CN112436377A - Parallel FMCW laser radar transmitting device and method for middle and far infrared wave bands - Google Patents
Parallel FMCW laser radar transmitting device and method for middle and far infrared wave bands Download PDFInfo
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- CN112436377A CN112436377A CN202011254351.7A CN202011254351A CN112436377A CN 112436377 A CN112436377 A CN 112436377A CN 202011254351 A CN202011254351 A CN 202011254351A CN 112436377 A CN112436377 A CN 112436377A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0427—Electrical excitation ; Circuits therefor for applying modulation to the laser
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/0014—Measuring characteristics or properties thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/041—Optical pumping
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Abstract
The invention relates to the technical field of laser radars, in particular to a parallel FMCW laser radar transmitting device and method for middle and far infrared wave bands. The laser radar transmitting device comprises a laser, an electro-optical modulator, an arbitrary function generator, a chalcogenide chip, a diffraction grating and an optical fiber link; the output port of the laser is connected with the light source input port of the electro-optical modulator, the waveform output port of the arbitrary function generator is connected with the microwave signal input port of the electro-optical modulator, and two ends of the chalcogenide chip are respectively connected with the optical signal output port of the electro-optical modulator and the diffraction grating through the lensed fiber. The invention utilizes the cascade four-wave mixing effect of the chalcogenide microcavity to convert single FMCW into a mid-far infrared frequency comb light source, thereby reducing the complexity of the linear frequency modulation narrow linewidth laser technology and greatly improving the sending rate.
Description
Technical Field
The invention relates to the technical field of laser radars, in particular to a parallel FMCW laser radar transmitting device and method for middle and far infrared wave bands.
Background
Most of the laser radars on the market currently use the "time-of-flight-TOF" technique, i.e. discrete light pulses are emitted, and a photodetector is used to detect the returned light power, thereby calculating the distance. The TOF technology has the advantages of obvious technology, mature technology, short development period and low cost, but the direct detection means causes the problems of poor anti-interference performance, short detection distance and the like, and the requirements of the vehicle-scale laser radar are difficult to meet. While the laser radar based on the Frequency Modulated Continuous Wave (FMCW) scheme can realize coherent detection, for example, patent CN111239754A, 2020.06.05 discloses a laser radar system based on a frequency modulated continuous wave and an imaging method thereof, which can effectively overcome the problems of TOF, but the FMCW laser radar is difficult to transmit in parallel due to the complexity of the current precise linear frequency modulation technology. FMCW lidar principle: due to the Doppler effect, frequency difference exists between the transmitted chirp signal (green) and the reflected chirp signal (blue), speed and distance information are related to the frequency difference, and the frequency difference information can be obtained by utilizing coherent detection, so that the distance and the speed of each pixel point are obtained. Such coherent detection based on FMCW lidar has many inherent advantages such as enhanced range resolution, direct speed detection using doppler effect, and avoidance of sunlight glare and interference. However, the measurement accuracy is very sensitive to the linearity of the chirped oblique line, coherent detection requires high light source coherence, and the technology for accurately controlling the chirped narrow-linewidth laser is very complex, which causes great difficulty in the realization of parallel measurement of the FMCW laser radar.
Disclosure of Invention
In order to overcome at least one defect in the prior art, the invention provides the parallel FMCW laser radar transmitting device and method for the middle and far infrared wave band, which reduce the complexity of the device, effectively improve the laser transmitting speed and are beneficial to improving the measuring speed of the laser radar.
In order to solve the technical problems, the invention adopts the technical scheme that: a parallel FMCW laser radar transmitting device of middle and far infrared wave bands comprises a laser, an electro-optic modulator, an arbitrary function generator, a chalcogenide chip, a diffraction grating and an optical fiber link; the output port of the laser is connected with the light source input port of the electro-optical modulator, the waveform output port of the arbitrary function generator is connected with the microwave signal input port of the electro-optical modulator, and two ends of the chalcogenide chip are respectively connected with the optical signal output port of the electro-optical modulator and the diffraction grating through the lensed fiber.
In one embodiment, the chalcogenide chip comprises a substrate, a chalcogenide micro-ring resonant cavity and a bus straight waveguide, wherein the chalcogenide micro-ring resonant cavity and the bus straight waveguide are both arranged at the top of the substrate, and the chalcogenide micro-ring resonant cavity is coupled with the bus straight waveguide. The chalcogenide chip converts continuous wave laser into a stable optical pulse sequence due to double balance of dispersion, nonlinearity, cavity pumping and loss, and generates a stable mid-far infrared waveband soliton frequency comb.
In one embodiment, the value of the radius of the micro-ring of the chalcogenide micro-ring resonant cavity is 50um to 200um, the thickness of the micro-ring is 0.7um to 1um, the width of the micro-ring is 1.9um to 2.5um, and the FSR of the free spectrum of the cavity is 130GHz to 520 GHz.
In one embodiment, two ends of the chalcogenide chip are respectively coupled with the lensed fiber through the inverse tapered waveguide.
In one embodiment, the length value of the reverse tapered waveguide is 200 um-500 um, and the width value of the tip is 100 nm-150 nm, so that the high-efficiency coupling of the optical fiber waveguide is realized.
In one embodiment, the laser output by the laser is a narrow linewidth light source, is a middle and far infrared band, and has a central wavelength of 9.5 um-11 um. Compared with the traditional 905nm and 1550nm laser light sources, the laser transmittance of the light source is improved by more than 1 time under weather such as rain, fog and the like.
In one embodiment, the waveform generated by the arbitrary function generator is a triangular chirp signal.
In one embodiment, the bandwidth of the triangular chirp signal is 1GHz-5GHz, and the modulation rate is 100KHz-10 MHz.
In one embodiment, the diffraction grating is provided with 80-120 notches per millimeter, and the middle and far infrared frequency comb light source is subjected to light splitting diffraction.
The invention also provides a middle and far infrared band parallel FMCW laser radar transmitting method, which uses the middle and far infrared band parallel FMCW laser radar transmitting device and specifically comprises the following steps:
the laser emits pumping light to enter the electro-optical modulator, and meanwhile, the arbitrary function generator generates a specific waveform to enter the electro-optical modulator to perform frequency chirp modulation on the pumping light;
modulated light passes through a chalcogenide chip, soliton frequency combs are generated by utilizing a cascade four-wave mixing effect of the chalcogenide chip, chirped laser is transmitted to all generated comb teeth without distortion, and a stable light pulse sequence required by a laser radar is finally generated;
the modulated light is diffracted to all parts of the space through the diffraction grating, and the object detection is realized.
Compared with the prior art, the beneficial effects are: the parallel FMCW laser radar transmitting device and method of the middle and far infrared wave band, provided by the invention, utilize the cascade four-wave mixing effect of the chalcogenide microcavity, convert single FMCW into the middle and far infrared frequency comb light source (parallel FMCW), reduce the complexity of the linear frequency modulation narrow linewidth laser technology, have greatly improved the sending rate; the light source that adopts simultaneously is located well far infrared wave band, compares in traditional laser radar light source 905nm and 1550nm, and the decay is little under weather such as sleet, helps improving laser radar's detection distance and security performance.
Drawings
FIG. 1 is a schematic diagram of the connection relationship of the laser radar transmitting device of the present invention.
Fig. 2 is a schematic diagram of the FMCW lidar ranging and velocity measurement principle.
FIG. 3 is a simulation diagram of the transmittance of a light source (e.g., fog weather) according to the present invention.
FIG. 4 is a schematic diagram of a chalcogenide chip preparation process in an embodiment of the invention.
FIG. 5 is a schematic diagram of the chalcogenide chip generating soliton frequency comb of the present invention.
FIG. 6 is a schematic top view of a chalcogenide chip according to the present invention.
FIG. 7 is a structural view of an electron microscope of a chalcogenide chip according to the present invention.
Detailed Description
The drawings are for illustration purposes only and are not to be construed as limiting the invention; for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted. The positional relationships depicted in the drawings are for illustrative purposes only and are not to be construed as limiting the invention.
As shown in fig. 1, the parallel FMCW lidar transmitting device for middle and far infrared bands comprises a laser 1, an electro-optical modulator 2, an arbitrary function generator 3, a chalcogenide chip 4, a diffraction grating 5 and an optical fiber link; the output port of the laser 1 is connected with the light source input port of the electro-optical modulator 2, the waveform output port of the arbitrary function generator 3 is connected with the microwave signal input port of the electro-optical modulator 2, and two ends of the chalcogenide chip 4 are respectively connected with the optical signal output port of the electro-optical modulator 2 and the diffraction grating 5 through the lensed fiber.
In one embodiment, as shown in fig. 6 and 7, the chalcogenide chip 4 includes a substrate 41, a chalcogenide micro-ring resonator 42 and a bus straight waveguide 43, the chalcogenide micro-ring resonator 42 and the bus straight waveguide 43 are both disposed on the top of the substrate 41, and the chalcogenide micro-ring resonator 42 and the bus straight waveguide 43 are coupled to each other. The core of the laser radar transmitting device provided by the invention is that the Kerr dissipation effect of the chalcogenide chip 4 is utilized, the frequency chirp characteristic of the single-frequency triangular frequency modulation continuous wave is conducted to each generated comb tooth without distortion, and as shown in figure 5, continuous wave laser on a time domain is converted into a stable optical pulse sequence under the double balance conditions of dispersion, nonlinearity, cavity pumping and loss, so that the stable mid-far infrared waveband soliton frequency comb is generated. As shown in fig. 4, the preparation process of the chalcogenide chip 4 includes the following steps:
1. deposition: depositing a chalcogenide film on the silicon oxide lower cladding layer in a thermal evaporation mode, an electron beam evaporation mode or a magnetron sputtering mode, wherein the deposition speed is not more than 5 nm/min, and the deposition thickness is 800 nm;
2. gluing: spin-coating electron beam glue on the high-nonlinearity low-loss chalcogenide film, wherein the polymer electron glue is any one of polymethacrylate PMMA, ARP, ZEP and NR-9, and the thickness of the electron glue is 1.5 um;
3. photoetching: exposing the pattern layer required by the electron beam glue, and after exposure is finished, putting the sample into a developing solution for developing to remove the electron beam glue in the exposure area, so as to form the required electron beam glue pattern layer;
4. etching: putting the sample into a reactive ion etching machine, carrying out ion bombardment and ion reactive etching on the sample, and transferring the electron beam glue pattern layer to a chalcogenide film to form a chalcogenide micro-ring resonant cavity 42 and a residual electron beam glue pattern;
5. removing residual glue: removing the polymer electronic glue through a glue removing agent to obtain the chalcogenide micro-ring resonant cavity 42, wherein the glue removing agent is acetone or 1165 glue removing agent;
6. hot reflux: the sample is sealed and placed in an annealing furnace, and the thermal reflux effect is performed on the side wall of the chalcogenide micro-ring resonant cavity 42, so that the side wall becomes smooth, the waveguide loss is reduced, and the quality factor is further improved.
In one embodiment, the value of the radius of the micro-ring of the chalcogenide micro-ring resonant cavity 42 is 50um to 200um, the thickness of the micro-ring is 0.7um to 1um, the width of the micro-ring is 1.9um to 2.5um, the FSR of the cavity free spectrum is 130GHz to 520GHz, and the Q value reaches 6 th power of 10.
In one embodiment, two ends of the chalcogenide chip 4 are respectively coupled with the lens optical fiber through the inverse tapered waveguide; the length value of the reverse tapered waveguide is 200 um-500 um, the width value of the tip is 100 nm-150 nm, and the high-efficiency coupling of the optical fiber waveguide is realized.
In one embodiment, the laser output by the laser 1 is a narrow linewidth light source, which is a middle and far infrared band, and the central wavelength is 9.5um to 11 um. Compared with the traditional 905nm and 1550nm laser light sources, the laser transmittance of the light source is improved by more than 1 time under weather such as rain, fog and the like. Traditional laser radar adopts the single-frequency light source that the wave band is 905nm and 1550nm, this light source transmissivity descends by a wide margin under weather such as rain, snow and fog, as shown in fig. 3 (PcModwin 3.7 emulation), under the distance of ground 200 meters, the transmissivity is only 20%, the application nature of laser radar has extremely deteriorated, adopt far infrared wave band in 10.5um, the transmissivity can reach more than 60% under the same condition, be more than 3 times of traditional laser radar light source, help improving laser radar's detection distance and security performance.
In one embodiment, the waveform generated by the arbitrary function generator 3 is a triangular chirp signal with a bandwidth of 1GHz-5GHz and a modulation rate of 100KHz-10 MHz.
In one embodiment, the diffraction grating 5 has 80-120 notches per millimeter, and performs light splitting diffraction on the mid-infrared and far-infrared frequency comb light source.
In another embodiment, a method for transmitting parallel FMCW lidar in mid-far infrared band is further provided, and the method for transmitting parallel FMCW lidar in mid-far infrared band uses the apparatus for transmitting parallel FMCW lidar in mid-far infrared band, and the method includes the following specific steps:
the laser 1 emits pumping light with the wavelength of 10.5um to enter an electro-optic modulator 2, meanwhile, an arbitrary function generator 3 generates triangular waveform frequency modulation signals to enter the electro-optic modulator 2 to perform frequency chirp modulation on the pumping light, the pumping light is changed into triangular wave frequency modulation continuous waves with the bandwidth of 1.5Ghz and the modulation rate of 100kHz after being modulated, then the modulated light enters a chalcogenide chip 4 through a lens optical fiber, a Kerr dissipation effect is utilized to generate soliton frequency combs (30 combs in the 3dB bandwidth), the frequency chirp characteristic of the soliton frequency combs is conducted to all excited frequency combs without distortion, finally, a multichannel FCMW light source is distributed and diffracted to all places in space through a diffraction grating 5, the object distance and the object speed are detected in parallel, and the emission pulse rate is increased by one order of magnitude through theoretical calculation.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A parallel FMCW laser radar transmitting device of middle and far infrared wave bands is characterized by comprising a laser (1), an electro-optical modulator (2), an arbitrary function generator (3), a chalcogenide chip (4), a diffraction grating (5) and an optical fiber link; the output port of the laser (1) is connected with the light source input port of the electro-optical modulator (2), the waveform output port of the arbitrary function generator (3) is connected with the microwave signal input port of the electro-optical modulator (2), and two ends of the chalcogenide chip (4) are respectively connected with the optical signal output port of the electro-optical modulator (2) and the diffraction grating (5) through lens optical fibers.
2. The transmitting device of the parallel FMCW lidar for mid-and far-infrared bands as recited in claim 1, wherein the chalcogenide chip (4) includes a substrate (41), a chalcogenide micro-ring resonator (42) and a bus straight waveguide (43), the chalcogenide micro-ring resonator (42) and the bus straight waveguide (43) are both disposed on top of the substrate (41), and the chalcogenide micro-ring resonator (42) and the bus straight waveguide (43) are coupled to each other.
3. The transmitting device of claim 2, wherein the chalcogenide micro-ring resonator (42) has a micro-ring radius value of 50 um-200 um, a micro-ring thickness of 0.7 um-1 um, a micro-ring width of 1.9 um-2.5 um, and a free cavity spectrum FSR of 130 GHz-520 GHz.
4. The transmitting device of parallel FMCW lidar for mid-and far-infrared bands as set forth in claim 2, wherein both ends of said chalcogenide chip (4) are coupled to said lensed fiber by reverse tapered waveguides.
5. The device as claimed in claim 4, wherein the length of the reverse tapered waveguide is 200 um-500 um, and the width of the tip is 100 nm-150 nm.
6. The transmitting device of parallel FMCW lidar according to any of claims 1 to 5, wherein the laser output from the laser (1) is a narrow line width source, is in mid-far infrared band, and has a center wavelength of 9.5 um-11 um.
7. The device for transmitting parallel FMCW lidar according to claim 6, wherein the arbitrary function generator (3) generates a triangular chirp signal.
8. The apparatus according to claim 7, wherein the bandwidth of the chirp signal of the triangle wave is 1GHz-5GHz and the modulation rate is 100KHz-10 MHz.
9. The transmitting device of the parallel FMCW lidar for mid-and far-infrared bands as recited in claim 7, wherein the diffraction grating (5) has 80-120 notches per mm for splitting and diffracting the mid-and far-infrared frequency comb light source.
10. A method for transmitting parallel FMCW lidar in mid-far infrared band, wherein the device for transmitting parallel FMCW lidar in mid-far infrared band of any one of claims 1 to 9 is used, comprising the following steps:
the laser (1) emits pump light to enter the electro-optic modulator (2), and meanwhile, the arbitrary function generator (3) generates a specific waveform to enter the electro-optic modulator (2) to perform frequency chirp modulation on the pump light;
modulated light passes through a chalcogenide chip (4), soliton frequency combs are generated by utilizing a cascade four-wave mixing effect of the chalcogenide chip (4), chirped laser is transmitted to all generated comb teeth without distortion, and a stable light pulse sequence required by a laser radar is finally generated;
the modulated light is diffracted through the diffraction grating (5) to all over space.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113764978A (en) * | 2021-09-03 | 2021-12-07 | 中国科学院福建物质结构研究所 | Scanning laser light source for FMCW (frequency modulated continuous wave) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113764978A (en) * | 2021-09-03 | 2021-12-07 | 中国科学院福建物质结构研究所 | Scanning laser light source for FMCW (frequency modulated continuous wave) |
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