CN1587946A - Optical fiber vibrative sensor based on optical fiber raster - Google Patents
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Abstract
一种基于光纤光栅的光纤微振动传感器，利用悬浮布拉格光纤光栅与被测物的共振对被测物的振动幅度进行放大，可进行光的波长型调制或强度型调制测量，2×2耦合器一端的两个接口分别接宽带光源、光谱分析仪或光功率计，另外一端的两个接口分别接匹配液和传输光纤，传输光纤穿过连接器进入绝缘圆筒，并通过连接头固定在绝缘圆筒的中心位置，传输光纤在绝缘圆筒内的一端刻有用于共振用的悬浮布拉格光纤光栅；对于采用光谱分析仪进行波长型调制测量的结构中，在连接器进口处的一段传输光纤刻有用于标定振动平衡位置反射光中心波长的定标布拉格光纤光栅。本发明解决了光纤光栅交叉敏感的问题，能在强电磁场、高电压环境下进行大型仪器微振动的测量。
A fiber optic micro-vibration sensor based on fiber Bragg grating, which uses the resonance between the suspended fiber Bragg grating and the measured object to amplify the vibration amplitude of the measured object, and can perform wavelength modulation or intensity modulation measurement of light, 2×2 coupler The two interfaces at one end are respectively connected to a broadband light source, spectrum analyzer or optical power meter, and the two interfaces at the other end are respectively connected to matching liquid and transmission optical fiber. The transmission optical fiber passes through the connector and enters the insulating cylinder, and is fixed on the insulating At the center of the cylinder, one end of the transmission fiber in the insulating cylinder is engraved with a suspended fiber Bragg grating for resonance; for a structure that uses a spectrum analyzer for wavelength modulation measurement, a section of the transmission fiber at the entrance of the connector is engraved There is a calibrated fiber Bragg grating used to calibrate the central wavelength of the reflected light at the vibration equilibrium position. The invention solves the problem of the cross-sensitivity of the fiber grating, and can measure the micro-vibration of large instruments under the environment of strong electromagnetic field and high voltage.
Description
技术领域technical field
本发明涉及一种基于光纤光栅的光纤微振动传感器，主要用于测量被测物的微振动位移以及微振动速度，属于光电子测试类领域。The invention relates to an optical fiber micro-vibration sensor based on a fiber grating, which is mainly used for measuring the micro-vibration displacement and micro-vibration velocity of a measured object, and belongs to the field of optoelectronic testing.
背景技术Background technique
大型仪器在工作时会有微小振动，正常情况下这个振动的振幅不会超过一定的范围，而当仪器异常工作时，振动也会异常。很多情况下人们希望能够了解这一振动的具体大小，以便获得异常振动的临界值，采取措施排除仪器、飞行或运转等设备发生重大事故。Large instruments will vibrate slightly when they are working. Under normal circumstances, the amplitude of this vibration will not exceed a certain range. When the instrument works abnormally, the vibration will also be abnormal. In many cases, people hope to know the specific size of this vibration, so as to obtain the critical value of abnormal vibration, and take measures to rule out major accidents of equipment such as instruments, flight or operation.
有很多场合要求微振动的测量传感探头不能带电，能在电磁干扰的环境下工作，有一些要求必须是在线检测，也就是在实际需要的环境下对测量方法提出新的要求。而光纤振动传感器由于光纤本身具有抗电磁、抗辐照的特性能够在电磁干扰的环境下工作，这是电振动传感器无法比拟的。In many occasions, it is required that the micro-vibration measurement sensor probe cannot be charged and can work in the environment of electromagnetic interference. Some requirements must be online detection, that is, new requirements are put forward for the measurement method in the actual environment. The optical fiber vibration sensor can work in the environment of electromagnetic interference due to the anti-electromagnetic and anti-radiation characteristics of the optical fiber itself, which is incomparable to the electric vibration sensor.
专利号为94202968.2的中国专利“无源非金属光纤振动传感头”，采用如下的测振方法：光纤振动传感头有三根光纤，一根是入射光纤，另外两根是出射光纤，三根光纤与自聚焦透镜相连。当传感头不振动时，光通过自聚焦透镜射到带有弹簧片的反射镜上，光返回再次通过自聚焦透镜等同的分布在两根出射光纤上，此时，两根出射光纤的输出功率是一样的；当传感头振动时，反射镜也会随着振动，这样反射光分布在两根出射光纤上的光功率就会有差异，由此可以测量待测部件的振动位移。这种光纤振动传感头看似简单，但存在明显的缺陷，并不是每个振动位置都能保证反射光通过出射光纤输出，而且灵敏度不高。The Chinese patent No. 94202968.2 "Passive non-metallic fiber optic vibration sensing head" adopts the following vibration measurement method: the fiber optic vibration sensing head has three optical fibers, one is incident optical fiber, the other two are outgoing optical fibers, and three optical fibers Connected with self-focusing lens. When the sensor head does not vibrate, the light is projected onto the reflector with the spring leaf through the self-focusing lens, and the light returns to the two outgoing fibers equally through the self-focusing lens. At this time, the output of the two outgoing fibers The power is the same; when the sensor head vibrates, the reflector will also vibrate, so that the optical power of the reflected light distributed on the two outgoing fibers will be different, so the vibration displacement of the component under test can be measured. This optical fiber vibration sensing head seems simple, but it has obvious defects. Not every vibration position can ensure that the reflected light is output through the output fiber, and the sensitivity is not high.
专利号为01112717.1的中国专利“光纤共振测微振动的方法”，利用悬浮光纤与待测部件的共振对其振动幅度进行放大，由放在光纤振动端前部的摄像头CCD(Charge Coupled Device)把光纤振动情况拍摄下来，然后CCD通过图像采集卡传输到计算机或终端进行处理以及显示。这种做法分辨率很高，而且具有实时在线检测功能，但缺点就是没法测定共振频率，只能在事先知道共振频率的前提下进行测量，而且测量时共振频率稍微有一点偏差，就会影响该传感器的精度。Patent No. 01112717.1 of the Chinese patent "Fiber Resonance Microvibration Measurement Method", uses the resonance of the suspended optical fiber and the component to be tested to amplify its vibration amplitude, and the camera CCD (Charge Coupled Device) placed in front of the optical fiber vibration end The optical fiber vibration is captured, and then the CCD transmits it to a computer or terminal through an image acquisition card for processing and display. This method has a high resolution and has the function of real-time online detection, but the disadvantage is that it is impossible to measure the resonance frequency. It can only be measured under the premise of knowing the resonance frequency in advance, and a slight deviation of the resonance frequency during measurement will affect the the accuracy of the sensor.
发明内容Contents of the invention
本发明的目的在于针对现有技术的不足，提出一种基于光纤光栅的光纤微振动传感器，即改善原有振动传感器的性能，又使制作工艺变得相对简单。The object of the present invention is to address the deficiencies of the prior art, and propose a fiber optic micro-vibration sensor based on a fiber grating, which not only improves the performance of the original vibration sensor, but also makes the manufacturing process relatively simple.
为实现这样的目的，本发明利用传感探头光纤光栅与被测物的共振对被测物的振动幅度进行放大，通过测量光纤光栅反射光的光功率或波长，来精确测量被测物的振动幅度以及振动速度。光纤光栅共振时，光纤光栅的固有频率与光纤光栅振动长度的平方成反比、与光纤光栅半径成反比，这是根据共振频率制作匹配光纤光栅的主要理论依据。To achieve such a purpose, the present invention utilizes the resonance between the sensor probe fiber grating and the measured object to amplify the vibration amplitude of the measured object, and accurately measures the vibration of the measured object by measuring the optical power or wavelength of the reflected light of the fiber grating amplitude and vibration velocity. When the fiber grating resonates, the natural frequency of the fiber grating is inversely proportional to the square of the vibration length of the fiber grating and is inversely proportional to the radius of the fiber grating. This is the main theoretical basis for making a matching fiber grating according to the resonance frequency.
本发明的光纤微振动传感器包括悬浮布拉格光纤光栅，绝缘圆筒，定标布拉格光纤光栅，连接器，连接头，匹配液，宽带光源，2×2耦合器，光谱分析仪或光功率计以及传输光纤等。2×2耦合器其中一端的一个接口用光纤接宽带光源，另一个接口用光纤接光谱分析仪，另外一端的两个接口用光纤分别接匹配液和传输光纤。The optical fiber micro-vibration sensor of the present invention includes a suspended fiber Bragg grating, an insulating cylinder, a calibration fiber Bragg grating, a connector, a connecting head, a matching liquid, a broadband light source, a 2×2 coupler, a spectrum analyzer or an optical power meter and a transmission fiber optic etc. One interface at one end of the 2×2 coupler is connected to a broadband light source with an optical fiber, the other interface is connected to a spectrum analyzer with an optical fiber, and the two interfaces at the other end are respectively connected to a matching liquid and a transmission optical fiber with an optical fiber.
中空的绝缘圆筒的一端用螺纹连接连接器，传输光纤穿过连接器进入绝缘圆筒，并通过连接头固定在绝缘圆筒的中心位置，传输光纤在绝缘圆筒内的一端刻有用于共振用的悬浮布拉格光纤光栅，悬浮布拉格光纤光栅与连接头的相交处用胶水固接，附有外螺纹的连接头旋进附有内螺纹的连接器中，附有外螺纹的连接器旋进绝缘圆筒一端的内螺纹中。连接器进口处的一段传输光纤刻有用于标定振动平衡位置反射光中心波长的定标布拉格光纤光栅。One end of the hollow insulating cylinder is screwed to the connector, the transmission fiber enters the insulating cylinder through the connector, and is fixed in the center of the insulating cylinder through the connector, and the end of the transmission fiber in the insulating cylinder is engraved for resonance Suspended fiber Bragg grating used, the intersection of the suspended fiber Bragg grating and the connector is fixed with glue, the connector with external thread is screwed into the connector with internal thread, and the connector with external thread is screwed into the insulation In the internal thread at one end of the cylinder. A section of transmission fiber at the entrance of the connector is engraved with a calibration fiber Bragg grating used to calibrate the central wavelength of the reflected light at the vibration equilibrium position.
悬浮布拉格光纤光栅的长度太短会导致振动幅度比较小，影响传感器的精度；而长度太长会导致光纤光栅本身的重力使悬浮光纤光栅弯曲过大，影响共振频率的测定，所以长度一般取20-80mm。悬浮布拉格光纤光栅的直径过小会导致传输光的功率太小而没法检测；而直径过大会导致振动幅度过小，使得传感器的分辨率和灵敏度降低，所以直径一般取0.1-0.8mm。刻在传输光纤上的两段光纤光栅，一段是在传输光纤端部的悬浮布拉格光纤光栅，另一段是在传输光纤中部位置的定标布拉格光纤光栅，这两段光纤光栅的反射光中心波长相同。If the length of the suspended fiber Bragg grating is too short, the vibration amplitude will be relatively small, which will affect the accuracy of the sensor; if the length is too long, the gravity of the fiber Bragg grating itself will cause the suspended fiber Bragg grating to bend too much, which will affect the determination of the resonance frequency, so the length is generally taken as 20 -80mm. If the diameter of the suspended fiber Bragg grating is too small, the power of the transmitted light will be too small to be detected; if the diameter is too large, the vibration amplitude will be too small, which will reduce the resolution and sensitivity of the sensor, so the diameter is generally 0.1-0.8mm. Two sections of fiber gratings engraved on the transmission fiber, one is the suspended fiber Bragg grating at the end of the transmission fiber, the other is the calibration fiber Bragg grating in the middle of the transmission fiber, the central wavelength of the reflected light of the two sections of fiber grating is the same .
若将本发明的2×2耦合器中连接光谱分析仪的接口改接光功率计，而连接器进口处的一段传输光纤不再刻有用于标定振动平衡位置反射光中心波长的定标布拉格光纤光栅，则可以构成本发明的另一种结构形式。If the interface connected to the spectrum analyzer in the 2 × 2 coupler of the present invention is changed to an optical power meter, and a section of transmission fiber at the entrance of the connector is no longer engraved with a calibration Bragg fiber used to calibrate the central wavelength of the reflected light at the vibration equilibrium position The grating can constitute another structural form of the present invention.
利用本发明这两种结构进行光纤微振动测量可以采用两种形式：Using these two structures of the present invention to carry out optical fiber micro-vibration measurement can adopt two forms:
第一种结构基于布拉格光纤光栅反射光中心波长的相对漂移与布拉格光纤光栅的振动幅度成正比，把振动幅度转换为光波长的相对漂移量，接收终端用光谱分析仪来检测，同时检测反射光中心波长变化周期可测得待测部件的振动频率，进而可以获得到待测部件的振动速度。将实验调试好的传感器固定在带有固定振动频率的待测部件上，工作时，入射光经耦合器到悬浮布拉格光纤光栅上，由于悬浮布拉格光纤光栅的本身特性，一部分具有一定波长的光会被反射，而且悬浮布拉格光纤光栅振动时，反射光的中心波长会随着振幅的变化而变化，最后光谱分析仪对经耦合器的反射光进行检测、显示和输出。The first structure is based on the fact that the relative shift of the central wavelength of the fiber Bragg grating reflected light is proportional to the vibration amplitude of the fiber Bragg grating, and the vibration amplitude is converted into the relative shift of the light wavelength. The receiving terminal uses a spectrum analyzer to detect and detect the reflected light at the same time The change period of the center wavelength can measure the vibration frequency of the component to be tested, and then the vibration velocity of the component to be tested can be obtained. Fix the experimentally debugged sensor on the component to be tested with a fixed vibration frequency. When working, the incident light passes through the coupler to the suspended fiber Bragg grating. Due to the characteristics of the suspended fiber Bragg grating, some light with a certain wavelength will When it is reflected and the suspended fiber Bragg grating vibrates, the center wavelength of the reflected light will change with the amplitude. Finally, the spectrum analyzer detects, displays and outputs the reflected light through the coupler.
相对第一种结构，第二种结构少了定标布拉格光纤光栅，通过检测周期内振动幅度最大状态的反射光功率P1和平衡状态的反射光功率P2，他们两者的比值P1/P2与振动幅度成一定的正比关系，同时检测反射光功率P1与P2的时间间隔正是待测部件振动的1/4周期，通过幅度与时间的比值即可得到振动速度。工作状态与第一种差不多，只不过终端用光功率计进行处理，也可以把光信号光通过光电转换变成电压，然后通过单片机或计算机进行电信号检测、处理、显示和输出。Compared with the first structure, the second structure lacks the calibration of fiber Bragg gratings. By detecting the reflected optical power P 1 of the maximum vibration amplitude state and the reflected optical power P 2 of the equilibrium state in the period, the ratio of the two is P 1 / P 2 has a certain proportional relationship with the vibration amplitude, and the time interval between detecting the reflected light power P 1 and P 2 is exactly 1/4 cycle of the vibration of the component under test, and the vibration speed can be obtained by the ratio of the amplitude to the time. The working state is similar to the first one, except that the terminal is processed by an optical power meter, and the optical signal light can also be converted into a voltage through photoelectric conversion, and then the electrical signal is detected, processed, displayed and output through a single-chip microcomputer or computer.
本发明的悬浮布拉格光纤光栅既可以是一端固定、另一端自由的梁振动，也可以是两端都固定的梁振动。The suspended fiber Bragg grating of the present invention can be a beam vibrating with one end fixed and the other free, or a beam with both ends fixed.
本发明利用悬浮布拉格光纤光栅与被测物的共振对被测物的振动幅度进行放大，放大倍数在100倍左右，灵敏度可以达到0.01mm，不仅能在共振状态下进行检测，而且还能在共振状态附近进行检测。本发明解决了光纤光栅交叉敏感的问题，解决了在强电磁场、高电压环境下大型仪器微振动的测量问题，而且还可以测量工作环境的温度。本发明能够同时测量待测部件的振动位移和振动速度等信息，利用光功率计或光谱分析仪、单片机或电脑设备输出显示，从而可以进行实时在线监控；能够测量在一段振动频率范围内的振动幅度；制作简单、成本费用比较低、适合批量生产。The invention utilizes the resonance between the suspended fiber Bragg grating and the measured object to amplify the vibration amplitude of the measured object, the magnification is about 100 times, and the sensitivity can reach 0.01mm. Detection near the state. The invention solves the problem of fiber grating cross sensitivity, solves the problem of measuring micro-vibration of large instruments under strong electromagnetic field and high voltage environment, and can also measure the temperature of the working environment. The invention can simultaneously measure information such as vibration displacement and vibration speed of the component to be tested, and output and display it by using an optical power meter or a spectrum analyzer, a single-chip microcomputer or a computer device, so that real-time online monitoring can be performed; vibration within a range of vibration frequencies can be measured Range; simple to make, relatively low cost, suitable for mass production.
附图说明Description of drawings
图1为本发明基于光纤光栅的光纤微振动传感器的结构示意图。FIG. 1 is a schematic structural view of the fiber grating-based fiber micro-vibration sensor of the present invention.
图1中：1—悬浮布拉格光纤光栅，2—绝缘圆筒，3—定标布拉格光纤光栅，4—连接器，5—连接头，6—匹配液，7—宽带光源，8—光谱分析仪，9-2×2耦合器。In Figure 1: 1—suspension fiber Bragg grating, 2—insulating cylinder, 3—calibration fiber Bragg grating, 4—connector, 5—connector, 6—matching liquid, 7—broadband light source, 8—spectral analyzer , 9-2×2 coupler.
图2为本发明基于光纤光栅的光纤微振动传感器的另一种结构示意图。FIG. 2 is another structural schematic diagram of the fiber grating-based fiber micro-vibration sensor of the present invention.
图2中：10—光功率计。In Fig. 2: 10—optical power meter.
具体实施方式Detailed ways
以下结合附图对本发明的技术方案作进一步描述。The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.
本发明光纤微振动传感器的一种结构如图1，包括悬浮布拉格光纤光栅1，绝缘圆筒2，定标布拉格光纤光栅3，连接器4，连接头5，匹配液6，宽带光源7，2×2耦合器9，光谱分析仪8以及传输光纤等。本发明的连接方式：2×2耦合器9的A1端口与宽带光源7相连，A2端口与光谱分析仪8相连，B1端口与匹配液6相连，B2端口与传输光纤相连。A structure of the optical fiber micro-vibration sensor of the present invention is shown in Figure 1, including a suspended fiber Bragg grating 1, an insulating cylinder 2, a calibration fiber Bragg grating 3, a
中空的绝缘圆筒2的一端用螺纹连接连接器4，传输光纤穿过连接器4进入绝缘圆筒2，并通过连接头5固定在绝缘圆筒2的中心位置，传输光纤在绝缘圆筒2内的一端刻有用于共振用的悬浮布拉格光纤光栅1，悬浮布拉格光纤光栅1与连接头5的相交处用胶水固接，附有外螺纹的连接头5旋进附有内螺纹的连接器4中，附有外螺纹的连接器4旋进绝缘圆筒2一端的内螺纹中。连接器4进口处的一段传输光纤刻有用于标定振动平衡位置反射光中心波长的定标布拉格光纤光栅3。One end of the hollow insulating cylinder 2 is screwed to the
本发明的另一种结构如图2所示，其中，与图1所示结构的区别在于，2×2耦合器9中的A2端口不是连接光谱分析仪8，而是与光功率计10相连，连接器4进口处的传输光纤也没有刻有定标布拉格光纤光栅3。Another structure of the present invention is shown in Figure 2, wherein, the difference with the structure shown in Figure 1 is that the A2 port in the 2*2 coupler 9 is not connected to the
利用本发明进行光纤微振动测量可以采用两种形式：Two forms can be adopted for optical fiber micro-vibration measurement by using the present invention:
本发明图1所示结构的调制方式属于光的波长型调制。这种结构的测量原理是基于悬浮布拉格光纤光栅1反射光中心波长的相对漂移与悬浮布拉格光纤光栅1的振动幅度成正比，把振动幅度转换为光波长的相对漂移量，接收终端用光谱分析仪8来检测，同时检测悬浮布拉格光纤光栅1反射光中心波长变化周期可测得待测部件的振动频率，进而可以获得待测部件的振动速度。将实验调试好的传感器固定在带有固定振动频率的待测部件上，工作时，入射光从宽带光源7经2×2耦合器9及定标布拉格光纤光栅3到悬浮布拉格光纤光栅1上，由于光纤光栅的本身特性，一部分具有一定波长的光会被反射，而且悬浮布拉格光纤光栅1发生振动时，反射光的中心波长会随着振幅的变化而变化，最后经定标布拉格光纤光栅3及2×2耦合器9的反射光被光谱分析仪8检测，通过测量悬浮布拉格光纤光栅1与定标布拉格光纤光栅3反射光中心波长的差进行标定、显示和输出。当工作环境温度变化时，悬浮布拉格光纤光栅1与定标布拉格光纤光栅3之间的反射光中心波长同时改变，两者改变量之差为零，所以温度变化对光谱分析仪8的测量没有影响，反而可以利用此性质来测量传感器的工作环境温度。The modulation mode of the structure shown in FIG. 1 of the present invention belongs to the wavelength type modulation of light. The measurement principle of this structure is based on the fact that the relative drift of the central wavelength of the reflected light of the suspended fiber Bragg grating 1 is proportional to the vibration amplitude of the suspended fiber Bragg grating 1, and the vibration amplitude is converted into the relative drift of the light wavelength. The receiving terminal uses a
本发明图2所示结构的调制方式属于光的强度型调制。这种结构的测量原理是通过检测周期内振动幅度最大状态的反射光功率P1和平衡状态的反射光功率P2，他们两者的比值P1/P2与振动幅度成一定的正比关系，同时检测反射光功率P1与P2的时间间隔正是待测部件振动的1/4周期，通过幅度与时间的比值即可得到振动速度。工作状态与波长型调制方式差不多，只不过终端用光功率计10进行检测、显示和输出。当工作环境温度变化时，悬浮布拉格光纤光栅1的反射光中心波长虽然改变，但因为宽带光源7在一段波长上发射的光功率比较均匀，所以反射光中心波长的改变对反射光的光功率影响不大。The modulation mode of the structure shown in FIG. 2 of the present invention belongs to the intensity type modulation of light. The measurement principle of this structure is to detect the reflected light power P 1 of the maximum vibration amplitude state and the reflected light power P 2 of the equilibrium state in the period. The ratio P 1 /P 2 of the two is proportional to the vibration amplitude. At the same time, the time interval for detecting the reflected optical power P1 and P2 is exactly the 1/4 cycle of the vibration of the component under test, and the vibration velocity can be obtained by the ratio of the amplitude to the time. The working state is similar to that of the wavelength-based modulation method, except that the terminal uses the optical power meter 10 for detection, display and output. When the temperature of the working environment changes, although the central wavelength of the reflected light of the suspended fiber Bragg grating 1 changes, but because the optical power emitted by the
本发明中作为传感探头的的悬浮布拉格光纤光栅1既可以是一端固定、另一端自由的梁振动，也可以是两端都固定的梁振动。The suspended fiber Bragg grating 1 used as a sensor probe in the present invention can be a beam vibrating with one end fixed and the other free, or a beam with both ends fixed.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100587415C (en) * | 2007-04-11 | 2010-02-03 | 中国科学院半导体研究所 | A piston fiber grating hydrophone |
| CN102426198A (en) * | 2011-08-19 | 2012-04-25 | 北京航空航天大学 | Acoustic emission signal sensing system based on matching type fiber Bragg grating |
| CN102645237A (en) * | 2012-05-03 | 2012-08-22 | 浙江大学 | Method and device for manufacturing low-loss micro-nanometer fiber bragg grating sensor in chemical corrosion method |
| CN103217632A (en) * | 2013-02-27 | 2013-07-24 | 上海大学 | Point contact type optical fiber ultrasonic sensor |
| CN105277269A (en) * | 2014-07-22 | 2016-01-27 | 中国石油化工股份有限公司 | Phase shift fiber grating probe and manufacture method thereof |
| CN105628172A (en) * | 2015-11-10 | 2016-06-01 | 华北电力大学（保定） | Novel fiber grating vibration acceleration sensor |
| CN109281631A (en) * | 2018-11-09 | 2019-01-29 | 美钻深海能源科技研发（上海）有限公司 | Vibration automatic safety shut-in system for underwater equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100587415C (en) * | 2007-04-11 | 2010-02-03 | 中国科学院半导体研究所 | A piston fiber grating hydrophone |
| CN102426198A (en) * | 2011-08-19 | 2012-04-25 | 北京航空航天大学 | Acoustic emission signal sensing system based on matching type fiber Bragg grating |
| CN102426198B (en) * | 2011-08-19 | 2014-05-07 | 北京航空航天大学 | Acoustic emission signal sensing system based on matching-type fiber Bragg grating (FBG) |
| CN102645237A (en) * | 2012-05-03 | 2012-08-22 | 浙江大学 | Method and device for manufacturing low-loss micro-nanometer fiber bragg grating sensor in chemical corrosion method |
| CN103217632A (en) * | 2013-02-27 | 2013-07-24 | 上海大学 | Point contact type optical fiber ultrasonic sensor |
| CN105277269A (en) * | 2014-07-22 | 2016-01-27 | 中国石油化工股份有限公司 | Phase shift fiber grating probe and manufacture method thereof |
| CN105628172A (en) * | 2015-11-10 | 2016-06-01 | 华北电力大学（保定） | Novel fiber grating vibration acceleration sensor |
| CN109281631A (en) * | 2018-11-09 | 2019-01-29 | 美钻深海能源科技研发（上海）有限公司 | Vibration automatic safety shut-in system for underwater equipment |
| CN109520610A (en) * | 2018-12-27 | 2019-03-26 | 国网宁夏电力有限公司电力科学研究院 | A kind of adjustable optical fiber raster vibration sensor of frequency |
| CN111397723A (en) * | 2020-04-27 | 2020-07-10 | 山东省科学院激光研究所 | Three-component optical fiber laser micro-vibration sensor with combined structure and application thereof |
| CN113029482A (en) * | 2021-02-25 | 2021-06-25 | 江西师范大学 | Method and device for detecting tightness of bolt |
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