CN113074188A - Micro-seam air floatation unit and forming method thereof - Google Patents

Abstract

A micro-slit air floatation unit and a forming method thereof belong to the field of static pressure air floatation. The invention solves the problems of poor gap passing capability of the small-hole throttling air flotation unit, eddy interference and environmental pollution caused by falling powder of the porous air flotation unit. The invention relates to a micro-gap air floating unit, which comprises an upper shell, an air conducting cavity and a bottom plate with a slit; wherein the shape of the slit is honeycomb-shaped, and the width of the slit is millimeter level; the upper shell is covered on the bottom plate with the slit, and the bottom surfaces of the upper shell and the bottom plate are flush; the air guide cavity is arranged on the bottom plate with the slit and is communicated with the slit; a space formed between the outer portions of the bottom plate and the air guide cavity and the upper shell is filled with pouring materials, and the air guide cavity is communicated with the outer portion of the upper shell through an air inlet channel. The invention mainly carries out air floatation support.

Description

Micro-slit air flotation unit and its forming method

technical field

The invention belongs to the field of static pressure air flotation.

Background technique

Hydrostatic air flotation technology is a widely used gas lubrication technology, which can realize non-contact and near-zero friction relative motion of two relative moving parts. Air flotation units based on static pressure air flotation technology are widely used in precision instruments and other fields. . The traditional static pressure air flotation unit is divided into a small hole throttling air flotation unit and a porous air flotation unit.

The air flotation unit with small hole throttling processes small holes perpendicular to the working plane. After the gas passes through the small holes, a high-pressure air film is formed on the working plane to suspend the air flotation unit. Limited by the processing technology and cost, the diameter of the small hole is usually sub-millimeter, the flow resistance of the gas passing through the small hole is low, and the perpendicularity of the axis of the small hole to the working plane is also difficult to guarantee. The low flow resistance causes the air film to quickly release pressure when the small holes of the air flotation unit pass through the spliced gap of the air flotation platform, and the air flotation unit loses its bearing capacity; the poor verticality causes the tangential airflow parallel to the working plane after the airflow passes through the small holes , forming eddy current interference, causing the air flotation unit to rotate.

The porous air flotation unit forms nano-scale pores inside the material through the sintering process, and the gas passes through the pores and forms a high-pressure gas film on the working plane. Porous materials have small pores and a large number of pores, large flow resistance and homogenization effect. Therefore, when the porous static pressure air flotation unit passes through the air flotation platform to splicing the gap, there is almost no pressure relief, and the eddy current interference is small. However, due to the limitation of the sintering process, the cost is high, and the structural strength of the sintered material is low, and there are falling powders, which will pollute the environment in the application of precision instruments and purification environments, limiting its application range.

Therefore, it is urgent to develop a new static pressure air flotation unit to solve the above problems.

SUMMARY OF THE INVENTION

The purpose of the present invention is to solve the problems of poor passage ability of small hole throttle air flotation unit gaps, eddy current interference, and polluted environment by powder falling off porous air flotation units. The invention provides a micro-slot air flotation unit and its forming method.

The micro-slit air flotation unit includes an upper casing 1, an air-guiding cavity 2 and a bottom plate 3 with a slit 3-1; wherein the shape of the slit 3-1 is honeycomb, and the width of the slit 3-1 is in the order of millimeters ;

The upper casing 1 is covered on the bottom plate 3 with the slit 3-1, and the bottom surfaces of the two are flush;

The air guide cavity 2 is arranged on the bottom plate 3 with the slit 3-1, and the air guide cavity 2 is communicated with the slit 3-1;

The space formed between the bottom plate 3 and the outside of the air guide cavity 2 and the upper shell 1 is filled with casting material, and the air guide cavity 2 communicates with the outside of the upper shell 1 through the air inlet channel 5;

The jet direction of the airflow flowing through the slit 3-1 is perpendicular to the working plane.

Preferably, the upper casing 1 is further provided with a pressing column 1 - 2 , and the pressing column 1 - 2 is located above the air guide cavity 2 and squeezed between the inner wall of the upper casing 1 and the air guide cavity 2 .

Preferably, the base plate 3 with the slit 3-1, the air guide cavity 2 and the casting material are of the same material.

Preferably, the width of the slit 3-1 ranges from 0.01 mm to 0.05 mm.

The molding method of the micro-slot air flotation unit is realized based on the upper shell 1, the upper substrate 6, the aluminum honeycomb core 7 and the lower template 4; the upper shell 1 is provided with a pouring hole 1-1, and the upper substrate 6 It is a flat substrate with a hole-like structure on it, and a limit post 6-1 on it;

The implementation of the molding method includes:

Step 1. Fasten the upper shell 1 on the lower template 4, and the upper substrate 6 and the aluminum honeycomb core 7 are arranged in the cavity between the upper shell 1 and the lower template 4, and the upper substrate 6 is located in the aluminum honeycomb core 7. Above, the limit post 6-1 on the upper base plate 6 penetrates through the upper casing 1 and extends out of the upper casing 1, and the upper casing 1 is limited by the limit post 6-1;

Step 2, pour the pouring material through the pouring hole 1-1, so that the pouring material fills the cavity between the upper shell 1 and the lower template 4, the hole on the upper substrate 6 and the socket hole 7-1 on the aluminum honeycomb core 7, After the solidification of the pouring material, the lower formwork 4 is removed, and the bottom surface of the poured aluminum honeycomb core 7 is ground to make it smooth;

Step 3: Dissolving the cavity wall 7-2 of the aluminum honeycomb core 7 and the flat-plate substrate of the upper substrate 6 and the limit post 6-1 of the upper substrate 6 by using the corrosive material, and the solidified material to be poured and the upper shell 1 are not. Corrosion, so that the cavity wall 7-2 of the aluminum honeycomb core 7 dissolves to form the bottom plate 3 with the slit 3-1, the flat substrate of the upper substrate 6 dissolves to form the air guide cavity 2, and the limit post 6-1 dissolves. The air intake channel 5 is formed, thereby forming the micro-slot air flotation unit;

Wherein, the slit 3 - 1 is communicated with the air guide cavity 2 and the air intake passage 5 .

Preferably, in the second step, the pouring material is concrete fluid, epoxy resin fluid or artificial stone fluid.

Preferably, both the upper substrate 6 and the aluminum honeycomb core 7 are realized by metal aluminum.

Preferably, the corrosion material in step 3 is acidic.

Preferably, in step 2, after grinding the bottom surface of the cast aluminum honeycomb core 7, the flatness of the bottom surface of the cast aluminum honeycomb core 7 is less than 5um.

Preferably, in step 3, the width of the slit 3-1 formed after the cell wall 7-2 of the aluminum honeycomb core 7 is dissolved is in the order of millimeters.

Preferably, in step 3, the width of the slit 3-1 formed after the cell wall 7-2 of the aluminum honeycomb core 7 is dissolved is the thickness of the cell wall 7-2 of the aluminum honeycomb core 7, and the width of the slit 3-1 is within the range of from 0.01mm to 0.05mm.

Preferably, in the molding method, a pressing column 1-2 is further provided on the upper casing 1, and the pressing column 1-2 is used for pressing the upper substrate 6 and the aluminum honeycomb core 7.

Preferably, in the molding method, the pressing column 1-2 and the upper casing 1 are one piece with the same material.

Preferably, in the molding method, the holes on the upper substrate 6 are uniformly distributed in the circumferential direction.

Preferably, in the forming method, the aluminum honeycomb core 7 is made of aluminum foil.

The beneficial effect brought by the invention is that the micro-slot air flotation unit has a simple structure, and the slits are distributed as a whole, which avoids the problem of pressure relief when the small holes in the small hole throttling air flotation unit pass through the air flotation platform to splicing the gap. Strong capacity, and the slit is much smaller than the diameter of the small hole of the small hole throttling air flotation unit, and the flow resistance is large. During the molding process of the micro-slot air flotation unit, the materials used are easy to obtain, the process is simple and mature, and the overall cost is low.

Description of drawings

1 is an axial cross-sectional view of a micro-slot air flotation unit according to the present invention;

2 is a three-dimensional structural schematic diagram of the structure formed by the upper casing 1 , the upper substrate 6 , the aluminum honeycomb core 7 and the lower template 4 after the encapsulation of the present invention is completed and in a state to be poured;

Fig. 3 is the top view of Fig. 2;

Fig. 4 is the partial cross-sectional view of Fig. 3 in the A-A direction;

FIG. 5 is a schematic structural diagram of the aluminum honeycomb core 7; wherein,

5a is a schematic diagram of the three-dimensional structure of the aluminum honeycomb core 7;

Figure 5b is a top view of Figure 5a;

FIG. 6 is a schematic structural diagram of the upper substrate 6; wherein,

6a is a schematic diagram of the three-dimensional structure of the upper substrate 6;

Figure 6b is a top view of Figure 6a;

Figure 6c is a side view of Figure 6a.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

It should be noted that the embodiments of the present invention and the features of the embodiments may be combined with each other under the condition of no conflict.

Referring to FIG. 1 to describe this embodiment, the micro-slot air flotation unit described in this embodiment includes an upper casing 1, an air guide cavity 2 and a bottom plate 3 with a slit 3-1; wherein the shape of the slit 3-1 is It is honeycomb-shaped, and the width of the slit 3-1 is in the order of millimeters;

The upper casing 1 is covered on the bottom plate 3 with the slit 3-1, and the bottom surfaces of the two are flush;

The air guide cavity 2 is arranged on the bottom plate 3 with the slit 3-1, and the air guide cavity 2 is communicated with the slit 3-1;

The space formed between the bottom plate 3 and the outside of the air guide cavity 2 and the upper shell 1 is filled with casting material, and the air guide cavity 2 communicates with the outside of the upper shell 1 through the air inlet channel 5;

The jet direction of the airflow flowing through the slit 3-1 is perpendicular to the working plane.

In application, the upper surface of the upper shell 1 can be processed to adapt the interface according to the needs of installation with external equipment; the air nozzle is supplied with high-pressure gas such as compressed air from the position of the air inlet channel 5, and the high-pressure gas passes through the internal air cavity, and finally It is discharged from the honeycomb slit 3-1, and forms a high-pressure air film on the working plane of the air-floating platform to achieve suspension relative to the air-floating platform. The high-pressure gas can be supplied by a high-pressure gas cylinder or an air compressor.

When the micro-slit passes through the splicing gap of the air flotation platform, because the micro-slit gap is small, the flow resistance is large, and at the same time, only a small part of the micro-slit is located on the splicing gap of the air flotation platform. Therefore, the overall pressure will not be released, and the air flotation unit The pressure-holding ability is strong, and the gap passing ability is strong. The slits are distributed in a distributed layout, and the perpendicularity to the working plane is easier to ensure than the small holes, and the eddy current interference is small after the airflow passes through the micro slits.

Further, referring specifically to FIG. 1 , the upper casing 1 is also provided with a pressing column 1-2, and the pressing column 1-2 is located above the air guide cavity 2 and is pressed against the inner wall of the upper casing 1 and the air guide cavity. between 2.

Further, the base plate 3 with the slit 3-1, the air guide cavity 2 and the casting material are of the same material.

Further, the width of the slit 3-1 ranges from 0.01 mm to 0.05 mm.

Referring to FIGS. 1 to 6 to illustrate the present embodiment, the forming method of the micro-slot air flotation unit is realized based on the upper casing 1 , the upper substrate 6 , the aluminum honeycomb core 7 and the lower template 4 ; There is a pouring hole 1-1, the upper base plate 6 is a flat base plate, and a hole-like structure is arranged on it, and a limit post 6-1 is arranged on it;

The implementation of the molding method includes:

Step 1. Fasten the upper shell 1 on the lower template 4, and the upper substrate 6 and the aluminum honeycomb core 7 are arranged in the cavity between the upper shell 1 and the lower template 4, and the upper substrate 6 is located in the aluminum honeycomb core 7. Above, the limit post 6-1 on the upper base plate 6 penetrates through the upper casing 1 and extends out of the upper casing 1, and the upper casing 1 is limited by the limit post 6-1;

Step 2, pour the pouring material through the pouring hole 1-1, so that the pouring material fills the cavity between the upper shell 1 and the lower template 4, the hole on the upper substrate 6 and the socket hole 7-1 on the aluminum honeycomb core 7, After the solidification of the pouring material, the lower formwork 4 is removed, and the bottom surface of the poured aluminum honeycomb core 7 is ground to make it smooth;

Step 3: Dissolving the cavity wall 7-2 of the aluminum honeycomb core 7 and the flat-plate substrate of the upper substrate 6 and the limit post 6-1 of the upper substrate 6 by using the corrosive material, and the solidified material to be poured and the upper shell 1 are not. Corrosion, so that the cavity wall 7-2 of the aluminum honeycomb core 7 dissolves to form the bottom plate 3 with the slit 3-1, the flat substrate of the upper substrate 6 dissolves to form the air guide cavity 2, and the limit post 6-1 dissolves. The air intake channel 5 is formed, thereby forming the micro-slot air flotation unit;

Wherein, the slit 3 - 1 is communicated with the air guide cavity 2 and the air intake passage 5 .

In this embodiment, the slits are distributed in a distributed layout, and the perpendicularity between the cell wall of the aluminum honeycomb core 7 and the working plane is easy to ensure relative to the small holes, and the eddy current interference is small after the airflow passes through the micro slits. In addition, the material produced by the mature pouring process has high overall rigidity and high strength, and there is no problem of powder falling off and environmental pollution.

In specific applications, the connection interface with the outside is generally processed at the center of the upper shell 1. In order to avoid interference, the air nozzles are arranged at a position away from the center. Therefore, the limit posts 6-1 can be distributed on the outermost corresponding honeycomb walls. The handover position, that is, away from the center, can ensure good communication with the internal air cavity after the corrosion material is corroded.

Further, in step 2, the pouring material is concrete fluid, epoxy resin fluid or artificial stone fluid. In this embodiment, the material of the aluminum honeycomb core 7 may be epoxy resin, concrete, artificial stone and other pouring materials that are easy to obtain, the pouring process is mature, and the cost of the air flotation unit is low.

Furthermore, both the upper substrate 6 and the aluminum honeycomb core 7 are realized by metal aluminum.

Further, the corrosion material in step 3 is acidic.

Further, in step 2, after grinding the bottom surface of the cast aluminum honeycomb core 7, the flatness of the bottom surface of the cast aluminum honeycomb core 7 is less than 5um.

Further, in step 3, the width of the slit 3-1 formed after the cell wall 7-2 of the aluminum honeycomb core 7 is dissolved is in the order of millimeters.

Further, in step 3, the width of the slit 3-1 formed after the cell wall 7-2 of the aluminum honeycomb core 7 is dissolved is the thickness of the cell wall 7-2 of the aluminum honeycomb core 7, and the width of the slit 3-1 is within the range of from 0.01mm to 0.05mm.

Furthermore, the upper casing 1 is also provided with a pressing column 1-2, and the pressing column 1-2 is used for pressing the upper substrate 6 and the aluminum honeycomb core 7.

Further, the pressing column 1-2 and the upper casing 1 are one piece, and the material is the same.

In this embodiment, in order to achieve better compression of the upper substrate 6 and the aluminum honeycomb core 7, the compression columns 1-2 of the upper casing 1 are distributed at the handover position of the honeycomb walls, and the specific number can be determined according to the size of the overall structure. Select; and the compression column 1-2 is of the same material as the upper casing 1, and neither will be corroded.

Further, referring to FIG. 6 , the holes on the upper substrate 6 are evenly distributed in the circumferential direction.

Further, referring to FIG. 5 , the aluminum honeycomb core 7 is made of aluminum foil.

In specific application, the molding method of the micro-slit air flotation unit of the present invention adopts the upper shell 1, the upper base plate 6, the aluminum honeycomb core 7 and the lower template 4 to form a pouring mold, and pours acid corrosion-resistant concrete, Epoxy resin obtains acid corrosion resistant casting materials such as artificial stone, and further soaks and corrodes the aluminum upper substrate 6 and aluminum honeycomb core 7 by acid solution, thereby forming an air flotation unit with a connected air cavity inside and a micro-slit at the bottom. The aluminum honeycomb core 7 is made of aluminum foil, the wall thickness of the honeycomb is between 0.01mm and 0.05mm, the micro-slits formed by the acid solution corrosion are much smaller than the small hole diameter of the small hole throttle air flotation unit, and the flow resistance is large;

Although the invention has been described herein with reference to specific embodiments, it should be understood that these embodiments are merely illustrative of the principles and applications of the invention. It should therefore be understood that many modifications may be made to the exemplary embodiments and other arrangements can be devised without departing from the spirit and scope of the invention as defined by the appended claims. It should be understood that the features described in the various dependent claims and herein may be combined in different ways than are described in the original claims. It will also be appreciated that features described in connection with a single embodiment may be used in other described embodiments.

Claims (15)

1. The micro-slit air floatation unit is characterized by comprising an upper shell (1), an air guide cavity (2) and a bottom plate (3) with a slit (3-1); wherein the shape of the slit (3-1) is honeycomb-shaped, and the width of the slit (3-1) is millimeter;

the upper shell (1) is covered on the bottom plate (3) with the slit (3-1), and the bottom surfaces of the upper shell and the bottom plate are flush;

the air guide cavity (2) is arranged on the bottom plate (3) with the slit (3-1), and the air guide cavity (2) is communicated with the slit (3-1);

pouring materials are filled in a space formed between the outsides of the bottom plate (3) and the air guide cavity (2) and the upper shell (1), and the air guide cavity (2) is communicated with the outside of the upper shell (1) through an air inlet channel (5);

the jet direction of the air flow passing through the slit (3-1) is vertical to the working plane.

2. The micro-seam air-floating unit according to claim 1, characterized in that the upper shell (1) is further provided with a compressing column (1-2), and the compressing column (1-2) is located above the air-conducting cavity (2) and is squeezed between the inner wall of the upper shell (1) and the air-conducting cavity (2).

3. Micro-slit air-flotation unit according to claim 1, characterized in that the bottom plate (3) with the slits (3-1), the air-conducting cavity (2) and the casting material are made of the same material.

4. Micro-slot air flotation unit according to claim 1, characterized in that the width of the slot (3-1) ranges from 0.01mm to 0.05 mm.

5. The forming method of the micro-seam air flotation unit is characterized in that the forming method is realized based on an upper shell (1), an upper substrate (6), an aluminum honeycomb core (7) and a lower template (4); a pouring hole (1-1) is formed in the upper shell (1), the upper substrate (6) is a flat substrate, a hole-shaped structure is arranged on the upper substrate, and a limiting column (6-1) is arranged on the upper substrate;

the forming method comprises the following implementation modes:

step one, an upper shell (1) is buckled on a lower template (4), an upper substrate (6) and an aluminum honeycomb core (7) are arranged in a cavity between the upper shell (1) and the lower template (4), the upper substrate (6) is positioned above the aluminum honeycomb core (7), a limiting column (6-1) on the upper substrate (6) penetrates through the upper shell (1) and extends out of the upper shell (1), and the upper shell (1) is limited through the limiting column (6-1);

secondly, pouring a pouring material through the pouring holes (1-1), filling the pouring material into a cavity between the upper shell (1) and the lower template (4), holes in the upper substrate (6) and nest holes (7-1) in the aluminum honeycomb core (7), removing the lower template (4) after the pouring material is solidified, and grinding the bottom surface of the poured aluminum honeycomb core (7) to be flat;

dissolving a nest wall (7-2) of the aluminum honeycomb core (7), a flat substrate of the upper substrate (6) and a limiting column (6-1) of the upper substrate (6) by using a corrosive material, wherein the solidified material to be poured and the upper shell (1) are not corroded, so that the nest wall (7-2) of the aluminum honeycomb core (7) is dissolved to form a bottom plate (3) with a slit (3-1), the flat substrate of the upper substrate (6) is dissolved to form an air guide cavity (2), and the limiting column (6-1) is dissolved to form an air inlet channel (5), thereby forming a micro-seam air flotation unit;

wherein the slit (3-1) is communicated with the air guide cavity (2) and the air inlet channel (5).

6. The method for forming the micro-slit air flotation unit according to claim 5, wherein in the second step, the casting material is concrete fluid, epoxy resin fluid or artificial stone fluid.

7. The method for forming the micro-slit air-floating unit according to claim 5, wherein the upper substrate (6) and the aluminum honeycomb core (7) are both made of metallic aluminum.

8. The method as claimed in claim 7, wherein the corrosive material in step three is acidic.

9. The forming method of the micro-seam air flotation unit according to claim 5, characterized in that, in the second step, after the bottom surface of the cast aluminum honeycomb core (7) is ground, the flatness of the bottom surface of the cast aluminum honeycomb core (7) is less than 5 um.

10. The forming method of the micro-slit air flotation unit according to claim 5, characterized in that in the third step, the cell walls (7-2) of the aluminum honeycomb core (7) are dissolved to form the slits (3-1) with the width of millimeter.

11. The forming method of the micro-slit air flotation unit as claimed in claim 10, wherein in the third step, the width of the slit (3-1) formed by the dissolution of the cell wall (7-2) of the aluminum honeycomb core (7) is equal to the thickness of the cell wall (7-2) of the aluminum honeycomb core (7), and the width of the slit (3-1) ranges from 0.01mm to 0.05 mm.

12. The forming method of the micro-slit air-floating unit as claimed in claim 5, wherein the upper shell (1) is further provided with a pressing column (1-2), and the pressing column (1-2) is used for pressing the upper substrate (6) and the aluminum honeycomb core (7).

13. The method for forming the micro-slit air-floating unit as claimed in claim 12, wherein the pressing columns (1-2) are formed as a single piece with the upper housing (1) and are made of the same material.

14. The method for forming a micro-slit air-bearing unit as claimed in claim 5, wherein the holes on the upper substrate (6) are uniformly distributed circumferentially.

15. The method for forming a micro-slit air-floating unit as claimed in claim 5, wherein the aluminum honeycomb core (7) is made of aluminum foil.

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