CN112922817A

CN112922817A - Micro blower

Info

Publication number: CN112922817A
Application number: CN201911240247.XA
Authority: CN
Inventors: 莫皓然; 张钧俋; 曾俊隆; 廖家淯; 陈世昌; 韩永隆; 黄启峰; 郭俊毅; 吕依庭
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2019-12-06
Filing date: 2019-12-06
Publication date: 2021-06-08

Abstract

A micro blower includes a soft sheet, an air jet hole sheet, a cavity frame, an actuating body, an insulating frame and a conductive frame. The air jet hole sheet includes a suspending part and is arranged on the flexible sheet. The cavity frame is arranged on the air jet hole sheet. The actuating body includes a piezoelectric carrier plate, an adjustment resonance plate and a piezoelectric plate, and the actuating body is arranged on the cavity frame. The insulating frame is arranged on the actuating body. The conductive frame is arranged on the insulating frame. Wherein, the center point of the central hole of the flexible sheet and the center point of the hollow hole of the suspension portion are located on the same axis.

Description

Micro blower

[ technical field ] A method for producing a semiconductor device

The present disclosure relates to a micro blower, and more particularly, to a thin, portable, noise-reducing micro blower.

[ background of the invention ]

Many blowers are driven to push out air by vibration, and the blowers are frequently accompanied with noise of air flow due to rapid high-frequency vibration, so that the noise generated by the blowers due to physical phenomena cannot achieve the portable purpose of portability and comfort.

[ summary of the invention ]

The main purpose of the present invention is to provide a micro blower which can improve the noise of the air flow generated by the micro blower during operation, and the micro blower designed and improved by the present invention can further achieve the effect of silencing the micro blower.

One broad aspect of the present disclosure is a micro blower comprising: a flexible sheet having a central hole; the air injection hole sheet comprises a suspension part and is arranged on the soft sheet, the suspension part is provided with a hollow hole, and the suspension part can be bent and vibrated, wherein the central point of the central hole of the soft sheet and the central point of the hollow hole of the suspension part are positioned on the same axis; a cavity frame arranged on the gas orifice plate; an actuating body, which is composed of a piezoelectric carrier plate, an adjusting resonance plate and a piezoelectric plate which are sequentially overlapped from bottom to top, the actuating body is arranged on the cavity frame, the piezoelectric carrier plate is used for receiving a first voltage and a second voltage to make the piezoelectric plate generate reciprocating bending vibration, wherein the first voltage and the second voltage are alternately applied to the piezoelectric carrier plate at a frequency; an insulating frame disposed on the actuating body; and a conductive frame disposed on the insulating frame; when the piezoelectric carrier plate is used for receiving the first voltage and the conductive frame is used for receiving the second voltage, the piezoelectric plate generates bending vibration in a first direction; when the piezoelectric carrier plate is used for receiving the second voltage and the conductive frame is used for receiving the first voltage, the piezoelectric plate generates bending vibration in a second direction opposite to the first direction; and a resonance chamber is formed among the actuating body, the cavity frame and the suspension part, the actuating body is driven to drive the air injection hole sheet to generate resonance by alternately applying the first voltage and the second voltage to the actuating body at the frequency, so that the suspension part of the air injection hole sheet generates reciprocating bending vibration displacement, gas enters the resonance chamber through the central hole of the soft sheet and the hollow hole of the suspension part and is exhausted, and the transmission and flow of the gas are realized.

[ description of the drawings ]

Fig. 1 is an exploded view of the components of the micro blower.

Fig. 2A is a schematic front view of the micro blower of the present disclosure.

Fig. 2B is a schematic reverse side view of the micro blower.

Fig. 3A to 3D are schematic views illustrating the operation of the micro blower.

[ detailed description ] embodiments

Embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1 to 3A, a micro blower 10 includes a flexible sheet 101, a gas injection hole sheet 102, a cavity frame 103, an actuator 104, an insulating frame 105, and a conductive frame 106. The flexible sheet 101 is a thin sound-deadening sheet, and the center of the flexible sheet 101 has a central hole 101 b. The air hole plate 102 includes a suspension portion 102a, and the flexible sheet 101 is disposed on the air hole plate 102. The suspension portion 102a has a hollow hole 102b at the center, and the suspension portion 102a can vibrate in bending. The center point of the central hole 101b of the flexible sheet 101 and the center point of the hollow hole 102b of the air injection hole sheet 102 are located on the same axis. The chamber frame 103 is disposed on the air injection hole piece 102. The actuator 104 is formed by stacking a piezoelectric carrier plate 104a, an adjusting resonator plate 104b and a piezoelectric plate 104c from bottom to top, and the actuator 104 is disposed on the chamber frame 103. The piezoelectric carrier 104a is used for receiving a first voltage and a second voltage to generate a reciprocating bending vibration on the piezoelectric plate 104c, and the first voltage and the second voltage are alternately applied to the piezoelectric carrier 104a at a frequency; the first voltage and the second voltage may be, but not limited to, a positive electrode and a negative electrode of the same power system (not shown). In other embodiments, the power system of the first voltage or the second voltage can be adjusted according to design requirements (e.g., sine wave, pulse wave, square wave, sawtooth wave … …, etc.). In the embodiment of the present invention, the first voltage is a square wave +5V, the second voltage is a square wave-5V, and the frequency of the first voltage alternating with the second voltage is 25Hz to 29KHz, but not limited thereto. In other embodiments of the present disclosure, the power system, the voltage value, and the frequency of the first voltage and the second voltage may also be adjusted according to design requirements. The insulating frame 105 is provided on the actuating body 104. The conductive frame 106 is disposed on the insulating frame 105.

It should be noted that, in the present embodiment, when the piezoelectric carrier 104a receives the first voltage and the conductive frame 106 receives the second voltage, the piezoelectric plate 104c generates bending vibration in a first direction. When the piezoelectric carrier 104a receives the second voltage and the conductive frame 106 receives the first voltage, the piezoelectric plate 104c generates bending vibration in a second direction opposite to the first direction. In this embodiment, the first direction may be an upper direction, and the second direction opposite to the first direction may be a lower direction, but not limited thereto. In other embodiments of the present disclosure, the first direction and the second direction may be expressed as other relative directions (e.g., up and down, left and right, or front and back).

It should be noted that, in the embodiment of the present invention, a resonant chamber 107 is formed between the actuating body 104, the cavity frame 103 and the suspension portion 102a, and the actuating body 104 is driven to drive the air injection hole piece 102 to resonate by applying a first voltage and a second voltage alternately at a frequency to the actuating body 104, so that the suspension portion 102a of the air injection hole piece 102 generates reciprocating bending vibration, so that the gas enters the resonant chamber 107 through the central hole 101b of the flexible thin sheet 101 and the hollow hole 102b of the air injection hole piece 102 and is discharged, thereby realizing the transmission and flow of the gas.

Referring to fig. 2B and 3A, in the present embodiment, the central hole 101B of the flexible sheet 101 of the suspension portion has a central hole diameter R1, and the hollow hole 102B of the air injection hole sheet 102 has a hollow hole diameter R2, wherein the central hole diameter R1 is smaller than the hollow hole diameter R2. It should be noted that fig. 2B is a schematic view of the opposite side of the micro blower of the present invention, and it should be understood that the periphery of the hollow hole 102B, i.e. the periphery surrounded by the hollow hole diameter R2, cannot be seen from the opposite side, and for convenience, the relationship between the hollow hole diameter R2 and the central hole diameter R1 is illustrated by dashed lines. More specifically, as shown in FIG. 3A, an axis Y is provided and passes through the central bore 101 b. When the flexible sheet 101 and the floating portion 102a are assembled, the central hole 101b of the flexible sheet 101 is aligned with the hollow hole 102b of the floating portion 102a and stacked along the direction of the axis Y. Accordingly, after the flexible sheet 101 and the floating portion 102a are stacked, the center point of the central hole 101b and the center point of the hollow hole 102b are located on the same axis (i.e., on the axis Y). In some embodiments, the central hole 101b is located at the very center of the flexible sheet 101; the hollow hole 102b is positioned at the right center of the suspension part 102 a; the center point of the central hole 101b and the center point of the hollow hole 102b are located on the same axis. In some embodiments, the central hole 101b is not located at the very center of the flexible sheet 101; the hollow hole 102b is positioned at the right center of the suspension part 102 a; the center point of the central hole 101b and the center point of the hollow hole 102b are located on the same axis. In some embodiments, the central hole 101b is located at the very center of the flexible sheet 101; the hollow hole 102b is not located at the exact center of the suspension portion 102 a; the center point of the central hole 101b and the center point of the hollow hole 102b are located on the same axis. In some embodiments, the central hole 101b is not located at the very center of the flexible sheet 101; the hollow hole 102b is not located at the exact center of the suspension portion 102 a; the center point of the central hole 101b and the center point of the hollow hole 102b are located on the same axis. In addition, the central hole 101b surrounds a sidewall 101c, and the hollow hole 102b surrounds a sidewall 102 c. Because of the larger hollow bore diameter R2 relative to central bore diameter R1, side wall 101c extends toward the center of central bore 101b and covers a portion of hollow bore 102 b. In one embodiment, sidewall 101c is substantially parallel to sidewall 102 c.

It should be noted that in other embodiments of the present disclosure, it is within the scope of the present disclosure as long as the hardness of the flexible sheet 101 is relatively smaller than the hardness of the suspended portion 102a, i.e., the hardness of the flexible sheet 101 is smaller than the hardness of the suspended portion 102 a.

It should be noted that in other embodiments of the present disclosure, it is within the scope of the present disclosure that the degree of flexure of the flexible sheet 101 is relatively greater than the degree of flexure of the suspending portion 102a, i.e., the degree of flexure of the flexible sheet 101 is greater than the degree of flexure of the suspending portion 102 a.

It should be noted that in other embodiments of the present disclosure, it is within the scope of the present disclosure that the elasticity of the flexible sheet 101 is relatively larger than the elasticity of the suspension portion 102a, i.e., the elasticity of the flexible sheet 101 is larger than the elasticity of the suspension portion 102 a.

In addition, in the present embodiment, the central hole 101b of the flexible sheet 101 has a central hole diameter R1, and the central hole diameter R1 is between 0.1 mm and 0.14 mm; the hollow hole 102b of the air injection hole piece 102 has a hollow hole diameter R2, and the hollow hole diameter R2 is between 0.4mm and 2 mm.

It should be noted that, in the present embodiment, the central hole 101b of the flexible sheet 101 is a circle; the central hole 101b of the flexible sheet 101 may also be a square, a diamond or a parallelogram, and the width of the central hole 101b is between 0.1 mm and 0.14mm, but not limited thereto. The shape and width of the central hole 101b of the flexible sheet 101 can be changed according to the design requirement.

In addition, it should be noted that, in the embodiment of the present invention, the hollow hole 102b of the air hole plate 102 is a circular shape; the hollow hole 102b of the air hole plate 102 may also be a square, a diamond, or a parallelogram, and the width of the hollow hole 102b is between 0.4mm and 2mm, but not limited thereto, and the shape and width of the hollow hole 102b of the air hole plate 102 may be changed according to design requirements.

Referring to fig. 3B to fig. 3D, the operation of the micro blower 10 is illustrated. First, when the actuating body 104 receives a first voltage and the conductive frame 106 receives a second voltage, the piezoelectric plate 104c generates bending vibration in a first direction, and the actuating body 104 is formed by stacking the piezoelectric carrier plate 104a, the tuning resonator plate 104b, and the piezoelectric plate 104c from bottom to top in this order. As shown in fig. 3B, when the actuating body 104 generates bending vibration in a first direction, the resonant chamber 107 generates negative pressure, so that the gas enters the resonant chamber 107 through the central hole 101B of the flexible thin sheet 101 and the hollow hole 102B of the gas injection hole sheet 102.

Then, due to the instant negative pressure of the resonant chamber 107, the jet hole piece 102 is driven by the actuator 104, so that the jet hole piece 102 and the actuator 104 generate resonance (as shown in fig. 3C). When the actuating body 104 receives the second voltage and the conductive frame 106 receives the first voltage, the piezoelectric plate 104c generates bending vibration in a second direction opposite to the first direction (as shown in fig. 3D), and at this time, the resonant chamber 107 generates positive pressure, so that the gas flows out from the resonant chamber 107 to the gas flow chamber 108 through the hollow hole 102b of the gas injection hole sheet 102 and the central hole 101b of the flexible thin sheet 101.

When the piezoelectric carrier plate 104a and the conductive frame 106 of the actuator 104 receive a first voltage and a second voltage, which are alternated at a high frequency, respectively, the gas is continuously sucked into and discharged from the resonant chamber 107 through the hollow hole 102b of the air hole plate 102 and the central hole 101b of the flexible thin plate 101, and the discharged gas follows the Bernoulli principle, so that the gas in the gas flow chamber 108 flows along the direction shown by the arrow in fig. 3D.

In the case of the micro blower 10 having the flexible sheet 101, the flow rate of the micro blower 10 is increased from 150 ml/s to 200 ml/s in the case of the micro blower having no flexible sheet, and the noise of the physical phenomenon caused by the gas flow is reduced from 50dB to 30dB or less in the case of the micro blower having no flexible sheet, as compared with the micro blower having no flexible sheet.

In summary, the micro blower provided by the present invention has the advantages of effectively reducing the noise of the physical phenomenon generated by the gas flow, and making use of the combination of the hardness, flexibility and elasticity of the soft thin sheet and the suspension part, and the design of the difference between the diameter of the central hole and the diameter of the hollow hole to make a silent micro blower, and generating a stronger bernoulli effect, thereby having great industrial applicability.

The present invention can be modified by those skilled in the art without departing from the scope of the appended claims.

[ notation ] to show

10: micro blower

101: flexible sheet

101 b: center hole

101 c: side wall

102: air injection hole sheet

102 a: suspension part

102 b: hollow hole

102 c: side wall

103: cavity frame

104: actuating body

104 a: piezoelectric carrier plate

104 b: tuning the resonator plate

104 c: piezoelectric plate

105: insulating frame

106: conductive frame

107: resonance chamber

108: airflow chamber

R1: diameter of central hole

R2: diameter of hollow hole

Y: axial line

Claims

1. A microbump, comprising:

a flexible sheet having a central hole;

the air injection hole sheet comprises a suspension part and is arranged on the soft sheet, the suspension part is provided with a hollow hole, and the suspension part can be bent and vibrated, wherein the central point of the central hole of the soft sheet and the central point of the hollow hole of the suspension part are positioned on the same axis;

a cavity frame arranged on the gas orifice plate;

an actuating body, which is composed of a piezoelectric carrier plate, an adjusting resonance plate and a piezoelectric plate which are sequentially overlapped from bottom to top, the actuating body is arranged on the cavity frame, the piezoelectric carrier plate is used for receiving a first voltage and a second voltage to make the piezoelectric plate generate reciprocating bending vibration, wherein the first voltage and the second voltage are alternately applied to the piezoelectric carrier plate at a frequency;

an insulating frame disposed on the actuating body; and

a conductive frame arranged on the insulating frame;

when the piezoelectric carrier plate is used for receiving the first voltage and the conductive frame is used for receiving the second voltage, the piezoelectric plate generates bending vibration in a first direction; when the piezoelectric carrier plate is used for receiving the second voltage and the conductive frame is used for receiving the first voltage, the piezoelectric plate generates bending vibration in a second direction opposite to the first direction; and a resonance chamber is formed among the actuating body, the cavity frame and the suspension part, the actuating body is driven to drive the air injection hole sheet to generate resonance by alternately applying the first voltage and the second voltage to the actuating body at the frequency, so that the suspension part of the air injection hole sheet generates reciprocating bending vibration displacement, gas enters the resonance chamber through the central hole of the soft sheet and the hollow hole of the suspension part and is exhausted, and the transmission and flow of the gas are realized.

2. The micro-blower of claim 1 wherein the central hole of the flexible sheet has a central hole diameter, the hollow hole of the suspension portion has a hollow hole diameter, and the central hole diameter is smaller than the hollow hole diameter.

3. The microblower of claim 1, wherein the stiffness of the flexible sheet is less than the stiffness of the suspended portion.

4. The microblower of claim 1, wherein the flexibility of the flexible sheet is greater than the flexibility of the suspension portion.

5. The micro-blower of claim 1, wherein the flexible sheet has a greater elasticity than the suspension portion.

6. The micro-blower of claim 1, wherein the central hole of the flexible sheet has a central hole diameter, and the central hole diameter is between 0.1 mm and 0.14 mm.

7. The microblower of claim 1, wherein the hollow hole of the suspension portion has a hollow hole diameter, and the hollow hole diameter is between 0.4mm and 2 mm.

8. The microblower of claim 1, wherein the central hole of the flexible sheet is circular.

9. The microblower of claim 1, wherein the central hole of the flexible sheet is a square, a diamond, or a parallelogram.

10. The microblower of claim 1, wherein the hollow hole of the suspension portion has a circular shape.

11. The microblower of claim 1, wherein the hollow hole of the suspension portion has a square shape, a diamond shape or a parallelogram shape.

12. The micro-blower of claim 1, wherein the central hole of the flexible sheet has a central hole width, and the central hole width is between 0.1 mm and 0.14 mm.

13. The microblower of claim 1, wherein the hollow hole of the suspension portion has a hollow hole width, and the hollow hole width is between 0.4mm and 2 mm.