CN112330738B - Method for detecting angle and stepping of workpiece by dicing saw - Google Patents
Method for detecting angle and stepping of workpiece by dicing saw Download PDFInfo
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- CN112330738B CN112330738B CN202010017813.7A CN202010017813A CN112330738B CN 112330738 B CN112330738 B CN 112330738B CN 202010017813 A CN202010017813 A CN 202010017813A CN 112330738 B CN112330738 B CN 112330738B
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- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000012163 sequencing technique Methods 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 description 4
- 239000000284 extract Substances 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/70—Determining position or orientation of objects or cameras
- G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/10—Segmentation; Edge detection
- G06T7/12—Edge-based segmentation
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
- G06T7/66—Analysis of geometric attributes of image moments or centre of gravity
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20092—Interactive image processing based on input by user
- G06T2207/20104—Interactive definition of region of interest [ROI]
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- Theoretical Computer Science (AREA)
- Mechanical Engineering (AREA)
- Geometry (AREA)
- Dicing (AREA)
Abstract
The invention provides a method for detecting workpiece angle and stepping by a dicing saw, which belongs to the field of dicing saw and comprises the following specific steps: acquiring a target image containing a workpiece of the dicing saw; binarizing the region of interest according to the target image, analyzing the connected region of the binarized image, and extracting a designated region serving as an analysis target; extracting a geometric center with the appointed characteristic region, and constructing a characteristic point plane distribution map by taking the geometric center as a characteristic point; randomly extracting two characteristic points, drawing a straight line passing through the two characteristic points, projecting all the characteristic points onto the straight line, and recording the positions of the projection points; sequencing all projected points after projection to obtain the maximum difference between the projected points, and recording the maximum difference value; step five: and repeating the third step and the fourth step, and extracting the maximum difference value in each step, wherein the two characteristic points correspond to the workpiece angle and the maximum difference value corresponds to the workpiece step.
Description
Technical Field
The invention belongs to the field of dicing saws, and particularly provides a method for detecting workpiece angles and stepping by using a dicing saw.
Background
Dicing machines typically cut round or square workpieces into square cores of a fixed size (length and width) with identical circuitry or certain chemical characteristics thereon as desired by the customer. The position of the core grain is divided by a cutting channel on the workpiece, the cut workpiece is divided into two directions, the first is vertical direction and the second is horizontal direction, and each direction consists of equally-spaced parallel cutting channels from the upper part to the lower part of the workpiece.
The dicing saw cuts the workpiece in two directions by a rotary workbench, firstly, the workpiece is placed on a rotary table, the rotary workbench enables cutting channels to be parallel to the horizontal direction, the position of the cutting channels is recorded in the vertical direction, then the workbench rotates 90 degrees clockwise, the cutting channels in the second direction are parallel to the horizontal direction, the positions of the cutting channels are recorded, and finally all the cutting channels in the two directions are cut respectively.
The dicing saw needs to be automatically aligned before cutting the workpiece, and the purpose of the dicing saw is to confirm the angle of the rotating table and the position of the vertical direction, and the traditional machine requires that the angle of the workpiece placed on the rotating table is within +/-5 degrees, so that the cutting direction can be distinguished, and the automatic alignment process can be completed rapidly and accurately. In the LED chip industry, the dicing pitch is usually only tens of micrometers, and it is almost difficult for an operator to determine the direction of the wafer with the naked eye, so that the product cannot be placed correctly, and the angle of the product is very random, which indirectly results in that the automatic alignment is difficult to implement, because the automatic alignment must be based on the small deviation of the angle of the workpiece.
Disclosure of Invention
The invention aims to provide a method for detecting the angle and the step of a workpiece by a dicing saw, which solves the problem of automatic alignment failure caused by small cutting interval and arbitrary placement angle; by carrying a small-magnification microscope, workpiece images are acquired in real time, and the images are identified to achieve the purpose of roughly correcting the angle of the workpiece, and finally, the automatic alignment process is smoothly implemented on the basis.
The detection method is established on a motion and image recognition system of the dicing saw, wherein the motion system of the dicing saw mainly comprises X, Y, Z, T shafts, a T shaft represents a rotating shaft, a workbench is arranged on the motion system, the T shaft is fixed on an X shaft, the X shaft can move left and right, a microscope is fixed on a Y shaft, the Y shaft can move back and forth, and the Z shaft is fixed on Y and can move up and down. The detection system is matched with a software algorithm to realize angle identification, the algorithm extracts similar characteristic points in an image, the characteristic points are randomly sampled for a plurality of times, an angle hypothesis is established by using sample points, voting verification is performed by using other characteristic points, and angle information can be determined when voting evidence is sufficient.
Namely, the specific steps are as follows: firstly, placing a workpiece in a workbench, so that the center area of the workpiece covers the center of the workbench; the microscope moves to the center of the workbench, and images are captured; extracting characteristic points in the image; randomly extracting a plurality of sample points in the characteristic points, and calculating a relevant angle; verifying the angle by other points, and fully returning evidence to the angle; when the workbench rotates by a rotation angle, the workbench implements an automatic alignment process.
The invention provides a method for detecting workpiece angle and stepping by a dicing saw, which comprises the following specific steps:
step one: acquiring a target image containing a workpiece of the dicing saw;
Binarizing the region of interest according to the target image, analyzing the connected region of the binarized image, and extracting a designated region serving as an analysis target;
Step two: extracting a geometric center with the appointed characteristic region, and constructing a characteristic point plane distribution map by taking the geometric center as a characteristic point;
step three: randomly extracting two characteristic points, drawing a straight line passing through the two characteristic points, projecting all the characteristic points onto the straight line, and recording the positions of the projection points;
step four: sequencing all projected points after projection to obtain the maximum difference between the projected points, and recording the maximum difference value;
Step five: repeating the third step and the fourth step for a sufficient number of times, extracting a maximum difference value in each step, wherein the two feature points correspond to workpiece angles, and the maximum difference value corresponds to workpiece steps.
Further, in the second step, the area of the designated area as the analysis target is fixed; the shape of the designated area is circular or square.
Further, the repetition number in the fifth step is calculated according to the number of feature points.
The invention can identify the stepping amount and the angle of the workpiece to be processed at one time, can avoid cutting rejection caused by placing products with wrong stepping amount, further carries out rough angle correction under the condition of confirming that the product steps are correct, prepares conditions for successful completion of subsequent automatic alignment, and solves the problem of automatic alignment in the LED chip industry.
Drawings
FIG. 1 is an analysis chart of connected regions in a region of interest provided by the present invention.
Fig. 2 is a distribution diagram of characteristic points provided by the present invention.
Fig. 3 is a projection view of a preset first direction provided by the present invention.
Fig. 4 is a projection view of a preset second direction provided by the present invention.
Fig. 5 is a projection view of a preset third direction provided by the present invention.
Fig. 6 is a graph of the end result provided by the present invention.
Detailed Description
Example 1
The detection method of the embodiment is established on a motion and image recognition system of the dicing saw, wherein the motion system of the dicing saw mainly comprises X, Y, Z, T shafts, a T shaft represents a rotating shaft, a workbench is arranged on the T shaft, the T shaft is fixed on an X shaft, the X shaft can move left and right, a microscope is fixed on a Y shaft, the Y shaft can move back and forth, and the Z shaft is fixed on the Y and can move up and down. The detection system is matched with a software algorithm to realize angle identification, the algorithm extracts similar characteristic points in an image, the characteristic points are randomly sampled for a plurality of times, an angle hypothesis is established by using sample points, voting verification is performed by using other characteristic points, and angle information can be determined when voting evidence is sufficient.
Namely, the specific steps are as follows: firstly, placing a workpiece in a workbench, so that the center area of the workpiece covers the center of the workbench; the microscope moves to the center of the workbench, and images are captured; extracting characteristic points in the image; randomly extracting a plurality of sample points in the characteristic points, and calculating a relevant angle; verifying the angle by other points, and fully returning evidence to the angle; when the workbench rotates by a rotation angle, the workbench implements an automatic alignment process.
The embodiment provides a method for detecting workpiece angle and stepping by a dicing saw, which comprises the following specific steps:
step one: acquiring a target image containing a workpiece of the dicing saw;
Binarizing the region of interest according to the target image, analyzing the connected region of the binarized image, and extracting a designated region serving as an analysis target;
Step two: extracting a geometric center with the appointed characteristic region, and constructing a characteristic point plane distribution map by taking the geometric center as a characteristic point;
step three: randomly extracting two characteristic points, drawing a straight line passing through the two characteristic points, projecting all the characteristic points onto the straight line, and recording the positions of the projection points;
step four: sequencing all projected points after projection to obtain the maximum difference between the projected points, and recording the maximum difference value;
Step five: and repeating the third step and the fourth step, and extracting the maximum difference value in each step, wherein the two characteristic points correspond to the workpiece angle and the maximum difference value corresponds to the workpiece step.
Further, in the second step, the area of the designated area as the analysis target is fixed; the shape of the designated area is circular or square.
Further, the repetition number in the fifth step is calculated according to the number of feature points.
The invention is not a matter of the known technology.
The above embodiments are provided to illustrate the technical concept and features of the present invention and are intended to enable those skilled in the art to understand the content of the present invention and implement the same, and are not intended to limit the scope of the present invention. All equivalent changes or modifications made in accordance with the spirit of the present invention should be construed to be included in the scope of the present invention.
Claims (2)
1. A method for detecting the angle and the stepping of a workpiece by a dicing saw is characterized by comprising the following specific steps:
step one: acquiring a target image containing a workpiece of the dicing saw;
Binarizing the region of interest according to the target image, analyzing the connected region of the binarized image, and extracting a designated region serving as an analysis target;
Step two: extracting a geometric center with the designated area, and constructing a characteristic point plane distribution map by taking the geometric center as a characteristic point;
step three: randomly extracting two characteristic points, drawing a straight line passing through the two characteristic points, projecting all the characteristic points onto the straight line, and recording the positions of the projection points;
step four: sequencing all projected points after projection to obtain the maximum difference between the projected points, and recording the maximum difference value;
Step five: repeating the third step and the fourth step for a certain number of times, calculating the number of times according to the number of the characteristic points, extracting the maximum difference value in each time, wherein the two characteristic points correspond to the workpiece angle, and the maximum difference value corresponds to the workpiece step.
2. A method of inspecting a workpiece angle and step by a dicing saw according to claim 1, wherein: the area of the designated area serving as the analysis target is fixed; the shape of the designated area is circular or square.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010017813.7A CN112330738B (en) | 2020-01-08 | 2020-01-08 | Method for detecting angle and stepping of workpiece by dicing saw |
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| CN202010017813.7A CN112330738B (en) | 2020-01-08 | 2020-01-08 | Method for detecting angle and stepping of workpiece by dicing saw |
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| CN112330738A CN112330738A (en) | 2021-02-05 |
| CN112330738B true CN112330738B (en) | 2024-10-01 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113867257B (en) * | 2021-08-25 | 2023-06-09 | 上海航天精密机械研究所 | Processing and sequencing method and system for hole characteristics of rotary cabin body |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0774094A (en) * | 1994-06-20 | 1995-03-17 | Nikon Corp | Projection aligner and therefor |
| CN110146017A (en) * | 2019-06-08 | 2019-08-20 | 青岛科技大学 | Industrial robot repetitive positioning accuracy measurement method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994027756A1 (en) * | 1993-05-24 | 1994-12-08 | Kabushiki Kaisha Komatsu Seisakusho | Angle of bend detector and straight line extractor used therefor, and angle of bend detecting position setting apparatus |
| US5798195A (en) * | 1993-09-24 | 1998-08-25 | Nikon Corporation | Stepping accuracy measuring method |
| TW419720B (en) * | 1999-03-26 | 2001-01-21 | Mosel Vitelic Inc | The method of monitoring the overlay accuracy of the stepper and the device using the same |
| JP4640715B2 (en) * | 2000-07-14 | 2011-03-02 | 株式会社ディスコ | Alignment method and alignment apparatus |
| WO2009028489A1 (en) * | 2007-08-30 | 2009-03-05 | Kabushiki Kaisha Yaskawa Denki | Object detecting method, object detecting device, and robot system |
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2020
- 2020-01-08 CN CN202010017813.7A patent/CN112330738B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0774094A (en) * | 1994-06-20 | 1995-03-17 | Nikon Corp | Projection aligner and therefor |
| CN110146017A (en) * | 2019-06-08 | 2019-08-20 | 青岛科技大学 | Industrial robot repetitive positioning accuracy measurement method |
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