CN111974100A - Filter equipment and vacuum pumping system - Google Patents

Abstract

The invention relates to the technical field of single crystal manufacturing, in particular to a filtering device and a vacuuming system. A filter device includes a tank body, a filter unit and a ash cleaning mechanism, the ash cleaning mechanism and the filter unit are located in the tank body, the filter unit includes at least one filter bag, and the ash cleaning mechanism includes a flapping plate, The flapper collides with at least one of the filter bags by rotating. The dust removal bag provided by the invention has good filtering effect. Secondly, the dust cleaning mechanism collides and beats the filter bag, which can effectively remove the volatiles generated in the crystal pulling process, so that it is possible to use a dry pump in the crystal pulling, while the oil pump is used in the crystal pulling. It can reduce the pollution of vacuum pump oil, greatly prolong the continuous working time of vacuum pump and prolong the continuous running time of single crystal furnace.

Description

A filter device and vacuum system

technical field

The invention relates to the technical field of single crystal manufacturing, in particular to a filtering device and a vacuuming system.

Background technique

The Czochralski method is a common single crystal growth method. The growth process is to immerse the seed crystal in the melt in a single crystal furnace, and sequentially perform seeding, shoulder placement, shoulder rotation, equal diameter and finishing, and finally obtain a single crystal. crystal rod. While pulling crystals, a protective gas was introduced into the furnace, and a vacuum pump was set for suction. With the help of the purging effect of the protective gas on the crystal growth environment, impurities such as volatiles and oxides are taken away to ensure the stability of the crystal pulling process and the quality of the finished product.

The protective gas carrying impurities such as volatiles and oxides is the tail gas of crystal pulling, which generally flows through a filter device to remove impurities before entering the vacuum pump. In this way, the influence of impurities on the suction efficiency of the vacuum pump can be alleviated. With the increasing demand for low cost of silicon wafers in the downstream of the photovoltaic industry, a cost reduction idea in the crystal pulling process is to reduce the proportion of the shutdown cleaning process and increase the diameter of the crystal pulling process through secondary feeding, continuous feeding, etc. output. The above-mentioned ideas put forward a longer-running requirement for the crystal pulling process. The existing filtering device only uses a single-layer filter screen to intercept impurities in the crystal pulling tail gas, and the crystal pulling tail gas entering the vacuum pump is not clean enough due to the limited filtering capacity. In order to maintain the furnace pressure and ensure the stability of the crystal pulling process, it is necessary to clean and maintain the filter device or vacuum pump frequently, and it is difficult to adapt to the crystal pulling process requirements of a single furnace running for a long time. At the same time, the dry pump in the vacuum pump has the potential to replace the oil pump widely used in the prior art due to its low energy consumption and better suction effect. If the filtering capacity of the previous process is limited, the volatile impurities that are not completely filtered out will easily cause the dry pump to block. Therefore, the filtering effect is still the bottleneck that affects the optimization and upgrading of vacuum pump equipment.

SUMMARY OF THE INVENTION

In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a filtering device to solve the above-mentioned problems in the background art.

In the first aspect, the technical solution provided by the present invention: a filter bag filter device, comprising a tank body, a filter unit and a ash cleaning mechanism, the ash cleaning mechanism and the filter unit are located in the tank body, and the filter unit includes At least one filter bag, the dust cleaning mechanism includes a flapping plate, and the flapping plate collides with at least one of the filter bags by rotating.

Preferably, at least one of the filter bags is arranged along the height direction of the tank body, and the length of the flapping plate along the height direction of the tank body is at least 50% of the length of the filter bag,

The size of the working condition rotation angle θ of the bending stiffness of the beater plate material is greater than 0° and less than or equal to 45°.

Preferably, the width of the flapping plate along the direction perpendicular to the height of the tank body covers at least 30% of the corresponding width of the filter bag.

Preferably, there are multiple filter bags, at least one beater plate, and a plurality of filter bags are correspondingly arranged within the rotation range of each beater plate.

Preferably, a plurality of the filter bags corresponding to the beating plate are distributed at equal intervals relative to the beating plate.

Preferably, the ash cleaning mechanism further comprises at least one rotating shaft correspondingly connected with the beating plate, and the rotating shaft drives the corresponding beating plate to rotate.

Preferably, the ash cleaning mechanism further comprises a mechanically connected sprocket and a chain, the sprocket is mechanically connected to the rotating shaft, and the chain is connected end to end and is connected between a plurality of the sprockets.

Preferably, among the plurality of rotating shafts, one of the rotating shafts is located at the center, the other rotating shafts are arranged around the central rotating shaft, and the remaining rotating shafts are equiangularly distributed relative to the central rotating shaft .

In the second aspect, the technical solution provided by the present invention: a vacuuming system for vacuuming a single crystal furnace, comprising a vacuuming device and any one of the filtering devices described in the first aspect, wherein the filtering device is connected to the between the single crystal furnace and the vacuuming device.

Preferably, the vacuuming device is an oil pump or a dry pump.

The dust-removing bag provided in the present invention has good filtering effect. Secondly, the dust-cleaning mechanism collides and beats the filter bag, which can effectively remove the volatiles generated in the crystal pulling process, making it possible to use a dry pump in the crystal pulling, while the oil pump is used in the crystal pulling. It can reduce the pollution of vacuum pump oil, greatly prolong the continuous working time of vacuum pump and prolong the continuous running time of single crystal furnace. At the same time, the equipment, time and labor costs caused by frequent replacement of vacuum pump oil and dry pump gears are reduced.

Description of drawings

Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

Fig. 1 is the schematic diagram of the filter device of the present embodiment;

Fig. 2 is the partial enlarged schematic diagram of I place in Fig. 1;

Fig. 3 is the schematic diagram of the filter bag of the filter device of the present embodiment;

Fig. 4 is the schematic diagram of the filter unit fixing plate of the filter device of the present embodiment;

5 is a schematic diagram of the distribution of the six filter bags of the filter device of the present embodiment where the centers of the circles are located in a circular outline;

6 is a schematic diagram of the distribution of the centers of the three filter bags of the filter device of the present embodiment in an equilateral triangle;

7 is a schematic diagram of the distribution of arcs in which the centers of the three filter bags of the filter device of the present embodiment are located in a sector;

Fig. 8 is the schematic diagram of the dust cleaning mechanism of the filter device of the present embodiment;

9 is a schematic diagram of the linkage of the cleaning mechanism of the filter device of the present embodiment;

FIG. 10 is a schematic diagram of the linkage of a preferred dust cleaning mechanism of the filter device of the present embodiment.

In the figure: 1. Dust cleaning mechanism, 11, rotating shaft, 111, first rotating shaft, 112, second rotating shaft, 113, third rotating shaft, 114, fourth rotating shaft, 115, fifth rotating shaft, 116 , sixth rotating shaft, 117, seventh rotating shaft, 12, connecting frame, 1201, first connecting frame, 12011, mounting hole, 1202, second connecting frame, 12021, slotting, 121, first connecting frame, 122 , the second connecting frame, 123, the third connecting frame, 124, the fourth connecting frame, 125, the fifth connecting frame, 126, the sixth connecting frame, 127, the seventh connecting frame, 13, the flapping plate, 131, the first Slapping board, 132, second slap board, 133, third slap board, 134, fourth slap board, 135, fifth slap board, 136, sixth slap board, 137, seventh slap board; 141, first chain wheel, 142, second sprocket, 143, third sprocket, 144, fourth sprocket, 145, fifth sprocket, 146, sixth sprocket, 147, seventh sprocket, 15, chain;

2. Filter bag, 3. Filter unit fixing plate, 31. Filter bag mounting hole, 32. Through hole;

4. Tank body, 5. Power system, 6. Magnetic fluid sealing mechanism.

Detailed ways

The present invention is optionally described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the related invention, but not to limit the invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. In addition, it should be noted that, for the convenience of description, only the parts related to the invention are shown in the drawings.

In the description of the present invention, it should be noted that the terms "installed", "connected" and "connected" should be understood in a broad sense, unless otherwise expressly specified and limited, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; it can also be a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, or an internal communication between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

In addition, it should be noted that the embodiments of the present invention and the features of the embodiments may be combined with each other without conflict.

Example 1

Referring to FIG. 1 , a filter device mainly includes a dust cleaning mechanism 1 , a filter unit, a filter unit fixing plate 3 , a tank body 4 and a power system 5 . The ash cleaning mechanism 1 , the filter unit and the filter unit fixing plate 3 are arranged inside the tank body 4 , and the filter unit is arranged on the filter unit fixing plate 3 .

Referring to FIG. 3 , the filter unit includes at least one filter bag 2 , and the filter bag 2 is cylindrical for filtering the dust discharged from the single crystal furnace. Preferably, the PTFE-coated dust filter bag can effectively filter the volatiles in the crystal pulling tail gas while ensuring the ventilation rate, and the filtration efficiency is ≥99.99%.

1-2, the cleaning mechanism 1 is provided with a flapping plate 13, and a filter bag 2 is provided within the rotating range of the flapping plate 13. The flapping plate 13 collides with the filter bag 2, and the bag body of the filter bag 2 is deformed. The flapping plate 13 and the filter bag 2 fully function to clean the impurities in the crystal pulling tail gas, which is better than the single-layer filter in the prior art, prolongs the working time of the single crystal furnace, and avoids frequent shutdown of the furnace to clean the impurities and waste a lot of manpower. and financial resources to meet the needs of the crystal pulling process with a single furnace running for a long time and improve production efficiency.

The dust-removing bag provided by the invention has good filtering effect. Secondly, the dust-cleaning mechanism collides and beats the filter bag, which can effectively remove the volatiles captured in the filter bag, making it possible to use a dry pump in crystal pulling. , can reduce the pollution of vacuum pump oil, greatly prolong the continuous working time of vacuum pump and prolong the continuous running time of single crystal furnace. At the same time, the equipment, time and labor costs caused by frequent replacement of vacuum pump oil and dry pump gears are reduced.

Optionally, at least one filter bag 2 is arranged along the height direction of the tank body 4, and the length of the flapping plate 13 along the height direction of the tank body 4 is at least 50% of the length of the filter bag 2,

The size of the working condition rotation angle θ of the bending stiffness of the material of the beater plate 13 is greater than 0° and less than or equal to 45°.

1-2, in the embodiment of the present invention, the filter bag 2 is arranged along the height direction of the tank body 4, the filter bag 2 can completely contact the surrounding space, and the filter bag 2 filters the dust in the surrounding space to the maximum extent. When the flapping plate 13 collides with the filter bag 2 , the longer the contact surface of the flapping plate 13 and the filter bag 2 is, the better the impact of the flapping plate 13 on the filter bag 2 is, which is beneficial to remove the dust in the filter bag 2 .

The fixed form of the beating plate 13 is a cantilever beam. After the beating plate 13 collides with the filter bag 2 , the beating plate 13 is bent and deformed. The larger the deformation of the flapping plate 13, the worse the flapping effect, but considering to avoid the filter bag 2 hanging on the flapping plate 13, the working condition angle θ of the bending stiffness of the material of the flapping plate 13 is selected to be greater than 0° and less than 0°. or equal to 45°. In addition, the bent and deformed flapping plate 13 can reduce the wear on the filter bag 2 and prolong the service time of the filter bag 2 .

It should be noted that the material of the flapping plate 13 can be rubber, plastic, etc. As long as it is in contact with the filter bag 2, the working condition angle θ of the bending stiffness of the flapping plate 13 is greater than 0° and less than or equal to 45°, It is enough not to damage the filter bag 2 after the collision.

As shown in FIG. 1, the tank body 4 is arranged in the vertical direction, the filter unit fixing plate 3 is arranged on the top of the tank body 4, and the filter unit fixing plate 3 is provided with at least one filter bag mounting hole 31, as shown in FIG. 4, The filter bag 2 is vertically fixed on the filter unit fixing plate 3 through the filter bag installation hole 31 , and the length of the flapping plate 13 is slightly smaller than the length of the filter bag 2 .

Optionally, the width of the flapping plate 13 along the height direction perpendicular to the tank body 4 covers at least 30% of the width of the corresponding filter bag 2 .

In the embodiment of the present invention, when the flapping plate 13 collides with the filter bag 2, the width of the contact surface between the flapping plate 13 and the filter bag 2 is at least 30% of the width of the filter bag 2, and the contact surface between the flapping plate 13 and the filter bag 2 is at least 30% of the width of the filter bag 2. The larger the width, the more favorable it is to improve the flapping plate 13 to remove the dust in the filter bag 2 .

Optionally, there are multiple filter bags 2 and at least one flapper plate 13 , and a plurality of filter bags 2 are correspondingly arranged within the rotation range of each flapper plate 13 .

In the embodiment of the present invention, one flapping plate 13 is correspondingly provided with a plurality of filter bags 2, and in a unit time, one flapping plate 13 rotates once, and the number of times each filter bag 2 is collided is one time. If the number of the flapping plates 13 is two, in a unit time, the two flapping plates 13 rotate once, and the number of times each filter bag 2 is collided is twice. When the number of filter bags 2 is multiple, the number of flapping plates 13 is increased to increase the number of times the filter bags 2 are collided per unit time, thereby improving the dust removal effect of the device.

Optionally, a plurality of filter bags 2 corresponding to the flapping plate 13 are distributed at equal intervals relative to the flapping plate 13 .

In the embodiment of the present invention, the filter bags 2 are cylindrical, the center of each filter bag 2 can be evenly distributed in a regular polygon, the center of each filter bag 2 can be evenly distributed on the same circumference, or the center of each filter bag 2 Evenly distributed on the arc of the same sector, etc. The uniformly distributed filter bags 2 are correspondingly provided with uniformly distributed filter bag mounting holes 31 on the filter unit fixing plate 3. When processing the filter bag mounting holes 31 on the filter unit fixing plate 3, the staff can process them quickly and conveniently without any trouble. Errors will occur, increasing the productivity of the staff.

As shown in FIG. 5 , the centers of the six filter bags 2 are evenly distributed on the same circular outline, and the distance between every two adjacent filter bags 2 is equal. A beating plate 13 is arranged at the center of the contour, and the beating plate 13 can contact the two filter bags 2 at the same time.

As shown in FIG. 6 , the centers of the three filter bags 2 are evenly distributed in an equilateral triangle, and the distance between every two adjacent filter bags 2 is equal. There is a flapping board 13 there.

As shown in FIG. 7 , the centers of the three filter bags 2 are all located on the same sector arc, and the distance between every two adjacent filter bags 2 is equal. When 13 rotates, each filter bag 2 can be contacted in sequence.

Optionally, the dust cleaning mechanism 1 further includes at least one rotating shaft 11 correspondingly connected with the beating plate 13 , and the rotating shaft 11 drives the corresponding beating plate 13 to rotate.

As shown in FIG. 8 , in the embodiment of the present invention, the dust cleaning mechanism 1 includes at least one rotating shaft 11 , at least one connecting frame 12 and at least one beating plate 13 . A connecting frame 12 is correspondingly arranged on one rotating shaft 11 , and one or more flapping plates 13 are fixed on the connecting frame 12 .

The connecting frame 12 includes a first connecting frame 1201 and a second connecting frame 1202 . One surface of the first connecting frame 1201 is provided with a mounting hole 12011 for fixedly connecting the lower end of the vertically arranged rotating shaft 11 . The other surface of the first connecting frame 1201 is fixedly connected to one surface of the second connecting frame 1202, and the other surface of the second connecting frame 1202 is provided with a slot 12021, and the slot 12021 can be inserted into the beating plate 13. The middle part is fitted in the slot 12021 , and the two sides are exposed to the outside of the second connecting frame 1202 .

The power system 5 is connected with the rotating shaft 11. If the power system 5 is arranged inside the tank body 4, the dust and impurities in the tank body 4 can enter the power system 5 through the heat dissipation port of the power system 5, and the dust and impurities will cause accidents in the power system 5. Shut down, or shorten the working life of the power system 5 . However, the power system 5 is arranged outside the tank body 4, the power system 5 is in a dust-free environment and is conducive to the heat dissipation of the power system 5, the power system 5 can work stably, and is easy to install, reducing the workload and labor intensity of relevant personnel.

In the mechanism of the above-mentioned ash cleaning mechanism, the ash cleaning mechanism 1 also includes a mechanically connected sprocket 14 and a chain 15, the sprocket 14 is mechanically connected with the rotating shaft 11, and the chain 15 is connected end to end and is connected between the plurality of sprockets 14. .

1 , 2 , 9 and 10 , in the embodiment of the present invention, a first rotating shaft 111 , a second rotating shaft 112 , a third rotating shaft 113 , a fourth rotating shaft 114 , a fifth rotating shaft 115 , a Six rotating shafts 116 and seventh rotating shaft 117; first connecting frame 121, second connecting frame 122, third connecting frame 123, fourth connecting frame 124, fifth connecting frame 125, sixth connecting frame 126, seventh connecting frame Frame 127; the first slap plate 131, the second slap plate 132, the third slap plate 133, the fourth slap plate 134, the fifth slap plate 135, the sixth slap plate 136, and the seventh slap plate 137.

The first rotating shaft 111 is correspondingly provided with a first connecting frame 121 and a first beating plate 131; the second rotating shaft 112 is correspondingly provided with a second connecting frame 122 and a second beating plate 132; the third rotating shaft 113 is correspondingly provided with a third connecting frame 123 , the third beating plate 133; the fourth rotating shaft 114 is correspondingly provided with a fourth connecting frame 124 and a fourth beating plate 134; the fifth rotating shaft 115 is correspondingly provided with a fifth connecting frame 125 and a fifth beating plate 135; the sixth rotating shaft 116 The sixth connecting frame 126 and the sixth beating plate 136 are correspondingly provided; the seventh rotating shaft 117 is correspondingly provided with the seventh connecting frame 127 and the seventh beating plate 137 .

The power system 5 is vertically arranged at the top outside the tank body 4 , and the top end of the tank body 4 is provided with an opening for fixedly installing the magnetic fluid sealing mechanism 6 . One end of the magnetic fluid sealing mechanism 6 is connected with the power system 5 through a coupling.

The filter unit fixing plate 3 is provided with at least one through hole 32. As shown in FIG. 4, the lower end of the vertically arranged first rotating shaft 111 is fixed on the mounting hole of the first connecting frame 121, and the upper end of the first rotating shaft 111 passes through A through hole 32 on the filter unit fixing plate 3 is connected to the other end of the magnetic fluid sealing mechanism 6 . A first sprocket 141 is disposed at the upper end of the first rotating shaft 111 .

The lower end of the second rotating shaft 112 is fixed on the mounting hole of the second connecting frame 122 , the upper end of the second rotating shaft 112 passes through another through hole 32 on the filter unit fixing plate 3 , and the upper end of the second rotating shaft 112 is provided with There is a second sprocket 142 .

The lower end of the third rotating shaft 113 is fixed on the mounting hole of the third connecting frame 123 , the upper end of the third rotating shaft 113 passes through another through hole 32 on the filter unit fixing plate 3 , and the upper end of the third rotating shaft 113 is provided with There is a third sprocket 143 .

The lower end of the fourth rotating connecting shaft 114 is fixed on the mounting hole of the fourth connecting frame 124 , the upper end of the fourth rotating shaft 114 passes through another through hole 32 on the filter unit fixing plate 3 , and the upper end of the fourth rotating shaft 114 is A fourth sprocket 144 is provided.

The lower end of the fifth rotating shaft 115 is fixed on the mounting hole of the fifth connecting frame 125 , the upper end of the fifth rotating shaft 115 passes through another through hole 32 on the filter unit fixing plate 3 , and the upper end of the fifth rotating shaft 115 is provided with There is a fifth sprocket 145 .

The lower end of the sixth rotating shaft 116 is fixed on the mounting hole of the sixth connecting frame 126 , the upper end of the sixth rotating shaft 116 passes through another through hole 32 on the filter unit fixing plate 3 , and the upper end of the sixth rotating shaft 116 is provided with There is a sixth sprocket 146 .

The lower end of the seventh rotating shaft 117 is fixed on the mounting hole of the seventh connecting frame 127, the upper end of the seventh rotating shaft 117 passes through another through hole 32 on the filter unit fixing plate 3, and the upper end of the seventh rotating shaft 117 is provided with There is a seventh sprocket 147 .

The first sprocket 141 , the second sprocket 142 , the third sprocket 143 , the fourth sprocket 144 , the fifth sprocket 145 , the sixth sprocket 146 and the seventh sprocket 147 are all located at the same level, and the chain 15 The connection mode of closed chain is adopted to mechanically connect each sprocket in turn.

The rotation of the power system 5 drives the first rotating shaft 111 to rotate, the first rotating shaft 111 drives the first sprocket 141 to rotate, and the first sprocket 141 drives the second sprocket 142 , the third sprocket 143 , and the fourth sprocket 141 through the sprocket 15 . The sprocket 144, the fifth sprocket 145, the sixth sprocket 146 and the seventh sprocket 147 rotate at the same time, the second sprocket 142 drives the second rotating shaft 112 to rotate; the third sprocket 143 drives the third rotating shaft 113 to rotate; The fourth sprocket 144 drives the fourth rotating shaft 114 to rotate; the fifth sprocket 145 drives the fifth rotating shaft 115 to rotate; the sixth sprocket 146 drives the sixth rotating shaft 112 to rotate; the seventh sprocket 147 drives the seventh rotating shaft 117 Rotating, and then each flapping board rotates simultaneously, that is, the first flapping board 131, the second flapping board 132, the third flapping board 133, the fourth flapping board 134, the fifth flapping board 135, the sixth flapping board 136 and the seventh flapping board The plate 137 rotates at the same time.

The chain and sprocket drive mode realizes the synchronous rotation of each rotating shaft, improves the working efficiency of the filter device, reduces the working time of each dust removal, improves the production efficiency and reduces the production cost. The chain transmission mode has no elastic sliding and slipping phenomenon, the average transmission ratio is accurate, the work is reliable, and the efficiency is high; the transmission power is large, the overload capacity is strong, and the transmission size under the same working conditions is small; the required tension force is small, acting on the shaft The pressure on the machine is small; it can work in harsh environments such as high temperature, humidity, dust and pollution.

It should be noted that, in addition to using a chain drive to achieve synchronization, a belt drive can also be used to achieve synchronization. In addition to the synchronous rotation of multiple rotating shafts, each rotating shaft can rotate independently. One rotating shaft corresponds to a power system, and the flapping plate corresponding to each rotating shaft rotates independently. If a certain motor fails, the filter device can also continue the dust removal work. .

In the linkage mode of the above cleaning mechanism, one rotating shaft 11 is located at the center, the other rotating shafts 11 are arranged around the central rotating shaft 11, and the remaining rotating shafts 11 are equiangularly distributed relative to the central rotating shaft 11.

As shown in FIG. 10 , the axis of the second rotating shaft 112 , the axis of the third rotating shaft 113 , the axis of the fourth rotating shaft 114 , the axis of the fifth rotating shaft 115 , and the axis of the sixth rotating shaft 116 The axis of the seventh rotating shaft 117 is distributed in a regular hexagon, and the axis of the first rotating shaft 111 is located at the geometric center of the regular hexagon.

The filter unit corresponding to the first rotating shaft 111 is provided with three filter bags 2 , and the arrangement of the three filter bags 2 relative to the first rotating shaft 111 is similar to that shown in FIG. 6 ;

The filter units corresponding to the third rotating shaft 113 , the fifth rotating shaft 115 and the seventh rotating shaft 117 are all provided with six filter bags 2 , and the six filter bags 2 are opposite to the third rotating shaft 113 , the fifth rotating shaft 115 and the seventh rotating shaft 117 . The arrangement of the rotating shaft 117 is similar to that shown in FIG. 5 ;

The filter units corresponding to the second rotating shaft 112 , the fourth rotating shaft 114 and the sixth rotating shaft 116 are each provided with three filter bags 2 , and the three filter bags 2 are opposite to the second rotating shaft 112 , the fourth rotating shaft 114 , the sixth The arrangement of the rotating shaft 116 is similar to that shown in FIG. 7 ;

The first flapping plate 131 corresponding to the first rotating shaft 111 can collide with the three filter bags 2 corresponding to the first rotating shaft 111 , and can also collide with some filter bags 2 corresponding to the third rotating shaft 113 and the fifth rotating shaft 115 . part of the filter bag 2 and the part of the filter bag 2 corresponding to the seventh rotating shaft 117 .

The second flapping plate 132 corresponding to the second rotating shaft 112 can collide with the three filter bags 2 corresponding to the second rotating shaft 112 , and can also collide with some filter bags 2 corresponding to the first rotating shaft 111 and the third rotating shaft 113 part of the filter bag 2 and the part of the filter bag 2 corresponding to the seventh rotating shaft 117 .

The fourth flapping plate 134 corresponding to the fourth rotating shaft 114 can collide with the three filter bags 2 corresponding to the fourth rotating shaft 114, and can also collide with some of the filter bags 2 corresponding to the first rotating shaft 111 and the third rotating shaft 113. part of the filter bag 2 and the part of the filter bag 2 corresponding to the fifth rotating shaft 115 .

The sixth flapping plate 136 corresponding to the sixth rotating shaft 116 can collide with the three filter bags 2 corresponding to the sixth rotating shaft 116, and can also collide with some filter bags 2 corresponding to the first rotating shaft 111 and the fifth rotating shaft 115. part of the filter bag 2 and the part of the filter bag 2 corresponding to the seventh rotating shaft 117 .

The arrangement of the first rotating shaft 111, the second rotating shaft 112, the third rotating shaft 113, the fourth rotating shaft 114, the fifth rotating shaft 115, the sixth rotating shaft 116 and the seventh rotating shaft 117 increases the impact of the filter bag 2 The frequency of collisions is increased, and the tank body 4 can accommodate more filter bags 2, thereby improving the dust removal effect of the device.

It should be noted that the arrangement of the rotating shaft 11 is determined according to the volume of the tank 2 and the outline of the cross-section, and the arrangement of the rotating shaft 11 should be determined by those skilled in the art according to the actual situation.

Embodiment 2

A vacuuming system for vacuuming a single crystal furnace, comprising a vacuuming device and the filtering device described in any one of Embodiment 1, the filtering device is connected between the single crystal furnace and the vacuuming device, and the vacuuming device is: Oil pump or dry pump.

The above embodiments only illustrate the technical solutions of the invention rather than limit them. Although the present invention is described in detail with reference to the various embodiments, those of ordinary skill in the art should understand that the technical solutions described in the foregoing embodiments can still be used. Modifications are made, or some or all of the technical features are equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A filter device, characterized in that, comprises a tank body, a filter unit and a ash cleaning mechanism, the ash cleaning mechanism and the filter unit are located in the tank body, and the filter unit comprises at least one filter bag, the The ash cleaning mechanism includes a flapping plate, and the flapping plate collides with at least one of the filter bags through rotation. 2 . The filter device according to claim 1 , wherein at least one of the filter bags is arranged along the height direction of the tank body, and the length of the flapping plate along the height direction of the tank body is at least the length of the filter bag. 3 . 50% of the length of the bag, The size of the working condition rotation angle θ of the bending stiffness of the beater plate material is greater than 0° and less than or equal to 45°. 3 . The filter device according to claim 1 , wherein the width of the flapping plate along the direction perpendicular to the height of the tank body covers at least 30% of the corresponding width of the filter bag. 4 . 4 . The filter device according to claim 1 , wherein there are a plurality of the filter bags, at least one of the beating plates, and a plurality of the filtering bags are correspondingly arranged within the rotation range of each of the beating plates. 5 . bag. 5 . The filter device according to claim 1 , wherein a plurality of the filter bags corresponding to the beating plate are distributed at equal intervals relative to the beating plate. 6 . 6. The filter device according to any one of claims 1 to 5, wherein the cleaning mechanism further comprises at least one rotating shaft correspondingly connected with the beating plate, and the rotating shaft drives the corresponding The flapping board rotates. 7. The filter device according to claim 6, wherein the ash cleaning mechanism further comprises a mechanically connected sprocket and a chain, the sprocket is mechanically connected with the rotating shaft, and the chain is connected end to end, connected between a plurality of the sprockets. 8 . The filter device according to claim 7 , wherein, among the plurality of rotating shafts, one of the rotating shafts is located at the center, and the other rotating shafts are arranged around the central rotating shaft, and the other rotating shafts are rotatable. 9 . The axes are equiangularly distributed with respect to the centrally located axis of rotation. 9. A vacuuming system for vacuuming a single crystal furnace, characterized in that it comprises a vacuuming device and the filtering device according to any one of claims 1 to 8, wherein the filtering device is connected to the single crystal furnace and the vacuuming device. 10 . The vacuuming system according to claim 9 , wherein the vacuuming device is an oil pump or a dry pump. 11 .

Images