CN111974100A - Filter equipment and vacuum pumping system - Google Patents
Filter equipment and vacuum pumping system Download PDFInfo
- Publication number
- CN111974100A CN111974100A CN201910425194.2A CN201910425194A CN111974100A CN 111974100 A CN111974100 A CN 111974100A CN 201910425194 A CN201910425194 A CN 201910425194A CN 111974100 A CN111974100 A CN 111974100A
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- filter
- rotating shaft
- filtering
- beating plate
- beating
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- 238000005086 pumping Methods 0.000 title abstract description 13
- 238000010009 beating Methods 0.000 claims abstract description 78
- 238000001914 filtration Methods 0.000 claims abstract description 45
- 239000013078 crystal Substances 0.000 claims abstract description 39
- 230000007246 mechanism Effects 0.000 claims abstract description 33
- 238000005452 bending Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 abstract description 15
- 230000000694 effects Effects 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 12
- 230000008569 process Effects 0.000 abstract description 10
- 230000002035 prolonged effect Effects 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000012535 impurity Substances 0.000 description 11
- 239000003921 oil Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 239000011553 magnetic fluid Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
- B01D46/023—Pockets filters, i.e. multiple bag filters mounted on a common frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
- B01D46/04—Cleaning filters
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention relates to the technical field of single crystal manufacturing, in particular to a filtering device and a vacuum-pumping system. A filtering device comprises a tank body, a filtering unit and an ash removal mechanism, wherein the ash removal mechanism and the filtering unit are located in the tank body, the filtering unit comprises at least one filtering bag, the ash removal mechanism comprises a beating plate, and the beating plate collides with the at least one filtering bag through rotation. The dust removal bag has good filtering effect, and volatile matters generated in the crystal pulling process can be effectively removed by colliding and beating the filter bag through the ash removal mechanism, so that a dry pump can be used in crystal pulling, the pollution of vacuum pump oil can be reduced under the condition that an oil pump is used in crystal pulling, the continuous working time of a vacuum pump is greatly prolonged, and the continuous operation time of a single crystal furnace is prolonged.
Description
Technical Field
The invention relates to the technical field of single crystal manufacturing, in particular to a filtering device and a vacuum-pumping system.
Background
The Czochralski method is a common single crystal growth method, and the growth process comprises the steps of immersing seed crystals into a melt in a single crystal furnace, sequentially carrying out seeding, shouldering, shoulder rotating, diameter equalizing and ending links, and finally obtaining single crystal rods. And introducing protective gas into the furnace and arranging a vacuum pump for pumping while pulling the crystal. The impurities such as volatile matters, oxides and the like are taken away by means of the sweeping effect of the protective gas on the crystal growth environment, and the stability of the crystal pulling process and the quality of finished products are ensured.
The protective gas carrying volatile matter, oxide and other impurities, i.e. the crystal pulling tail gas, generally flows through a filtering device to remove the impurities and then enters a vacuum pump. Therefore, the influence of impurities on the pumping efficiency of the vacuum pump can be relieved. With the increasing demand of low cost of silicon chips in the downstream of the photovoltaic industry, one cost reduction idea of the crystal pulling link is to shorten the proportion of a blowing-out cleaning process and increase the output of the equal-diameter link in the crystal pulling process by secondary feeding, continuous feeding and the like. The above concepts put a demand on the crystal pulling process for longer operation. The existing filtering device only utilizes a single-layer filter screen to intercept impurities in the crystal pulling tail gas, and the cleanliness of the crystal pulling tail gas entering a vacuum pump is insufficient due to limited filtering capacity. In order to keep the furnace pressure and ensure the stability of the crystal pulling process, a filtering device or a vacuum pump needs to be cleaned and maintained frequently, and the requirement of the crystal pulling process of long-time operation of a single furnace is difficult to adapt. Meanwhile, a dry pump in the vacuum pump has the potential of replacing an oil pump widely used in the prior art due to low energy consumption and better pumping effect. If the filtering capacity of the previous working procedure is limited, volatile impurities which are not thoroughly filtered out easily cause the blockage of the dry pump. Therefore, the filtering effect is also a bottleneck for optimizing and upgrading the vacuum pump equipment.
Disclosure of Invention
In view of the above-mentioned drawbacks and deficiencies of the prior art, it would be desirable to provide a filter device that addresses the problems set forth in the background above.
In a first aspect, the invention provides the following technical scheme: a filter bag filtering device comprises a tank body, a filtering unit and an ash removal mechanism, wherein the ash removal mechanism and the filtering unit are located in the tank body, the filtering unit comprises at least one filter bag, the ash removal mechanism comprises a beating plate, and the beating plate collides with the at least one filter bag through rotation.
Preferably, at least one filter bag is arranged along the height direction of the tank body, the length of the beating plate along the height direction of the tank body is at least 50 percent of the length of the filter bag,
the working condition corner theta of the bending rigidity of the clapper material is larger than 0 degree and smaller than or equal to 45 degrees.
Preferably, the width of the beater plate in a direction perpendicular to the height of the can body covers at least 30% of the width of the filter bag corresponding thereto.
Preferably, the number of the filter bags is multiple, the beating plate is at least one, and the filter bags are correspondingly arranged in the rotating range of each beating plate.
Preferably, the plurality of filter bags arranged corresponding to the beating plate are distributed at equal intervals relative to the beating plate.
Preferably, the ash removal mechanism further comprises at least one rotating shaft correspondingly connected with the beating plate, and the rotating shaft drives the beating plate corresponding to the rotating shaft to rotate.
Preferably, the ash removing mechanism further comprises a chain wheel and a chain which are mechanically connected, the chain wheel is mechanically connected with the rotating shaft, and the chain is connected end to end and connected among the chain wheels.
Preferably, one of the plurality of rotation axes is located at the center, and the remaining rotation axes are arranged around the central rotation axis, and the remaining rotation axes are equiangularly distributed with respect to the central rotation axis.
In a second aspect, the invention provides the following technical scheme: an evacuation system for evacuating a single crystal furnace, comprising an evacuation device and the filter device of any of the first aspect, the filter device being connected between the single crystal furnace and the evacuation device.
Preferably, the vacuum pumping device is an oil pump or a dry pump.
The dust removal bag has good filtering effect, and volatile matters generated in the crystal pulling process can be effectively removed by colliding and beating the filter bag through the ash removal mechanism, so that a dry pump can be used in crystal pulling, the pollution of vacuum pump oil can be reduced under the condition that an oil pump is used in crystal pulling, the continuous working time of a vacuum pump is greatly prolonged, and the continuous operation time of a single crystal furnace is prolonged. Meanwhile, the equipment, time and labor cost caused by frequent replacement of vacuum pump oil, dry pump gears and the like are reduced.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
FIG. 1 is a schematic view of a filter device of the present embodiment;
FIG. 2 is an enlarged partial schematic view at I of FIG. 1;
FIG. 3 is a schematic view of a filter bag of the filtering apparatus of the present embodiment;
FIG. 4 is a schematic view of a filter unit fixing plate of the filter device of the present embodiment;
FIG. 5 is a schematic view showing the arrangement of six filter bags of the filtering apparatus of the present embodiment with the centers of the six filter bags located in a circular profile;
FIG. 6 is a schematic view showing the three filter bags of the filtering apparatus of this embodiment having regular triangular centers;
FIG. 7 is a schematic view showing the arc distribution of the three filter bags of the filter apparatus of the present embodiment with the centers located in a sector;
FIG. 8 is a schematic view of an ash removal mechanism of the filter device of the present embodiment;
FIG. 9 is a schematic view showing the linkage of the ash removing mechanism of the filter device of the present embodiment;
FIG. 10 is a schematic view of a preferred ash removal mechanism of the filter device of this embodiment.
In the figure: 1. ash removal mechanism, 11, rotation shaft, 111, first rotation shaft, 112, second rotation shaft, 113, third rotation shaft, 114, fourth rotation shaft, 115, fifth rotation shaft, 116, sixth rotation shaft, 117, seventh rotation shaft, 12, connecting frame, 1201, first connecting frame, 12011, mounting hole, 1202, second connecting frame, 12021, slot, 121, first connecting frame, 122, second connecting frame, 123, third connecting frame, 124, fourth connecting frame, 125, fifth connecting frame, 126, sixth connecting frame, 127, seventh connecting frame, 13, beating plate, 131, first beating plate, 132, second beating plate, 133, third beating plate, 134, fourth beating plate, 135, fifth beating plate, 136, sixth beating plate, 137, seventh beating plate; 141. a first sprocket wheel 142, a second sprocket wheel 143, a third sprocket wheel 144, a fourth sprocket wheel 145, a fifth sprocket wheel 146, a sixth sprocket wheel 147, a seventh sprocket wheel 15, and a chain;
2. A filter bag 3, a filter unit fixing plate 31, a filter bag mounting hole 32 and a through hole;
4. a tank body 5, a power system 6 and a magnetic fluid sealing mechanism.
Detailed Description
The invention is described in the following with reference to the figures and examples for alternative details. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be mechanically or electrically connected, directly or indirectly through an intermediate medium, or they may be connected through the inside of two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
Example one
Referring to fig. 1, a filter device mainly comprises an ash removal mechanism 1, a filter unit fixing plate 3, a tank 4 and a power system 5. The ash cleaning mechanism 1, the filtering unit and the filtering unit fixing plate 3 are arranged inside the tank body 4, and the filtering unit is arranged on the filtering unit fixing plate 3.
Referring to fig. 3, the filter unit includes at least one filter bag 2, and the filter bag 2 has a cylindrical shape for filtering dust discharged from the single crystal growing furnace. Preferably, the PTFE film-coated dust removal cloth bag can ensure the ventilation quantity and well filter volatile matters in crystal pulling tail gas, and the filtering efficiency is more than or equal to 99.99%.
Referring to fig. 1-2, the ash removal mechanism 1 is provided with a beating plate 13, the filter bag 2 is arranged in the rotating range of the beating plate 13, the beating plate 13 collides with the filter bag 2, and the bag body of the filter bag 2 deforms. The beating plate 13 and the filter bag 2 fully act, the effect of cleaning impurities in crystal pulling tail gas is better than that of cleaning impurities in crystal pulling tail gas only by using a single-layer filter screen in the prior art, the working time of the single crystal furnace is prolonged, frequent furnace shutdown for cleaning impurities and waste of a large amount of manpower and financial resources are avoided, the crystal pulling process requirement of long-time operation of the single furnace is met, and the production benefit is improved.
The dust removal bag has good filtering effect, and the ash removal mechanism collides and flaps the filter bag to effectively remove volatile matters captured in the filter bag, so that a dry pump can be used in crystal pulling, the pollution of vacuum pump oil can be reduced under the condition that an oil pump is used in crystal pulling, the continuous working time of the vacuum pump is greatly prolonged, and the continuous operation time of the single crystal furnace is prolonged. Meanwhile, the equipment, time and labor cost caused by frequent replacement of vacuum pump oil, dry pump gears and the like are reduced.
Optionally, at least one filter bag 2 is arranged along the height direction of the tank 4, the length of the beating plate 13 along the height direction of the tank 4 is at least 50 percent of the length of the filter bag 2,
the working condition rotation angle theta of the bending rigidity of the beating plate 13 material is more than 0 degree and less than or equal to 45 degrees.
Referring to fig. 1 to 2, in the embodiment of the present invention, the filter bag 2 is disposed along the height direction of the can body 4, the filter bag 2 can be completely contacted with the surrounding space, and the filter bag 2 can maximally filter dust from the surrounding space. When the beating plate 13 collides with the filter bag 2, the larger the length of the contact surface between the beating plate 13 and the filter bag 2 is, the better the effect of the beating plate 13 colliding with the filter bag 2 is, and the dust in the filter bag 2 can be removed.
The fixing form of the beating plate 13 is a cantilever beam, and after the beating plate 13 collides with the filter bag 2, the beating plate 13 is bent and deformed. The larger the deformation of the beating plate 13 is, the worse the beating effect is, but in view of avoiding the filter bag 2 from hanging on the beating plate 13, the working condition angle theta of the bending rigidity of the beating plate 13 material is selected to be larger than 0 DEG and smaller than or equal to 45 deg. In addition, the bending deformation of the clapper 13 can reduce the abrasion of the filter bag 2 and prolong the service time of the filter bag 2.
It should be noted that the material of the beating plate 13 may be rubber, plastic, etc., as long as when the beating plate is in contact with the filter bag 2, the working condition angle θ of the bending rigidity of the beating plate 13 material is greater than 0 ° and less than or equal to 45 °, and the filter bag 2 is not damaged after the collision.
As shown in fig. 1, the tank 4 is vertically arranged, the filter unit fixing plate 3 is arranged at the top inside the tank 4, the filter unit fixing plate 3 is provided with at least one filter bag mounting hole 31, as shown in fig. 4, the filter bag 2 is vertically fixed on the filter unit fixing plate 3 through the filter bag mounting hole 31, and the length of the beating plate 13 is slightly smaller than that of the filter bag 2.
Optionally, the width of the beating plate 13 in a direction perpendicular to the height of the tank 4 covers at least 30% of the width of the filter bag 2 corresponding thereto.
In the embodiment of the invention, when the beating plate 13 collides with the filter bag 2, the width of the contact surface of the beating plate 13 and the filter bag 2 is at least 30% of the width of the filter bag 2, and the larger the width of the contact surface of the beating plate 13 and the filter bag 2 is, the more beneficial the beating plate 13 is to improve the dust removal of the filter bag 2.
Optionally, the number of the filter bags 2 is multiple, the number of the beating plates 13 is at least one, and a plurality of filter bags 2 are correspondingly arranged in the rotating range of each beating plate 13.
In the embodiment of the invention, a plurality of filter bags 2 are correspondingly arranged on one beating plate 13, and in unit time, one beating plate 13 rotates for one circle, and the number of times of collision of each filter bag 2 is one. If the number of the beating plates 13 is two, the two beating plates 13 rotate once per unit time, and the number of times each filter bag 2 is collided is two. When the number of the filter bags 2 is multiple, the number of the beating plates 13 is increased, the number of times of collision of the filter bags 2 in unit time is increased, and the dust removal effect of the device is improved.
Optionally, a plurality of filter bags 2 corresponding to the clapper 13 are distributed at equal intervals relative to the clapper 13.
In the embodiment of the invention, the filter bags 2 are cylindrical, the centers of circles of the filter bags 2 can be uniformly distributed in a regular polygon shape, the centers of circles of the filter bags 2 can be uniformly distributed on the same circumference, or the centers of circles of the filter bags 2 are uniformly distributed on the same fan-shaped arc, and the like. The filter bag 2 correspondence of equipartition is provided with the filter bag mounting hole 31 of equipartition on filter unit fixed plate 3, and when processing filter bag mounting hole 31 on filter unit fixed plate 3, the staff can be fast, convenient processing and can not make mistakes, improves staff's work efficiency.
As shown in fig. 5, the centers of circles of six filter bags 2 are uniformly distributed on the same circular contour, the distance between every two adjacent filter bags 2 is equal, each filter bag 2 surrounds the beating plate 13, the beating plate 13 is arranged at the center of the circular contour, and the beating plate 13 can contact with two filter bags 2 simultaneously.
As shown in fig. 6, the centers of the three filter bags 2 are uniformly distributed in a regular triangle, the distance between every two adjacent filter bags 2 is equal, the three filter bags 2 are arranged around the beating plate 13, and the beating plate 13 is arranged at the geometric center of the regular triangle.
As shown in fig. 7, the centers of circles of the three filter bags 2 are all located on the same fan-shaped arc, the distance between every two adjacent filter bags 2 is equal, the beating plate 13 is arranged at the center of circle corresponding to the arc, and the beating plate 13 can sequentially contact with each filter bag 2 when rotating.
Optionally, the ash removal mechanism 1 further includes at least one rotation shaft 11 correspondingly connected to the beating plate 13, and the rotation shaft 11 drives the corresponding beating plate 13 to rotate.
As shown in FIG. 8, in the embodiment of the present invention, the ash removal mechanism 1 comprises at least one rotating shaft 11, at least one connecting frame 12 and at least one beater plate 13. A connecting frame 12 is correspondingly arranged on one rotating shaft 11, and one or more beating plates 13 are fixed on the connecting frame 12.
The link frame 12 includes a first link frame 1201 and a second link frame 1202, and a mounting hole 12011 is provided at one surface of the first link frame 1201 to fixedly couple a lower end of the vertically arranged rotation shaft 11. The other surface of the first connecting frame 1201 is fixedly connected with one surface of the second connecting frame 1202, the other surface of the second connecting frame 1202 is provided with a slot 12021, the slot 12021 can be used for the clapper 13 to be embedded in, the middle part of the clapper 13 is arranged in the slot 12021 in a matching way, and two sides of the clapper 13 are exposed out of the second connecting frame 1202.
The power system 5 is connected with the rotating shaft 11, if the power system 5 is arranged inside the tank body 4, dust and impurities in the tank body 4 can enter the power system 5 through a heat dissipation port of the power system 5, and the dust and impurities can cause the power system 5 to be shut down accidentally or shorten the service life of the power system 5. But set up driving system 5 in the outside of jar body 4, driving system 5 is in dustless environment and is favorable to driving system 5's heat dissipation, and driving system 5 can stable work, and simple to operate reduces relevant personnel's work load and intensity of labour simultaneously.
In the mechanism of the ash removing mechanism, the ash removing mechanism 1 further comprises a chain wheel 14 and a chain 15 which are mechanically connected, the chain wheel 14 is mechanically connected with the rotating shaft 11, and the chain 15 is connected end to end and is connected among the chain wheels 14.
Referring to fig. 1, 2, 9 and 10, a first rotating shaft 111, a second rotating shaft 112, a third rotating shaft 113, a fourth rotating shaft 114, a fifth rotating shaft 115, a sixth rotating shaft 116 and a seventh rotating shaft 117 are provided in the embodiment of the present invention; a first link frame 121, a second link frame 122, a third link frame 123, a fourth link frame 124, a fifth link frame 125, a sixth link frame 126, and a seventh link frame 127; a first clapper 131, a second clapper 132, a third clapper 133, a fourth clapper 134, a fifth clapper 135, a sixth clapper 136, and a seventh clapper 137.
The first rotating shaft 111 is correspondingly provided with a first connecting frame 121 and a first beating plate 131; the second connecting frame 122 and the second clapper 132 are correspondingly arranged on the second rotating shaft 112; the third rotating shaft 113 is correspondingly provided with a third connecting frame 123 and a third beating plate 133; the fourth rotating shaft 114 is correspondingly provided with a fourth connecting frame 124 and a fourth clapper 134; the fifth rotating shaft 115 is correspondingly provided with a fifth connecting frame 125 and a fifth beating plate 135; the sixth rotating shaft 116 is correspondingly provided with a sixth connecting frame 126 and a sixth beating plate 136; the seventh rotating shaft 117 is provided with a seventh connecting frame 127 and a seventh clapper 137 correspondingly.
The power system 5 is vertically arranged at the top end outside the tank body 4, and the top end of the tank body 4 is provided with an opening for fixedly installing the magnetic fluid sealing mechanism 6. One end of the magnetic fluid sealing mechanism 6 is connected with the power system 5 through a coupler.
The filter unit fixing plate 3 is provided with at least one through hole 32, as shown in fig. 4, a lower end of a vertically arranged first rotating shaft 111 is fixed on the mounting hole of the first connecting frame 121, and an upper end of the first rotating shaft 111 passes through one through hole 32 of the filter unit fixing plate 3 to be connected with the other end of the magnetic fluid sealing mechanism 6. A first sprocket 141 is provided at an upper end of the first rotating shaft 111.
The lower end of the second rotating shaft 112 is fixed to the mounting hole of the second connecting frame 122, the upper end of the second rotating shaft 112 passes through the other through hole 32 of the filter unit fixing plate 3, and a second sprocket 142 is provided at the upper end of the second rotating shaft 112.
The lower end of the third rotating shaft 113 is fixed to the mounting hole of the third connecting frame 123, the upper end of the third rotating shaft 113 passes through another through hole 32 of the filter unit fixing plate 3, and a third sprocket 143 is provided at the upper end of the third rotating shaft 113.
The lower end of the fourth rotating connecting shaft 114 is fixed to the mounting hole of the fourth connecting frame 124, the upper end of the fourth rotating shaft 114 passes through the other through hole 32 of the filter unit fixing plate 3, and a fourth sprocket 144 is provided at the upper end of the fourth rotating shaft 114.
The lower end of the fifth rotating shaft 115 is fixed to the mounting hole of the fifth connecting frame 125, the upper end of the fifth rotating shaft 115 passes through the other through hole 32 of the filter unit fixing plate 3, and a fifth sprocket 145 is provided at the upper end of the fifth rotating shaft 115.
The lower end of the sixth rotating shaft 116 is fixed to the mounting hole of the sixth connecting frame 126, the upper end of the sixth rotating shaft 116 passes through the other through hole 32 of the filter unit fixing plate 3, and a sixth sprocket 146 is provided at the upper end of the sixth rotating shaft 116.
The lower end of the seventh rotating shaft 117 is fixed to the mounting hole of the seventh connecting bracket 127, the upper end of the seventh rotating shaft 117 passes through the other through hole 32 of the filtering unit fixing plate 3, and a seventh sprocket 147 is provided at the upper end of the seventh rotating shaft 117.
The first chain wheel 141, the second chain wheel 142, the third chain wheel 143, the fourth chain wheel 144, the fifth chain wheel 145, the sixth chain wheel 146 and the seventh chain wheel 147 are all located at the same height layer, and the chain 15 is mechanically connected with the chain wheels in sequence in a closed chain connection mode.
The power system 5 rotates to drive the first rotating shaft 111 to rotate, the first rotating shaft 111 drives the first chain wheel 141 to rotate, the first chain wheel 141 drives the second chain wheel 142, the third chain wheel 143, the fourth chain wheel 144, the fifth chain wheel 145, the sixth chain wheel 146 and the seventh chain wheel 147 to rotate simultaneously through the chain wheel 15, and the second chain wheel 142 drives the second rotating shaft 112 to rotate; the third sprocket 143 drives the third rotating shaft 113 to rotate; the fourth sprocket 144 drives the fourth rotating shaft 114 to rotate; the fifth chain wheel 145 drives the fifth rotating shaft 115 to rotate; the sixth chain wheel 146 drives the sixth rotating shaft 112 to rotate; the seventh sprocket 147 drives the seventh rotating shaft 117 to rotate, and further the clappers rotate simultaneously, that is, the first clapper 131, the second clapper 132, the third clapper 133, the fourth clapper 134, the fifth clapper 135, the sixth clapper 136 and the seventh clapper 137 rotate simultaneously.
The mode of chain, sprocket drive realizes that each axis of rotation synchronous revolution, has improved filter equipment's work efficiency, has reduced the operating time who removes dust at every turn, improves the productivity effect, reduction in production cost. The chain transmission mode has no elastic sliding and slipping phenomena, accurate average transmission ratio, reliable work and high efficiency; the transmission power is large, the overload capacity is strong, and the transmission size under the same working condition is small; the required tension is small, and the pressure acting on the shaft is small; can work in severe environments such as high temperature, humidity, dustiness, pollution and the like.
It should be noted that, besides the chain transmission mode, the belt transmission mode can also be adopted to realize synchronization. Except that a plurality of axis of rotation synchronous rotation, each axis of rotation can rotate separately alone separately, and a axis of rotation corresponds and sets up a driving system, and the clapper that every axis of rotation corresponds independently rotates, if a certain motor breaks down, filter equipment can also continue dust removal work.
In the linkage mode of the dust removing mechanism, one rotating shaft 11 is positioned at the center, the other rotating shafts 11 are arranged around the rotating shaft 11 at the center, and the other rotating shafts 11 are distributed at equal angles relative to the rotating shaft 11 at the center.
As shown in fig. 10, the axial center of second rotating shaft 112, the axial center of third rotating shaft 113, the axial center of fourth rotating shaft 114, the axial center of fifth rotating shaft 115, the axial center of sixth rotating shaft 116, and the axial center of seventh rotating shaft 117 are arranged in a regular hexagon, and the axial center of first rotating shaft 111 is located at the geometric center of the regular hexagon.
The filter unit corresponding to the first rotation axis 111 is provided with 3 filter bags 2, and the arrangement of the 3 filter bags 2 with respect to the first rotation axis 111 is similar to that shown in fig. 6;
the filter units corresponding to the third rotating shaft 113, the fifth rotating shaft 115 and the seventh rotating shaft 117 are all provided with 6 filter bags 2, and the arrangement mode of the 6 filter bags 2 relative to the third rotating shaft 113, the fifth rotating shaft 115 and the seventh rotating shaft 117 is similar to that shown in fig. 5;
the filter units corresponding to the second rotating shaft 112, the fourth rotating shaft 114 and the sixth rotating shaft 116 are all provided with 3 filter bags 2, and the arrangement mode of the 3 filter bags 2 relative to the second rotating shaft 112, the fourth rotating shaft 114 and the sixth rotating shaft 116 is similar to that shown in fig. 7;
the first beating plate 131 corresponding to the first rotating shaft 111 can collide with the 3 filter bags 2 corresponding to the first rotating shaft 111, and can also collide with a portion of the filter bag 2 corresponding to the third rotating shaft 113, a portion of the filter bag 2 corresponding to the fifth rotating shaft 115, and a portion of the filter bag 2 corresponding to the seventh rotating shaft 117.
The fourth beating plate 134 corresponding to the fourth rotating shaft 114 can collide with the 3 filter bags 2 corresponding to the fourth rotating shaft 114, and can also collide with a portion of the filter bag 2 corresponding to the first rotating shaft 111, a portion of the filter bag 2 corresponding to the third rotating shaft 113, and a portion of the filter bag 2 corresponding to the fifth rotating shaft 115.
The arrangement mode of first axis of rotation 111, second axis of rotation 112, third axis of rotation 113, fourth axis of rotation 114, fifth axis of rotation 115, sixth axis of rotation 116 and seventh axis of rotation 117 has increased the number of times of crossing the filter bag 2 collision, has improved the frequency of collision, and more filter bags 2 can be held to jar body 4 simultaneously, have improved the effect that the device removed dust.
It should be noted that the arrangement of the rotating shaft 11 depends on the volume of the tank 2 and the outline of the cross section, and the arrangement of the rotating shaft 11 is determined by those skilled in the art according to the actual situation.
Example two
A vacuum-pumping system is used for pumping vacuum to a single crystal furnace and comprises a vacuum-pumping device and a filtering device in the first embodiment, wherein the filtering device is connected between the single crystal furnace and the vacuum-pumping device, and the vacuum-pumping device is an oil pump or a dry pump.
The above embodiments are merely illustrative of the technical solutions of the present invention and not restrictive, and although the present invention is described in detail with reference to the embodiments, those skilled in the art should understand that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. The filtering device is characterized by comprising a tank body, a filtering unit and an ash removal mechanism, wherein the ash removal mechanism and the filtering unit are positioned in the tank body, the filtering unit comprises at least one filtering bag, the ash removal mechanism comprises a beating plate, and the beating plate collides with the at least one filtering bag through rotation.
2. The filtration apparatus of claim 1, wherein at least one of the filter bags is disposed along a height of the tank, wherein a length of the beater plate along the height of the tank is at least 50% of a length of the filter bag,
the working condition corner theta of the bending rigidity of the clapper material is larger than 0 degree and smaller than or equal to 45 degrees.
3. The filtration apparatus of claim 1, wherein a width of the beater plate in a direction perpendicular to a height of the can covers at least 30% of a width of the filter bag corresponding thereto.
4. The filtering device as claimed in claim 1, wherein the number of the filter bags is plural, the number of the beating plates is at least one, and a plurality of the filter bags are correspondingly arranged in the rotation range of each beating plate.
5. The filtering device according to claim 1, wherein a plurality of said filter bags disposed in correspondence with said beating plate are equally spaced with respect to said beating plate.
6. The filtering device as claimed in any one of claims 1 to 5, wherein the ash removing mechanism further comprises at least one rotating shaft correspondingly connected with the beating plate, and the rotating shaft drives the corresponding beating plate to rotate.
7. The filtration device of claim 6, wherein the ash removal mechanism further comprises a sprocket and a chain mechanically coupled to the rotatable shaft, the chain being coupled end-to-end between the plurality of sprockets.
8. The filter device of claim 7, wherein one of the plurality of rotational axes is centrally located and the remaining rotational axes are disposed about the centrally located rotational axis, the remaining rotational axes being equiangularly distributed with respect to the centrally located rotational axis.
9. An evacuation system for evacuating a single crystal furnace, comprising an evacuation device and the filter device of any one of claims 1 to 8, wherein the filter device is connected between the single crystal furnace and the evacuation device.
10. An evacuation system according to claim 9, wherein the evacuation device is an oil pump or a dry pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910425194.2A CN111974100A (en) | 2019-05-21 | 2019-05-21 | Filter equipment and vacuum pumping system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910425194.2A CN111974100A (en) | 2019-05-21 | 2019-05-21 | Filter equipment and vacuum pumping system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111974100A true CN111974100A (en) | 2020-11-24 |
Family
ID=73436982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910425194.2A Withdrawn CN111974100A (en) | 2019-05-21 | 2019-05-21 | Filter equipment and vacuum pumping system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111974100A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106669301A (en) * | 2016-09-13 | 2017-05-17 | 沈阳隆基电磁科技股份有限公司 | Vacuum dust removal equipment for single crystal growth furnace |
| CN108043132A (en) * | 2017-12-17 | 2018-05-18 | 陈伟 | A kind of efficient pocket type air dust remover |
| CN108211547A (en) * | 2018-02-27 | 2018-06-29 | 大连连城数控机器股份有限公司 | A kind of monocrystalline silicon growing process automated cleaning cleaner and method |
| CN207562538U (en) * | 2017-11-17 | 2018-07-03 | 广州市汇邦动物药业有限公司 | A kind of pulse bag formula deduster |
| CN210356364U (en) * | 2019-05-21 | 2020-04-21 | 宁夏隆基硅材料有限公司 | Filter equipment and vacuum pumping system |
-
2019
- 2019-05-21 CN CN201910425194.2A patent/CN111974100A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106669301A (en) * | 2016-09-13 | 2017-05-17 | 沈阳隆基电磁科技股份有限公司 | Vacuum dust removal equipment for single crystal growth furnace |
| CN207562538U (en) * | 2017-11-17 | 2018-07-03 | 广州市汇邦动物药业有限公司 | A kind of pulse bag formula deduster |
| CN108043132A (en) * | 2017-12-17 | 2018-05-18 | 陈伟 | A kind of efficient pocket type air dust remover |
| CN108211547A (en) * | 2018-02-27 | 2018-06-29 | 大连连城数控机器股份有限公司 | A kind of monocrystalline silicon growing process automated cleaning cleaner and method |
| CN210356364U (en) * | 2019-05-21 | 2020-04-21 | 宁夏隆基硅材料有限公司 | Filter equipment and vacuum pumping system |
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Application publication date: 20201124 |