CN113739918A - Polarization-preserving reflective near-infrared Fourier transform polarization spectrometer - Google Patents
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- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 3
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- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 3
- 238000002329 infrared spectrum Methods 0.000 claims description 3
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/447—Polarisation spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
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Abstract
A polarization preserving reflective near-infrared fourier transform polarization spectrometer, comprising: the system comprises a laser interference subsystem and a detection unit thereof, and a white light interference subsystem and a detection unit thereof; the laser interference subsystem and the detection unit thereof comprise a laser, a movable mirror, a polarization-preserving reflection focusing module, a beam splitter and a laser detector; the white light interference subsystem and the detection unit thereof comprise a white light source, a filter, a chopper, a first focusing element, a first polarizer, a movable mirror, a second focusing element, a beam splitter, a second polarizer, a polarization-preserving reflection focusing module, a detector and a phase-locked amplifier. The curved surface reflecting element adopted by the invention has focal power, does not generate chromatic aberration, and can ensure high reflectivity in a wider spectral range.
Description
Technical Field
The invention relates to the technical field of near infrared spectroscopy, in particular to a near infrared Fourier transform spectrometer which adopts a polarization-maintaining reflection focusing module at least comprising two reflection elements to maintain polarization characteristics.
Background
Infrared spectroscopy is a powerful tool for determining molecular composition and structure, where the near infrared region is primarily the absorption band produced by frequency doubling and combined frequency absorption of hydrogen-containing group (e.g., O-H, N-H, C-H) stretching vibrations. At present, a traditional near-infrared Fourier transform spectrometer can realize the detection of a weak signal after a phase-locked amplifier is added, but the intensity of sample radiation is still measured, and samples with the same radiation intensity but different polarization properties cannot be distinguished. For anisotropic characterization samples, the orientation of the vibrating group in space cannot be obtained, and the spatial conformation of the molecules in the sample cannot be inferred.
In a conventional optical path, a lens is generally used for beam expansion and focusing. However, when the light source is not light with a single wavelength, chromatic aberration is generated when the light is expanded or focused by the lens, and the measurement accuracy is reduced. Although the problem can be solved by using a single off-axis parabolic mirror instead of a lens, the polarization state of the light beam after passing through the single off-axis parabolic mirror changes, and the accuracy of the measurement result is also reduced.
Disclosure of Invention
It is therefore an objective of the claimed invention to provide a reflective near-infrared fourier transform spectrometer with polarization maintaining properties, so as to partially solve at least one of the above problems.
To achieve the above object, as an aspect of the present invention, there is provided a polarization maintaining reflective near infrared fourier transform spectrometer comprising: the system comprises a laser interference subsystem and a detection unit thereof, and a white light interference subsystem and a detection unit thereof;
the laser interference subsystem and the detection unit thereof comprise a laser, a movable mirror, a polarization-preserving reflection focusing module, a beam splitter and a laser detector, wherein:
laser generated by a laser is divided into two paths through a beam splitter, one path is reflected laser, the other path is transmitted laser, the reflected laser is reflected by a movable mirror and returns to the beam splitter, the transmitted light is reflected and focused on a sample through a polarization-preserving reflection focusing module and then returns to the beam splitter along the original path through the reflection of the surface of the sample, the two paths of light are converged into one path of light by the beam splitter, the position of the movable mirror is adjusted to change the optical path difference of the two beams, an interference diagram of the two laser beams is obtained through a laser detector, the inclined position information of the movable mirror in the moving process is obtained, real-time motion feedback adjustment is carried out on the movable mirror through the position information of the movable mirror, the plane of the movable mirror is kept vertical to the optical axis, and the purpose of better white light interference is achieved;
the white light interference subsystem and the detection unit thereof comprise a white light source, a filter, a chopper, a first focusing element, a first polarizer, a movable mirror, a second focusing element, a beam splitter, a second polarizer, a polarization-maintaining reflecting focusing module, a detector and a phase-locked amplifier, wherein:
the detection light emitted by the white light source is filtered into near-infrared light through the optical filter, then modulated into high frequency light through the chopper, then passes through the first focusing element to emit parallel light, and the polarization state of the parallel light is changed through the first polarizer and the adjusted polarized light is transmitted; at the moment, polarized light is divided into two paths through a beam splitter, one path is reflected light, the other path is transmitted light, the reflected light is reflected by a movable mirror and returns to the beam splitter, the transmitted light is reflected and focused on a sample through a polarization-maintaining reflection focusing module, after the transmitted light reacts with the sample, the spectrum and the polarization state of detection light are changed, the light carrying sample information returns to the beam splitter along the original path, the two paths of light are converged into one path of light by the beam splitter, and the position of the movable mirror is adjusted to enable the two paths of light to interfere; adjusting the polarization state of the interference light through a second polarizer, transmitting the adjusted parallel light, focusing the light on a focus by using a second focusing element, and placing a detector at the focused position; the output interface of the detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier; and demodulating the obtained signal by the phase-locked amplifier to obtain a white light interference pattern, performing inverse Fourier transform calculation on the white light interference pattern to obtain a near infrared spectrum, and calculating to obtain the structure and the optical property of the anisotropic characteristic sample.
Wherein, the laser in the laser interference subsystem is a helium-neon laser, a carbon dioxide laser, a solid laser or a semiconductor laser.
The laser detector in the laser interference subsystem is a photoelectric detector capable of reflecting the change of the central position of the light spot, and preferably a four-quadrant detector or a CCD detector.
The beam splitter is a device capable of splitting a beam into two beams perpendicular to each other, and is preferably a dielectric film beam splitter, a metal film beam splitter, a cube beam splitter, or a flat plate beam splitter.
Wherein, the light source in the white light interference subsystem is a light source with a wave band including a near infrared part, and preferably a tungsten lamp, a halogen lamp or a laser-driven white light source.
The polarizer in the white light interference subsystem is an element capable of converting light into linearly polarized light, and is preferably a Wollaston prism polarizer or a Rochon prism polarizer.
The white light interference subsystem further comprises at least two compensators for changing the polarization state of light, preferably a wave plate or a photoelastic phase compensation element.
The polarization-maintaining reflecting and focusing module in the white light interference subsystem comprises at least two reflecting elements, preferably a plane reflector and an off-axis parabolic mirror.
The polarization-maintaining reflecting focusing module further comprises a curved surface reflector, and the curved surface reflector is an off-axis parabolic reflector or a toroidal reflecting element.
Wherein the detector in the white light interference subsystem is a PbSe detector, a Ge detector, an InSb detector or an InGaAs detector.
Based on the technical scheme, compared with the prior art, the spectrometer provided by the invention has at least one of the following beneficial effects:
1. the invention introduces polarized light measurement into the traditional near-infrared Fourier transform spectrometer, combines near-infrared light interference, Fourier transform and polarized light measurement technologies, and can obtain more optical constants (such as thickness, refractive index, extinction coefficient and the like) of the measured sample by measuring the polarization parameters of the probe light on the basis that the traditional near-infrared Fourier transform spectrometer acquires the spectral information of the measured sample.
2. The traditional lens is used for expanding and focusing, chromatic aberration is generated, and the measurement accuracy is reduced. In addition, because the polarization state of light can be changed after the light is reflected by a single reflector, the polarization-maintaining reflecting and focusing module at least comprising two reflecting elements is also used in the invention to maintain the polarization characteristic of the polarized light.
Drawings
FIG. 1 is a schematic diagram of a polarization maintaining reflective near infrared Fourier transform polarization spectrometer system.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
Fig. 1 is a schematic diagram of a polarization maintaining reflective near-infrared fourier transform polarization spectrometer system according to an embodiment of the present invention, and the present invention is further described below with reference to the schematic diagram.
Firstly, laser generated by a laser is divided into two paths through a beam splitter, one path is reflected laser, the other path is transmitted laser, the reflected laser is reflected by a movable mirror and returns to the beam splitter, the transmitted light is reflected and focused on a sample through a polarization-preserving reflection focusing module and then returns to the beam splitter along the original path through the reflection of the surface of the sample, the two paths of light are converged into one path of light by the beam splitter, the position of the movable mirror is adjusted to change the optical path difference of the two beams, an interference pattern of the two laser beams is obtained through a laser detector, the inclined position information of the movable mirror in the moving process is obtained, real-time motion feedback adjustment is carried out on the movable mirror through the position information of the movable mirror, the plane of the movable mirror is kept vertical to the optical axis, and the purpose of better white light interference is achieved.
The detection light emitted by the laser-driven white light source is filtered into near-infrared light through the optical filter, then modulated into high frequency light through the chopper, then passes through the focusing element 1 to emit parallel light, and the polarization state of the parallel light is changed through the polarizer 1 and the wave plate 1 and the adjusted polarized light is transmitted and passed; at the moment, polarized light is divided into two paths through a beam splitter, one path is reflected light, the other path is transmitted light, the reflected light is reflected by a movable mirror and returns to the beam splitter, the transmitted light is reflected and focused on a sample through a polarization-maintaining reflection focusing module, after the transmitted light reacts with the sample, the spectrum and the polarization state of detection light are changed, the light carrying sample information returns to the beam splitter along the original path, the two paths of light are converged into one path of light by the beam splitter, and the position of the movable mirror is adjusted to enable the two paths of light to interfere; the polarization state of the interference light is adjusted by the wave plate 2 and the polarizer 2, the adjusted parallel light is transmitted and passes through, the light is focused on a focus by the focusing element 2, and a photoelectric detector is arranged at the focused position; the output interface of the photoelectric detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier. At the moment, the input signal is modulated by the chopper and has the same frequency as the reference signal, so that low-frequency noise can be greatly suppressed through the phase-locked amplifier, and the detection signal-to-noise ratio is improved. The phase-locked amplifier demodulates the obtained signal to obtain a white light interference pattern, the white light interference pattern is subjected to inverse Fourier transform calculation to obtain a near infrared spectrum, and the structure and the optical properties (n, k or dielectric constant) of the anisotropic characteristic sample are calculated and obtained.
The laser in the laser interference subsystem can be a helium-neon laser, a carbon dioxide laser, a solid laser, a semiconductor laser and the like. The laser detector in the laser interference subsystem can be a four-quadrant detector, a CCD detector and other photoelectric detectors which can reflect the change of the central position of the light spot. The beam splitter may be a dielectric film beam splitter, a metal film beam splitter, a cube beam splitter, a flat plate beam splitter, or the like, which can split one beam of light into two beams of light perpendicular to each other.
The light source in the white light interference subsystem can be a light source with a near infrared part in wave bands such as a tungsten lamp, a halogen lamp, a laser-driven white light source and the like. The polarizer in the white light interference subsystem can be a Wollaston prism polarizer, a Rochon prism polarizer and other elements capable of changing light into linearly polarized light. The compensator in the white light interference subsystem can be a wave plate, a photoelastic phase compensation element and the like which can change the polarization state of light. The polarization-maintaining reflecting and focusing module in the white light interference subsystem comprises at least two reflecting elements which can be a plane reflector and an off-axis parabolic mirror. The curved surface reflector in the polarization-maintaining reflecting and focusing module can be an off-axis parabolic reflector, a toroidal reflecting element and the like. The photodetector in the white light interference subsystem can be a PbSe detector, a Ge detector, an InSb detector, an InGaAs detector or the like.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A polarization preserving reflective near-infrared fourier transform polarization spectrometer, comprising: the system comprises a laser interference subsystem and a detection unit thereof, and a white light interference subsystem and a detection unit thereof;
the laser interference subsystem and the detection unit thereof comprise a laser, a movable mirror, a polarization-preserving reflection focusing module, a beam splitter and a laser detector, wherein:
laser generated by a laser is divided into two paths through a beam splitter, one path is reflected laser, the other path is transmitted laser, the reflected laser is reflected by a movable mirror and returns to the beam splitter, the transmitted light is reflected and focused on a sample through a polarization-preserving reflection focusing module and then returns to the beam splitter along the original path through the reflection of the surface of the sample, the two paths of light are converged into one path of light by the beam splitter, the position of the movable mirror is adjusted to change the optical path difference of the two beams, an interference diagram of the two laser beams is obtained through a laser detector, the inclined position information of the movable mirror in the moving process is obtained, real-time motion feedback adjustment is carried out on the movable mirror through the position information of the movable mirror, the plane of the movable mirror is kept vertical to the optical axis, and the purpose of better white light interference is achieved;
the white light interference subsystem and the detection unit thereof comprise a white light source, a filter, a chopper, a first focusing element, a first polarizer, a movable mirror, a second focusing element, a beam splitter, a second polarizer, a polarization-maintaining reflecting focusing module, a detector and a phase-locked amplifier, wherein:
the detection light emitted by the white light source is filtered into near-infrared light through the optical filter, then modulated into high frequency light through the chopper, then passes through the first focusing element to emit parallel light, and the polarization state of the parallel light is changed through the first polarizer and the adjusted polarized light is transmitted; at the moment, polarized light is divided into two paths through a beam splitter, one path is reflected light, the other path is transmitted light, the reflected light is reflected by a movable mirror and returns to the beam splitter, the transmitted light is reflected and focused on a sample through a polarization-maintaining reflection focusing module, after the transmitted light reacts with the sample, the spectrum and the polarization state of detection light are changed, the light carrying sample information returns to the beam splitter along the original path, the two paths of light are converged into one path of light by the beam splitter, and the position of the movable mirror is adjusted to enable the two paths of light to interfere; adjusting the polarization state of the interference light through a second polarizer, transmitting the adjusted parallel light, focusing the light on a focus by using a second focusing element, and placing a detector at the focused position; the output interface of the detector is connected with the input signal interface of the phase-locked amplifier, and the frequency output interface of the chopper is connected with the reference signal interface of the phase-locked amplifier; and demodulating the obtained signal by the phase-locked amplifier to obtain a white light interference pattern, performing inverse Fourier transform calculation on the white light interference pattern to obtain a near infrared spectrum, and calculating to obtain the structure and the optical property of the anisotropic characteristic sample.
2. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 1, wherein the laser in the laser interference subsystem is a helium neon laser, a carbon dioxide laser, a solid state laser, or a semiconductor laser.
3. The polarization maintaining reflective near infrared fourier transform spectrometer of claim 1, wherein the laser detector in the laser interference subsystem is a photodetector capable of reflecting the change of the central position of the light spot, preferably a four-quadrant detector or a CCD detector.
4. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 1, wherein the beam splitter is a component capable of splitting a beam of light into two beams of light perpendicular to each other, preferably a dielectric film beam splitter, a metal film beam splitter, a cube beam splitter or a plate beam splitter.
5. The polarization maintaining reflective near infrared fourier transform spectrometer of claim 1, wherein the light source in the white light interference subsystem is a light source with a wavelength band including the near infrared portion, preferably a tungsten, halogen or laser driven white light source.
6. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 1, wherein the polarizer in the white light interference subsystem is an element capable of converting light into linearly polarized light, preferably a wollaston prism polarizer or a rochon prism polarizer.
7. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 1, further comprising at least two compensators in the white light interference subsystem for changing the polarization state of light, preferably a wave plate or photoelastic phase compensation element.
8. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 1, wherein the polarization maintaining reflective focusing module in the white light interference subsystem comprises at least two reflective elements, preferably a planar mirror and an off-axis parabolic mirror.
9. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 8, further comprising a curved mirror in the polarization maintaining reflective focusing module, the curved mirror being an off-axis parabolic mirror or a toroidal reflecting element.
10. The polarization maintaining reflective near infrared fourier transform polarization spectrometer of claim 1, wherein the detector in the white light interference subsystem is a PbSe detector, a Ge detector, an InSb detector, or an InGaAs detector.
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| CN116223450A (en) * | 2023-03-23 | 2023-06-06 | 中南大学 | Instrument and method for measuring concentration of transparent liquid |
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