CN113049144B - Heat insulation cavity for full-system wide low-temperature comprehensive calibration equipment of temperature measurement system - Google Patents
Heat insulation cavity for full-system wide low-temperature comprehensive calibration equipment of temperature measurement system Download PDFInfo
- Publication number
- CN113049144B CN113049144B CN202110331756.4A CN202110331756A CN113049144B CN 113049144 B CN113049144 B CN 113049144B CN 202110331756 A CN202110331756 A CN 202110331756A CN 113049144 B CN113049144 B CN 113049144B
- Authority
- CN
- China
- Prior art keywords
- temperature
- calibration
- cylinder body
- lead
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000009529 body temperature measurement Methods 0.000 title claims abstract description 32
- 238000009413 insulation Methods 0.000 title abstract description 15
- 238000007789 sealing Methods 0.000 claims abstract description 114
- 239000001307 helium Substances 0.000 claims abstract description 36
- 229910052734 helium Inorganic materials 0.000 claims abstract description 36
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000010935 stainless steel Substances 0.000 claims description 48
- 229910001220 stainless steel Inorganic materials 0.000 claims description 48
- 238000001816 cooling Methods 0.000 claims description 31
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 28
- 239000007789 gas Substances 0.000 claims description 16
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 14
- 229910052697 platinum Inorganic materials 0.000 claims description 14
- -1 polytetrafluoroethylene Polymers 0.000 claims description 12
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 12
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 12
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 29
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 24
- 229910052802 copper Inorganic materials 0.000 abstract description 24
- 239000010949 copper Substances 0.000 abstract description 24
- 230000008569 process Effects 0.000 abstract description 24
- 238000005259 measurement Methods 0.000 abstract description 17
- 238000011088 calibration curve Methods 0.000 abstract description 9
- 238000010438 heat treatment Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 239000000463 material Substances 0.000 description 10
- 238000005057 refrigeration Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 229910000619 316 stainless steel Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention provides a heat insulation cavity for a full-system wide low-temperature comprehensive calibration device of a temperature measurement system, which adopts a refrigerating machine refrigerating and heater heating comprehensive temperature control mode, the heat insulation calibration cavity adopts a three-layer structure, the middle layer is in vacuum insulation, the inner layer is used as a calibration temperature source, a sensor mounting copper seat is placed, and a temperature field is rapidly and uniformly realized through helium filling. In the calibration process, after the temperature sensor belt cable passes through the sealing seat, the temperature sensor belt cable is placed in the sensor mounting copper seat in the calibration cavity, then the lead is sealed, the middle and outer layers are vacuumized and insulated, and helium is filled in the inner layer. After the temperature measuring system is ready, under the control of the measuring and controlling cabinet, the temperature control of the refrigerator and heater calibration cavity is implemented according to the calibration flow, and after the temperature reaches the calibration target temperature value, the temperature measuring system collects the current or voltage value of the calibration temperature point. And (5) performing calibration curve fitting after all the calibration points are completed according to the flow, and obtaining a calibration curve in the measurement range of the temperature measurement system.
Description
Technical Field
The invention relates to the field of calibration of temperature measurement systems, in particular to a heat insulation cavity for full-system wide low-temperature comprehensive calibration equipment of a temperature measurement system.
Background
In the temperature measurement process, a method for calibrating a temperature sensor is generally adopted to ensure the temperature measurement accuracy. However, in the actual temperature measurement process, the measurement error comes from each link of the temperature sensor, the measurement line, the amplifier, the acquisition system and the like, so that the measurement accuracy is required to be 0.1K in a place with higher temperature measurement accuracy (for example, the measurement accuracy of a low-temperature wind tunnel in the temperature range of 77K to 323K) only the temperature sensor is calibrated, the temperature measurement accuracy requirement is difficult to be met, and the whole temperature measurement system is required to be calibrated.
In addition, in the actual temperature calibration system process, the temperature change process is slower, in order to improve the test efficiency, a plurality of temperature measuring points need to be calibrated at one time, and in the method for calibrating each temperature sensor independently in the prior art, only each measuring point can be calibrated independently, and for the temperature measurement system with more measuring points (for example, a low-temperature wind tunnel system has hundreds of temperature measuring points), the calibration needs tens of days or even months.
If the plurality of sensors are required to be calibrated at one time, the temperature field uniformity is reduced because the volume of the calibration cavity of the temperature sensor is increased, and the accuracy of the calibration equipment cannot meet the calibration requirement of the temperature measurement system.
In the prior art, calibration is performed for the temperature sensor, and in actual use, after each link such as a measuring circuit, an amplifier, a collecting system and the like is additionally arranged, the numerical accuracy of the finally obtained measured temperature has obvious errors, so that a device capable of integrally calibrating the multichannel low-temperature measuring system is urgently needed to eliminate the measuring errors brought by each link such as the measuring circuit, the amplifier, the collecting system and the like, and the calibration efficiency and the calibration accuracy are improved.
Disclosure of Invention
The invention aims at overcoming the defects of the prior art, and provides the heat insulation cavity for the full-system wide low-temperature comprehensive calibration equipment of the temperature measurement system.
The scheme is realized by the following technical measures:
a heat insulation cavity for a full-system wide low-temperature comprehensive calibration device of a temperature measurement system comprises an outer cylinder, a middle cylinder and an inner cylinder; the inner cylinder is arranged in the middle cylinder; the middle cylinder body is arranged inside the outer cylinder body; the top of the inner cylinder body, the middle cylinder body and the outer cylinder body are respectively provided with a sealing flange with an open top; the opening at the top of the sealing flange at the top of the inner cylinder is in sealing connection with the opening of the sealing flange at the top of the middle cylinder through a telescopic corrugated pipe; the opening of the top sealing flange of the middle cylinder is in sealing connection with the opening of the top sealing flange of the outer cylinder through a stainless steel guide pipe; a sealed lead cover is arranged above the opening of the sealing flange at the top of the outer cylinder; a helium inflation tube and a helium exhaust tube are arranged on the side face of the lead cover; an auxiliary cooling sleeve is sleeved on the outer wall of the stainless steel conduit; the auxiliary cooling sleeve passes through the sealing flange at the top of the outer cylinder body through an auxiliary cooling sleeve interface and is connected with the precooling device; the bottom of the middle cylinder body is provided with a cold energy distributor; the bottom of the inner cylinder body is directly connected with the cold energy distributor; the bottom of the outer cylinder is provided with an outer cylinder bottom sealing flange; the cold energy distributor is connected with a refrigerating machine refrigerating head penetrating through a sealing flange at the bottom of the outer cylinder; the bottom of the inner cylinder is provided with a sensor mounting seat.
As a preferred embodiment of the present invention: an auxiliary connecting rod via hole is formed in the sealing flange at the top of the middle cylinder; an auxiliary connecting rod threaded hole is formed in the sealing flange at the top of the inner cylinder; the auxiliary connecting rod can penetrate through the auxiliary connecting rod through hole to be connected with the auxiliary connecting rod threaded hole; the auxiliary connecting rod is provided with a stress nut.
As a preferred embodiment of the present invention: a heater is arranged on the outer wall of the inner cylinder; a heater is arranged between the bottom of the inner cylinder and the bottom of the middle cylinder; the heater can be connected to a temperature control device.
As a preferred embodiment of the present invention: platinum resistance thermometers are arranged at a plurality of positions inside the sensor mounting seat; the platinum resistance thermometer is connected with a temperature control device.
As a preferred embodiment of the present invention: the side wall of the outer cylinder body is double-layered; the side wall of the outer cylinder body is provided with a vacuumizing tube KF connector; the sealing flange at the bottom of the outer cylinder body is sealed with the refrigerating machine refrigerating head through an O-shaped ring; and an aviation plug for the passage of the internal lead is arranged on the sealing flange at the bottom of the outer cylinder body.
As a preferred embodiment of the present invention: the top of the lead wire cover is provided with a lead-out cable mounting hole and a standard thermometer lead wire aviation plug; the lead-out cable mounting hole is provided with a lead-out cable sealing element; the lead-out cable sealing piece comprises a polytetrafluoroethylene deformation body with a notch, two semicircular hole gaskets, a sealing piece seat and a sealing nut; the sealing piece seat is fixed on the corresponding position of the lead-out cable mounting hole of the lead-out cover, the polytetrafluoroethylene deformation body with the notch and the two semicircular hole gaskets are sleeved on the lead-out cable in sequence, the lead-out cable is placed into the mounting hole, and the sealing nut is screwed down to enable the polytetrafluoroethylene deformation body to be in close contact with the outer layer of the cable, so that a channel for eliminating gas circulation is sealed.
As a preferred embodiment of the present invention: vacuumizing the inner parts of the outer cylinder and the middle cylinder; helium is filled in the inner cylinder.
As a preferred embodiment of the present invention: the sensor mounting seat is of a cylindrical honeycomb structure.
The beneficial effect of this scheme can learn according to the description to above-mentioned scheme, owing to adopt three layer construction in this scheme heat isolation calibration chamber, middle level skin vacuum heat insulation, inlayer are as the calibration temperature source, place sensor installation copper seat, realize quick even in temperature field through filling helium. In the calibration process, after the temperature sensor belt cable passes through the sealing seat, the temperature sensor belt cable is placed in the sensor mounting copper seat in the calibration cavity, then the lead is sealed, the middle and outer layers are vacuumized and insulated, and helium is filled in the inner layer. After the temperature measuring system is ready, under the control of the measuring and controlling cabinet, the temperature control of the refrigerator and heater calibration cavity is implemented according to the calibration flow, and after the temperature reaches the calibration target temperature value, the temperature measuring system collects the current or voltage value of the calibration temperature point. And (5) performing calibration curve fitting after all the calibration points are completed according to the flow, and obtaining a calibration curve in the measurement range of the temperature measurement system.
It can be seen that the present invention has outstanding substantial features and significant advances over the prior art, as well as obvious benefits of its implementation.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present invention.
Fig. 2 is a schematic structural view of the sensor mount.
Fig. 3 is a schematic structural view of the inner cylinder.
Fig. 4 is a schematic structural view of the middle cylinder.
FIG. 5 is a schematic illustration of the connection of the middle barrel top sealing flange to the inner barrel top sealing flange.
FIG. 6 is a schematic illustration of the connection of the cold distributor to the inner barrel.
Fig. 7 is a schematic structural view of the outer cylinder.
Fig. 8 is a schematic structural view of a lead cover.
Fig. 9 is a schematic view of the structure of the lead-out cable seal.
In the figure, 6 is a lead cover, 7 is a lead cable sealing element, 8 is an external cylinder top sealing flange, 9 is an external cylinder, 10 is an external cylinder bottom sealing flange, 11 is a stainless steel guide pipe, 12 is an auxiliary cooling sleeve, 13 is an auxiliary cooling sleeve interface, 14 is a middle cylinder top sealing flange, 15 is a middle cylinder, and 16 is an auxiliary connecting rod via hole; 17 is a telescopic corrugated pipe, 18 is a top sealing flange of an inner cylinder, 19 is an inner cylinder, 20 is a cold distributor, 21 is a refrigerating machine refrigerating head, 22 is a helium gas charging pipe, 23 is a helium gas discharging pipe, 24 is a vacuumizing pipe KF joint, 25 is a heater, 26 is an auxiliary connecting rod threaded hole, 27 is a sensor mounting seat, 28 is a connecting threaded hole for the inner cylinder and the cold distributor, 30 is a connecting flange at the bottom of the inner cylinder, 32 is an aviation plug, 34 is a standard thermometer lead aviation plug, 35 is a sensor cable, 36 is a sealing nut, 37 is a sealing piece seat, 38 is a connecting screw, 39 is a polytetrafluoroethylene deformation body with a notch, 40 is a sealing conical surface, 41 is two semicircular hole gaskets, 42 is a temperature sensor mounting hole, 43 is an auxiliary connecting rod, and 44 is a stress nut.
Detailed Description
All of the features disclosed in this specification, or all of the steps in a method or process disclosed, may be combined in any combination, except for mutually exclusive features and/or steps.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, each feature is one example only of a generic series of equivalent or similar features, unless expressly stated otherwise.
The heat-insulating calibration cavity adopts a three-layer structure, the middle layer and the outer layer are vacuum-insulated, the inner layer is used as a calibration temperature source, the sensor is placed on the copper seat, and the temperature field is rapidly and uniformly realized by helium filling. In the calibration process, after the temperature sensor belt cable passes through the sealing seat, the temperature sensor belt cable is placed in the sensor mounting copper seat in the calibration cavity, then the lead is sealed, the middle and outer layers are vacuumized and insulated, and helium is filled in the inner layer. After the temperature measuring system is ready, under the control of the measuring and controlling cabinet, the temperature control of the refrigerator and heater calibration cavity is implemented according to the calibration flow, and after the temperature reaches the calibration target temperature value, the temperature measuring system collects the current or voltage value of the calibration temperature point. And (5) performing calibration curve fitting after all the calibration points are completed according to the flow, and obtaining a calibration curve in the measurement range of the temperature measurement system.
The main uses of the heat-insulating calibration cavity system are: (1) Providing a high-precision temperature source with technical indexes such as accuracy, uniformity, temperature rising and falling speed and the like meeting the calibration requirements for a temperature measurement system; (2) Performing heat insulation protection on the calibration cavity and wire sealing of a measurement system, so as to ensure the uniformity of a temperature field of the calibration cavity; (3) The temperature rising and reducing process control and the temperature fixed point control of the calibration cavity are realized, so that the calibration cavity is provided with a GM refrigerator and heater auxiliary equipment.
The main body of the heat-insulating calibration cavity system adopts a three-layer structure form: the refrigerator comprises an outer cylinder, a middle cylinder and an inner cylinder, wherein a lead wire protective cover is arranged at the top of the outer cylinder, a refrigerator is arranged at the bottom of the outer cylinder, a refrigerator head is connected with the middle cylinder and the inner cylinder through a cold distributor, and an auxiliary heater is arranged on the inner cylinder close to the outer side of the bottom. The middle cylinder is connected with the outer cylinder by a stainless steel thin-wall pipe, an auxiliary cooling sleeve is arranged on the outer side of the stainless steel pipe, and the inner cylinder is connected with the middle cylinder by a flexible corrugated pipe.
The functions of the three layers of cylinders of the heat-insulating calibration cavity system are as follows: the external cylinder body is protected in a heat-insulating way; the middle cylinder body is protected against radiation and heat; the sensor is placed in the inner cylinder and is provided with a copper seat for temperature control, and the copper seat is used as a calibration source. In order to enhance the heat insulation effect, the outer cylinder body adopts a double-layer structure, and a vacuum environment is arranged between the two layers. In order to reduce heat loss. Before calibration, vacuum is pumped between the middle cylinder and the inner cylinder, and the vacuum environment is maintained. In the working process of the heat-insulating calibration cavity, the temperature difference between the middle layer and the inner layer needs to be reduced, so that the heat exchange quantity between the middle layer and the inner layer through thermal radiation is reduced, and the temperature uniformity and the stability of the internal cylinder calibration cavity are improved. The refrigerator adopts a primary refrigeration head, and in order to reduce the temperature of the middle cylinder body and the temperature of the inner cylinder body at the same part, a cold energy distributor is designed between the middle cylinder body and the outer cylinder body, and cold energy distribution is realized through the contact areas of the cold energy distributor and the bottom of the inner cylinder body and the bottom of the middle cylinder body.
In the calibration preparation stage of the temperature measurement system, firstly, an external cylinder top sealing flange is loosened, after the external cylinder top sealing flange, a middle cylinder top sealing flange and an internal cylinder are lifted out of a calibration cavity of a heat insulation calibration cavity system together, the internal cylinder top sealing flange is loosened, a sensor mounting copper disc is placed in the calibration cavity, then a temperature sensor and a connecting cable thereof respectively penetrate through a lead-out cable sealing piece on a lead cover, a stainless steel thin-wall tube between the middle cylinder and the external cylinder, a flexible corrugated tube between the internal cylinder and the middle cylinder, the temperature sensor is mounted in a sensor mounting seat, and then the external cylinder top sealing flange, the middle cylinder top sealing flange and the internal cylinder are mounted in the calibration cavity after the internal cylinder top sealing flange is screwed tightly. After the top sealing flange of the outer cylinder body is screwed up and sealed, the outer cylinder body and the middle cylinder body are vacuumized, and helium gas is filled into the inner cylinder body, so that the pressure is higher than the external atmospheric pressure.
After calibration starts, the measurement and control cabinet controls the refrigerator and the heater to realize the heat insulation calibration cavity temperature rise and fall process according to a preset calibration flow, after the temperature reaches a calibration temperature point, the calibrated measurement system is informed to collect an electric signal, then the next calibration temperature point control process is started, and after all calibration points are completed, calibration curve fitting is performed on each measuring point of the measurement system, so that the calibration process of the temperature measurement system is completed.
Among the common metal materials, stainless steel, aluminum and copper are materials frequently used in low temperature research, and the characteristics of the three materials are different. In the technical requirements, the cooling rate of the cryostat and the temperature uniformity of the temperature sensor mounting seat are all clearly required, so that materials are required to be screened. Through simulation calculation, the influence of the heat conductivity coefficient, specific heat capacity, density and thermal diffusivity of the material and the influence of the weight of the material on the strength and the mobility of the cryostat are fully considered. And through various comparative analyses, the material combination mode is determined as shown in table 1.
Table 1 materials selection table for parts
| Part name | Material | Part name | Material |
| External cylinder | Stainless steel 316 | Middle cylinder top sealing flange | Aluminum 6061 |
| Top sealing flange of external cylinder | Stainless steel 316 | Middle cylinder | Aluminum 6061 |
| Lead wire cover | Stainless steel 316 | Top sealing flange of inner cylinder | Aluminum 6061 |
| Stainless steel conduit and bellows | Stainless steel 316 | Internal cylinder | Aluminum 6061 |
| Sensor mounting copper seat | Red copper |
The inner barrel is the most important part of the insulated calibration cavity system, and the sensor mounting copper mount is mounted in the calibration cavity inner barrel. After the temperature sensor of the calibrated measuring system is arranged on the sensor mounting copper seat, the outgoing line of the temperature sensor passes through the flexible corrugated pipe and the stainless steel thin-wall pipe and reaches the inside of the lead wire cover, and the lead wire cover and the cable are sealed by the lead wire sealing piece to lead out the calibration cavity.
The inner cylinder body is in a thin-wall cylinder shape and is processed by adopting aluminum alloy 6061. The upper part of the inner cylinder body is connected by adopting an aluminum alloy flange, and is sealed with the inner cylinder body through indium wires. In order to ensure the tightness of the top sealing flange of the inner cylinder body and the inner cylinder body in the installation process, the installation interference is avoided, and the top sealing flange of the inner cylinder body is connected with the top sealing flange of the middle cylinder body through a corrugated pipe. Helium is a heat conductor with the best heat conducting performance in gas, and in order to ensure the temperature uniformity of the inner cylinder, in the calibration process, firstly helium is filled into the inner cylinder through a helium filling pipe under the control of a pressurizing system, and the pressure of the helium is slightly higher than the atmospheric pressure, so that the infiltration of external air is avoided.
In actual operation, the bottom of the inner cylinder body exchanges cold with the cold distributor, and meanwhile, the film heater is arranged on the side surface of the bottom of the inner cylinder body. The bottom of the inner cylinder body is provided with a mounting hole, the inner cylinder body is connected with the cold energy distributor by using a bolt, and the main control heater is arranged between the bottom of the inner cylinder body and the cold energy distributor during connection; the cold energy distributor is connected with the bottom of the middle cylinder body and the cold head of the refrigerator through bolts. A sensor mount is placed inside the inner barrel.
The middle cylinder body is cylindrical and is processed by adopting aluminum alloy 6061. The upper part of the middle cylinder body is in flange connection, and the top sealing flange of the outer cylinder body is connected with the flange of the middle cylinder body through a stainless steel pipe. The cold energy distributor is positioned between the bottom of the middle cylinder and the bottom of the inner cylinder, the bottom of the middle cylinder is in direct contact with the cold head of the refrigerator, and the cold energy distributor, the bottom of the middle cylinder and the cold head of the refrigerator are connected through threads.
In the use, the cold energy of refrigerator reaches inside barrel bottom through middle part barrel bottom mainly, further passes to by the sensor mount copper seat of school, and consequently, the transmission of control cold energy is crucial to the temperature control of sensor mount. A main control heater is arranged between the bottom of the middle cylinder body and the bottom of the inner cylinder body.
Considering the installation requirement, the cold energy distributor is respectively connected with the inner cylinder body and the middle cylinder body. Firstly, the cold energy distributor and the middle cylinder are connected together, then the main control heater is arranged between the cold energy distributor and the inner cylinder, and the cold energy distributor is connected with the inner cylinder by bolts.
Because the inside barrel is full of helium, the calibrated temperature sensor connecting cable arranged in the inside barrel sensor mounting copper seat is connected to the lead wire cover through the stainless steel guide pipe and the telescopic stainless steel corrugated pipe, and the sensor wire and the helium heat transfer can lead to the large temperature gradient of the inside barrel, an auxiliary cooling sleeve is arranged on the outer side of the stainless steel guide pipe between the middle barrel and the outer barrel, and the cooled constant-temperature medium is conveyed to the auxiliary cooling sleeve through the low-temperature circulating groove to be cooled by circulating flow. By adopting an auxiliary cooling sleeve mode, the influence of the lead-out cable on the temperature field of the low-temperature constant-temperature calibration cavity can be reduced, and the temperature can be reduced in an auxiliary manner in the cooling process of the calibration equipment, so that the requirement of the cooling rate is met.
The stainless steel flange at the top of the middle cylinder is connected with the stainless steel flange at the top of the inner cylinder through a flexible compressible stainless steel corrugated pipe, and the conflict of airtight sealing of the outer cylinder and the stainless steel flange at the top of the inner cylinder can be solved through a soft and hard connection combination mode. However, when calibrating the sensor, the sensor mounting needs to be performed after the sensor mounting copper seat, the inner cylinder, the middle cylinder and the top sealing flange of the outer cylinder are separated from the heat-insulating calibration cavity system, and then the sensor is placed in the heat-insulating calibration cavity system. Because the sensor mounting copper seat and the flange are both made of metal materials, the weight of the sensor mounting copper seat and the flange exceeds the bearing capacity of the flexible corrugated pipe, and the corrugated pipe can be damaged when the sensor mounting copper seat and the flange are taken out through the corrugated pipe. In addition, after the sensor is installed, the air tightness of the connection between the stainless steel sealing flange at the top of the inner cylinder and the inner cylinder needs to be ensured. Therefore, the stress of the corrugated pipe when the flange, the inner cylinder body and the like move out of the heat insulation calibration cavity system is avoided in a mode of auxiliary connecting rods; through processing auxiliary connecting rod via hole on middle part barrel top stainless steel flange, at inside barrel top stainless steel sealing flange processing auxiliary connecting rod screw hole, auxiliary connecting rod passes auxiliary connecting rod via hole, passes through threaded connection with auxiliary connecting rod screw hole, and the atress nut is screwed on auxiliary connecting rod upper end.
In the calibration process, in order to ensure the temperature consistency between the middle cylinder and the inner cylinder and prevent the uneven temperature field of the inner cylinder caused by radiation heat transfer, the cold quantity of the cold head of the refrigerator needs to be distributed. Therefore, a cold energy distributor which is connected with the bottom of the inner cylinder body and the bottom of the middle cylinder body at the same time and is connected with the bottom of the middle cylinder body by a flange is specially designed, and cold energy distribution is realized by adjusting the connection areas of the bottom of the inner cylinder body and the bottom of the middle cylinder body and the cold energy distributor. The design of the cold quantity distributor adopts a thermal resistance theoretical model to calculate the cold quantity respectively transmitted to the inner cylinder wall surface and the middle cylinder wall surface by the cold head of the refrigerator, so that thermal resistance matching is realized, and the cold quantity distributor is made of red copper.
The outer cylinder adopts a double-layer structure mode and is made of 316 stainless steel. The top sealing flange and the bottom stainless steel sealing flange of the outer cylinder are sealed by O-shaped rings, and the flange plate is connected with the outer cylinder by adopting a stainless steel clamp. The stainless steel sealing flange at the bottom of the outer cylinder body is used for fixing a refrigerating head of the refrigerator, and the stainless steel sealing flange and the refrigerating head are fixed through bolts and sealed through O-shaped rings. The side wall of the outer cylinder is welded with a KF joint for vacuumizing, and the bottom flange is provided with 2 aviation plugs for leading out leads of a heater and a temperature control temperature sensor. And welding a stainless steel lead cover on the upper flange.
And an outgoing cable sealing piece is arranged around the lead cover, and the lead cover seals the calibrated sensor connecting wires through the outgoing cable sealing piece. In addition, in the calibration process, three standard platinum resistance thermometers are required to be used as standard devices, so that an aviation plug mounting hole is processed in the middle of the sensor mounting cover and is used for leading out three standard platinum resistance thermometer leads. Because the lead wire cover is communicated with the inner cylinder body through the stainless steel guide pipe and the stainless steel corrugated pipe, helium is filled into the inner cylinder body under the control of the pressure regulating system through the helium inflation pipe on the lead wire cover before calibration, the pressure is slightly higher than the atmospheric pressure, and the helium is discharged through the helium exhaust pipe after the calibration is finished.
Because the cable of the sensor and the sensor are not detachable in the calibration process of the temperature measurement system, the lead-out cable sealing piece adopts a deformation cone combined sealing mode. Before calibration is carried out, the sealing element seat is fixed on the lead wire cover through the connecting screw rod, the inner diameter of the sealing element seat wire passing hole and the inner diameter of the sealing nut are larger than the outer diameter of the sensor, the sensor head belt cable passes through the sealing element seat wire passing hole and the sealing nut, the notched polytetrafluoroethylene deformation body is clamped on the cable, the cable is placed in the sealing hole, and then two semicircular hole gaskets are placed on two sides of the sensor cable and the polytetrafluoroethylene deformation body. And the sealing nut is screwed down, the deformation body is extruded by the pressing mechanism, so that the deformation body is closely contacted with the outer layer of the cable, and a channel for gas circulation is eliminated to realize sealing.
The measurement and control cabinet comprises a temperature measurement and control system and a pressure measurement and control system.
The temperature measurement and control system mainly comprises a temperature control part and a temperature measurement part. In order to stabilize the temperature of the thermostatic system, a temperature control system must be used to control the output power of the heater mounted on the calibration system. The temperature controller was selected from the Eurotherm 2704 thermostat manufactured by European Union, UK. When the temperature of the calibration cavity is controlled, 2 heaters are arranged on the outer wall of the inner cylinder body, and 1 heater is arranged at the bottom of the cylinder body. Polyimide insulated film heaters are adopted as heaters for temperature control, rated powers are 30W, 35W and 250W respectively, and output power of the heaters in the operation process is regulated by a Eurotherm 2704 temperature controller. The temperature control sensor for temperature control adopts Pt100 industrial platinum resistor with reliable performance, and each control loop is provided with a Pt100 platinum resistor sensor. In order to accurately measure the temperature distribution of the sensor mounting seat, three standard sleeve platinum resistance thermometers are adopted to measure the temperatures at different positions of the sensor mounting seat, the average value of the three temperatures is used as the temperature of the sensor mounting seat, and the difference value between the maximum value and the minimum value of the 3 standard platinum resistance thermometers is used as the uniform value of the effective temperature field of the mounting seat.
In order to accurately measure the temperature distribution of the sensor mounting seat, three standard sleeve platinum resistance thermometers are adopted to measure the temperatures at different positions, the average value of the three temperatures is used as the temperature of the sensor mounting seat, and the difference value between the maximum value and the minimum value of the 3 standard platinum resistance thermometers is used as the uniform value of the effective temperature field of the mounting seat. The standard sleeve platinum resistance thermometer has an accuracy rating of equal standard. To measure the uniformity of the mount, 3 standard sleeve platinum resistance temperature pairs were each mounted in a thermowell of the sensor mount.
The pressure measurement and control system comprises a helium pressure control part of the cylinder body inside the calibration cavity and a vacuum pressure control part of the cylinder body at the outer middle part. The helium pressure control part of the inner cylinder body has the main functions of: during operation of the calibration chamber, the pressure of helium in the inner cylinder is maintained slightly above atmospheric pressure, preventing outside air from entering the inner cylinder. Because the use temperature range of the calibration cavity is 77K-323K, if substances which can be condensed in the temperature range exist in the inner cylinder body, liquid and even solid can appear in the cavity in the use process, and the normal operation of the calibration groove is influenced. The helium pressure control part of the inner cylinder comprises a helium supply system, a helium pressure monitoring and controlling meter, corresponding valves, pipe fittings and the like. Helium gas used in the inner cylinder can be used as a gas source, and the pressure of the helium gas in the calibration cavity is controlled through a gas pressure controller.
The main functions of the outer middle cylinder vacuum pressure control part are as follows: before carrying out sensor calibration every time, vacuumizing the outer cylinder and the middle cylinder of the calibrating device, avoiding liquid condensation when the temperature is reduced, and reducing heat or cold loss caused by gas heat transfer in the calibrating process. The vacuum pressure control section includes a vacuum pump and a vacuum display device which are excellent in performance. In order to exhaust unnecessary gas as much as possible, the ultimate vacuum of the vacuum pump should be less than 0.1Pa, and the pumping speed should be more than or equal to 4L/min. The vacuum system pipelines are all made of stainless steel materials, and all valves are high-vacuum baffle valves.
The high vacuum measurement adopts a typical triode type structure ZJ-27 gauge tube, adopts a noble metal oxide cathode, has the characteristics of oxidation resistance and instantaneous atmospheric shock resistance, and has stable performance and long service life, thereby being suitable for medium and high vacuum measurement. The vacuum gauge is formed by combining two paths of Pirani resistance vacuum gauges (ZJ-52T) and one path of hot cathode ionization (ZJ-27), and adopts an ARM system to carry out nonlinear processing and error correction on measured data, so that the vacuum gauge has the advantages of high accuracy and repeatability, quick response, stable and reliable measurement and strong anti-interference capability.
In the whole calibrating device of the multichannel low-temperature measuring system, a G-M refrigerator adopting primary refrigeration is used for providing main cooling capacity required by cooling, and the refrigeration power can still be kept about 200W. The G-M refrigerator generates a large amount of heat in the refrigeration process, and a special water cooling system is required to be configured. The water cooling system of the refrigerator consists of a compressor and a water chiller. The water chiller cools the compressor, and the compressor generates cold energy.
The main required technical indexes of the water cooling machine are as follows:
control precision: (+ -1 ℃;
cooling air volume: 7000m3/h;
stainless steel water tank capacity: 70L;
chilled water flow rate: 2.5m3/h;
standard refrigeration capacity: 12.8x10 mcal/h; 14.9KW;
the working range is as follows: the outlet temperature of the chilled water is 5-35 ℃; the temperature difference of the chilled water is 2.5-6.5 ℃.
The main technical index of the compressor is as follows:
power: 7.7kW;
cooling water flow rate: 5.7L/min (water temperature < 20deg.C), water supply pressure > 40psig;
refrigerant: helium gas.
In the whole calibrating device of the multichannel low-temperature measuring system, an auxiliary cooling sleeve is used between the middle cylinder and the outer cylinder body to reduce the temperature of the thin-wall tube led out by the stainless steel cable, so that the cooling capacity loss is reduced, and the temperature uniformity and the stability of the sensor seat are improved. In order to achieve the purpose of cooling, a low-temperature tank for metering is selected, absolute ethyl alcohol is used as a constant-temperature medium, the lowest temperature can reach-80 ℃, and the low-temperature ethanol output by the low-temperature constant-temperature tank is conveyed to a cooling sleeve through a low-temperature resistant pipe and then returned to the low-temperature tank along a pipeline. In order to reduce the cold loss, a rubber and plastic heat-insulating sponge is selected to wrap a medium conveying pipe, and the temperature of the constant temperature tank changes along with the change of a calibration target temperature value.
The main technical indexes are as follows:
temperature range: -75-20 ℃;
temperature fluctuation: uniform temperature + -0.01deg.C (when external circulation is not started);
a small-sized leakless magnetic pump with the lowest temperature resistance of-90 ℃ and the highest temperature resistance of 180 ℃ and the rotating speed of 2800R/min; the inlet and outlet are directly 10mm;
the maximum power is 3kW.
The specific calibration operation flow of the whole system is as follows:
the specific operation flow is as follows:
the first step: installing temperature sensor of calibrated measuring system
Dismantling the lead cover;
removing the top sealing flange of the outer cylinder;
dismantling a sealing flange at the top of the middle cylinder;
the auxiliary connecting rod passes through the stainless steel flange auxiliary connecting rod through hole at the top of the middle cylinder body and is connected with the stainless steel sealing flange auxiliary connecting rod threaded hole at the top of the inner cylinder body, and the auxiliary connecting rod stressed nut is screwed on the upper part of the stainless steel flange at the top of the middle cylinder body.
And (3) integrally taking out: taking out the whole of the top cylinder body, the top stainless sealing flange, the stainless steel guide pipe, the middle cylinder body top sealing flange, the telescopic stainless steel corrugated pipe, the inner cylinder body top sealing flange and the sensor mounting copper seat;
the sensor head belt cable is placed into a temperature sensor mounting copper seat after passing through a sealing element seat wire passing hole, a sealing nut, a stainless steel guide pipe and a telescopic stainless steel corrugated pipe;
and (3) integrally placing: the stainless sealing flange at the top of the top cylinder, the stainless steel guide pipe, the sealing flange at the top of the middle cylinder, the telescopic stainless steel corrugated pipe, the sealing flange at the top of the inner cylinder and the sensor are provided with copper seats;
installing an inner cylinder top sealing flange and a top cylinder top stainless sealing flange;
restoring the lead cover;
and clamping the polytetrafluoroethylene deformation body with the notch on the cable, putting the polytetrafluoroethylene deformation body into the sealing hole, and then putting two semicircular hole gaskets on two sides of the sensor cable and the polytetrafluoroethylene deformation body. And the sealing nut is screwed down, the deformation body is extruded by the pressing mechanism, so that the deformation body is closely contacted with the outer layer of the cable, and a channel for gas circulation is eliminated to realize sealing.
And a second step of: restoring system external connections
A cable connecting the control cabinet and the apparatus main body;
the auxiliary refrigerating groove is connected with the auxiliary cooling sleeve;
a high pressure helium line and a power cable connecting the compressor and the apparatus body;
and a circulating water pipeline connected with the water chiller and the compressor.
And a third step of: vacuumizing
When the main vacuum system operates, the forepump P2 is started, the forevalve and the main valve are opened, the main vacuum pump P1 is started after the vacuum degree below 5Pa is reached, and the vacuum of less than 9 multiplied by 10 < -2 > Pa is quickly established.
Fourth step: calibration cavity helium inflation
Setting inflation pressure through a touch screen;
opening an air inlet valve, and automatically closing a program after the pressure reaches a set value;
and after the pressure is higher than the set pressure, automatically opening an exhaust valve for exhausting, and after the pressure is lower than the set pressure, automatically opening an air inlet valve for air supplementing.
Fifth step: temperature control start calibration procedure
The target temperature is set through the touch screen, the cold water machine is started manually, and the compressor is started. And under the control of the measurement and control cabinet, the temperature control of the calibration cavity of the refrigerator and the heater is implemented according to the calibration flow, and after the temperature reaches the calibration target temperature value, the temperature measurement system acquires the current or voltage value of the calibration temperature point. And (5) performing calibration curve fitting after all the calibration points are completed according to the flow, and obtaining a calibration curve in the measurement range of the temperature measurement system.
The invention has the main technical characteristics that:
(1) The temperature measurement system comprises a temperature sensor, a connecting cable, a conditioning amplifier, a data acquisition system, an environment and other factors to generate comprehensive errors, and the temperature measurement accuracy is effectively improved;
(2) The number of the disposable calibration channels reaches 45, the temperature accuracy reaches 50mK in the temperature range of 77K to 323K, and the uniformity of the effective temperature field reaches 50mK. The efficiency is high, the low-temperature range is wide, and the precision is high;
(3) The calibration process does not change the circuit of the temperature measurement system, and the electrically driven refrigerator is adopted for refrigeration, so that the security is good.
The key technologies mainly adopted include:
(1) The main body of the heat-insulating calibration cavity system adopts a three-layer structure form: the refrigerator comprises an outer cylinder, a middle cylinder and an inner cylinder, wherein a lead wire protective cover is arranged at the top of the outer cylinder, a refrigerator is arranged at the bottom of the outer cylinder, a refrigerator head is connected with the middle cylinder and the inner cylinder through a cold distributor, and an auxiliary heater is arranged on the inner cylinder close to the outer side of the bottom. The middle cylinder is connected with the outer cylinder by a stainless steel thin-wall pipe, an auxiliary cooling sleeve is arranged on the outer side of the stainless steel pipe, and the inner cylinder is connected with the middle cylinder by a flexible corrugated pipe. The heat insulation effect is guaranteed, and the installation and the flange sealing of the inner cylinder and the outer cylinder are convenient.
(2) In the calibration process, the temperature consistency between the middle cylinder and the inner cylinder needs to be ensured, so that the temperature field of the inner cylinder is prevented from generating gradient due to radiation heat transfer, and the temperature field is not uniform. Therefore, a cold energy distributor which is connected with the bottom of the inner cylinder body and the bottom of the middle cylinder body at the same time and is connected with the bottom of the middle cylinder body by a flange is specially designed, and cold energy distribution is realized by adjusting the connection areas of the bottom of the inner cylinder body and the bottom of the middle cylinder body and the cold energy distributor.
(3) And an auxiliary refrigeration sleeve is adopted, a cooling sleeve is processed on the outer side of a stainless steel guide pipe between the middle cylinder body and the outer cylinder body, and a cooled constant-temperature medium is conveyed to the cooling sleeve through a low-temperature circulation groove to be cooled by circulating flow. By the mode, the influence of the lead-out cable on the temperature field of the low-temperature constant-temperature calibration cavity can be reduced, and the temperature can be reduced in an auxiliary manner in the cooling process of the calibration equipment, so that the cooling rate requirement is met.
(4) The cable assembling and disassembling and sealing member of the calibration sensor is designed, a deformation cone combined sealing mode is adopted, the deformation body is extruded through the pressing mechanism, so that the deformation body is closely contacted with the outer layer of the cable, and gas circulation is eliminated to realize sealing.
The invention is not limited to the specific embodiments described above. The invention extends to any novel one, or any novel combination, of the features disclosed in this specification, as well as to any novel one, or any novel combination, of the steps of the method or process disclosed.
Claims (2)
1. A thermal-insulated chamber that is used for temperature measurement system to carry out wide low temperature comprehensive calibration equipment of full system, characterized by: comprises an outer cylinder, a middle cylinder and an inner cylinder; the inner cylinder is arranged in the middle cylinder; the middle cylinder body is arranged inside the outer cylinder body; the top of the inner cylinder body, the middle cylinder body and the outer cylinder body are respectively provided with a sealing flange with an opening at the top; the opening at the top of the sealing flange of the top of the inner cylinder is in sealing connection with the opening of the sealing flange at the top of the middle cylinder through a telescopic corrugated pipe; the opening of the middle cylinder top sealing flange is in sealing connection with the opening of the outer cylinder top sealing flange through a stainless steel guide pipe; a sealed lead cover is arranged above the opening of the sealing flange at the top of the outer cylinder; a helium inflation tube and a helium exhaust tube are arranged on the side face of the lead cover; an auxiliary cooling sleeve is sleeved on the outer wall of the stainless steel conduit; the auxiliary cooling sleeve passes through the top sealing flange of the outer cylinder body through an auxiliary cooling sleeve interface and is connected with the precooling device; the bottom of the middle cylinder body is provided with a cold energy distributor; the bottom of the inner cylinder body is directly connected with the cold energy distributor; the bottom of the outer cylinder is provided with an outer cylinder bottom sealing flange; the cold energy distributor is connected with a refrigerating machine refrigerating head penetrating through a sealing flange at the bottom of the outer cylinder; the bottom of the inner cylinder body is provided with a sensor mounting seat;
an auxiliary connecting rod via hole is formed in the sealing flange at the top of the middle cylinder; an auxiliary connecting rod threaded hole is formed in the sealing flange at the top of the inner cylinder; the auxiliary connecting rod can penetrate through the auxiliary connecting rod through hole to be connected with the auxiliary connecting rod threaded hole; a stress nut is arranged on the auxiliary connecting rod;
a heater is arranged on the outer wall of the inner cylinder; a heater is arranged between the bottom of the inner cylinder and the bottom of the middle cylinder; the heater can be connected with a temperature control device;
platinum resistance thermometers are arranged at a plurality of positions inside the sensor mounting seat; the platinum resistance thermometer is connected with the temperature control device;
the side wall of the outer cylinder body is double-layered; the side wall of the outer cylinder body is provided with a vacuumizing tube KF connector; the sealing flange at the bottom of the outer cylinder body is sealed with the refrigerating machine refrigerating head through an O-shaped ring; an aviation plug for passing through the internal lead is arranged on the sealing flange at the bottom of the outer cylinder;
the top of the lead wire cover is provided with a lead-out cable mounting hole and a standard thermometer lead wire aviation plug; a lead-out cable sealing element is arranged on the lead-out cable mounting hole; the lead-out cable sealing piece comprises a polytetrafluoroethylene deformation body with a notch, two semicircular hole gaskets, a sealing piece seat and a sealing nut; the sealing piece seat is fixed at the corresponding position of the lead-out cable mounting hole of the lead-out cover, the polytetrafluoroethylene deformation body with the notch and the two semicircular hole gaskets are sleeved on the lead-out cable in sequence, the lead-out cable is placed into the mounting hole, and then the sealing nut is screwed down to enable the polytetrafluoroethylene deformation body to be in close contact with the outer layer of the cable, so that a channel for gas circulation is eliminated to realize sealing;
the inner parts of the outer cylinder body and the middle cylinder body are vacuumized; helium is filled in the inner cylinder.
2. The heat-insulating cavity for a full-system-width low-temperature comprehensive calibration device for a temperature measurement system according to claim 1, wherein: the sensor mounting seat is of a cylindrical honeycomb structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110331756.4A CN113049144B (en) | 2021-03-29 | 2021-03-29 | Heat insulation cavity for full-system wide low-temperature comprehensive calibration equipment of temperature measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110331756.4A CN113049144B (en) | 2021-03-29 | 2021-03-29 | Heat insulation cavity for full-system wide low-temperature comprehensive calibration equipment of temperature measurement system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113049144A CN113049144A (en) | 2021-06-29 |
| CN113049144B true CN113049144B (en) | 2024-04-09 |
Family
ID=76516306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110331756.4A Active CN113049144B (en) | 2021-03-29 | 2021-03-29 | Heat insulation cavity for full-system wide low-temperature comprehensive calibration equipment of temperature measurement system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113049144B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114353953B (en) * | 2022-01-13 | 2024-04-12 | 浙江珏芯微电子有限公司 | Dewar cold head for rapid refrigeration and infrared detector Dewar assembly |
| CN116448280A (en) * | 2023-03-20 | 2023-07-18 | 北京东方计量测试研究所 | Constant temperature cavity |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102998424A (en) * | 2012-11-29 | 2013-03-27 | 安徽万瑞冷电科技有限公司 | High temperature and low temperature testing device |
| CN103115699A (en) * | 2013-02-06 | 2013-05-22 | 北京东方计量测试研究所 | Temperature equalizing system for calibration of temperature sensors in vacuum |
| CN103234661A (en) * | 2013-04-10 | 2013-08-07 | 中国科学院理化技术研究所 | Calibrating device with independent vacuum chamber |
| CN103245434A (en) * | 2013-04-10 | 2013-08-14 | 中国科学院理化技术研究所 | Thermometer indexing device |
| CN203643083U (en) * | 2013-10-14 | 2014-06-11 | 西安航天计量测试研究所 | Low temperature pressure sensor automatic calibration device |
| CN104515788A (en) * | 2015-01-14 | 2015-04-15 | 中国计量学院 | Multilayer metal soaking thermostatic bath |
| CN205236003U (en) * | 2015-12-10 | 2016-05-18 | 上海利正卫星应用技术有限公司 | Wide warm area low -temperature constant -temperature groove equipment |
| CN106568794A (en) * | 2016-11-04 | 2017-04-19 | 上海交通大学 | Low temperature refrigerating machine-based visual experiment observation apparatus of controlled liquefaction and solidification process of fluid |
| CN108225618A (en) * | 2018-04-08 | 2018-06-29 | 中国科学院理化技术研究所 | Wide-temperature-zone high-precision temperature calibration device |
| CN208076063U (en) * | 2018-04-08 | 2018-11-09 | 中国科学院理化技术研究所 | Temperature calibration system using refrigerator as cold source coupling fixed point |
| CN208206347U (en) * | 2018-04-08 | 2018-12-07 | 中国科学院理化技术研究所 | Wide-temperature-zone high-precision temperature calibration device |
| CN113049145A (en) * | 2021-03-29 | 2021-06-29 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4714849B2 (en) * | 2006-03-02 | 2011-06-29 | 独立行政法人産業技術総合研究所 | Variable temperature low temperature calibration system |
| US10763141B2 (en) * | 2017-03-17 | 2020-09-01 | Applied Materials, Inc. | Non-contact temperature calibration tool for a substrate support and method of using the same |
-
2021
- 2021-03-29 CN CN202110331756.4A patent/CN113049144B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102998424A (en) * | 2012-11-29 | 2013-03-27 | 安徽万瑞冷电科技有限公司 | High temperature and low temperature testing device |
| CN103115699A (en) * | 2013-02-06 | 2013-05-22 | 北京东方计量测试研究所 | Temperature equalizing system for calibration of temperature sensors in vacuum |
| CN103234661A (en) * | 2013-04-10 | 2013-08-07 | 中国科学院理化技术研究所 | Calibrating device with independent vacuum chamber |
| CN103245434A (en) * | 2013-04-10 | 2013-08-14 | 中国科学院理化技术研究所 | Thermometer indexing device |
| CN203643083U (en) * | 2013-10-14 | 2014-06-11 | 西安航天计量测试研究所 | Low temperature pressure sensor automatic calibration device |
| CN104515788A (en) * | 2015-01-14 | 2015-04-15 | 中国计量学院 | Multilayer metal soaking thermostatic bath |
| CN205236003U (en) * | 2015-12-10 | 2016-05-18 | 上海利正卫星应用技术有限公司 | Wide warm area low -temperature constant -temperature groove equipment |
| CN106568794A (en) * | 2016-11-04 | 2017-04-19 | 上海交通大学 | Low temperature refrigerating machine-based visual experiment observation apparatus of controlled liquefaction and solidification process of fluid |
| CN108225618A (en) * | 2018-04-08 | 2018-06-29 | 中国科学院理化技术研究所 | Wide-temperature-zone high-precision temperature calibration device |
| CN208076063U (en) * | 2018-04-08 | 2018-11-09 | 中国科学院理化技术研究所 | Temperature calibration system using refrigerator as cold source coupling fixed point |
| CN208206347U (en) * | 2018-04-08 | 2018-12-07 | 中国科学院理化技术研究所 | Wide-temperature-zone high-precision temperature calibration device |
| CN113049145A (en) * | 2021-03-29 | 2021-06-29 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113049144A (en) | 2021-06-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113049145B (en) | Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system | |
| CN102809581B (en) | Device for testing performance of low-temperature vacuum multilayer heat-insulation material based on thermal protection | |
| CN113049144B (en) | Heat insulation cavity for full-system wide low-temperature comprehensive calibration equipment of temperature measurement system | |
| CN106841297B (en) | Multifunctional solid material thermophysical property testing device and method | |
| US6824306B1 (en) | Thermal insulation testing method and apparatus | |
| CN107014494A (en) | A kind of high precision surface source blackbody radiation source device applied under the conditions of vacuum and low temperature | |
| CN103234661B (en) | Calibrating device with independent vacuum chamber | |
| CN112129810A (en) | Contact thermal resistance test system with variable pressure and temperature in deep low temperature region | |
| CN104597340B (en) | Low-temperature electrical characteristics testing device for air | |
| CN105806882A (en) | Temperature-and-pressure-adjustable testing apparatus for heat conductivity coefficient of cloth | |
| CN110926719A (en) | Low temperature safety valve detecting system | |
| CN106248730B (en) | Test device for heat-insulating material performance detection | |
| CN113375620B (en) | Coil pipe ice thickness detection method based on temperature measurement, sensor and system | |
| CN106970107B (en) | Low-temperature infusion pipeline performance test system | |
| CN213903387U (en) | Contact thermal resistance testing system with variable pressure and temperature in deep low-temperature region | |
| CN112229871A (en) | Thermal contact resistance testing device and method | |
| CN110672658B (en) | Block porous material heat insulation performance test experiment system and test method suitable for large temperature difference and variable pressure conditions | |
| CN207702126U (en) | A kind of binary channels vacuum measuring device being exclusively used in pressure vessel | |
| CN207703396U (en) | A kind of triple channel vacuum measuring device being exclusively used in pressure vessel | |
| CN107966474A (en) | Device for measuring block heat conductivity coefficient based on steady state method | |
| CN208688996U (en) | A kind of pyroconductivity test device | |
| CN116222824A (en) | High-precision low-temperature sensor calibration device and calibration method | |
| Gotoh et al. | Temperature stability and reproducibility of pressure-controlled sodium-filled heat pipe furnaces | |
| CN217786967U (en) | Constant temperature and constant pressure interface thermal resistance testing device | |
| CN213516959U (en) | Thermal contact resistance testing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20231113 Address after: 621000 No.6, 2nd Ring Road, Fucheng District, Mianyang City, Sichuan Province Applicant after: Institute of equipment design and test technology, China Aerodynamics Research and Development Center Applicant after: BEIJING DONGFANG MEASUREMENT AND TEST INSTITUTE Address before: 621000 No.6, south section of the Second Ring Road, Fucheng District, Mianyang City, Sichuan Province Applicant before: Institute of equipment design and test technology, China Aerodynamics Research and Development Center |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |