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CN113109860B - Method for predicting heavy ion single event effect section curve of device - Google Patents

Method for predicting heavy ion single event effect section curve of device Download PDF

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CN113109860B
CN113109860B CN202110381221.8A CN202110381221A CN113109860B CN 113109860 B CN113109860 B CN 113109860B CN 202110381221 A CN202110381221 A CN 202110381221A CN 113109860 B CN113109860 B CN 113109860B
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罗尹虹
陈兆群
陈伟
张凤祁
王坦
丁李利
赵雯
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Northwest Institute of Nuclear Technology
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Abstract

本发明公开了预测器件重离子单粒子效应截面曲线的方法,包括以下步骤:对器件开展质子或中子单粒子效应实验,获取质子或中子单粒子效应截面数据并威布尔拟合得到质子或中子单粒子效应截面曲线;构建芯片结构模型,蒙卡计算不同能量质子或中子与器件材料发生核反应在灵敏层内产生的次级粒子LET谱;估算两个重离子单粒子效应截面数据点并初步拟合一条重离子单粒子效应截面曲线;将该重离子单粒子效应截面曲线与次级粒子LET谱积分,得到器件的质子或中子单粒子效应截面;比对积分计算数据与实验数据,调整重离子单粒子效应截面曲线的拟合参数,重复积分直到计算数据与实验数据的偏差在一定范围内,即得所需重离子单粒子效应截面曲线。

The invention discloses a method for predicting the heavy ion single particle effect cross-section curve of a device, which includes the following steps: carrying out a proton or neutron single particle effect experiment on the device, obtaining the proton or neutron single particle effect cross-section data and performing Weibull fitting to obtain the proton or neutron single particle effect cross-section curve. Neutron single particle effect cross-section curve; construct a chip structure model, Monte Carlo calculation of the secondary particle LET spectrum produced in the sensitive layer due to nuclear reactions between protons or neutrons of different energies and device materials; estimate two heavy ion single particle effect cross-section data points And preliminarily fit a heavy ion single particle effect cross-section curve; integrate the heavy ion single particle effect cross-section curve with the secondary particle LET spectrum to obtain the proton or neutron single particle effect cross-section of the device; compare the integrated calculation data with the experimental data , adjust the fitting parameters of the heavy ion single particle effect cross-section curve, and repeat the integration until the deviation between the calculated data and the experimental data is within a certain range, and the required heavy ion single particle effect cross-section curve is obtained.

Description

一种预测器件重离子单粒子效应截面曲线的方法A method for predicting the heavy ion single particle effect cross-section curve of devices

技术领域Technical field

本发明属于空间辐射效应模拟试验技术及抗辐射加固技术研究领域,涉及一种基于质子或中子单粒子效应截面预测器件重离子单粒子效应截面曲线的方法。The invention belongs to the research field of space radiation effect simulation test technology and radiation resistance reinforcement technology, and relates to a method for predicting the heavy ion single particle effect cross-section curve of a device based on the proton or neutron single particle effect cross-section.

背景技术Background technique

空间辐射环境下,单粒子效应是影响航天器电子系统可靠性的重要因素,而重离子和质子是造成电子器件单粒子效应的主要来源。质子主要通过与器件材料发生核反应产生的次级粒子在灵敏区电离沉积能量引发单粒子效应,而重离子则通过直接电离在灵敏区内沉积能量引发单粒子效应。地面模拟重离子单粒子效应通常是利用加速器产生的重离子辐照器件,实验中选择5个以上重离子LET值点,获取器件单粒子效应截面与LET值的关系曲线,从而进行器件抗单粒子能力的评价。In the space radiation environment, single event effects are an important factor affecting the reliability of spacecraft electronic systems, and heavy ions and protons are the main sources of single event effects in electronic devices. Protons mainly cause single-particle effects by ionizing and depositing energy in the sensitive area through secondary particles produced by nuclear reactions with device materials, while heavy ions cause single-particle effects by depositing energy in the sensitive area through direct ionization. Ground simulation of heavy ion single particle effects usually uses heavy ion irradiation devices generated by accelerators. In the experiment, more than 5 heavy ion LET value points are selected to obtain the relationship curve between the single particle effect cross section of the device and the LET value, so as to carry out the device's anti-single particle effect. Evaluation of abilities.

随着器件性能提高、集成度增加以及封装工艺的发展,倒装工艺已成为主要的封装形式,其工艺特点为:将器件倒扣在基板上,二者之间以焊锡凸块的形式进行连接,几百微米厚度的衬底位于器件灵敏区上方。由于重离子加速器离子能量和射程有限,重离子难以穿透衬底到达器件灵敏区。因此,倒装器件进行重离子加速器实验时通常需要对器件开盖并进行减薄处理,操作过程中很容易对器件造成损伤,另一方面,对于高LET值高原子序数的重离子,其单核子能量进一步降低,即使对于减薄器件也难以满足实验中对离子射程的要求,这些均给倒装器件的重离子单粒子效应评估工作造成极大困难。而中高能质子由于LET值低,穿透材料时能量损失小,射程长,能够有效穿过器件封装和衬底到达器件灵敏区引发单粒子效应,获取器件完整的质子单粒子效应截面曲线。With the improvement of device performance, increased integration and the development of packaging technology, the flip-chip process has become the main packaging form. Its process characteristics are: flipping the device onto the substrate, and connecting the two in the form of solder bumps , a substrate with a thickness of several hundred microns is located above the sensitive area of the device. Due to the limited ion energy and range of the heavy ion accelerator, it is difficult for heavy ions to penetrate the substrate and reach the sensitive area of the device. Therefore, when flip-chip devices are used for heavy ion accelerator experiments, the device usually needs to be opened and thinned, which can easily cause damage to the device during the operation. On the other hand, for heavy ions with high LET values and high atomic numbers, their single The nuclear energy is further reduced, and even for thinned devices, it is difficult to meet the requirements for ion range in experiments, which makes it extremely difficult to evaluate the heavy ion single particle effect of flip-chip devices. Medium and high-energy protons, due to their low LET value, have small energy loss when penetrating materials and have long range. They can effectively pass through the device package and substrate to reach the sensitive area of the device to induce single particle effects, and obtain the complete proton single particle effect cross-section curve of the device.

针对以上问题和现状,考虑质子与重离子单粒子效应产生机理的相关性,提出一种基于质子或中子单粒子效应实验数据预测器件重离子单粒子效应截面曲线的方法,通过质子实验数据及相应的模拟计算即可获得器件重离子单粒子效应截面曲线,有效解决了倒装器件抗重离子单粒子性能难评估的现实问题。In view of the above problems and current situation, considering the correlation between the generation mechanisms of proton and heavy ion single particle effects, a method is proposed to predict the heavy ion single particle effect cross-section curve of the device based on the proton or neutron single particle effect experimental data. Through the proton experimental data and Corresponding simulation calculations can obtain the heavy ion single particle effect cross-section curve of the device, effectively solving the practical problem of difficult evaluation of the anti-heavy ion single particle performance of flip-chip devices.

专利申请号200710177960.5,公开号为CN100538378C,名称为“获取单粒子效应截面与重离子线性能量转移关系的方法”,给出了基于重离子加速器测试器件重离子单粒子效应截面的实验方法;专利申请号202010982765.5,公开号为CN112230081A,名称为“一种脉冲激光单粒子效应试验等效LET值计算方法”,给出了利用脉冲激光单粒子实验数据等效重离子不同LET值单粒子效应截面的方法。专利申请号201711173677.5,公开号为CN108008289B,名称为“一种质子单粒子效应截面的获取方法”,给出了基于重离子单粒子效应截面曲线获取质子单粒子效应截面数据的方法。这三个方法均未涉及基于器件质子单粒子效应截面预测重离子单粒子效应截面曲线的方法。Patent application number 200710177960.5, publication number CN100538378C, titled "Method for Obtaining the Relationship between Single Particle Effect Cross Section and Heavy Ion Linear Energy Transfer", provides an experimental method based on the heavy ion single particle effect cross section of a heavy ion accelerator test device; patent application No. 202010982765.5, the public number is CN112230081A, and the name is "A method for calculating the equivalent LET value of the pulsed laser single particle effect test". It provides a method for using the pulsed laser single particle experimental data to equivalent heavy ion single particle effect cross sections with different LET values. . The patent application number is 201711173677.5, the publication number is CN108008289B, and the name is "A method for obtaining proton single particle effect cross-section". It provides a method for obtaining proton single particle effect cross-section data based on the heavy ion single particle effect cross-section curve. None of these three methods involves the method of predicting the heavy ion single particle effect cross-section curve based on the device proton single particle effect cross section.

发明内容Contents of the invention

本发明提供了一种预测器件重离子单粒子效应截面曲线的方法,在无需开展重离子单粒子效应实验的情况下即可获取倒装器件完整的重离子单粒子效应截面曲线,为评价倒装器件抗重离子单粒子能力提供了一种有效的技术手段,克服了现有技术存在倒装器件的重离子单粒子效应评估过程困难较大的不足。The invention provides a method for predicting the heavy ion single particle effect cross-section curve of a device. The complete heavy ion single particle effect cross-section curve of a flip-chip device can be obtained without carrying out a heavy ion single-particle effect experiment. This method provides a method for evaluating flip-chip devices. The device's ability to withstand heavy ion single particles provides an effective technical means, overcoming the existing technology's shortcomings in the difficulty of evaluating the heavy ion single particle effect of flip-chip devices.

本发明的技术解决方案是:The technical solution of the present invention is:

一种预测器件重离子单粒子效应截面曲线的方法,其特殊之处在于,包括以下步骤:A method for predicting the heavy ion single particle effect cross-section curve of a device is special in that it includes the following steps:

步骤一:对待测器件进行质子或中子单粒子效应实验,获取器件质子或中子单粒子效应截面曲线;Step 1: Conduct a proton or neutron single particle effect experiment on the device to be tested, and obtain the proton or neutron single particle effect cross-section curve of the device;

步骤二:对器件进行纵切分析,构建器件结构模型,模拟计算不同能量质子或中子与器件材料发生核反应产生的次级粒子LET谱;Step 2: Conduct longitudinal analysis of the device, construct a device structure model, and simulate and calculate the LET spectrum of secondary particles produced by the nuclear reaction of protons or neutrons of different energies with the device material;

步骤三:通过质子数据估算2个重离子单粒子效应截面数据点,并初步拟合一条重离子单粒子效应截面曲线;Step 3: Estimate two heavy ion single particle effect cross-section data points through proton data, and initially fit a heavy ion single particle effect cross-section curve;

步骤四:将步骤三中得到的重离子单粒子效应截面曲线与步骤二中计算得到的不同质子或中子能量下次级粒子LET谱分别进行积分计算,获得不同能量下的质子或中子单粒子效应截面;Step 4: Integrate the heavy ion single particle effect cross-section curve obtained in step 3 and the secondary particle LET spectra of different proton or neutron energies calculated in step 2 to obtain the proton or neutron single particle effect at different energies. Particle Effect Cross Section;

步骤五:将步骤四中积分计算数据与步骤一质子或中子单粒子效应实验数据进行比对,当偏差超出设定范围时,不断调整器件重离子单粒子效应截面曲线的拟合参数,重复步骤四,直到积分计算数据与质子或中子实验数据之间的偏差在设定范围内,则此时的重离子单粒子效应截面曲线即为所求。Step 5: Compare the integral calculation data in Step 4 with the proton or neutron single particle effect experimental data in Step 1. When the deviation exceeds the set range, continuously adjust the fitting parameters of the device heavy ion single particle effect cross-section curve, and repeat Step 4: Until the deviation between the integral calculation data and the proton or neutron experimental data is within the set range, the heavy ion single particle effect cross-section curve at this time is the desired one.

进一步地,所述步骤一具体为:Further, the step one is specifically:

开展器件质子或中子单粒子效应实验,对获取的质子或中子实验数据进行威布尔拟合,得到拟合后的质子或中子单粒子效应截面曲线σp(Ep):Carry out device proton or neutron single particle effect experiments, perform Weibull fitting on the obtained proton or neutron experimental data, and obtain the fitted proton or neutron single particle effect cross-section curve σ p (E p ):

式中,σsat-p为质子或中子单粒子效应饱和截面,单位cm2;Ep0为质子或中子单粒子效应能量阈值,单位MeV;W为尺度参数;S为形状参数;Ep为质子或中子能量,单位MeV。In the formula, σ sat-p is the saturation cross section of proton or neutron single particle effect, unit cm 2 ; E p0 is the energy threshold of proton or neutron single particle effect, unit MeV; W is the scale parameter; S is the shape parameter; E p It is the energy of proton or neutron in MeV.

进一步地,所述步骤二具体为:Further, the second step is specifically:

2.1)对器件进行纵剖分析,获得其封装、散热硅脂、衬底、灵敏层的厚度及材料成分,构建器件灵敏体积模型;2.1) Conduct a longitudinal cross-sectional analysis of the device, obtain the thickness and material composition of its packaging, heat dissipation silicone grease, substrate, and sensitive layer, and construct a sensitive volume model of the device;

2.2)利用蒙卡粒子输运模拟软件计算能量为Ep的质子或中子与器件材料发生核反应,在灵敏层内产生LET值为L的次级粒子概率,获取概率函数p(Ep,L)与LET值的关系曲线。2.2) Use Monte Carlo particle transport simulation software to calculate the probability that protons or neutrons with energy E p will react with the device material to produce secondary particles with LET value L in the sensitive layer, and obtain the probability function p (E p ,L ) versus LET value.

进一步地,所述步骤三具体为:Further, the third step is specifically:

3.1)根据质子单粒子效应饱和截面结合公式(1-2),初步估算重离子单粒子效应饱和截面数据点σsat-ion3.1) Based on the proton single particle effect saturation cross section combined with formula (1-2), initially estimate the heavy ion single particle effect saturation cross section data point σ sat-ion :

σsat-ion=106×σsat-p (1-2)σ sat-ion =10 6 ×σ sat-p (1-2)

3.2)通过蒙卡计算步骤一中位于质子或中子单粒子效应截面曲线拐点附近能量为Ep的质子在灵敏层内产生的次级粒子等效LET值,并统计等效LET值大于LET阈值的概率p(L>L0),由公式(1-3)估算另一个重离子单粒子效应截面数据点σion(L):3.2) Calculate the equivalent LET value of the secondary particles generated in the sensitive layer by the proton with energy E p near the inflection point of the proton or neutron single particle effect cross-section curve in step 1, and statistically the equivalent LET value is greater than the LET threshold The probability p(L>L 0 ), another heavy ion single particle effect cross-section data point σ ion (L) is estimated by formula (1-3):

式中,L为等效LET值,L0为LET阈值;In the formula, L is the equivalent LET value, L 0 is the LET threshold;

3.3)结合3.1)和3.2)估算的两个重离子单粒子效应截面,依据公式(1-4)初步拟合一条重离子单粒子效应截面曲线3.3) Combine the two heavy ion single particle effect cross sections estimated in 3.1) and 3.2) and initially fit a heavy ion single particle effect cross section curve according to formula (1-4)

进一步地,所述步骤四具体为:Further, the fourth step is specifically:

所述步骤四中所用的积分表达式为:The integral expression used in step four is:

式中,σp(Ep)为能量为Ep的质子或中子单粒子效应截面;p(Ep,L)为能量为Ep的质子或中子与器件材料核反应生成次级粒子LET值为L的概率;σion(L)为LET值为L的重离子单粒子效应截面。In the formula, σ p (E p ) is the single particle effect cross section of a proton or neutron with energy E p ; p (E p ,L) is the secondary particle LET generated by the nuclear reaction of protons or neutrons with energy E p with the device material. The probability that the value is L; σ ion (L) is the heavy ion single particle effect cross section with a LET value of L.

进一步地,所述待测器件为倒装器件。Further, the device under test is a flip-chip device.

本发明的有益效果是:The beneficial effects of the present invention are:

1、本发明能够在无需开展重离子单粒子效应实验的情况下,得到倒装器件完整重离子单粒子效应截面曲线,解决了倒装器件抗重离子单粒子能力难评价的技术瓶颈,并极大降低了实验成本。1. The present invention can obtain the complete heavy ion single particle effect cross-section curve of the flip-chip device without carrying out heavy ion single particle effect experiments, solves the technical bottleneck of difficult evaluation of the anti-heavy ion single particle effect capability of the flip-chip device, and greatly improves the efficiency of the flip-chip device. Greatly reduces experimental costs.

2、质子或中子单粒子效应试验可在空气中开展,且无需对器件开封或减薄即可开展质子或中子单粒子效应截面的测试,减少对器件的损伤,较低了试验难度。2. The proton or neutron single particle effect test can be carried out in the air, and the proton or neutron single particle effect cross section can be tested without unpacking or thinning the device, reducing damage to the device and lowering the difficulty of the test.

3、本发明从质子或中子与器件材料发生核反应产生次级粒子引发单粒子效应的根本机制出发,物理概念清晰,计算时间与数据精度符合实际应用需求。3. This invention starts from the fundamental mechanism of the nuclear reaction of protons or neutrons with device materials to produce secondary particles that trigger single particle effects. The physical concept is clear, and the calculation time and data accuracy meet the needs of practical applications.

附图说明Description of drawings

图1是本发明一个实施例的流程图;Figure 1 is a flow chart of an embodiment of the present invention;

图2是包含器件多层材料信息的灵敏体积结构模型;Figure 2 is a sensitive volume structure model containing multi-layer material information of the device;

图3是不同能量质子与器件材料发生核反应在灵敏层内产生的次级粒子概率函数与LET值的关系曲线;Figure 3 is the relationship curve between the probability function of secondary particles produced in the sensitive layer due to nuclear reactions between protons of different energies and device materials and the LET value;

图4是初步拟合的重离子单粒子效应截面曲线;Figure 4 is a preliminary fitting cross-section curve of heavy ion single particle effect;

图5是质子实验数据与模拟计算数据之间偏差符合要求时的对比图;Figure 5 is a comparison chart when the deviation between proton experimental data and simulation calculation data meets the requirements;

图6是最终校准后的重离子单粒子效应截面曲线与重离子实验数据的对比图。Figure 6 is a comparison diagram between the final calibrated heavy ion single particle effect cross-section curve and the heavy ion experimental data.

具体实施方式Detailed ways

下面以某倒装FPGA器件为例,结合附图对本发明具体实施例进一步详述,以下实施例仅用于说明本发明,但不用来限制本发明的范围。Taking a flip-chip FPGA device as an example, specific embodiments of the present invention will be further described in detail with reference to the accompanying drawings. The following embodiments are only used to illustrate the present invention, but are not intended to limit the scope of the present invention.

图1是本发明一种基于质子单粒子效应截面预测器件重离子单粒子效应截面曲线的方法流程图,结合图1,对本方法步骤进行详细描述。Figure 1 is a flow chart of a method of predicting the heavy ion single particle effect cross section curve of a device based on the proton single particle effect cross section of the present invention. The steps of this method are described in detail with reference to Figure 1.

S1】对倒装FPGA器件开展质子单粒子效应实验,并将实验数据进行威布尔拟合,获得拟合后的质子单粒子效应截面函数,其表达式为:S1] Carry out proton single particle effect experiments on flip-chip FPGA devices, and perform Weibull fitting on the experimental data to obtain the fitted proton single particle effect cross-section function, whose expression is:

S2】对倒装FPGA进行纵切分析,依据器件的纵向材料工艺信息,构建器件灵敏体积结构模型,见图2。使用蒙卡粒子输运模拟软件Geant4计算能量为Ep的质子与器件材料发生核反应在灵敏层内产生LET值为L的次级粒子概率,获取概率函数p(Ep,L)与LET值的关系曲线,见图3。S2] Conduct longitudinal analysis on the flip-chip FPGA, and construct a sensitive volume structure model of the device based on the longitudinal material and process information of the device, as shown in Figure 2. Use the Monte Carlo particle transport simulation software Geant4 to calculate the probability that a proton with energy E p will react with the device material to produce a secondary particle with an LET value L in the sensitive layer, and obtain the probability function p(E p ,L) and the LET value. The relationship curve is shown in Figure 3.

S3】由公式(1-2)初步估算重离子单粒子翻转饱和截面σsat-ion=106×σsat-p=106×2.1×10-15cm2/bit=2.1×10-9cm2/bit。采用Geant4进行计算得到40MeV质子在灵敏层内的等效LET值为1.71MeV·cm2/mg,此时的概率p(L>L0)=3.17×10-5;由公式(1-3)结合40MeV处的质子单粒子效应截面,估算得到LET值1.71MeV·cm2/mg的重离子单粒子翻转截面为。由上述两个点通过威布尔拟合得到初步的重离子单粒子效应截面曲线,见图4,其表达式为:S3】Preliminary estimation of heavy ion single particle flipping saturation cross section σ sat-ion =10 6 ×σ sat-p =10 6 ×2.1×10 -15 cm 2 /bit=2.1×10 -9 cm based on formula (1-2) 2 /bit. Using Geant4 to calculate, the equivalent LET value of 40MeV protons in the sensitive layer is 1.71MeV·cm 2 /mg. At this time, the probability p (L>L 0 )=3.17×10 -5 ; according to formula (1-3) Combined with the proton single particle effect cross section at 40 MeV, the heavy ion single particle flipping cross section with a LET value of 1.71 MeV·cm 2 /mg is estimated to be . From the above two points, a preliminary heavy ion single particle effect cross-section curve is obtained through Weibull fitting, as shown in Figure 4. Its expression is:

S4】将S3】中的表达式(1-7)与S2】中不同能量质子与器件材料核反应在灵敏层内产生的次级粒子LET谱p(Ep,L)依据公式(1-5)进行积分计算,获得不同能量下的质子单粒子翻转截面。S4] Compare the expression (1-7) in S3] with the secondary particle LET spectrum p(E p ,L) produced in the sensitive layer by the nuclear reaction between protons of different energies and the device material in S2] according to the formula (1-5) Perform integral calculations to obtain proton single particle flipping cross sections at different energies.

S5】将S4】中积分计算数据与S1】质子单粒子效应实验数据进行比对,此时偏差较大,则不断调整器件重离子单粒子效应截面曲线的拟合参数,重复S4】,直到积分计算数据与质子实验数据之间的偏差减小到一定范围内,如图5所示,则此时的重离子单粒子效应截面曲线即为所求曲线,见图6。其中,经过多次调整后得到的重离子单粒子效应截面威布尔曲线表达式(1-8):S5] Compare the integral calculation data in S4] with the proton single particle effect experimental data in S1]. If the deviation is large at this time, continuously adjust the fitting parameters of the device heavy ion single particle effect cross-section curve, and repeat S4] until the integration When the deviation between the calculated data and the proton experimental data is reduced to a certain range, as shown in Figure 5, the heavy ion single particle effect cross-section curve at this time is the required curve, see Figure 6. Among them, the heavy ion single particle effect cross-section Weibull curve expression (1-8) obtained after multiple adjustments:

对图6中重离子单粒子效应实验数据进行威布尔拟合,表达式见(1-9):Perform Weibull fitting on the heavy ion single particle effect experimental data in Figure 6. The expression is shown in (1-9):

可见,校准计算结果与重离子单粒子实验结果之间具有较好的一致性。It can be seen that there is good consistency between the calibration calculation results and the heavy ion single particle experimental results.

在另一实施例中,通过本发明方法还可以得到基于中子单粒子效应截面预测器件重离子单粒子效应截面曲线。In another embodiment, the method of the present invention can also be used to predict the heavy ion single particle effect cross section curve of the device based on the neutron single particle effect cross section.

Claims (4)

1.一种预测器件重离子单粒子效应截面曲线的方法,其特征在于,包括以下步骤:1. A method for predicting the heavy ion single particle effect cross-section curve of a device, which is characterized by including the following steps: 步骤一:对待测器件进行质子或中子单粒子效应实验,获取器件质子或中子单粒子效应截面曲线;Step 1: Conduct a proton or neutron single particle effect experiment on the device to be tested, and obtain the proton or neutron single particle effect cross-section curve of the device; 开展器件质子或中子单粒子效应实验,对获取的质子或中子实验数据进行威布尔拟合,得到拟合后的质子或中子单粒子效应截面曲线σp(Ep):Carry out device proton or neutron single particle effect experiments, perform Weibull fitting on the obtained proton or neutron experimental data, and obtain the fitted proton or neutron single particle effect cross-section curve σ p (E p ): 式中,σsat-p为质子或中子单粒子效应饱和截面,单位cm2;Ep0为质子或中子单粒子效应能量阈值,单位MeV;W为尺度参数;S为形状参数;Ep为质子或中子能量,单位MeV;In the formula, σ sat-p is the saturation cross section of proton or neutron single particle effect, unit cm 2 ; E p0 is the energy threshold of proton or neutron single particle effect, unit MeV; W is the scale parameter; S is the shape parameter; E p is the energy of proton or neutron in MeV; 步骤二:对器件进行纵切分析,构建器件结构模型,模拟计算不同能量质子或中子与器件材料发生核反应产生的次级粒子LET谱;Step 2: Conduct longitudinal analysis of the device, construct a device structure model, and simulate and calculate the LET spectrum of secondary particles produced by the nuclear reaction of protons or neutrons of different energies with the device material; 2.2)利用蒙卡粒子输运模拟软件计算能量为Ep的质子或中子与器件材料发生核反应,在灵敏层内产生LET值为L的次级粒子概率,获取概率函数p(Ep,L)与LET值的关系曲线;2.2) Use Monte Carlo particle transport simulation software to calculate the probability that protons or neutrons with energy E p will react with the device material to produce secondary particles with LET value L in the sensitive layer, and obtain the probability function p (E p ,L ) and the relationship curve between LET value; 步骤三:通过质子数据估算2个重离子单粒子效应截面数据点,并初步拟合一条重离子单粒子效应截面曲线;Step 3: Estimate two heavy ion single particle effect cross-section data points through proton data, and initially fit a heavy ion single particle effect cross-section curve; 3.1)根据质子单粒子效应饱和截面结合公式(1-2),初步估算重离子单粒子效应饱和截面数据点σsat-ion3.1) Based on the proton single particle effect saturation cross section combined with formula (1-2), initially estimate the heavy ion single particle effect saturation cross section data point σ sat-ion : σsat-ion=106×σsat-p (1–2)σ sat-ion =10 6 ×σ sat-p (1–2) σsat-p为质子或中子单粒子效应饱和截面;σ sat-p is the single particle effect saturation cross section of proton or neutron; 3.2)通过蒙卡计算步骤一中位于质子或中子单粒子效应截面曲线拐点附近能量为Ep的质子在灵敏层内产生的次级粒子等效LET值Lavg,并统计LET值大于LET阈值的概率p(L>L0),由公式(1-3)估算另一个重离子单粒子效应截面数据点σion(Lavg):3.2) Calculate the equivalent LET value L avg of the secondary particles produced by the proton with energy Ep near the inflection point of the proton or neutron single particle effect section curve in step 1 in the sensitive layer through Monte Carlo calculation, and count the LET values greater than the LET threshold Probability p(L>L 0 ), estimate another heavy ion single particle effect cross-section data point σ ion (L avg ) according to formula (1-3): 式中,Lavg为等效LET值,L为次级粒子LET值,L0为LET阈值,σp(Ep)为质子或中子单粒子效应截面;In the formula, L avg is the equivalent LET value, L is the secondary particle LET value, L 0 is the LET threshold, σ p (Ep) is the proton or neutron single particle effect cross section; 3.3)结合3.1)和3.2)估算的两个重离子单粒子效应截面,依据公式(1-4)初步拟合一条重离子单粒子效应截面曲线 3.3) Combine the two heavy ion single particle effect cross sections estimated in 3.1) and 3.2) and initially fit a heavy ion single particle effect cross section curve according to formula (1-4) 步骤四:将步骤三中得到的重离子单粒子效应截面曲线与步骤二中计算得到的不同质子或中子能量下次级粒子LET谱分别进行积分计算,获得不同能量下的质子或中子单粒子效应截面;Step 4: Integrate the heavy ion single particle effect cross-section curve obtained in step 3 and the secondary particle LET spectra of different proton or neutron energies calculated in step 2 to obtain the proton or neutron single particle effect at different energies. Particle Effect Cross Section; 步骤五:将步骤四中积分计算数据与步骤一质子或中子单粒子效应实验数据进行比对,当偏差超出设定范围时,不断调整器件重离子单粒子效应截面曲线的拟合参数,重复步骤四,直到积分计算数据与质子或中子实验数据之间的偏差在设定范围内,则此时的重离子单粒子效应截面曲线即为所求。Step 5: Compare the integral calculation data in Step 4 with the proton or neutron single particle effect experimental data in Step 1. When the deviation exceeds the set range, continuously adjust the fitting parameters of the device heavy ion single particle effect cross-section curve, and repeat Step 4: Until the deviation between the integral calculation data and the proton or neutron experimental data is within the set range, the heavy ion single particle effect cross-section curve at this time is the desired one. 2.如权利要求1所述的预测器件重离子单粒子效应截面曲线的方法,其特征在于,所述步骤二具体为:2. The method for predicting the heavy ion single particle effect cross-section curve of a device as claimed in claim 1, characterized in that the step two is specifically: 2.1)对器件进行纵剖分析,获得其封装、散热硅脂、衬底、灵敏层的厚度及材料成分,构建器件灵敏体积模型。2.1) Conduct a longitudinal cross-section analysis of the device to obtain the thickness and material composition of its packaging, heat dissipation silicone grease, substrate, and sensitive layer, and construct a sensitive volume model of the device. 3.如权利要求1所述的预测器件重离子单粒子效应截面曲线的方法,其特征在于,所述步骤四具体为:3. The method for predicting the heavy ion single particle effect cross-section curve of a device as claimed in claim 1, characterized in that the step four is specifically: 所述步骤四中所用的积分表达式为:The integral expression used in step four is: 式中,σp(Ep)为能量为Ep的质子或中子单粒子效应截面;p(Ep,L)为能量为Ep的质子或中子与器件材料核反应生成次级粒子LET值为L的概率;σion(L)为LET值为L的重离子单粒子效应截面。In the formula, σ p (E p ) is the single particle effect cross section of a proton or neutron with energy E p ; p (E p ,L) is the secondary particle LET generated by the nuclear reaction of protons or neutrons with energy E p with the device material. The probability that the value is L; σ ion (L) is the heavy ion single particle effect cross section with a LET value of L. 4.如权利要求1至3任一所述的预测器件重离子单粒子效应截面曲线的方法,其特征在于,所述待测器件为倒装器件。4. The method for predicting the heavy ion single event effect cross-section curve of a device according to any one of claims 1 to 3, characterized in that the device to be tested is a flip-chip device.
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