CN113934113A

CN113934113A - Exposure machine based on CCD (Charge coupled device) alignment system

Info

Publication number: CN113934113A
Application number: CN202111212022.0A
Authority: CN
Inventors: 欧丽华
Original assignee: Shenzhen Kairuide Intelligent Co ltd
Current assignee: Shenzhen Kairuide Intelligent Co ltd
Priority date: 2021-10-18
Filing date: 2021-10-18
Publication date: 2022-01-14

Abstract

The invention relates to the field of exposure machines, in particular to an exposure machine based on a CCD (charge coupled device) alignment system, which comprises an adjusting device and an executing device, wherein the adjusting device is positioned in the executing device and comprises a substrate: further comprising: the automatic exposure device comprises an adjusting assembly positioned on the upper part of a base plate, wherein the adjusting assembly comprises a first frame, two groups of electromagnet devices are arranged on the upper surfaces of two sides of the first frame, two groups of electric telescopic rods are fixedly arranged at two ends of the bottom of the first frame, and the same arc-shaped guide block is fixedly arranged at the output ends of the two groups of electric telescopic rods positioned on the same side.

Description

Exposure machine based on CCD (Charge coupled device) alignment system

Technical Field

The invention relates to the field of exposure machines, in particular to an exposure machine based on a CCD (charge coupled device) alignment system.

Background

Exposure machines find widespread use in motor technology products, such as: the right half wafer, the PCB, the film chip resistor, etc. and the exposure machine is used mainly in showing electronic circuit pattern on the product part to obtain electronic part product with small volume and multilayer circuit.

Prior art exposure machines, which typically use UV radiation of UVA wavelength emitted by a lamp to transfer image information from a film or other transparent body to a surface coated with a photosensitive material, have several disadvantages:

1. a film is needed to be smeared on the negative film, and dirty spots are easy to appear in the exposure process due to the existence of the film, so that the whole negative film is scrapped;

2. most of the existing exposure machines adopt laser ranging or photoelectric ranging alignment, the ranging mode has certain deviation, and the quality of products cannot be guaranteed;

3. the existing exposure machine can only carry out single-side scanning exposure, when a PCB needing double-side exposure is processed, the exposure efficiency is low, and the exposure precision is influenced by repeated exposure;

4. when an LDI type exposure machine is used, the speed of the stage movement greatly affects the exposure rate, especially the acceleration and deceleration mechanism, and the time required for the PCB movement when it has to move to a new scanning area directly affects the production speed.

Therefore, it is necessary to invent an exposure machine based on a CCD alignment system.

Disclosure of Invention

Therefore, the invention provides an exposure machine based on a CCD (charge coupled device) alignment system, which is used for synchronously scanning two surfaces of the same PCB (printed circuit board) by adopting two groups of matrix laser radiation devices and uniformly positioning and adjusting the PCB by adopting the CCD alignment system so as to solve the problems of poor exposure product, low exposure efficiency and repeated exposure.

In order to achieve the above purpose, the invention provides the following technical scheme: an exposure machine based on a CCD alignment system comprises an adjusting device and an executing device, wherein the adjusting device is positioned inside the executing device and comprises a base plate: further comprising: an adjusting component positioned on the upper part of the substrate;

the adjusting component comprises a first frame, two sets of electromagnet devices are arranged on the upper surfaces of two sides of the first frame, two sets of electric telescopic rods are fixedly arranged at two ends of the bottom of the first frame, the electric telescopic rods are located at two sets of the same side, the output ends of the electric telescopic rods are fixedly arranged with the same arc guide block and are arranged at two sets of two side walls of the arc guide block, the two sets of arc slide rails are arranged on the upper wall of the arc guide block, a tray is arranged at the middle part of the first frame, sliding columns are fixedly arranged at four corners of the bottom of the tray, the sliding columns are arranged at two sets of the same side, the sliding columns are slidably connected with the arc slide rails at the same side, and two sets of magnetic blocks are fixedly arranged on two side walls of the tray.

Preferably, the sliding grooves are formed in two sides of the upper portion of the base plate, the two groups of sliding grooves penetrate through the base plate, side plates are fixedly mounted on the periphery of the bottom of the base plate, racks are fixedly mounted on the inner surfaces of the side plates located on two sides, machining grooves penetrating through the base plate are formed in the upper surface of the base plate, the bottoms of the four groups of side plates are fixedly connected with the same bottom plate, and the machining grooves penetrate through the bottom plate.

Preferably, the upper portion of the base plate is provided with a second frame, two sides of the bottom of the second frame are fixedly provided with sliding plates, the two sliding plates are in movable contact with the base plate, the bottoms of the two sliding plates are fixedly provided with limiting sliding blocks, and the limiting sliding blocks are in sliding fit with the sliding grooves.

Preferably, four corners of the second frame are provided with transmission rods, four groups of transmission rods rotate to penetrate through the second frame, gears are fixedly mounted at the bottoms of the four groups of transmission rods, two groups of gears on the same side are meshed with the racks on the side and are in transmission connection with one another through a belt transmission mechanism, a servo motor is arranged at the upper end of each gear in transmission connection with one group of gears through the belt transmission mechanism, and an output shaft of the servo motor is fixedly connected with the transmission rods.

Preferably, the executing device comprises two groups of exposure mechanisms, the two groups of exposure mechanisms are respectively positioned at the upper end and the lower end of the adjusting component, the exposure mechanism comprises a third frame, and the two groups of third frames are respectively fixedly connected with the substrate and the bottom plate.

Preferably, third frame one end inner wall fixed mounting has two sets of cylinders, and is two sets of cylinder output end fixed mounting has same fourth frame, fourth frame both sides wall and third frame both sides inner wall sliding connection, the inside fixed mounting of fourth frame has spacing mounting bracket, fixed mounting has multiunit laser radiation equipment on the spacing mounting bracket.

Preferably, the multiple groups of laser radiation equipment are arranged in a matrix mode, and shadow mapping assemblies are arranged in the laser radiation equipment.

Preferably, the shadow casting assembly comprises an LD projection device, a concave lens is arranged at the front end of the LD projection device, and a DMD chip is arranged at the front end of the concave lens.

Preferably, the front end of the DMD chip is provided with a plane reflector, the bottom of the plane reflector is provided with a focusing lens, and the bottom of the DMD chip is provided with an extinction mirror.

Preferably, the executing device further comprises a shell, the exposure mechanism is located inside the shell, the adjusting assembly penetrates through the shell in a sliding mode, a master control center is arranged on the outer side of the shell, a connecting piece is fixedly mounted on the outer side of the shell, and the master control center is movably connected with the shell through the connecting piece.

The invention has the beneficial effects that:

1. the servo motor is driven to drive the adjusting assembly to slide through the driving servo motor, when the adjusting assembly slides to the outside of the shell, a user places a PCB with two targets on the tray, then drives the servo motor to return to a working area, at the moment, a special CCD camera is used for shooting and shooting characteristic positions on the PCB and transmitting data to a master control center, the data are calculated through the master control center, so that the electric telescopic rod tends to stretch, the electromagnet device pushes the tray to rotate, automatic alignment is realized, the alignment precision is greatly improved, and the product quality is improved;

2. the matrix type laser radiation equipment is adopted to carry out synchronous scanning exposure on two surfaces of the PCB to be processed, so that digital direct imaging is realized, and films are prevented from being used, so that batch scrapping caused by the films is avoided;

3. because the middle part of the tray is hollowed out, the base plate and the bottom plate are both provided with processing grooves, and matrix laser emission equipment is arranged at both ends of the tray, both ends of a PCB which is processed instead can be processed;

4. owing to set up the shadow at laser radiation equipment inside and show the subassembly, when scanning the PCB board, can adjust its scanning width through the DMD chip, thereby greatly increased the transverse scanning scope, compare in the lateral shifting that traditional ldi exposure machine can reduce bottom work platform, when the PCB board that needs the scanning is too big, owing to set up matrix laser radiation equipment, can treat the PCB board of scanning and carry out the subregion, thereby make single laser radiation equipment scan regional PCB board separately, drive actuating cylinder simultaneously and make whole matrix laser radiation equipment carry out synchronous motion, thereby the scanning precision is improved, thereby product quality has been improved.

Drawings

FIG. 1 is a schematic structural diagram of an exposure machine provided by the present invention;

FIG. 2 is a schematic structural diagram of an exposure mechanism provided in the present invention;

FIG. 3 is a schematic structural diagram of an adjusting device provided by the present invention;

FIG. 4 is a side view of FIG. 3 provided by the present invention;

FIG. 5 is a partial cross-sectional view of FIG. 4 provided in accordance with the present invention;

FIG. 6 is a schematic structural diagram of an adjustment assembly according to the present invention;

FIG. 7 is a structural view of an installation position of the arc guide block provided by the present invention;

fig. 8 is a schematic structural diagram of a shadow mapping assembly provided in the present invention.

In the figure: the adjusting device 100, the adjusting assembly 110, the first frame 111, the electromagnet device 112, the electric telescopic rod 113, the arc-shaped guide block 114, the arc-shaped slide rail 115, the tray 116, the slide column 117, the magnet 118, the second frame 120, the transmission rod 121, the servo motor 122, the gear 123, the belt transmission mechanism 124, the limit slider 125, the slide plate 126, the base plate 130, the slide groove 131, the side plate 132, the rack 133, the processing groove 134, the bottom plate 135, the executing device 200, the exposure mechanism 210, the third frame 211, the cylinder 212, the fourth frame 213, the limit mounting frame 214, the shadow mapping assembly 220, the LD projection device 221, the concave lens 222, the DMD chip 223, the plane mirror 224, the focusing lens 225, the extinction mirror 226, the laser radiation device 230, the housing 240, the total control center 241 and the connecting piece 242.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.

Referring to fig. 1 to 8, the exposure machine based on the CCD alignment system according to the present invention includes an adjusting device 100 and an executing device 200, wherein the adjusting device 100 is located inside the executing device 200, the adjusting device 100 includes a substrate 130: further comprising: an adjusting assembly 110 positioned on the upper portion of the substrate 130;

the adjusting assembly 110 comprises a first frame 111, two sets of electromagnet devices 112 are respectively arranged on the upper surfaces of two sides of the first frame 111, the first frame 111 supports the electromagnet devices 112, two sets of electric telescopic rods 113 are respectively fixedly arranged at two ends of the bottom of the first frame 111, the first frame 111 provides mounting positions for the two sets of electric telescopic rods 113, the same arc-shaped guide block 114 is respectively fixedly arranged at the output ends of the two sets of electric telescopic rods 113 positioned at the same side, two side walls of the two sets of arc-shaped guide blocks 114 are respectively and slidably connected with the side wall of the first frame 111, the first frame 111 performs limiting and guiding functions on the two sets of arc-shaped guide blocks 114, the upper walls of the two sets of arc-shaped guide blocks 114 are respectively provided with arc-shaped sliding rails 115, the two sets of arc-shaped guide blocks 114 provide mounting positions for the arc-shaped sliding rails 115, a tray 116 is arranged in the middle of the first frame 111, sliding columns 117 are respectively and fixedly arranged at four corners of the bottom of the tray 116, and the sliding columns 117 provide supporting functions for the tray 116, two sets of sliding columns 117 located on the same side are slidably connected with the arc-shaped sliding rail 115 located on the same side, when the tray 116 rotates, the sliding columns 117 slide in the arc-shaped sliding rail 115, so as to force the tray 116 to perform arc-direction operation, two sets of magnetic blocks 118 are fixedly installed on both side walls of the tray 116, the tray 116 plays a supporting role for the magnetic blocks 118, specifically, a special CCD camera (not labeled in the figure), an industrial lens (not labeled in the figure) and a light source inside the housing 240 take a picture of a target on the PCB, an image processor (not labeled in the figure) (PC) collects image data to perform image processing, performs position operation to judge the actual position of the PCB, calculates the actual offset value of a product by comparing with the previously set reference position, sends an electric signal to the electromagnet device 112 and the electric telescopic rod 113 through the master control center 241, at this time, the electric telescopic rod 113 pushes the arc-shaped guide block 114 to move, thereby drive the tray on arc guide 114 and move, the magnetic field that electromagnet device 112 produced simultaneously and magnetic path 118 take place the effect of power to promote magnetic path 118 and take place the position change, under the limiting displacement of arc slide rail 115, traveller 117 drives tray 116 and takes place the deflection, thereby makes the PCB circuit board move on the reference position of setting for before, in order to reach fast, closed loop, high accuracy counterpoint.

Further, spout 131 has been seted up to base plate 130 upper portion both sides, two sets of spout 131 all run through base plate 130, base plate 130 provides the mounted position for spout 131, equal fixed mounting has curb plate 132 around base plate 130 bottom, base plate 130 plays the supporting role to curb plate 132, the equal fixed mounting of curb plate 132 internal surface that is located both sides has rack 133, curb plate 132 provides the mounted position for rack 133, base plate 130 upper surface is equipped with the processing groove 134 that runs through base plate 130, the same bottom plate 135 of four sets of curb plate 132 bottom fixedly connected with of group, processing groove 134 runs through bottom plate 135, it is specific, set up processing groove 134 at base plate 130, and processing groove 134 runs through bottom plate 135, matrix laser radiation equipment 230 that can be convenient for processes the PCB board back.

Further, base plate 130 upper portion is equipped with second frame 120, the equal fixed mounting in second frame 120 bottom both sides has slide 126, slide 126 plays the supporting role to second frame 120, two sets of slides 126 and base plate 130 movable contact, base plate 130 plays the supporting role to slide 126, the equal fixed mounting in two sets of slides 126 bottom has spacing slider 125, slide 126 has ensured the mounted position of spacing slider 125, spacing slider 125 and spout 131 sliding fit, spout 131 plays spacing guide effect to spacing slider 125, specifically, through making spacing slider 125 and spout 131 sliding fit, when gear 123 rotates, gear 123 can mesh with rack 133 all the time, thereby it can not take place the deflection to have ensured tray 116 in the operation process.

Furthermore, the four corners of the second frame 120 are respectively provided with a transmission rod 121, four groups of transmission rods 121 rotatably penetrate through the second frame 120, the second frame 120 provides an installation position for the four groups of transmission rods 121, the bottoms of the four groups of transmission rods 121 are respectively and fixedly provided with a gear 123, the transmission rods 121 provide a supporting function for the gears 123, two groups of gears 123 on the same side are meshed with the rack 133 on the side, two groups of gears 123 on the same end are in transmission connection through a belt transmission mechanism 124, a servo motor 122 is arranged at the upper end of any one group of gears in transmission connection through the belt transmission mechanism 124, an output shaft of the servo motor 122 is fixedly connected with the transmission rods 121, specifically, the servo motor 122 is driven by a master control center 241 to drive the transmission rods 121 and the gears 123 to synchronously rotate, meanwhile, the transmission rods 121 drive belt pulleys (not labeled in the figure) to rotate, and the two groups of gears 123 on the same end synchronously rotate under the action of the belt transmission mechanism 124, two sets of gears 123 mesh with rack 133 on lateral plate 132 to make second frame 120 drive adjustment subassembly 110 and move, especially, belt drive mechanism 124 includes two sets of belt pulleys (not labeled in the figure) and conveyer belt (not labeled in the figure), can guarantee that two sets of gears 123 carry out synchronous rotation through setting up belt drive mechanism 124, thereby ensures that tray 116 keeps the unanimity all the time at the operation in-process, has effectually improved scanning accuracy.

Further, the execution device 200 includes the exposure mechanism 210, the exposure mechanism 210 is equipped with two sets ofly, two sets of exposure mechanisms 210 are located the upper and lower both ends of adjustment subassembly 110 respectively, the exposure mechanism 210 includes the third frame 211, two sets of third frames 211 respectively with base plate 130, bottom plate 135 fixed connection, it is concrete, base plate 130 and bottom plate 135 can provide the supporting role to two sets of exposure mechanisms 210, it can carry out two-sided scanning to the PCB board of processing to set up two sets of exposure mechanisms 210, thereby exposure times has been reduced, exposure precision has been improved.

Further, two sets of cylinders 212 are fixedly mounted on an inner wall of one end of a third frame 211, the third frame 211 provides mounting positions for the two sets of cylinders 212, the same fourth frame 213 is fixedly mounted on output ends of the two sets of cylinders 212, the two sets of cylinders 212 can push the fourth frame 213 to move, two side walls of the fourth frame 213 are slidably connected with inner walls of two sides of the third frame 211, inner walls of two sides of the third frame 211 provide a limiting function and a guiding function for the fourth frame 213, which can limit the fourth frame 213 to move only in one direction, a limiting mounting frame 214 is fixedly mounted inside the fourth frame 213, the fourth frame 213 provides a mounting position for the limiting mounting frame 214, a plurality of sets of laser radiation devices 230 are fixedly mounted on the limiting mounting frame 214, the limiting mounting frame 214 has a limiting function on the laser radiation devices 230, and specifically, when the cylinders 212 move, output ends of the cylinders 212 drive the fourth frame 213 to move, under the limiting action of the limiting mounting frame 214, the multiple groups of laser emitting devices 230 move transversely on the PCB board, so that the processing is facilitated.

Further, the multiunit laser radiation equipment 230 is the matrix and arranges, subassembly 220 is seen to inside being equipped with of laser radiation equipment 230, specifically, laser radiation equipment 230 provides the mounted position for subassembly 220 is seen to the shadow, laser radiation equipment 230 can be according to the optical signal that subassembly 220 was seen to the shadow provided simultaneously, take the PCB board of scanning to scan, it is special, through setting multiunit laser radiation equipment 230 to the matrix and arranging, can divide the PCB board of processing into, drive actuating cylinder and make whole matrix laser radiation equipment carry out synchronous motion, thereby make single laser radiation equipment scan regional PCB board separately, the scanning precision is improved, product quality is improved.

Further, the projection module 220 includes an LD projection device 221, a concave lens 222 is disposed at the front end of the LD projection device 221, a DMD chip 223 is disposed at the front end of the concave lens 222, specifically, the concave lens 222 has a light scattering effect and can transmit the light signal emitted by the LD projection device 221 to the DMD chip 223 in a divergent manner, in particular, 80 ten thousand to 100 ten thousand small mirrors are densely and numberly arranged on the DMD chip 223, and each small mirror can be independently turned over 10 degrees in the positive and negative directions and can be turned over 65000 times per second, and the light source is reflected by the small mirrors to the screen to directly form an image.

Further, a flat mirror 224 is arranged at the front end of the DMD chip 223, a focusing lens 225 is arranged at the bottom of the flat mirror 224, and a light extinction mirror 226 is arranged at the bottom of the DMD chip 223, specifically, when the positive direction of the small mirror on the DMD chip 233 is turned over by 10 degrees, the DMD chip 223 transmits the optical signal to the flat mirror 224, and under the reflection action of the flat mirror 224, the optical signal is transmitted to the focusing lens 225, and the focusing lens 225 has a light condensation function, and can condense the light reflected by the flat mirror 224, thereby enhancing the optical signal transmitted to the laser radiation device 230, whereas, when the negative direction of the small mirror on the DMD chip 233 is turned over by 10 degrees, the DMD chip 223 transmits the optical signal to the light extinction mirror 226, and the light extinction mirror 226 absorbs the optical signal.

Further, the executing device 200 further includes a housing 240, the exposure mechanism 210 is located inside the housing 240, the housing 240 provides a dark environment for the exposure mechanism 210, and meanwhile, the housing 240 ensures that the laser radiation device 230 is not affected by an external environment when scanning on a PCB, the adjusting component 110 slidably penetrates through the housing 240, a general control center 241 is disposed outside the housing 240, a connecting piece 242 is fixedly mounted outside the housing 240, the housing 240 supports the connecting piece 242, the general control center 241 is movably connected with the housing 240 through the connecting piece 242, and the connecting piece 242 supports the general control center 241, specifically, the general control center 241 can drive the servo motor 122, the electric telescopic rod 113, the electromagnet device 112 and the cylinder 212 to work, and meanwhile, the electric signal can be input to control a scanning image of the laser radiation device 230;

the using process of the invention is as follows: the technicians in this field drive the servo motor 122 through the master control center 241 to drive the transmission rod 121 and the gear 123 to synchronously rotate, and simultaneously the transmission rod 121 drives the belt pulley to rotate, under the action of the belt transmission mechanism 124, the two sets of gears 123 at the same end synchronously rotate, the two sets of gears 123 are engaged with the rack 133 on the side plate 132, so that the second frame 120 drives the adjusting component 110 to move, when the second frame 120 drives the adjusting component 110 to move out of the housing 240, the operator places the PCB circuit board to be processed on the tray 116, and simultaneously drives the servo motor 122 through the master control center 241 to drive the adjusting component 110 to enter the housing 240, at this time, the dedicated CCD camera (not labeled in the figure), the industrial lens (not labeled in the figure) and the light source inside the housing 240 take a picture of the target on the PCB circuit board, and image data is collected through the image processor (not labeled in the figure) (PC) to perform image processing, the actual position of the PCB is judged by position calculation, the actual offset value of the product is calculated by comparing with the previously set reference position, the electric signal is sent to the electromagnet device 112 and the electric telescopic rod 113 through the master control center 241, at the moment, the electric telescopic rod 113 pushes the arc-shaped guide block 114 to move, so that the tray on the arc-shaped guide block 114 is driven to move, meanwhile, the magnetic field generated by the electromagnet device 112 and the magnetic block 118 generate force action, so that the magnetic block 118 is pushed to change the position, under the limiting action of the arc-shaped slide rail 115, the slide column 117 drives the tray 116 to deflect, so that the PCB moves to the previously set reference position, so as to achieve quick, closed-loop and high-precision alignment, after the alignment is completed, the image information to be exposed is input into the master control center 241, at the moment, the master control center 241 transmits the image information to the LD projection device 221 in an electric signal mode, the LD projection device 221 converts the electrical signal into an optical signal to transmit to the concave lens 222, and the converted optical signal is transmitted to the DMD chip 223 under the astigmatism effect of the concave lens 222, (80 ten thousand to 100 ten thousand mirrors are densely and numb arranged on the DMD chip 223, and each mirror can be independently turned over 10 degrees in the positive and negative directions and can be turned over 65000 times per second), the total control center 241 turns over by controlling the DMD chip 223, the optical signal may be transmitted to the plane mirror 224 and the extinction mirror 226, transmitted to the plane mirror 224 to be reflected to the focusing lens 225, thereby transmitting an optical signal to the actuator (laser emitting device 230), thereby causing the matrix laser emitting device 230 to scan over the PCB board, meanwhile, the servo motor 122 is driven to enable the matrix laser radiation device 230 to scan vertically on the PCB, and the cylinder 212 is driven to enable the matrix laser radiation device 230 to scan horizontally on the PCB.

The above description is only a preferred embodiment of the present invention, and any person skilled in the art may modify the present invention or modify it into an equivalent technical solution by using the technical solution described above. Therefore, any simple modifications or equivalent substitutions made in accordance with the technical solution of the present invention are within the scope of the claims of the present invention.

Claims

1. An exposure machine based on a CCD alignment system comprises an adjusting device (100) and an executing device (200), wherein the adjusting device (100) is positioned inside the executing device (200), and the exposure machine is characterized in that: the conditioning device (100) comprises a base plate (130): further comprising: an adjusting component (110) positioned on the upper part of the substrate (130);

the adjusting component (110) comprises a first frame (111), two groups of electromagnet devices (112) are arranged on the upper surfaces of two sides of the first frame (111), two groups of electric telescopic rods (113) are fixedly arranged at two ends of the bottom of the first frame (111), the same arc-shaped guide block (114) is fixedly arranged at the output ends of the two groups of electric telescopic rods (113) positioned at the same side, two side walls of the two groups of arc-shaped guide blocks (114) are slidably connected with the side wall of the first frame (111), an arc-shaped sliding rail (115) is arranged on the upper wall of the two groups of arc-shaped guide blocks (114), a tray (116) is arranged in the middle of the first frame (111), sliding columns (117) are fixedly arranged at four corners of the bottom of the tray (116), two groups of sliding columns (117) positioned on the same side are connected with arc-shaped sliding rails (115) on the same side in a sliding manner, two groups of magnetic blocks (118) are fixedly mounted on two side walls of the tray (116).

2. The exposure machine based on the CCD alignment system of claim 1, wherein: the utility model discloses a processing device, including base plate (130), spout (131), two sets of spout (131) have all been seted up to base plate (130) upper portion both sides, and are two sets of base plate (130) is all run through in spout (131), equal fixed mounting has curb plate (132) around base plate (130) bottom, is located both sides the equal fixed mounting of curb plate (132) internal surface has rack (133), base plate (130) upper surface is equipped with processing groove (134) that run through base plate (130), and four sets of curb plate (132) bottom fixedly connected with is with one piece bottom plate (135), processing groove (134) run through bottom plate (135).

3. The exposure machine based on the CCD alignment system as claimed in claim 2, wherein: base plate (130) upper portion is equipped with second frame (120), the equal fixed mounting in second frame (120) bottom both sides has slide (126), and is two sets of slide (126) and base plate (130) movable contact are two sets of slide (126) bottom equal fixed mounting has spacing slider (125), spacing slider (125) and spout (131) sliding fit.

4. The exposure machine based on the CCD alignment system of claim 3, wherein: all be equipped with transfer line (121) in second frame (120) four corners department, four groups transfer line (121) all rotate and run through second frame (120), four groups transfer line (121) bottom all fixed mounting have gear (123), with one side two sets of gear (123) and the rack (133) meshing connection of this side, be located same one end two sets of gear (123) are through taking drive mechanism (124) transmission to be connected, arbitrary one set of through taking drive mechanism (124) transmission to be connected the gear upper end is equipped with servo motor (122), servo motor (122) output shaft and transfer line (121) fixed connection.

5. The exposure machine based on the CCD alignment system as claimed in claim 2, wherein: the executing device (200) comprises two groups of exposure mechanisms (210), the two groups of exposure mechanisms (210) are respectively positioned at the upper end and the lower end of the adjusting component (110), each exposure mechanism (210) comprises a third frame (211), and the two groups of third frames (211) are respectively fixedly connected with the substrate (130) and the bottom plate (135).

6. The exposure machine based on CCD contraposition system of claim 5, wherein: third frame (211) one end inner wall fixed mounting has two sets of cylinders (212), and is two sets of cylinder (212) output end fixed mounting has same fourth frame (213), fourth frame (213) both sides wall and third frame (211) both sides inner wall sliding connection, the inside fixed mounting of fourth frame (213) has spacing mounting bracket (214), fixed mounting has multiunit laser radiation equipment (230) on spacing mounting bracket (214).

7. The CCD alignment system-based exposure machine of claim 6, wherein: the laser radiation equipment (230) of multiunit are arranged in matrix, inside shadow subassembly (220) of being equipped with of laser radiation equipment (230).

8. The exposure machine based on the CCD alignment system of claim 7, wherein: shadow subassembly (220) includes LD projection equipment (221), LD projection equipment (221) front end is equipped with concave lens (222), concave lens (222) front end is equipped with DMD chip (223).

9. The exposure machine based on the CCD alignment system of claim 8, wherein: the front end of the DMD chip (223) is provided with a plane reflector (224), the bottom of the plane reflector (224) is provided with a focusing lens (225), and the bottom of the DMD chip (223) is provided with a light eliminating mirror (226).

10. The exposure machine based on the CCD alignment system of claim 1, wherein: the execution device (200) further comprises a shell (240), the exposure mechanism (210) is located inside the shell (240), the adjusting component (110) penetrates through the shell (240) in a sliding mode, a master control center (241) is arranged on the outer side of the shell (240), a connecting piece (242) is fixedly mounted on the outer side of the shell (240), and the master control center (241) is movably connected with the shell (240) through the connecting piece (242).