CN113187743A - Long-acting running rotor structure - Google Patents
Long-acting running rotor structure Download PDFInfo
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- CN113187743A CN113187743A CN202110378304.1A CN202110378304A CN113187743A CN 113187743 A CN113187743 A CN 113187743A CN 202110378304 A CN202110378304 A CN 202110378304A CN 113187743 A CN113187743 A CN 113187743A
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- rotor blade
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- chamber
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- 230000007774 longterm Effects 0.000 claims abstract description 28
- 238000005192 partition Methods 0.000 claims description 13
- 238000000605 extraction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 18
- 238000012423 maintenance Methods 0.000 abstract description 8
- 238000005086 pumping Methods 0.000 abstract description 7
- 239000002245 particle Substances 0.000 description 4
- 239000000376 reactant Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Inorganic materials O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/38—Blades
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The invention relates to a rotor structure with long-term operation, which comprises a rotor body and a plurality of rotor blades, wherein the plurality of rotor blades are annularly disposed outside the rotor body and longitudinally distributed to form a plurality of rotor blade layers, wherein the rotor blade layer has at least one first rotor blade layer and a plurality of second rotor blade layers, wherein the trailing end of the first rotor blade layer is spaced from the sidewall of the chamber of the turbo vacuum pump by a first lateral distance, the trailing end of the second rotor blade layer is spaced from the sidewall of the chamber by a second lateral distance, the first lateral distance is substantially greater than the second lateral distance, so as to maintain the pumping efficiency, prevent the rotor blade from shaking due to friction contact with the deposit on the step section of the chamber during the rotation process, so as to effectively prevent the rotor blade from being cracked due to impact on other blades, further reduce the maintenance frequency and achieve the purpose of long-term operation.
Description
Technical Field
The present invention relates to a rotor structure, and more particularly, to a rotor structure with long-term operation.
Background
In recent years, the semiconductor industry has been developed vigorously, and the demand for equipment related to the semiconductor front-end process has increased, wherein the high vacuum system component, i.e., the turbo molecular vacuum pump, is becoming a very large high vacuum system component. In the conventional turbo-molecular vacuum pump, the rotor linked to the vacuum pump is driven to perform a vacuum pumping process, gas molecules are driven by the rotor blades to enter the stator blades of the next layer, and the gas molecules are turned by impacting the stator blades to enter the rotor blades of the next layer. The operating principle of the turbo-molecular vacuum pump is to use the inclined blades rotating at high speed to move the originally disordered gas molecules in the system toward the outlet, and to use the staggered arrangement of the multi-layer rotor blades and stator blades to increase the compression ratio. Therefore, the turbo molecular vacuum pump has the characteristics of high vacuum degree, high exhaust efficiency, no oil gas pollution and the like. However, in the chamber of the vacuum pump of turbo molecular formula, there is still a small amount of space, such as a step, which is particularly prone to accumulating dust particles. Therefore, the conventional semiconductor manufacturing process often needs to be stopped to remove the deposits, otherwise, the rotor blade is easy to shake due to the contact with the deposits during high-speed rotation, and further, the rotor blade collides with other blades to cause the cracking phenomenon, so the conventional maintenance period is very short.
Disclosure of Invention
In view of the above-mentioned problems of the prior art, an object of the present invention is to provide a rotor structure with long-term operation, so as to solve the problem of the rotor blade caused by the deposit contacting the chamber of the vacuum pump.
To achieve the above object, the present invention provides a long-term operation rotor structure suitable for being installed in a chamber of a turbo-molecular vacuum pump, the chamber of the turbo-molecular vacuum pump being provided with a driving device, the rotor structure comprising: a rotor body disposed in the chamber of the turbo vacuum pump and sleeved on a rotating shaft of the driving device, wherein the driving device rotates the rotor body; and a plurality of rotor blades, which are annularly arranged on the outer side of the rotor body and longitudinally distributed to form a plurality of rotor blade layers, wherein the rotor blade layers are provided with at least one first rotor blade layer and a plurality of second rotor blade layers, the tail end of the first rotor blade layer is away from the side wall of the accommodating chamber by a first transverse distance, the tail end of the second rotor blade layers is away from the side wall of the accommodating chamber by a second transverse distance, and the first transverse distance is substantially greater than the second transverse distance, so that under the condition of keeping the air extraction efficiency, the first rotor blade layer is prevented from being shaken due to friction and contact with deposits on the step section of the accommodating chamber in the rotating process, the first rotor blade layer can be effectively prevented from being cracked due to impact on other blades, the maintenance frequency can be reduced, and the purpose of long-acting operation can be achieved.
The vacuum pump further comprises a groove body and a plurality of stator blades, the groove body is arranged in an accommodating space of the vacuum pump, the stator blades are arranged on a plurality of partition plates in a surrounding manner, the partition plates are sequentially stacked on the groove body, so that the stator blades are longitudinally distributed to form a plurality of stator blade layers, the stator blade layers and the rotor blade layers are longitudinally staggered, the partition plates and the groove body jointly surround the accommodating chamber, and the step section is located on the groove body.
Wherein the first rotor blade layer is a bottom rotor blade layer of the rotor blade layers, the height of the first rotor blade layer is lower than the height of a bottom stator blade layer of the stator blade layers, and the first rotor blade layer is removed so that the end of the first rotor blade layer is away from the side wall of the chamber by the first transverse distance.
Wherein the difference between the first lateral distance and the second lateral distance is less than 30 mm.
Wherein the difference between the first lateral distance and the second lateral distance is less than or equal to the length of one of the second rotor blade layers adjacent to the first rotor blade layer.
Wherein the length of the first rotor blade layer is substantially smaller than the length of one of the second rotor blade layers adjacent to the first rotor blade layer.
Wherein the length of the first rotor blade layer is substantially the same as the length of one of the second rotor blade layers adjacent to the first rotor blade layer.
Wherein the first lateral distance is substantially greater than a first value, the second lateral distance is substantially the same as or less than the first value, and the first value is between 0.5mm and 3 mm.
Wherein the first rotor blade layer is a bottom rotor blade layer of the rotor blade layers, a bottom end of the first rotor blade layer is separated from a top edge of the step section of the chamber by a longitudinal distance, the longitudinal distance is substantially greater than or equal to a second value, and the second value is between 2mm and 4.5 mm.
In view of the above, the advantage of the long-term operation rotor structure of the present invention is that only the first lateral distance between the bottom-most rotor blade layer and the sidewall of the chamber is increased, so as to effectively prevent the bottom-most rotor blade layer from contacting the deposits on the step section of the chamber during the rotation process while maintaining the air-pumping efficiency. In addition, by further making the longitudinal distance from the bottom end of the lowest rotor blade layer to the top edge of the step section of the chamber be substantially larger than the second value, the lowest rotor blade layer can be effectively prevented from rubbing against the deposit on the step section of the chamber during the rotation process. Alternatively, the present invention increases the lateral distance between the bottom rotor blade layer and the sidewall of the chamber and simultaneously increases the longitudinal distance between the bottom end of the bottom rotor blade layer and the top edge of the step section of the chamber, so as to effectively prevent the bottom rotor blade layer from rubbing and touching the deposits on the step section of the chamber during the rotation process, thereby causing the bottom rotor blade layer to strike other rotor blades or stator blades. Therefore, the present invention can achieve the purpose of long-term operation by reducing the maintenance frequency.
So that the manner in which the above recited features of the present invention can be understood and appreciated, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings.
Drawings
FIG. 1 is a sectional view of the combination of a long-term rotor structure and a turbo-molecular vacuum pump according to the present invention.
FIG. 2 is a cross-sectional view of a long-term rotor structure according to the present invention.
Fig. 3 is a partially enlarged view of fig. 1.
FIG. 4 is a partial perspective view of a rotor blade layer according to the present invention.
FIG. 5 is a schematic view of the trough of the present invention.
FIG. 6 is a partially enlarged view of another embodiment of the long-term running rotor structure of the present invention.
FIG. 7 is an enlarged partial view of another embodiment of the long-term running rotor structure of the present invention.
Description of reference numerals:
10: rotor structure
20: rotor body
30: rotor blade
32: rotor blade layer
32 a: first rotor blade layer
32 b: second rotor blade layer
100: turbine molecular formula vacuum pump
102: containing space
110: trough body
112: diversion trench
114: step section
120: stator blade
122: stator vane layer
126: partition board
130: containing chamber
160: drive device
162: rotating shaft
d 1: first transverse distance
d 2: second transverse distance
h1, h2, h 3: longitudinal distance
L1, L2: length of
Detailed Description
For the purpose of understanding the technical features, contents and advantages of the present invention and the effects achieved thereby, the present invention will be described in detail with reference to the following embodiments, wherein the drawings are used for illustration and the accompanying specification, and are not necessarily to be construed as the actual scale and precise configuration of the present invention, and the attached drawings are not to be interpreted as limiting the scope of the present invention in the actual implementation. Moreover, for ease of understanding, like components in the following embodiments are illustrated with like reference numerals.
Furthermore, the words used throughout the specification and claims have the ordinary meaning as is usually accorded to each word described herein, including any words which have been commonly referred to in the art, in the context of this disclosure, and in any other specific context. Certain terms used to describe the invention are discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.
The terms "first," "second," "third," and the like, as used herein, are not intended to be limited to the specific order or sequence presented, nor are they intended to be limiting, but rather are intended to distinguish one element from another or from another element or operation described by the same technical term.
Furthermore, as used herein, the terms "comprising," "including," "having," "containing," and the like are open-ended terms that mean including, but not limited to.
Referring to fig. 1to 4, fig. 1 is a sectional view of a long-term running rotor structure of the present invention and a turbo-molecular vacuum pump, fig. 2 is a sectional view of the long-term running rotor structure of the present invention, fig. 3 is a partially enlarged view of fig. 1, and fig. 4 is a partial external view of a rotor blade layer of the present invention.
The long-term operation rotor structure 10 of the present invention is adapted to be installed in the chamber 130 of a turbo-molecular vacuum pump 100. Wherein the turbo vacuum pump 100 draws process gas from the chamber through an inlet on one side of the pump body and exhausts the process gas from an outlet on the other side of the pump body. Wherein the process gas is, for example, but not limited to, H2、Ar、N2、SbF4、SBF3、SBF5And/or Sb2O3The above-mentioned process gas is onlyFor example, the invention is not limited thereto. The chamber 130 of the turbo-molecular vacuum pump 100 is provided with a driving device 160. The driving device 160 can be, for example, but not limited to, a mechanical, magnetic levitation, or hybrid bearing type electric driving design. Since the long-term operation rotor structure 10 of the present invention can be applied to the turbo-molecular vacuum pump 100 and the driving device 160 thereof with various structural designs, and the structural design of the turbo-molecular vacuum pump 100 and the driving device 160 thereof is not the focus of the present invention, it will not be described herein.
The long-term operation rotor structure 10 of the present invention comprises a rotor body 20 and a rotor blade 30, wherein the rotor body 20 is disposed in the chamber 130 of the turbo-molecular vacuum pump 100 and is sleeved on the rotating shaft 162 of the driving device 160, so that the driving device 160 can drive the rotor body 20 to rotate at a rotating speed. The rotor blades 30 are disposed around the rotor body 20 and are longitudinally distributed to form a plurality of rotor blade layers 32. The rotor blade layer 32 has at least a first rotor blade layer 32a and a plurality of second rotor blade layers 32b (see fig. 2). Taking the Edwards P033 rotor as an example, the number of the second rotor blade layers 32b may be, for example, 10, but is not limited thereto. In one embodiment of the present invention, as shown in fig. 3, the tail end of the first rotor blade layer 32a is spaced from the sidewall of the chamber 130 by a first transverse distance d1, and the tail end of the second rotor blade layer 32b is spaced from the sidewall of the chamber 130 by a second transverse distance d2, wherein the first rotor blade layer 32a is laterally retracted or longitudinally retracted, or both laterally and longitudinally retracted.
Taking transverse retraction as an example, the present invention may employ a removal method to remove part or almost all of the original blade length of the first rotor blade layer 32a, so that the first transverse distance d1 is substantially greater than the second transverse distance d2, or directly make the first transverse distance d1 be substantially greater than the second transverse distance d2 when making the rotor blade. Therefore, the present invention can prevent the vane 30 from touching the deposit generated in the chamber 130, especially prevent the first vane layer 32a from touching the deposit on the step 114 of the chamber 130, while maintaining the pumping efficiency of the vacuum pump 100. The difference between the first lateral distance d1 and the second lateral distance d2 is preferably less than about 30mm, and the difference may be less than the length of the second rotor blade layer 32b adjacent to the first rotor blade layer 32a or almost the same as the length of the second rotor blade layer 32 b. The first rotor blade layer 32a may be any one or more of the rotor blade layers 32, preferably the bottom rotor blade layer of the rotor blade layers 32, and more preferably the bottom rotor blade layer. However, the above numerical difference is only an example, as long as the numerical difference between the first lateral distance and the second lateral distance is less than or equal to the length value of one of the second rotor blade layers 32b adjacent to the first rotor blade layer 32a, and is applicable to the present invention.
In the turbo-molecular vacuum pump 100 to which the rotor structure 10 of the present invention is applied, the rotation speed of the rotor structure 10 can reach about 32,500rpm, but the present invention is not limited thereto, and the rotation speed of the rotor structure 10 can also be less than about 32,500 rpm. According to the structural design of the present invention, the maintenance period of the rotor structure 10 is, for example, between 1to 5 months, i.e., in the present invention, it is not necessary to disassemble the rotor structure 10 to remove the deposited or accumulated solid particles or gas reactants, so that the maintenance period can be extended, i.e., the maintenance frequency can be reduced, and the purpose of long-term operation can be achieved. The rotor structure 10 of the present invention is, for example, of the type Edwards P033, and the turbo-molecular vacuum pump 100 is of the type suitable for use with the rotor structure 10, for example, Edwards STP-H803 or STP-H1303. The above-mentioned types of rotor structures 10 and the applicable turbo-molecular vacuum pump 100 are only examples and are not intended to limit the present invention. By actually detecting the inlet pressure (torr) and the gas flow rate (sccm), it can be found that the present invention almost overlaps with the numerical curve of the gas flow rate (sccm) of the conventional rotor structure at an inlet pressure between 1x10-5 torr and 1 torr. Thus, compared to the prior art, the present invention can effectively prevent the rotor blade from rubbing against the deposits in the chamber of the vacuum pump of the turbo molecular formula, such as, but not limited to, the solid particles carried in the process gas or the reactant of the process gas, and further avoid collision or chipping, while maintaining the pumping efficiency.
The turbo vacuum pump 100 further includes a groove 110 and a plurality of stator blades 120. The groove 110 is disposed in the receiving space 102 of the pump body of the turbo vacuum pump 100. The interior of the channel 110 preferably has channels 112 (see fig. 5). The stator blade 120 is disposed around a plurality of partition plates 126, and the partition plates 126 are sequentially stacked on the top edge of the slot 110, so that the stator blade 120 is longitudinally distributed to form a plurality of stator blade layers 122. Wherein the partition plate 126 and the slot body 110 surround the chamber 130 together, and a step 114 is formed at the junction of the partition plate 126 and the top edge of the slot body 110 between the lowest layers. The present invention effectively prevents the rotor blades 30 from contacting the solid particles or gaseous reactants and other deposits on the step sections 114.
The long-term operation rotor structure 10 of the present invention is disposed in the chamber 130 surrounded by the partition plate 126 and the slot 110, and the rotor body 20 is sleeved on the rotation shaft 162. For example, one side of the rotor structure 10 is recessed to form a locking chamber, a through slot is formed through the bottom side of the locking chamber, one end of the rotating shaft 162 of the driving device 160 penetrates into the locking chamber of the rotor structure 10 through the through slot, and then the nut or other fixing component is used to lock the rotor body 20 to the rotating shaft 162 in the locking chamber.
In addition, the rotor blade layers 32 and the stator blade layers 122 of the rotor structure 10 are longitudinally staggered and kept out of contact with each other. The lowermost layer of blades may be, for example, rotor blades 30. The rotor blades 30 and the stator blades 120 are inclined in opposite directions, wherein the inclination direction of each rotor blade 30 is the same, but the inclination angle may be the same or different, and the inclination direction of each stator blade 120 is the same, but the inclination angle may be the same or different. Because the rotor blades 30 are laterally moved and have an inclined angle, when gas molecules collide with the rotor blades 30 in a rotating state, the gas molecules can move downward to move away from the rotor blade layer 32 in the layer and move toward the stator blade layer 122 in the next layer. Moreover, because the rotor blades 30 and the stator blades 120 are inclined in the opposite direction, when gas molecules collide with the stator blades 120 in the static state, the gas molecules can move away from the stator blade layer 122 in the layer, so as to collide with the rotor blade layer 32 in the next layer, and so on, so that the gas molecules can be driven to move downward layer by layer without moving upward reversely.
As shown in fig. 3, in one embodiment of the present invention, only the first transverse distance d1 between the end of the first rotor blade layer 32a of the rotor blade layers 32 of the rotor structure 10 and the sidewall of the chamber 130 is substantially greater than a first value, and the second transverse distance d2 between the end of the second rotor blade layer 32b of the rotor blade layers 32 and the sidewall of the chamber 130 is substantially the same as or less than the first value. The first value is between 0.5mm and 3 mm. Thus, the present invention can form a touch prevention space between the first rotor blade layer 32a and the tank body 110. Although the second transverse distance d2 between the end of the second rotor blade layer 32b and the sidewall of the chamber 130 is preferably substantially the same, the invention is not limited thereto, and the second transverse distance d2 between the end of the second rotor blade layer 32b and the sidewall of the chamber 130 may be different. In contrast, in the conventional rotor structure, since the lateral distance from the end of each rotor blade layer to the sidewall of the chamber is substantially the same from top to bottom, the lateral distance from the end of the lowermost rotor blade layer to the sidewall of the chamber is substantially the same as the lateral distance from the end of the rotor blade layer of the previous layer to the sidewall of the chamber. Therefore, compared to the conventional rotor structure, the rotor structure 10 of the present invention can substantially maintain the pumping rate, and can effectively prevent the rotor blade 30 from touching the deposits in the chamber 130 of the vacuum pump 100, and particularly prevent the bottommost first rotor blade layer 32a from touching the deposits on the step section 114 of the chamber 130, wherein the step section 114 corresponds to the position of the tail end of the bottommost rotor blade layer (the first rotor blade layer 32a), i.e., the intersection of the partition plate 126 and the top edge of the slot body 110.
In one embodiment of the present invention, the original blades of the first rotor blade layer 32a are subjected to a removal process, for example, to remove part or almost all of the original blade length of the first rotor blade layer 32a, wherein the removed part of the first rotor blade layer 32a is indicated by a dotted line, so that a first transverse distance d1 from the end of the first rotor blade layer 32a to the side wall of the chamber 130 is substantially greater than a second transverse distance d2 from the end of the second rotor blade layer 32b in the rotor blade layers 32 to the side wall of the chamber 130. The removal process can be, for example, but not limited to, cutting, shearing, sawing, planing or other possible methods. Therefore, the length L1 of a first one of the rotor blade layers 32a is substantially less than the length L2 of a second one of the rotor blade layers 32b adjacent the first rotor blade layer 32a (see FIG. 4). Alternatively, instead of removing part or almost all of the original blade length of the first rotor blade layer 32a, the present invention may make the sidewall of the chamber 130 expand outward (i.e. the sectional area of the sidewall of the chamber 130 is increased) at the position corresponding to the first rotor blade layer 32a, so that the first transverse distance d1 is substantially greater than the second transverse distance d2, and the length of the first rotor blade layer 32a in the rotor blade layer 32 may be substantially the same as the length of the second rotor blade layer 32b in the rotor blade layer 32 adjacent to the first rotor blade layer 32 a.
Taking the example of simultaneous transverse retraction and longitudinal retraction, in the present invention, the lowermost vane is preferably a rotor vane, as shown in fig. 3, i.e., the height of the first rotor vane layer 32a is preferably lower than the height of the lowermost stator vane layer in the stator vane layer 122. If the first transverse distance d1 from the end of the first rotor blade layer 32a to the side wall of the chamber 130 is substantially greater than the second transverse distance d2 from the end of the second rotor blade layer 32b in the rotor blade layers 32 to the side wall of the chamber 130, the longitudinal distance h1 from the bottom end of the lowermost blade, e.g., the first rotor blade layer 32a in the rotor blade layers 32, to the top edge of the step 114 of the chamber 130 may be substantially equal to a second value, e.g., between 2mm and 4.5 mm. Alternatively, the longitudinal distance h1 between the bottom end of the first rotor blade layer 32a in the rotor blade layer 32 and the top edge of the step 114 of the chamber 130 may be substantially greater than the second value. Thus, the present invention can form a touch-proof space between the first rotor blade layer 32a and the groove 110 (the step section 114 of the chamber 130). The present invention may, for example, employ removal means to achieve the simultaneous lateral and longitudinal retraction described above. However, the present invention is not limited to the use of a removal process, and the present invention may also be used to manufacture the rotor blade 30 such that the first rotor blade layer 32a is both laterally retracted and longitudinally retracted relative to the second rotor blade layer 32 b.
However, the present invention is not limited to the above examples. The lowest layer of blades may be the rotor blade layer 32 or the stator blade layer 122. The present invention is applicable as long as a touch-proof space can be formed between the lowermost rotor blade layer 32 or stator blade layer 122 and the groove 110 (the step section 114 of the chamber 130). In another embodiment of the present invention, as shown in fig. 6, the lowest layer of vane layers is the stator vane layer 122, and the distance between the stator vane layer 122 and the top edge of the step section 144 of the chamber 130 is the longitudinal distance h2, the longitudinal distance h2 is substantially greater than a second value, for example, between 2mm and 4.5 mm. In addition, in yet another embodiment of the present invention, as shown in FIG. 7, in which the first rotor blade layer 32a and the lowermost stator blade layer 122 in the foregoing aspects have been almost completely or mostly removed, the length of the first rotor blade layer 32a in the rotor blade layers 32 is substantially smaller than the length of the second rotor blade layer 32b in the rotor blade layers 32 adjacent to the first rotor blade layer 32a, and a second rotor blade layer 32b adjacent to the lowermost first rotor blade layer 32a is spaced from the top edge of the step 144 of the chamber 130 by a longitudinal distance h3, the longitudinal distance h3 being substantially greater than a second value, such as, but not limited to, between 2mm and 4.5mm, wherein a second lateral distance d2 from the end of the second rotor blade layer 32b to the side wall of the chamber 130 is substantially the same as or greater than the lateral distance d2 from the end of the remaining rotor blade layers to the side wall of the chamber 130.
The advantage of the long-term operation rotor structure of the present invention is that only increasing the first lateral distance between the bottom rotor blade layer and the sidewall of the chamber can effectively prevent the rotor blade from touching the deposits deposited or accumulated in the chamber of the turbo-molecular vacuum pump, especially prevent the bottom rotor blade layer from touching the deposits on the step section of the chamber, while maintaining the pumping efficiency. Furthermore, by making the longitudinal distance of the bottom end of the lowest rotor blade layer among the rotor blade layers from the top edge of the step of the chamber substantially larger than the second value, the rotor blade can be effectively prevented from touching deposits or accumulating in the chamber of the turbo vacuum pump, and particularly, the lowest rotor blade layer can be prevented from touching deposits on the step of the chamber. In addition, the present invention increases the lateral distance between the bottom rotor blade layer and the sidewall of the chamber and simultaneously increases the longitudinal distance between the bottom end of the bottom rotor blade layer and the top edge of the step section of the chamber, so as to effectively prevent the bottom rotor blade layer from contacting the deposits deposited or accumulated in the chamber of the turbo vacuum pump, and particularly prevent the bottom rotor blade layer from contacting the deposits on the step section. Therefore, the present invention can achieve the purpose of long-term operation by reducing the maintenance frequency.
The foregoing is by way of example only, and not limiting. It is intended that the appended claims cover all such modifications and variations as fall within the true spirit and scope of this present invention.
Claims (10)
1. A long-term operation rotor structure, which is suitable for being installed in a chamber of a turbo-molecular vacuum pump, the chamber of the turbo-molecular vacuum pump being installed with a driving device therein, the rotor structure comprising:
a rotor body disposed in the chamber of the turbo vacuum pump and sleeved on a rotating shaft of the driving device, wherein the driving device is used for rotating the rotor body; and
the rotor blade layers are provided with at least one first rotor blade layer and a plurality of second rotor blade layers, wherein the tail end of the first rotor blade layer is away from the side wall of the accommodating chamber by a first transverse distance, the tail end of the second rotor blade layers is away from the side wall of the accommodating chamber by a second transverse distance, and the first transverse distance is substantially greater than the second transverse distance, so that the first rotor blade layer is prevented from touching a step deposit of the accommodating chamber under the condition of keeping the air extraction efficiency.
2. The long-term operating rotor structure of claim 1, wherein the turbo-molecular vacuum pump further comprises:
a groove body arranged in an accommodating space of the turbine molecular vacuum pump; and
the plurality of stator blades are arranged on the plurality of partition plates in a surrounding mode, the partition plates are sequentially stacked on the groove body, so that the stator blades are longitudinally distributed to form a plurality of stator blade layers, the stator blade layers and the rotor blade layers are longitudinally staggered, the partition plates and the groove body jointly surround the accommodating chamber, and the step section is located on the groove body.
3. The long-term operating rotor structure of claim 2, wherein the first rotor blade layer is a lowermost one of the rotor blade layers, the first rotor blade layer has a height lower than a height of a lowermost one of the stator blade layers, the first rotor blade layer is removed such that an end of the first rotor blade layer is spaced from the side wall of the chamber by the first lateral distance.
4. The long-term operating rotor structure of claim 1, wherein the difference in the values of the first lateral distance and the second lateral distance is less than 30 mm.
5. The long-term operating rotor structure of claim 1, wherein the difference in the values of the first lateral distance and the second lateral distance is less than or equal to the value of the length of one of the second rotor blade layers adjacent to the first rotor blade layer.
6. The long-term-operation rotor structure of claim 1, wherein the length of the first rotor blade layer is substantially less than the length of one of the second rotor blade layers adjacent to the first rotor blade layer.
7. The long-term-operation rotor structure of claim 1, wherein the length of the first rotor blade layer is substantially the same as the length of one of the second rotor blade layers adjacent to the first rotor blade layer.
8. The long term operating rotor structure of claim 1, wherein the first lateral distance is substantially greater than a first value, the second lateral distance is substantially the same as or less than the first value, and the first value is between 0.5mm and 3 mm.
9. The long-term operating rotor structure of claim 1 or 8, wherein the first rotor blade layer is a lowest rotor blade layer of the plurality of rotor blade layers, a bottom end of the first rotor blade layer is spaced from a top edge of the step section of the chamber by a longitudinal distance, the longitudinal distance is substantially a second value, and the second value is between 2mm and 4.5 mm.
10. The long-term operating rotor structure of claim 1 or 8, wherein the first rotor blade layer is a lowest rotor blade layer of the plurality of rotor blade layers, a bottom end of the first rotor blade layer being spaced from a top edge of the step section of the chamber by a longitudinal distance, the longitudinal distance being substantially greater than a second value, the second value being between 2mm and 4.5 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110378304.1A CN113187743A (en) | 2021-04-08 | 2021-04-08 | Long-acting running rotor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110378304.1A CN113187743A (en) | 2021-04-08 | 2021-04-08 | Long-acting running rotor structure |
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| Publication Number | Publication Date |
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| CN113187743A true CN113187743A (en) | 2021-07-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110378304.1A Pending CN113187743A (en) | 2021-04-08 | 2021-04-08 | Long-acting running rotor structure |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005307859A (en) * | 2004-04-21 | 2005-11-04 | Ebara Corp | Turbo vacuum pump |
| US20150016958A1 (en) * | 2013-07-15 | 2015-01-15 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| EP3133290A1 (en) * | 2015-08-20 | 2017-02-22 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| TWI696754B (en) * | 2019-03-15 | 2020-06-21 | 承輝先進股份有限公司 | Rotor apparatus with modified cover |
| CN215719613U (en) * | 2021-04-08 | 2022-02-01 | 日扬科技股份有限公司 | Long-acting running rotor structure |
-
2021
- 2021-04-08 CN CN202110378304.1A patent/CN113187743A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005307859A (en) * | 2004-04-21 | 2005-11-04 | Ebara Corp | Turbo vacuum pump |
| US20150016958A1 (en) * | 2013-07-15 | 2015-01-15 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| EP3133290A1 (en) * | 2015-08-20 | 2017-02-22 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| TWI696754B (en) * | 2019-03-15 | 2020-06-21 | 承輝先進股份有限公司 | Rotor apparatus with modified cover |
| CN215719613U (en) * | 2021-04-08 | 2022-02-01 | 日扬科技股份有限公司 | Long-acting running rotor structure |
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