CN113189119A - Internal defect detection device for medical optical element - Google Patents
Internal defect detection device for medical optical element Download PDFInfo
- Publication number
- CN113189119A CN113189119A CN202110483386.6A CN202110483386A CN113189119A CN 113189119 A CN113189119 A CN 113189119A CN 202110483386 A CN202110483386 A CN 202110483386A CN 113189119 A CN113189119 A CN 113189119A
- Authority
- CN
- China
- Prior art keywords
- light
- optical element
- polarized
- interference
- medical optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
- G01N2021/9583—Lenses
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The application provides a medical optical element internal defect detection device, which comprises a light source module and a shearing interference module, wherein the light source module comprises a halogen light source, a color filter, a plano-convex lens, a first polaroid and a first plane mirror which are sequentially arranged along a light path; the shearing interference module comprises a Savart prism, a second plane mirror, an 1/4 wave plate, a second polaroid and a CCD camera which are sequentially arranged along a light path, wherein the medical optical element to be detected is arranged on the light path between the first plane mirror and the Savart prism; based on the technical scheme of this application, carry the polarized light L of medical optical element profile information that awaits measuring after taking place to cut and phase shift and interfere, lead to interfering the light intensity to have strong contrast and change, embody in the phase diagram just compare in ordinary optical imaging, the grey scale change of phase diagram is more obvious, can determine rapidly whether this medical optical element has inside printing opacity defect.
Description
Technical Field
The application relates to the technical field of medical optical element detection, in particular to a detection device for internal light transmission defects of a medical optical element based on optics
Background
Medical optical components, which generally include organic glass, optical lenses, etc., are common procurement items in hospitals, such medical optical components are often very thin in thickness, such as contact lenses, and generally have high precision quality requirements, and when the medical optical components are procured back to the hospitals, the hospitals have special departments for detecting the quality of the optical components, wherein one aspect of detection is defect detection of the optical components.
Generally, the defects of the medical optical element can be roughly divided into edge defects and internal defects, wherein the edge defects mainly include common defects such as edge fragments and burrs, and the internal defects mainly include common defects such as bubbles, black spots, holes and scars. The most widely used inspection instrument in hospitals is a projection enlarger, which can quickly inspect the edges and surface flaws of organic glass or lenses by obtaining the projection enlargement result of medical optical elements, and the quality defect inspection for internal defects also often adopts an optical imaging method to analyze, and uses the image obtained by optical imaging to process the image, and judges whether there is internal defect by means of gray scale or brightness contrast.
The optical imaging method can ensure relatively high detection precision for detecting the defects such as black spots and the like which are not transparent, but for some special internal defects such as bubbles and other transparent defects, the gray scale change of the image is not obvious, the naked eye cannot accurately judge whether the defects exist, the precision of the optical imaging method is insufficient, and the problem of misjudgment is easy to occur.
Therefore, in view of the above internal light transmission defect of the medical optical element, a new detection method is urgently needed to make up for the deficiency of the precision of the common optical imaging method, and the application is directed to solving the technical problem.
Object of the Invention
In order to solve the technical problem, the application provides a medical optical element internal defect detection device, which performs shearing and phase-shift interference on light carrying contour information of a medical optical element to be detected, converts an interference pattern into a phase pattern based on a five-step phase shift method, and detects whether the medical optical element to be detected contains an internal light transmission defect according to gray scale change of the phase pattern.
Therefore, the application provides a medical optical element internal defect detection device for detecting whether the medical optical element has a light transmission defect or not, which is characterized by comprising a light source module and a shearing interference module, wherein the light source module and the shearing interference module are arranged in the medical optical element
The light source module comprises a halogen light source (1), a color filter (2), a plano-convex lens (3), a first polaroid (4) and a first plane mirror (5) which are arranged along a light path in sequence;
the shearing interference module comprises a Savart prism (6), a second plane mirror (7), an 1/4 wave plate (8), a second polaroid (9) and a CCD camera (10) which are sequentially arranged along a light path, and the shearing distance of the Savart prism is delta X;
the light source path of the medical optical element internal defect detection device is as follows:
light waves emitted by the halogen light source (1) enter the plano-convex lens (3) through the color filter (2) to form parallel beams with identical scheduling, after the parallel beams enter the first polaroid (4), the first polaroid (4) is used for converting the parallel beams in the non-polarized state into a linear polarized state of 0 degree to form polarized light L, and then the polarized light L is reflected to the shearing interference module through the first plane mirror (5);
the medical optical element to be measured is arranged on a light path between the first plane mirror (5) and the Savart prism (6);
the polarized light L entering the Savart prism (6) carries the contour information of the medical optical element, the polarized light L coming out of the Savart prism (6) is cut into oe polarized light L1 and eo polarized light L2 with two mutually perpendicular polarization states, and the wave front of L1 is displaced to the left by a cutting distance delta X.
The two polarized lights L1 and L2 are reflected to a phase shift mechanism formed by a 1/4 wave plate (8) and a second polarizing plate (9) through a second plane mirror (7) to generate phase shift interference, a CCD camera (10) shoots and obtains interference patterns of the polarized lights L1 and L2, the interference patterns are converted into phase patterns based on a five-step phase shift method, and whether the medical optical element to be detected contains internal light transmission defects or not is detected according to the gray scale change of the phase patterns.
Preferably, the color filter (2) is used to increase the co-scheduling of the halogen light source to prevent the polarized light L1 and L2 from normally interfering when the shearing distance Δ X of the Savart prism is too large.
Preferably, the Savart prism (6) includes two identical birefringent crystals, the light wave is divided into two mutually perpendicular polarization states of e light and o light after passing through the first birefringent crystal, the two polarization states of the two polarization lights are mutually converted after passing through the second birefringent crystal to form mutually perpendicular polarization states of oe polarized light and eo polarized light, the oe polarized light and the eo polarized light are sheared along a diagonal, and a transverse shearing amount between the oe polarized light and the oe polarized light is Δ X.
Preferably, the working principle of the "five-step phase shift method" is as follows:
when two polarized lights interfere, the interference light intensity I can be expressed as:
wherein, I1And I2Indicating the light intensity of the two polarized lights and phi the phase of the two polarized lights.
Let I0＝I1+I2，
The above formula may be further equivalent to:
I＝I0(1+γ cosφ)
1/4, a phase shift mechanism composed of a wave plate (8) and a second polarizing plate (9) makes the polarized light L1 and L2 perform phase shift interference, and the rotation angle alpha/2 of the second polarizing plate (9) can be converted into phase shift interference of a phase shift angle alpha;
let α ═ pi, — pi/2, 0, pi/2, and pi, respectively, that is, by rotating the second polarizing plate (9) five times, phase shift is carried out, and the following equations hold:
I1＝I0(1+γ cos(φ+π))
I3＝I0(1+γ cosφ)
I5＝I0(1+γ cos(φ-π))
wherein, I1、I2、I3、I4And I5Respectively representing the interference light intensity corresponding to the five phase shift angles;
by combining the above five equations, we can get:
the phase quantity phi can be obtained by solving the formula, so that a phase diagram can be drawn according to the phase quantity information of each point of the interference diagram, and the conversion from the interference diagram to the phase diagram is completed.
The beneficial effect of this application is:
the application provides a new optical detection technical idea to detect the internal light transmission defect of a medical optical element, a Savart prism (6) is adopted to cut and interfere polarized light, a phase shift mechanism is utilized to perform phase shift interference on the cut eo light and the cut oe light, phase amount information of an interference pattern is solved based on a five-step phase shift method, so that the interference pattern is converted into a phase pattern, the phase amounts of a normal medical optical element and the medical optical element with the light transmission defect are different, whether the medical optical element to be detected has the internal light transmission defect or not is difficult to distinguish through common optical imaging, but based on the technical scheme of the application, the polarized light L carrying the profile information of the medical optical element to be detected causes strong contrast change of interference light intensity after being cut and subjected to phase shift interference, and is reflected in the phase pattern compared with common optical imaging, the gray scale change of the phase diagram is more obvious, that is, considering that the internal light transmission defect of the medical optical element can influence the profile information of the medical optical element, whether the medical optical element to be detected has the internal light transmission defect can not be detected by the common optical imaging technology, and by adopting the technical scheme of the application, whether the medical optical element has the internal light transmission defect can be quickly determined by observing the gray scale change of the phase diagram after shearing and phase shift interference.
Drawings
FIG. 1 is a schematic structural diagram of a detection device of the present application;
FIG. 2 is an optical schematic of the Savart prism of the present application;
FIG. 3a is a diagram of a generic optical image of a contact lens having an internal transmission defect;
FIG. 3b is a phase diagram of a contact lens having an internal transmission defect obtained according to the present disclosure;
FIG. 3c is an enlarged partial view of FIG. 3 a;
FIG. 3d is an enlarged partial view of FIG. 3 b;
FIG. 3e is a schematic diagram of the vertical gray scale change of FIG. 3 a;
fig. 3f is a schematic diagram of vertical gray scale change of fig. 3 b.
Detailed Description
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
The technical scheme of the patent for the internal defect detection device of the medical optical element is described by taking the contact lens as an example, as is well known, the contact lens is an auxiliary tool which is commonly applied in medicine and is used for correcting vision, the advantages of the contact lens are self-evident compared with common lenses, more and more people with vision disorder select to go to a hospital to check vision and buy lenses, and considering that the medical optical element needs to be in contact with eyes of patients for a long time, quality detection has very important influence on normal use of the contact lens, in order to not influence the use effect of the medical optical element, the hospital has to comprehensively detect the purchased contact lens, and internal defect detection is an important part of the detection.
Referring to the attached drawing 1, the application provides a medical optical element internal defect detection device, which comprises a light source module and a shearing interference module, wherein the light source module comprises a halogen light source (1), a color filter (2), a plano-convex lens (3), a first polaroid (4) and a first plane mirror (5) which are sequentially arranged along a light path; the shearing interference module comprises a Savart prism (6), a second plane mirror (7), an 1/4 wave plate (8), a second polaroid (9) and a CCD camera (10) which are sequentially arranged along a light path, wherein the medical optical element to be detected is a contact lens, and the contact lens to be detected is arranged on the light path between the first plane mirror (5) and the Savart prism (6).
Preferably, referring to fig. 2, the Savart prism (6) used in the present application includes two identical birefringent crystals, and when a light wave passes through the first birefringent crystal, the light wave is divided into two orthogonal polarization states, i.e. e light (orthogonal ray) and o light (orthogonal ray), and after the two polarized lights pass through the second birefringent crystal, the polarization states are converted from each other, i.e. the original e light is converted into o light, and the o light is converted into e light, which is referred to as eo light or oe light for short, and the eo light and the oe light are cut along a diagonal line, and the amount of lateral shear therebetween is Δ X.
The light source path of the detection device can be represented as follows:
the light wave that halogen light source (1) sent gets into plano-convex lens (3) through color filter (2), wherein, color filter (2)'s effect is the syntropy that increases halogen light source (1), so set up so, because when Savart prism (6) shearing distance delta X is too big, probably can lead to unable emergence interference because of the low syntropy of light source, consequently, this application sets up color filter (2) at halogen light source (1) rear, increases halogen light source (1)'s syntropy to guarantee the shearing interference of light wave in shearing interference module.
The plano-convex lens (3) is used for forming parallel light beams, after the parallel light beams enter the first polaroid (4), the first polaroid (4) is used for converting parallel light in an unpolarized state into a linear polarized state of 0 degrees to form polarized light L, and then the polarized light L is reflected to the shearing interference module through the first plane mirror (5).
Because the contact lens to be tested is arranged between the first plane mirror (5) and the Savart prism (6), the polarized light L entering the Savart prism (6) carries the profile information of the contact lens, and after the polarized light L passes through the Savart prism (6), according to the working principle of the Savart prism (6), the polarized light L can be cut into oe polarized light L1 and eo polarized light L2 with two mutually perpendicular polarization states, and the wave front of L1 is displaced to the left by a cutting distance delta X;
the two polarized lights L1 and L2 are then reflected by the second plane mirror (7) to the phase shift mechanism formed by the 1/4 wave plate (8) and the second polarizer (9), and phase-shift interference occurs.
Optionally, the phase shift mechanism may be a QP phase shift mechanism, that is, 1/4 wave plate (8) corresponds to a Q lens, the second polarizer (9) corresponds to a P lens, a rotating polarizer method is used to implement QP phase shift, a rotation angle α/2 of the second polarizer (9) may be converted into phase shift interference of a phase shift angle α, in other words, phase shift interference of a phase difference of pi/2 may be formed by rotating pi/4 of the second polarizer (9), and related QP phase shift mathematical principles belong to the prior art and are not described in detail herein.
It should be noted that the phase shift mechanism is provided because even if the oe polarized light L1 and the eo polarized light L2 interfere with each other and an interference pattern is obtained by imaging with the CCD camera (10), the profile information of the contact lens to be measured cannot be directly extracted from the interference pattern, and it is a common practice to convert the interference pattern into a phase pattern and determine whether the profile information of the contact lens to be measured is normal or not by the phase pattern, thereby detecting whether the contact lens to be measured has an internal light transmission defect or not.
The key point of converting the interferogram into the phase map is to obtain the phase amount information of each point in the interferogram, and the solving principle of obtaining the phase amount based on the five-step phase shifting method of the phase shifting mechanism is described as follows:
first, according to the interference principle, when two polarized lights interfere, the interference light intensity I can be expressed as:
wherein, I1And I2Indicating the light intensity of the two polarized lights and phi the phase of the two polarized lights.
Let I0＝I1+I2，
The above formula may be further equivalent to:
I＝I0(1+γ cosφ)
to solve this formula, the second polarizer (P-plate) is rotated five times to perform phase shift, so that the corresponding phase shift angles are α ═ pi, — pi/2, 0, pi/2, and pi, respectively, and therefore the following equations hold:
I1＝I0(1+γ cos(φ+π))
I3＝I0(1+γ cosφ)
I5＝I0(1+γ cos(φ-π))
wherein, I1、I2、I3、I4And I5Respectively representing the interference light intensity corresponding to the five phase shift angles, which can be obtained by the corresponding interference pattern;
by combining the above five equations, we can get:
the phase value phi can be obtained by solving the above formula, so as to draw a phase diagram according to the phase value information of each point of the interference diagram, because the phase quantity of the normal contact lens and the contact lens with the light transmission defect is different, whether the contact lens to be detected has the internal light transmission defect or not is difficult to distinguish through the common optical imaging, however, based on the technical scheme of the application, after the polarized light L carrying the profile information of the contact lens to be measured is subjected to shearing and phase-shift interference, resulting in a strong contrast change of the intensity of the interference light, which is reflected in the phase map, the grey scale change of the phase map is more pronounced than in conventional optical imaging, i.e., whether the contact lens to be detected has the internal light transmission defect or not can not be detected by the common optical imaging technology, by adopting the technical scheme of the application, by observing the gray scale changes in the phase pattern after shearing and phase shifting interference, it can be quickly determined whether the contact lens has internal transmission defects.
Further, fig. 3 is a result diagram of an example of applying the technical scheme of the present application to perform the detection of the internal transmission defect of the contact lens, and as a comparison, the present example selects a contact lens with an internal transmission defect, and compares and analyzes a phase diagram obtained by a common optical imaging technology and the technical scheme of the present application, so as to show the superiority of the technical scheme of the present application.
The above and lower left apparent defects of the contact lens are more clearly seen in fig. 3b compared to fig. 3a obtained by conventional optical imaging, and further demonstrated by the enlarged close-up views of fig. 3c and 3 d.
Meanwhile, gray value changes caused by internal light transmission defects of the contact lens can be compared through the accompanying drawings 3e and 3f, the vertical gray value distribution of the accompanying drawing 3e is approximately in a range of 173-189, the vertical gray value distribution of the accompanying drawing 3f is approximately in a range of 105-161, and the range value is amplified from 16 to 56.
It will be appreciated by persons skilled in the art that the embodiments of the invention described above and illustrated in the drawings are given by way of example only and are not limiting of the invention. The objects of the invention have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the embodiments, and the implementation of the present invention can be in any form or modification without departing from the principles.
Claims (4)
1. A medical optical element internal defect detection device is used for detecting whether a light transmission defect exists in a medical optical element or not, and is characterized by comprising a light source module and a shearing interference module, wherein the light source module and the shearing interference module are respectively connected with a light source module and a light source module
The light source module comprises a halogen light source (1), a color filter (2), a plano-convex lens (3), a first polaroid (4) and a first plane mirror (5) which are arranged along a light path in sequence;
the shearing interference module comprises a Savart prism (6), a second plane mirror (7), an 1/4 wave plate (8), a second polaroid (9) and a CCD camera (10) which are sequentially arranged along a light path, and the shearing distance of the Savart prism is delta X;
the light source path of the medical optical element internal defect detection device is as follows:
light waves emitted by the halogen light source (1) enter the plano-convex lens (3) through the color filter (2) to form parallel beams with identical scheduling, after the parallel beams enter the first polaroid (4), the first polaroid (4) is used for converting the parallel beams in the non-polarized state into a linear polarized state of 0 degree to form polarized light L, and then the polarized light L is reflected to the shearing interference module through the first plane mirror (5);
the medical optical element to be measured is arranged on a light path between the first plane mirror (5) and the Savart prism (6);
the polarized light L entering the Savart prism (6) carries the contour information of the medical optical element, the polarized light L coming out of the Savart prism (6) is cut into oe polarized light L1 and eo polarized light L2 with two mutually perpendicular polarization states, and the wave front of L1 is displaced to the left by a cutting distance delta X.
The two polarized lights L1 and L2 are reflected to a phase shift mechanism formed by a 1/4 wave plate (8) and a second polarizing plate (9) through a second plane mirror (7) to generate phase shift interference, a CCD camera (10) shoots and obtains interference patterns of the polarized lights L1 and L2, the interference patterns are converted into phase patterns based on a five-step phase shift method, and whether the medical optical element to be detected contains internal light transmission defects or not is detected according to the gray scale change of the phase patterns.
2. A medical optical element internal defect detection device according to claim 1, wherein the color filter (2) is used to increase the co-scheduling of the halogen light source to prevent the polarized light L1 and L2 from normally interfering when the shearing distance Δ X of the Savart prism is too large.
3. The internal defect detection device of the medical optical element according to claim 1 or 2, wherein the Savart prism (6) comprises two identical birefringent crystals, the light wave is divided into two e-polarized lights and o-polarized lights with mutually perpendicular polarization states after passing through the first birefringent crystal, the polarization states of the two polarized lights are converted into each other after passing through the second birefringent crystal, so as to form an oe-polarized light and an eo-polarized light with mutually perpendicular polarization states, the oe-polarized light and the eo-polarized light are cut along the diagonal line, and the transverse cutting amount between the oe-polarized light and the eo-polarized light is Δ X.
4. A medical optical element internal defect detecting device according to any one of claims 1 to 3, wherein the "five-step phase shift method" operates on the principle of:
when two polarized lights interfere, the interference light intensity I can be expressed as:
wherein, I1And I2Indicating the light intensity of the two polarized lights and phi the phase of the two polarized lights.
Let I0＝I1+I2，
The above formula may be further equivalent to:
I＝I0(1+γcosφ)
1/4, a phase shift mechanism composed of a wave plate (8) and a second polarizing plate (9) makes the polarized light L1 and L2 perform phase shift interference, and the rotation angle alpha/2 of the second polarizing plate (9) can be converted into phase shift interference of a phase shift angle alpha;
let α ═ pi, — pi/2, 0, pi/2, and pi, respectively, that is, by rotating the second polarizing plate (9) five times, phase shift is carried out, and the following equations hold:
I1＝I0(1+γcos(φ+π))
I3＝I0(1+γcosφ)
I5＝I0(1+γcos(φ-π))
wherein, I1、I2、I3、I4And I5Respectively representing the interference light intensity corresponding to the five phase shift angles;
by combining the above five equations, we can get:
the phase quantity phi can be obtained by solving the formula, so that a phase diagram can be drawn according to the phase quantity information of each point of the interference diagram, and the conversion from the interference diagram to the phase diagram is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110483386.6A CN113189119B (en) | 2021-04-30 | 2021-04-30 | Internal defect detection device for medical optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110483386.6A CN113189119B (en) | 2021-04-30 | 2021-04-30 | Internal defect detection device for medical optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113189119A true CN113189119A (en) | 2021-07-30 |
| CN113189119B CN113189119B (en) | 2021-11-23 |
Family
ID=76983348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110483386.6A Active CN113189119B (en) | 2021-04-30 | 2021-04-30 | Internal defect detection device for medical optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113189119B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114820617A (en) * | 2022-06-29 | 2022-07-29 | 苏州大学 | Crystal defect detection method and system based on four-focus phase coherent machine vision |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101469975A (en) * | 2007-12-27 | 2009-07-01 | 通用电气公司 | Optical detecting instrument and method thereof |
| CN101545849A (en) * | 2009-05-08 | 2009-09-30 | 中国科学院化学研究所 | Method for quantitatively analyzing material interface properties by combining non-destructive testing and definite element modelling |
| CN101893683A (en) * | 2010-07-15 | 2010-11-24 | 桂林电子科技大学 | Method for forecasting operation life of integrated circuit based on phase shifting electronic speckle pattern interferometry |
| CN102506710A (en) * | 2011-10-25 | 2012-06-20 | 天津大学 | Device for detecting in-plane error in micro/nano device out-of-plane motion test and compensating method |
| CN106091974A (en) * | 2016-08-04 | 2016-11-09 | 北京信息科技大学 | A kind of object distortion measurement instrument, method and apparatus |
| CN106289527A (en) * | 2016-08-03 | 2017-01-04 | 南京理工大学 | A kind of Hyperspectral imaging devices based on polarization interference and formation method thereof |
| CN106767496A (en) * | 2016-11-18 | 2017-05-31 | 中国科学院光电技术研究所 | 3D morphology recovery method combining phase shift interference and vertical scanning interference |
| CN107421648A (en) * | 2017-08-10 | 2017-12-01 | 中国科学院上海光学精密机械研究所 | A kind of prism assemblies for being used to measure two-beam interference field duration and phase distribution |
| CN108195849A (en) * | 2018-01-23 | 2018-06-22 | 南京理工大学 | Position phase defect detecting system and method based on the safe graceful interferometer of short relevant dynamic |
| CN109579995A (en) * | 2018-11-05 | 2019-04-05 | 西安交通大学 | A kind of method and device thereof enhancing static birefringent interference spectrum resolution ratio |
| CN110332904A (en) * | 2019-07-18 | 2019-10-15 | 天津大学 | Line style micro-interference spectral measurement system and method based on plane grating light splitting |
| CN110411333A (en) * | 2019-06-28 | 2019-11-05 | 北方工业大学 | Novel laser polarization phase shift interference chromatography measuring device and method |
-
2021
- 2021-04-30 CN CN202110483386.6A patent/CN113189119B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101469975A (en) * | 2007-12-27 | 2009-07-01 | 通用电气公司 | Optical detecting instrument and method thereof |
| CN101545849A (en) * | 2009-05-08 | 2009-09-30 | 中国科学院化学研究所 | Method for quantitatively analyzing material interface properties by combining non-destructive testing and definite element modelling |
| CN101893683A (en) * | 2010-07-15 | 2010-11-24 | 桂林电子科技大学 | Method for forecasting operation life of integrated circuit based on phase shifting electronic speckle pattern interferometry |
| CN102506710A (en) * | 2011-10-25 | 2012-06-20 | 天津大学 | Device for detecting in-plane error in micro/nano device out-of-plane motion test and compensating method |
| CN106289527A (en) * | 2016-08-03 | 2017-01-04 | 南京理工大学 | A kind of Hyperspectral imaging devices based on polarization interference and formation method thereof |
| CN106091974A (en) * | 2016-08-04 | 2016-11-09 | 北京信息科技大学 | A kind of object distortion measurement instrument, method and apparatus |
| CN106767496A (en) * | 2016-11-18 | 2017-05-31 | 中国科学院光电技术研究所 | 3D morphology recovery method combining phase shift interference and vertical scanning interference |
| CN107421648A (en) * | 2017-08-10 | 2017-12-01 | 中国科学院上海光学精密机械研究所 | A kind of prism assemblies for being used to measure two-beam interference field duration and phase distribution |
| CN108195849A (en) * | 2018-01-23 | 2018-06-22 | 南京理工大学 | Position phase defect detecting system and method based on the safe graceful interferometer of short relevant dynamic |
| CN109579995A (en) * | 2018-11-05 | 2019-04-05 | 西安交通大学 | A kind of method and device thereof enhancing static birefringent interference spectrum resolution ratio |
| CN110411333A (en) * | 2019-06-28 | 2019-11-05 | 北方工业大学 | Novel laser polarization phase shift interference chromatography measuring device and method |
| CN110332904A (en) * | 2019-07-18 | 2019-10-15 | 天津大学 | Line style micro-interference spectral measurement system and method based on plane grating light splitting |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114820617A (en) * | 2022-06-29 | 2022-07-29 | 苏州大学 | Crystal defect detection method and system based on four-focus phase coherent machine vision |
| CN114820617B (en) * | 2022-06-29 | 2022-09-20 | 苏州大学 | Crystal defect detection method and system based on four-focus phase coherent machine vision |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113189119B (en) | 2021-11-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Qi et al. | Narrow band 3× 3 Mueller polarimetric endoscopy | |
| WO2016188378A1 (en) | Measurement device and measurement method for thin film provided with transparent substrate | |
| CN204535899U (en) | Glass surface stress detection device | |
| JP5024935B2 (en) | Device and method for detecting defect of light transmitting member | |
| TW201400800A (en) | Inspection device and inspection method of filter patterned retarder | |
| CN113189119B (en) | Internal defect detection device for medical optical element | |
| Vargas et al. | Liquid crystal retarder spectral retardance characterization based on a Cauchy dispersion relation and a voltage transfer function | |
| Anastasiadou et al. | Experimental validation of the reverse polar decomposition of depolarizing Mueller matrices | |
| TW202134636A (en) | Inspection method | |
| CN105258801B (en) | One kind passes through spherical alkali metal air chamber rear polarizer light polarization detecting system | |
| JP2017173223A (en) | Optical device and imaging device | |
| TWI757776B (en) | Method for detecting uneven alignment defect of retardation film and device for detecting uneven alignment defect | |
| WO2022067047A1 (en) | System and method for evaluation of optical defects of a glazing | |
| JP2019200405A (en) | Tri-spectroscopic optical module and optical device utilizing the same | |
| Zhu et al. | Three-dimensional measurement of fringe projection based on the camera response function of the polarization system | |
| JP5557586B2 (en) | Surface texture measuring device and surface texture measuring method | |
| CN110702505B (en) | Double-view-field video extensometer based on telecentric lens and cubic prism | |
| CN110044932B (en) | Method for detecting surface and internal defects of curved glass | |
| CN112345549A (en) | Imaging system for surface inspection | |
| JP5991226B2 (en) | Polarization analyzer for evaluating depolarization effect | |
| KR100993329B1 (en) | Stereoscopic optometric apparatus and glasses for optiometry | |
| JP2009162561A (en) | Refractive index measurement method | |
| JP2006250721A (en) | Inspection device and inspection method | |
| KR102517637B1 (en) | Polarization analysis apparatus and method for lens quality inspection, and polarization analysis system using the same | |
| JP2022508111A (en) | Systems and methods for automated evaluation of glass-based substrates for birefringence defects |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |