CN111880584A - Control device for controlling temperature and deformation of three-dimensional rotary table - Google Patents

Abstract

The invention belongs to the technical field of temperature control of vacuum detectors, and in particular relates to a control device for controlling the temperature and deformation of a three-dimensional turntable, comprising a heat insulation device and a temperature control device, wherein the heat insulation device comprises a Heat insulation layer, the heat insulation layer is wrapped around the vacuum detector, and the temperature control device includes a temperature sensor arranged on the vacuum detector, a heat exchange agent, a storage tank for holding the heat exchange agent, distributed and fixed in the vacuum The temperature control sheet at the heat source of the detector, the conduit for connecting each temperature control sheet and the backflow, the power pump connected with the conduit and the storage tank, the temperature sensor is connected with a controller, and the temperature controller is electrically connected The power pump is used to control the flow rate of the heat exchange agent; the temperature control device further includes an auxiliary system for controlling the constant temperature of the heat exchange agent. Through the innovative design of the structure, the present invention not only reduces the influence of thermal deformation on the accuracy of the turntable, but also saves the cost compared with the transmission method, and has good economy.

Description

A control device for controlling the temperature and deformation of a three-dimensional turntable

technical field

The invention belongs to the technical field of temperature control of vacuum detectors, and in particular relates to a control device for controlling the temperature and deformation of a three-dimensional turntable.

Background technique

In the field of aerospace equipment, the addition of materials with low thermal conductivity is a passive temperature control technology, and the method of using a temperature control sheet to pass a heat exchange agent is an active temperature control technology. Passive temperature control technology does not have the ability to independently adjust the temperature; active temperature control technology adjusts the temperature of the equipment through an autonomously controllable adjustment system, but the system is more complex, with insufficient reliability, short life and heavy weight. For traditional temperature control systems, passive heat exchange is generally used, and heat exchange agents such as air with a small specific heat capacity are used, which makes the heat exchange effect poor and cannot meet the temperature control requirements required for high-precision work.

SUMMARY OF THE INVENTION

In order to solve the problems raised in the above background art. The invention provides a control device for controlling the temperature and deformation of a three-dimensional turntable, and the specific scheme is as follows:

A control device for controlling the temperature and deformation of a three-dimensional turntable, comprising a heat insulation device and a temperature control device, the heat insulation device comprises a heat insulation layer made of heat insulation material, and the heat insulation layer is wrapped around a vacuum detector , the temperature control device includes a temperature sensor provided on the vacuum detector, a heat exchange agent, a storage tank for holding the heat exchange agent, and temperature control sheets fixed at the heat source of the vacuum detector for connecting each temperature a control sheet, a conduit for backflow, a power pump connected to the conduit and the storage tank, the temperature sensor is connected with a controller, and the temperature controller is electrically connected to the power pump for controlling the flow of the heat exchange agent; the controller The thermostat also includes an auxiliary system for controlling the constant temperature of the heat exchanger.

Preferably, the auxiliary system includes a thermoelectric cooling chip body and a heating wire disposed between the liquid inlet of the temperature control chip and the liquid outlet of the power pump, and the thermoelectric cooling chip body and the heating wire are respectively electrically connected to the controller.

Preferably, the temperature control sheet includes two first rectangular temperature control sheets respectively arranged at two symmetrical positions I and VI, and two second rectangular temperature control sheets respectively arranged at two symmetrical positions II and III, respectively. The third temperature control sheet located at position Ⅴ, position VI, and position VII, respectively, is set at the annular temperature control sheet at position VIII, position IX, and position Ⅹ.

Preferably, the heat insulating material is a polyimide with a low thermal conductivity of 1×10 ^-4 W/m·K and a thickness of 2 to 5 mm.

Compared with the prior art, the beneficial effects of the present invention are: the present invention realizes the control of the temperature of the turntable by setting up a heat insulation system, setting temperature control sheets at each corresponding position of the turntable, and controlling the flow rate of the heat exchange agent in the temperature control sheets. control and regulation. Through the innovative design of the structure, the present invention not only reduces the influence of thermal deformation on the accuracy of the turntable, but also saves the cost compared with the transmission method, and has good economy.

Description of drawings

The accompanying drawings are used to provide a further understanding of the present invention, and constitute a part of the specification, and are used to explain the present invention together with the embodiments of the present invention, and do not constitute a limitation to the present invention. In the attached image:

Fig. 1 is the temperature control sheet arrangement diagram of the present invention;

Figure 2 is a schematic structural diagram of a temperature control device;

In the figure: 1, position I; 2, position II; 3, position III; 4, position IV; 5, position V; 6, position VI; 7, position VII; 8, position VIII; 9, position IX; 10, Position X; 11. Power pump; 12. Thermoelectric refrigeration sheet body; 13. Heating wire; 14. Temperature control sheet group connected in series with temperature control sheets; 15. Storage tank;

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

Example

1-2, the present invention provides the following technical solutions: a control device for controlling the temperature and deformation of a three-dimensional turntable, including a heat insulation device and a temperature control device, and the heat insulation device includes a heat insulation device made of a heat insulation material. Heat insulation layer, the heat insulation layer is wrapped around the vacuum detector, and the temperature control device includes a temperature sensor arranged on the vacuum detector, a heat exchange agent, a storage tank for holding the heat exchange agent, distributed and fixed in the vacuum The temperature control sheet at the heat source of the detector, the conduit for connecting each temperature control sheet and the backflow, the power pump connected with the conduit and the storage tank, the temperature sensor is connected with a controller, and the temperature controller is electrically connected The power pump is used to control the flow rate of the heat exchange agent; the temperature control device further includes an auxiliary system for controlling the constant temperature of the heat exchange agent. Specifically, the temperature control sheet includes two first rectangular temperature control sheets respectively arranged at two symmetrical positions I and VI, and two second rectangular temperature control sheets respectively arranged at two symmetrical positions, position II and position III, The third temperature control sheet is set at position Ⅴ, position VI and position VII respectively, and the annular temperature control sheet is set at position VIII, position IX and position Ⅹ respectively.

The working principle and use process of the present invention: the temperature control system is wrapped outside the turntable structure. The temperature control sheet is close to the wall of the turntable and is covered with heat insulating material. The sensor is also close to the wall and is arranged between the temperature control sheets. The temperature control sheet is connected end to end through the conduit, and is fixed at the corresponding position of the three-dimensional turntable with screws, which can absorb the heat generated by the heat source. When the temperature sensor senses the temperature change of the three-dimensional turntable, the controller controls the power pump to adjust the temperature of the temperature control sheet. and heat exchange agent flow, so that the temperature of the three-dimensional turntable tends to be constant. At this time, the power pump is a variable pump or a combination of a flow valve and a traditional hydraulic pump, and the technical means is the prior art. Further, in order to reduce the noise on the control caused by the excessive temperature change of the heat exchange agent when it flows through the temperature control sheet again after heat exchange, the inventors included a liquid inlet on the temperature control sheet in the auxiliary system. The thermoelectric refrigerating sheet body and heating wire between the power pump liquid outlet, the thermoelectric refrigerating sheet body and the heating wire are respectively electrically connected to the controller, and the temperature of the heat exchange medium is kept constant by means of the thermoelectric refrigerating sheet, which greatly reduces the The difficulty of the control of the present invention is eliminated. On the basis of the above principle, the control accuracy is 20±2℃. The high-precision turntable structure is symmetrical in X and Y axes, the heat source layout is symmetrical, and the temperature control layout is also symmetrical, so it can achieve high temperature control accuracy. Due to the high precision of temperature control, the resulting small thermal deformation will not affect the accuracy of the turntable.

Specifically, the heat insulating material is polyimide with a low thermal conductivity of 1×10 ⁻⁴ W/m·K and a thickness of 2˜5 mm. As shown in Figure 2, the temperature is -173 ℃ and 60 ℃ in the external environment and the use of extremely low thermal conductivity 1×10 ^-4 W/m·K and polyimide material layer with a thickness of 2 ~ 5mm to remove the load platform The rest of the turntable outside is wrapped, and the turntable temperature is 20 °C. Polyimide is a high-performance thermal insulation material to reduce heat conduction. The thermal insulation layer is a multi-layer structure composed of polyimide and porous material cross-stacked. The polyimide material reduces heat conduction, and the porous material layer can reduce heat radiation due to its porous structure; the thermal insulation layer has a high heat reflection rate and a low emissivity, which can reduce radiation heat exchange in a vacuum environment

Finally, it should be noted that the above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, it is still The technical solutions described in the foregoing embodiments may be modified, or some technical features thereof may be equivalently replaced. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims (6)

1. A control device for controlling the temperature and deformation of a three-dimensional turntable, comprising a thermal insulation device and a temperature control device, wherein the thermal insulation device comprises a thermal insulation layer made of thermal insulation material, and the thermal insulation device The vacuum detector is wrapped in layers, and the temperature control device includes a temperature sensor arranged on the vacuum detector, a heat exchange agent, a storage tank for holding the heat exchange agent, and a temperature control sheet distributed and fixed at the heat source of the vacuum detector. , for connecting each temperature control sheet and the conduit for return flow, a power pump connected with the conduit and the storage tank, the temperature sensor is connected with a controller, and the temperature controller is electrically connected to the power pump for controlling the heat exchange agent The temperature control device also includes an auxiliary system for controlling the constant temperature of the heat exchange agent. 2 . The control device for controlling the temperature and deformation of the three-dimensional turntable according to claim 1 , wherein the auxiliary system comprises a liquid inlet port arranged between the liquid inlet of the temperature control sheet and the liquid outlet of the power pump. 3 . The thermoelectric cooling sheet body and the heating wire are respectively electrically connected to the controller. 3. A control device for controlling the temperature and deformation of a three-dimensional turntable according to claim 1, wherein the temperature control sheet comprises two first rectangular temperature plates respectively arranged on two symmetrical positions I and VI. Control sheets, two second rectangular temperature control sheets respectively set at two symmetrical positions, position II and position III, and third temperature control sheets, respectively set at position V, position VI, and position VII, respectively set at position VIII and position VII. Ⅸ, Ring temperature control sheet at position Ⅹ. 4 . The control device for controlling the temperature and deformation of a three-dimensional turntable according to claim 1 , wherein the heat insulating material is a low thermal conductivity coefficient of 1×10 ^-4 W/m·K and a thickness of 2. 5 . ~5mm polyimide. 5. A control device for controlling the temperature and deformation of a three-dimensional turntable according to any one of claims 1-4, wherein the heat exchange agent is a mixture of pure water and ethylene glycol, wherein pure The proportion of water is 35% to 45%. 6 . The control device for controlling the temperature and deformation of a three-dimensional turntable according to claim 4 , wherein the heat insulating layer is a multi-layer structure composed of polyimide and porous materials cross-stacked. 7 .

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