CN111822063B - Microfluidic chip, manufacturing method thereof and microfluidic device - Google Patents
Microfluidic chip, manufacturing method thereof and microfluidic device Download PDFInfo
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- CN111822063B CN111822063B CN201910312524.7A CN201910312524A CN111822063B CN 111822063 B CN111822063 B CN 111822063B CN 201910312524 A CN201910312524 A CN 201910312524A CN 111822063 B CN111822063 B CN 111822063B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
- B01L2300/0864—Configuration of multiple channels and/or chambers in a single devices comprising only one inlet and multiple receiving wells, e.g. for separation, splitting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/12—Specific details about materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
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Abstract
The invention discloses a micro-fluidic chip, a manufacturing method thereof and a micro-fluidic device, comprising the following steps: the electrochromic device comprises a first substrate, a second substrate, a first electrode layer, an electrochromic layer, an insulating layer and a second electrode layer, wherein the first substrate and the second substrate are oppositely arranged; the insulating layer comprises a plurality of micro-flow channels penetrating through the insulating layer in the thickness direction; the orthographic projection of the electrochromic layer on the first substrate at least covers a part of the area where the microfluidic channel is located. Through the arrangement of the structure, voltage is applied to the first electrode layer and the second electrode layer, when the conductive fluid flows into the microfluidic channel, a closed conduction loop is formed among the first electrode layer, the electrochromic layer, the second electrode layer and the conductive fluid, the electrochromic layer reacts under the action of the voltage, and the color changes, so that the current position and the moving path of the conductive fluid can be displayed in real time.
Description
Technical Field
The invention relates to the technical field of microfluidics, in particular to a microfluidic chip, a manufacturing method thereof and a microfluidic device.
Background
The micro-fluidic chip technology integrates basic operation units of sample preparation, reaction, separation, detection and the like in the biological, chemical and medical analysis process into a micron-scale chip, and automatically completes the whole analysis process. With the application of the micro-fluidic chip technology in the fields of medicine, life science and the like, a micro-channel structure and other functional elements of the chip are integrated on a substrate with the square centimeters, and fluid in the micro-channel is controlled to realize a micro total analysis system with multiple functions of sample introduction, dilution, mixing, reaction, separation, detection and the like, so that the micro total analysis system has the remarkable advantages of miniaturization, integration, high analysis speed, low reagent consumption and the like.
In the related art, the operation of the digital microfluidics on the liquid can be accurate to each liquid drop, the target reaction can be completed by using less reagent amount, and the control on the reaction rate and the reaction progress is more accurate. However, the digital microfluidic chip in the related art only has a droplet driving function, and cannot monitor the position and the moving path of the droplet, that is, in the actual experiment process, the digital microfluidic chip cannot confirm whether the droplet moves according to the preset path, and for some reactions with complex moving paths, once the phenomena such as droplet stagnation and the like occur, the final experiment product or experiment result is necessarily affected, which is not beneficial to the application and popularization of the digital microfluidic product and technology in the complex biochemical reactions.
Therefore, how to monitor the position and path of the conductive fluid in the microfluidic chip is a technical problem to be solved urgently by those skilled in the art.
Disclosure of Invention
The invention provides a micro-fluidic chip, a manufacturing method thereof and a micro-fluidic device, which are used for solving the problem that the micro-fluidic chip cannot effectively monitor the position and the path of a conductive fluid in the related technology.
The embodiment of the invention provides a microfluidic chip, which comprises: the electrochromic device comprises a first substrate, a second substrate, a first electrode layer, an electrochromic layer, an insulating layer and a second electrode layer, wherein the first substrate and the second substrate are oppositely arranged, and the first electrode layer, the electrochromic layer, the insulating layer and the second electrode layer are sequentially stacked in the direction of the first substrate pointing to the second substrate;
the insulating layer comprises a plurality of micro-flow channels which penetrate through the thickness direction of the insulating layer and are used for bearing the conductive fluid;
the orthographic projection of the electrochromic layer on the first substrate at least covers part of the orthographic projection of the area where the microfluidic channel is located on the first substrate.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, an orthogonal projection of the electrochromic layer on the first substrate only covers an orthogonal projection of an area where all of the microfluidic channels are located on the first substrate.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, the electrochromic layer further includes: a support structure;
the orthographic projection of the support structure on the first substrate and the orthographic projection of the microfluidic channel on the first substrate are not overlapped.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, an orthogonal projection of the electrochromic layer on the first substrate covers an orthogonal projection of the insulating layer on the first substrate.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, the insulating layer further includes: the reaction cavity is communicated with the corresponding microfluidic channel;
the orthographic projection of the electrochromic layer on the first substrate at least covers the orthographic projection of the area where the reaction cavity is located on the first substrate.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, at least a color of the electrochromic layer corresponding to a portion of the reaction chamber is different from a color of the electrochromic layer corresponding to another region.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, the first substrate is a transparent substrate, and the first electrode layer is a transparent electrode.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, the microfluidic chip further includes: an ion storage layer located between the electrochromic layer and the microfluidic channel;
the ion storage layer and the electrochromic layer are made of electrochromic materials with opposite polarities.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, the microfluidic chip further includes: an ion transport layer between the electrochromic layer and the ion storage layer.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, the microfluidic chip further includes: an ion transport layer positioned between the electrochromic layer and the microfluidic channel.
In a possible implementation manner, in the microfluidic chip provided in the embodiment of the present invention, the material of the electrochromic layer includes: tungsten trioxide, polythiophene and derivatives thereof, viologen, tetrathiafulvalene and metal phthalocyanine compounds or a combination thereof.
In another aspect, an embodiment of the present invention provides a method for manufacturing a microfluidic chip, including:
respectively providing a second substrate and a first substrate;
sequentially forming a second electrode layer and an insulating layer on one side, facing the first substrate, of the second substrate, and forming a plurality of micro-flow channels in the insulating layer;
sequentially forming a first electrode layer and an electrochromic layer on one side of the first substrate, which faces the second substrate;
and aligning the first substrate and the second substrate to form the microfluidic chip.
In a possible implementation manner, in the method for manufacturing a microfluidic chip provided in an embodiment of the present invention, the method further includes:
and sequentially forming an ion transmission layer and an ion storage layer on one side of the electrochromic layer, which is far away from the first substrate.
On the other hand, the embodiment of the invention also provides a microfluidic device, which comprises the microfluidic chip in any one of the above embodiments.
The invention has the following beneficial effects:
the embodiment of the invention provides a micro-fluidic chip, a manufacturing method thereof and a micro-fluidic device, wherein the micro-fluidic chip comprises: the electrochromic device comprises a first substrate, a second substrate, a first electrode layer, an electrochromic layer, an insulating layer and a second electrode layer, wherein the first substrate and the second substrate are oppositely arranged, and the first electrode layer, the electrochromic layer, the insulating layer and the second electrode layer are sequentially stacked in the direction of the first substrate pointing to the second substrate; the insulating layer comprises a plurality of micro-flow channels which penetrate through the thickness direction of the insulating layer and are used for bearing the conductive fluid; the orthographic projection of the electrochromic layer on the first substrate at least covers a part of the area where the microfluidic channel is located. Through the arrangement of the structure, voltage is applied to the first electrode layer and the second electrode layer, when the conductive fluid flows into the microfluidic channel, a closed conduction loop is formed among the first electrode layer, the electrochromic layer, the second electrode layer and the conductive fluid, the electrochromic layer reacts under the action of the voltage, and the color changes, so that the current position and the moving path of the conductive fluid can be displayed in real time.
Drawings
Fig. 1 is a schematic structural diagram of a microfluidic chip according to an embodiment of the present invention;
fig. 2 is a second schematic structural diagram of a microfluidic chip according to an embodiment of the present invention;
fig. 3 is a schematic top view of a microfluidic chip according to an embodiment of the present invention;
fig. 4 is a second schematic top view of a microfluidic chip according to an embodiment of the present invention;
fig. 5 is a third schematic structural diagram of a microfluidic chip according to an embodiment of the present invention;
fig. 6 is a fourth schematic structural diagram of a microfluidic chip according to an embodiment of the present invention;
fig. 7 is a flowchart of a method for manufacturing a microfluidic chip according to an embodiment of the present invention.
Detailed Description
The embodiment of the invention provides a microfluidic chip, a manufacturing method thereof and a microfluidic device, aiming at the problem that the position and the path of a conductive fluid cannot be observed in the microfluidic chip in the related art. In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The shapes and sizes of the various elements in the drawings are not to scale and are merely intended to illustrate the invention.
An embodiment of the present invention provides a microfluidic chip, as shown in fig. 1, the microfluidic chip includes: the electrochromic device comprises a first substrate 1 and a second substrate 2 which are oppositely arranged, and a first electrode layer 3, an electrochromic layer 4, an insulating layer 5 and a second electrode layer 6 which are sequentially stacked in the direction from the first substrate 1 to the second substrate 2;
the insulating layer 5 comprises a plurality of micro-flow channels 51 penetrating through the insulating layer 5 in the thickness direction, and the micro-flow channels 51 are used for bearing the conductive fluid; the insulating layer is made of Polydimethylsiloxane (PDMS), and the PDMS has good chemical inertness, so that the PDMS becomes a polymer material widely applied to the field of microfluidic chips;
an orthographic projection of the electrochromic layer 4 on the first substrate 1 covers at least a part of the area where the microfluidic channel 51 is located.
Specifically, in the microfluidic chip provided in the embodiment of the present invention, by setting the above structure, a voltage is applied to the first electrode layer and the second electrode layer, when the conductive fluid flows into the microfluidic channel, a closed conductive loop is formed between the first electrode layer, the electrochromic layer, the second electrode layer, and the conductive fluid, the electrochromic layer reacts under the action of the voltage, and the color changes, and since the first substrate and the first electrode layer are set as transparent layers, the current position and the moving path of the conductive fluid can be observed in real time from the first substrate side; when no conductive fluid flows into the microfluidic channel, the insulating layer is arranged between the electrochromic layer and the second electrode layer, even if voltage is applied to the first electrode layer and the second electrode layer, a closed loop cannot be formed, namely, the color of the electrochromic layer at the position where the conductive fluid does not flow through does not change, and the position of the conductive fluid can be determined through sharp contrast of the color, so that whether the conductive fluid moves according to a preset path or not can be better determined, and the experimental requirement can be met.
Specifically, the occurrence time period of the reaction can be predicted in advance by observing the current position and the path of the conductive fluid, so that the important moment is not missed, and particularly, the waiting time can be shortened when an emergency test is required; if the corresponding position is not reached within the regular time, it can be predicted in advance that an abnormal situation may occur.
At least the first substrate is a transparent substrate, at least the first electrode layer is a transparent electrode, the transparent substrate can be transparent glass or other transparent substrates, the transparent electrode can be indium tin oxide, aluminum-doped zinc oxide and the like, of course, the second substrate can also be a transparent substrate, and the second electrode layer can also be a transparent electrode.
Specifically, in the microfluidic chip provided by the embodiment of the present invention, the electrochromic layer changes color, and a low dc voltage is applied to the first electrode layer and the second electrode layer, so that an oxidation-reduction reaction occurs in the electrochromic material in the electrochromic layer under the action of the voltage, and the color of the electrochromic layer changes.
The conductive fluid mentioned in the embodiments of the present invention is a fluid having conductivity, and the fluid may be a flowing liquid or a flowing liquid bead, and specifically, how to select the conductive fluid is specifically selected according to experimental conditions, and is not specifically limited herein.
Alternatively, in the microfluidic chip provided in the embodiment of the present invention, as shown in fig. 2, an orthogonal projection of the electrochromic layer 4 on the first substrate 1 only covers the area where all of the microfluidic channels 51 are located.
Specifically, in the microfluidic chip provided in the embodiment of the present invention, the electrochromic layer may be disposed only at a position corresponding to the microfluidic channel, and when the conductive fluid flows into the microfluidic channel, only a position corresponding to the microfluidic channel may have a color change.
Optionally, in the microfluidic chip provided in the embodiment of the present invention, as shown in fig. 2, the electrochromic layer further includes: a support structure 7;
the orthographic projection of the support structure 7 on the first substrate 1 and the orthographic projection of the microfluidic channel 51 on the first substrate 1 do not overlap.
Specifically, in the microfluidic chip provided in the embodiment of the present invention, the electrochromic layer may be disposed only in a region corresponding to a part of the microfluidic channel, and the electrochromic layer may be disposed at a key position of the microfluidic channel to control a reaction key node; in order to ensure the stability of the whole assembly, after the first electrode layer is manufactured, the supporting layer can be manufactured by adopting an exposure and etching process, then an etching blank area is formed in the supporting layer, the electrochromic layer is manufactured in the blank area, for example, the electrochromic layer can be arranged in an array manner, wherein the electrochromic layer with different colors from other areas can be arranged at a preset key point, for example, the electrochromic layer corresponding to a key reaction cavity or a transition cavity can be arranged as a red electrochromic layer, the electrochromic layer corresponding to other areas can be arranged as a green electrochromic layer, and the key positions of the microfluidic chip can be obviously characterized.
Alternatively, in the microfluidic chip provided in the embodiment of the present invention, as shown in fig. 1, an orthogonal projection of the electrochromic layer 4 on the first substrate 1 covers an orthogonal projection of the insulating layer 5 on the first substrate 1.
Specifically, in the microfluidic chip provided by the embodiment of the present invention, in order to simplify a manufacturing process of the electrochromic layer, the electrochromic layer may be arranged in a whole layer, and patterning of the electrochromic layer may not be required, so that a manufacturing process is simplified.
Optionally, in the microfluidic chip provided in the embodiment of the present invention, the insulating layer further includes: the reaction cavity is communicated with the corresponding microfluidic channel;
the orthographic projection of the electrochromic layer on the first substrate at least covers the orthographic projection of the area where the part of the reaction cavity is located on the first substrate.
Specifically, in the microfluidic chip provided in the embodiment of the present invention, as shown in fig. 3 and 4, the microfluidic chip includes, in addition to the microfluidic channels 51 arranged according to the preset rule, a liquid inlet a1, a transition chamber a2, a reaction chamber a3, and a liquid outlet a4, where only a part of the reaction chambers are shown in the drawing, and the reaction chambers may be arranged in an array, in order to observe the key reaction chamber a3, an electrochromic layer may be disposed at a position corresponding to the key reaction chamber a3, and of course, an electrochromic layer may be disposed at a position corresponding to all the reaction chambers a3, and the positions are selected according to practical application conditions, and are not specifically limited herein.
The microfluidic chip shown in fig. 3 has a plurality of reaction chambers a3, each microfluidic channel 51 is communicated with one reaction chamber a3, the microfluidic chip shown in fig. 4 has one reaction chamber a3, the microfluidic channels 51 are communicated with one reaction chamber a3, and different microfluidic chips are selected according to actual needs.
Optionally, in the microfluidic chip provided in the embodiment of the present invention, as shown in fig. 5 and 6, the microfluidic chip further includes: an ion storage layer 8 located between the electrochromic layer 4 and the microfluidic channel 51;
the ion storage layer 8 and the electrochromic layer 4 are made of electrochromic materials with opposite polarities.
Specifically, in the microfluidic chip provided by the embodiment of the present invention, the ion storage layer plays an ion balance role for providing and storing ions required for color change, and an electrochromic material with a color change property opposite to that of the material of the electrochromic layer is generally adopted, so that a color superposition or complementary role can be played.
Optionally, in the microfluidic chip provided in the embodiment of the present invention, the material of the electrochromic layer includes: cathodic reduction of the electrochromic material;
the material of the ion storage layer includes: the electrochromic material is anodized.
Specifically, in the microfluidic chip provided in the embodiment of the present invention, the material of the electrochromic layer includes: tungsten trioxide, polythiophene and derivatives thereof, viologen, tetrathiafulvalene and metal phthalocyanine compounds or a combination thereof.
Optionally, in the microfluidic chip provided in the embodiment of the present invention, as shown in fig. 5 and 6, the microfluidic chip further includes: an ion transport layer 9 located between the electrochromic layer 4 and the ion storage layer 8.
Specifically, in the microfluidic chip provided in the embodiment of the present invention, the ion transport layer is an electrolyte layer, which may be one of a gel state electrolyte or a solid state electrolyte, and plays a role in ion transport.
Optionally, in the microfluidic chip provided in the embodiment of the present invention, when the microfluidic chip is not provided with an ion storage layer, the ion transport layer is located between the electrochromic layer and the microfluidic channel; when the micro-fluidic chip is provided with the ion storage layer, the ion transmission layer is arranged between the ion storage layer and the electrochromic layer.
In addition to the above, the microfluidic chip provided in the embodiment of the present invention, as shown in fig. 1, further includes: and the frame sealing glue structure 10 is positioned between the first substrate 1 and the second substrate 2 and is used for packaging the microfluidic chip.
Wherein, as shown in fig. 1, the portion of the left side of the first electrode layer 3 beyond the second substrate 2 represents a first electrode lead connected to the first electrode layer 3, so as to be connected to a circuit structure (not specifically shown in the figure) disposed at the edge for driving the first electrode layer 3; similarly, the portion of the second electrode layer 6 on the right side beyond the first substrate 1 represents a second electrode lead connected to the second electrode layer 6, and is convenient for connecting to a circuit structure (not specifically shown in the figure) arranged at the edge for driving the second electrode layer 6. Specifically, fig. 1 illustrates an example in which the first electrode lead and the second electrode lead are respectively located at the left side and the right side of the microfluidic chip, but of course, the first electrode lead and the second electrode lead may also be located at one side of the microfluidic chip, and are selected according to actual design conditions, and are not limited specifically here.
Based on the same inventive concept, the embodiment of the present invention further provides a method for manufacturing a microfluidic chip, as shown in fig. 7, including:
s701, respectively providing a second substrate and a first substrate;
s702, sequentially forming a second electrode layer and an insulating layer on one side, facing the first substrate, of the second substrate, and forming a plurality of micro-flow channels in the insulating layer;
s703, sequentially forming a first electrode layer and an electrochromic layer on one side of the first substrate facing the second substrate;
and S704, aligning the first substrate and the second substrate to form the microfluidic chip.
There is no sequential order between step S702 and step S703, and any step may be performed before or simultaneously, and the steps are selected according to actual situations, and are not specifically limited herein.
Optionally, in the method for manufacturing a microfluidic chip provided in the embodiment of the present invention, the method further includes:
and an ion transmission layer and an ion storage layer are sequentially formed on one side, away from the first substrate, of the electrochromic layer.
Based on the same inventive concept, the embodiment of the invention also provides a microfluidic device, which comprises the microfluidic chip provided by any one of the embodiments.
The microfluidic device comprises a microfluidic chip, a power supply for providing voltage for each microfluidic electrode, and a processor for controlling the applied voltage, wherein except the microfluidic chip provided by the embodiment, other parts are all arranged on the basis of the related microfluidic device, and the arrangement and the function of the other parts are the same as those of the related technology, and are not described in detail herein.
The embodiment of the invention provides a micro-fluidic chip, a manufacturing method thereof and a micro-fluidic device, wherein the micro-fluidic chip comprises: the electrochromic device comprises a first substrate, a second substrate, a first electrode layer, an electrochromic layer, an insulating layer and a second electrode layer, wherein the first substrate and the second substrate are oppositely arranged, and the first electrode layer, the electrochromic layer, the insulating layer and the second electrode layer are sequentially stacked in the direction of the first substrate pointing to the second substrate; the insulating layer comprises a plurality of micro-flow channels which penetrate through the thickness direction of the insulating layer and are used for bearing the conductive fluid; the orthographic projection of the electrochromic layer on the first substrate at least covers a part of the area where the microfluidic channel is located. Through the arrangement of the structure, voltage is applied to the first electrode layer and the second electrode layer, when the conductive fluid flows into the microfluidic channel, a closed conduction loop is formed among the first electrode layer, the electrochromic layer, the second electrode layer and the conductive fluid, the electrochromic layer reacts under the action of the voltage, and the color changes, so that the current position and the moving path of the conductive fluid can be displayed in real time.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (14)
1. A microfluidic chip, comprising: the electrochromic device comprises a first substrate, a second substrate, a first electrode layer, an electrochromic layer, an insulating layer and a second electrode layer, wherein the first substrate and the second substrate are oppositely arranged, and the first electrode layer, the electrochromic layer, the insulating layer and the second electrode layer are sequentially stacked in the direction of the first substrate pointing to the second substrate;
the insulating layer comprises a plurality of micro-flow channels which penetrate through the thickness direction of the insulating layer and are used for bearing the conductive fluid;
the orthographic projection of the electrochromic layer on the first substrate at least covers part of the orthographic projection of the area where the microfluidic channel is located on the first substrate.
2. The microfluidic chip according to claim 1, wherein an orthographic projection of the electrochromic layer on the first substrate covers only an orthographic projection of an area where all of the microfluidic channels are located on the first substrate.
3. The microfluidic chip of claim 2, wherein the electrochromic layer further comprises: a support structure;
the orthographic projection of the support structure on the first substrate and the orthographic projection of the microfluidic channel on the first substrate are not overlapped.
4. The microfluidic chip of claim 1, wherein an orthographic projection of the electrochromic layer on the first substrate covers an orthographic projection of the insulating layer on the first substrate.
5. The microfluidic chip of claim 1, further comprising within the insulating layer: the reaction cavity is communicated with the corresponding microfluidic channel;
the orthographic projection of the electrochromic layer on the first substrate at least covers the orthographic projection of the area where the reaction cavity is located on the first substrate.
6. The microfluidic chip according to claim 5, wherein the color of the electrochromic layer corresponding to at least a portion of the reaction chamber is different from the color of the electrochromic layer corresponding to other regions.
7. The microfluidic chip according to claim 1, wherein the first substrate is a transparent substrate, and the first electrode layer is a transparent electrode.
8. The microfluidic chip of any of claims 1-7, further comprising: an ion storage layer located between the electrochromic layer and the microfluidic channel;
the ion storage layer and the electrochromic layer are made of electrochromic materials with opposite polarities.
9. The microfluidic chip of claim 8, further comprising: an ion transport layer between the electrochromic layer and the ion storage layer.
10. The microfluidic chip of any of claims 1-7, further comprising: an ion transport layer positioned between the electrochromic layer and the microfluidic channel.
11. The microfluidic chip according to any of claims 1 to 7, wherein the electrochromic layer comprises a material selected from the group consisting of: tungsten trioxide, polythiophene and derivatives thereof, viologen, tetrathiafulvalene and metal phthalocyanine compounds or a combination thereof.
12. A method of fabricating a microfluidic chip according to any one of claims 1 to 11, comprising:
respectively providing a second substrate and a first substrate;
sequentially forming a second electrode layer and an insulating layer on one side, facing the first substrate, of the second substrate, and forming a plurality of micro-flow channels in the insulating layer;
sequentially forming a first electrode layer and an electrochromic layer on one side of the first substrate, which faces the second substrate;
and aligning the first substrate and the second substrate to form the microfluidic chip.
13. The method of fabricating a microfluidic chip according to claim 12, further comprising:
and sequentially forming an ion transmission layer and an ion storage layer on one side of the electrochromic layer, which is far away from the first substrate.
14. A microfluidic device comprising a microfluidic chip according to any one of claims 1 to 11.
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