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CN112068239A - A single stress element fiber tilted fiber Bragg grating and its preparation method - Google Patents

A single stress element fiber tilted fiber Bragg grating and its preparation method Download PDF

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CN112068239A
CN112068239A CN202010930667.7A CN202010930667A CN112068239A CN 112068239 A CN112068239 A CN 112068239A CN 202010930667 A CN202010930667 A CN 202010930667A CN 112068239 A CN112068239 A CN 112068239A
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fiber
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苑立波
徐致远
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Guilin University of Electronic Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02057Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076Refractive index modulation gratings, e.g. Bragg gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02057Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02057Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
    • G02B6/02138Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask

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Abstract

本发明提供的是一种单应力元光纤倾斜光纤布拉格光栅及其制备方法,所述的单应力元光纤是包层中存在单个应力元的特种光纤。其特征是将准分子激光器、反射镜、扩束镜、柱透镜、掩模板和单应力元光纤依次按序放入刻写光路中,再使用折射率匹配液、显微镜和光纤旋转夹具调整光纤,使应力元和纤芯中的光栅面夹角满足所需的单应力元光纤倾斜光纤布拉格光栅要求。本发明可用于单应力元光纤倾斜光纤布拉格光栅的制备,可广泛用于光纤器件技术领域。

Figure 202010930667

The invention provides a single stress element optical fiber inclined fiber Bragg grating and a preparation method thereof. The single stress element optical fiber is a special fiber with a single stress element in the cladding. It is characterized in that the excimer laser, reflector, beam expander, cylindrical lens, mask plate and single stress element optical fiber are sequentially placed into the writing optical path, and then the optical fiber is adjusted using the refractive index matching liquid, microscope and optical fiber rotating fixture to make the optical fiber. The angle between the stress element and the grating plane in the fiber core meets the required single stress element fiber tilted fiber Bragg grating requirement. The invention can be used for the preparation of single stress element optical fiber inclined fiber Bragg grating, and can be widely used in the technical field of optical fiber devices.

Figure 202010930667

Description

一种单应力元光纤倾斜光纤布拉格光栅及其制备方法A single stress element fiber tilted fiber Bragg grating and its preparation method

(一)技术领域(1) Technical field

本发明涉及的是一种单应力元光纤倾斜光纤布拉格光栅及其制备方法,属于光纤器件技术领域。The invention relates to a single stress element optical fiber inclined fiber Bragg grating and a preparation method thereof, belonging to the technical field of optical fiber devices.

(二)背景技术(2) Background technology

倾斜光纤布拉格光栅(倾斜光纤布拉格光栅)作为光纤布拉格光栅中重要的组成部分,有其独特之处。与普通光纤布拉格光栅不同,倾斜光纤布拉格光栅的光栅平面不再与光纤轴向垂直,而是有了一定倾斜角度。倾斜的引入,加强了从前向传输的纤芯模到后向传输的包层模、辐射模的耦合。基于此特点,倾斜光纤布拉格光栅在光学滤波、光纤传感、增益平坦器和偏振相关器件等领域都有着广泛的应用。As an important component of fiber Bragg gratings, tilted fiber Bragg gratings (tilted fiber Bragg gratings) have their own unique characteristics. Different from ordinary fiber Bragg gratings, the grating plane of tilted fiber Bragg gratings is no longer perpendicular to the fiber axis, but has a certain tilt angle. The introduction of inclination strengthens the coupling from the core mode of the forward transmission to the cladding mode and the radiation mode of the backward transmission. Based on this feature, tilted fiber Bragg gratings have a wide range of applications in optical filtering, fiber sensing, gain flatteners, and polarization-related devices.

常规使用相位掩模版法制备倾斜光纤布拉格光栅,有两种典型的紫外激光曝光方位,其紫外激光、光纤布拉格光栅相位掩模版和光纤的相对位置如图2所示。(1)如图2(a1),在紫外激光2-1垂直照射光纤布拉格光栅相位掩模版2-2上,光纤布拉格光栅相位掩模版2-2和待刻写的光纤2-3相对平行,并如图2(a2),光纤布拉格光栅相位掩模版内栅线2-4和待刻写的光纤2-3不垂直时,纤芯内折射率调制的分布,与光纤布拉格光栅相位掩模版内置的栅线分布相同,且与光纤不垂直,即可制备倾斜光纤布拉格光栅。(2)如图2(b1),在紫外激光2-1不垂直照射光纤布拉格光栅相位掩模版2-2上,光纤布拉格光栅相位掩模版2-2和待刻写的光纤2-3相对平行,并如图2(b2),光纤布拉格光栅相位掩模版内栅线2-4和待刻写的光纤2-3相对垂直时,纤芯内折射率调制的分布,与光纤布拉格光栅相位掩模版内置的栅线分布相同,且与光纤不垂直,即可制备倾斜光纤布拉格光栅或啁啾倾斜光纤布拉格光栅。The tilted fiber Bragg grating is routinely prepared by the phase mask method. There are two typical UV laser exposure orientations. The relative positions of the UV laser, the fiber Bragg grating phase mask and the fiber are shown in Figure 2. (1) As shown in Figure 2(a1), when the ultraviolet laser 2-1 irradiates the fiber Bragg grating phase reticle 2-2 vertically, the fiber Bragg grating phase reticle 2-2 and the fiber 2-3 to be written are relatively parallel, and As shown in Figure 2(a2), when the grating lines 2-4 in the fiber Bragg grating phase reticle are not perpendicular to the fiber to be written 2-3, the distribution of the refractive index modulation in the fiber core is similar to the grating built in the fiber Bragg grating phase reticle. The line distribution is the same, and it is not perpendicular to the fiber, and the tilted fiber Bragg grating can be prepared. (2) As shown in Figure 2 (b1), when the ultraviolet laser 2-1 does not irradiate the fiber Bragg grating phase reticle 2-2 vertically, the fiber Bragg grating phase reticle 2-2 and the fiber 2-3 to be written are relatively parallel, And as shown in Figure 2(b2), when the grating lines 2-4 in the fiber Bragg grating phase reticle are relatively perpendicular to the fiber 2-3 to be written, the distribution of the refractive index modulation in the fiber core is the same as that in the fiber Bragg grating phase reticle. If the grating lines have the same distribution and are not perpendicular to the fiber, a tilted fiber Bragg grating or a chirped tilted fiber Bragg grating can be prepared.

由于倾斜光纤布拉格光栅是将光栅倾斜写入柱体纤芯,因而光栅面在轴向上是个椭圆。所以每一个栅格,都是关于其光栅栅面长轴所在的平面对称的。所以尽管倾斜光纤布拉格光栅具有方向性,且当弯曲方向与光栅栅面成不同角度时包层模谐振峰的响应均不相同,但其只能分辨半圆方向内的弯曲,光纤向关于光栅栅面长轴对称的左右弯曲时,光谱的响应程度没有区别,即只能分辨0°-180°的弯曲,不能实现360°全范围的弯曲分辨。故而这种对称性会影响到倾斜光纤布拉格光栅的使用场景。Since the tilted fiber Bragg grating is written obliquely into the cylindrical core, the grating surface is an ellipse in the axial direction. Therefore, each grid is symmetrical about the plane where the long axis of its grating surface is located. Therefore, although the tilted fiber Bragg grating has directionality, and the response of the cladding mode resonance peak is different when the bending direction is at different angles to the grating surface, it can only resolve the bending in the semicircular direction, and the fiber orientation is about the grating surface. When the long axis is symmetrical to the left and right bending, there is no difference in the response degree of the spectrum, that is, only the bending of 0°-180° can be resolved, and the bending resolution of the full range of 360° cannot be achieved. Therefore, this symmetry will affect the usage scenarios of tilted fiber Bragg gratings.

为了解决这一问题,本发明通过在光纤包层引入单应力元,打破纤芯内折射率的均匀分布,使其按特定方向写入的倾斜光纤布拉格光栅不再对称,进而拓展了倾斜光纤布拉格光栅的使用场景。In order to solve this problem, the present invention breaks the uniform distribution of the refractive index in the fiber core by introducing a single stress element into the fiber cladding, so that the tilted fiber Bragg grating written in a specific direction is no longer symmetrical, and further expands the tilted fiber Bragg Raster usage scenarios.

(三)发明内容(3) Contents of the invention

本发明的目的在于通过给出一种单应力元光纤倾斜光纤布拉格光栅及其制备方法。The purpose of the present invention is to provide a single stress element fiber tilted fiber Bragg grating and a preparation method thereof.

本发明的目的是这样实现的:The object of the present invention is achieved in this way:

单应力元光纤倾斜光纤布拉格光栅的组成部分包括单应力元光纤和其纤芯内写入的倾斜光纤布拉格光栅;其制备方法是使用均匀光纤布拉格光栅掩模板,通过调整掩模版的旋转角度,以及调整应力元和纤芯的相对位置,写入不同光栅倾斜角和应力元位置的倾斜光纤布拉格光栅。The components of the single-stressed element fiber tilted fiber Bragg grating include a single-stressed element fiber and a tilted fiber Bragg grating written in its core; its preparation method is to use a uniform fiber Bragg grating mask, by adjusting the rotation angle of the mask, and Adjust the relative positions of the stress element and the fiber core, and write tilted fiber Bragg gratings with different grating tilt angles and stress element positions.

所述的单应力元光纤是围绕纤芯设置一个应力元的特种光纤。The single stress element fiber is a special fiber with a stress element arranged around the core.

所述的应力元是热膨胀系数不等于石英基体热膨胀系数的材料。The stress element is a material whose thermal expansion coefficient is not equal to the thermal expansion coefficient of the quartz matrix.

制备方法包括以下步骤The preparation method includes the following steps

1)将准分子激光器、反射镜、扩束镜、柱透镜、掩模板和单应力元光纤依次按序放入刻写光路中;1) Put the excimer laser, reflecting mirror, beam expander, cylindrical lens, mask plate and single stress element fiber into the writing optical path in sequence;

2)旋转掩模板,选择光栅倾斜角度;2) Rotate the mask to select the grating tilt angle;

3)使用U型槽、包层折射率匹配液、显微镜和光纤旋转夹具调整光纤中应力元与光栅面的夹角;3) Adjust the angle between the stress element in the fiber and the grating surface by using U-shaped groove, cladding refractive index matching liquid, microscope and fiber rotation fixture;

3)使用紫外激光在纤芯中写入倾斜光纤布拉格光栅;3) Write a tilted fiber Bragg grating in the fiber core using an ultraviolet laser;

4)再涂覆或封装单应力元光纤倾斜光纤布拉格光栅。4) Recoat or encapsulate a single stress element fiber tilted fiber Bragg grating.

所述的制备方法中,光栅的倾斜角度,以及应力元与光栅面的夹角都会影响到光栅光谱。In the preparation method, the inclination angle of the grating and the angle between the stress element and the grating surface will affect the grating spectrum.

本发明的倾斜光纤布拉格光栅是基于单应力元光纤,其独特之处在于应力致纤芯的折射率分布。单模光纤,如图1(a)所示,该种光纤在其横截面上关于截面的x轴和y轴是轴对称的,并且关于截面圆心O是中心对称的,所以单模光纤纤芯受应力的情况都是均匀的,这也使得光纤包层、芯层的折射率分布均匀。这种均匀性使得纤芯内导模的偏振态不会发生变化,且写入的倾斜光纤布拉格光栅在每个栅面上同样具有均匀性。而对保偏光纤来说,如图1(b)所示的熊猫型保偏光纤,该种光纤在其横截面上关于截面的x轴和y轴是轴对称的,但关于截面圆心O不是中心对称的,其应力单元是对称分布在纤芯两侧的包层中,二者会对纤芯施加应力,使得均匀性被打破,但由于应力单元的对称分布,导致纤芯的折射率分布也具有对称的特点。这种对称性使得保偏光纤可以传输两个正交的偏振模。本发明基于的单应力元光纤,光纤横截面如如图1(c)所示,横截面径向折射率分布示意图如图9所示,光纤模型如图10所示,其中10-1是光纤包层,10-2是应力元,10-3是光纤纤芯。该种光纤在其横截面上关于截面的x轴对称,但关于y轴不对称,并且关于截面圆心O也是不对称的。单个应力元只会对纤芯施加一个大方向上的应力,导致纤芯折射率的分布存在关于应力元中心和纤芯中心连线的对称分布。这使得单应力元光纤纤芯会像保偏光纤纤芯一样具有双折射效应,但因不同于保偏光纤纤芯折射率分布有两个轴对称,其一个轴对称折射率分布不均匀致使的双折射效应,会导致纤芯内传输一个偏振态和一个畸变态。这种控制纤芯折射率的倾斜二维分布状态下的非对称设计,只会维持传输模的部分偏振性。再结合倾斜光纤布拉格光栅,在其光栅栅面长轴与应力元中心和光纤几何中心的连线正交时,即可体现单应力光纤倾斜光纤布拉格光栅的非对称性。实现二维平面内的全方向弯曲传感。The tilted fiber Bragg grating of the present invention is based on a single stress element fiber, which is unique in the stress-induced refractive index profile of the fiber core. A single-mode fiber, as shown in Figure 1(a), is axisymmetric about the x-axis and y-axis of the cross-section, and is center-symmetric about the center O of the cross-section, so the core of the single-mode fiber is The stress conditions are uniform, which also makes the refractive index distribution of the fiber cladding and core layer uniform. This uniformity keeps the polarization state of the guided mode in the core unchanged, and the written tilted fiber Bragg grating also has uniformity on each grating plane. For polarization-maintaining fibers, such as the panda-type polarization-maintaining fiber shown in Figure 1(b), the optical fiber is axisymmetric about the x-axis and y-axis of the cross-section, but not about the center O of the cross-section. The center is symmetrical, the stress units are symmetrically distributed in the cladding on both sides of the core, and the two will apply stress to the core, so that the uniformity is broken, but due to the symmetrical distribution of the stress units, the refractive index distribution of the core is caused It is also symmetrical. This symmetry allows polarization-maintaining fibers to transmit two orthogonal polarization modes. The single stress element fiber based on the present invention, the cross section of the fiber is shown in Figure 1(c), the schematic diagram of the radial refractive index distribution of the cross section is shown in Figure 9, and the fiber model is shown in Figure 10, where 10-1 is the fiber The cladding, 10-2 is the stress element, and 10-3 is the fiber core. Such an optical fiber is symmetrical in its cross-section about the x-axis of the cross-section, but asymmetrical about the y-axis, and also asymmetric about the center O of the cross-section. A single stress element only applies stress in one general direction to the core, resulting in a symmetrical distribution of the refractive index of the core about the line connecting the center of the stress element and the center of the core. This makes the single stress element fiber core have the same birefringence effect as the polarization-maintaining fiber core, but different from the polarization-maintaining fiber core, the refractive index distribution has two axes of symmetry, and the birefringence of one axis-symmetric refractive index distribution is not uniform. effect, which results in the transmission of one polarization state and one distortion state in the core. This asymmetric design in the state of slanted two-dimensional distribution of the core refractive index, only maintains part of the polarization of the transmission mode. Combined with the tilted fiber Bragg grating, when the long axis of the grating surface is orthogonal to the line connecting the stress element center and the fiber geometric center, the asymmetry of the single-stress fiber tilted fiber Bragg grating can be reflected. Enables omnidirectional bending sensing in a two-dimensional plane.

本发明制备的单应力元光纤倾斜光纤布拉格光栅,需要图2给出两种制备方法的基础上,进行改进,需要确保应力元、纤芯和紫外激光的相对位置分别如图2中(a3)和(b3)所示,使倾斜光纤布拉格光栅栅面的长轴,与光纤中心和应力元中心的连线正交,才能最大程度体现单应力光纤倾斜光纤布拉格光栅的非对称性。The single stress element fiber tilted fiber Bragg grating prepared by the present invention needs to be improved on the basis of the two preparation methods shown in Fig. 2, and it is necessary to ensure the relative positions of the stress element, the fiber core and the ultraviolet laser as shown in Fig. 2 (a3) As shown in (b3), the long axis of the tilted fiber Bragg grating surface is orthogonal to the line connecting the center of the fiber and the center of the stress element, so that the asymmetry of the tilted fiber Bragg grating of the single stress fiber can be reflected to the greatest extent.

本发明至少具备以下的几项突出的有益效果:The present invention has at least the following several outstanding beneficial effects:

(1)、本发明通过给出基于单应力元光纤的倾斜光纤布拉格光栅,进而给出一种非对称光纤光栅及其制备方法,适用于光纤纤芯位于光纤几何中心的非对称光纤光栅的制备。(1) The present invention provides an asymmetric fiber grating and a preparation method thereof by providing a tilted fiber Bragg grating based on a single stress element fiber, which is suitable for the preparation of an asymmetric fiber grating in which the fiber core is located at the geometric center of the fiber .

(2)、本发明制备出的单应力元倾斜光纤布拉格光栅可实现二维平面内的全方位弯曲传感。(2) The single stress element tilted fiber Bragg grating prepared by the present invention can realize omnidirectional bending sensing in a two-dimensional plane.

(2)、本发明制备出的单应力元倾斜光纤布拉格光栅打破了普通倾斜光纤布拉格光栅的对称性,拓展了使用场景。(2) The single stress element tilted fiber Bragg grating prepared by the present invention breaks the symmetry of the common tilted fiber Bragg grating and expands the application scene.

(四)附图说明(4) Description of drawings

图1为单模光纤、保偏光纤以及单应力元光纤的截面示意图,(a)为单模光纤,(b)为熊猫保偏光纤,(c)为单应力元光纤。Figure 1 is a schematic cross-sectional view of a single-mode fiber, a polarization-maintaining fiber, and a single-stress element fiber, (a) is a single-mode fiber, (b) is a panda polarization-maintaining fiber, and (c) is a single-stress element fiber.

图2为两种倾斜光纤布拉格光栅刻写方法示意图,(a1)和(b1)分别为为两种方法里的紫外激光、掩模板和光纤的相对位置示意图,(a2)和(b2)分布为两种方法里的掩模板和光纤的相对位置示意图,(a3)和(b3)分别为将光纤替换为单应力元光纤后,其中应力元、纤芯和紫外激光照射方向的相对位置示意图,2-1为紫外激光,2-2为光纤布拉格光栅相位掩模版,2-3为待刻写的光纤,2-4为光纤布拉格光栅相位掩模版内的栅线,2-5为将光纤替换为单应力元光纤后,其中的应力元,2-6为将光纤替换为单应力元光纤后,其中的纤芯。Figure 2 is a schematic diagram of two tilted fiber Bragg grating writing methods, (a1) and (b1) are schematic diagrams of the relative positions of the ultraviolet laser, mask and optical fiber in the two methods, respectively, (a2) and (b2) are distributed as two The schematic diagram of the relative position of the mask and the optical fiber in this method, (a3) and (b3) are the schematic diagrams of the relative positions of the stress element, the fiber core and the irradiation direction of the ultraviolet laser after replacing the optical fiber with a single stress element fiber, respectively, 2- 1 is the ultraviolet laser, 2-2 is the fiber Bragg grating phase mask, 2-3 is the fiber to be written, 2-4 is the grating line in the fiber Bragg grating phase mask, and 2-5 is the replacement of the fiber with a single stress After replacing the fiber with the stress element, 2-6 are the core of the fiber after replacing the fiber with a single stress element fiber.

图3为刻写单应力元光纤光纤布拉格光栅以及非对称光纤布拉格光栅的系统示意图,3-1为准分子激光器,3-2为反射镜部,3-3为扩束镜部,3-4为柱透镜部,3-5为小型龙门架,3-6为集成光源的CCD组件,3-7为光纤布拉格光栅相位掩模版部,3-8为U型槽,3-9为光纤旋转夹具部,3-10为单应力元光纤,3-11为宽带光源,3-12为光谱仪。Figure 3 is a schematic diagram of a system for writing single stress element fiber fiber Bragg grating and asymmetric fiber Bragg grating, 3-1 is an excimer laser, 3-2 is a mirror part, 3-3 is a beam expander part, and 3-4 is a Cylindrical lens part, 3-5 is a small gantry, 3-6 is a CCD component with integrated light source, 3-7 is a fiber Bragg grating phase mask part, 3-8 is a U-shaped groove, and 3-9 is a fiber rotating fixture part , 3-10 is a single stress element fiber, 3-11 is a broadband light source, and 3-12 is a spectrometer.

图4为确定单应力元光纤内纤芯和应力元相对位置的操作,所需部件的示意图,4-1为小型龙门架,4-2为集成光源的CCD组件,4-3为光纤旋转夹具,4-4为单应力元光纤,4-5为U型槽,4-6/4-7为Z轴升降台,4-8为转接板,4-9为XY位移台。Figure 4 is a schematic diagram of the required components for the operation of determining the relative positions of the fiber core and the stress element in a single stress element fiber, 4-1 is a small gantry, 4-2 is a CCD assembly with an integrated light source, and 4-3 is an optical fiber rotating fixture , 4-4 is a single stress element fiber, 4-5 is a U-shaped groove, 4-6/4-7 is a Z-axis lift table, 4-8 is an adapter plate, and 4-9 is an XY stage.

图5为确定单应力元光纤内纤芯和应力元相对位置操作时的示意图,5-1为U型槽,5-2为折射率和单应力元光纤包层折射率一致的匹配液,5-3为单应力元光纤包层,5-4为单应力元光纤纤芯,5-5为单应力元光纤内的应力元,5-6为紫外激光,h为单应力元光纤纤芯和应力元边缘的距离。Figure 5 is a schematic diagram of the operation of determining the relative positions of the core and the stress element in the single stress element fiber, 5-1 is the U-shaped groove, 5-2 is the matching liquid whose refractive index is the same as the refractive index of the single stress element fiber cladding, 5 -3 is the single stress element fiber cladding, 5-4 is the single stress element fiber core, 5-5 is the stress element in the single stress element fiber, 5-6 is the ultraviolet laser, h is the single stress element fiber core and The distance from the edge of the stress element.

图6为调整好单应力元光纤内纤芯和应力元相对位置的光纤轴向示意图,6-1为U型槽,6-2为折射率和单应力元光纤包层折射率一致的匹配液,6-3为单应力元光纤包层,6-4为单应力元光纤纤芯,6-5为单应力元光纤内的应力元,6-6为紫外激光,h为单应力元光纤纤芯和应力元边缘的最大距离。Figure 6 is a schematic diagram of the axial direction of the fiber after adjusting the relative positions of the inner core and the stress element of the single stress element fiber, 6-1 is the U-shaped groove, and 6-2 is the matching liquid whose refractive index is the same as the refractive index of the single stress element fiber cladding , 6-3 is the single stress element fiber cladding, 6-4 is the single stress element fiber core, 6-5 is the stress element in the single stress element fiber, 6-6 is the ultraviolet laser, h is the single stress element fiber fiber The maximum distance between the core and the edge of the stress element.

图7为光纤布拉格光栅相位掩模版部的结构示意图,7-1为旋转盘底座,7-2为旋转盘,7-3为光纤布拉格光栅相位掩模版,7-4为光纤布拉格光栅相位掩模版内的栅区,7-5为单应力元光纤,7-6为XYZR四轴位移台。Fig. 7 is a schematic structural diagram of a fiber Bragg grating phase reticle, 7-1 is a rotating disk base, 7-2 is a rotating disk, 7-3 is a fiber Bragg grating phase reticle, and 7-4 is a fiber Bragg grating phase reticle In the grid area, 7-5 is a single stress element fiber, and 7-6 is an XYZR four-axis displacement stage.

图8为单应力元光纤倾斜光纤布拉格光栅的结构示意图,(a)为单应力元光纤端面图,(b)为单应力元光纤侧面图,8-1为单应力元光纤包层,8-2为应力元,8-3为单应力元光纤纤芯,8-4为写入的倾斜光纤布拉格光栅。Figure 8 is a schematic structural diagram of a single stress element fiber tilted fiber Bragg grating, (a) is the end view of the single stress element fiber, (b) is the side view of the single stress element fiber, 8-1 is the single stress element fiber cladding, 8- 2 is the stress element, 8-3 is the fiber core of a single stress element, and 8-4 is the written tilted fiber Bragg grating.

图9为单应力元光纤端的径向截面一维折射率分布示意图。FIG. 9 is a schematic diagram of a one-dimensional refractive index distribution in a radial cross-section of an optical fiber end of a single stress element.

图10为单应力元光纤的模型,10-1为单应力元光纤包层,10-2为应力元,10-3为单应力元光纤纤芯。Figure 10 is a model of a single stress element fiber, 10-1 is a single stress element fiber cladding, 10-2 is a stress element, and 10-3 is a single stress element fiber core.

(五)具体实施方式(5) Specific implementation methods

下面结合具体的实施例来进一步阐述本发明。The present invention will be further described below in conjunction with specific embodiments.

实施例1:一种单应力元光纤倾斜光纤布拉格光栅及其制备方法优选的,本实施例中,应力元的直径可以为32微米,其几何中心距离光纤几何中心可以为26微米。Embodiment 1: A single stress element fiber tilted fiber Bragg grating and its preparation method Preferably, in this embodiment, the diameter of the stress element can be 32 microns, and the distance between its geometric center and the optical fiber geometric center can be 26 microns.

本发明使用的倾斜光纤布拉格光栅刻写系统如图3所示,制备步骤如下:The inclined fiber Bragg grating writing system used in the present invention is shown in Figure 3, and the preparation steps are as follows:

本发明使用的倾斜光纤布拉格光栅刻写系统如图3所示,两种方法区别在于紫外激光的曝光方位,通用的主要制备步骤如下:The inclined fiber Bragg grating writing system used in the present invention is shown in Figure 3. The difference between the two methods is the exposure orientation of the ultraviolet laser. The general main preparation steps are as follows:

步骤1:设置准分子激光器3-1的刻写参数,并调整刻写系统内反射镜部3-2、扩束镜部3-3和柱透镜部3-4的相对位置准直紫外激光束,使其能准确聚焦到待写入的单应力元光纤3-10的纤芯位置;Step 1: Set the writing parameters of the excimer laser 3-1, and adjust the relative positions of the reflecting mirror part 3-2, the beam expander part 3-3 and the cylindrical lens part 3-4 in the writing system to collimate the ultraviolet laser beam so that the It can accurately focus on the core position of the single stress element fiber 3-10 to be written;

步骤2:根据所制备的光纤布拉格光栅类型,选取参数合适的光纤布拉格光栅相位掩模版,置于掩模版夹具上组成光纤布拉格光栅相位掩模版部3-7,按所制备光纤布拉格光栅的不同,选择图2中的一种曝光方位,并按照其中所示的紫外激光、光纤布拉格光栅相位掩模版、单应力元光纤三者相对的位置调整光纤布拉格光栅相位掩模版;Step 2: According to the prepared fiber Bragg grating type, select a fiber Bragg grating phase reticle with appropriate parameters, and place it on the reticle holder to form the fiber Bragg grating phase reticle parts 3-7. According to the difference of the prepared fiber Bragg grating, Select an exposure orientation in Figure 2, and adjust the fiber Bragg grating phase mask according to the relative positions of the ultraviolet laser, the fiber Bragg grating phase mask, and the single stress element fiber shown therein;

步骤3:完全去除单应力元光纤上待刻写光纤布拉格光栅区域和左右两侧嵌入U型槽区域的涂覆层,并放入光纤旋转夹具3-9内固定,在左右夹具之间,分别升起两个可包嵌单应力元光纤的U型槽3-8,槽内滴入与单应力元光纤包层折射率一致匹配液;Step 3: Completely remove the fiber Bragg grating area to be written on the single stress element fiber and the coating layer embedded in the U-groove area on the left and right sides, and put it into the fiber rotating fixture 3-9 to fix it. Two U-shaped grooves 3-8 that can be embedded in the single-stressed element fiber are formed, and the matching liquid that is consistent with the refractive index of the single-stressed element fiber cladding is dropped into the groove;

步骤4:先使用小型龙门架3-5将集成光源的CCD组件3-6移至一侧U型槽3-8正上方,开光观测光纤内应力元和纤芯的相对位置,正反旋转同侧的旋转光纤夹具3-9,至相对于紫外激光入射方向,应力元处于纤芯后侧,且和纤芯之间出现最大的距离时停止,记录此时旋转夹具的刻度,另一侧重复进行相同操作;Step 4: First use the small gantry 3-5 to move the CCD assembly 3-6 of the integrated light source to just above the U-shaped groove 3-8 on one side, turn on the light to observe the relative position of the stress element in the fiber and the fiber core, and rotate the same forward and reverse. Rotate the optical fiber clamp 3-9 on the side, and stop when the stress element is at the back side of the fiber core with respect to the incident direction of the ultraviolet laser, and the maximum distance from the fiber core appears, record the scale of the rotating clamp at this time, and repeat on the other side do the same;

步骤5:此时应力元和纤芯相对位置已经确定,可通过同时按刻度旋转光纤旋转夹具3-9调整二者的相对位置,以满足制备不同光纤布拉格光栅的需要;Step 5: At this time, the relative position of the stress element and the fiber core has been determined, and the relative positions of the two can be adjusted by rotating the fiber rotating fixture 3-9 according to the scale at the same time to meet the needs of preparing different fiber Bragg gratings;

步骤6:将单应力元光纤3-10一端接入宽带光源3-11,另一端接入光谱仪3-12,开启准分子激光器3-1,经准直扩束压缩成细窄平行光后,通过光纤布拉格光栅相位掩模版部3-7进行曝光,并通过光谱仪3-12实时监测写入过程,达到所需的光谱时停止曝光;Step 6: Connect one end of the single stress element fiber 3-10 to the broadband light source 3-11, and the other end to the spectrometer 3-12, turn on the excimer laser 3-1, and after collimating and expanding the beam and compressing it into a narrow parallel light, Exposure is performed through the fiber Bragg grating phase mask part 3-7, and the writing process is monitored in real time through the spectrometer 3-12, and the exposure is stopped when the required spectrum is reached;

步骤7:断开单应力元光纤3-10和宽带光源3-11与光谱仪3-12的连接,打开光纤旋转夹具3-9,取下单应力元光纤3-10,并进行封装。Step 7: Disconnect the single stress element fiber 3-10 and the broadband light source 3-11 from the spectrometer 3-12, open the fiber rotation fixture 3-9, remove the single stress element fiber 3-10, and package it.

两种可制备单应力元光纤的倾斜光纤布拉格光栅的方法都需要确定单应力元光纤内纤芯和应力元的确切位置,操作在步骤3和步骤4中执行。以一侧为例,详细操作如下:如图4所示,在将单应力元光纤4-4进行前期处理,并放置于光纤旋转夹具4-3后,利于Z轴位移台4-7将U型槽4-5升起至包嵌单应力元光纤4-4,再于U型槽4-5中滴入与单应力元光纤包层折射率一致匹配液。使用小型龙门架4-1将集成光源的CCD组件4-2移至U型槽4-5正上方,开光观测光纤内应力元和纤芯的相对位置。Z轴升降台4-6可以在步骤1里调整光纤的高度;转接板4-8可以保证光纤旋转夹具4-3和U型槽4-5同时跟随XY位移台4-9运动。Both methods for preparing tilted fiber Bragg gratings of single-stressed element fibers require the determination of the exact positions of the core and stress elements within the single-stressed element fiber, which are performed in steps 3 and 4. Taking one side as an example, the detailed operations are as follows: As shown in Figure 4, after pre-processing the single stress element fiber 4-4 and placing it on the fiber rotation fixture 4-3, it is convenient for the Z-axis translation stage 4-7 to convert the U The groove 4-5 is raised to encapsulate the single stress element optical fiber 4-4, and then a liquid matching the refractive index of the cladding of the single stress element fiber is dropped into the U-shaped groove 4-5. Use a small gantry 4-1 to move the CCD assembly 4-2 of the integrated light source directly above the U-shaped groove 4-5, and turn on the light to observe the relative position of the stress element in the fiber and the fiber core. The Z-axis lift table 4-6 can adjust the height of the optical fiber in step 1; the adapter plate 4-8 can ensure that the optical fiber rotating fixture 4-3 and the U-shaped groove 4-5 move with the XY stage 4-9 at the same time.

确定单应力元光纤中纤芯和应力元位置方法如图5所示,起初,如图5(a)所示单应力元光纤的纤芯5-4和应力元5-5会出现随机的初始位置,二者的边缘距离h可用CCD上观测到的像素点来标定。旋转图4中的光纤旋转夹具4-3,h也会随之变化,当h达到最大值hmax,且单应力元光纤纤芯5-4、应力元5-5和紫外激光5-6三者的相对位置如图5(b)所示时,单应力元光纤纤芯5-4和应力元5-5的相对位置即可确定。此时从侧面看的结果如图6所示,单应力元光纤纤芯6-4和应力元6-5的几何中心联线会平行于刻写系统所在光学平台。对另一侧使用相同操作,标定好单应力元光纤纤芯和应力元位置后,即可旋转光纤旋转夹具,以满足制备倾斜光纤布拉格光栅时的相对位置要求。The method of determining the position of the core and the stress element in the single stress element fiber is shown in Figure 5. Initially, as shown in Figure 5(a), the core 5-4 and the stress element 5-5 of the single stress element fiber will appear random initial position, the edge distance h between the two can be calibrated by the pixel points observed on the CCD. Rotate the optical fiber rotating fixture 4-3 in Figure 4, and h will also change accordingly. When h reaches the maximum value h max , and the single stress element fiber core 5-4, stress element 5-5 and ultraviolet laser 5-6 are three When the relative position of the individual is shown in Figure 5(b), the relative position of the single stress element fiber core 5-4 and the stress element 5-5 can be determined. At this time, the result viewed from the side is shown in Fig. 6. The line connecting the geometric centers of the optical fiber core 6-4 of the single stress element and the stress element 6-5 will be parallel to the optical platform where the writing system is located. Using the same operation for the other side, after calibrating the position of the fiber core and stress element of the single stress element, the fiber rotating fixture can be rotated to meet the relative position requirements when preparing the inclined fiber Bragg grating.

两种可制备单应力元光纤的倾斜光纤布拉格光栅的不同之处,主要区别在于步骤2和步骤5的曝光方位选择,即两种不同的紫外激光、单应力元光纤纤芯和应力元三者的相对位置。The difference between the two kinds of tilted fiber Bragg gratings that can prepare single stress element fiber, the main difference lies in the choice of exposure orientation in step 2 and step 5, that is, two different UV lasers, single stress element fiber core and stress element. relative position.

方位一:紫外激光正入射光纤布拉格光栅相位掩模版。如图2(a1)/(a2)/(a3)所示,紫外激光2-1正入射光纤布拉格光栅相位掩模版2-2,单应力元光纤2-3贴上光纤布拉格光栅相位掩模版2-2,光纤布拉格光栅相位掩模版内栅区2-4与单应力元光纤2-3存在夹角,单应力元光纤内单应力元2-5位于纤芯2-6的正后方。调整光纤布拉格光栅相位掩模版栅线和单应力元光纤的夹角操作如图7所示,光纤布拉格光栅相位掩模版7-3固定在旋转盘7-2上,可通过旋转盘7-2边缘的刻度,决定光纤布拉格光栅相位掩模版的旋转角度。该旋转角度也同样会是光纤布拉格光栅相位掩模版栅线7-4和单应力元光纤7-5的夹角,即光栅栅面和纤芯的夹角。且如图2(a3)所示,应力元的位置应在纤芯的正后方。Orientation 1: The UV laser is normally incident on the fiber Bragg grating phase mask. As shown in Fig. 2(a1)/(a2)/(a3), the UV laser 2-1 is normally incident on the fiber Bragg grating phase mask 2-2, and the single stress element fiber 2-3 is attached with the fiber Bragg grating phase mask 2 -2, there is an included angle between the grating region 2-4 in the fiber Bragg grating phase mask and the single stress element fiber 2-3, and the single stress element 2-5 in the single stress element fiber is located directly behind the fiber core 2-6. The operation of adjusting the angle between the grating lines of the fiber Bragg grating phase reticle and the single stress element fiber is shown in Figure 7. The fiber Bragg grating phase reticle 7-3 is fixed on the rotating disk 7-2, and can pass the edge of the rotating disk 7-2. The scale of , determines the rotation angle of the fiber Bragg grating phase reticle. The rotation angle will also be the included angle between the fiber Bragg grating phase reticle grating line 7-4 and the single stress element fiber 7-5, that is, the included angle between the grating grating surface and the fiber core. And as shown in Figure 2(a3), the location of the stress element should be right behind the fiber core.

方位二:紫外激光斜入射光纤布拉格光栅相位掩模版。如如图2(b1)/(b2)/(b3)所示,紫外激光2-1斜入射光纤布拉格光栅相位掩模版2-2,单应力元光纤2-3贴上光纤布拉格光栅相位掩模版2-2,光纤布拉格光栅相位掩模版内栅区2-4与单应力元光纤2-3垂直,单应力元光纤内单应力元2-5位于纤芯2-6的正上方或正下方。调整光纤布拉格光栅相位掩模版和紫外激光的夹角操作如图7所示,旋转XYZR四轴位移台7-6,旋转角度为紫外激光入射光纤布拉格光栅相位掩模版的角度,也为此倾斜光纤布拉格光栅栅区和纤芯的夹角。此时还需要调整光纤的位置,如图4所示,调整左右两侧的XY二轴位移台4-9,即可使单应力元光纤贴上光纤布拉格光栅相位掩模版。且如图2(b3)所示,应力元的位置应在纤芯的正上或正下方。Azimuth 2: Ultraviolet laser oblique incident fiber Bragg grating phase mask. As shown in Fig. 2(b1)/(b2)/(b3), the ultraviolet laser 2-1 is obliquely incident on the fiber Bragg grating phase mask 2-2, and the single stress element fiber 2-3 is attached with the fiber Bragg grating phase mask 2-2, the inner grating region 2-4 of the fiber Bragg grating phase mask is perpendicular to the single stress element fiber 2-3, and the single stress element 2-5 in the single stress element fiber is located directly above or directly below the fiber core 2-6. The operation of adjusting the angle between the fiber Bragg grating phase mask and the UV laser is shown in Figure 7. Rotate the XYZR four-axis stage 7-6. The rotation angle is the angle at which the UV laser enters the fiber Bragg grating phase mask, and the fiber is also tilted for this purpose. The angle between the Bragg grating grating region and the fiber core. At this time, it is also necessary to adjust the position of the fiber. As shown in Figure 4, adjust the XY two-axis displacement stages 4-9 on the left and right sides, so that the single stress element fiber can be attached to the fiber Bragg grating phase mask. And as shown in Figure 2(b3), the position of the stress element should be directly above or below the fiber core.

本发明制备出的基于单应力元光纤的倾斜光纤布拉格光栅如图8所示,(a)为单应力元光纤端面图,(b)为单应力元光纤侧面图。The tilted fiber Bragg grating based on the single stress element fiber prepared by the present invention is shown in FIG. 8 , (a) is the end view of the single stress element fiber, and (b) is the side view of the single stress element fiber.

在说明书和附图中,已经公开了本发明的典型实施方式。本发明不限于这些实例性实施方式。具体术语仅作为通用性和说明性意义,并非为了限制本发明受保护的范围。In the specification and drawings, there have been disclosed typical embodiments of the invention. The present invention is not limited to these exemplary embodiments. The specific terms are used in a generic and descriptive sense only and are not intended to limit the scope of protection of the present invention.

Claims (5)

1. A single stress element optical fiber tilt fiber Bragg grating and a preparation method thereof are characterized in that: the single stress element optical fiber tilt fiber Bragg grating comprises a single stress element optical fiber and a tilt fiber Bragg grating written in a fiber core of the single stress element optical fiber; the preparation method comprises the steps of using a uniform fiber Bragg grating mask plate, and writing inclined fiber Bragg gratings with different grating inclination angles and stress element positions by adjusting the rotation angle of the mask plate and the relative positions of the stress element and the fiber core.
2. The single stress element fiber tilt fiber bragg grating and the preparation method thereof according to claim 1, wherein: the single stress element optical fiber is a special optical fiber with a stress element arranged around the fiber core.
3. The single stress element fiber tilt fiber bragg grating and the method for manufacturing the same according to claim 1 and claim 2, wherein: the stress element is a material with a thermal expansion coefficient not equal to that of the quartz substrate.
4. A single stress element optical fiber tilt fiber Bragg grating and a preparation method thereof are characterized by comprising the following steps:
1) sequentially placing an excimer laser, a reflector, a beam expander, a cylindrical lens, a mask plate and a single stress element optical fiber into a writing light path in sequence;
2) rotating the mask plate and selecting the inclination angle of the grating;
3) adjusting the included angle between the stress element in the optical fiber and the grating surface by using a U-shaped groove, cladding refractive index matching liquid, a microscope and an optical fiber rotating clamp;
3) writing inclined fiber Bragg grating in the fiber core by using ultraviolet laser;
4) and then coating or packaging the single stress element optical fiber tilt fiber Bragg grating.
5. The single stress element fiber tilt fiber bragg grating and the preparation method thereof according to claim 4, wherein: in the preparation method, the grating spectrum can be influenced by the inclination angle of the grating and the included angle between the stress element and the grating surface.
CN202010930667.7A 2020-09-07 2020-09-07 A single stress element fiber tilted fiber Bragg grating and its preparation method Pending CN112068239A (en)

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CN113670372A (en) * 2021-07-21 2021-11-19 武汉理工大学 Double-parameter quasi-distributed sensing method and device of large-capacity grating array

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CN112958926A (en) * 2021-02-03 2021-06-15 西北工业大学 Optical fiber clamping system, control method and application
CN113670372A (en) * 2021-07-21 2021-11-19 武汉理工大学 Double-parameter quasi-distributed sensing method and device of large-capacity grating array
CN113670372B (en) * 2021-07-21 2023-07-25 武汉理工大学 Double-parameter quasi-distributed sensing method and device for high-capacity grating array

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Application publication date: 20201211