CN113187700A - Electromagnetic drive's MEMS micropump device - Google Patents
Electromagnetic drive's MEMS micropump device Download PDFInfo
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- CN113187700A CN113187700A CN202110425677.XA CN202110425677A CN113187700A CN 113187700 A CN113187700 A CN 113187700A CN 202110425677 A CN202110425677 A CN 202110425677A CN 113187700 A CN113187700 A CN 113187700A
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- diaphragm
- permanent magnet
- pump cavity
- pump
- cantilever beam
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- 239000007788 liquid Substances 0.000 claims abstract description 86
- 230000002457 bidirectional effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- -1 polydimethylsiloxane Polymers 0.000 claims description 4
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 3
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims description 3
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 3
- 230000002441 reversible effect Effects 0.000 claims description 3
- 230000010354 integration Effects 0.000 abstract description 4
- 239000012528 membrane Substances 0.000 abstract description 3
- 238000005086 pumping Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000000813 microbial effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention relates to an electromagnetic drive MEMS micropump device, belonging to the technical field of microfluidic systems and comprising a fixed ring, a permanent magnet, a pump cavity cover, a pump body, a diaphragm I, a base, an electromagnetic coil and a diaphragm II; wherein, the middle of the pump cavity cover is provided with a mounting hole; a circular recess is arranged in the middle of the pump body and serves as a pump cavity, a large liquid inlet hole and a small liquid outlet hole are formed in the pump cavity, and the middle part of the diaphragm I, which is close to the diaphragm I, is provided with a cantilever beam I and a cantilever beam II; the two ends of the front surface of the base are respectively provided with symmetrical connecting columns, a large liquid outlet hole and a small liquid inlet hole are separately arranged near the middle part, the center of the bottom surface is provided with a counter bore, and an electromagnetic coil connected with a power supply is embedded in the counter bore; two ends of the pump cavity cover, the pump body and the diaphragm I are provided with symmetrical connecting holes corresponding to the connecting columns in position; the permanent magnet is a cylinder, one end of the permanent magnet penetrates through the mounting hole to be fixedly connected with the fixing ring, the other end of the permanent magnet is connected with the membrane II and then extends into the pump cavity, and the membrane II is a wafer with the size consistent with that of the pump cavity. The invention has simple structure and is convenient for integration.
Description
Technical Field
The invention belongs to the technical field of a micro-flow control system, and particularly relates to an electromagnetic drive MEMS micro-pump device.
Background
Micropumps are important components of micro-electromechanical systems, belong to micro-actuators, and mainly function to transport and distribute liquid flows. Has wide application in microsensors, microbial chemical analysis and various fields involving microfluidic transport. In recent years, with the rapid development of biochip technology, the requirements for realizing the automatic and accurate driving of the micro pump are more urgent, and meanwhile, the development of the micro pump also influences the further integration and performance improvement of the micro fluid device, and the micro pump is a hot spot in the research of the MEMS.
The electromagnetic driving micropump converts electric energy into magnetic energy, generates a magnetic field by electrifying the coil, and the magnetizer moves under the action of the magnetic force. Chinese patent CN107975463A discloses a plunger type electromagnetic micropump adopting a permanent magnet one-way valve and having a tubular structure, which mainly comprises an insulating non-magnetic circular tube, an annular permanent magnet I, an electromagnetic coil II, an annular permanent magnet II, a magnetic stainless steel ball I, a conical tube I, a plunger permanent magnet, a magnetic stainless steel ball II and a conical tube II. Specifically, current is introduced into the electromagnetic coil to generate an electromagnetic field, the electromagnetic field generated by the electromagnetic coil generates electromagnetic force on the permanent magnet plunger, the permanent magnet plunger is driven to reciprocate by the electromagnetic force, the reciprocating motion of the permanent magnet plunger drives liquid in the micropump to move, and the liquid realizes unidirectional pumping through the directional rectification action of the one-way valve. However, the electromagnetic micropump has the disadvantages of complex structure, large size, low efficiency, difficult manufacturing and processing, high cost, difficult integration, liquid backflow, partial liquid leakage and the like, and has limited application range, small application value and poor practicability.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides an MEMS micropump device which is simple in structure, convenient to manufacture and process and suitable for small-dose drug injection.
The technical scheme is as follows:
an electromagnetically-driven MEMS micropump device comprises a fixing ring, a permanent magnet, a pump cavity cover, a pump body, a diaphragm I, a base, an electromagnetic coil and a diaphragm II; wherein the pump cavity cover is a rectangular cover-shaped component, and the middle part of the pump cavity cover is provided with a mounting hole; the pump body is a rectangular block-shaped component, a circular recess is arranged in the middle of the pump body to serve as a pump cavity, a large liquid inlet hole and a small liquid outlet hole are formed in the pump cavity, the diaphragm I is a rectangular sheet-shaped component, two U-shaped grooves are formed in the position, close to the middle of the diaphragm I, and the tongue-shaped portions at the U-shaped notches are used as a cantilever beam I and; the base is a rectangular block-shaped component, two ends of the front surface are respectively provided with a symmetrical connecting column, a large liquid outlet hole and a small liquid inlet hole are separately arranged near the middle part, the center of the bottom surface is provided with a counter bore, and an electromagnetic coil connected with a power supply is embedded in the counter bore; two ends of the pump cavity cover, the pump body and the diaphragm I are respectively provided with a symmetrical connecting hole, the positions of the connecting holes correspond to those of the connecting columns, and the connecting columns are matched with the connecting holes, so that the pump cavity cover, the pump body, the diaphragm I and the base are sequentially stacked and then integrated; the permanent magnet is that cylinder one end passes the mounting hole and is connected fixedly with solid fixed ring, and the other end stretches into the pump chamber after being connected with diaphragm II, and diaphragm II is the disk that the size is unanimous with the pump chamber.
In the electromagnetically-driven MEMS micropump device, the centers of the small liquid inlet hole, the cantilever beam I and the large liquid inlet hole are positioned on the same vertical plane, and a one-way liquid inlet valve is formed; the centers of the liquid outlet big hole, the cantilever beam II and the liquid outlet small hole are positioned on the same vertical plane to form a one-way liquid outlet valve together. The protection range of the invention is not limited to the above, and a person skilled in the art can adjust the relative positions of the small liquid inlet hole, the cantilever beam I and the large liquid inlet hole in the one-way liquid inlet valve and the relative positions of the large liquid outlet hole, the cantilever beam II and the small liquid outlet hole in the one-way liquid outlet valve according to actual requirements, as long as the one-way liquid inlet valve can feed liquid in one way and the one-way liquid outlet valve can discharge liquid in one way.
According to the MEMS micropump device driven by electromagnetism, the cantilever beam I and the cantilever beam II are in a tongue shape, and tongue-shaped parts forming the cantilever beam I and the cantilever beam II are arranged oppositely. The protection scope of the present invention is not limited to this, and those skilled in the art can select the shapes of the cantilever beam i and the cantilever beam ii according to actual requirements, and can also adjust the relative positions of the cantilever beam i and the cantilever beam ii.
According to the MEMS micropump device driven by the electromagnetism, the electromagnetic coil is made of enameled wires and wound by 80-100 turns around an iron core, and the main component of the permanent magnet is neodymium iron boron. The protection scope of the present invention is not limited thereto, and those skilled in the art can select the material and the number of turns of the electromagnetic coil and the material of the permanent magnet according to actual needs.
According to the MEMS micropump device driven by the electromagnetism, the membrane II is connected with the permanent magnet in a bonding mode through glue. The protection scope of the present invention is not limited thereto, and those skilled in the art may adopt other connection modes according to actual needs.
According to the MEMS micropump device driven by electromagnetism, the diaphragm I and the diaphragm II are made of PDMS (polydimethylsiloxane), and the pump cavity cover, the pump body and the base are made of PMMA (polymethyl methacrylate). The protection scope of the present invention is not limited to this, and those skilled in the art can select the materials of the diaphragm i and the diaphragm ii, the pump cavity cover, the pump body and the base according to actual requirements, as long as the corrosion resistance of the diaphragm i and the diaphragm ii, the pump cavity cover, the pump body and the base in liquid is ensured.
In the above electromagnetically driven MEMS micropump apparatus, the power source connected to the electromagnetic coil is a dc power source, and provides a bidirectional pulse current, in one period, the forward pulse time and the reverse pulse time are both t, and the current magnitude is both i (a).
Has the advantages that:
1) the invention has the advantages of simple structure, convenient manufacture and processing, low cost, smaller size and convenient integration.
2) The cantilever beam structure is adopted in the one-way liquid inlet valve and the one-way liquid outlet valve, so that liquid backflow and leakage can be effectively prevented.
3) The position design of the electromagnetic coil and the permanent magnet not only avoids corrosion, but also enhances the working efficiency of the micropump.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic combination diagram of a pump body, a diaphragm I and a base;
FIG. 3 is a cross-sectional view of the pump body, diaphragm I and base in combination;
FIG. 4 is a schematic diagram of a pump chamber cover;
FIG. 5 is a cross-sectional view of the overall structure;
FIG. 6 is a top view of the overall structure;
FIG. 7 is a schematic diagram of a current waveform for the solenoid;
the device comprises a fixing ring 1, a permanent magnet 2, a pump cavity cover 3, a pump body 4, a diaphragm I5, a base 6, a one-way liquid outlet valve 7, an electromagnetic coil 8, a one-way liquid inlet valve 9, a diaphragm II 10, a connecting hole 11, a large liquid inlet hole 12, a pump cavity 13, a small liquid outlet hole 14, a cantilever beam II 15, a connecting column 16, a counter sink hole 17, a mounting hole 18, a large liquid outlet hole 19, a small liquid inlet hole 20 and a cantilever beam I21.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the particular embodiments described herein are illustrative only and are not limiting, and that the terms "upper", "lower", "front", "rear", "left", "right", "bottom", "inner", "outer", and the like are used merely for convenience in describing the invention based on the orientations and positional relationships illustrated in the drawings and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting:
as shown in fig. 1 to 6, an electromagnetically driven MEMS micropump apparatus includes a fixed ring 1, a permanent magnet 2, a pump chamber cover 3, a pump body 4, a diaphragm i 5, a base 6, an electromagnetic coil 8, and a diaphragm ii 10; wherein the pump cavity cover 3 is a rectangular cover-shaped component, and a mounting hole 18 is arranged in the middle; the pump body 4 is a rectangular block-shaped component, a circular recess is arranged in the middle of the rectangular block-shaped component to serve as a pump cavity 13, a large liquid inlet hole 12 and a small liquid outlet hole 14 are formed in the pump cavity 13, the diaphragm I5 is a rectangular sheet-shaped component, two U-shaped grooves are formed in the position, close to the middle, of the diaphragm, and the tongue-shaped parts at the U-shaped notches are used as a cantilever beam I21 and a cantilever beam II 15; the base 6 is a rectangular block-shaped component, the two ends of the front surface are respectively provided with a symmetrical connecting column 16, a large liquid outlet hole 19 and a small liquid inlet hole 20 are separately arranged near the middle part, the center of the bottom surface is provided with a counter bore 17, and an electromagnetic coil 8 connected with a power supply is embedded in the counter bore 16; two ends of the pump cavity cover 3, the pump body 4 and the diaphragm I5 are respectively provided with a connecting hole 11 which is symmetrical and corresponds to the connecting column 16, and the connecting column 16 is matched with the connecting holes 11 to ensure that the pump cavity cover 3, the pump body 4, the diaphragm I5 and the base 6 are stacked in sequence and then integrated into a whole; the permanent magnet 2 is a cylinder, one end of the permanent magnet penetrates through the mounting hole 18 to be connected and fixed with the fixing ring 1, the other end of the permanent magnet is connected with the diaphragm II 10 and then extends into the pump cavity 13, and the diaphragm II 10 is a circular disc with the size being consistent with that of the pump cavity 13.
The centers of the small liquid inlet holes 20, the cantilever beam I21 and the large liquid inlet hole 12 are positioned on the same vertical plane to form a one-way liquid inlet valve 9; the circle center of the large liquid outlet hole 19, the circle center of the cantilever beam II 15 and the small liquid outlet hole 14 are positioned on the same vertical plane, and the one-way liquid outlet valve 7 is formed.
The tongue parts forming the cantilever beam I21 and the cantilever beam II 15 are oppositely arranged.
The electromagnetic coil 8 is made of enameled wires and is wound by 80-100 turns around an iron core, and the main component of the permanent magnet 2 is neodymium iron boron.
The diaphragm II 10 is connected with the permanent magnet 2 in a bonding mode through glue, and the diaphragm II 10 can be connected with the permanent magnet 2 in a pressing mode after surface treatment is carried out on the diaphragm II 10 through oxygen ion gas.
The diaphragm I5 and the diaphragm II 10 are made of polydimethylsiloxane, and the pump cavity cover 3, the pump body 4 and the base 6 are made of polymethyl methacrylate.
As shown in fig. 7, the power supply connected to the electromagnetic coil 8 is a dc power supply, and provides bidirectional pulse current, in one cycle, the forward pulse time and the reverse pulse time are both t, and the current magnitude is both i (a).
Example (b): when the electromagnetic coil is electrified with the positive pulse of the bidirectional pulse current, the electromagnetic force with the same magnetism as the permanent magnet is generated, and the electromagnetic force repels the permanent magnet to push the permanent magnet to move upwards. At this moment, the volume of the cavity in the pump cavity is enlarged, the cantilever beam I in the one-way liquid inlet valve tilts upwards under the action of negative pressure, and liquid flows into the pump cavity through the small liquid inlet hole in the one-way liquid inlet valve, the tilted cantilever beam I and the large liquid inlet hole. Because the cantilever beam II in the one-way liquid outlet valve is slightly larger than the small liquid outlet hole, the cantilever beam II cannot be tilted upwards, the small liquid outlet hole is blocked, and liquid cannot flow into the pump cavity from the cantilever beam one-way liquid outlet valve, so that the micropump finishes the liquid pumping process at one time.
When the electromagnetic coil is electrified with the negative pulse of the bidirectional pulse current, an electromagnetic force with opposite magnetism to the permanent magnet is generated, and the electromagnetic force attracts the permanent magnet to move downwards. At the moment, the volume of the cavity in the pump cavity is reduced, the cantilever beam II in the one-way liquid outlet valve protrudes downwards, and the liquid in the pump cavity flows out through the small liquid outlet hole, the protruding cantilever beam II and the large liquid outlet hole in the one-way liquid outlet valve of the cantilever beam. Because the cantilever beam I in the cantilever beam one-way liquid inlet valve is slightly larger than the small liquid inlet hole and cannot protrude downwards, the small liquid inlet hole is blocked, and liquid cannot flow out of the cantilever beam one-way liquid inlet valve, so that the micropump finishes the process of pumping the liquid once.
When the electromagnetic coil continuously leads in the bidirectional pulse current, the volume of the cavity in the pump cavity can undergo a cycle process of increasing and decreasing, so that liquid flows into the pump cavity from the one-way liquid inlet valve, and then the liquid in the pump cavity flows out from the cantilever beam one-way liquid outlet valve, and the function of repeatedly pumping and pumping the liquid by the micropump is realized.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and scope of the present invention are intended to be covered thereby.
Claims (7)
1. An electromagnetically driven MEMS micropump apparatus characterized by: the permanent magnet pump comprises a fixed ring (1), a permanent magnet (2), a pump cavity cover (3), a pump body (4), a diaphragm I (5), a base (6), an electromagnetic coil (8) and a diaphragm II (10); wherein the pump cavity cover (3) is a rectangular cover-shaped component, and a mounting hole (18) is formed in the middle; the pump body (4) is a rectangular block-shaped component, a circular recess is arranged in the middle of the rectangular block-shaped component to serve as a pump cavity (13), a large liquid inlet hole (12) and a small liquid outlet hole (14) are formed in the pump cavity (13), the diaphragm I (5) is a rectangular sheet-shaped component, two U-shaped grooves are formed in the position, close to the middle of the diaphragm I, and tongue-shaped portions at the U-shaped notches are used as a cantilever beam I (21) and a cantilever beam II (15); the base (6) is a rectangular block-shaped component, two ends of the front surface of the base are respectively provided with a symmetrical connecting column (16), a liquid outlet big hole (19) and a liquid inlet small hole (20) are arranged near the middle part of the base, the center of the bottom surface of the base is provided with a counter sink (17), and an electromagnetic coil (8) connected with a power supply is embedded in the counter sink (16); two ends of the pump cavity cover (3), the pump body (4) and the diaphragm I (5) are respectively provided with a connecting hole (11) which is symmetrical and corresponds to the connecting column (16), and the connecting column (16) is matched with the connecting holes (11) to enable the pump cavity cover (3), the pump body (4), the diaphragm I (5) and the base (6) to be stacked in sequence and then combined into a whole; the permanent magnet (2) is a cylinder, one end of the permanent magnet penetrates through the mounting hole (18) to be fixedly connected with the fixing ring (1), the other end of the permanent magnet is connected with the diaphragm II (10) and then extends into the pump cavity (13), and the diaphragm II (10) is a wafer with the size consistent with that of the pump cavity (13).
2. The MEMS micropump device of claim 1, wherein: the centers of the small liquid inlet holes (20), the cantilever beam I (21) and the large liquid inlet holes (12) are positioned on the same vertical plane to jointly form a one-way liquid inlet valve (9); the circle center of the large liquid outlet hole (19), the circle center of the cantilever beam II (15) and the circle center of the small liquid outlet hole (14) are positioned on the same vertical plane to jointly form the one-way liquid outlet valve (7).
3. The MEMS micropump device of claim 1, wherein: the tongue-shaped parts forming the cantilever beam I (21) and the cantilever beam II (15) are oppositely arranged.
4. The MEMS micropump device of claim 1, wherein: the electromagnetic coil (8) is made of enameled wires and is wound by 80-100 turns of iron cores, and the main component of the permanent magnet (2) is neodymium iron boron.
5. The MEMS micropump device of claim 1, wherein: and the diaphragm II (10) is bonded and connected with the permanent magnet (2) through glue.
6. The MEMS micropump device of claim 1, wherein: diaphragm I (5) and diaphragm II (10) adopt the polydimethylsiloxane material to make, pump chamber lid (3), pump body (4) and base (6) adopt the polymethyl methacrylate material to make.
7. The MEMS micropump device of claim 1, wherein: the power supply connected with the electromagnetic coil (8) is a direct current power supply and provides bidirectional pulse current, in one period, the forward pulse time and the reverse pulse time are both t, and the current magnitude is I (A).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110425677.XA CN113187700A (en) | 2021-04-20 | 2021-04-20 | Electromagnetic drive's MEMS micropump device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110425677.XA CN113187700A (en) | 2021-04-20 | 2021-04-20 | Electromagnetic drive's MEMS micropump device |
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| Publication Number | Publication Date |
|---|---|
| CN113187700A true CN113187700A (en) | 2021-07-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110425677.XA Pending CN113187700A (en) | 2021-04-20 | 2021-04-20 | Electromagnetic drive's MEMS micropump device |
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| Country | Link |
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| CN (1) | CN113187700A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113833634A (en) * | 2021-09-01 | 2021-12-24 | 北京航空航天大学 | Electromagnetic drive type MEMS micropump and integrated processing technology thereof |
| CN114593993A (en) * | 2022-02-11 | 2022-06-07 | 上海工程技术大学 | Microscale tensile test measuring device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0821363A (en) * | 1994-07-07 | 1996-01-23 | Techno Takatsuki:Kk | Vibration type pump |
| CN1423052A (en) * | 2002-12-24 | 2003-06-11 | 重庆大学 | Miniature magnetic-driven pump |
| CN1542277A (en) * | 2003-06-04 | 2004-11-03 | 中国科学院长春光学精密机械与物理研 | Gas pressure type microfluid transport method and device therefor |
| CN102425538A (en) * | 2011-12-08 | 2012-04-25 | 厦门大学 | Electromagnetic force driven non-return micro-liter precision micro-pump |
| CN203925955U (en) * | 2014-07-10 | 2014-11-05 | 大连海事大学 | A kind of electromagnetism Micropump based on micro-fluidic chip |
| CN204493146U (en) * | 2015-03-27 | 2015-07-22 | 南昌工程学院 | A kind of integral valve formula micropump |
-
2021
- 2021-04-20 CN CN202110425677.XA patent/CN113187700A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0821363A (en) * | 1994-07-07 | 1996-01-23 | Techno Takatsuki:Kk | Vibration type pump |
| CN1423052A (en) * | 2002-12-24 | 2003-06-11 | 重庆大学 | Miniature magnetic-driven pump |
| CN1542277A (en) * | 2003-06-04 | 2004-11-03 | 中国科学院长春光学精密机械与物理研 | Gas pressure type microfluid transport method and device therefor |
| CN102425538A (en) * | 2011-12-08 | 2012-04-25 | 厦门大学 | Electromagnetic force driven non-return micro-liter precision micro-pump |
| CN203925955U (en) * | 2014-07-10 | 2014-11-05 | 大连海事大学 | A kind of electromagnetism Micropump based on micro-fluidic chip |
| CN204493146U (en) * | 2015-03-27 | 2015-07-22 | 南昌工程学院 | A kind of integral valve formula micropump |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113833634A (en) * | 2021-09-01 | 2021-12-24 | 北京航空航天大学 | Electromagnetic drive type MEMS micropump and integrated processing technology thereof |
| CN113833634B (en) * | 2021-09-01 | 2023-05-23 | 北京航空航天大学 | Electromagnetic driving MEMS micropump and integrated processing technology of micropump |
| CN114593993A (en) * | 2022-02-11 | 2022-06-07 | 上海工程技术大学 | Microscale tensile test measuring device |
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