CN204436756U - A kind of mode of resonance piezoelectric pump based on inertial drive - Google Patents
A kind of mode of resonance piezoelectric pump based on inertial drive Download PDFInfo
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- CN204436756U CN204436756U CN201420838427.4U CN201420838427U CN204436756U CN 204436756 U CN204436756 U CN 204436756U CN 201420838427 U CN201420838427 U CN 201420838427U CN 204436756 U CN204436756 U CN 204436756U
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- piezoelectric
- piezoelectric vibrator
- circular diaphragm
- pump
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000012530 fluid Substances 0.000 abstract description 11
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 238000005452 bending Methods 0.000 description 6
- 229910000906 Bronze Inorganic materials 0.000 description 3
- 229910052790 beryllium Inorganic materials 0.000 description 3
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 3
- 239000010974 bronze Substances 0.000 description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 241000446313 Lamella Species 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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Abstract
The utility model relates to a kind of mode of resonance piezoelectric pump based on inertial drive, belongs to mechanical-electrical-hydraulic integration field.This device is by upper pump casing (1), water outlet (2), Outlet check valves (3), water inlet (4), inlet one-way valve (5), intermediate (6), circular diaphragm (8), mass block (9), piezoelectric vibrator (10), sleeve (11), the parts compositions such as connecting rod (13) and lower pump body (15), with connecting rod (13) in the middle of piezoelectric vibrator (10), sleeve (11) one end is fixedly connected with, two ends suspend and end is connected with mass block (9), connecting rod (13) the other end is connected with circular diaphragm (8), circular diaphragm (8) periphery fixed support, adopt piezoelectric vibrator (10) as driving source, by piezoelectric inertia driving principle and the acting in conjunction of system resonance technology, amplify the deformation making circular diaphragm, realize the conveying of fluid orientation.Advantage is: novel structure, and output flow is large, and pressure is high, and piezoelectric vibrator does not directly contact with flowing medium, pollution-free, is easy to heat radiation.
Description
Technical field
The utility model belongs to Piezoelectric Driving control technique field, particularly a kind of mode of resonance piezoelectric pump device based on inertial drive.
Background technique
In recent years, micro-flow system and relevant micromechanics manufacturing technology have become a research field enlivened very much.In fields such as chemical analysis and detection, bioengineering, IC chip, miniature component and micro-production systems in the urgent need to miniaturization, the Micropump of fluid can be carried by accurate quantification.Micropump is the critical component of micro-flow system, can be divided into the driving of Piezoelectric Driving, electrostatic, Electromagnetic Drive, thermal drivers and marmem driving etc. according to the different Micropumps of drive mechanism.The micropump of different driving mode has himself features and application field, piezoelectric pump is owing to having compact structure, response characteristic is good, be convenient to the features such as accurately control, have broad application prospects in medical treatment/pharmacy, bioengineering, chemical analysis, electronic device cooling and fuel supply etc.
Current piezoelectric pump mainly contains some deficiency following: 1. the working method of piezoelectric pump is generally non-resonant condition at present, and to the research of mode of resonance piezoelectric pump seldom; 2. piezoelectric pump driving force is limited.Valveless piezoelectric pump is not because have one-way valve, and during pump work, fluid backflow phenomenon is serious, and working pressure and the cut-off property of pump decline, and suction capacity is poor, output flow and pressure less; Have the restriction of frequency of okperation by one-way valve motor element inertia of valve piezoelectric pump, response frequency is generally relatively low, and output flow and the pressure of pump are restricted; 3. piezoelectric stack pump delivery pressure is comparatively large, but piezoelectric stack distortion is little, and output flow is not enough, and volume large (generally needing enlarger), cost high (piezoelectric stack is expensive).
The utility model proposes using piezoelectric vibrator as driving source, utilize inertial drive principle, improve diaphragm deflection amplitude by resonance enlarger, and then construct a kind of mode of resonance piezoelectric pump based on inertial drive.
Summary of the invention
The utility model is based on the mode of resonance piezoelectric pump of inertial drive, it is characterized in that, upper pump casing is provided with water outlet and water inlet, intermediate is provided with one-way valve and forms pump chamber with circular diaphragm, circular diaphragm is connected with piezoelectric vibrator by connecting rod, sleeve, piezoelectric vibrator two ends are fixedly connected with mass block, and lower pump body has wire guide, and upper pump casing, intermediate and lower pump body are bolted and jointly form mode of resonance piezoelectric pump.Exciting unit is formed, fixed support in the middle of driving adopts with piezoelectric vibrator by piezoelectric vibrator, connecting rod, sleeve and circular diaphragm.Time in running order, exciting unit with formed resonator system by driving fluid, pump chamber and one-way valve, when there being external communication electrical signal to act on piezoelectric vibrator, piezoelectric vibrator bending deflection drives mass block up and down reciprocatingly to swing the inertial impact force producing mechanical periodicity, and inertial impact force acts on circular diaphragm by connecting rod.When the frequency of inertial impact force equals the natural frequency of resonator system, system resonance, circular diaphragm distortion increases, thus driving fluid realizes large discharge, high pressure fluid exports.
Piezoelectric vibrator relies on the inverse piezoelectric effect of self that ac signal is converted into bending deflection, drives mass block reciprocally swinging, and produce the inertial impact force of alternation, thus provide vibrational excitation to system, the distortion of piezoelectric vibrator itself does not directly act on fluid.Piezoelectric vibrator can adopt the bending vibrator of single-chip or twin lamella, and concrete structure can adopt circle or rectangle.
Exciting unit arranges to amplify the distortion of piezoelectric vibrator, and its critical piece comprises piezoelectric vibrator, mass block, nut, sleeve, connecting rod, circular diaphragm.
Sleeve arranges to connect circular diaphragm and piezoelectric vibrator, can be adjusted the resonant frequency of excitation system by the quality changing sleeve simultaneously.
Circular diaphragm adopts through heat treated beryllium bronze sheet, as the Direct driver element of transport pump fluid, jointly forms pump chamber with intermediate, one-way valve, realizes the orientation conveying of fluid under outside alternate electrical signal excitation.
The utility model has the advantage of: make piezoelectric pump be operated in Best Frequency Range by the dimensional parameters of adjustment exciting unit constituent elements, utilize resonance amplification principle to improve the deformation of circular diaphragm, from but realize higher output flow and delivery pressure; Simultaneously piezoelectric vibrator is not as indirect driving element directly and fluid contact, and is in open space, good heat dissipation effect, is thus applicable to the medium transport of the not easy heat radiation such as gas, Viscosity liquids.
Accompanying drawing explanation
Fig. 1 is the utility model mode of resonance piezoelectric pump structural representation;
Fig. 2 is Rectangular piezoelectric oscillator structure schematic diagram of the present utility model;
Fig. 3 is circular diaphragm structural representation of the present utility model.
1-upper pump casing, 2-water outlet, 3-Outlet check valves, 4-water inlet, 5-inlet one-way valve, 6-intermediate, 7-seal ring, 8-circular diaphragm, 9-mass block, 10-piezoelectric vibrator, 11-sleeve, 12-nut, 13-connecting rod, 14-vent, 15-lower pump body.
Embodiment
Below in conjunction with accompanying drawing, the utility model structure and principle are further described.
With reference to Fig. 1, the mode of resonance piezoelectric pump based on inertial drive of the present utility model as driving source, forms exciting unit with mass block 9, sleeve 11, nut 12, connecting rod 13 and circular diaphragm 8 by a piezoelectric vibrator 10 that can convert electric energy to mechanical energy.Concrete Placement is: mass block 9 is fixedly connected on piezoelectric vibrator 10 two ends, connecting rod 13 lower end has screw thread, by coordinating with nut 12, piezoelectric vibrator 10, sleeve 11 and circular diaphragm 8 are linked together, circular diaphragm 8 is fixedly supported between intermediate 6 and lower pump body 15 by rubber seal 7 periphery, intermediate 6 is provided with Outlet check valves 3 and inlet one-way valve 5.When there being outside alternate electrical signal to act on piezoelectric vibrator 10, piezoelectric vibrator 10 bending deflection, drive mass block 7 reciprocally swinging, produce the inertial impact force of the mechanical periodicity identical with exciting signal frequency, inertial impact force acts in circular diaphragm 8 by connecting rod 13, circular diaphragm 8 bending deflection, when the frequency of drive singal is equal with the natural frequency of system, resonator system is in resonance state, the distortion of circular diaphragm 8 obtains amplification, pump chamber volume is changed, Outlet check valves 3 and inlet one-way valve 5 is coordinated to realize the output of fluid high flow and pressure.
With reference to Fig. 2, Rectangular piezoelectric oscillator structure schematic diagram of the present utility model.Piezoelectric vibrator 10 adopts upper and lower surface all to post the twin lamella bending vibrator structure of piezoelectric constant, and driving force is stronger compared with single-chip oscillator.
With reference to Fig. 3, circular diaphragm structural representation of the present utility model.Circular diaphragm 8 adopts circular beryllium bronze sheet, and in order to improve elasticity, beryllium bronze sheet will use after Overheating Treatment; Have circular port in the middle of circular diaphragm, be used for being connected with connecting rod 13, periphery is fixedly connected with intermediate 6, lower pump body 15 by rubber seal 7; As elastic element, the thickness of circular diaphragm can be changed to change the rigidity of system in resonator system, thus the resonant frequency of regulating system.
Claims (3)
1. the mode of resonance piezoelectric pump based on inertial drive, it is characterized in that, upper pump casing is provided with water outlet and water inlet, intermediate is provided with one-way valve and forms pump chamber with circular diaphragm, circular diaphragm is connected with piezoelectric vibrator by connecting rod, sleeve, piezoelectric vibrator two ends are fixedly connected with mass block, and lower pump body has wire guide, and upper pump casing, intermediate and lower pump body are bolted and jointly form mode of resonance piezoelectric pump.
2. the mode of resonance piezoelectric pump based on inertial drive according to claim 1, is characterized in that, fixed support in the middle of driving adopts with piezoelectric vibrator.
3. the mode of resonance piezoelectric pump based on inertial drive according to claim 1, is characterized in that, form exciting unit by piezoelectric vibrator, connecting rod, sleeve and circular diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420838427.4U CN204436756U (en) | 2014-12-18 | 2014-12-18 | A kind of mode of resonance piezoelectric pump based on inertial drive |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420838427.4U CN204436756U (en) | 2014-12-18 | 2014-12-18 | A kind of mode of resonance piezoelectric pump based on inertial drive |
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| CN204436756U true CN204436756U (en) | 2015-07-01 |
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| CN201420838427.4U Expired - Fee Related CN204436756U (en) | 2014-12-18 | 2014-12-18 | A kind of mode of resonance piezoelectric pump based on inertial drive |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105089993A (en) * | 2015-08-05 | 2015-11-25 | 中国科学院苏州生物医学工程技术研究所 | Piezoelectric pump based on secondary resonance |
| CN108096664A (en) * | 2017-12-25 | 2018-06-01 | 浙江师范大学 | A kind of new separable piezoelectricity medical infusion pump |
| CN108988684A (en) * | 2018-07-16 | 2018-12-11 | 哈尔滨工程大学 | A kind of absorbing and vibrational energy acquire integrated apparatus |
| CN109578254A (en) * | 2017-09-28 | 2019-04-05 | 日本电产株式会社 | Pump |
| TWI658211B (en) * | 2016-10-27 | 2019-05-01 | Nitto Kohki Co., Ltd. | Liquid pump |
| CN111140478A (en) * | 2020-01-22 | 2020-05-12 | 常州威图流体科技有限公司 | Piezoelectric micropump and gas control device |
| US11503742B2 (en) | 2019-12-06 | 2022-11-15 | Frore Systems Inc. | Engineered actuators usable in MEMS active cooling devices |
| US11532536B2 (en) | 2018-08-10 | 2022-12-20 | Frore Systems Inc. | Mobile phone and other compute device cooling architecture |
| CN115492746A (en) * | 2022-08-31 | 2022-12-20 | 吉林大学 | Memory alloy wire counter-type driving double-acting continuous output micro pump |
| US11765863B2 (en) | 2020-10-02 | 2023-09-19 | Frore Systems Inc. | Active heat sink |
| US11796262B2 (en) | 2019-12-06 | 2023-10-24 | Frore Systems Inc. | Top chamber cavities for center-pinned actuators |
| US11802554B2 (en) | 2019-10-30 | 2023-10-31 | Frore Systems Inc. | MEMS-based airflow system having a vibrating fan element arrangement |
| US12029005B2 (en) | 2019-12-17 | 2024-07-02 | Frore Systems Inc. | MEMS-based cooling systems for closed and open devices |
| US12033917B2 (en) | 2019-12-17 | 2024-07-09 | Frore Systems Inc. | Airflow control in active cooling systems |
| US12089374B2 (en) | 2018-08-10 | 2024-09-10 | Frore Systems Inc. | MEMS-based active cooling systems |
| US12137540B2 (en) | 2022-07-18 | 2024-11-05 | Frore Systems Inc. | Centrally anchored MEMS-based active cooling systems |
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2014
- 2014-12-18 CN CN201420838427.4U patent/CN204436756U/en not_active Expired - Fee Related
Cited By (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105089993A (en) * | 2015-08-05 | 2015-11-25 | 中国科学院苏州生物医学工程技术研究所 | Piezoelectric pump based on secondary resonance |
| CN105089993B (en) * | 2015-08-05 | 2017-06-30 | 中国科学院苏州生物医学工程技术研究所 | Piezoelectric pump based on secondary resonance |
| TWI658211B (en) * | 2016-10-27 | 2019-05-01 | Nitto Kohki Co., Ltd. | Liquid pump |
| CN109578254A (en) * | 2017-09-28 | 2019-04-05 | 日本电产株式会社 | Pump |
| CN108096664A (en) * | 2017-12-25 | 2018-06-01 | 浙江师范大学 | A kind of new separable piezoelectricity medical infusion pump |
| CN108096664B (en) * | 2017-12-25 | 2024-01-26 | 浙江师范大学 | Novel separable piezoelectric medical infusion pump |
| CN108988684A (en) * | 2018-07-16 | 2018-12-11 | 哈尔滨工程大学 | A kind of absorbing and vibrational energy acquire integrated apparatus |
| US11830789B2 (en) | 2018-08-10 | 2023-11-28 | Frore Systems Inc. | Mobile phone and other compute device cooling architecture |
| US11784109B2 (en) | 2018-08-10 | 2023-10-10 | Frore Systems Inc. | Method and system for driving piezoelectric MEMS-based active cooling devices |
| US11532536B2 (en) | 2018-08-10 | 2022-12-20 | Frore Systems Inc. | Mobile phone and other compute device cooling architecture |
| US12089374B2 (en) | 2018-08-10 | 2024-09-10 | Frore Systems Inc. | MEMS-based active cooling systems |
| US11705382B2 (en) | 2018-08-10 | 2023-07-18 | Frore Systems Inc. | Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices |
| US11710678B2 (en) | 2018-08-10 | 2023-07-25 | Frore Systems Inc. | Combined architecture for cooling devices |
| US11735496B2 (en) | 2018-08-10 | 2023-08-22 | Frore Systems Inc. | Piezoelectric MEMS-based active cooling for heat dissipation in compute devices |
| US11802554B2 (en) | 2019-10-30 | 2023-10-31 | Frore Systems Inc. | MEMS-based airflow system having a vibrating fan element arrangement |
| US11796262B2 (en) | 2019-12-06 | 2023-10-24 | Frore Systems Inc. | Top chamber cavities for center-pinned actuators |
| US11510341B2 (en) | 2019-12-06 | 2022-11-22 | Frore Systems Inc. | Engineered actuators usable in MEMs active cooling devices |
| US11503742B2 (en) | 2019-12-06 | 2022-11-15 | Frore Systems Inc. | Engineered actuators usable in MEMS active cooling devices |
| US12029005B2 (en) | 2019-12-17 | 2024-07-02 | Frore Systems Inc. | MEMS-based cooling systems for closed and open devices |
| US12033917B2 (en) | 2019-12-17 | 2024-07-09 | Frore Systems Inc. | Airflow control in active cooling systems |
| CN111140478A (en) * | 2020-01-22 | 2020-05-12 | 常州威图流体科技有限公司 | Piezoelectric micropump and gas control device |
| US11765863B2 (en) | 2020-10-02 | 2023-09-19 | Frore Systems Inc. | Active heat sink |
| TWI835005B (en) * | 2020-10-02 | 2024-03-11 | 美商弗瑞歐系統有限公司 | Cooling system, active heat sink and method of cooling heat-generating structure |
| US12137540B2 (en) | 2022-07-18 | 2024-11-05 | Frore Systems Inc. | Centrally anchored MEMS-based active cooling systems |
| CN115492746A (en) * | 2022-08-31 | 2022-12-20 | 吉林大学 | Memory alloy wire counter-type driving double-acting continuous output micro pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150701 Termination date: 20151218 |
|
| EXPY | Termination of patent right or utility model |