CN113299726A - Display substrate, manufacturing method thereof and display device - Google Patents
Display substrate, manufacturing method thereof and display device Download PDFInfo
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- CN113299726A CN113299726A CN202110709588.8A CN202110709588A CN113299726A CN 113299726 A CN113299726 A CN 113299726A CN 202110709588 A CN202110709588 A CN 202110709588A CN 113299726 A CN113299726 A CN 113299726A
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- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
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Abstract
The invention provides a display substrate, a manufacturing method thereof and a display device, and belongs to the technical field of display. The display substrate comprises a display area, the display area is provided with a fingerprint identification module and a display module, the display module comprises a plurality of light-emitting elements which are arranged in an array mode, and the light-emitting elements comprise a first electrode, a light-emitting layer and a second electrode which are sequentially arranged along the direction of a substrate base plate far away from the display substrate; the fingerprint identification module comprises a plurality of fingerprint identification elements which are arranged in an array mode, each fingerprint identification element comprises a third electrode, a photosensitive layer and a fourth electrode which are arranged in sequence, and the first electrode and the third electrode are located on the same layer and comprise the same material; and/or the second electrode and the fourth electrode are positioned on the same layer and comprise the same material. The invention can realize the fingerprint identification function in the display area of the display substrate.
Description
Technical Field
The invention relates to the technical field of display, in particular to a display substrate, a manufacturing method thereof and a display device.
Background
An Organic Light-Emitting Diode (OLED) display device has been classified as a next-generation display technology with great development prospect because of its advantages of thinness, lightness, wide viewing angle, active Light emission, continuously adjustable Light emission color, low cost, fast response speed, low energy consumption, low driving voltage, wide working temperature range, simple production process, high Light-Emitting efficiency, flexible display, etc.
Disclosure of Invention
The invention aims to provide a display substrate, a manufacturing method thereof and a display device, which can realize a fingerprint identification function in a display area of the display substrate.
To solve the above technical problem, embodiments of the present invention provide the following technical solutions:
on one hand, the display substrate comprises a display area, wherein the display area is provided with a fingerprint identification module and a display module, the display module comprises a plurality of light-emitting elements which are arranged in an array mode, and the light-emitting elements comprise a first electrode, a light-emitting layer and a second electrode which are sequentially arranged along the direction of a substrate far away from the display substrate; the fingerprint identification module comprises a plurality of fingerprint identification elements which are arranged in an array mode, each fingerprint identification element comprises a third electrode, a photosensitive layer and a fourth electrode which are arranged in sequence, and the first electrode and the third electrode are located on the same layer and comprise the same material; and/or the second electrode and the fourth electrode are positioned on the same layer and comprise the same material.
In some embodiments, the display substrate further includes a switching thin film transistor for controlling the fingerprint recognition element and a driving thin film transistor for driving the light emitting element to emit light, and each of the layers of the driving thin film transistor and the corresponding layer of the switching thin film transistor are respectively located in the same layer and include the same material.
In some embodiments, the display substrate further includes a plurality of rows of fingerprint identification gate lines and a plurality of columns of fingerprint identification signal reading lines on the substrate, the gate electrodes of the switching thin film transistors are connected to the fingerprint identification gate lines of the corresponding rows, and the source electrodes of the switching thin film transistors are connected to the fingerprint identification signal reading lines of the corresponding columns.
In some embodiments, the light emitting unit further comprises a first common transport layer between the first electrode and the light emitting layer, a second common transport layer between the second electrode and the light emitting layer;
the fingerprint identification element further comprises a third common transmission layer positioned between the third electrode and the photosensitive layer, and a fourth common transmission layer positioned between the fourth electrode and the photosensitive layer;
the first common transport layer is multiplexed into the third common transport layer; and/or
The second common transport layer is multiplexed into the fourth common transport layer.
In some embodiments, the display substrate includes a plurality of first repeating units arranged in an array, the first repeating units include a plurality of sub-pixels of different colors and the fingerprint identification element arranged in sequence in a first direction, and the first direction is parallel to an edge of the substrate.
In some embodiments, the fingerprint identification element is adjacent to a green sub-pixel of the plurality of sub-pixels.
In some embodiments, the size of the fingerprint identification element is the same as the size of the sub-pixel.
In some embodiments, the first electrode and the third electrode are in the same layer and comprise the same material; the second electrode and the fourth electrode are located on the same layer and comprise the same material.
In some embodiments, the display substrate includes a plurality of second repeating units arranged in an array, the second repeating units include a plurality of sub-pixels arranged in sequence in the first direction, and the fingerprint identification element is located in a gap between the sub-pixels.
In some embodiments, the fingerprint identification element has a portion that is staggered from a sub-pixel in the second repeating unit in a second direction that intersects the first direction.
In some embodiments, the first electrode and the third electrode are in the same layer and comprise the same material;
the third electrode is provided with the photosensitive layer on one side close to the substrate base plate, the fourth electrode is provided on one side close to the substrate base plate, the third electrode comprises a through hole, and an overlapping area exists between the orthographic projection of the through hole on the substrate base plate and the orthographic projection of the photosensitive layer on the substrate base plate.
In some embodiments, an orthographic projection of the through hole on the substrate base plate is entirely within an orthographic projection of the photosensitive layer on the substrate base plate.
In some embodiments, the first electrode is made of a light-reflecting conductive material;
the second electrode is made of transparent conductive materials.
In some embodiments, the donor material of the photosensitive layer comprises SubPc and/or CuPc and the acceptor material comprises C60 and/or C70.
An embodiment of the present invention provides a display device including the display substrate as described above.
The embodiment of the invention provides a manufacturing method of a display substrate, wherein the display substrate comprises a display area, the display area is provided with a fingerprint identification module and a display module, the display module comprises a plurality of light-emitting elements which are arranged in an array mode, and the light-emitting elements comprise a first electrode, a light-emitting layer and a second electrode which are sequentially arranged along the direction of a substrate base plate far away from the display substrate; the fingerprint identification module comprises a plurality of fingerprint identification elements arranged in an array, the fingerprint identification elements comprise a third electrode, a photosensitive layer and a fourth electrode which are sequentially arranged, and the method comprises the following steps:
forming the first electrode and the third electrode by adopting the same composition process; and/or the presence of a gas in the gas,
and forming the second electrode and the fourth electrode by adopting the same patterning process.
In some embodiments, the display substrate further includes a switching thin film transistor controlling the fingerprint recognition element and a driving thin film transistor driving the light emitting element to emit light, and the method includes:
and when each film layer of the driving thin film transistor is formed, forming a corresponding film layer of the switch thin film transistor through the same composition process.
The embodiment of the invention has the following beneficial effects:
in the scheme, the fingerprint identification module is positioned in the display area, and the display device does not need to reserve an independent position and space for the fingerprint identification module, so that the space of the display device with the display substrate can be saved, the screen occupation ratio of a display screen is improved, and the realization of narrow frames and light and thin products is facilitated; the first electrode and the third electrode are positioned on the same layer and comprise the same material; and/or the second electrode and the fourth electrode are positioned on the same layer and comprise the same material, so that the first electrode and the third electrode can be formed through one-time composition process, or the second electrode and the fourth electrode are formed through one-time composition process, the structure and the manufacturing process of the display substrate are simplified, and the mass production is high.
Drawings
FIG. 1 is a schematic diagram of a switch TFT connected to a fingerprint identification gate line and a fingerprint identification signal read line according to an embodiment of the present invention;
FIG. 2a and FIG. 2b are schematic plan views of a display substrate according to an embodiment of the invention;
FIG. 3 is a graph showing the response intensity of the fingerprint identification device to different wavelengths of light;
FIG. 4 is a schematic cross-sectional view of a display substrate according to an embodiment of the invention;
FIGS. 5a and 5b are schematic plan views of a display substrate according to another embodiment of the present invention;
FIG. 6 is a schematic cross-sectional view of a display substrate according to another embodiment of the present invention;
FIG. 7 is a schematic cross-sectional view of a fingerprint identification device according to an embodiment of the present invention;
FIG. 8 is a graph showing the intensity of the electrical signal generated by the fingerprint identification device according to the embodiment of the present invention when the light is of different intensities.
Reference numerals
01 substrate base plate
02 gate insulating layer
03 interlayer insulating layer
04 flat layer
05 pixel definition layer
06 first common transport layer
07 second common transport layer
08 second electrode
09 photosensitive layer
10 light emitting layer
111 third electrode
112 first electrode
12 fourth electrode
21 red sub-pixel
22 green sub-pixel
23 blue sub-pixel
24 fingerprint identification element
25 fingerprint identification gating line
26 fingerprint identification signal reading line
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
The embodiment of the invention provides a display substrate, a manufacturing method thereof and a display device, which can realize a fingerprint identification function in a display area of the display substrate.
The embodiment of the invention provides a display substrate, which comprises a display area, wherein the display area is provided with a fingerprint identification module and a display module, the display module comprises a plurality of light-emitting elements which are arranged in an array manner, and the light-emitting elements comprise a first electrode, a light-emitting layer and a second electrode which are sequentially arranged along the direction of a substrate far away from the display substrate; the fingerprint identification module comprises a plurality of fingerprint identification elements which are arranged in an array mode, each fingerprint identification element comprises a third electrode, a photosensitive layer and a fourth electrode which are arranged in sequence, and the first electrode and the third electrode are located on the same layer and comprise the same material; and/or the second electrode and the fourth electrode are positioned on the same layer and comprise the same material.
In the embodiment, the fingerprint identification module is positioned in the display area, and the display device does not need to reserve an independent position and space for the fingerprint identification module, so that the space of the display device with the display substrate can be saved, the screen occupation ratio of a display screen is improved, and the realization of narrow frames and light and thin products is facilitated; the first electrode and the third electrode are positioned on the same layer and comprise the same material; and/or the second electrode and the fourth electrode are positioned on the same layer and comprise the same material, so that the first electrode and the third electrode can be formed through one-time composition process, or the second electrode and the fourth electrode are formed through one-time composition process, the structure and the manufacturing process of the display substrate are simplified, and the mass production is high.
In some embodiments, the display substrate further includes a switching thin film transistor for controlling the fingerprint recognition element and a driving thin film transistor for driving the light emitting element to emit light, and each of the layers of the driving thin film transistor and the corresponding layer of the switching thin film transistor are respectively located in the same layer and include the same material.
In the embodiment, the fingerprint identification element is arranged in the display area of the display substrate, and the switch thin film transistor of the fingerprint identification element is manufactured while the driving thin film transistor is manufactured, so that the fingerprint identification element and the switch thin film transistor can be integrated in the display area of the display substrate, the fingerprint identification of any position of the display area is realized, and the thickness of the whole module device can be reduced because the fingerprint identification element is manufactured in the display substrate instead of being hung outside the display substrate; in addition, when each film layer of the driving thin film transistor is formed, the corresponding film layer of the switching thin film transistor is formed through the same composition process, so that the composition process times of the display substrate can be reduced, and the production cost of the display substrate is reduced.
As shown in fig. 4 and 6, the switching thin film transistor TFT1 and the driving thin film transistor TFT2 may be fabricated using LTPS (low temperature polysilicon) process, that is, the active layers of the switching thin film transistor and the driving thin film transistor are made of low temperature polysilicon, and of course, the active layers of the switching thin film transistor and the driving thin film transistor may be made of other semiconductor materials, such as amorphous silicon, metal oxide semiconductor, etc.
When a user touches the display substrate with a finger, light emitted by the light-emitting element is reflected by the finger and then emitted to the fingerprint identification element, the fingerprint identification element generates an electric signal according to the received light signal, and fingerprint identification is performed through the electric signal generated by the fingerprint identification signal.
As shown in fig. 4 and 6, the driving thin film transistor TFT2 may include an active layer, a gate insulating layer, a gate electrode, a source electrode, and a drain electrode; the switching thin film transistor TFT1 includes an active layer, a gate electrode, a gate insulating layer, a source electrode and a drain electrode, and it can be seen that the active layer of the driving thin film transistor TFT2 and the active layer of the switching thin film transistor TFT1 are disposed at the same layer, and the active layer of the driving thin film transistor TFT2 and the active layer of the switching thin film transistor TFT1 are made of the same material; the gate of the driving thin film transistor TFT2 and the gate of the switching thin film transistor TFT1 are arranged on the same layer, and the gate of the driving thin film transistor TFT2 and the gate of the switching thin film transistor TFT1 are made of the same material; the source and drain of the driving TFT2 are disposed on the same layer as the source and drain of the switching TFT1, and the source and drain of the driving TFT2 and the source and drain of the switching TFT1 are made of the same material.
In some embodiments, as shown in fig. 1, the display substrate further includes a plurality of rows of fingerprint identification gate lines 25 and a plurality of columns of fingerprint identification signal reading lines 26 on the substrate, the gate of the switching thin film transistor a is connected to the fingerprint identification gate line 25 of the corresponding row, and the source of the switching thin film transistor a is connected to the fingerprint identification signal reading line 26 of the corresponding column, wherein the fingerprint identification element may employ a photodiode B.
In the embodiment of the present invention, each fingerprint identification gate line is connected to each row of the switch thin film transistors in a one-to-one correspondence manner (i.e., one fingerprint identification gate line is connected to one row of the switch thin film transistors in a corresponding manner), and each fingerprint identification signal reading line is connected to each row of the switch thin film transistors in a one-to-one correspondence manner (i.e., one fingerprint identification signal reading line is connected to one row of the switch thin film transistors in a corresponding manner). Namely, the fingerprint identification strobe line extends transversely and the fingerprint identification signal read line extends longitudinally.
Of course, in some other embodiments of the present invention, each fingerprint identification gate line may be correspondingly connected to each row of the switch thin film transistors one by one (that is, one fingerprint identification gate line is correspondingly connected to one row of the switch thin film transistors), and each fingerprint identification signal reading line may be correspondingly connected to each row of the switch thin film transistors one by one (that is, one fingerprint identification signal reading line is correspondingly connected to one row of the switch thin film transistors). Namely, the fingerprint identification strobe line extends longitudinally, and the fingerprint identification signal read line extends transversely.
In some embodiments, the light emitting unit further comprises a first common transport layer between the first electrode and the light emitting layer, a second common transport layer between the second electrode and the light emitting layer;
the fingerprint identification element further comprises a third common transmission layer positioned between the third electrode and the photosensitive layer, and a fourth common transmission layer positioned between the fourth electrode and the photosensitive layer;
the first common transport layer is multiplexed into the third common transport layer; and/or
The second common transport layer is multiplexed into the fourth common transport layer.
Thus, the structure and process of the display substrate can be simplified, and the production cost of the display substrate can be reduced.
In some embodiments, as shown in fig. 2a and 2b, the display substrate includes a plurality of first repeating units (shown in a dashed line) arranged in an array, the first repeating units include a plurality of different color sub-pixels and the fingerprint identification element arranged in sequence in a first direction, and the first direction is parallel to an edge of the substrate.
In some embodiments, as shown in fig. 2a, the first repeating unit includes a red sub-pixel 21, a fingerprint identification element 24, a green sub-pixel 22 and a blue sub-pixel 23 sequentially arranged in a first direction, and fig. 3 is a diagram illustrating response intensities of the fingerprint identification element to light with different wavelengths, wherein an abscissa is a wavelength of the light and a unit is nm, and an ordinate is a response intensity of the fingerprint identification element. It can be seen that the response intensity of the fingerprint identification element to green light is the largest, therefore, the fingerprint identification element 24 is adjacent to the green sub-pixel 22 in the plurality of sub-pixels, which ensures that the signal intensity received by the fingerprint identification signal reading line is relatively large.
In another embodiment, as shown in fig. 2b, the first repeating unit includes a red sub-pixel 21, a fingerprint identification element 24, a green sub-pixel 22 and a blue sub-pixel 23 sequentially arranged in a first direction, the first repeating units in different rows are staggered, and fig. 3 is a schematic diagram of response intensities of the fingerprint identification element to light with different wavelengths, wherein the abscissa is the wavelength of the light, the unit is nm, and the ordinate is the response intensity of the fingerprint identification element. It can be seen that the response intensity of the fingerprint identification element to green light is the largest, therefore, the fingerprint identification element 24 is adjacent to the green sub-pixel 22 in the plurality of sub-pixels, which ensures that the signal intensity received by the fingerprint identification signal reading line is relatively large.
Of course, the material composition of the photosensitive layer in the fingerprint identification element may be adjusted to maximize the response intensity of the fingerprint identification element to light with other wavelengths, and in order to ensure the intensity of the electric signal generated by the fingerprint identification element, the fingerprint identification element is preferably disposed around the sub-pixel corresponding to the wavelength with the highest response intensity.
In this embodiment, the size of the fingerprint identification element is the same as the size of the sub-pixel, or the size of the fingerprint identification element is substantially the same as the size of the sub-pixel, so that the size of the fingerprint identification element is large, the fingerprint identification element can be ensured to receive enough light, the intensity of the generated electric signal is large, and the accuracy of fingerprint identification is improved.
As shown in fig. 4, in the present embodiment, the third electrode 111 of the fingerprint identification element and the first electrode 112 of the light emitting element are located on the same layer and comprise the same material; the second electrode 08 of the light emitting unit is located in the same layer as the fourth electrode of the fingerprint identification element and comprises the same material, and specifically, the second electrode 08 of the light emitting unit extends to the upper side of the fingerprint identification element and is reused as the fourth electrode of the fingerprint identification element. In addition, the first common transmission layer 06 of the light emitting element extends to the area where the fingerprint identification element is located and is multiplexed as the common transmission layer of the fingerprint identification element, and the second common transmission layer 07 of the light emitting element extends to the area where the fingerprint identification element is located and is multiplexed as the common transmission layer of the fingerprint identification element.
In this embodiment, the fingerprint identification element and the light emitting element share the second electrode 08, the second common transmission layer 07 and the first common transmission layer 06, which can simplify the manufacturing process and structure of the display substrate and improve the productivity of the display substrate.
In this embodiment, the first electrode 112 and the third electrode 111 are reflective electrodes made of reflective conductive materials, and the second electrode 08 is a transparent electrode made of transparent conductive materials. When a user touches the display substrate with a finger, light emitted by the light-emitting element is reflected by the finger and then penetrates through the second electrode 08 to irradiate the photosensitive layer 09 of the fingerprint identification element, the fingerprint identification element generates an electric signal according to the received optical signal, and fingerprint identification is performed through the electric signal generated by the fingerprint identification signal.
In some embodiments, as shown in fig. 5a and 5b, the display substrate includes a plurality of second repeating units (shown in a dashed line box) arranged in an array, the second repeating units include a plurality of sub-pixels arranged in sequence in the first direction, and the fingerprint identification element is located in a gap between the sub-pixels.
The fingerprint recognition element has a portion staggered from the sub-pixel in the second repeating unit in a second direction, which intersects the first direction.
In a specific example, the second repeating unit includes a red sub-pixel 21, a green sub-pixel 22, and a blue sub-pixel 23 sequentially arranged in the first direction, and the fingerprint identification element 24 is located at a gap between two adjacent rows of sub-pixels, so that the fingerprint identification element 24 does not occupy a pixel position, and the aperture ratio of the display substrate can be improved.
In this embodiment, four fingerprint identification elements can be arranged around each sub-pixel, and the number of the fingerprint identification elements is more, so that the accuracy of fingerprint identification can be improved, and the safety of fingerprint identification is improved. Of course, in other embodiments of the present invention, the number of fingerprint identification elements may be reduced as needed to reduce the cost.
The fingerprint identification elements 24 may be uniformly distributed on the display substrate or may be distributed only around a portion of the sub-pixels. Fig. 3 is a diagram illustrating the response intensity of the fingerprint identification device to light with different wavelengths, wherein the abscissa is the wavelength of light in nm and the ordinate is the response intensity of the fingerprint identification device. It can be seen that the response intensity of the fingerprint identification element to green light is the greatest, and therefore, the fingerprint identification element 24 can be adjacent to the green sub-pixel 22 in the plurality of sub-pixels, which can ensure that the signal intensity received by the fingerprint identification signal reading line is relatively large.
Of course, the material composition of the photosensitive layer in the fingerprint identification element may be adjusted to maximize the response intensity of the fingerprint identification element to light with other wavelengths, and in order to ensure the intensity of the electric signal generated by the fingerprint identification element, the fingerprint identification element is preferably disposed around the sub-pixel corresponding to the wavelength with the highest response intensity.
In the present embodiment, as shown in fig. 5a and 5b, the shapes of the sub-pixels and the fingerprint recognition element may be various, and are not limited to the shapes shown in fig. 5a and 5 b.
In this embodiment, as shown in fig. 6, the first electrode 112 and the third electrode 111 are located on the same layer and comprise the same material; the photosensitive layer 09 is disposed on a side of the third electrode 111 close to the substrate 01, the fourth electrode 12 is disposed on a side of the photosensitive layer 09 close to the substrate 01, the third electrode 111 includes a through hole, and an overlapping region exists between an orthographic projection of the through hole on the substrate 01 and an orthographic projection of the photosensitive layer 09 on the substrate 01.
In this embodiment, the first electrode 112 and the third electrode 111 are reflective electrodes made of reflective conductive materials, and the second electrode 08 is a transparent electrode made of transparent conductive materials. When a user touches the display substrate with a finger, light emitted by the light-emitting element is reflected by the finger and then penetrates through the through holes of the second electrode 08 and the third electrode 111 to be emitted to the photosensitive layer 09 of the fingerprint identification element, the fingerprint identification element generates an electric signal according to the received optical signal, and fingerprint identification is performed through the electric signal generated by the fingerprint identification signal.
The fourth electrode 12 of the fingerprint identification element is connected with the source electrode of the switch thin film transistor, and the electric signal generated by the photosensitive layer 09 is transmitted to the fingerprint identification signal reading line through the switch thin film transistor, so that fingerprint identification is performed by the fingerprint identification circuit.
Preferably, the orthographic projection of the through hole on the substrate is completely positioned in the orthographic projection of the photosensitive layer 09 on the substrate, so that the photosensitive layer 09 can receive enough light to ensure the accuracy of fingerprint identification. In addition, in order to ensure that the photosensitive layer 09 can receive enough light, the luminescent layer 10 is not arranged above the photosensitive layer, so that the luminescent layer 10 can be prevented from shielding the light.
Fig. 7 is a schematic cross-sectional view of a fingerprint identification element according to an embodiment of the present invention, as shown in fig. 7, the fingerprint identification element includes a third electrode 111, a first common transmission layer 06, a photosensitive layer 09, a second common transmission layer 07, and a fourth electrode 12, which are sequentially stacked, wherein the third electrode 111 is a reflective electrode, the fourth electrode 12 is a transparent electrode, a donor material of the photosensitive layer 09 may include SubPc and/or CuPc, and an acceptor material includes C60 and/or C70.
In a specific example, the fourth electrode 12 may adopt a stack structure of Mg/Ag, the third electrode 111 may adopt a stack structure of ITO/Ag/ITO, the donor material of the photosensitive layer 09 may include SubPc, and the acceptor material includes C60; alternatively, the donor material of the photosensitive layer 09 may include CuPc, and the acceptor material includes C60; alternatively, the donor material of the photosensitive layer 09 may include SubPc, and the acceptor material includes C70; alternatively, the donor material of the photosensitive layer 09 may include SubPc, and the acceptor material includes C70; alternatively, the donor material of the photosensitive layer 09 may include CuPc and the acceptor material includes C70.
In the production of the photosensitive layer 09, the donor material and the acceptor material may be separately evaporated, or the donor material and the acceptor material may be simultaneously evaporated, preferably, the donor material and the acceptor material may be simultaneously evaporated, so that the contact area between the donor material and the acceptor material may be relatively large.
Fig. 8 is a schematic diagram of the intensity of the electrical signal generated by the fingerprint identification device in different intensities of light according to the embodiment of the present invention, wherein the abscissa is the voltage and the ordinate is the intensity of the received light. It can be seen that the fingerprint identification element of the embodiment has high light-dark current ratio, lower dark current and better device performance.
In addition, the wavelength band to which the fingerprint identification element responds can be adjusted by adjusting the materials included in the donor material and the receptor material, as well as the film thickness.
In this embodiment, the display substrate further includes a protection layer covering the fingerprint identification module for protecting the fingerprint identification module. The protective layer needs to have a certain hardness and insulating ability to ensure that the force of pressing the fingerprint can be transmitted to the fingerprint identification element.
An embodiment of the present invention provides a display device including the display substrate as described above. In this embodiment, the display substrate may specifically be an OLED display substrate, and the substrate 01 may be a flexible substrate, such as a PI (polyimide) substrate.
The display device includes but is not limited to: radio frequency unit, network module, audio output unit, input unit, sensor, display unit, user input unit, interface unit, memory, processor, and power supply. It will be appreciated by those skilled in the art that the above described configuration of the display device does not constitute a limitation of the display device, and that the display device may comprise more or less of the components described above, or some components may be combined, or a different arrangement of components. In the embodiment of the present invention, the display device includes, but is not limited to, a display, a mobile phone, a tablet computer, a television, a wearable electronic device, a navigation display device, and the like.
The display device may be: the display device comprises a television, a display, a digital photo frame, a mobile phone, a tablet personal computer and any other product or component with a display function, wherein the display device further comprises a flexible circuit board, a printed circuit board and a back plate.
The embodiment of the invention provides a manufacturing method of a display substrate, wherein the display substrate comprises a display area, the display area is provided with a fingerprint identification module and a display module, the display module comprises a plurality of light-emitting elements which are arranged in an array mode, and the light-emitting elements comprise a first electrode, a light-emitting layer and a second electrode which are sequentially arranged along the direction of a substrate base plate far away from the display substrate; the fingerprint identification module comprises a plurality of fingerprint identification elements arranged in an array, the fingerprint identification elements comprise a third electrode, a photosensitive layer and a fourth electrode which are sequentially arranged, and the method comprises the following steps:
forming the first electrode and the third electrode by adopting the same composition process; and/or the presence of a gas in the gas,
and forming the second electrode and the fourth electrode by adopting the same patterning process.
In the embodiment, the fingerprint identification module is positioned in the display area, and the display device does not need to reserve an independent position and space for the fingerprint identification module, so that the space of the display device with the display substrate can be saved, the screen occupation ratio of a display screen is improved, and the realization of narrow frames and light and thin products is facilitated; the first electrode and the third electrode are positioned on the same layer and comprise the same material; and/or the second electrode and the fourth electrode are positioned on the same layer and comprise the same material, so that the first electrode and the third electrode can be formed through one-time composition process, or the second electrode and the fourth electrode are formed through one-time composition process, the structure and the manufacturing process of the display substrate are simplified, and the mass production is high.
In some embodiments, the display substrate further includes a switching thin film transistor controlling the fingerprint recognition element and a driving thin film transistor driving the light emitting element to emit light, and the method includes:
and when each film layer of the driving thin film transistor is formed, forming a corresponding film layer of the switch thin film transistor through the same composition process.
In the embodiment, the fingerprint identification element is arranged in the display area of the display substrate, and the switch thin film transistor of the fingerprint identification element is manufactured while the driving thin film transistor is manufactured, so that the fingerprint identification element and the switch thin film transistor can be integrated in the display area of the display substrate, the fingerprint identification of any position of the display area is realized, and the thickness of the whole module device can be reduced because the fingerprint identification element is manufactured in the display substrate instead of being hung outside the display substrate; in addition, when each film layer of the driving thin film transistor is formed, the corresponding film layer of the switching thin film transistor is formed through the same composition process, so that the composition process times of the display substrate can be reduced, and the production cost of the display substrate is reduced.
As shown in fig. 4 and 6, the driving thin film transistor TFT2 may include an active layer, a gate insulating layer, a gate electrode, a source electrode, and a drain electrode; the switching thin film transistor TFT1 includes an active layer, a gate electrode, a gate insulating layer, a source electrode and a drain electrode, and it can be seen that the active layer of the driving thin film transistor TFT2 and the active layer of the switching thin film transistor TFT1 are disposed at the same layer, and the active layer of the driving thin film transistor TFT2 and the active layer of the switching thin film transistor TFT1 are made of the same material and can be formed by a one-step patterning process; the gate of the driving thin film transistor TFT2 and the gate of the switching thin film transistor TFT1 are arranged on the same layer, and the gate of the driving thin film transistor TFT2 and the gate of the switching thin film transistor TFT1 are made of the same material and can be formed by a one-step composition process; the source and drain of the driving TFT2 are disposed on the same layer as the source and drain of the switching TFT1, and the source and drain of the driving TFT2 and the source and drain of the switching TFT1 are made of the same material and may be formed by a single patterning process.
In some embodiments, as shown in fig. 2a and 2b, the display substrate includes a plurality of first repeating units (shown in a dashed line) arranged in an array, the first repeating units include a plurality of different color sub-pixels and the fingerprint identification element arranged in sequence in a first direction, and the first direction is parallel to an edge of the substrate.
As shown in fig. 4, the method for manufacturing a display substrate of the present embodiment includes: forming gates of the TFT1 and the TFT2 on the base substrate 01 by a one-time patterning process; forming a gate insulating layer 02; forming active layers of the TFT1 and the TFT2 on the gate insulating layer 02 by a one-time patterning process; forming an interlayer insulating layer 03; source and drain electrodes of the TFT1 and the TFT2 are formed on the interlayer insulating layer 03 by a single patterning process; forming a flat layer 04; forming a first electrode 112 and a third electrode 111 on the planarization layer 04 by a one-time patterning process; forming a pixel defining layer 05; evaporating a first common transmission layer 06; evaporating a light-emitting layer 10 in the region where the sub-pixel is located; depositing a photosensitive layer 09 on the area where the fingerprint identification element is located; evaporating a second common transmission layer 07; the second electrode 08 is evaporated. And then, forming an encapsulation film layer, and forming film layers such as a black matrix on the encapsulation film layer.
In some embodiments, as shown in fig. 5a and 5b, the display substrate includes a plurality of second repeating units (shown in a dashed line box) arranged in an array, the second repeating units include a plurality of sub-pixels arranged in sequence, and the fingerprint identification element is located in a gap between the sub-pixels.
As shown in fig. 6, the method for manufacturing a display substrate of the present embodiment includes: forming gates of the TFT1 and the TFT2 on the base substrate 01 by a one-time patterning process; forming a gate insulating layer 02; forming active layers of the TFT1 and the TFT2 on the gate insulating layer 02 by a one-time patterning process; forming an interlayer insulating layer 03; source and drain electrodes of the TFT1 and the TFT2 are formed on the interlayer insulating layer 03 by a single patterning process; forming a fourth electrode 12; evaporating a photosensitive layer 09; forming a flat layer 04; forming a first electrode 112 and a third electrode 111 on the planarization layer 04 by a one-time patterning process; forming a pixel defining layer 05; evaporating a first common transmission layer 06; evaporating a light-emitting layer 10 in the region where the sub-pixel is located; evaporating a second common transmission layer 07; the second electrode 08 is evaporated. And then, forming an encapsulation film layer, and forming film layers such as a black matrix on the encapsulation film layer.
The light-emitting layer 10 is not evaporated above the third electrode 111, so that the light-emitting layer 10 can be prevented from shielding light, and the photosensitive layer 09 can receive enough light.
In a specific example, the fourth electrode 12 may adopt a stack structure of Mg/Ag, the third electrode 111 may adopt a stack structure of ITO/Ag/ITO, the donor material of the photosensitive layer 09 may include SubPc, and the acceptor material includes C60; alternatively, the donor material of the photosensitive layer 09 may include CuPc, and the acceptor material includes C60; alternatively, the donor material of the photosensitive layer 09 may include SubPc, and the acceptor material includes C70; alternatively, the donor material of the photosensitive layer 09 may include SubPc, and the acceptor material includes C70; alternatively, the donor material of the photosensitive layer 09 may include CuPc and the acceptor material includes C70.
In the production of the photosensitive layer 09, the donor material and the acceptor material may be separately evaporated, or the donor material and the acceptor material may be simultaneously evaporated, preferably, the donor material and the acceptor material may be simultaneously evaporated, so that the contact area between the donor material and the acceptor material may be relatively large.
It should be noted that, in the present specification, all the embodiments are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the embodiments, since they are substantially similar to the product embodiments, the description is simple, and the relevant points can be referred to the partial description of the product embodiments.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present disclosure, and all the changes or substitutions should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (15)
1. A display substrate is characterized by comprising a display area, wherein the display area is provided with a fingerprint identification module and a display module, the display module comprises a plurality of light-emitting elements which are arranged in an array manner, and the light-emitting elements comprise a first electrode, a light-emitting layer and a second electrode which are sequentially arranged along the direction of a substrate far away from the display substrate; the fingerprint identification module comprises a plurality of fingerprint identification elements which are arranged in an array mode, each fingerprint identification element comprises a third electrode, a photosensitive layer and a fourth electrode which are arranged in sequence, and the first electrode and the third electrode are located on the same layer and comprise the same material; and/or the second electrode and the fourth electrode are positioned on the same layer and comprise the same material.
2. The display substrate according to claim 1, further comprising a switching thin film transistor for controlling the fingerprint recognition device and a driving thin film transistor for driving the light emitting device to emit light, wherein each layer of the driving thin film transistor and a corresponding layer of the switching thin film transistor are respectively located on a same layer and comprise a same material.
3. The display substrate of claim 2, further comprising a plurality of rows of fingerprint identification gate lines and a plurality of columns of fingerprint identification signal readout lines on the substrate, wherein the gate electrodes of the switching thin film transistors are connected to the fingerprint identification gate lines of the corresponding rows, and the source electrodes of the switching thin film transistors are connected to the fingerprint identification signal readout lines of the corresponding columns.
4. The display substrate according to claim 1, wherein the light-emitting unit further comprises a first common transport layer between the first electrode and the light-emitting layer, a second common transport layer between the second electrode and the light-emitting layer;
the fingerprint identification element further comprises a third common transmission layer positioned between the third electrode and the photosensitive layer, and a fourth common transmission layer positioned between the fourth electrode and the photosensitive layer;
the first common transport layer is multiplexed into the third common transport layer; and/or
The second common transport layer is multiplexed into the fourth common transport layer.
5. The display substrate of claim 1, wherein the display substrate comprises a plurality of first repeating units arranged in an array, the first repeating units comprise a plurality of different color sub-pixels and the fingerprint identification element arranged in sequence in a first direction, and the first direction is parallel to an edge of the substrate.
6. The display substrate of claim 5, wherein the fingerprint identification element is adjacent to a green subpixel of the plurality of subpixels.
7. The display substrate of claim 5, wherein the fingerprint identification element has a size that is the same as a size of the sub-pixel.
8. The display substrate of claim 1, wherein the display substrate comprises a plurality of second repeating units arranged in an array, the second repeating units comprise a plurality of sub-pixels arranged in sequence in the first direction, and the fingerprint identification element is located in a gap between the sub-pixels.
9. The display substrate according to claim 8, wherein the fingerprint recognition element has a portion which is shifted from the sub-pixel in the second repeating unit in a second direction, the second direction intersecting the first direction.
10. The display substrate according to claim 8, wherein the first electrode and the third electrode are located in the same layer and comprise the same material;
the third electrode is provided with the photosensitive layer on one side close to the substrate base plate, the fourth electrode is provided on one side close to the substrate base plate, the third electrode comprises a through hole, and an overlapping area exists between the orthographic projection of the through hole on the substrate base plate and the orthographic projection of the photosensitive layer on the substrate base plate.
11. The display substrate of claim 10, wherein an orthographic projection of the via on the substrate is entirely within an orthographic projection of the photosensitive layer on the substrate.
12. The display substrate according to any one of claims 1 to 11,
the first electrode is made of a reflective conductive material;
the second electrode is made of transparent conductive materials.
13. The display substrate according to any one of claims 1 to 11,
the donor material of the photosensitive layer comprises SubPc and/or CuPc, and the acceptor material comprises C60 and/or C70.
14. A display device comprising the display substrate according to any one of claims 1 to 13.
15. The manufacturing method of the display substrate is characterized in that the display substrate comprises a display area, the display area is provided with a fingerprint identification module and a display module, the display module comprises a plurality of light-emitting elements which are arranged in an array mode, and the light-emitting elements comprise a first electrode, a light-emitting layer and a second electrode which are sequentially arranged along the direction of a substrate far away from the display substrate; the fingerprint identification module comprises a plurality of fingerprint identification elements arranged in an array, the fingerprint identification elements comprise a third electrode, a photosensitive layer and a fourth electrode which are sequentially arranged, and the method comprises the following steps:
forming the first electrode and the third electrode by adopting the same composition process; and/or the presence of a gas in the gas,
forming the second electrode and the fourth electrode by adopting the same composition process;
the display substrate further comprises a switch thin film transistor for controlling the fingerprint identification element and a driving thin film transistor for driving the light emitting element to emit light, and the method comprises the following steps:
and when each film layer of the driving thin film transistor is formed, forming a corresponding film layer of the switch thin film transistor through the same composition process.
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| CN202110709588.8A CN113299726A (en) | 2021-06-25 | 2021-06-25 | Display substrate, manufacturing method thereof and display device |
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| CN202110709588.8A CN113299726A (en) | 2021-06-25 | 2021-06-25 | Display substrate, manufacturing method thereof and display device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115100962A (en) * | 2022-06-28 | 2022-09-23 | 云谷（固安）科技有限公司 | Display panel and display device |
| CN115722282A (en) * | 2022-11-15 | 2023-03-03 | 上海天马微电子有限公司 | Microfluidic substrate, microfluidic device and driving method thereof |
| WO2024088230A1 (en) * | 2022-10-27 | 2024-05-02 | 维沃移动通信有限公司 | Display module and electronic device |
-
2021
- 2021-06-25 CN CN202110709588.8A patent/CN113299726A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115100962A (en) * | 2022-06-28 | 2022-09-23 | 云谷（固安）科技有限公司 | Display panel and display device |
| CN115100962B (en) * | 2022-06-28 | 2024-05-17 | 云谷（固安）科技有限公司 | Display panel and display device |
| WO2024088230A1 (en) * | 2022-10-27 | 2024-05-02 | 维沃移动通信有限公司 | Display module and electronic device |
| CN115722282A (en) * | 2022-11-15 | 2023-03-03 | 上海天马微电子有限公司 | Microfluidic substrate, microfluidic device and driving method thereof |
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