CN204221205U - A kind of clamping device of mask plate and assembly thereof - Google Patents

Abstract

The utility model discloses a kind of clamping device of mask plate, driver module, operation guide rail, clamping device pedestal, self-clamping module, driver module and operation guide rail are directly or indirectly fixed on clamping device pedestal, self-clamping module is directly or indirectly connected with driver module, driver module can drive self-clamping module to run on operation guide rail, thus realizes the action mask plate of self-clamping module clamping being applied to tension force or release tension force; The invention also discloses a kind of clamping device assembly of mask plate, comprise the clamping device of pedestal, at least four group mount pads and at least four mask plates described above, mount pad symmetry be fixed on pedestal, what clamping device was direct or indirect is fixed on mount pad allocation really.The clamping device for OLED mask plate that the utility model provides and assembly thereof, apply the tension force of uniform, controllable to mask plate thus improve mask assembly quality in mask plate assembling or making mask plate opening operation.

Description

A kind of clamping device of mask plate and assembly thereof

Technical field

The utility model belongs to plane display industry, relates to OLED display screen industry, particularly relates to a kind of clamping device and assembly thereof of OLED mask plate.

Background technology

OLED is follow-on Display Technique, compared with the LCD Display Technique used at present, has the advantages such as angle of visibility is large, beautiful in colour, low in energy consumption, can substitute the lcd technology of current main flow gradually.In OLED display screen manufacturing process, there is one organic luminorphor evaporation process, need to use high-precision OLED evaporation mask assembly, the quality of mask assembly to the quality of display screen, yield rate has extreme influence, is the key factor of restriction OLED display screen development.

OLED evaporation mask assembly comprises mask plate and mask frame two parts, mask plate has precision graphic, precision graphic is the benchmark of evaporation graph transfer printing, by mesh stretching body, the mask plate with precision graphic is carried out stretching tight net, mask plate is made to have certain tension force, by laser weld, the mask plate with some tension is fixed on mask frame (referred to as mask assembling), usual mask plate opening production process also needs to stretch tight net to mask plate base material, so stretch tight, net operation is very large to the Accuracy of mask assembly, usual can because of the net arrangement that stretches tight provide the net pulling force inequality that stretches tight cause mask plate distortion or mask assembly precision not high.

Need to apply tension force by the net step that stretches tight to mask plate mask plate being assembled into mask frame operation and making in mask plate opening operation, for ensureing that the even tension that applies mask plate is controlled and mask plate can not being made be out of shape, the utility model provides a kind of clamping device to mask plate applying tension force and assembly thereof.

Utility model content

In view of this, the utility model provides a kind of and assembles or make the clamping device and the assembly thereof that in the operation of mask plate opening, mask plate are applied to the tension force of uniform, controllable at mask plate.

The utility model provides a kind of clamping device of mask plate, comprise self-clamping module, driver module, operation guide rail and clamping device pedestal, described self-clamping module, described driver module and described operation guide rail are directly or indirectly fixed on described clamping device pedestal, described self-clamping module is directly or indirectly connected with described driver module, described driver module can drive described self-clamping module to run on described operation guide rail, thus realizes the action described mask plate that described self-clamping module clamps being applied to tension force or release tension force.

Further, described clamping device also comprises stressed induction module, and described self-clamping module is connected with described driver module indirectly by described stressed induction module, and driver module can be cylinder or motor.

One end of stressed induction module is connected with self-clamping module by floating junction, and the other end of stressed induction module is connected with driver module.Self-clamping module also comprises stressed induction module installing plate, and floating junction is fixed on stressed induction module installing plate.

Preferably, stressed induction module is the sensor of induction pulling force, and driver module is motor.

Further, described clamping device also comprises self-clamping module installing plate, described self-clamping module comprises lever pressing plate, train wheel bridge, lower plate, lower plate bearing, lever support, curved surface jacking block, curved surface jacking block controlling organization, rolling mechanism and self-clamping module slide block, described self-clamping module is fixed on described self-clamping module installing plate, described self-clamping module slide block is fixed on the downside of self-clamping module installing plate, described train wheel bridge is fixed on described lever pressing plate head, described rolling mechanism is fixed on described lever pressing plate afterbody, described rolling mechanism can roll along the curved surface of described curved surface jacking block, described lower plate is fixed on described lower plate bearing, described lever pressing plate is installed on described lever support by joint pin, described lower plate bearing, described lever support, described curved surface jacking block controlling organization is fixed on described self-clamping module installing plate successively, described curved surface jacking block controlling organization can control to move in described curved surface jacking block stroke certain on described self-clamping module installing plate, described lever pressing plate controls by the motion of described curved surface jacking block and the supporting role of described lever support the height being fixed on train wheel bridge described in its head, realize the action at edge that described train wheel bridge and described lower plate clamp or discharge described mask plate.

Further, described clamping device also comprises position-limit mechanism, and described position-limit mechanism comprises postive stop baffle, limited block and spacing bindiny mechanism.

Further, described spacing bindiny mechanism comprises two connecting plates and a connecting bottom board, described two connecting plates are connected with described stressed induction module and described driver module respectively, base plate slide block is fixed with on the downside of described connecting bottom board, described base plate slide block can slide on described operation guide rail, is provided with limit track on the upside of described connecting bottom board.

Further, the downside of described limited block is fixed on described limit track, described postive stop baffle is fixed on described clamping device pedestal, described spacing bindiny mechanism can be slided relative to described postive stop baffle by described base plate slide block, can signal be sensed when described limited block slides into the position at described postive stop baffle place, and by the described signal transmission that senses to control unit.

The utility model additionally provides a kind of clamping device assembly of mask plate, comprise the clamping device of pedestal, at least four group mount pads and at least four mask plates described above, described mount pad symmetry be fixed on described pedestal, what described clamping device was direct or indirect is fixed on described mount pad allocation really.

Further, the downside of described clamping device pedestal is provided with operation slide block, and described mount pad is provided with attachment rail, and described clamping device is installed on the described attachment rail of described mount pad by described operation slide block symmetry.

Further, described clamping device pedestal is provided with at least one tapped through hole, what mate with described tapped through hole is provided with bolt, the upper surface that can realize bolt and described mount pad by rotating described bolt holds out against, thus realizes clamping device described in each and to be fixed on described attachment rail allocation really.

Further, symmetrically on described pedestal be fixed with mount pad described in four groups, that often organizes described mount pad symmetry is provided with at least two described clamping devices.

Further, described mount pad is the described mount pad of four strips, and the mount pad of strip described in four groups forms two groups of opposite side.

Described clamping device assembly on described attachment rail is in same horizontal plane.

Described mount pad is provided with engraved structure, saves material with the weight alleviating mount pad simultaneously.

The aspect that the utility model is additional and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present utility model.

Accompanying drawing explanation

Above-mentioned and/or additional aspect of the present utility model and advantage will become obvious and easy understand from the following description of the accompanying drawings of embodiments, wherein:

Figure 1 shows that the overall structure figure of the utility model mask plate clamping device;

Figure 2 shows that the utility model self-clamping module structural representation;

Figure 3 shows that position-limit mechanism and stressed induction module structural representation;

Figure 4 shows that the planar structure schematic diagram of the utility model clamping device assembly;

Figure 5 shows that the perspective view of the utility model clamping device assembly;

Figure 6 shows that 50 part structure for amplifying schematic diagrames in Fig. 5;

Figure 7 shows that the perspective view of a kind of clamping device assembly of the utility model;

Figure 8 shows that clamping device assembly of the present utility model to mask plate stretch tight net schematic diagram;

Figure 9 shows that the perspective view of mask plate microscope carrier;

Figure 10 shows that the structural representation that mask frame carries;

Figure 11 shows that mask frame microscope carrier loads a kind of embodiment schematic diagram of mask frame;

Figure 12 shows that 110 part structure for amplifying schematic diagrames in Figure 11;

Figure 13 shows that the schematic diagram that mask plate microscope carrier coordinates with mask frame microscope carrier,

Figure 14 shows that a kind of embodiment schematic diagram of shading cloth working method in mask mask frame microscope carrier.

In Fig. 1,1 represents clamping device entirety, and 10 is self-clamping module, 11 is sensor, 1102 is floating junction, and 1101 is the installing plate of sensor, and 12 is position-limit mechanism, 121,123 is connecting plate, 122 is connecting bottom board, and 13 is motor, and 14 for running guide rail, 15 is clamping device pedestal, and 16 is self-clamping module installing plate;

In Fig. 2,101 is lever pressing plate, and 102 is train wheel bridge, 103 is lower plate, and 104 is bearing, and 1041 is lower plate bearing, 1042 is lever support, 105 is roller, and 106 is curved surface jacking block, and 107 is curved surface jacking block slide block, 108 is curved surface jacking block track, 1031 is limiting plate, and 109 is curved surface jacking block controlling organization, and 160 is self-clamping module slide block;

In Fig. 3,124 is postive stop baffle, and 125 is limited block, and 126 is limit track, and 127 is base plate slide block;

In Fig. 4,2 represent clamp assemblies entirety, and 41 is pedestal, and 42 is mount pad, and 43 is attachment rail, and 44 is engraved structure, and 45 is pad, and 46 is sunk structure, and 461 is the groove of mount mask plate microscope carrier base plate;

In Fig. 5,50 is observation part to be amplified;

In Fig. 6,61 is bolt, and 62 is tapped through hole;

In Fig. 7,71 is mask plate microscope carrier, and 72 is mask frame microscope carrier;

In Fig. 8,80 is mask plate;

In Fig. 9,711 is the gripper shoe of mask plate, and 712 is the motor driving mask plate microscope carrier, and 713 for driving leading screw, and 714 is mask plate microscope carrier base plate, and 715 is the guider of mask plate gripper shoe 712;

In Figure 10 ~ Figure 12, 111 is mask frame, 721 for forming the pedestal of mask frame microscope carrier 72, 7211 for forming the base plate of pedestal 721, 7212 for forming the side plate of pedestal 721, 722 for forming the levelling gear of mask frame microscope carrier 72, 7221 for forming the YE of levelling gear 722, 7222 for forming the leveling board of levelling gear 722, 7223 is leveling guider, 723 for forming the mask frame loading plate of mask frame microscope carrier 72, 724 for forming the detent mechanism of mask frame microscope carrier 72, 7241 for form detent mechanism 724 hold out against cylinder, 7242 for forming the locating piece of detent mechanism 724, 725 for forming the jacking mechanism of mask frame microscope carrier 72, 7251 for forming the lifting drive of jacking mechanism 725, 7252 for forming the top board of jacking mechanism 725, 7253 is jack-up guider,

In Figure 13,716 for being arranged on the shading cloth on mask mask plate microscope carrier 71, and 7161 for being arranged on the motor of shading cloth 716 one end, and 7162 for being arranged on the torsion spring of shading cloth 716 other end, and 7163 is the back shaft supporting shading cloth 716.

Detailed description of the invention

Be described below in detail embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the utility model, and can not being interpreted as restriction of the present utility model.

In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " is fixed ", " connection " should be interpreted broadly, such as, " connection " can be fixedly connected with, and connects integratedly, also can be removably connect; It can be integrated fixing for " fixing ", also can be fixed by bindiny mechanism.For the ordinary skill in the art, concrete condition the concrete meaning of above-mentioned term in the utility model can be understood.

Inventive concept of the present utility model is as follows, and as described in technical background, usual mask plate opening production process and mask assembling procedure all need the net that stretches tight, net pulling force inequality that what the net arrangement that usually stretches tight provided stretch tight cause mask plate to be out of shape or mask assembly precision not high.The clamping device for OLED mask plate that the utility model provides and assembly thereof, mask plate assembling and make mask plate opening process the net operation that stretches tight in can ensure that the even tension that applies mask plate is controlled and mask plate can not be made to be out of shape, meet the high-precision requirement of mask assembly, thus improve the quality of mask assembly.

Clamping device for OLED mask plate of the present utility model and assembly thereof are described below with reference to accompanying drawings.

According to embodiment of the present utility model, the utility model provides a kind of clamping device for OLED mask plate, as shown in Fig. 1 ~ Fig. 2, comprise self-clamping module 10, driver module 13, run guide rail 14 and clamping device pedestal 15, self-clamping module 10, driver module 13 and operation guide rail 14 are directly or indirectly fixed on clamping device pedestal 15, self-clamping module 10 is directly or indirectly connected with driver module 13, driver module 13 can drive self-clamping module 10 to run on operation guide rail 14, thus realize the action mask plate that self-clamping module 10 clamps being applied to tension force or release tension force.

In embodiment of the present utility model, clamping device 1 also comprises stressed induction module 11, and self-clamping module 10 is connected with driver module 13 indirectly by stressed induction module 11.

Driver module 13 can be cylinder or motor.

Preferably, driver module 13 is motor, and stressed induction module 11 is the sensor of induction pulling force.

In embodiment of the present utility model, as shown in Figure 3, clamping device 1 also comprises self-clamping module installing plate 16, self-clamping module 10 comprises lever pressing plate 101, train wheel bridge 102, lower plate 103, lower plate bearing 1041, lever support 1042, curved surface jacking block 106, curved surface jacking block controlling organization 109, rolling mechanism 105 and self-clamping module slide block 160, self-clamping module 10 is fixed on self-clamping module installing plate 16, self-clamping module slide block 160 is fixed on the downside of self-clamping module installing plate 16, self-clamping module 10 can be slided by self-clamping module slide block 160 on operation guide rail 14, train wheel bridge 1021 is fixed on lever pressing plate 101 head, rolling mechanism 105 is fixed on lever pressing plate 101 afterbody, rolling mechanism 105 can roll along the curved surface of curved surface jacking block 106, lower plate 1022 is fixed on lower plate bearing 1041, lever pressing plate 101 is installed on lever support 1042 by joint pin 1011, lower plate bearing 1041, lever support 1042, curved surface jacking block controlling organization 109 is fixed on self-clamping module installing plate 16 successively, curved surface jacking block controlling organization 109 can move in the stroke certain on self-clamping module installing plate 16 of Control curve jacking block 106, lever pressing plate 101 controls by the motion of curved surface jacking block 106 and the supporting role of lever support 1042 height being fixed on its head train wheel bridge 102, realize the action at edge that train wheel bridge 102 clamps with lower plate 103 or discharges mask plate.

As shown in Figure 2, lower plate 103 is also provided with limiting plate 1031, limiting plate 1031 can make the edge of mask plate can not exceed limiting plate 1031.

Self-clamping module 10 is also provided with resetting-mechanism, as shown in Figure 2, resetting-mechanism comprises elastic reseting part, reseting fixture (1011,1012), the two ends of elastic reseting part are fixed on train wheel bridge 101 with reseting fixture 1011(respectively) and reseting fixture 1012(be fixed on self-clamping module installing plate 16) be connected, elastic reseting part can be extension spring or other there is the device of flexible reset function.When train wheel bridge 101 is in the state at release mask plate edge, train wheel bridge 101 is made to reset (being namely in the stationary state thought and set) by resetting-mechanism, avoid sliding because of curved surface jacking block 106 and the Action of Gravity Field of train wheel bridge 101 makes train wheel bridge 101 and curved surface jacking block 106 produce relative motion, thus avoid producing unnecessary wearing and tearing.

Curved surface jacking block controlling organization 109 can be Pneumatic assembly or motor.

According to embodiments more of the present utility model, as shown in Figure 1, Figure 3, clamping device 1 also comprises position-limit mechanism 12, and position-limit mechanism 12 comprises postive stop baffle 124, limited block 125 and spacing bindiny mechanism.

According to embodiments more of the present utility model, as shown in Figure 1, Figure 3, spacing bindiny mechanism comprises two connecting plates, 121,123 and connecting bottom board 122, two connecting plates 121,123 are connected with sensor 11 and motor 13 respectively, in Fig. 1 with Fig. 3, connecting plate 121 is connected with sensor, and connecting plate 123 is connected with motor, is fixed with base plate slide block 127 on the downside of connecting bottom board 122, base plate slide block 127 can slide on operation guide rail 14, and connecting bottom board 122 upper side is provided with limit track 126.

According to embodiments more of the present utility model, as shown in Figure 1, Figure 3, the downside of limited block 125 is fixed on limit track 126, postive stop baffle 124 is fixed on clamping device pedestal 15, spacing bindiny mechanism can be slided relative to postive stop baffle 124 by base plate slide block 127, can signal be sensed when limited block 125 slides into the position at postive stop baffle 124 place, and by the signal transmission sensed to control unit (motor 13 is all connected with control unit with limited block 125).

As shown in Figure 1, Figure 3, the postive stop baffle 124 of position-limit mechanism 12 can be fixed on clamping device pedestal 15 by the counter sink of strip on it and screw fit.

The stroke limiting of self-clamping module 10 on operation guide rail 14 is slided by the setting of postive stop baffle 124 and limited block 125 by position-limit mechanism 12 in certain stroke range, thus avoid making clamping fill 10 overtensions put mask plate applies to cause the breakage of mask plate because self-clamping module exceedes stroke, or the distance of moving to the direction of luxuriant motor 13 because of grip block 10 is excessive causes self-clamping module 10 to touch mask plate causing that mask plate is curling to be even out of shape.When limited block 125 slides into the position at postive stop baffle 124 place, can produce induced signal, and induced signal be passed to the control unit be connected with limited block 125, the signal that control unit receives can control motor and stop corresponding action to proceed.

As shown in Figure 1, one end of sensor 11 is connected with self-clamping module 10 by floating junction 1102, and the other end of sensor 11 is connected with position-limit mechanism 12 by connecting plate 121, and the other end of position-limit mechanism is connected with motor 13 by connecting plate 123.

As shown in Figure 1 and Figure 2, self-clamping module 10 also comprises sensor installing plate 1101, and floating junction 1102 is installed on sensor installing plate 1101.

The utility model additionally provides a kind of clamping device assembly of mask plate, comprise pedestal, at least four group mount pads and the clamping device 1 to mask plate described above, as shown in Figure 4, Figure 5, mount pad 42 symmetry be fixed on pedestal 41, clamping device straight 1 connects or is indirectly fixed on mount pad 42 allocation really.

In embodiment of the present utility model, the downside of clamping device pedestal 15 is provided with runs slide block 16, and mount pad 42 is provided with attachment rail 43, and clamping device 1 is by running on the attachment rail 43 being installed on mount pad of slide block 16 symmetry.

In embodiment of the present utility model, as shown in Fig. 5 ~ Fig. 6, Figure 6 shows that 50 part structure for amplifying schematic diagrames in Fig. 5, clamping device pedestal 15 is provided with at least one tapped through hole 62, what mate with tapped through hole 62 is provided with bolt 61, bolt 61 can be realized by swivel bolt 61 to hold out against with the upper surface of mount pad 42, thus realize each clamping device 1 and to be fixed on attachment rail 43 allocation really, clamping device 1 can slide into certain position along attachment rail fixed by clamping device by running slide block 16 in actual applications.

As shown in Fig. 4 ~ Fig. 5, because clamping device assembly has degree of precision requirement, it requires that board has higher stability, and in the utility model, the material of pedestal 41, mount pad 42 is granite.

Hold out against with the upper surface of mount pad 42 owing to being realized bolt 61 by swivel bolt 61, so certain power can be produced to the upper surface of mount pad 42, in order to avoid holding out against fixing position to mount pad 42 generation destruction bolt on mount pad 42, pad 45 is installed, as shown in Figure 4, Figure 5, pad 45 is rectangular, and hard material selected by pad, as metal or metal alloy, preferably, egative film 45 is steel.

According to embodiments more of the present utility model, as shown in Fig. 4 ~ Fig. 5, clamping device assembly comprises four group leader's bar mount pad 42, four group leader's bars and installs 42 compositions, two groups of opposite side.

As shown in Figures 4 and 5, clamping device assembly 2 comprises four group leader's bar mount pads 42, often group mount pad 42 in two groups of mount pads of one group of opposite side is provided with 2 clamping devices 1, the often group mount pad 42 in two groups of mount pads of another kind of opposite side is provided with 3 clamping devices 1.

As shown in Figure 7, clamping device assembly 2 comprises four group leader's bar mount pads 42, often group mount pad 42 in two groups of mount pads of one group of opposite side is provided with 3 clamping devices 1, the often group mount pad 42 in two groups of mount pads of another kind of opposite side is provided with 4 clamping devices 1.

In another specific embodiment (without view), four group leader's bars are installed in two groups of opposite side of 42 compositions, often group mount pad 42 in two groups of mount pads of one group of opposite side is provided with 7 clamping devices 1, the often group mount pad 42 in two groups of mount pads of another kind of opposite side is provided with 8 clamping devices 1.

In actual applications, the quantity that the often group mount pad stretching tight clamping device assembly 2 comprises clamping device 1 is generally 1 ~ 10, concrete quantity is determined according to the size of metal mask plate, and when metal mask board size is larger, the quantity that often group mount pad 42 comprises clamping device 1 can more than 10.

Consider the stability of installation in certain embodiments, each mount pad 42 is at least provided with on each mount pad 42 shown in 2 attachment rails 43, Fig. 4, Fig. 5 and namely has 2 attachment rails 43.

In order to the weight that alleviates mount pad and the pressure alleviated base station 41, mount pad is provided with engraved structure 44.

On a horizontal plane, carry out stretching tight net based on by mask plate, all clamping devices 1 on attachment rail 43 need to be in same horizontal plane, to ensure that clamping device assembly ensures that when clamping mask plate mask plate can to stretch tight net by smooth carrying out.

As shown in Figure 7, be the perspective view of a kind of clamping device assembly of the utility model, the zone line that clamping device assembly 2 surrounds on pedestal 41 is provided with mask plate microscope carrier 71 and mask frame microscope carrier 72.In Fig. 4, sunk structure 46 is for mount mask frame microscope carrier 72 and mask plate microscope carrier 71.

Figure 9 shows that mask plate microscope carrier perspective view, mask plate microscope carrier 71 comprises mask plate gripper shoe 711, drive the motor 712 of mask plate microscope carrier, drive silk screen 713, mask plate microscope carrier base plate 714, mask plate microscope carrier guider 715, mask plate microscope carrier 71 is placed on the groove 46 shown in Fig. 4 by mask plate microscope carrier base plate 714.Mask plate gripper shoe 711 drives the driving leading screw 713 be connected with mask plate gripper shoe 711 to realize vertically moving by driving the motor 712 of mask plate, in motor 712 driving process, guider 715 plays the effect of guiding, and driving leading screw 713 is moved along the direction determined.Be glass plate at the upper surface of the gripper shoe 711 of mask plate, glass plate bottom is provided with light source (not shown), and motor 712 drives the gripper shoe 711 of mask plate to move in vertical direction by driving leading screw 713.As the reasonable embodiment of one, the glass plate of the upper surface of the gripper shoe 711 of mask plate is frosted glass, the light source arranged thereunder is the light bar evenly arranged, thus the uniform light that reasonable guarantee is launched above the gripper shoe 711 of mask plate is consistent.

Figure 8 shows that the structural representation of the net that mask plate 80 to be stretched tight by clamping device assembly (clamping device assembly also namely stretch tight screen component), when mask plate gripper shoe 711 rises to certain height by driving the motor 712 of mask plate microscope carrier to drive, the edge of mask plate 80 is made to be in position between the train wheel bridge 102 of self-clamping module 10 in clamping device assembly and lower plate 103, clamp mode 10 is made to slide into the position (this position can not make self-clamping module touch mask plate 80 and make the curling even distortion of mask plate) that can be clamped to mask plate 80 edge by self-clamping module slide block 160 along running guide rail 14 by driver module 13 drived control, the direction deviating from curved surface jacking block driving mechanism 109 by curved surface jacking block controlling organization 109 drived control curved surface jacking block 106 along curved surface jacking block track 108 is again slided, by rolling mechanism 105 along curved surface jacking block slide and lever support 1042 supporting role under, lever pressing plate 101 height of head declines and makes the edge of train wheel bridge 102 and lower plate 103 contact gripping mask plate 80, self-clamping module 10 is made to run guide rail 14 along the direction operation deviating from mask plate 80 by the drived control of driver module 13 pairs of self-clamping modules again, mask plate 80 is made to have certain tension force, by stressed induction module 11, the pulling force signal of induction is directly or indirectly sent to user's display interface, operating personnel control the operation of driver module 13 by the data of display.After completing the net step that stretches tight, by the driving of driver module 13, self-clamping module 10 is run to mask plate 80 direction, the tension force that self-clamping module 10 pairs of mask plates 80 are applied diminishes and even eliminates, drive curved surface jacking block that the train wheel bridge 102 on lever pressing plate 101 is separated with lower plate by curved surface jacking block driving mechanism again, thus complete the whole net operation step that stretches tight.Stretching tight, clamping devices all in clamping device assembly in net operation works simultaneously.

Figure 10, Figure 11, Figure 12 shows that a kind of embodiment schematic diagram of mask frame microscope carrier, in the present embodiment, pedestal 721, levelling gear 722 and mask frame loading plate 723 form mask frame microscope carrier 72 basic structure (mask frame microscope carrier can only thus three parts form).In other embodiments of mask frame microscope carrier, mask frame microscope carrier 72 can also comprise detent mechanism 724 and jacking mechanism 725, Figure 11 shows that mask frame microscope carrier loads a kind of embodiment schematic diagram of mask frame by jacking mechanism, Figure 12 is 110 enlarged schematic partial view in Figure 11.Below in conjunction with Figure 11, Figure 12, Figure 13, to the detailed description of mask frame stage structure.

Pedestal 721 is made up of base plate 7211 and the side plate 7212 be arranged on base plate 7211, and it is for installing levelling gear 722; Levelling gear 722 is vertically set on the YE 7221 on described pedestal base plate 7211 by 4 and the leveling board 7222 be arranged on above each YE 7221 is formed; Mask frame loading plate 723 is arranged on above the leveling board 7222 of levelling gear 722, regulate the YE 7221 of levelling gear 722 can adjust the horizontal level being arranged on mask frame loading plate 723 above leveling board 7222 by coordinating, mask frame loading plate 723 is for directly carrying mask frame.In some embodiments of the utility model, the YE 7221 forming levelling gear 722 is connected with leveling board 7222 by floating junction (not shown), YE 7221 provides power for levelling gear 722, and leveling board 7222 is as the external tapping of levelling gear 722; Each YE 7221 both sides are also provided with a leveling guider 7223, by the mating reaction of YE 7221 both sides leveling guider 7223, effectively can control the direction of motion of leveling board 7222 on levelling gear 722.

Be loaded on mask frame microscope carrier 72 for the ease of mask frame 111, mask frame microscope carrier 72 is provided with jacking mechanism 725, jacking mechanism 725 is vertically set on lifting drive 7251 on pedestal 721 by 4 and 2 top boards 7252 be horizontally set on above lifting drive 7251 are formed, top board 7252 completes rising or down maneuver by the motion of lifting drive 7251, mask frame loading plate 723 is provided with the through-hole structure matched with jacking mechanism 725, mask frame loading plate 723 upper surface is provided with the sunk structure adapted with the top board 7252 of jacking mechanism 725, when making top board 7252 drop to minimum point, the upper surface of top board 7252 is not higher than the upper surface of mask frame loading plate 723.In addition, the top board 7252 forming jacking mechanism 725 needs to move in vertical direction, namely lifting drive 7251 can only drive top board 7252 to move in vertical direction, can move by preset path to make jacking mechanism 725, lifting drive 7251 side is supporting is provided with jack-up guider 7253 for each of jacking mechanism 725, and the upper end of the lifting drive 7251 of jacking mechanism 725 is connected with top board 7252 by floating junction (not shown).

Mask frame microscope carrier 72 also comprises detent mechanism 724, detent mechanism is made up of cylinder assembly 7241 and locating piece 7242, detent mechanism 724 is arranged on the top board 7251 of mask frame loading plate 723 or jacking mechanism 725, mask frame 111 to be placed on mask frame loading plate 723 allocation really by detent mechanism 724, thus ensures the stability of mask plate component assembling process.As shown in Figure 10, mask frame loading plate 723 two adjacent edges be respectively provided with two cylinder assemblies 7241, be provided with locating piece 7242 not arranging another two adjacent edges of cylinder assembly 7241, in the present embodiment, locating piece 7242 is strip structure, is arranged on the top board 7252 of mask frame loading plate 723 or jacking mechanism 725.Mask frame 111 is placed in after on mask frame loading plate 723, cylinder assembly 7241 pairs of mask frames 111 of detent mechanism 724 provide certain pressure, mask frame 111 is made to hold out against the locating piece 7252 of detent mechanism 725, thus reach detent mechanism 725 pairs of mask frames 111 and fix, make mask frame 111 to be placed on mask frame loading plate 723 allocation really.

In the utility model, the top board 7252 of jacking mechanism 725 is done by the motion of lifting drive 7251 and rises or down maneuver, thus the realization mask frame 111 be placed in above top board 7252 is loaded on the mask frame loading plate 723 of microscope carrier.Consider the effect essence of jacking mechanism 725, as other embodiments of the present utility model, in the utility model, jacking mechanism 725 can comprise more than 4 lifting drives 7251 or the top board 7252 that is horizontally set on more than 2 above lifting drive 7251, and lifting drive 7251 can adopt cylinder or electric cylinder to drive.In other embodiments of the present utility model, because the size of mask frame 111 is comparatively large, the quantity of the YE that levelling gear 43 adopts can also more than 4.

All adopt floating junction between the lifting drive 7251 of jacking mechanism 725 and top board 7252, between the YE 7221 of levelling gear 722 and leveling board 7222, the joint of bascule is conducive to mechanical adjustment process.

In order to better understand the working method of mask frame microscope carrier 72 in the utility model, below the method for work of mask frame microscope carrier is explained in detail.

The method of adjustment of mask frame microscope carrier, it comprises the following steps:

A, mask frame load step, as shown in Figure 11, the lifting drive 7251 of jacking mechanism 725 drives top board 7252 to rise, after arriving correct position, mask frame 111 is placed on above top board 7252, lifting drive 7251 drives top board 7252 to decline, and mask frame 111 is supported by described mask frame loading plate 723;

B, mask frame positioning step, by adjustment detent mechanism 724, namely by the action of cylinder 7241, mask frame 111 is held out against on the locating piece 7242 of detent mechanism 724, thus arrive hardmask frame 111 and to be positioned on mask frame loading plate 723 allocation really;

C, mask frame leveling step, by coordinating the YE 7221 regulating leveling structure 722, make mask frame 111 be in certain height and position, and the upper surface of mask frame 111 has good flatness.

Figure 13 shows that the schematic diagram that mask plate microscope carrier coordinates with mask frame microscope carrier, mask plate microscope carrier 71 is arranged on the inside of mask frame microscope carrier 72, above mask plate microscope carrier 71, be also provided with movable shading cloth 726, shading cloth 726 realizes blocking or exposing mask plate microscope carrier 71 by the motor or torsion spring being arranged on its two ends.A kind of embodiment schematic diagram of shading cloth 726 working method as shown in figure 14, the two ends of shading cloth 726 are respectively indirectly by rope or be directly connected with the motor 7261 and torsion spring 7262 that are arranged on two ends, during work, the mask support plate 711 of mask plate microscope carrier 71 drops to certain altitude position under the driving of gripper shoe drive unit, motor 7161 drives rope to make shading cloth 716 cover the top of mask support plate 711, and so design makes can effectively protect mask support plate 711 when cutting metal mask sheet; When not needing shading cloth 716 to block, release motor 7161, torsion spring 7162 makes shading cloth 716 rebound under the effect of self.As shown in figure 14, mask plate microscope carrier is also provided with the back shaft 7163 for supporting shading cloth 716, back shaft 7163 plays the effect of support to rope and shading cloth.

The clamping device for OLED mask plate that the utility model provides and assembly thereof, assemble or make at mask plate in the operation of mask plate opening and can meet mask plate assembling and the high-precision requirement of mask plate opening to the tension force of mask plate applying uniform, controllable, thus improve the quality of mask assembly.Simultaneously the mask plate clamping device that provides of the utility model and assembly thereof can realize automatically stretching tight to mask plate the action of net, improve production efficiency.

Although be described in detail detailed description of the invention of the present utility model with reference to multiple illustrative examples of the present utility model, but it must be understood that, those skilled in the art can design multiple other improvement and embodiment, these improve and embodiment by drop on the utility model principle spirit and scope within.Specifically, within the scope of aforementioned open, accompanying drawing and claim, rational modification and improvement can be made in the layout of parts and/or sub-combination layout, and spirit of the present utility model can not be departed from.Except modification and the improvement of parts and/or layout aspect, its scope is by claims and equivalents thereof.

Claims (9)

1. a clamping device for mask plate, comprises self-clamping module, driver module, operation guide rail and clamping device pedestal, it is characterized in that:

Described self-clamping module, described driver module and described operation guide rail are directly or indirectly fixed on described clamping device pedestal, described self-clamping module is directly or indirectly connected with described driver module, described driver module can drive described self-clamping module to run on described operation guide rail, thus realizes the action described mask plate that described self-clamping module clamps being applied to tension force or release tension force;

Described clamping device also comprises self-clamping module installing plate, described self-clamping module comprises lever pressing plate, train wheel bridge, lower plate, lower plate bearing, lever support, curved surface jacking block, curved surface jacking block controlling organization, rolling mechanism and self-clamping module slide block, described self-clamping module is fixed on described self-clamping module installing plate, described train wheel bridge is fixed on described lever pressing plate head, described rolling mechanism is fixed on described lever pressing plate afterbody, described rolling mechanism can roll along the curved surface of described curved surface jacking block, described lower plate is fixed on described lower plate bearing, described lever pressing plate is installed on described lever support by joint pin, described lower plate bearing, described lever support, described curved surface jacking block controlling organization is fixed on described self-clamping module installing plate successively, described curved surface jacking block controlling organization can control to move in described curved surface jacking block stroke certain on described self-clamping module installing plate, described lever pressing plate controls by the motion of described curved surface jacking block and the supporting role of described lever support the height being fixed on train wheel bridge described in its head, realize the action at edge that described train wheel bridge and described lower plate clamp or discharge described mask plate.

2. clamping device according to claim 1, is characterized in that: described clamping device also comprises stressed induction module, and described self-clamping module is connected with described driver module indirectly by described stressed induction module.

3. clamping device according to claim 2, is characterized in that: described driver module is motor, and described stressed induction module is the sensor of induction pulling force.

4. the clamping device according to claim 1 ~ 3 any one claim, is characterized in that: described clamping device also comprises position-limit mechanism, and described position-limit mechanism comprises postive stop baffle, limited block and spacing bindiny mechanism.

5. clamping device according to claim 4, it is characterized in that: described spacing bindiny mechanism comprises two connecting plates and a connecting bottom board, described two connecting plates are connected with described stressed induction module and described driver module respectively, base plate slide block is fixed with on the downside of described connecting bottom board, described base plate slide block can slide on described operation guide rail, is provided with limit track on the upside of described connecting bottom board.

6. clamping device according to claim 5, it is characterized in that: the downside of described limited block is fixed on described limit track, described postive stop baffle is fixed on described clamping device pedestal, described spacing bindiny mechanism can be slided relative to described postive stop baffle by described base plate slide block, can signal be sensed when described limited block slides into the position at described postive stop baffle place, and by the described signal transmission that senses to control unit.

7. a clamping device assembly for mask plate, comprises the clamping device of pedestal, at least four group mount pads and at least four mask plates as claimed in claim 1, it is characterized in that:

Described mount pad symmetry be fixed on described pedestal, what described clamping device was direct or indirect is fixed on described mount pad allocation really.

8. clamping device assembly according to claim 7, it is characterized in that: the downside of described clamping device pedestal is provided with operation slide block, described mount pad is provided with attachment rail, and described clamping device is installed on the described attachment rail of described mount pad by described operation slide block symmetry.

9. clamping device assembly according to claim 8, it is characterized in that: described clamping device pedestal is provided with at least one tapped through hole, what mate with described tapped through hole is provided with bolt, the upper surface that can realize bolt and described mount pad by rotating described bolt holds out against, thus realizes clamping device described in each and to be fixed on described attachment rail allocation really.