CN112285921A - Light beam scanning method and system - Google Patents
Light beam scanning method and system Download PDFInfo
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- CN112285921A CN112285921A CN202011282863.4A CN202011282863A CN112285921A CN 112285921 A CN112285921 A CN 112285921A CN 202011282863 A CN202011282863 A CN 202011282863A CN 112285921 A CN112285921 A CN 112285921A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/106—Scanning systems having diffraction gratings as scanning elements, e.g. holographic scanners
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Abstract
The invention discloses a light beam scanning method and a light beam scanning system, wherein a scanning grating pair for scanning and a compensation component for compensating chromatic aberration are introduced into an incident light path; the scanning gratings rotate oppositely to continuously change the direction of emergent light to form scanning; based on the rotation angle of the scanning grating pair, the two compensation components are integrally rotated oppositely, so that the chromatic aberration of the scanning grating pair is pre-compensated by the gratings in the compensation components, and the direction of light entering the scanning system is not changed. The scanning system adopts two flat transmission gratings which rotate in opposite directions, realizes light beam scanning within a certain angle of space, saves space, and is beneficial to being conformal with an optical platform; meanwhile, the compensation assembly which comprises the grating and the matched reflector and rotates integrally is introduced, the compensation assembly is suitable for broadband light, emergent light passing through the compensation assembly only has chromatic aberration matched with a scanning grating pair at the rear stage, no deflection angle exists, chromatic aberration pre-compensation is achieved, and accordingly chromatic aberration-free scanning of the emergent light of the whole system is achieved.
Description
Technical Field
The invention belongs to the technical field of laser, and particularly relates to a light beam scanning method and a light beam scanning system.
Background
The beam scanning technique for accurately controlling and positioning the laser beam direction is widely applied in the fields of space optical communication, laser radar, laser orientation energy application and the like. The mechanical light beam scanning technology is relatively mature, but a universal joint is generally used as a platform for rotary motion, and other mechanical structures (galvanometers, fast reflecting mirrors and the like) are integrated for scanning, so that the mechanical light beam scanning technology is heavy in weight and large in size and is inconvenient to apply.
Accordingly, further developments and improvements are still needed in the art.
Disclosure of Invention
In order to solve the above problems, a method and system for scanning a light beam are proposed. The invention provides the following technical scheme:
a method of optical beam scanning, comprising:
introducing a scanning grating pair for scanning and a compensation component for compensating chromatic aberration into an incident light path;
the scanning gratings rotate oppositely to continuously change the direction of emergent light to form scanning;
based on the rotation angle of the scanning grating pair, the two compensation assemblies are integrally rotated in opposite directions, so that the direction of incident light is unchanged after passing through the compensation assemblies, and chromatic aberration is formed after passing through the scanning grating pair to obtain compensated scanning.
Further, according to the requirement of light beam scanning, the grating ruling number of the scanning grating pair, the used diffraction order and the used rotation angle are designed:
constructing a three-axis coordinate system of the grating, wherein the grating is arranged on an XY plane, an included angle between emergent light and a Z axis is theta after the grating passes through the grating pair, and an included angle between the projection of the emergent light and the X axis on the XY plane is P;
the rotation angles of two gratings in a scanning grating pair are respectively A and B, the diffraction order of the gratings is m, the central wavelength of incident light is lambda, the groove number of the two gratings is rho, and a grating equation is established for the two gratings to obtain the grating equation
sinθ＝2m·ρ·λ|cos((A+B)/2)| (3)
Obtained by the formula (3)
sinθmax＝2m·ρ·λ (4)
Then the maximum value theta of the scanning angle thetamaxThe central wavelength λ of the incident light, the number ρ of grooves of the scanning grating, and the diffraction order m used, are designed based on the formula (4);
the rotation angles a and B of the two scanning gratings are calculated based on equations (1) and (2) from the requirement for the scanning angle P.
Further, according to the chromatic aberration of the scanning grating pair, the number of the lines of the grating in the compensation assembly, the diffraction order and the rotation angle are designed as follows:
the direction of the light with different wavelengths after the light is emitted is different due to the chromatic aberration, the size of the chromatic aberration can be represented by the deviation delta theta of the included angle theta between the emitted light and the Z axis, and the deviation delta theta is calculated by the formula (3)
As can be seen from equations (3) and (5), when a + B of the scanning grating pair is 0, the maximum chromatic aberration occurs
The maximum chromatic aberration of the compensation grating pair is to be compensated for, i.e. the maximum chromatic aberration of the scanning grating pair is compensated for
In the formula, the subscript is 1 to represent the parameter of the compensation grating pair, and beta is the beam expansion ratio of the beam expansion system between the compensation assembly and the scanning system;
based on the diffraction order m of the scanning grating pair, the grating ruling number rho, the central wavelength lambda of light, the bandwidth delta lambda and the beam expansion ratio beta of the beam expansion system, the diffraction order m of the compensation grating pair is designed by the formula (7)1Number of grating rulings ρ1。
Furthermore, the direction of chromatic aberration is characterized by an included angle P between the projection of the emergent light on the XY plane and the X axis.
Furthermore, for any rotation angles A and B of two gratings of the scanning grating pair, the chromatic aberration size Delta theta can be known from the formula (5), and the chromatic aberration direction P can be known from the formulas (1) and (2), so that the chromatic aberration size of the compensation grating pair is Delta theta1β · Δ θ, direction P1The rotation angle a of the compensation grating pair can be inversely resolved by using the formula (1), the formula (2), the formula (3), the formula (5), or the like, as P +180 °1And B1。
Further, the compensation component is a reflection-type compensation component.
Furthermore, the reflection-type compensation component comprises two groups of reflection compensation mirror groups which have the same structure and rotate integrally in opposite directions, and each reflection compensation mirror group comprises a reflection compensation grating, a first reflecting mirror arranged in parallel right above the reflection compensation grating, a second reflecting mirror arranged opposite to the first reflecting mirror and a third reflecting mirror arranged in parallel right below the second reflecting mirror.
Furthermore, the scanning grating pair comprises two flat transmission gratings which rotate oppositely.
An optical beam scanning system includes a scanning grating pair configured to deflect an incident optical path.
Further, the broadband light polarization compensation device further comprises a compensation component configured to compensate chromatic aberration of the broadband light, wherein the compensation component is a reflection type compensation component containing a reflection compensation grating.
Has the advantages that:
the scanning system adopts two flat transmission gratings which rotate in opposite directions, realizes light beam scanning within a certain angle of space, saves space, and is beneficial to being conformal with an optical platform; meanwhile, the compensation assembly which comprises the grating and the matched reflector and rotates integrally is introduced, the compensation assembly is suitable for broadband light, emergent light passing through the compensation assembly only has chromatic aberration matched with a scanning grating pair at the rear stage, no deflection angle exists, chromatic aberration pre-compensation is achieved, and accordingly chromatic aberration-free scanning of the emergent light of the whole system is achieved.
Drawings
FIG. 1 is a flow chart of a method for scanning a light beam according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the pointing angle of a monochromatic light (1053nm) through a transmission grating pair in an embodiment of the present invention;
FIG. 3 is a schematic diagram of the pointing angle of broadband light (1053 + -15 mm) passing through a transmission grating pair in an embodiment of the present invention;
FIG. 4 is a schematic view of a scan trajectory on a scan plane before compensation without a beam expansion system in an embodiment of the present invention;
FIG. 5 is a schematic view of a compensation raster scan trajectory of a mirrorless array without a beam expansion system in an embodiment of the present invention;
FIG. 6 is a schematic view of a compensated raster scan trajectory with a mirror array without a beam expansion system in an embodiment of the present invention;
FIG. 7 is a schematic view of a scan trajectory on a compensated scan plane without a beam expansion system in an embodiment of the present invention;
FIG. 8 is a schematic view of a mirrorless set compensated raster scan trajectory with a beam expansion system in an embodiment of the present invention;
FIG. 9 is a schematic diagram of a grating coordinate system in an embodiment of the present invention;
FIG. 10 is a schematic illustration of a transmission grating pair deflecting a light beam in an embodiment of the present invention;
FIG. 11 is a schematic illustration of the scan trajectory of a transmission grating pair in one plane of space in accordance with an embodiment of the present invention;
FIG. 12 is a schematic view of a reflection compensating mirror array according to an embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the following description of the technical solutions of the present invention with reference to the accompanying drawings of the present invention is made clearly and completely, and other similar embodiments obtained by a person of ordinary skill in the art without any creative effort based on the embodiments in the present application shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.
As shown in fig. 1, an optical beam scanning method includes:
s100, introducing a scanning grating pair for scanning and a compensation component for compensating chromatic aberration in an incident light path;
s200, the scanning gratings rotate oppositely, and the direction of emergent light is changed continuously to form scanning;
s300, based on the rotation angle of the scanning grating pair, the two compensation assemblies are integrally rotated oppositely, so that the direction of incident light is unchanged after passing through the compensation assemblies, and chromatic aberration is formed after passing through the scanning grating pair to obtain compensated scanning.
As shown in fig. 10, which is a schematic diagram of a transmission grating deflecting a light beam, when two gratings rotate in opposite directions, due to the superposition of two rotation angles, the light beam can realize a certain angle scanning in space, as shown in fig. 11. For an actual laser light source, a certain bandwidth exists, so that lights with different wavelengths have a certain difference in pointing angles after passing through a scanning grating pair. This requires the addition of a compensation component before scanning the grating pair to compensate for chromatic aberrations caused by different wavelengths.
Further, according to the requirement of light beam scanning, the grating ruling number of the scanning grating pair, the used diffraction order and the used rotation angle are designed:
constructing a three-axis coordinate system of the grating, as shown in fig. 9, wherein the grating is arranged on an XY plane, an included angle between outgoing light and a Z axis is theta after incident light passes through a grating pair, and an included angle between projection of the outgoing light and an X axis on the XY plane is P;
the rotation angles of two gratings in a scanning grating pair are A (clockwise rotation) and B (counterclockwise rotation), the diffraction order of the gratings is m, the wavelength of incident light is lambda, the groove number of the two gratings is rho, and a grating equation is simultaneously established for the two gratings to obtain the grating equation
sinθ＝2m·ρ·λ|cos((A+B)/2)| (3)
From the formula (3), the maximum value of | cos ((A + B)/2) | is 1, and the formula is obtained
sinθmax＝2m·ρ·λ (4)
Then the maximum value theta of the scanning angle thetamaxThe central wavelength λ of the incident light, the number ρ of grooves of the scanning grating, and the diffraction order m used, are designed based on the formula (4);
the rotation angles a and B of the two scanning gratings are calculated based on equations (1) and (2) from the requirement for the scanning angle P.
According to the chromatic aberration of the scanning grating pair, the number of the lines of the grating in the compensation assembly, the diffraction order and the rotation angle are designed:
the direction of the light with different wavelengths after the light is emitted is different due to the chromatic aberration, the size of the chromatic aberration can be represented by the deviation delta theta of the included angle theta between the emitted light and the Z axis, and the deviation delta theta is calculated by the formula (3)
As can be seen from equations (3) and (5), when a + B of the scanning grating pair is 0, the maximum chromatic aberration occurs
The maximum chromatic aberration of the compensation grating pair is to be compensated for, i.e. the maximum chromatic aberration of the scanning grating pair is compensated for
In the formula, the subscript 1 represents a compensation grating pair. If a beam expanding system is arranged between the compensation assembly and the scanning system, when the beam expanding ratio is beta, the size of chromatic aberration generated by the compensation grating pair can be reduced by beta times by the beam expanding system, so that the size of the chromatic aberration of the pre-compensation is beta times larger than that of the scanning grating pair; beta is 1 if there is no beam expanding system.
Thus, the diffraction order m of the compensation grating pair can be designed from the formula (7) based on the diffraction order m of the scanning grating pair, the grating ruling number ρ, the central wavelength λ of the light, the bandwidth Δ λ, and the beam expansion ratio β of the beam expansion system1Number of grating rulings ρ1。
The direction of chromatic aberration is represented by an included angle P between the projection of the emergent light on an XY plane and an X axis, and is calculated by the formula (1) and the formula (2). The chromatic aberration compensation means that when the size of the chromatic aberration generated by the scanning grating pair is delta theta and the direction is in the P direction, the size of the chromatic aberration generated by the compensation grating pair is delta theta1β · Δ θ, oriented in P1Chromatic aberration in the P +180 ° direction. For any rotation angles A and B of two gratings of the scanning grating pair, the chromatic aberration size delta theta can be known from the formula (5), and the chromatic aberration direction P can be known from the formulas (1) and (2), so that the chromatic aberration size of the compensation grating pair is delta theta1β · Δ θ, direction P1The rotation angle a of the compensation grating pair can be inversely resolved by using the formula (1), the formula (2), the formula (3), the formula (5), or the like, as P +180 °1And B1。
As shown in fig. 4-7, assuming that the wavelengths are three separate wavelengths (for convenience of illustration, the actual wavelengths may be continuous), only one point on the scan trajectory is seen. When scanning the grating pair for the resulting chromatic aberration, as shown in fig. 4, the magnitude of the chromatic aberration is the degree of separation of the three wavelengths of light, i.e., the deviation of their pointing angles (Δ θ), and the direction of the chromatic aberration is measured by the angle P on the scanning plane.
The compensating block is then to deflect the light in advance as shown in fig. 5, which determines the angle of rotation of the compensating block;
the light exiting the compensation assembly is moved back to the middle as a whole by means of a set of mirrors, i.e. without deflection angle, only with chromatic aberration, as shown in fig. 6. This ensures that the overall angle of incidence of light entering the scanning grating pair is constant and that the magnitude of the chromatic aberration (the degree to which the three points are separated) is the same as that of the scanning grating pair, but in the opposite direction, i.e. P1＝P+180°。
For any rotation angles A and B of two gratings of the scanning grating pair, the chromatic aberration size delta theta can be known from the formula (5), and the chromatic aberration direction P can be known from the formulas (1) and (2), so that the chromatic aberration size of the compensation grating pair is delta theta1β · Δ θ, direction P1The rotation angle a of the compensation grating pair can be inversely resolved by using the formula (1), the formula (2), the formula (3), the formula (5), or the like, as P +180 °1And B1。
After the last scanning grating pair, the directions of different wavelengths on the scanning track are consistent, and the three points are overlapped (as shown in fig. 7), so that the chromatic aberration is compensated.
Assuming that the beam expansion ratio β is three times, the chromatic aberration of the compensation assembly is three times that of the scanning grating pair (as shown in fig. 8), and the size and direction of the chromatic aberration determine the rotation angle of the compensation assembly. After passing through the mirror, the same beam is moved back to the middle as a whole, and after passing through the beam expanding system, the chromatic aberration of three times is compressed back to one time, which is the same as that shown in fig. 6. The final raster pair is then scanned and the chromatic aberration is compensated for as shown in fig. 7.
Further, the compensation component is a reflection-type compensation component.
Further, as shown in fig. 12, the reflective compensation assembly includes two sets of reflective compensation lens sets having the same structure and rotating in opposite directions, and the reflective compensation lens sets include a reflective compensation grating 100, a first reflecting mirror 200 disposed parallel to the reflective compensation grating 100, a second reflecting mirror 300 disposed opposite to the first reflecting mirror 200, and a third reflecting mirror 400 disposed parallel to the second reflecting mirror 300. The reflective compensation assembly is mounted on a rotatable frame so that the reflective compensation assembly can be rotated as a unit with the relative positions of the internal mirror and the compensation grating remaining unchanged.
Furthermore, the scanning grating pair comprises two flat transmission gratings which rotate oppositely.
An optical beam scanning system includes a scanning grating pair configured to deflect an incident optical path.
Further, a compensation component configured to compensate for chromatic aberration of the broadband light is also included.
Further, the compensation element is a reflective compensation element comprising a reflective compensation grating.
Example 1
Taking the example of a pair of gratings having a center wavelength of 1053nm and a bandwidth of 30nm passing through a reticle with a density of 240 lines/mm, the spatial angle distribution is as shown in fig. 3, and the difference in the outgoing angle of light with different wavelengths is seen compared with the ideal case of 1053nm only (as shown in fig. 2). To compensate for this difference, the system requires the addition of a pair of compensation gratings in the preceding stage.
Firstly, the parameters of the scanning raster are designed according to the requirements of the scanning angle. The diffraction orders of a typical grating are all machined with the first order, i.e., the smaller ρ. As shown in the example, assuming 1053nm light is designed, the maximum value of θ is 30 °, and the equation (3) is substituted
sin(30°)＝2·1·ρ·1053nm|cos((A+B)/2)|
Wherein if the maximum value of | cos ((A + B)/2) | is 1, the minimum value of ρ is
ρ＝sin(30°)/(2·1053nm)
Then ρ is 240. As can be seen from equation (5), the maximum color difference at this time is
About 1108.5 μ rad (taken)The maximum value of | cos ((A + B)/2) | is 1. If the system is provided with a beam expanding system, the beam expanding ratio is 6, and the delta theta generated by the compensating component1maxIf the diffraction order is larger than 6 x 1108.5 μ rad, the diffraction orders of the compensation module are 1 ρ by combining the formula (3) and the formula (5)1When 458 is taken, the requirement of chromatic aberration compensation can be met. The number of lines ρ of the compensation grating is thus determined1。
For any rotation angles A and B of the scanning grating pair, the size delta theta and the direction P of the generated chromatic aberration can be calculated by the formula (1), the formula (2), the formula (3) and the formula (5), and then the chromatic aberration size of the compensation grating pair is delta theta16 Δ θ, direction P1When P +180 °, the rotation angle a of the compensation grating pair can be inversely compensated by the same formula (1), formula (2), formula (3), and formula (5)1And B1。
The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Claims (10)
1. A method of scanning an optical beam, comprising:
introducing a scanning grating pair for scanning and a compensation component for compensating chromatic aberration into an incident light path;
the scanning gratings rotate oppositely to continuously change the direction of emergent light to form scanning;
based on the rotation angle of the scanning grating pair, the two compensation assemblies are integrally rotated in opposite directions, so that the direction of incident light is unchanged after passing through the compensation assemblies, and chromatic aberration is formed after passing through the scanning grating pair to obtain compensated scanning.
2. A method as claimed in claim 1, wherein the number of grating lines of the scanning grating pair, the diffraction order and the rotation angle are designed according to the requirement of beam scanning:
constructing a three-axis coordinate system of the grating, wherein the grating is arranged on an XY plane, an included angle between emergent light and a Z axis is theta after the grating passes through the grating pair, and an included angle between the projection of the emergent light and the X axis on the XY plane is P;
the rotation angles of two gratings in a scanning grating pair are respectively A and B, the diffraction order of the gratings is m, the central wavelength of incident light is lambda, the groove number of the two gratings is rho, and a grating equation is established for the two gratings to obtain the grating equation
sinθ＝2m·ρ·λ|cos((A+B)/2)| (3)
Obtained by the formula (3)
sinθmax＝2m·ρ·λ (4)
Then the maximum value theta of the scanning angle thetamaxThe central wavelength λ of the incident light, the number ρ of grooves of the scanning grating, and the diffraction order m used, are designed based on the formula (4);
the rotation angles a and B of the two scanning gratings are calculated based on equations (1) and (2) from the requirement for the scanning angle P.
3. A method as claimed in claim 2, wherein the number of grazes of the gratings in the compensation assembly, the diffraction order used and the rotation angle are designed according to the chromatic aberration of the scanning grating pair:
the direction of the light with different wavelengths after the light is emitted is different due to the chromatic aberration, the size of the chromatic aberration can be represented by the deviation delta theta of the included angle theta between the emitted light and the Z axis, and the deviation delta theta is calculated by the formula (3)
As can be seen from equations (3) and (5), when a + B of the scanning grating pair is 0, the maximum chromatic aberration occurs
The maximum chromatic aberration of the compensation grating pair is to be compensated for, i.e. the maximum chromatic aberration of the scanning grating pair is compensated for
In the formula, the subscript is 1 to represent the parameter of the compensation grating pair, and beta is the beam expansion ratio of the beam expansion system between the compensation assembly and the scanning system;
based on the diffraction order m of the scanning grating pair, the grating ruling number rho, the central wavelength lambda of light, the bandwidth delta lambda and the beam expansion ratio beta of the beam expansion system, the diffraction order m of the compensation grating pair is designed by the formula (7)1Number of grating rulings ρ1。
4. A method as claimed in claim 3, wherein the direction of the chromatic aberration is characterized by the angle P between the projection of the emerging light on the XY plane and the X axis.
5. A method as claimed in claim 4, wherein the magnitude of the chromatic aberration Δ θ is known from equation (5) for any rotation angles A and B of the two gratings of the scanning grating pair, and the direction P of the chromatic aberration is known from equations (1) and (2), and the magnitude of the chromatic aberration is Δ θ1β · Δ θ, direction P1The rotation angle a of the compensation grating pair can be inversely resolved by using the formula (1), the formula (2), the formula (3), the formula (5), or the like, as P +180 °1And B1。
6. A method as claimed in claim 1, wherein said compensation element is a reflective compensation element.
7. The method of claim 6, wherein the reflective compensation elements comprise two sets of reflective compensation mirrors with the same structure and integrally rotating with each other, the reflective compensation mirrors include a reflective compensation grating, a first reflective mirror disposed parallel to and directly above the reflective compensation grating, a second reflective mirror disposed opposite to the first reflective mirror, and a third reflective mirror disposed parallel to and directly below the second reflective mirror.
8. A method as claimed in claim 1, wherein said scanning grating pair comprises two flat transmission gratings rotating in opposite directions.
9. An optical beam scanning system comprising a scanning grating pair configured to deflect an incident optical path.
10. An optical beam scanning system according to claim 9, further comprising a compensation assembly configured to compensate for chromatic aberration of the broadband light, the compensation assembly being a reflective compensation assembly comprising a reflection compensation grating.
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