CN112157596A - Acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device and using method thereof - Google Patents
Acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device and using method thereof Download PDFInfo
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- CN112157596A CN112157596A CN202010948099.3A CN202010948099A CN112157596A CN 112157596 A CN112157596 A CN 112157596A CN 202010948099 A CN202010948099 A CN 202010948099A CN 112157596 A CN112157596 A CN 112157596A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C11/00—Selection of abrasive materials or additives for abrasive blasts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/08—Devices for generating abrasive blasts non-mechanically, e.g. of metallic abrasives by means of a magnetic field or by detonating cords
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention belongs to the field of liquid jet polishing, and particularly relates to an acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device and a using method thereof. The ultrasonic cavitation auxiliary liquid jet polishing device solves the problems of insufficient cavitation bubble impact energy and low bubble transport efficiency in the ultrasonic cavitation auxiliary liquid jet polishing process, and comprises an ultrasonic generator, a piezoelectric transducer, an amplitude transformer, an acoustic lens, a cavity cover, an outer sleeve, a conical cavity, an electromagnetic coil rack, a gasket, an electromagnetic coil, a magnetic isolation sleeve, a jet nozzle, a magnetic field power supply and a liquid inlet joint. The invention avoids the advanced collapse of cavitation bubbles and improves the polishing efficiency of ultrasonic cavitation auxiliary liquid injection.
Description
Technical Field
The invention belongs to the field of liquid jet polishing, and particularly relates to an acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device and a using method thereof.
Background
With the increasing demand of micro-miniature optical elements (such as 3D curved glass, mobile phone cameras, photoelectric communication devices, etc.) on the surface quality and processing efficiency of materials, the processing precision of the micro-miniature optical elements needs to reach the nanometer level or below, and thus, the surface quality of the optical elements needs to be improved by an ultra-precise polishing process after the traditional turning, grinding and grinding. At present, jet polishing technologies represented by liquid jet, fine abrasive water jet and cavitation jet are gradually applied to ultra-precise polishing of micro-optical elements, but the problems of incomplete theoretical method, unstable material removal, low polishing efficiency and the like still exist, and large-scale industrial application is difficult to perform. Therefore, it is necessary to develop a new and effective ultra-precise polishing method for micro-miniature optical elements.
Ultrasonic cavitation assisted liquid jet polishing (e.g., CN 201910362390. X) is a new method for abrasive jet polishing by focusing ultrasonic cavitation bubbles inside a conical cavity to a narrow nozzle. Compared with the traditional jet polishing technology, the ultrasonic cavitation auxiliary liquid jet polishing technology can greatly improve the polishing efficiency of abrasive particles, but still has some practical problems, and is embodied in the following two aspects: 1) the method directly utilizes the output end of the piezoelectric transducer to generate focused ultrasonic cavitation bubbles, but because the acoustic energy conversion efficiency of the piezoelectric transducer is limited and the amplitude of the output end of the transducer is not large, the self energy of the cavitation bubbles in the conical cavity is insufficient, and further the impact strengthening effect of the cavitation bubbles on abrasive particles is weakened, so that the surface quality of the optical glass is not obviously changed; 2) ultrasonic cavitation bubbles in the conical cavity cannot be effectively output from the nozzle, and most of the ultrasonic cavitation bubbles are already collapsed in the conical cavity without reaching the outlet of the nozzle, so that the polishing efficiency of ultrasonic cavitation auxiliary liquid injection is reduced.
Disclosure of Invention
The invention provides an acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device and a using method thereof, aiming at solving the problems of insufficient cavitation bubble impact energy and low bubble transport efficiency in the ultrasonic cavitation auxiliary liquid jet polishing process.
The invention adopts the following technical scheme: an acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device comprises an ultrasonic generator, a piezoelectric transducer, an amplitude transformer, an acoustic lens, a cavity cover, an outer sleeve, a conical cavity, an electromagnetic coil rack, a gasket, an electromagnetic coil, a magnetic isolation sleeve, a jet nozzle, a magnetic field power supply and a liquid inlet joint.
The ultrasonic generator is connected with the piezoelectric transducer through a lead, and the piezoelectric transducer is connected with the tail end of the amplitude transformer; the head end of the amplitude transformer is connected with the acoustic lens; the amplitude transformer is provided with a flange plate at the position where the displacement node is zero; the flange of the amplitude transformer is fixed with the cavity cover; the cavity cover is fixed with the outer sleeve; the amplitude transformer and the acoustic lens penetrate through the inner through hole of the cavity cover and extend into the conical cavity; the head end of the conical cavity also extends out of the throat section, and the outer surface of the throat section of the conical cavity is also provided with a shaft shoulder; the shaft shoulder of the throat section is connected with the electromagnetic coil rack and the gasket; an electromagnetic coil is fixed on the electromagnetic coil rack; the electromagnetic coil is wound on the outer surface of the laryngeal knot section; the outer surface of the electromagnetic coil is also provided with a magnetic isolation sleeve; the electromagnetic coil and the magnetism isolating sleeve are clamped between the electromagnetic coil rack and the jet flow nozzle; the jet flow nozzle is in threaded connection with the throat section of the conical cavity; the electromagnetic coil is connected with a magnetic field power supply through a lead; the side wall of the conical cavity is also provided with a polishing solution inlet, the polishing solution inlet is connected with a liquid inlet connector, and the polishing solution enters the conical cavity through the liquid inlet connector, generates cavitation bubbles under the synergistic action of an ultrasonic field and a magnetic field and is sprayed out by a jet flow nozzle.
The outer sleeve is fixed with a machine tool clamp through a fastening bolt; the machine tool clamp is matched with a numerical control machine tool to realize the servo motion of the whole device.
The polishing solution is a magnetic suspension, the magnetic particles adopt nano ferroferric oxide, and the abrasive particles are prepared by selecting nano aluminum oxide or silicon oxide; the ultrasonic frequency range of the ultrasonic generator is 50-130kHz, the magnetic field intensity is 0.01-1T, the diameter of the jet nozzle is 0.1-1mm, and the maximum pressure of the jet nozzle is 5 MPa.
A using method of an acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device comprises the following steps.
1) And clamping the acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device on a main shaft of the numerical control machine tool.
2) Adjusting a machine tool clamp, and arranging a microminiature optical element of an area to be processed right in front of the jet flow nozzle.
3) And injecting the polishing solution containing the nano magnetic particles from the liquid inlet joint.
4) And starting an ultrasonic generator, focusing ultrasonic waves to the throat section of the conical cavity through a piezoelectric transducer, an amplitude transformer and an acoustic lens, and generating a large amount of cavitation bubbles coated by the nano magnetic particles in the polishing solution.
5) The electromagnetic coil is electrified, the electromagnetic coil generates an electromagnetic field at the throat section of the conical cavity, and the cavitation bubbles enveloped by the nano-magnetic particles are uniformly sprayed out by the jet nozzle through the Lorentz force of the magnetic field generated by the electromagnetic field.
6) The pressure and the speed provided by the liquid inlet joint are selected, the ultrasonic frequency, the ultrasonic power and the magnetic field intensity of the electromagnetic coil are adjusted, and then the area to be processed of the micro-miniature optical element is processed.
7) And repeating the steps 2) to 6), and processing another area to be processed of the micro optical element or the next optical element.
Compared with the prior art, the invention has the following beneficial effects:
1) the invention amplifies the power of the output end of the piezoelectric transducer through the amplitude transformer and the acoustic lens, so that the energy of the nano magnetic particle enveloped cavitation bubbles generated at the throat section of the conical cavity is sufficient, and the impact strengthening efficiency of the optical microstructure element is obviously enhanced.
2) The nano magnetic particle enveloped cavitation bubbles at the throat section of the conical cavity are effectively output from the jet nozzle under the action of an electromagnetic field, so that the advanced collapse of the cavitation bubbles is avoided, the energy of the cavitation bubbles is successfully transmitted to the surface of a workpiece to be processed, and the polishing efficiency of ultrasonic cavitation auxiliary liquid jet is improved.
3) The ultrasonic waves and the electromagnetic field generated along the axial direction of the conical cavity body generate strong stirring action on the magnetic particles and the abrasive particles, and the particle blockage of the jet nozzle can be effectively prevented.
4) The invention has compact structure, convenient assembly and disassembly on a numerical control machine tool or an industrial robot, and the jet nozzle can be replaced into different forms according to the processing requirements.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of the working principle of the device of the present invention;
in the figure, 1-ultrasonic generator, 2-piezoelectric transducer, 3-amplitude transformer, 4-acoustic lens, 5-cavity cover, 6-outer sleeve, 7-conical cavity, 8-electromagnetic coil rack, 9-gasket, 10-electromagnetic coil, 11-magnetic isolation sleeve, 12-jet nozzle, 13-magnetic field power supply, 14-liquid inlet joint, 15-polishing liquid, 16-machine tool clamp, 17-fastening bolt, 18-ultrasonic wave, 19-cavitation bubble, 20-magnetic field Lorentz force, 21-nozzle jet, 22-micro optical element, 71-throat section, 72-polishing liquid inlet, 151-nano magnetic particle and 152-abrasive particle.
Detailed Description
Referring to fig. 1, the invention provides an acoustomagnetic coupling cavitation auxiliary liquid jet polishing device, which comprises an ultrasonic generator 1, a piezoelectric transducer 2, a horn 3, an acoustic lens 4, a cavity cover 5, an outer sleeve 6, a conical cavity 7, an electromagnetic coil rack 8, a gasket 9, an electromagnetic coil 10, a magnetic isolation sleeve 11, a jet nozzle 12, a magnetic field power supply 13, a liquid inlet joint 14, polishing liquid 15, a machine tool clamp 16 and a fastening bolt 17.
The ultrasonic generator 1 is connected with the piezoelectric transducer 2 through a lead; the piezoelectric transducer 2 is connected with the tail end of the amplitude transformer 3 through a double-end stud; the head end of the amplitude transformer 3 is connected with the acoustic lens 4 through a double-end stud.
The amplitude transformer 3 is also provided with a flange plate 31 at the position where the displacement node is zero; the flange plate 31 of the amplitude transformer is connected with the cavity cover 5 through bolts; the chamber cover 5 is connected with the outer sleeve 6 through bolts.
The amplitude transformer 3 and the acoustic lens 4 penetrate through the inner through hole of the cavity cover 5 and extend into the conical cavity 7; the acoustic lens 4 can focus ultrasonic waves to the head end of the conical cavity 7.
The flange 31 of the horn 3 ensures that the ultrasonic vibrations propagate along the axis without local vibratory effects on the outer sleeve 6 and the cover 5.
The cavity cover 5, the conical cavity 7, the flange plate 31 and the cavity cover 5 ensure absolute sealing.
The cavity cover 5 is connected with the tail end of the conical cavity 7 through a screw; a throat section 71 also extends out of the head end of the conical cavity 7; further, a shaft shoulder is further arranged on the outer surface of the throat section 71 of the conical cavity 7; the shaft shoulder of the throat section 71 is connected with the electromagnetic coil rack 8 and the gasket 9 through screws.
An electromagnetic coil 10 is fixed on the electromagnetic coil rack 8; the electromagnetic coil 10 is wound on the outer surface of the laryngeal knot section 71; the outer surface of the electromagnetic coil 10 is also provided with a magnetic isolation sleeve 11; the electromagnetic coil 10 and the magnetism isolating sleeve 11 are clamped between the electromagnetic coil rack 8 and the jet spray head 12; the jet spray head 12 is connected with the throat section 71 of the conical cavity 7 through threads.
The electromagnetic coil 10 is connected with a magnetic field power supply 13 through a lead.
The side wall of the conical cavity 7 is also provided with a polishing solution inlet 72; the polishing liquid inlet 72 is connected with the liquid inlet joint 14 through threads; the polishing liquid 15 enters the conical cavity 7 through the liquid inlet joint 14, generates cavitation bubbles under the synergistic action of the ultrasonic field and the magnetic field, and is sprayed out by the jet nozzle 12.
The outer sleeve 6 and a machine tool clamp 16 are fixed through a fastening bolt 17; the machine tool clamp 16 can realize the servo motion of the whole device by matching with a numerical control machine tool.
The polishing solution 15 is a magnetic suspension, the magnetic particles adopt nano ferroferric oxide, and the abrasive particles are prepared from nano aluminum oxide or silicon oxide; the ultrasonic frequency range of the acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device is 50-130kHz, the magnetic field intensity is 0.01-1T, the diameter of the jet nozzle is 0.1-1mm, and the maximum pressure of the jet nozzle is 5 MPa.
As shown in fig. 2, when the acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device works, the magnetic polishing liquid 15 enters the conical cavity 7 through the liquid inlet joint 14; the acoustic lens 4 radiates focused ultrasonic waves 18 inside the conical cavity 7 and generates a large number of cavitation bubbles 19; meanwhile, at the throat section 71 of the conical cavity 7, the nano magnetic particles 151 in the magnetic polishing solution 15 wrap the cavitation bubbles 19 into magnetic nano cavitation bubbles; the magnetic nano cavitation bubbles generate a magnetic field Lorentz force 20 in the conical cavity 7 by the electromagnetic coil 10; the magnetic field Lorentz force 20 quickly ejects the magnetic nano cavitation bubbles from the jet nozzle 12 along the axis of the conical cavity 7; the ejected magnetic nano cavitation bubbles form cavitation jet 21 along with the abrasive particles 152 to efficiently impact the micro optical element 22, and meanwhile, the powerful shock waves generated by the collapse of the cavitation bubbles and the high-speed micro jet equivalent can be used for cleaning the micro optical element 22 in a nanoscale scale, so that the ultra-precision polishing of the micro optical element 22 is realized.
The invention also provides an acoustic-magnetic coupling cavitation auxiliary liquid jet polishing method, which comprises the following steps:
1) clamping the acoustic magnetic cavitation auxiliary liquid jet polishing device on a main shaft of a numerical control machine tool;
2) adjusting the machine tool clamp 16, and arranging a microminiature optical element 22 of an area to be processed right in front of the jet flow nozzle 12;
3) injecting a polishing solution 15 containing nano-magnetic particles from the liquid inlet joint 14;
4) starting an ultrasonic generator 1, focusing ultrasonic waves to the throat junction section of a conical cavity 7 through a piezoelectric transducer 2, an amplitude transformer 3 and an acoustic lens 4, and generating a large amount of cavitation bubbles 19 coated by nano magnetic particles in polishing solution 15;
5) electrifying the electromagnetic coil 10, generating an electromagnetic field at the throat section 71 of the conical cavity 7 by the electromagnetic coil 10, and uniformly ejecting the cavitation bubbles 19 enveloped by the nano-magnetic particles from the jet nozzle 12 by a Lorentz force 20 of the magnetic field generated by the electromagnetic field;
6) selecting the pressure and the speed provided by the liquid inlet joint 14, and adjusting the ultrasonic frequency, the ultrasonic power and the magnetic field intensity of the electromagnetic coil so as to process the area to be processed of the micro-optical element 22;
7) repeating the steps 2) to 6), and processing another area to be processed of the micro optical element 22 or the next optical element.
Claims (4)
1. The utility model provides an auxiliary liquid jet polishing device of acoustomagnetic coupling cavitation which characterized in that: the ultrasonic liquid filling device comprises an ultrasonic generator (1), a piezoelectric transducer (2), an amplitude transformer (3), an acoustic lens (4), a cavity cover (5), an outer sleeve (6), a conical cavity (7), an electromagnetic coil rack (8), a gasket (9), an electromagnetic coil (10), a magnetism isolating sleeve (11), a jet nozzle (12), a magnetic field power supply (13) and a liquid inlet joint (14);
the ultrasonic generator (1) is connected with the piezoelectric transducer (2) through a lead, and the piezoelectric transducer (2) is connected with the tail end of the amplitude transformer (3); the head end of the amplitude transformer (3) is connected with the acoustic lens (4); the amplitude transformer (3) is provided with a flange (31) at the position where the displacement node is zero; the flange plate (31) of the amplitude transformer is fixed with the cavity cover (5); the cavity cover (5) is fixed with the outer sleeve (6); the amplitude transformer (3) and the acoustic lens (4) penetrate through the inner through hole of the cavity cover (5) and extend into the conical cavity (7); a throat section (71) also extends out of the head end of the conical cavity (7), and a shaft shoulder is also arranged on the outer surface of the throat section (71) of the conical cavity (7); the shaft shoulder of the throat section (71) is connected with the electromagnetic coil rack (8) and the gasket (9); an electromagnetic coil (10) is fixed on the electromagnetic coil rack (8); the electromagnetic coil (10) is wound on the outer surface of the laryngeal knot section (71); the outer surface of the electromagnetic coil (10) is also provided with a magnetic isolation sleeve (11); the electromagnetic coil (10) and the magnetism isolating sleeve (11) are clamped between the electromagnetic coil rack (8) and the jet nozzle (12); the jet flow nozzle (12) is in threaded connection with the throat section (71) of the conical cavity (7); the electromagnetic coil (10) is connected with a magnetic field power supply (13) through a lead; the side wall of the conical cavity (7) is also provided with a polishing solution inlet (72), the polishing solution inlet (72) is connected with the liquid inlet joint (14), and the polishing solution (15) enters the conical cavity (7) through the liquid inlet joint (14), generates cavitation bubbles under the synergistic action of an ultrasonic field and a magnetic field and is sprayed out by the jet nozzle (12).
2. The acousto-magnetic coupled cavitation auxiliary liquid jet polishing device according to claim 1, characterized in that: the outer sleeve (6) and a machine tool clamp (16) are fixed through a fastening bolt (17); the machine tool clamp (16) is matched with a numerical control machine tool to realize the servo motion of the whole device.
3. The acousto-magnetic coupled cavitation auxiliary liquid jet polishing device according to claim 2, characterized in that: the polishing solution (15) is a magnetic suspension, the magnetic particles adopt nano ferroferric oxide, and the abrasive particles are prepared from nano aluminum oxide or silicon oxide; the ultrasonic frequency range of the ultrasonic generator (1) is 50-130kHz, the magnetic field intensity is 0.01-1T, the diameter of the jet nozzle is 0.1-1mm, and the maximum pressure of the jet nozzle is 5 MPa.
4. A method for using the acoustic-magnetic coupling cavitation-assisted liquid jet polishing device according to claim 3, wherein: comprises the following steps of (a) carrying out,
1) clamping the acoustic-magnetic coupling cavitation auxiliary liquid jet polishing device on a main shaft of a numerical control machine tool;
2) adjusting a machine tool clamp (16), and arranging a microminiature optical element (22) of an area to be processed right in front of the jet flow nozzle (12);
3) injecting a polishing solution (15) containing nano-magnetic particles from the liquid inlet joint (14);
4) starting an ultrasonic generator (1), focusing ultrasonic waves to a throat junction section of a conical cavity (7) through a piezoelectric transducer (2), an amplitude transformer (3) and an acoustic lens (4), and generating a large amount of cavitation bubbles enveloped by nano magnetic particles in polishing solution (15);
5) electrifying an electromagnetic coil (10), generating an electromagnetic field by the electromagnetic coil (10) at a throat section (71) of the conical cavity (7), and uniformly ejecting cavitation bubbles (19) enveloped by the nano-magnetic particles by a jet nozzle (12) through a Lorentz force (20) of the magnetic field generated by the electromagnetic field;
6) selecting pressure and speed provided by the liquid inlet joint (14), adjusting ultrasonic frequency, ultrasonic power and magnetic field intensity of the electromagnetic coil, and further processing a region to be processed of the micro optical element (22);
7) and repeating the steps 2) to 6), and processing another area to be processed of the microminiature optical element (22) or the next optical element.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112892809A (en) * | 2021-02-05 | 2021-06-04 | 何宽 | Ultrasonic machining device for optical glass |
| CN113967547A (en) * | 2021-11-09 | 2022-01-25 | 中铁工程装备集团有限公司 | Injection device |
| CN113997204A (en) * | 2021-11-09 | 2022-02-01 | 中铁工程装备集团有限公司 | Jet device for jet flow back mixing abrasive |
| CN113997211A (en) * | 2021-11-09 | 2022-02-01 | 中铁工程装备集团有限公司 | Direct built-in ultrasonic vibration assisted water jet nozzle |
| CN114033413A (en) * | 2021-11-09 | 2022-02-11 | 中铁工程装备集团有限公司 | Ultrasonic-assisted high-pressure water jet mixed abrasive nozzle and heading machine |
| CN117340692A (en) * | 2023-12-05 | 2024-01-05 | 太原理工大学 | Acoustic-magnetic coupling field auxiliary liquid jet polishing device for metal additive manufacturing part |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113997211A (en) * | 2021-11-09 | 2022-02-01 | 中铁工程装备集团有限公司 | Direct built-in ultrasonic vibration assisted water jet nozzle |
| CN114033413A (en) * | 2021-11-09 | 2022-02-11 | 中铁工程装备集团有限公司 | Ultrasonic-assisted high-pressure water jet mixed abrasive nozzle and heading machine |
| CN117340692A (en) * | 2023-12-05 | 2024-01-05 | 太原理工大学 | Acoustic-magnetic coupling field auxiliary liquid jet polishing device for metal additive manufacturing part |
| CN117340692B (en) * | 2023-12-05 | 2024-02-20 | 太原理工大学 | Acoustic-magnetic coupling field auxiliary liquid jet polishing device for metal additive manufacturing part |
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