CN111982346B - A high-sensitivity fiber-optic temperature sensor - Google Patents
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Abstract
本发明公开了一种高灵敏度的光纤温度传感器,包括导入光纤,毛细准直管以及光学薄片。光学薄片和毛细准直管直接连接,导入光纤与插入毛细准直管中并连接,其中光学薄片的两个端面形成一个F‑P腔,导入光纤和光学薄片形成F‑P腔。导入光纤用于导入光源信号和传输反射光。当温度发生变化时,毛细准直管和光学薄片发生热膨胀,从而使得两个F‑P腔变化导致光谱发生变化,从而获得超高的温度灵敏度。此外,光学薄片和毛细准直管的成本低,制作简单,无需复杂的造作过程和昂贵设备,可以降低传感器的制备成本。
The invention discloses a high-sensitivity optical fiber temperature sensor, which comprises an introduction optical fiber, a capillary collimating tube and an optical sheet. The optical sheet and the capillary collimation tube are directly connected, and the optical fiber is inserted into the capillary collimation tube and connected, wherein the two end faces of the optical sheet form an F-P cavity, and the optical fiber and the optical sheet are introduced to form an F-P cavity. The import fiber is used to import the light source signal and transmit the reflected light. When the temperature is changed, the capillary collimator and the optical sheet thermally expand, so that the change of the two F‑P cavities leads to a change in the spectrum, resulting in ultra-high temperature sensitivity. In addition, the cost of the optical sheet and the capillary collimation tube is low, the fabrication is simple, and complex fabrication processes and expensive equipment are not required, which can reduce the fabrication cost of the sensor.
Description
技术领域technical field
本发明属于光纤传感器制造技术领域,尤其涉及一种高灵敏度的光纤温度传感器。The invention belongs to the technical field of optical fiber sensor manufacturing, and in particular relates to a high-sensitivity optical fiber temperature sensor.
背景技术Background technique
光纤传感器的高灵敏度、抗电磁干扰、可靠性好、原材料丰富等优点引起了人们的广泛关注。常见的光纤传感器有光纤光栅,光纤Sagnac干涉仪,光纤马赫-曾德尔干涉仪(MZI),光纤Fabry–Perot谐振腔。其中,由光纤Fabry-Perot谐振腔产生的游标效应可以用于放大传感器的灵敏度,所以受到了广泛的关注。比如,2009年,Dai和Jin等分别提出基于串联光纤结构的游标效应光学传感器,利用波长解调法实现折射率的超高灵敏度测量。2014年,Zhang等提出利用空心光子晶体光纤(HC-PCF)的大模场特性将两段HC-PCF嵌入单模光纤(SMF)中构成级联FPI结构的游标效应光纤传感器,应用于应力和磁场的测量,较之单一FPI,其灵敏度提高了约29倍,2015年,Shao等提出串联Sagnac干涉仪的游标效应光纤温度传感器,较之单一Sagnac干涉仪,其灵敏度提高了约9倍,但整个传感器尺寸较大(单个Sagnac干涉环长度约2m),难以实现高空间分辨的温度测量。但是,上述的传感器所需要的材料和设备比较昂贵,生产工艺比较复杂,不利于传感器的批量化生产。The advantages of fiber optic sensors, such as high sensitivity, anti-electromagnetic interference, good reliability, and abundant raw materials, have attracted widespread attention. Common fiber sensors include fiber gratings, fiber Sagnac interferometers, fiber Mach-Zehnder interferometers (MZI), and fiber Fabry–Perot resonators. Among them, the vernier effect produced by the fiber Fabry-Perot resonator can be used to amplify the sensitivity of the sensor, so it has received extensive attention. For example, in 2009, Dai and Jin et al. respectively proposed a vernier effect optical sensor based on a tandem optical fiber structure, and used the wavelength demodulation method to achieve ultra-high sensitivity measurement of refractive index. In 2014, Zhang et al. proposed to use the large mode field characteristics of hollow-core photonic crystal fiber (HC-PCF) to embed two sections of HC-PCF into single-mode fiber (SMF) to form a vernier effect fiber sensor with a cascaded FPI structure. Compared with a single FPI, the sensitivity of magnetic field measurement is increased by about 29 times. In 2015, Shao et al. proposed a vernier effect fiber optic temperature sensor with a series Sagnac interferometer. Compared with a single Sagnac interferometer, its sensitivity was increased by about 9 times, but The size of the entire sensor is large (the length of a single Sagnac interference ring is about 2 m), which makes it difficult to achieve temperature measurement with high spatial resolution. However, the materials and equipment required for the above-mentioned sensors are relatively expensive, and the production process is relatively complicated, which is not conducive to mass production of the sensors.
发明内容SUMMARY OF THE INVENTION
本发明所要解决的技术问题是,提供一种高灵敏度的光纤温度传感器,该光纤温度传感器对温度的灵敏度有显著的提高,可以用于精密测量领域的使用,并具有成本低廉、结构简单、制备方法简单易行的特点。The technical problem to be solved by the present invention is to provide a high-sensitivity optical fiber temperature sensor, the optical fiber temperature sensor has significantly improved sensitivity to temperature, can be used in the field of precision measurement, and has the advantages of low cost, simple structure, and easy preparation. The method is simple and easy to implement.
本发明解决其技术问题所采用的技术方案是:提供一种高灵敏度的光纤温度传感器,包括光纤、毛细准直管以及光学薄片,在毛细准直管的一端固定一个光学薄片,并将光纤从毛细准直管的另一端插入,其中光学薄片的两个端面形成一个F-P腔,光纤和光学薄片形成F-P腔。光束传入传感器时,会在光纤端面和光学薄片的两个端面,产生三个反射光束。这三个反射光会形成两个F-P干涉,即光纤和光学薄片与毛细准直管接触面的两个反射光会形成一个F-P干涉,光学薄片自身的两个反射光会形成一个F-P干涉,光学薄片的一个端面被两个F-P干涉同时使用。当两个F-P干涉的自由光谱范围大小接近的时候产生Vernier效应。光纤用于导入光源信号和传输反射光。当温度发生变化时,毛细准直管和光学薄片发生热膨胀,从而使得两个F-P腔变化导致光谱发生变化,从而获得超高的温度灵敏度。The technical solution adopted by the present invention to solve the technical problem is as follows: a high-sensitivity optical fiber temperature sensor is provided, which includes an optical fiber, a capillary collimating tube and an optical sheet, an optical sheet is fixed at one end of the capillary collimating tube, and the optical fiber is removed from the The other end of the capillary collimator is inserted, wherein the two end faces of the optical sheet form an F-P cavity, and the optical fiber and the optical sheet form an F-P cavity. When the light beam enters the sensor, three reflected light beams are generated on the fiber end face and the two end faces of the optical sheet. These three reflected lights will form two F-P interferences, that is, the two reflected lights of the interface between the optical fiber and the optical sheet and the capillary collimator will form an F-P interference, and the two reflected lights of the optical sheet itself will form an F-P interference. One end face of the sheet is used simultaneously by two F-P interferences. The Vernier effect occurs when the free spectral ranges of the two F-P interferences are close in size. Optical fibers are used to introduce light source signals and transmit reflected light. When the temperature changes, the capillary collimator and the optical sheet thermally expand, so that the change of the two F-P cavities leads to the change of the spectrum, thus obtaining the ultra-high temperature sensitivity.
按上述技术方案,光纤由毛细准直管准直,并将光纤贴合在毛细准直管上。According to the above technical solution, the optical fiber is collimated by the capillary collimating tube, and the optical fiber is attached to the capillary collimating tube.
毛细准直管的内径大小与光纤的外径相差小于5%,起到准直的效果。毛细准直管至少有一端是平整的,这一端用于粘贴光学薄片。The difference between the inner diameter of the capillary collimating tube and the outer diameter of the optical fiber is less than 5%, which has the effect of collimation. At least one end of the capillary collimation tube is flat, and this end is used for attaching the optical sheet.
按上述技术方案,使用胶黏剂粘贴或者电阻焊或者压力焊或者激光焊接的方式,在毛细准直管的一端固定光学薄片。According to the above technical solution, the optical sheet is fixed at one end of the capillary collimating tube by means of adhesive bonding or resistance welding or pressure welding or laser welding.
按上述技术方案,光学薄片双面抛光且相互平行。According to the above technical solution, the optical sheets are polished on both sides and are parallel to each other.
按上述技术方案,光学薄片为透明薄片。According to the above technical solution, the optical sheet is a transparent sheet.
按上述技术方案,光学薄片材质为石英或者蓝宝石晶片或者玻璃,为折射率与光纤相差0.2的光学材料。According to the above technical solution, the material of the optical sheet is quartz or sapphire wafer or glass, which is an optical material whose refractive index differs from that of the optical fiber by 0.2.
本发明还提供一种高灵敏度的光纤温度传感器的制备方法,该方法包括以下步骤,步骤一,将毛细准直管和光学薄片用酒精通过超声清洗,然后将毛细准直管平整的端面和光学薄片紧密贴合,并将毛细准直管和光学薄片连接;步骤二,将光纤插入毛细准直管中,并实时观察光谱,待出现预设的光谱时,将光纤和毛细准直管固定;步骤三,把制作好的光纤温度传感器放入高温炉中,测试光纤温度传感器的温度灵敏度和对温度的响应曲线。The present invention also provides a method for preparing a high-sensitivity optical fiber temperature sensor, which comprises the following steps. Step 1: ultrasonically clean the capillary collimation tube and the optical sheet with alcohol, and then clean the flat end face of the capillary collimation tube and the optical The sheets are closely attached, and the capillary collimation tube and the optical sheet are connected; in
本发明产生的有益效果是:The beneficial effects that the present invention produces are:
(1)当温度发生变化时,毛细准直管和光学薄片会受热膨胀,导致光谱发生十分明显的漂移,可获得较高的灵敏度。(1) When the temperature changes, the capillary collimator and the optical sheet will be thermally expanded, resulting in a very obvious shift in the spectrum, and high sensitivity can be obtained.
(2)光学薄片和毛细准直管价格低廉,传感器的成本极低。(2) Optical sheets and capillary collimators are inexpensive, and the cost of the sensor is extremely low.
(3)光学薄片的加工工艺十分成熟,可以比较好的控制两个F-P的长度,有利于批量化生产。(3) The processing technology of the optical sheet is very mature, and the length of the two F-Ps can be better controlled, which is conducive to mass production.
附图说明Description of drawings
下面将结合附图及实施例对本发明作进一步说明,附图中:The present invention will be further described below in conjunction with the accompanying drawings and embodiments, in which:
图1是本发明实施例光纤温度传感器的结构示意图;1 is a schematic structural diagram of an optical fiber temperature sensor according to an embodiment of the present invention;
图2是光纤传感器的光谱图;Fig. 2 is the spectrogram of the optical fiber sensor;
图3是光纤传感器在310℃的光谱图;Fig. 3 is the spectrogram of the optical fiber sensor at 310 ℃;
图4是光纤传感器在315℃的光谱图;Fig. 4 is the spectrogram of the optical fiber sensor at 315 ℃;
图5是光纤传感器在320℃的光谱图;Fig. 5 is the spectrogram of the optical fiber sensor at 320°C;
图6是光纤传感器在325℃的光谱图;Fig. 6 is the spectrogram of the optical fiber sensor at 325°C;
图7是光纤传感器在330℃的光谱图;Fig. 7 is the spectrogram of the optical fiber sensor at 330°C;
图8是传感器在温度变化时同一波谷位置漂移测量图。Figure 8 is a measurement diagram of the same wave trough position drift of the sensor when the temperature changes.
其中,1-毛细准直管;2-光学薄片;3-连接点;4-光纤。Among them, 1-capillary collimating tube; 2-optical sheet; 3-connection point; 4-optical fiber.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
实施例一:Example 1:
如图1所示,本发明实施例中,提供一种高灵敏度的光纤温度传感器,包括光纤、毛细准直管以及光学薄片,在毛细准直管的一端固定一个光学薄片,并将光纤从毛细准直管的另一端插入,其中光学薄片的两个端面形成一个F-P腔,光纤和光学薄片形成F-P腔。光束传入传感器时,会在光纤端面和光学薄片的两个端面,产生三个反射光束。这三个反射光会形成两个F-P干涉,即光纤和光学薄片与毛细准直管接触面的两个反射光会形成一个F-P干涉,光学薄片自身的两个反射光会形成一个F-P干涉,光学薄片的一个端面被两个F-P干涉同时使用。当两个F-P干涉的自由光谱范围大小接近的时候产生Vernier效应。光纤用于导入光源信号和传输反射光。当温度发生变化时,毛细准直管和光学薄片发生热膨胀,从而使得两个F-P腔变化导致光谱发生变化,从而获得超高的温度灵敏度。光纤由毛细准直管准直,并将光纤贴合在毛细准直管上。毛细准直管的内径大小与光纤的外径相差小于5%,起到准直的效果。毛细准直管至少有一端是平整的,这一端用于粘贴光学薄片。使用胶黏剂粘贴或者电阻焊或者压力焊或者激光焊接的方式,在毛细准直管的一端固定光学薄片。光学薄片双面抛光且相互平行。光学薄片材质为石英或者蓝宝石晶片或者玻璃,为折射率与光纤相差0.2的光学材料。As shown in FIG. 1 , in an embodiment of the present invention, a high-sensitivity optical fiber temperature sensor is provided, including an optical fiber, a capillary collimator, and an optical sheet. An optical sheet is fixed at one end of the capillary collimator, and the optical fiber is removed from the capillary. The other end of the collimating tube is inserted, wherein the two end faces of the optical sheet form an F-P cavity, and the optical fiber and the optical sheet form an F-P cavity. When the light beam enters the sensor, three reflected light beams are generated on the fiber end face and the two end faces of the optical sheet. These three reflected lights will form two F-P interferences, that is, the two reflected lights of the interface between the optical fiber and the optical sheet and the capillary collimator will form an F-P interference, and the two reflected lights of the optical sheet itself will form an F-P interference. One end face of the sheet is used simultaneously by two F-P interferences. The Vernier effect occurs when the free spectral ranges of the two F-P interferences are close in size. Optical fibers are used to introduce light source signals and transmit reflected light. When the temperature changes, the capillary collimator and the optical sheet thermally expand, so that the change of the two F-P cavities leads to the change of the spectrum, thus obtaining the ultra-high temperature sensitivity. The optical fiber is collimated by the capillary collimating tube, and the optical fiber is attached to the capillary collimating tube. The difference between the inner diameter of the capillary collimating tube and the outer diameter of the optical fiber is less than 5%, which has the effect of collimation. At least one end of the capillary collimation tube is flat, and this end is used for attaching the optical sheet. Use adhesive bonding or resistance welding or pressure welding or laser welding to fix the optical sheet at one end of the capillary collimator. Optical flakes are polished on both sides and parallel to each other. The material of the optical sheet is quartz or sapphire wafer or glass, which is an optical material whose refractive index differs from that of the optical fiber by 0.2.
实施例二:Embodiment 2:
选用陶瓷插芯作为毛细准直管,将陶瓷插芯放入烧杯中,并在烧杯中加入酒精,用超声波对其进行清洗3mins。然后将酒精倒出,加入新的酒精,重复清洗3次。待陶瓷插芯清洗完毕后,使用加热板对其进行加热,使残留在陶瓷插芯中的酒精蒸发。A ceramic ferrule is used as a capillary collimation tube, the ceramic ferrule is placed in a beaker, alcohol is added to the beaker, and ultrasonic waves are used to clean it for 3 mins. Then pour out the alcohol, add new alcohol, and repeat the cleaning 3 times. After the ceramic ferrule is cleaned, use a heating plate to heat it to evaporate the alcohol remaining in the ceramic ferrule.
然后,将厚度为180um的玻璃薄片取出,使用相同的方法对玻璃薄片进行清洗。把清洗干净玻璃薄片水平放在干净的平台上,然后,将陶瓷插芯的一端平放在玻璃薄片上,待用。Then, the glass flake with a thickness of 180um was taken out, and the glass flake was cleaned by the same method. Place the cleaned glass sheet horizontally on a clean platform, and then place one end of the ceramic ferrule on the glass sheet for use.
将双组份的高温胶黏剂DB5014,按1:1的比例搅拌均匀。并将调制好的高温胶黏剂滴在陶瓷插芯和玻璃薄片的连接处。之后,按照高温胶黏剂的固化方法进行固化。Mix the two-component high temperature adhesive DB5014 in a ratio of 1:1. And drop the prepared high-temperature adhesive on the connection between the ceramic ferrule and the glass sheet. After that, it is cured according to the curing method of high temperature adhesive.
再把接有跳线的光纤插入到陶瓷插芯中,并将跳线接入解调仪,实时观察传感器的光谱变化。待光谱变为图2中的光谱时,将高温胶黏剂滴在陶瓷插芯和光纤的连接处,并固化。此时传感器制作完成。Then insert the optical fiber with the jumper into the ceramic ferrule, and connect the jumper to the demodulator to observe the spectral change of the sensor in real time. When the spectrum becomes the spectrum in Figure 2, drop the high-temperature adhesive on the connection between the ceramic ferrule and the optical fiber, and cure. At this point the sensor fabrication is complete.
图1给出了高灵敏的光纤温度传感器的结构示意图。图2给出了光纤传感器的光谱图。Figure 1 shows a schematic diagram of the structure of a highly sensitive optical fiber temperature sensor. Figure 2 shows the spectrogram of the fiber optic sensor.
在图3-图7中给出了光纤传感器在310℃-325℃的光谱图,图8是本发明实施例的传感器在温度变化时同一波谷位置漂移测量图。Figures 3 to 7 show the spectrograms of the optical fiber sensor at 310°C-325°C, and Figure 8 is a measurement diagram of the same wave trough position drift of the sensor according to the embodiment of the present invention when the temperature changes.
应当理解的是,对本领域普通技术人员来说,可以根据上述说明加以改进或变换,而所有这些改进和变换都应属于本发明所附权利要求的保护范围。It should be understood that, for those skilled in the art, improvements or changes can be made according to the above description, and all these improvements and changes should fall within the protection scope of the appended claims of the present invention.
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