CN113532648B - Interference spectrometer moving mirror scanning system based on symmetrical flexible supporting mechanism - Google Patents

Abstract

In order to overcome the shortcomings of low precision, high cost and large volume of the traditional moving mirror scanning system, the present invention provides an interference spectrometer moving mirror scanning system based on a symmetrical flexible support mechanism, including a moving mirror, a fixed mirror, a laser, a beam splitter, and a moving mirror. device, moving mirror motion drive unit, moving mirror motion control unit, moving mirror motion feedback unit, support mechanism for supporting the moving mirror; the support mechanism is a symmetrical flexible support mechanism, including four moving arms, two fixed bodies and one The moving body; the four booms have the same structure and size, and are connected to the moving body and the two fixed bodies respectively through the two connecting bodies and the compensating body on them; The hinge realizes motion transmission, no gap transmission and no friction, which ensures the motion accuracy of the mechanism; a double parallelogram nesting structure is formed in a single boom, which effectively increases the travel of the moving mirror.

Description

A moving mirror scanning system of interference spectrometer based on symmetric flexible support mechanism

technical field

The invention relates to the technical field of spectral imaging, in particular to a moving mirror scanning system of an interference spectrometer based on a symmetrical flexible support mechanism.

Background technique

Spectral imaging technology is a new detection technology that integrates optics, precision machinery, electronic technology, computer technology and spectroscopy. It can obtain the spectral information of the target while obtaining the geometric shape information of the target. Interferometric spectral imaging technology is based on the principle of light wave interference. By measuring the interferogram of the target, using the corresponding relationship between the target spectral information and the Fourier transform of the interferogram, the inverse Fourier transform of the interferogram is used to restore the spectral information of the target. Interferometric spectral imaging technology has obvious advantages in the quantitative and qualitative aspects of substances, and is widely used in environmental monitoring, medical analysis, space detection and meteorological detection and other fields.

The time-modulated interferometric spectrometer is based on the Michelson interferometer. The specific working principle is as follows (refer to Figure 1): the target radiation is imaged on the object surface of the interferometer by the front mirror, and then reaches the beam splitter after collimation; the incident beam is split The device is divided into a transmission part and a reflection part, the transmission part reaches the moving mirror of the interferometer, and the reflection part reaches the fixed mirror of the interferometer; the two parts of the beams are reflected and return to the original way respectively, the reflected beam from the moving mirror and the transmitted beam from the fixed mirror pass through. The converging lens is imaged at the focal plane, and at the same time, an interference signal is generated, and the detector records the interference signal. The time-modulated interferometric spectrometer generates the time-series interferogram of the radiation of the object surface pixel through the movement of the moving mirror inside the system.

The core of the time-modulated interferometric spectrometer is a high-precision moving mirror scanning system. The main technical indicators of the moving mirror moving mirror scanning system are: direction accuracy, speed uniformity and maximum movement stroke. If the moving mirror tilts or traverses during the movement, the interference efficiency will be degraded, or even no interference will occur. The requirements for directional accuracy are particularly stringent in the visible light band; if the speed of the moving mirror is uneven during the movement, it may lead to spectral There is a "ghost line" in the middle, which seriously affects the later data processing; the maximum motion of the moving mirror determines the maximum optical path difference that the spectrometer can achieve, and the maximum optical path difference is closely related to the spectral resolution of the interference spectrometer.

There are mainly three kinds of traditional moving mirror scanning systems, specifically the moving mirror scanning system based on linear bearing support, the moving mirror scanning system based on surface spring support and the moving mirror scanning system based on magnetic suspension support.

The key components of the moving mirror scanning system based on linear bearing support Linear bearings require high machining accuracy and are difficult to maintain. With the increase of wear and tear, the bearing accuracy decreases, and the scanning accuracy of the moving mirror scanning system also decreases, which directly affects the measurement of the interferometric spectrometer. precision.

The moving mirror scanning system based on the surface spring usually adopts a parallelogram structure to ensure that the moving mirror is perpendicular to the optical axis. With the increase of the moving stroke of the moving mirror, the coupling displacement of the moving mirror will increase. If the coupling displacement is too large, the interference efficiency will be degraded.

The moving mirror scanning system based on magnetic levitation support has the advantages of no friction, no wear and high reliability, but it has the disadvantages of complex magnetic levitation technology route, high development cost and large system mass.

SUMMARY OF THE INVENTION

Based on the above background, in order to overcome the disadvantages of low precision, high cost, and large mass and volume of the traditional moving mirror scanning system, the present invention provides a moving mirror scanning system for an interference spectrometer based on a symmetrical flexible support mechanism.

The technical scheme of the present invention is:

A moving mirror scanning system of an interference spectrometer based on a symmetrical flexible support mechanism is special in that it includes a moving mirror, a fixed mirror, a laser, a beam splitter, a moving mirror motion drive unit, a moving mirror motion control unit, and a moving mirror motion Feedback unit, supporting mechanism for supporting the moving mirror and scanning system base;

The support mechanism is a symmetrical flexible support mechanism, which is installed on the base of the scanning system; the symmetrical flexible support mechanism includes a first boom, a second boom, a third boom, a fourth boom, and a first fixed body , the second fixed body and the moving body;

The first fixed body, the moving body and the second fixed body are sequentially distributed along the optical axis, and the geometric centers of the three are located on the optical axis; the first fixed body and the second fixed body are symmetrical with respect to the moving body;

The structure and size of the first boom, the second boom, the third boom and the fourth boom are the same;

The first boom includes a first intermediate body and a first compensating body, a first connecting body, a second connecting body and a second compensating body which are sequentially arranged on the first intermediate body and are parallel to each other; the first boom passes through the The first connecting body and the second connecting body are connected with the moving body, connected with the first fixed body through the first compensation body, and connected with the second fixed body through the second compensation body;

In the initial state, the first compensating body, the first connecting body, the second connecting body and the second compensating body are all kept perpendicular to the first intermediate body;

The spacing between the first compensating body and the first connecting body is equal to the spacing between the second connecting body and the second compensating body; the lengths of the first compensating body and the second compensating body are equal; the first connecting body and the second connecting body are equal the length of the body is equal;

The second boom includes a second intermediate body and a third compensating body, a third connecting body, a fourth connecting body and a fourth compensating body which are arranged on the second intermediate body in sequence and parallel to each other; the second boom passes through the The third connecting body and the fourth connecting body are connected with the moving body, connected with the first fixed body through the third compensation body, and connected with the second fixed body through the fourth compensation body;

The third boom includes a third intermediate body and a fifth compensating body, a fifth connecting body, a sixth connecting body and a sixth compensating body which are arranged on the third intermediate body in sequence and are parallel to each other; the third boom passes through the The fifth connecting body and the sixth connecting body are connected with the moving body, connected with the first fixed body through the fifth compensation body, and connected with the second fixed body through the sixth compensation body;

The fourth boom includes a fourth intermediate body and a seventh compensating body, a seventh connecting body, an eighth connecting body and an eighth compensating body that are arranged on the fourth intermediate body in sequence and are parallel to each other; the fourth boom passes through the The seventh connecting body and the eighth connecting body are connected with the moving body, connected with the first fixed body through the seventh compensation body, and connected with the second fixed body through the eighth compensation body;

The first boom, the second boom, the third boom, and the fourth boom are symmetrical about the center of the moving body in space, wherein the first boom and the third boom are distributed at 180 degrees, and the second boom and the The four booms are distributed 180 degrees;

All connecting bodies and compensating bodies are flexible hinges;

The moving mirror is connected with the displacement output end of the moving body in the symmetrical flexible support mechanism;

The output end of the moving mirror motion driving unit is connected with the displacement input end of the moving body in the symmetrical flexible support mechanism;

The output end of the moving mirror motion driving unit is connected with the displacement input end of the moving body in the symmetrical flexible support mechanism.

Further, the flexible hinge is a rounded straight beam type flexible hinge.

Further, the symmetrical flexible support mechanism is an integral structure, which is made of a whole piece of metal material with good elastic properties; the non-flexible hinge part is processed by mechanical milling processing technology, and the stress is relieved after processing; the flexible hinge part is made of EDM or WEDM.

Further, the metal material is beryllium bronze, tin bronze, silicon bronze or carbon spring steel.

Further, the laser output from the laser is divided into two beams of light by the beam splitter, which reach the moving mirror and the fixed mirror respectively. The two beams of light are reflected by the moving mirror and the fixed mirror and return to the original path. Signal;

The moving mirror motion feedback unit includes a sensor and a sensing circuit; the sensor is used to detect and collect the detection interference signal, perform photoelectric conversion on it, and output an electrical signal; the sensing circuit generates an interference pulse after processing the electrical signal, so the The interference pulse is input to the moving mirror motion control unit as the moving mirror position feedback signal;

The moving mirror motion control unit includes a feedback signal capture module and a feedback signal calculation module; the feedback signal capture module is used to capture the moving mirror position feedback signal generated by the moving mirror motion feedback unit; the feedback signal calculation module is used to feedback the position of the moving mirror The signal is controlled and processed to generate a control signal for controlling the magnitude and direction of the driving force generated by the moving mirror motion drive unit, so as to realize the closed-loop control of the moving mirror;

The moving mirror movement driving unit drives the moving body to reciprocate along the direction of the optical path according to the control signal.

Further, the moving mirror motion drive unit includes a linear motor and a linear motor base, and the linear motor is fixedly installed on the upper part of the scanning system base through the linear motor base; the linear motor includes a stator and a mover; the stator is fixed on the linear motor base; The magnet is connected with the displacement input end of the moving body in the symmetrical flexible support mechanism.

Beneficial effects of the present invention:

1. The present invention is suitable for time-modulated interference spectrometers. By designing a symmetrical flexible support mechanism with a special structure for the moving mirror in the moving mirror scanning system, the flexible hinge is used to realize motion transmission, which has the advantages of gapless transmission and frictionless, and is effective. The movement accuracy of the mechanism is guaranteed.

2. In the present invention, a single movable arm of the symmetrical flexible support mechanism forms a double parallelogram nested structure, which can effectively increase the travel of the movable mirror, and has a compensation function, which is beneficial to improve the spectral resolution of the imaging spectrometer.

3. The symmetrical flexible support mechanism in the present invention adopts a symmetrical design, including the symmetry of each parallelogram and each unit, which increases the reliability of movement and ensures the directional accuracy of the movement of the moving mirror.

4. In the present invention, the first movable arm, the second movable arm, the third movable arm and the fourth movable arm of the symmetrical flexible support mechanism are centrally symmetric with respect to the moving body in space, which can greatly reduce the inclination of the mirror surface of the moving mirror. and transverse shift, improve the modulation efficiency of the imaging spectrometer and increase the interference area.

5. In the present invention, the moving mirror drive unit adopts a fixed coil and moving magnet drive mode, which avoids the lead wire breakage caused by frequent pulling of the coil lead wire, and ensures the movement reliability of the entire system.

6. The present invention performs closed-loop control on the moving mirror to ensure the speed uniformity of the moving mirror.

7. The present invention has the advantages of accurate movement direction, uniform movement speed and large movement stroke, and is suitable for fine spectral detection.

8. The symmetrical flexible support mechanism in the present invention is an integral structure, which avoids errors caused by assembly.

9. The present invention has simple and compact structure, low cost and long service life.

Description of drawings

Figure 1 is a working principle diagram of a time-modulated interference spectrometer.

FIG. 2 is a schematic diagram of the overall system of the moving mirror scanning system of the interference spectrometer according to the present invention.

FIG. 3 is a schematic diagram of the overall structure of the moving mirror scanning system of the interference spectrometer according to the present invention.

FIG. 4 is a schematic structural diagram of the symmetrical flexible support mechanism in the present invention.

FIG. 5 is a schematic structural diagram of the base of the scanning system in the present invention.

6a-6d are respectively schematic structural diagrams of the first boom, the second boom, the third boom and the fourth boom in the present invention.

FIG. 7 is a schematic structural diagram of the rounded straight beam type flexible hinge in the present invention.

FIG. 8 is a schematic structural diagram of a moving mirror driving unit in the present invention.

FIG. 9 is a schematic diagram of the movement principle of the symmetrical flexible support mechanism in the present invention.

Description of reference numbers:

1 - moving mirror;

2- Symmetrical flexible support mechanism;

21-first boom; 211-first connecting body; 212-second connecting body; 213-first compensating body; 214-second compensating body; 215-first intermediate body;

22- the second boom; 221- the third connecting body; 222- the fourth connecting body; 223- the third compensating body; 224- the fourth compensating body; 225- the second intermediate body;

23 - the third boom; 231 - the fifth connecting body; 232 - the sixth connecting body; 233 - the fifth compensating body; 234 - the sixth compensating body; 235 - the third intermediate body;

24- the fourth boom; 241- the seventh connecting body; 242- the eighth connecting body; 243- the seventh compensating body; 244- the eighth compensating body; 245- the fourth intermediate body;

25-first fixed body; 26-second fixed body; 27-movement body;

3-Linear motor base;

4-scanning system base; 41-connection hole; 42-connection hole;

5-Linear motor; 51-Stator; 52-Motor.

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings.

As shown in Figures 2 and 3, the interferometric spectrometer moving mirror scanning system provided by the present invention includes a moving mirror 1, a fixed mirror, a laser, a beam splitter, a moving mirror motion feedback unit, a moving mirror motion control unit, and a symmetrical flexible support Mechanism, moving mirror motion drive unit, scanning system base 4.

The laser is used to provide a stable light source and generate a position detection interference signal for the scanning system. The laser output from the laser is divided into two beams of light by the beam splitter, which reach the moving mirror and the fixed mirror respectively. The two beams of light are reflected by the moving mirror and the fixed mirror and return to the original path. After the beam splitter, interference occurs, and the position detection interference signal is obtained;

The moving mirror motion feedback unit includes a sensor and a sensing circuit; the sensor is used to detect and collect position detection interference signals; the sensing circuit is used to perform photoelectric conversion and signal processing on the position detection interference signals detected and collected by the sensor to generate interference pulses, The interference pulse is used as the moving mirror position feedback signal;

The moving mirror motion control unit includes a feedback signal capture module and a feedback signal calculation module. The feedback signal capture module is used to capture the moving mirror position feedback signal generated by the moving mirror motion feedback unit, and the feedback signal calculation module uses the host computer to control and process the moving mirror position feedback signal (traditional PID control, robust control, adaptive Control or the latest intelligent control, etc.), realize the closed-loop control of the moving mirror 1, and generate a control signal for controlling the magnitude and direction of the driving force generated by the moving mirror drive unit, so as to ensure the speed of the moving mirror is stable.

The symmetrical flexible support mechanism 2 is used to support the moving mirror 1 .

The moving mirror motion drive unit includes a linear motor 5 and a linear motor base 3 . The linear motor base 3 is used to support the linear motor 5, and the linear motor 5 drives the moving mirror 1 to reciprocate along the optical path according to the control signal output by the moving mirror motion control unit; the scanning system base 4 is used to scan the entire interferometric spectrometer moving mirror scanning system It is fixed on the bottom plate of the interferometer, and is used to fix and support the symmetrical flexible support mechanism 2 and the moving mirror drive unit; the upper part of the scanning system base 4 is provided with a first connection hole 41, and the lower part is provided with a second connection hole 42; the first connection hole 41 is used to connect the fixed symmetrical flexible support mechanism 2 and the moving mirror drive unit; the second connection hole 42 is used to realize the connection with the interferometer.

As shown in FIGS. 3 , 4 and 5 , the symmetrical flexible support mechanism 2 is installed on the scanning system base 4 through the connecting hole 41 , and the symmetrical flexible support mechanism 2 includes a first movable arm 21 , a second movable arm 22 , and a third movable arm 21 . arm 23, fourth movable arm 24, first fixed body 25, second fixed body 26 and moving body 27;

The first fixed body 25 , the moving body 27 and the second fixed body 26 are sequentially distributed along the optical axis, and the geometric centers of the three are located on the optical axis; the first fixed body 25 and the second fixed body 26 are about the moving body 27 symmetry;

The first boom 21 , the second boom 22 , the third boom 23 , and the fourth boom 24 are arranged symmetrically with respect to the moving body 27 in the space, wherein the first boom 21 and the third boom 23 are 180 inches apart. degree distribution, the second boom 22 and the fourth boom 24 are distributed at 180 degrees;

The first boom 21 , the second boom 22 , the third boom 23 and the fourth boom 24 are identical in structure and size.

As shown in FIG. 6a, the first boom 21 includes a first connecting body 211, a second connecting body 212, a first compensating body 213, a second compensating body 214 and a first intermediate body 215; the first intermediate body 215 is a long strip The first connecting body 211 and the second connecting body 212 are symmetrically arranged in the middle of the first intermediate body 215, and the first compensating body 213 and the second compensating body 214 are symmetrically arranged at both ends of the first intermediate body 215; The spacing between the compensating body (213) and the first connecting body (211) is equal to the spacing between the second connecting body (212) and the second compensating body (214), and the specific spacing can be designed according to actual needs; the first The lengths of the compensating body (213) and the second compensating body (214) are the same, and the specific spacing can be designed according to actual needs; the lengths of the first connecting body (211) and the second connecting body (212) are the same, and the specific spacing can be based on actual needs. needs to be designed.

As shown in FIG. 6b, the second boom 22 includes a third connecting body 221, a fourth connecting body 222, a third compensating body 223, a fourth compensating body 224 and a second intermediate body 225; the second intermediate body 225 is a long strip The third connecting body 221 and the fourth connecting body 222 are symmetrically arranged in the middle of the second intermediate body 225 , and the third compensating body 223 and the fourth compensating body 224 are symmetrically arranged at both ends of the second intermediate body 225 .

As shown in FIG. 6c, the third boom 23 includes a fifth connecting body 231, a sixth connecting body 232, a fifth compensating body 233, a sixth compensating body 234 and a third intermediate body 235; the third intermediate body 235 is a long strip The fifth connecting body 231 and the sixth connecting body 232 are symmetrically arranged in the middle of the third intermediate body 235 , and the fifth compensating body 233 and the sixth compensating body 234 are symmetrically arranged on both ends of the third intermediate body 235 .

As shown in FIG. 6d, the fourth boom 24 includes a seventh connecting body 241, an eighth connecting body 242, a seventh compensating body 243, an eighth compensating body 244 and a fourth intermediate body 245; the fourth intermediate body 245 is a long strip The seventh connecting body 241 and the eighth connecting body 242 are symmetrically arranged in the middle of the fourth intermediate body 245 , and the seventh compensating body 243 and the eighth compensating body 244 are symmetrically arranged on both ends of the fourth intermediate body 245 .

The moving body 27 passes through the first connecting body 211, the second connecting body 212, the third connecting body 221, the fourth connecting body 222, the fifth connecting body 231, the sixth connecting body 232, the seventh connecting body 241, the eighth connecting body 242 are respectively connected with the first boom 21, the second boom 22, the third boom 23 and the fourth boom 24;

The first fixed body 25 is connected to the first boom 21 , the second boom 22 , the third boom 23 , the first boom 21 , the second boom 22 , the third boom 23 , Four boom 24 connections;

The second fixed body 26 is connected to the first boom 21 , the second boom 22 , the third boom 23 , the first boom 21 , the second boom 22 , the third boom 23 , the first boom 21 , the second boom 22 , the third boom 23 Four boom 24 connections;

The first connecting body 211 , the second connecting body 212 and the first intermediate body 215 on the first boom 21 form a first parallelogram, and the first compensating body 213 , the second compensating body 214 and the first intermediate body 215 form a second parallelogram. Parallelogram; the first parallelogram and the second parallelogram are nested within each other. The second boom 22 to the fourth boom 24 have the same structures as the first boom 21 , and will not be repeated here.

All connecting bodies and compensating bodies on the first boom 21 , the second boom 22 , the third boom 23 and the fourth boom 24 are flexible hinges. As shown in FIG. 7 , the first boom 21 includes the first boom 21 . The first connecting body 211 , the second connecting body 212 , the first compensating body 213 and the second compensating body 214 all use rounded straight beam type flexible hinges. All connecting bodies and compensating bodies included in the second boom 22 , the third boom 23 and the fourth boom 24 use rounded straight beam type flexible hinges.

The above-mentioned symmetrical flexible support mechanism 2 is an integral structure, and the entire mechanism including the flexible hinge is made of a whole piece of metal material with good elasticity (such as beryllium bronze, tin bronze, silicon bronze or carbon spring steel). . The non-flexible hinge part is processed by the traditional mechanical milling process, which is conducive to saving processing costs, and stress relief after processing can effectively reduce the influence of residual stress on the structural accuracy; the flexible hinge part is processed by EDM or other high-precision Processing technology (such as slow wire cutting process), the flexure hinges are all rounded straight beam flexible hinges; under the same driving force, rounded straight beam flexible hinges are more likely to produce larger corner offsets At the same time, it can better improve the stress concentration and improve the life of the mechanism.

As shown in FIG. 8 , the moving mirror drive unit includes a linear motor 5 and a linear motor base 3. The linear motor 5 is fixedly installed at the connection hole 41 of the scanning system base 4 through the linear motor base 3; the linear motor 5 includes a stator 51 and a mover 52. The stator 51 is composed of an outer yoke and a coil, and the stator 51 is fixed on the base 3 of the linear motor; the mover 52 is composed of a permanent magnet and an inner yoke, and the permanent magnet is connected to the displacement input end of the moving body 27 in the symmetrical flexible support mechanism 2 ; The moving mirror 1 is connected to the displacement output end of the moving body 27 of the support mechanism. Applying the driving voltage to the coil of the stator 51 will generate a magnetic field. The direction of the magnetic field will change with the direction of the current flowing through the coil. The magnetic fields generated by the permanent magnets of the mover 52 interact (attractive or repulsive forces). When the permanent magnet of the mover 52 and the coil of the stator 51 generate a magnetic force, the moving mirror 1 will be pushed to reciprocate along the direction of the optical path.

As shown in FIG. 9 , the working principle of the symmetrical flexible support mechanism 2 is described by taking a quarter of the symmetrical flexible support mechanism 2 as an example.

In the initial state, the compensating body and the connecting body on each boom are vertical to the corresponding intermediate body;

The linear motor 5 of the moving mirror drive unit in the interferometric spectrometer moving mirror scanning system drives the moving body 27 of the symmetrical flexible support mechanism 2 to move according to the output command of the moving mirror motion control unit, and the movement of the moving body 27 is transmitted to the first moving arm 21 The first connecting body 211 and the second connecting body 212 of the first connecting body 211 and the second connecting body 212 of the first boom 21 both generate a rotation with an angle of β;

Then, the movement of the first connecting body 211 and the second connecting body 212 of the first boom 21 is transmitted to the intermediate body 215 of the first boom 21 , and at this time, the intermediate body 215 of the first boom 21 will be parallel to the optical axis. The direction produces a displacement dz, and at the same time, it also moves to the side of the moving body 27, resulting in a side-shift displacement dx;

The motion of the intermediate body 215 of the first boom 21 is then transmitted to the first compensation body 213 and the second compensation body 214 of the first boom 21 , and the first compensation body 213 and the second compensation body 214 of the first boom 1 are both A rotation with an angle α is generated, and the moving mirror 1 moves a distance L along the direction of the optical path during this movement.

For the overall structure of the symmetric flexible support mechanism 2, since the first boom 21, the second boom 22, the third boom 23, and the fourth boom 24 are structurally consistent, and the first boom 21, The second boom 22 , the third boom 23 , and the fourth boom 24 have symmetry in spatial positions, so that the accuracy of the moving direction of the moving mirror 1 can be effectively ensured.

Claims (6)

1. A moving mirror scanning system of an interference spectrometer based on a symmetrical flexible support mechanism, comprising a moving mirror (1), a fixed mirror, a laser, a beam splitter, a moving mirror motion drive unit, a moving mirror motion control unit, and a moving mirror motion feedback a unit, a support mechanism for supporting the moving mirror (1), and a scanning system base (4); It is characterized by: The support mechanism is a symmetrical flexible support mechanism (2), which is installed on the scanning system base (4); the symmetrical flexible support mechanism (2) includes a first boom (21) and a second boom (22) , a third boom (23), a fourth boom (24), a first fixed body (25), a second fixed body (26) and a moving body (27); The first fixed body (25), the moving body (27) and the second fixed body (26) are sequentially distributed along the optical axis, and the geometric centers of the three are located on the optical axis; The two fixed bodies (26) are symmetrical about the moving body (27); The first boom (21), the second boom (22), the third boom (23), and the fourth boom (24) are the same in structure and size; The first boom (21) includes a first intermediate body (215), a first compensating body (213), a first connecting body (211), a second compensating body (213), a first connecting body (211), a a connecting body (212) and a second compensating body (214); the first boom (21) is connected with the moving body (27) through the first connecting body (211) and the second connecting body (212), The first compensation body (213) is connected with the first fixing body (25), and is connected with the second fixing body (26) through the second compensation body (214); In the initial state, the first compensating body (213), the first connecting body (211), the second connecting body (212), and the second compensating body (214) are all kept perpendicular to the first intermediate body (215); The distance between the first compensating body (213) and the first connecting body (211) is equal to the distance between the second connecting body (212) and the second compensating body (214); The lengths of the two compensating bodies (214) are equal; the lengths of the first connecting body (211) and the second connecting body (212) are equal; The second boom (22) includes a second intermediate body (225), a third compensating body (223), a third connecting body (221), a fourth compensating body (223), a third connecting body (221), and a third compensating body (223), a third connecting body (221), and a fourth parallel body (225) that are sequentially arranged on the second intermediate body (225). a connecting body (222) and a fourth compensating body (224); the second boom (22) is connected with the moving body (27) through the third connecting body (221) and the fourth connecting body (222), The third compensating body (223) is connected with the first fixing body (25), and is connected with the second fixing body (26) through the fourth compensating body (224); The third boom (23) includes a third intermediate body (235), a fifth compensating body (233), a fifth connecting body (231), a sixth compensating body (233), a fifth connecting body (231), and a fifth compensating body (233), a fifth connecting body (231), and a fifth compensating body (233), which are sequentially arranged on the third intermediate body (235) and are parallel to each other. a connecting body (232) and a sixth compensating body (234); the third boom (23) is connected to the moving body (27) through the fifth connecting body (231) and the sixth connecting body (232), The fifth compensating body (233) is connected with the first fixing body (25), and is connected with the second fixing body (26) through the sixth compensating body (234); The fourth boom (24) includes a fourth intermediate body (245) and a seventh compensating body (243), a seventh connecting body (241), and an eighth compensating body (243), a seventh connecting body (241), and an eighth parallel body that are sequentially arranged on the fourth intermediate body (245) and are parallel to each other. a connecting body (242) and an eighth compensating body (244); the fourth boom (24) is connected with the moving body (27) through the seventh connecting body (241) and the eighth connecting body (242), The seventh compensating body (243) is connected with the first fixing body (25), and is connected with the second fixing body (26) through the eighth compensating body (244); The first boom (21), the second boom (22), the third boom (23), and the fourth boom (24) are symmetrical about the center of the moving body (27) in space, wherein the first boom ( 21) 180-degree distribution with the third boom (23), and 180-degree distribution between the second boom (22) and the fourth boom (24); All connecting bodies and compensating bodies are flexible hinges; The moving mirror (1) is connected with the displacement output end of the moving body (27) in the symmetrical flexible support mechanism (2); The output end of the moving mirror motion driving unit is connected with the displacement input end of the moving body (27). 2 . The interferometric spectrometer moving mirror scanning system based on a symmetrical flexible support mechanism according to claim 1 , wherein the flexible hinge is a rounded straight beam type flexible hinge. 3 . 3. The interferometric spectrometer moving mirror scanning system based on a symmetrical flexible support mechanism according to claim 1 or 2, wherein the symmetrical flexible support mechanism is an integral structure, which is made of a whole piece of metal with good elastic properties. The non-flexible hinge part is processed by mechanical milling process, and the stress is relieved after processing; the flexible hinge part is processed by EDM or slow wire cutting process. 4. The interferometric spectrometer moving mirror scanning system based on a symmetric flexible support mechanism according to claim 3, wherein the metal material is beryllium bronze, tin bronze, silicon bronze or carbon spring steel. 5. The interferometric spectrometer moving mirror scanning system based on the symmetrical flexible support mechanism according to claim 4, is characterized in that: the laser output by the laser is divided into two beams of light by the beam splitter, which reach the moving mirror (1) and the fixed light respectively. mirror, the two beams of light are reflected by the moving mirror (1) and the fixed mirror and return to the original path, and interfere with the beam splitter to obtain the detection interference signal; The moving mirror motion feedback unit includes a sensor and a sensing circuit; the sensor is used to detect and collect the detection interference signal, perform photoelectric conversion on it, and output an electrical signal; the sensing circuit generates an interference pulse after processing the electrical signal, so the The interference pulse is input to the moving mirror motion control unit as the moving mirror position feedback signal; The moving mirror motion control unit includes a feedback signal capture module and a feedback signal calculation module; the feedback signal capture module is used to capture the moving mirror position feedback signal generated by the moving mirror motion feedback unit; the feedback signal calculation module is used to feedback the position of the moving mirror The signal is controlled and processed to generate a control signal for controlling the magnitude and direction of the driving force generated by the moving mirror motion drive unit, so as to realize the closed-loop control of the moving mirror (1); The moving mirror movement driving unit drives the moving body (27) to reciprocate along the direction of the optical path according to the control signal. 6. The interferometric spectrometer moving mirror scanning system based on a symmetric flexible support mechanism according to claim 5, wherein the moving mirror motion driving unit comprises a linear motor (5) and a linear motor base (3), and the linear motor (5) ) is fixedly installed on the upper part of the scanning system base (4) through the linear motor base (3); the linear motor (5) includes a stator (51) and a mover (52); the stator (51) is fixed on the linear motor base (3); The permanent magnet of the mover (52) is connected with the displacement input end of the moving body (27) in the symmetrical flexible support mechanism (2).

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