CN204115740U - A kind of new micro Inertial Measurement Unit combination - Google Patents
A kind of new micro Inertial Measurement Unit combination Download PDFInfo
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- CN204115740U CN204115740U CN201420589114.XU CN201420589114U CN204115740U CN 204115740 U CN204115740 U CN 204115740U CN 201420589114 U CN201420589114 U CN 201420589114U CN 204115740 U CN204115740 U CN 204115740U
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- accelerometer
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Abstract
The utility model discloses a kind of new micro Inertial Measurement Unit combination, comprise pedestal, described pedestal is welded with the accelerometer (sensitive axes is in chip plane) of two comb-tooth-type structures, the accelerometer (sensitive axes is perpendicular to chip plane) of a single fulcrum torsional pendulum type structure, the gyro (sensitive axes is in chip plane) of two single fulcrum angular oscillation structures and the gyro (sensitive axes is perpendicular to chip plane) of a linearly coupled structure.The inertial sensor of different structure is adopted to carry out the component in sense acceleration and angular speed three directions, the position relationship of each sensor sensing axle of consideration that like this can be too much, thus the arrangement of structure can be made compacter, space availability ratio reaches maximization, rhythmo structure can be adopted, compact conformation, strong shock resistance, is applicable to miniaturization and high overload occasion.
Description
Technical field
the utility model relates to the combination of a kind of mini inertia measurement unit, particularly a kind of mini inertia measurement unit combination of novel stacked arrangement.
Background technology
inertial Measurement Unit (English: Inertial measurement unit, to be called for short IMU) is the device measuring object three-axis attitude angle (or angular speed) and acceleration.
general, an IMU contains the accelerometer of three single shafts and the gyro of three single shafts, accelerometer inspected object founds the acceleration signal of three axles in carrier coordinate system unification and independence, and gyro detects the angular velocity signal of carrier relative to navigational coordinate system, measure object angular velocity in three dimensions and acceleration, and calculate the attitude of object with this.Very important using value is used in navigation.IMU is used in the equipment needing to carry out motion control mostly, as on automobile and robot, is also used in the occasion needing to carry out accurate displacement reckoning by attitude, as the inertial navigation set etc. of submarine, aircraft, guided missile and spacecraft.Along with the development of technology, less device, less parts, all show very unique advantage in many aspects, occurred large quantities of miniaturization carrier in some space flight, aviation field, this just requires, and the volume of their Inertial Measurement Unit is very little, very light in weight.
along with the development of micro-fabrication technique and MEMS technology, miniature MEMS gyroscope of new generation and miniature MEMS accelerometer develop rapidly, for the design of mini inertia measurement unit and development provide strong support.Existing mini inertia measurement unit adopts structure as shown in Figure 1 mostly, three directions use the sensor of same kind, form cube shaped structure, the sheet metal that six pieces of machining precisioies are very high forms a metal hexahedron as support, hexahedral six metal coverings of metal install gyroscope and accelerometer, accelerometer is arranged on hexahedral three mutually perpendicular centres, to ensure that three accelerometer sensitive axles are vertical between two and to intersect at space same point, gyrostatic installation guarantee three is gyrostatic, sensitive axes is vertical between two and parallel with corresponding accelerometer sensitive axle in space, the shortcoming that the Inertial Measurement Unit of this structure exists is, volume is large, space availability ratio is not high, be unfavorable for microminiaturization.Also have a kind of structure to be the improvement that square shaped combines, as shown in Figure 2, compare above-mentioned cubic structure, volume has had certain reduction, but the utilization factor in space is still not high.Therefore in order to the space availability ratio of the raising Inertial Measurement Unit of further higher degree, reduce volume, need to set about from the structure of sensor and principle, seek best solution.
Summary of the invention
the utility model object is: provide that a kind of volume is little, structure optimization, the new micro Inertial Measurement Unit combination of strong shock resistance.
the technical solution of the utility model is: a kind of new micro Inertial Measurement Unit combination, comprise pedestal, described pedestal is welded with the accelerometer of two comb-tooth-type structures, the accelerometer of a single fulcrum torsional pendulum type structure, two single gyros of fulcrum angular oscillation structure and the gyro of a linearly coupled structure.
further, described pedestal layering is arranged.
further, described pedestal has three layers, ground floor and the second layer are welded with the accelerometer of a comb-tooth-type structure and the gyro of a single fulcrum angular oscillation structure respectively, and third layer is welded with a single accelerometer for fulcrum torsional pendulum type structure and the gyro of a linearly coupled structure.
the utility model has the advantages that:
the inertial sensor of different structure is adopted to carry out the component in sense acceleration and angular speed three directions, all sensor chips can be placed in a plane, or in the plane of several parallel lamination, the position relationship of each sensor sensing axle of consideration that like this can be too much, thus the arrangement of structure can be made compacter, space availability ratio reaches maximization, rhythmo structure can be adopted, compact conformation, strong shock resistance, is applicable to miniaturization and high overload occasion.
Accompanying drawing explanation
below in conjunction with drawings and Examples, the utility model is further described:
fig. 1 is a kind of structural representation of the utility model existing mini inertia measurement unit combination;
fig. 2 is the another kind of structural representation of the utility model existing mini inertia measurement unit combination;
fig. 3 is the structural representation of the preferred embodiment of the new micro Inertial Measurement Unit combination of the utility model;
fig. 4 is the structural representation that the new micro Inertial Measurement Unit of the utility model combines single fulcrum torsional accelerometer;
fig. 5 is the structural representation of the utility model new micro Inertial Measurement Unit combination multi-finger microaccelerometer;
fig. 6 is the structural representation that the new micro Inertial Measurement Unit of the utility model combines single fulcrum angular oscillation gyro;
fig. 7 is structure and the operating diagram of the utility model new micro Inertial Measurement Unit combination line vibrational structure gyro.
wherein: 1, pedestal, 2, the accelerometer of comb-tooth-type structure, 3, the gyro of single fulcrum angular oscillation structure, 4, the accelerometer of comb-tooth-type structure, 5, the gyro of single fulcrum angular oscillation structure, 6, the accelerometer of single fulcrum torsional pendulum type structure, 7, the gyro of linearly coupled structure, 8, IMU treatment circuit.
Embodiment
for making the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with embodiment also with reference to accompanying drawing, the utility model is further described.Should be appreciated that, these describe just exemplary, and do not really want to limit scope of the present utility model.In addition, in the following description, the description to known features and technology is eliminated, to avoid unnecessarily obscuring concept of the present utility model.
preferred embodiment:
as shown in Figure 3, the new micro Inertial Measurement Unit combination of one of the present embodiment, comprise pedestal 1, pedestal 1 is provided with three layers, ground floor is welded with both gyro 3(sensitive axes of the accelerometer 2 of a comb-tooth-type structure and a single fulcrum angular oscillation structure in the x-direction), both gyro 5(sensitive axes that the second layer is welded with the accelerometer 4 of a comb-tooth-type structure and a single fulcrum angular oscillation structure in the y-direction), both gyro 7(sensitive axes that third layer is welded with the accelerometer 6 of a single fulcrum torsional pendulum type structure and a linearly coupled structure in the z-direction), the sensor shares the top layer that an IMU treatment circuit 8 is arranged on pedestal 1, the inertial sensor arrangement of said structure can be compact as much as possible.
to acceleration measurement, in In-plane direction, adopt the accelerometer (2 of two comb-tooth-type structures, 4) x in In-plane is detected, the acceleration in y direction, in out-of-plane direction, the accelerometer 6 of a single fulcrum torsional pendulum type structure is adopted to detect the acceleration in z direction in out-of-plane.
to measured angular speed, adopt the gyro (3,5) of two single fulcrum angular oscillation structures to detect the angular velocity in x, y direction, adopt the gyro 7 of a linearly coupled structure to detect the angular velocity rotated around z-axis direction.
fig. 4 is the structural representation that the new micro Inertial Measurement Unit of the utility model combines single fulcrum torsional accelerometer
the beam of this structure torsional rigidity in out-of-plane direction much smaller than the translation in In-plane face and torsional rigidity, therefore may be used for the acceleration detecting z direction.Due to for rocking structure, the detection mode of differential capacitance is adopted to detect by bottom electrode.
fig. 5 is the structural representation of the utility model new micro Inertial Measurement Unit combination multi-finger microaccelerometer
the beam of this structure rigidity in y direction much smaller than the rigidity in x and z direction, thus for detecting the acceleration in y direction.
mode of motion is at structure place move in plane (In-plane).90-degree rotation places the acceleration that can detect x direction.
fig. 6 is the structural representation that the new micro Inertial Measurement Unit of the utility model combines single fulcrum angular oscillation gyro
in figure, gyro mass (In-plane) in chip plane carries out angular oscillation around z-axis, when there being the turning rate input in x direction, oscillating mass block be subject to z to coriolis force, mass is swung around y-axis simultaneously.
illustrating this structure for detecting the angular velocity around x-axis, when the gyro of two this structures becomes 90 degree to place, can detect around x-axis and the angular velocity around y-axis.
fig. 7 is structure and the operating diagram of the utility model new micro Inertial Measurement Unit combination line vibrational structure gyro
mass comb electrostatic drive under, vibrate in the y-direction, when have z to turning rate input time, oscillating mass block is subject to the coriolis force in x direction, detects the capacitance variations caused due to the motion in x direction and indirectly can obtain input angular velocity.
should be understood that, above-mentioned embodiment of the present utility model only for exemplary illustration or explain principle of the present utility model, and is not formed restriction of the present utility model.Therefore, any amendment made when not departing from spirit and scope of the present utility model, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.In addition, the utility model claims be intended to contain fall into claims scope and border or this scope and border equivalents in whole change and modification.
Claims (3)
1. a new micro Inertial Measurement Unit combination, comprise pedestal, it is characterized in that, described pedestal is welded with the accelerometer of two comb-tooth-type structures, the accelerometer of a single fulcrum torsional pendulum type structure, two single gyros of fulcrum angular oscillation structure and the gyro of a linearly coupled structure.
2. new micro Inertial Measurement Unit combination according to claim 1, it is characterized in that, described pedestal layering is arranged.
3. new micro Inertial Measurement Unit combination according to claim 2, it is characterized in that, described pedestal has three layers, ground floor and the second layer are welded with the accelerometer of a comb-tooth-type structure and the gyro of a single fulcrum angular oscillation structure respectively, and third layer is welded with a single accelerometer for fulcrum torsional pendulum type structure and the gyro of a linearly coupled structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201420589114.XU CN204115740U (en) | 2014-10-13 | 2014-10-13 | A kind of new micro Inertial Measurement Unit combination |
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| CN201420589114.XU CN204115740U (en) | 2014-10-13 | 2014-10-13 | A kind of new micro Inertial Measurement Unit combination |
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| CN204115740U true CN204115740U (en) | 2015-01-21 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104296746A (en) * | 2014-10-13 | 2015-01-21 | 苏州文智芯微系统技术有限公司 | Novel minitype inertial measurement unit assembly |
| CN113790721A (en) * | 2021-08-17 | 2021-12-14 | 北京自动化控制设备研究所 | Planar micro inertial navigation system |
-
2014
- 2014-10-13 CN CN201420589114.XU patent/CN204115740U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104296746A (en) * | 2014-10-13 | 2015-01-21 | 苏州文智芯微系统技术有限公司 | Novel minitype inertial measurement unit assembly |
| CN113790721A (en) * | 2021-08-17 | 2021-12-14 | 北京自动化控制设备研究所 | Planar micro inertial navigation system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20161228 Address after: 233000 Anhui city of Bengbu province and Economic Development Zone, Road No. 2016 Patentee after: Anhui Institute of Electronics Co., Ltd. Address before: High tech Zone Branch Road, Suzhou city of Jiangsu Province, No. 18 215000 Patentee before: Suzhou Wenzhixin Microsystem Technology Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150121 Termination date: 20191013 |