CN1968872A - Substrate container with fluid-sealing flow passageway - Google Patents
Substrate container with fluid-sealing flow passageway Download PDFInfo
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- CN1968872A CN1968872A CN 200580019675 CN200580019675A CN1968872A CN 1968872 A CN1968872 A CN 1968872A CN 200580019675 CN200580019675 CN 200580019675 CN 200580019675 A CN200580019675 A CN 200580019675A CN 1968872 A CN1968872 A CN 1968872A
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Abstract
A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.
Description
It is 60/563,528 that the application requires application number, and the applying date is on April 18th, 2004, and name is called the U.S. Provisional Application No. of " chip container with elastomeric filter/valve cage ".
Technical field
The present invention relates to substrate container.More particularly, the present invention relates to comprise the substrate container of fluid flowing path.
Background technology
Generally, carrier be used for before disc or the wafer process, among or afterwards, transportation and/or store silicon wafer or disk in batches.Wafer can be processed into integrated circuit, and disc can be machined for the magnetic storage disks of computing machine.Here, term " wafer ", " disc " or " substrate " can mutual alternative use, and unless otherwise noted, wherein arbitrary term can refer to semiconductor wafer, disk, planar substrates and other this type of substrate.
Usually comprise a plurality of steps when wafer disk is processed into surface-mounted integrated circuit, disc is processed at different machining locations therein, and stores between procedure of processing and transportation.Because the character that the fragile characteristic of disc and they are easily stained by particle or chemical, it is very important in this process it to be carried out suitable protection.Chip container promptly is used to provide the protection of this necessity.In addition, because the processing of disc is automation generally, so disc accurately need be located with respect to being used for Fabricating machinery mobile automatically and the insertion wafer.Second purpose of chip container is to firmly fix wafer disk in transportation.Term " chip container ", " carrier ", " box ", " carriage/storage case " and fellow thereof unless otherwise noted, here can mutual alternative use.
In the course of processing of semiconductor wafer or disk, the existence of particulate or generation can bring the very significant problem that stains.Staining is the maximum independent reason that causes the semi-conductor industry yield losses of generally acknowledging.Along with the size of integrated circuit continues to dwindle, the size that can stain the particle of integrated circuit also becomes littler, and this makes that to allow pollutants minimize more urgent.The pollutants of particle form can be produced by wearing and tearing, for example carrier and wafer or disc, and carrier lid or outer cover, and storage shelf, and other carrier or and Fabricating machinery between friction or scraping.In addition, particulate for example dust can enter outer cover by opening on lid and/or the outer cover or seam.Therefore, wafer carrier critical function is exactly that protection wafer wherein is away from this pollutants.
Container is arranged to a wafer or disc axial array usually in groove, supporting wafer or disc in groove, and by supporting wafer or disk near its neighboring or the neighboring.Wafer or disc can radially upwards or backward move from container routinely.Container can have a housing that bottom opening is arranged, a door that snaps on the bottom opening, and an interruption carrier that is contained on the door.The patent No. is 4,995,430 and 4,815,912 U.S. Patent Publication this known SMIF wafer case structure, these two patents are all had by the application's applicant, all are incorporated in this as a reference.In addition, wafer carrier assemblies can have front openings, and it has the door that can snap on the front openings, and this has been used as FOUPs or FOSBs is known, and be 6 in for example patent No., 354,601,5,788,082 and 6, be illustrated in 010,008 the US Patent, it is fully incorporated in this as a reference.In some structure, the lid of bottom or door, anterior door or container part have opening or path, are convenient to gas, and for example nitrogen or other clean gas import and/or discharge wafer carrier assemblies, may contain the surrounding air of pollutants with displacement.
Known containers utilization filter plug reduces the quantity that enters the concrete pollutants of container assemblies in the cleaning process.Yet, executive component, promptly traditional installation and sealing finished by the mode of rigid plastic shell or O shape ring between filter and the sealing member housing.The affiliated known chip container of technical field also utilizes various connections or connects machine-processed stream fluid with chip container and is switched to fluid supply part and pressure or vacuum source.This installation and sealing need baroque special component.
Summary of the invention
Improved wafer container according to an aspect of the present invention comprises the cover part with open side or bottom, is used for airtight open side or open bottom and forms outer cover or the door of container, and a plurality of wafer supporting framves that are contained in internal tank.Door connects to form continuous outer cover with cover part, and it is with wafer carrier or other substrate and ambient air isolation.This container has at least one gangway structure, forms the inflow of outer cover and flows out flow-catheter.A sealing grommet is positioned at gangway structure and its tight joint.The outside face of sealing grommet and the inside face of flow-catheter form generally sealing closely.In one embodiment, grommet forms stream, for example a cylindrical bore.In a related embodiment, grommet comprise one be convenient to the chip container internal volume be used for the mouth of pipe of fluid or vacuum source or the contact surface that water cock closely connects.The inner sealing surface of grommet can form stream.
Selectively, the stream by grommet comprises that at least one is contained in executive component wherein in fact or all.This executive component can be the internal volume of chip container to be connect or the interface is connected to exterior any member, sub-component or equipment.The example of executive component comprises valve, filter, sensor, stopper or its combination.Executive component and interior sealing surfaces tight joint.
According to an embodiment, during operation, grommet and gangway structure are kept sealing, prevent the inside that the chemical do not expected or particulate enter wafer container components.Therefore, the fluid of any chip container between inside and outside flows and is limited to pass the path that is formed by grommet.The type that fluid flows comprises that with purge gas for example nitrogen imports the inside of wafer carrier assemblies.
Fluid flows and can also be operated element and limit.For example, when executive component was particulate filter, gas also must pass through filter during by path.In another exemplary situation, executive component is a boiler check valve, also is limited in when fluid flows through path flowing on the specific direction.In one embodiment, the stream by grommet comprises filter and boiler check valve.In this embodiment, carry out the function of filtration and flow direction assignment simultaneously.In a further exemplary embodiment, executive component is stopper movably, in this case, does not allow the fluid path of flowing through when inserting stopper.
In a further exemplary embodiment, executive component comprises sensor.Available sensor type comprises temperature sensor, flow sensor, pressure sensor, gas concentration sensor, material detector and proximity sensor.Be used as in the sensor of executive component these and other, some (for example flow sensor) can allow circulation, and other (for example pressure sensor) also plays the effect of stopper.
During manufacturing, use gangway structure, sealing grommet and the executive component of unified size can realize modularization.Therefore, for the manufacturing line of a multiple chip container, wherein each chip container has the dedicated operations element, and the housing of wafer container components can have the unified outer cover component of limited amount, and its gangway structure is positioned on a plurality of points of whole general outer cover.Each gangway structure can have the sealing grommet, and wherein some is a shutoff type (nonpassage), and other gangway structure can have the sealing grommet with various integral type executive components.The sealing grommet can be pre-installed various executive components and install as the operating sleeve sub-component.
Advantage of preferred embodiment of the present invention and feature are that the structure of grommet provides a kind of elastic element that is as general as cylindrical structural, and it has the vestibule that therefrom passes extension, and self has cylindrical structural vestibule.Vestibule has enough length, all or in fact to hold the whole length of the operating parts that is inserted into wherein.Grommet preferably has at least one flat surfaces vertical with the guard aperture annulate shaft.Such surface can be used for effectively providing seat surface to the water cock or the mouth of pipe as a washing system part.On the volume, grommet is more preferably greater than the operating parts that is contained in wherein.Grommet preferably has a cross-sectional plane on axis plane, and thereon, the cross-sectional plane of grommet is greater than passing its also cross-sectional plane of axially extended opening.Grommet preferably has the length greater than the diameter that passes axially extended opening of grommet or vestibule.But with respect to the O shape ring that has circular cross section generally, the grommet here has non-circular cross sections and cylindrical form interior surface, cylindrical outer surface and smooth end surface.
Description of drawings
Figure 1A is the decomposition diagram that comprises the wafer container components of wafer carrier, bottom cover and cover part.
Figure 1B is the decomposition diagram of the wafer container components that comprises wafer carrier, side cover and cover part of another embodiment.
Fig. 2 is the upward view of the example of a bottom cover, and expression is positioned at the structure on the bottom cover bottom surface.
Fig. 3 is according to the grommet example of one embodiment of the invention and the scheme drawing of example operational element.
Fig. 4 is the decomposition diagram that is used for an example of the lid that comprises sealing grommet and operating parts of wafer container components or door.
Fig. 5 A-5B represents the framework of operation sub-assemblies example, and each operation sub-assemblies is furnished with a grommet and at least one executive component.
Fig. 5 C represents operation sub-assemblies is assembled to the example of flow-catheter.
Fig. 6 A and 6B are the section-drawing of gas purifier according to an embodiment of the invention.
The specific embodiment
Figure 1A represents a kind of example of wafer container components 100, and it comprises wafer rack 102, bottom 104 and cover part 106.Bottom 104 forms sealed connection with cover part 106, forms an inner space that wafer carrier 102 and surrounding air 108 can be isolated.As shown in Figure 1, wafer carrier 102 can comprise and a plurality ofly can and navigate to element 110 in the wafer carrier 102 with a plurality of silicon wafer supports.Generally, element 110 is supported also location silicon wafer, makes that the contact between adjacent chip minimizes, and can reduce in silicon wafer processing and/or the transportation damage to wafer like this.
Figure 1B represents that another kind is known as the structure of the wafer container components 103 of FOUP or FOSB, and it comprises open front 104, Qianmen 105 and cover part 107.Wafer W is by the open front parallel motion.The groove that inner side forms is supported wafer.Qianmen 105 and cover part 107 sealed engagement with sealing member form an inner space isolated with surrounding air.The structure of wafer carrier is 6,428,729 in the patent No. of for example Bart people such as (Bhatt) application, name is called in the US Patent of " composite base plate carrier " and illustrates, it is incorporated in this as a reference.In addition, wafer carrier assemblies with front openings, it is equipped with the door that can snap on the front openings, has been used as FOUPs or FOSBs is known, and be 6 in the application's the patent No. that the applicant held, 354,601,5,788,082 and 6, be illustrated in 010,008 the US Patent, it is fully incorporated in this as a reference.The reception structure 109 that is used for grommet 124,125 can be in the wall of cover part bottom.
With reference to Fig. 2, be the example of the part 120 of chip container.In a class embodiment, part 120 is the door of side cover, bottom or chip container.In another kind of embodiment, the wallboard part of part 120 for not moving, can not opening.Shown in part 120 comprise opening 122,123 forms the gangway structure, be arranged in grommet 124,125 and a plurality of status openings 126 of opening 122,123.Generally, a plurality of status openings 126 can be positioned on the desired location of lid part 120, are provided for sensor, and the structure of probe or other monitoring element for example is to be connected with the chip container interface.For example, the interface of sensor and concrete status openings 126 can provide relevant wafer process step and similar status information thereof.
In an exemplary embodiment, opening 122 is convenient to fluid and is transferred in the part 120, and this is convenient to gas or other fluid are imported the inside of chip container.Similarly, opening 123 can make fluid transfer to outside the chip container by part 120, is arranged in chip container gas inside or fluid like this and just can be discharged into surrounding air.Therefore, in the present embodiment, opening 122 is inlet, and opening 123 is outlet.Though Fig. 2 represents part 120 and comprise the embodiment of two openings 122,123, also be predictable yet have four, five, six or more a plurality of embodiment that is positioned at the gangway structure on the part 120, and also be in the scope of the present invention.
As shown in Figure 2, grommet 124 is positioned at opening 122 sealed opens 122, and grommet 125 is positioned at opening 123 sealed opens 123.As described below, grommet 124,125 forms sealing to the inside of its corresponding opening 122,123 separately, and at least one vestibule that passes grommet or path are provided.In one embodiment, the main body of grommet 124,125 has a shape of cross section corresponding to opening 122,123 internal features separately, and makes that size can seal and stop up and its corresponding opening 152,153 in fact.The person of ordinary skill in the field can recognize that the shape of opening 122,123 cross-sectional planes and size can be arranged by the size of required air-flow and the operating pressure of concrete wafer container components.(not shown) in an embodiment who is correlated with, grommet 124 comprises two tangible paths.
Fig. 3 represents an exemplary embodiment of grommet 124,125.Grommet 124,125 according to present embodiment has cylindrical generally main body 128.In a class embodiment, main body 128 is made up of rubber, silica gel or other elastic body or poly-mer with required sealing characteristics.Selectively, main body 128 comprises sealing member 130, its with the annular protrusion formal ring around cylindrical outer wall.Grommet 124,125 also comprises the vestibule 132 that passes main body 128 central authorities.The inside face that forms the main body 128 of vestibule 132 selectively comprises the sealing member (not shown), in order to be sealed to the executive component 134 that small part is positioned at vestibule 132.
In an exemplary embodiment, executive component 132 is valve, for example boiler check valve.In a further exemplary embodiment, executive component 132 is a fluid filter.In another embodiment, executive component 132 is a sensor, for example temperature sensor, flow sensor, pressure sensor, gas concentration sensor, material detector or proximity sensor.In another embodiment, executive component 132 is a stopper just, is used to prevent that fluid from passing through stream 204.
Fig. 4 represents the example of lid part 150.Lid part 150 comprises cover enclosure 170, catch member 172,174, cam 176 and external cap part 178.Cam 176 is connected to catch member 172,174, and like this, the rotation of cam 176 drives snap close 172,174, and it causes projection 180 to pass the opening 182 that is positioned on the housing 170 stretching out, and housing 170 is locked into (not shown) on another cover part.External cap 178 is installed on catch member 172,174 and the cam 176.Lid part 150 also comprises gangway structure 160,161.Gangway structure 160 comprises inlet 152 and flow-catheter 157.Gangway structure 161 comprises outlet 153 and flow-catheter 158.Flow-catheter 157 and 158 has a cylindrical generally wall separately, and its height that has extends through the thickness arrival inside of lid part 150 from the outside of chip container.
Flow-catheter 157 and 158 keeps operation sub-assemblies 162 and 163 respectively.Fig. 5 A and Fig. 5 B are elaborated to operation sub-assemblies 162 and 163.Operation sub-assemblies 162 comprises the grommet 154 with main body 202 and vestibule 205 for the inlet sub-component.Operation sub-assemblies 162 also comprises boiler check valve 211 and the filter 210 that is installed in the vestibule 204.The embodiment of filter 210 comprises the particulate filter of proper technology, and for example HEPA filters or the fellow.Operation sub-assemblies 163 is the outlet sub-component, and it comprises the grommet 155 with main body 203 and vestibule 205.Selectively, operation sub-assemblies 162,163 has been pre-installed with its constitutive requirements separately respectively and has been used as operating sleeve.
Fig. 5 C represents operation sub-assemblies 162 is assembled in the flow-catheter 157.Filter 210 remains on the position between grommet 154 bottoms and the flow-catheter 157 maintenance faces 164.Grommet 154 is contained in the fluid passage 157, and forms sealing with the inwall of fluid passage 157.Boiler check valve 211 installs in the stream 204 hermetically by grommet 154, and is arranged in fluid is flowed along direction downward shown in Fig. 5 C.
As mentioned above, lid part 150 or other cover part, for example the opening 152,153 on the part 120 of wafer container components can seal with grommet of the present invention.In one embodiment, grommet comprises having the main body that is positioned at the housing bore, and vestibule extends along the housing main shaft.In addition, the embodiment of grommet of the present invention can comprise the executive component that is positioned at vestibule.Executive component can comprise boiler check valve, and it can regulate air-flow or other fluid that passes vestibule, sensor or its combination.The used boiler check valve of the present invention can be in vestibule, and grommet can be used to seal the entrance and exit on wafer carrier door and/or the outer cover like this.In addition, as described below, the extra O shape that the design of grommet body can need not to install on the grommet is encircled the sealing that just can realize easily opening.And the embodiment of grommet of the present invention can be combined into grommet body, boiler check valve and/or filter in an integral type sleeve, and it can improve the integral sealing ability of grommet, and is convenient to make up more like a cork wafer carrier assemblies.In certain embodiments, grommet has about 1/8 inch to 1 inch axial height, and in further embodiments, grommet has about 3/8 inch to 3/4 inch axial height.In addition, the embodiment of grommet of the present invention can have about 1/4 to 1.5 inch diameter, and in further embodiments, grommet can have about 1/2 to 3/4 inch diameter.The person of ordinary skill in the field can recognize that axial height that grommet is other and diameter range are predictable, and is in the scope of the present invention.
Grommet can be distinguished with known O shape ring in several ways.For example, the structure of grommet provides a kind of elastic element, and its cylindrical generally structure has the vestibule that extends through it, and this vestibule self has cylindrical structural.Vestibule has enough length, all or in fact to hold the whole length of insertion operating parts wherein.Grommet preferably has a flat surfaces with guard aperture annulate shaft vertical arrangement at least.Such surface can be used for providing the actv. seat surface to the mouth of pipe or water cock as a washing system part.On the volume, grommet is more preferably greater than the operating parts that is contained in wherein.Grommet preferably has a cross-sectional plane on axis plane, and thereon, the cross-sectional plane of grommet is greater than passing its also cross-sectional plane of axially extended opening.Grommet preferably has the length greater than the diameter that passes axially extended opening of grommet or vestibule.But with respect to the O shape ring that has circular cross section generally, the grommet here has non-circular cross sections and cylindrical form interior surface, cylindrical outer surface and smooth end surface.
Fig. 6 A and Fig. 6 B represent the section-drawing of gas purifier according to an embodiment of the invention.Grommet 300 and 302 example lay respectively on the gangway structure 304 and 306 with example wafer container of inner 308 and outside 310.Gangway structure 304,306 is formed in the wall or door 312 of chip container, plays the function of cleaning port separately.Gangway structure 304 comprises maintenance structure 314, and it has the geometric configuration of being arranged to especially with grommet 300 sealed connections.Similarly, gangway structure 306 comprises and keeps structure 316, and it has is arranged to the geometric configuration that engages with grommet 302.Grommet 300 and 302 has different sealing member 318,320 separately, in order to form closed contact with the certain interior surfaces that keeps structure 314 and 316 respectively, as shown in the figure.
Fig. 6 A represents inlet device; And Fig. 6 B represents outlet device.In each device, flow direction is indicated.The inlet device of Fig. 6 A also comprises filter 322, its and fluid-tight at grommet 300 with keep between the contact surface of structure 314.The inlet device of Fig. 6 A also comprises check valve assembly 324, and it is positioned to make fluid only to flow to the flow direction that indicates.Similarly, the outlet device of Fig. 6 B comprises check valve assembly 326, and it is positioned to make fluid only to flow to the moving side of the flow direction that indicates.Valve module 324,326 difference fluid-tight are in the formed stream 328,330 by the vestibule of grommet 300,302.Grommet 300,302 has holding element 332,334, and it is used for valve module 324,326 is securely fixed in respectively the appropriate location of stream 328,330.In a class embodiment, check valve 324,326 comprises valve body 336 and 338, outside seal circle 340 and 342, inner seal rings 344 and 346, moveable piston 348 and 350 and biasing spring 352 and 354.
In the operation, the entrance and exit device can consistent acting on, the air that the air of existence or gas are newly imported in the chip container inside 308, gas or the displacement of other fluid therein in the cleaning behavior.In one embodiment, shown in Fig. 6 B, vacuum source 360 is attached to internal volume 308 by outlet pipe 362.Outlet pipe is arranged to be connected with contact surface 364 interfaces of grommet 302.When downward power is applied on the grommet 302 by outlet pipe, grommet 302 compression, but keep itself and the sealing of the outside face of sealing inside face that keeps structure 316 and valve module 326.In one embodiment, grommet 302 and keep structure 316 and valve module 326 between sealing in fact improve or make more effective by be applied to downward power on the grommet 302 by outlet pipe 362.
Because vacuum 360 is attached to internal volume 308, the fluid that has in the volume 308 is extracted chip container out by the outlet among Fig. 6 B, and displacement fluid comprises by filter 322 being drawn into by the inlet among Fig. 6 A simultaneously.(not shown) in a related embodiment, the replacement fluid source (not shown) connects by inlet pipe and internal volume 308, this inlet pipe has the geometric configuration similar to outlet pipe 362, and connects in the mode identical with outlet pipe 302 bind modes with outlet pipe 362 with inlet grommet 300.(not shown) does not have outlet pipe and grommet 302 to connect in another embodiment, and the inlet pipe carrying enters the compression displacement fluid of internal volume 308.In this embodiment, displacement fluid only exists by the outlet device among Fig. 6 B.
Generally, grommet 300,302 can have the shape of cross section identical with opening, and this opening is with grommet design sealing therein.For example, in one embodiment, grommet 300,302 is the columniform generally shape that has circular cross section generally.Yet the person of ordinary skill in the field can recognize that the various geometric configuratioies of grommet body are all in spiritual scope of the present invention.
In one embodiment, grommet 300 and 302 is same parts.In a related embodiment, valve module 324 and 326 is same parts.Therefore, in a class embodiment, member of the present invention can utilize identical composed component to be used for sealed entry and exit opening.
In another embodiment, grommet of the present invention can also comprise additional holding element (not shown), is used for to firmly fix filter with holding element 332,334 hold-off valve assemblies 324,326 same or analogous modes, and for example filter 322.Therefore, the pre-assembled operational sub-component can be combined into grommet, valve and filter an integral type sub-component.
Grommet body of the present invention, flange and other grommet member can be made up of any material that is suitable for the semiconductor machining application, comprise poly-mer and elastic body.In certain embodiments, grommet body and flange can be made up of viton.The example of viton by DuPont Dow Elastomers elastic body (DupontDow Elastomers) with trade name Viton
Sell.In addition, in certain embodiments, elastomeric grommet body or grommet can have fluoropolymer or other inert polymer that is coated in the grommet surface, in order to the internal insulation with elastic material and substrate container.Generally, poly-mer or fluoropolymer layer should have certain toughness, can keep the sealing characteristics of elastomeric grommet like this.
The foregoing description is to be used for explanation, but not be used to limit.Additional embodiment within the scope of the claims.Though the present invention with reference to the specific embodiment explanation as above, the person of ordinary skill in the field should be realized that, under the situation that does not break away from the spirit and scope of the present invention, can make in form and substantial change.
Claims (27)
1. a substrate container is characterized in that comprising: have the cover part of open side or bottom, be used for the door of airtight open side or bottom; One of door or container part comprise the first gangway structure that is formed on the outer cover, it provides and passes outer cover arrival substrate container in-to-in stream socket, wherein, this gangway structure comprises the opening that leads to external container from internal tank, and wherein this gangway structure has cylindrical form interior surface; And
First elastomeric grommet, it has cylindrical outer surface, forms with the cylindrical form interior surface of gangway structure to engage.
2. substrate container according to claim 1, it is characterized in that also comprising the second gangway structure that is formed on the outer cover, provide and pass outer cover arrival substrate container in-to-in stream socket, wherein, this gangway structure comprises the opening that leads to external container from internal tank, and wherein this gangway structure has cylindrical form interior surface; But also comprising second elastomeric grommet, it has cylindrical outer surface, forms with the cylindrical form interior surface of the second gangway structure to engage.
3. substrate container according to claim 2, it is characterized in that each grommet has an axle, and wherein each gangway structure also comprises the wall that is positioned on the guard aperture annulate shaft transversal surface separately, and each wall has exposed surface, and each wall has a plurality of flow-catheters that pass it.
4. substrate container according to claim 3 is characterized in that structural each wall in each gangway keeps grommet at least in part.
5. substrate container according to claim 1 it is characterized in that grommet has the vestibule that passes its extension, and this vestibule holds executive component.
6. substrate container according to claim 5 is characterized in that executive component comprises valve.
7. substrate container according to claim 1 is characterized in that grommet has the flat end surface, and executive component and contacts with it between described flat end surface and gangway structure.
8. substrate container according to claim 7 is characterized in that executive component comprises filter.
9. substrate container according to claim 5 is characterized in that executive component comprises sensor.
10. substrate container according to claim 5 is characterized in that grommet has a pair of end surface, and executive component is positioned in fact in the middle of two end surface.
11. substrate container according to claim 10 is characterized in that executive component is a boiler check valve, wherein filter is limited in the appropriate location by described grommet.
12. substrate container according to claim 5, it is characterized in that grommet have be used for clean that circuit engages expose the flat end surface.
13. substrate container according to claim 1, it is characterized in that grommet comprises exposes contact surface, and it is convenient to being tightly linked between substrate container internal volume and the external washing system.
14. substrate container according to claim 1 is characterized in that grommet comprises main body, it has at least one and is convenient to and external washing spare leak free feature.
15. a substrate container is characterized in that comprising:
Clean port;
Elastomeric grommet is positioned at hermetically and cleans port, comprises vestibule; And
Control member is positioned at vestibule with assisting in substantially sealing.
16. a substrate container is characterized in that comprising:
Cover part; And
The lid part, it is arranged to set up tight joint with cover part, and forms internal volume.
Wherein at least one lid partial sum cover part has at least one gangway structure, and it comprises in fluid intake, fluid egress point and the fluid outlet at least one;
Wherein at least one gangway structure keeps grommet to be communicated with its sealing; And
Wherein grommet comprises stream, and it keeps at least one executive component to be communicated with its sealing.
17. substrate container according to claim 16 is characterized in that lid partly has a plurality of gangways structure.
18. substrate container according to claim 16 is characterized in that at least one gangway structure comprises flow-catheter, it has the inside face that is communicated with the grommet sealing.
19. substrate container according to claim 16 is characterized in that at least one executive component comprises boiler check valve.
20. substrate container according to claim 16 is characterized in that at least one executive component comprises filter.
21. substrate container according to claim 16 is characterized in that grommet is arranged for ease of sealed engagement between vacuum/fluid source and the substrate container internal volume.
22. substrate container according to claim 16 is characterized in that grommet comprises the mouth of pipe interface of outside exposed surface.
23. an operation sub-assemblies that is used for substrate container is characterized in that comprising:
Grommet has (a) outside face, is arranged to keep tight seal with the adjacent match surface of substrate container, and (b) vestibule, have the inside face of being arranged to keep tight seal with adjacent match surface; And
Be positioned at first operating parts of vestibule, have outside face with vestibule inside face coupling.
24. operation sub-assemblies according to claim 23 is characterized in that first executive component is a valve.
25. operation sub-assemblies according to claim 23 is characterized in that also comprising:
Filter by the grommet maintenance.
26. the method for a cleaning substrate container, this chip container has the grommet that is exposed on the exterior chip container, it is characterized in that this method comprises grommet is connected with the irrigation source interface, and the step of purge gas being injected chip container.
27. one kind will be cleaned the method that boiler check valve is fastened to chip container, it is characterized in that this method comprises boiler check valve is inserted vestibule in the grommet and the reception structure of grommet being inserted chip container.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US56352804P | 2004-04-18 | 2004-04-18 | |
| US60/563,528 | 2004-04-18 | ||
| US11/108,619 | 2005-04-17 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910148668XA Division CN101683650B (en) | 2004-04-18 | 2005-04-18 | Method for cleaning substrate container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1968872A true CN1968872A (en) | 2007-05-23 |
| CN100560443C CN100560443C (en) | 2009-11-18 |
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ID=38077099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200580019675XA Active CN100560443C (en) | 2004-04-18 | 2005-04-18 | Substrate container with fluid-sealing flow passageway |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN100560443C (en) |
| TW (1) | TWI423451B (en) |
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| CN101981684B (en) * | 2008-01-13 | 2013-01-30 | 诚实公司 | Methods and apparatuses for large diameter wafer handling |
| CN104973349A (en) * | 2014-04-03 | 2015-10-14 | 四川虹视显示技术有限公司 | Glass substrate storage device |
| CN109230317A (en) * | 2018-09-25 | 2019-01-18 | 刘林琴 | A kind of transhipment cabin for semiconductor substrate storage transport |
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| JP5888288B2 (en) * | 2013-06-26 | 2016-03-16 | 株式会社ダイフク | Inspection equipment for goods storage facilities |
| TWI698608B (en) * | 2018-01-11 | 2020-07-11 | 家登精密工業股份有限公司 | Quick release purge valve and substrate container using same |
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| US5363276A (en) * | 1993-09-01 | 1994-11-08 | Ncr Corporation | Apparatus for containing and supporting electronic components |
| US6187182B1 (en) * | 1998-07-31 | 2001-02-13 | Semifab Incorporated | Filter cartridge assembly for a gas purging system |
| TW511650U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Ventilator device for cleaning container |
-
2005
- 2005-04-18 CN CNB200580019675XA patent/CN100560443C/en active Active
- 2005-04-18 TW TW94112228A patent/TWI423451B/en active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101981684B (en) * | 2008-01-13 | 2013-01-30 | 诚实公司 | Methods and apparatuses for large diameter wafer handling |
| CN104973349A (en) * | 2014-04-03 | 2015-10-14 | 四川虹视显示技术有限公司 | Glass substrate storage device |
| CN109230317A (en) * | 2018-09-25 | 2019-01-18 | 刘林琴 | A kind of transhipment cabin for semiconductor substrate storage transport |
| CN109230317B (en) * | 2018-09-25 | 2020-12-25 | 义柏科技（深圳）有限公司 | A transport cabin for semiconductor substrate storage transportation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100560443C (en) | 2009-11-18 |
| TW200605372A (en) | 2006-02-01 |
| TWI423451B (en) | 2014-01-11 |
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