与宽带光源1相连,环形器的c端通过传输光纤7与光谱仪8相连。本实用新型体积小,探头式结构使用方便,抗电磁干扰、耐腐蚀、灵敏度高。

The utility model provides a temperature sensor of a photonic crystal optical fiber Michelson interferometer based on corrosion treatment, which is characterized in that: a broadband light source 1, a transmission optical fiber 2, a circulator 3, a transmission optical fiber 4, a sensing head 5, and a temperature control Box 6, transmission optical fiber 7, and spectrometer 8; the photonic crystal optical fiber that has been corroded and coated with graphene film and gold film on the end surface constitutes the sensor head 5, and one end of the sensor head 5 passes through the transmission fiber 4 and the b end of the circulator 3 The sensor head 5 is placed in the temperature control box 6; the a end of the circulator is connected to the broadband light source 1 through the transmission fiber 2, and the c end of the circulator is connected to the spectrometer 8 through the transmission fiber 7. The utility model has the advantages of small volume, convenient use of the probe structure, anti-electromagnetic interference, corrosion resistance and high sensitivity.

Description

一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器A Temperature Sensor Based on Corrosion Processed Photonic Crystal Fiber Michelson Interferometer

技术领域technical field

本实用新型属于光纤传感技术领域,具体涉及一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器。The utility model belongs to the technical field of optical fiber sensing, in particular to a temperature sensor of a photonic crystal optical fiber Michelson interferometer based on corrosion treatment.

背景技术Background technique

光纤传感技术是20世纪70年代伴随光纤通信技术的发展而迅速发展起来的,它是以光波为载体,光纤为媒质,感知和传输外界被测量信号的新型传感技术,是许多经济、军事强国争相研究的高新技术,可广泛应用于国民经济的各个领域和国防军事领域,如在航天(温度测量、陀螺等)、电力传输(高压输电网的电流测量、电压测量)、航海(声纳)、石油开采(液面高度、流量测量)、科学研究等众多领域的应用。光纤传感器的传感灵敏度要比传统传感器高许多倍,具有高灵敏度、耐腐蚀、抗干扰、体积小等优点。Optical fiber sensing technology developed rapidly with the development of optical fiber communication technology in the 1970s. It uses light waves as the carrier and optical fiber as the medium to perceive and transmit external measured signals. It is a new type of sensing technology for many economic and military The high and new technologies that the powerful countries are vying to research can be widely used in various fields of national economy and national defense and military fields, such as in aerospace (temperature measurement, gyroscope, etc.), power transmission (current measurement and voltage measurement of high-voltage transmission network), navigation (acoustic measurement, etc.) Sodium), petroleum exploration (liquid level height, flow measurement), scientific research and many other fields of application. The sensing sensitivity of fiber optic sensors is many times higher than that of traditional sensors, and has the advantages of high sensitivity, corrosion resistance, anti-interference, and small size.

光子晶体光纤(photoniccrystalfibers,简称PCF)由石英材料构成,是一种介电常数呈周期性分布的光纤,其变化周期的数量级达到光波长的数量级,是具有光子频率禁带的特殊光学材料。光子晶体光纤相较于传统光纤,具有无截止单模传输、可调节色散、高双折射、可进行偏振控制等特性。按照导光原理,光子晶体光纤可分为折射率引导型光子晶体光纤和光子带隙型光子晶体光纤。折射率引导型光子晶体光纤与传统全内反射光纤导光机制类似,其纤芯的有效折射率高于包层的有效折射率,满足全内反射导光原理条件。本专利采用的光子晶体光纤LMA-10即是一种折射率引导型光子晶体光纤。Photonic crystal fiber (photonic crystal fiber, referred to as PCF) is composed of quartz material. It is a kind of optical fiber with periodic distribution of dielectric constant. The order of magnitude of its change period reaches the order of light wavelength. Compared with traditional optical fibers, photonic crystal fibers have the characteristics of unlimited single-mode transmission, adjustable dispersion, high birefringence, and polarization control. According to the light guiding principle, photonic crystal fiber can be divided into refractive index guided photonic crystal fiber and photonic bandgap photonic crystal fiber. The refractive index guided photonic crystal fiber is similar to the light guiding mechanism of the traditional total internal reflection fiber. The effective refractive index of the core is higher than that of the cladding, which meets the principle of total internal reflection light guiding. The photonic crystal fiber LMA-10 used in this patent is a refractive index guided photonic crystal fiber.

迈克尔逊干涉仪简介:传统光纤迈克尔逊干涉仪的是由光源、3dB耦合器、两根光纤,反射镜、探测器组成;两根光纤的其中一根作为参考光纤,另一根作为信号光纤。光源发出的光经过隔离器后,进入3dB光纤耦合器,分成两路光强一样的光分别从耦合器的a端和b端射出,一路经过信号光纤,被外界信号调制,然后被反射镜反射,从原路返回射入a端口。另一路则经过参考光纤后直接反射回来进入b端口,从a和b端口射入的两路光在耦合器中耦合的时候发生干涉,而调制信号引起的相位变化就会反映到干涉信号中,经过光电转换之后,利用光强变化可以准确测量相位的变化情况,而这个相位的变化,准确记录了外界调制信号,这就是利用迈克尔逊干涉仪来进行检测的基本原理。在改进的光纤迈克尔逊干涉仪中,通过对光纤进行刻蚀、熔接加工等方法,使得普通传输光纤形成特定结构,可以实现光纤耦合器分光合光的作用;此时,当光传输至耦合器时,原来仅在传输光纤纤芯中传输的光将分别在纤芯和包层中传输,传输至光纤端面时,由于光纤端面的菲涅尔反射,在纤芯和包层中传输的光将反向传输,并在光纤耦合器处实现合光。此时,在同一个光纤中就可以实现光传播的两个路径。通过对该两个路径传输光的干涉光谱进行检测,就可以从干涉信号的变化中得到外界调制信号的变化。在光纤端面镀金膜可以大大加强光反射的效率,使得检测更为精确。Introduction to Michelson interferometer: The traditional fiber optic Michelson interferometer is composed of a light source, a 3dB coupler, two optical fibers, a mirror, and a detector; one of the two optical fibers is used as a reference fiber, and the other is used as a signal fiber. After passing through the isolator, the light emitted by the light source enters the 3dB fiber optic coupler, and is divided into two paths of light with the same light intensity, which are respectively emitted from the a-end and b-end of the coupler, and all the way through the signal fiber, modulated by the external signal, and then reflected by the mirror , return from the original path and inject into port a. The other path is directly reflected back into port b after passing through the reference fiber. The two paths of light injected from ports a and b interfere when coupled in the coupler, and the phase change caused by the modulation signal will be reflected in the interference signal. After photoelectric conversion, the change of the phase can be accurately measured by using the change of light intensity, and the change of this phase can accurately record the external modulation signal, which is the basic principle of using Michelson interferometer for detection. In the improved fiber optic Michelson interferometer, by etching and splicing the optical fiber, the ordinary transmission optical fiber forms a specific structure, which can realize the function of the optical fiber coupler to split and combine light; at this time, when the light is transmitted to the coupler When , the light originally transmitted only in the core of the transmission fiber will be transmitted in the core and the cladding respectively, and when transmitted to the end face of the fiber, due to Fresnel reflection at the end face of the fiber, the light transmitted in the core and cladding will Reverse transmission, and achieve light combination at the fiber coupler. At this point, two paths of light propagation can be realized in the same optical fiber. By detecting the interference spectrum of the light transmitted by the two paths, the change of the external modulation signal can be obtained from the change of the interference signal. Coating gold on the end face of the optical fiber can greatly enhance the efficiency of light reflection, making the detection more accurate.

一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其传感头是由经过腐蚀的光子晶体光纤制作而成,传感头与传输光纤、环形器、宽带光源、光谱仪一起构成该光纤传感器。A temperature sensor based on corroded photonic crystal fiber Michelson interferometer. Fiber Optic Sensor.

发明内容Contents of the invention

本实用新型的目的是提供一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器的技术方案。The purpose of the utility model is to provide a technical scheme of a temperature sensor of a photonic crystal fiber Michelson interferometer based on corrosion treatment.

所述的一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于由宽带光源1、传输光纤2、环形器3、传输光纤4、传感头5、温度控制箱6、传输光纤7、光谱仪8组成;经过腐蚀并在端面镀石墨烯膜和金膜的光子晶体光纤构成传感头5,传感头5的一端通过传输光纤4与环形器3的b端相连,传感头5置于温度控制箱6中;环形器的a端通过传输光纤2与宽带光源1相连,环形器的c端通过传输光纤7与光谱仪8相连。环形器3的作用是将光纤中传输的正向(输入)光信号和反向(输出)光信号分开,环形器3沿着a→b→c的光路单向环形。Described a kind of temperature sensor based on the photonic crystal fiber Michelson interferometer of corrosion treatment is characterized in that by broadband light source 1, transmission fiber 2, circulator 3, transmission fiber 4, sensing head 5, temperature control box 6, The transmission fiber 7 and the spectrometer 8 are composed; the photonic crystal fiber that has been corroded and coated with graphene film and gold film on the end face constitutes the sensing head 5, and one end of the sensing head 5 is connected to the b end of the circulator 3 through the transmission fiber 4, and the transmission The sensing head 5 is placed in the temperature control box 6; the a end of the circulator is connected to the broadband light source 1 through the transmission fiber 2, and the c end of the circulator is connected to the spectrometer 8 through the transmission fiber 7. The function of the circulator 3 is to separate the forward (input) optical signal and the reverse (output) optical signal transmitted in the optical fiber, and the circulator 3 is unidirectional along the optical path a→b→c.

所述的一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于制作传感头5时需使用的光子晶体光纤型号为LMA-10。The temperature sensor based on the corrosion-treated photonic crystal fiber Michelson interferometer is characterized in that the model of the photonic crystal fiber to be used when making the sensing head 5 is LMA-10.

所述的一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于所述的传感头5长度为100μm。The temperature sensor based on the corrosion-treated photonic crystal fiber Michelson interferometer is characterized in that the length of the sensing head 5 is 100 μm.

所述的一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于所使用的单模光纤可采用G.652、G.653和G.655单模光纤;传输光纤2、传输光纤4、传输光纤7的长度均为20~30cm。Described a kind of temperature sensor based on the photonic crystal fiber Michelson interferometer of corrosion treatment is characterized in that used single-mode fiber can adopt G.652, G.653 and G.655 single-mode fiber; Transmission fiber 2, The lengths of the transmission optical fiber 4 and the transmission optical fiber 7 are both 20-30 cm.

本实用新型的优点在于:该传感器体积小,探头式结构使用方便,抗电磁干扰、耐腐蚀、灵敏度高。The utility model has the advantages that the sensor is small in size, easy to use with a probe structure, anti-electromagnetic interference, corrosion-resistant and high in sensitivity.

附图说明Description of drawings

图1是本实用新型的结构示意图Fig. 1 is the structural representation of the utility model

图2是使用的未经处理的光子晶体光纤的横截面图Figure 2 is a cross-sectional view of the untreated photonic crystal fiber used

图3是经腐蚀处理后的光子晶体光纤的横截面图Figure 3 is a cross-sectional view of a photonic crystal fiber after corrosion treatment

图4是光子晶体光纤腐蚀前后的区域对比图Figure 4 is a comparison diagram of the area of photonic crystal fiber before and after corrosion

图5是传感头结构以及传感头与传输光纤交界示意图Figure 5 is a schematic diagram of the structure of the sensor head and the interface between the sensor head and the transmission fiber

具体实施方式Detailed ways

下面结合说明书附图对本实用新型进一步说明:Below in conjunction with accompanying drawing, the utility model is further described:

如图1所示,一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器由宽带光源1、传输光纤2、环形器3、传输光纤4、传感头5、温度控制箱6、传输光纤7、光谱仪8组成。传感头5的制作如下:将一段光子晶体光纤的一端与传输光纤4用熔接机进行不坍塌熔接,再将光子晶体光纤的另一端垂直浸入HF酸溶液进行腐蚀。由于毛细效应,腐蚀性溶液进入光子晶体光纤的空气孔中。经过180秒,光子晶体光纤周期性排列的每一个圆形空气孔壁都经过腐蚀而消失,使得光子晶体光纤原本由圆形空气孔排列的六边形区域腐蚀成六边形空气孔。且由于腐蚀,空气孔包围的实心部分变细,形成一个直径约为2μm的细芯部分。腐蚀之前的光子晶体光纤端面如图2所示,其中白色圆形小孔为空气孔,灰色部分为石英材料。经腐蚀后的光子晶体光纤如图3所示,灰色部分是石英材料,六边形的白色部分是经腐蚀后形成的空气孔,中心被周期性排列的空气孔包围的实心部分经腐蚀后变细。腐蚀前后边界对比图如图4所示,从图4可以看出,腐蚀后,六边形空气腔的范围比未腐蚀的圆形空气孔排列所构成的六边形区域稍大一点,细芯部分比未腐蚀的圆形空气孔围绕的中央部分稍小一点。将该经过处理的光子晶体光纤的另一端面镀一层薄的石墨烯膜,再在石墨烯膜上镀一层金膜;镀石墨烯膜的作用是防止后续镀金时,喷的金进入空腔,且石墨烯膜不影响光的传输及分布;金膜的作用是加强光在传感头端面的反射。该经过腐蚀处理并镀膜的光子晶体光纤构成传感头5。传感头5的一端通过传输光纤4与环形器3的b端相连,传感头5置于温度控制箱6中;环形器的a端通过传输光纤2与宽带光源1相连,环形器的c端通过传输光纤7与光谱仪8相连。As shown in Figure 1, a temperature sensor of a photonic crystal fiber Michelson interferometer based on corrosion treatment consists of a broadband light source 1, a transmission fiber 2, a circulator 3, a transmission fiber 4, a sensing head 5, a temperature control box 6, a transmission Composed of optical fiber 7 and spectrometer 8. The fabrication of the sensing head 5 is as follows: one end of a section of photonic crystal fiber and the transmission fiber 4 are spliced without collapsing by a fusion splicer, and then the other end of the photonic crystal fiber is vertically immersed in HF acid solution for corrosion. Due to the capillary effect, the corrosive solution enters the air holes of the photonic crystal fiber. After 180 seconds, the wall of each circular air hole periodically arranged in the photonic crystal fiber is corroded and disappears, so that the hexagonal area originally arranged in the photonic crystal fiber is corroded into a hexagonal air hole. And due to corrosion, the solid portion surrounded by the air pores becomes thinner, forming a thin core portion with a diameter of about 2 μm. The photonic crystal fiber end face before etching is shown in Figure 2, where the white circular holes are air holes, and the gray part is quartz material. The corroded photonic crystal fiber is shown in Figure 3, the gray part is quartz material, the white part of the hexagon is the air hole formed after corrosion, and the solid part surrounded by periodically arranged air holes in the center becomes thin. The comparison diagram of the boundary before and after corrosion is shown in Figure 4. It can be seen from Figure 4 that after corrosion, the range of the hexagonal air cavity is slightly larger than the hexagonal area formed by the arrangement of uncorroded circular air holes, and the thin core The section is slightly smaller than the central section surrounded by the uncorroded circular air hole. The other end face of the processed photonic crystal fiber is coated with a thin graphene film, and then coated with a layer of gold film on the graphene film; The cavity, and the graphene film does not affect the transmission and distribution of light; the function of the gold film is to strengthen the reflection of light on the end face of the sensor head. The corroded and coated photonic crystal fiber constitutes the sensing head 5 . One end of the sensor head 5 is connected to the b end of the circulator 3 through the transmission fiber 4, and the sensor head 5 is placed in the temperature control box 6; the a end of the circulator is connected to the broadband light source 1 through the transmission fiber 2, and the c end of the circulator The end is connected to the spectrometer 8 through the transmission fiber 7.

本实用新型装置的工作方式为:传感头与传输光纤的熔接交界面如图5所示,传输光纤是单模光纤,光主要在纤芯中传播,纤芯直径约为8μm。宽带光源发出的光通过传输光纤2进入环形器a端,环形器a→b使得光单向传输至环形器b端,并通过传输光纤4进入传感头,在传感头与传输光纤熔接的交界面处,光会由于传输光纤纤芯与传感头中间的细芯大小不匹配,导致一部分光进入光子晶体光纤的空气孔。光在传感头中分别沿着细芯和空气腔传输,在传感器端面金膜处发生反射;反射光沿着细芯和空气腔进行反向传输并在传感头与传输光纤熔接的交界面共同进入传输光纤的纤芯,且由于有稳定的光程差而发生干涉。干涉光的信号沿着传输光纤4反向传输至环形器端口b,环形器b→c使得光单向传输至环形器c端,并通过传输光纤7进入光谱仪,在光谱仪上显示出干涉光谱。The working mode of the device of the utility model is as follows: the fusion interface between the sensing head and the transmission fiber is shown in Figure 5, the transmission fiber is a single-mode fiber, the light mainly propagates in the fiber core, and the fiber core diameter is about 8 μm. The light emitted by the broadband light source enters the a-end of the circulator through the transmission fiber 2, and the circulator a→b makes the light unidirectionally transmitted to the b-end of the circulator, and enters the sensor head through the transmission fiber 4, where the sensor head and the transmission fiber are fused At the interface, the light will enter the air hole of the photonic crystal fiber due to the mismatch between the size of the transmission fiber core and the thin core in the middle of the sensor head. The light is transmitted along the thin core and the air cavity in the sensor head, and reflected at the gold film on the end face of the sensor; the reflected light is reversely transmitted along the thin core and the air cavity, and is fused at the interface between the sensor head and the transmission fiber Commonly enter the core of the transmission fiber and interfere due to a stable optical path difference. The signal of the interference light is reversely transmitted along the transmission fiber 4 to the port b of the circulator, and the circulator b→c makes the light unidirectionally transmitted to the end of the circulator c, and enters the spectrometer through the transmission fiber 7, and the interference spectrum is displayed on the spectrometer.

光信号的相位公式可以用下面的公式进行表述:The phase formula of an optical signal can be expressed by the following formula:

ψψ == 22 πnLπnL λλ

其中n是光传输的介质的折射率,L是光传输的路程,λ是传输的光的波长。Where n is the refractive index of the medium through which the light is transmitted, L is the distance traveled by the light, and λ is the wavelength of the transmitted light.

对于光纤迈克尔逊干涉仪,由于在端面发生的反射,光传输的路程是两倍,其干涉光的相位差可以下面的公式进行表述:For the fiber Michelson interferometer, due to the reflection at the end face, the light transmission distance is twice, and the phase difference of the interfering light can be expressed by the following formula:

ΔψΔψ == 44 ππ λλ (( nno cavitycavity -- nno corecore )) LL

其中ncavity和ncore分别是空气腔和细芯的折射率,ncavity-ncore是空气腔和细芯的有效折射率的差。Where n cavity and n core are the refractive indices of the air cavity and the thin core, respectively, and n cavity -n core is the difference between the effective refractive indices of the air cavity and the thin core.

当外界温度变化时,由于细芯和空气腔对温度变化的响应程度不同,导致(ncavity-ncore)L发生改变,在光谱仪上显示出干涉光谱的漂移。光谱的漂移量和温度变化量有关,所以监测干涉光谱的变化就可以进一步计算出该传感器的温度灵敏度。When the external temperature changes, the (n cavity -n core )L changes due to the different responses of the thin core and the air cavity to the temperature change, which shows the drift of the interference spectrum on the spectrometer. The drift of the spectrum is related to the temperature change, so the temperature sensitivity of the sensor can be further calculated by monitoring the change of the interference spectrum.

Claims (4)

1.一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于由宽带光源(1)、传输光纤(2)、环形器(3)、传输光纤(4)、传感头(5)、温度控制箱(6)、传输光纤(7)、光谱仪(8)组成;经过腐蚀并在端面镀石墨烯膜和金膜的光子晶体光纤构成传感头(5),传感头(5)的一端通过传输光纤(4)与环形器(3)的b端相连,传感头(5)置于温度控制箱(6)中;环形器的a端通过传输光纤(2)与宽带光源(1)相连,环形器的c端通过传输光纤(7)与光谱仪(8)相连。 1. A temperature sensor based on an corrosion-treated photonic crystal fiber Michelson interferometer, characterized in that it consists of a broadband light source (1), a transmission fiber (2), a circulator (3), a transmission fiber (4), and a sensing head (5), temperature control box (6), transmission optical fiber (7), and spectrometer (8); the photonic crystal optical fiber that has been corroded and coated with graphene film and gold film on the end surface constitutes the sensor head (5), the sensor head One end of (5) is connected to the b end of the circulator (3) through the transmission fiber (4), the sensor head (5) is placed in the temperature control box (6); the a end of the circulator is connected to the b end of the circulator through the transmission fiber (2) The broadband light source (1) is connected, and the c-end of the circulator is connected with the spectrometer (8) through the transmission fiber (7). 2.根据权利要求1所述的一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于制作传感头(5)时需使用的光子晶体光纤型号为LMA-10。 2. A temperature sensor based on an etching-treated photonic crystal fiber Michelson interferometer according to claim 1, characterized in that the model of the photonic crystal fiber to be used when making the sensing head (5) is LMA-10. 3.根据权利要求1所述的一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于所述的传感头(5)长度为100μm。 3. The temperature sensor based on the corrosion-treated photonic crystal fiber Michelson interferometer according to claim 1, characterized in that the length of the sensing head (5) is 100 μm. 4.根据权利要求1所述的一种基于腐蚀处理的光子晶体光纤迈克尔逊干涉仪的温度传感器,其特征在于所使用的单模光纤可采用G.652、G.653和G.655单模光纤;传输光纤(2)、传输光纤(4)、传输光纤(7)的长度均为20~30cm。 4. the temperature sensor of a kind of photonic crystal fiber Michelson interferometer based on corrosion treatment according to claim 1, it is characterized in that used single-mode optical fiber can adopt G.652, G.653 and G.655 single-mode Optical fibers; the lengths of the transmission optical fibers (2), the transmission optical fibers (4), and the transmission optical fibers (7) are all 20-30 cm.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104897302A (en) * 2015-06-19 2015-09-09 中国计量学院 Temperature sensor of photonic crystal optical fiber Michelson interferometer based on corrosion processing
CN108088584A (en) * 2017-12-29 2018-05-29 长园深瑞继保自动化有限公司 Reflection-type optical fiber temperature sensor and preparation method thereof
CN109443404A (en) * 2018-12-04 2019-03-08 中国计量大学 A kind of optical fiber white light interference device of band measurement sliding rail
CN112526202A (en) * 2020-11-19 2021-03-19 哈尔滨理工大学 Optical fiber sensing device based on ultrasonic detection voltage and implementation method
CN112630530A (en) * 2020-11-19 2021-04-09 哈尔滨理工大学 Optical fiber sensing device based on ultrasonic detection frequency and implementation method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104897302A (en) * 2015-06-19 2015-09-09 中国计量学院 Temperature sensor of photonic crystal optical fiber Michelson interferometer based on corrosion processing
CN108088584A (en) * 2017-12-29 2018-05-29 长园深瑞继保自动化有限公司 Reflection-type optical fiber temperature sensor and preparation method thereof
CN109443404A (en) * 2018-12-04 2019-03-08 中国计量大学 A kind of optical fiber white light interference device of band measurement sliding rail
CN112526202A (en) * 2020-11-19 2021-03-19 哈尔滨理工大学 Optical fiber sensing device based on ultrasonic detection voltage and implementation method
CN112630530A (en) * 2020-11-19 2021-04-09 哈尔滨理工大学 Optical fiber sensing device based on ultrasonic detection frequency and implementation method
CN112630530B (en) * 2020-11-19 2021-09-07 哈尔滨理工大学 A kind of optical fiber sensing device and realization method based on ultrasonic detection frequency
CN112526202B (en) * 2020-11-19 2021-09-07 哈尔滨理工大学 An optical fiber sensing device and realization method based on ultrasonic detection voltage

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