CN111632950A - Dry ice cleaning device - Google Patents
Dry ice cleaning device Download PDFInfo
- Publication number
- CN111632950A CN111632950A CN202010408541.3A CN202010408541A CN111632950A CN 111632950 A CN111632950 A CN 111632950A CN 202010408541 A CN202010408541 A CN 202010408541A CN 111632950 A CN111632950 A CN 111632950A
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- Prior art keywords
- pipe
- dry ice
- ice
- spray gun
- injection pipe
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
- B08B7/0092—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling
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- Cleaning In General (AREA)
Abstract
The invention provides a dry ice cleaning device which comprises a dry ice spray gun and an auxiliary movement device, wherein the auxiliary movement device comprises a supporting lifting rod, a horizontal rotating mechanism, a horizontal telescopic mechanism, a spray gun frame and a swinging mechanism, the horizontal rotating mechanism is positioned on the supporting lifting rod, the horizontal telescopic mechanism is connected with the horizontal rotating mechanism, the spray gun frame is connected with the horizontal telescopic mechanism through a guide rail moving platform, the swinging mechanism is positioned on the spray gun frame, and the dry ice spray gun is installed on the swinging mechanism. The invention can carry out all-round cleaning operation on different types of post insulators in the transformer substation.
Description
Technical Field
The invention relates to the technical field of dry ice cleaning, in particular to a dry ice cleaning device.
Background
The accumulated dirt on the surface of the insulator is a main factor influencing the external insulation of the electrical equipment and is also a main reason for pollution flashover, if the dirt on the surface of the insulator can be timely removed, the pollution flashover accident of the insulator can be effectively prevented, and the method has important significance for ensuring the safe and stable operation of a power system. The development direction that equipment cleaned is electrified and cleans, because along with the improvement of electric wire netting transmission capacity and voltage class, the number of times that primary equipment has a power failure is less and less, and the time is shorter and shorter, expects to have a power failure to clean primary equipment and will become more and more difficult, only realizes electrified cleaning, just can accomplish to clean at any time, should sweep and can sweep, guarantees that equipment insulating surface is clean, ensures equipment safe operation.
The existing electrified dry ice cleaning method is characterized in that the existing electrified dry ice cleaning method is to mix an ejector with compressed air and then spray the mixture on the surface of an object to be cleaned, so that dirt on the surface to be cleaned is stripped and removed, and the method has the advantages of realizing electrified cleaning, having good cleaning effect, not damaging the cleaned equipment, having no secondary pollution and the like. However, because the heights of the post insulators in the transformer substation are often different and the insulators are of a columnar structure, the cleaning nozzle of the conventional dry ice cleaning device only faces one direction and cannot perform all-dimensional dead-angle-free live cleaning on the insulators. In addition, of particular importance in dry ice cleaning systems are dry ice blasting components, i.e., spray guns. For a spray gun for pneumatic particle spraying, the higher the gas flow speed at the outlet of the spray gun, the better the solid particle speed, and simultaneously, shock waves cannot occur in an airflow field; while the gas flow velocity and solid particle velocity are affected by system gas supply pressure, lance configuration, particle properties, etc., for a fixed pressure and particle properties, more improvements in the configuration of the lance are necessary to achieve higher gas flow and particle velocities.
Disclosure of Invention
The invention aims to overcome the defect that the existing dry ice cleaning device cannot carry out all-dimensional cleaning on a post insulator, and provides the dry ice cleaning device. The invention can carry out all-round cleaning operation on the post insulators with different heights in the transformer substation.
In order to solve the technical problems, the invention adopts the technical scheme that: the utility model provides a dry ice cleaning device, wherein, includes dry ice spray gun and auxiliary motion device, auxiliary motion device is including supporting lifter, horizontal rotation mechanism, horizontal telescopic machanism, spray gun frame and swing mechanism, horizontal rotation mechanism is located support on the lifter, horizontal telescopic machanism with horizontal rotation mechanism connects, spray gun frame passes through guide rail moving platform and connects on the horizontal telescopic machanism, swing mechanism is located on the spray gun frame, the dry ice spray gun is installed on the swing mechanism. Support the lifter among this technical scheme and can change the height of dry ice spray gun, adapt to the not insulator of co-altitude, horizontal rotating mechanism and horizontal telescopic machanism can change the distance between dry ice spray gun and the insulator, can let the dry ice spray gun arrive near waiting to wash the insulator, and guide rail moving platform can let the dry ice spray gun encircle the washing around the insulator, and swing mechanism can assist the swing of dry ice spray gun, lets follow swing mechanism and carry out wobbling dry ice spray gun and wash the insulator.
Further, the dry ice spray gun includes venturi injection pipe, vacuum seat, supplies ice pipe and air supply pipe, the vacuum seat is located the entrance point of venturi injection pipe, supply ice pipe and air supply pipe to be located the inside of vacuum seat, supply ice pipe and air supply pipe with the entrance point intercommunication of venturi injection pipe. Air enters the air supply pipe through the air supply long pipe through the high-pressure pump, dry ice sprayed from the ice supply pipe and high-pressure air sprayed from the air supply pipe are mixed at the inlet end of the venturi injection pipe, the dry ice and the high-pressure air are sprayed out from the venturi injection pipe at an accelerated speed, and dry ice particles are enabled to be rapidly sublimated after impacting the surface of an object to be cleaned under the action of high speed and pressure difference, so that cleaning is realized. The vacuum seat is a vacuum layer structure arranged around the inlet end of the Venturi injection pipe, because the dry ice sprayed from the ice supply pipe is in contact with the Venturi injection pipe, the temperature of the Venturi injection pipe drops suddenly, the water vapor on the surface of the inlet end of the Venturi injection pipe can freeze and condense, the weight of the dry ice spray gun is increased, the dry ice spray gun is not beneficial to moving the dry ice spray gun, after the vacuum seat is added, the surface of the inlet end of the Venturi injection pipe is isolated from the air, the freezing and condensation of the water vapor on the surface of the inlet end of the Venturi injection pipe in the air are reduced, and the weight increase of the dry ice spray gun is avoided.
Furthermore, a pitching adjusting mechanism is arranged at the joint of the horizontal rotating mechanism and the supporting lifting rod, the horizontal rotating mechanism is connected to the pitching adjusting mechanism, and the pitching adjusting mechanism is connected to the supporting lifting rod. The pitching adjusting mechanism can help the horizontal rotating mechanism to change the connection angle with the supporting lifting rod.
Further, guide rail moving platform includes arc guide rail, mobile station and linear guide, the arc guide rail is fixed horizontal telescopic machanism keeps away from horizontal rotary mechanism's one end, be equipped with the rack on the arc guide rail, the mobile station through with rack complex gear and guide rail supporting shoe activity set up on the arc guide rail, linear guide establishes the top of mobile station, the activity of spray gun frame sets up on the linear guide. The horizontal rotating mechanism and the horizontal telescopic structure enable the guide rail moving platform to move, so that the arc-shaped track surrounds the insulator to be cleaned, the dry ice spray gun on the moving platform on the arc-shaped guide rail moves around the insulator to be cleaned, which is equivalent to circumferential motion, and meanwhile, the dry ice spray gun moves on the linear guide rail, which is equivalent to radial motion; and the insulator to be cleaned is cleaned at multiple angles by matching the circumferential motion and the radial motion of the dry ice spray gun.
Furthermore, the swing mechanism comprises a swing cylinder and a swing support, the swing cylinder is installed on the spray gun frame, an output shaft of the swing cylinder is connected with the swing support, and the dry ice spray gun is fixed on the swing support. Furthermore, the venturi injection pipe comprises an injection pipe nozzle, an injection pipe throat and an injection pipe ice inlet, and the injection pipe throat is located between the injection pipe nozzle and the injection pipe ice inlet. Calculation and practice show that the air injection speed of the Venturi injection pipe is higher, the cleaning effect is more ideal and the shot blasting is more uniform under the same working condition with the common straight pipe nozzle. In the Venturi injection pipe, the speed of particles at a target position is used as an index to measure the cleaning performance, the cleaning capacity of the injection pipe is reduced along with the increase of the contraction angle of an ice inlet of the injection pipe, improved along with the increase of the pipe diameter of a throat of the injection pipe, improved along with the increase of the length of the throat of the injection pipe, improved along with the increase of the spread angle of a spray head of the injection pipe, improved along with the increase of the horizontal length of the spray head of the injection pipe and reduced along with the increase of the horizontal length of the ice inlet of the injection pipe.
Furthermore, the venturi injection pipe comprises an injection pipe nozzle, an injection pipe throat and an injection pipe ice inlet, and the injection pipe throat is located between the injection pipe nozzle and the injection pipe ice inlet. Calculation and practice show that the air injection speed of the Venturi injection pipe is higher, the cleaning effect is more ideal and the shot blasting is more uniform under the same working condition with the common straight pipe nozzle. In the Venturi injection pipe, the speed of particles at a target position is used as an index to measure the cleaning performance, the cleaning capacity of the injection pipe is reduced along with the increase of the contraction angle of an ice inlet of the injection pipe, improved along with the increase of the pipe diameter of a throat of the injection pipe, improved along with the increase of the length of the throat of the injection pipe, improved along with the increase of the spread angle of a spray head of the injection pipe, improved along with the increase of the horizontal length of the spray head of the injection pipe and reduced along with the increase of the horizontal length of the ice inlet of the injection pipe.
Further, the ice inlet of the injection pipe is formed by connecting a first section of ice inlet pipe and a second section of ice inlet pipe, the contraction angle of the first section of ice inlet pipe is 13 degrees, the horizontal length of the first section of ice inlet pipe is 20mm, the contraction angle of the second section of ice inlet pipe is 14 degrees, the horizontal length of the second section of ice inlet pipe is 30mm, the contraction pipe diameter of the second section of ice inlet pipe is 36mm, and the second section of ice inlet pipe is connected with the throat pipe of the injection pipe.
Further, the inner surface of the first section of the ice inlet pipe is fully provided with threads. The screw thread is provided for connecting the ice supply pipe.
Further, the inner diameter of the throat of the jet pipe is 36mm, and the length of the throat of the jet pipe is 268 mm. The injection pipe shower nozzle includes first section open pipe and second section open pipe, the contained angle of first section open pipe is 3, and horizontal length is 25mm, the contained angle of second section open pipe is 4, and horizontal length is 33mm, the one end of second open pipe with first section open union coupling, the other end of second open pipe with injection pipe throat union coupling. The size parameter of the technical scheme is the optimal combined value, the venturi injection pipe under the parameter can obtain the highest air flow and dry ice particle speed, and the cleaning effect of the insulator is good.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the dry ice spray gun can clean different types of post insulators in the transformer substation in an all-round manner through the supporting lifting rod, the horizontal rotating mechanism, the horizontal telescopic mechanism and the pitching adjusting mechanism;
2. according to the invention, through the matching of the arc-shaped guide rail, the linear guide rail, the mobile station and the swing mechanism, the dry ice spray gun can move circumferentially and radially around the post insulator, and can swing up and down to clean the insulator in all directions;
3. the invention adopts the Venturi injection pipe, and designs and modifies the specific structure and size of the Venturi injection pipe, so that the speed of air flow and particles injected by the Venturi injection pipe is high, and the cleaning effect is good.
Drawings
Fig. 1 is a schematic overall structure diagram of the first embodiment.
Fig. 2 is a partial schematic view of fig. 1 at a.
Fig. 3 is a schematic structural view of a dry ice blast gun in the first embodiment.
FIG. 4 is a schematic structural view of a venturi ejector tube in the second embodiment.
Fig. 5 is a schematic structural view of an injection pipe head in a second embodiment.
FIG. 6 is a schematic view of the structure of the throat of the ejector tube in the second embodiment.
FIG. 7 is a schematic structural view of an ice inlet of the ejector tube in the second embodiment.
The graphic symbols are illustrated as follows:
1-supporting lifting rods, 2-pitching adjusting mechanisms, 3-horizontal rotating mechanisms, 4-horizontal telescoping mechanisms, 5-dry ice spray guns, 501-spray pipe spray heads, 502-spray pipe throats, 503-air supply pipes, 504-vacuum seats, 505-spray pipe ice inlet ports, 506-ice supply pipes, 6-moving tables, 7-gears, 8-guide rail supporting blocks, 9-linear guide rails, 10-spray gun frames, 11-swinging cylinders, 12-swinging supports and 13-arc guide rails.
Detailed Description
The present invention will be further described with reference to the following embodiments. Wherein the showings are for the purpose of illustration only and are shown by way of illustration only and not in actual form, and are not to be construed as limiting the present patent; to better illustrate the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar components; in the description of the present invention, it should be understood that if there is an orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. based on the orientation or positional relationship shown in the drawings, it is only for convenience of describing the present invention and simplifying the description, but it is not intended to indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and are not to be construed as limiting the present patent, and the specific meaning of the terms may be understood by those skilled in the art according to specific circumstances.
First embodiment
Fig. 1 to 3 show an embodiment of a dry ice cleaning device according to the present invention. The utility model provides a dry ice belt cleaning device, wherein is including supporting lifter 1, horizontal rotation mechanism 3, horizontal telescopic machanism 4, spray gun rack 10 and swing mechanism, horizontal rotation mechanism 3 is connected on supporting lifter 1 through every single move adjustment mechanism 2, horizontal telescopic machanism 4 is connected with horizontal rotation mechanism 3, spray gun rack 10 passes through guide rail moving platform and connects on horizontal telescopic machanism 4, swing mechanism is located spray gun rack 10, the dry ice spray gun is installed on swing mechanism. The support lifting rod 1, the horizontal rotating mechanism 3, the horizontal telescopic mechanism 4 and the pitching adjusting mechanism 2 help the dry ice spray gun to move to the vicinity of insulators at different positions.
The dry ice spray gun comprises a Venturi injection pipe, a vacuum seat 504, an ice supply pipe 506 and an air supply pipe 503, wherein the vacuum seat 504 is positioned at the inlet end of the Venturi injection pipe, the ice supply pipe 506 and the air supply pipe 503 are positioned inside the vacuum seat 504, and the ice supply pipe 506 and the air supply pipe 503 are communicated with the inlet end of the Venturi injection pipe. The air supply pipe 503 supplies high-speed air to be mixed with the dry ice particles supplied by the ice supply pipe 506, the high-speed air and the dry ice particles are sprayed out in the venturi spraying pipe in an accelerating manner, and under the action of high speed and pressure difference, the dry ice particles are quickly sublimated after impacting the surface of the object to be cleaned, so as to be cleaned; the vacuum mount 504 is a vacuum layer structure at the inlet end of the venturi ejector tube to prevent the surface of the inlet end of the venturi ejector tube from directly contacting the air, which may cause the water vapor in the air to freeze and condense on the surface of the inlet end of the venturi ejector tube.
In this embodiment, the guide rail moving platform includes arc guide rail 13, mobile station 6 and linear guide 9, arc guide rail 13 is fixed at the end of horizontal telescopic machanism 4, be equipped with the rack on arc guide rail 13, mobile station 6 passes through gear 7 and the activity of guide rail supporting shoe 8 sets up on arc guide rail 13, the top of mobile station 6 is equipped with linear guide 9, spray gun rack 10 activity sets up on linear guide 9, swing mechanism includes swing cylinder 11 and swing bracket 12, swing cylinder 11 installs on spray gun rack 10, swing cylinder 11's output shaft connection swing bracket 12, the dry ice spray gun is fixed on swing bracket 12. The mobile station 6 is connected to the arc-shaped track 13 through the guide rail supporting block 8, the gear 7 is matched with a rack on the arc-shaped guide rail 13, the mobile station 6 moves on the arc-shaped guide rail 13, the horizontal telescopic mechanism 4 and the horizontal rotating mechanism 3 move the arc-shaped guide rail 13 to the position near the insulator, and the mobile station 6 moves on the arc-shaped guide rail 13 as the arc-shaped guide rail 13 surrounds the insulator after moving, namely a dry ice spray gun circumferentially moves around the insulator; the movement of the spray gun rack 10 on the linear guide rail 9 is equivalent to that the dry ice spray gun performs radial motion around the insulator, and as the insulator is vertically installed in the power system, the dry ice spray gun on the swing bracket 12 needs to be driven by the swing cylinder 11 to swing up and down, and under the cooperation of circumferential motion and radial motion, the dry ice spray gun cleans the insulator up and down in all directions.
The working principle of the embodiment is as follows: a worker moves a dry ice spray gun to the position near an insulator to be cleaned in a power grid system through the supporting lifting rod 1, the horizontal rotating mechanism 3, the horizontal telescopic machine 4 and the pitching adjusting mechanism 2, the arc-shaped guide rail 13 surrounds the insulator to be cleaned, the dry ice spray gun performs circumferential motion and radial motion on the arc-shaped guide rail 13 and the linear guide rail 9 around the insulator, and the swinging mechanism helps the dry ice spray gun to swing up and down to perform omnibearing cleaning on the insulator; the dry ice spray gun of the embodiment adopts the venturi jet pipe, so that dry ice provided by the ice supply pipe 506 and pressurized air provided by the air supply pipe 503 are mixed and accelerated to be sprayed out through the venturi jet pipe, and dry ice particles are quickly sublimated after impacting the surface of an object to be cleaned under the action of high speed and pressure difference to perform cleaning work.
Second embodiment
Referring to fig. 4-7, an embodiment of a dry ice cleaning device according to the present invention is shown, which is similar to the first embodiment except that it defines the structure and dimensions of a venturi jet nozzle including a jet nozzle tip 501, a jet nozzle throat 502, and a jet nozzle ice inlet 505, with jet nozzle throat 502 being located between dry jet nozzle tip 501 and jet nozzle ice inlet 505 in detail. Calculation and practice show that the venturi ejector pipe has higher air injection speed, more ideal cleaning effect and more uniform shot blasting compared with a common straight pipe nozzle under the same working condition.
In this embodiment, as shown in fig. 7, the ice inlet 505 of the spray pipe is formed by connecting a first section of ice inlet pipe and a second section of ice inlet pipe, the contraction angle of the first section of ice inlet pipe is 13 °, the horizontal length L5 is 20mm, the contraction angle γ of the second section of ice inlet pipe is 14 °, the horizontal length L4 is 30mm, the diameter of the contraction port Φ 1 of the second section of ice inlet pipe is 36mm, and the contraction port of the second section of ice inlet pipe is connected with the throat 502 of the spray pipe. As shown in FIG. 6, the inner tube diameter φ 1 of the jet throat 502 is 36mm, and the length L3 is 268 mm. As shown in FIG. 5, the nozzle 501 comprises a first open pipe section having an expansion angle β of 3 °, a horizontal length L1 of 25mm, and a second open pipe section having an expansion angle α of 4 °, a horizontal length L2 of 33mm, one end of which is connected to the first open pipe section, and the other end of which is connected to the throat 502 of the nozzle.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. The utility model provides a dry ice belt cleaning device, its characterized in that includes dry ice spray gun and auxiliary motion device, auxiliary motion device is including supporting lifter, horizontal rotation mechanism, horizontal telescopic machanism, spray gun frame and swing mechanism, horizontal rotation mechanism is located support on the lifter, horizontal telescopic machanism with horizontal rotation mechanism connects, the spray gun frame passes through guide rail moving platform and connects on the horizontal telescopic machanism, swing mechanism is located on the spray gun frame, the dry ice spray gun install swing mechanism is last.
2. A dry ice cleaning device according to claim 1, wherein: the dry ice spray gun comprises a Venturi injection pipe, a vacuum seat, an ice supply pipe and an air supply pipe, wherein the vacuum seat is located at the inlet end of the Venturi injection pipe, the ice supply pipe and the air supply pipe are located in the vacuum seat, and the ice supply pipe and the air supply pipe are communicated with the inlet end of the Venturi injection pipe.
3. A dry ice cleaning device according to claim 1, wherein: the horizontal rotating mechanism is connected with the pitching adjusting mechanism, and the pitching adjusting mechanism is connected to the supporting lifting rod.
4. A dry ice cleaning device according to claim 3, wherein: the guide rail moving platform comprises an arc-shaped guide rail, a moving platform and a linear guide rail, wherein the arc-shaped guide rail is fixed at one end of the horizontal telescopic mechanism far away from the horizontal rotary mechanism, a rack is arranged on the arc-shaped guide rail, the moving platform is movably arranged on the arc-shaped guide rail through a gear matched with the rack and a guide rail supporting block, the linear guide rail is arranged at the top of the moving platform, and a spray gun rack is movably arranged on the linear guide rail.
5. A dry ice cleaning device according to claim 4, wherein: the swing mechanism comprises a swing cylinder and a swing support, the swing cylinder is installed on the spray gun frame, an output shaft of the swing cylinder is connected with the swing support, and the dry ice spray gun is fixed on the swing support.
6. A dry ice cleaning device according to claim 2, wherein: the venturi injection pipe comprises an injection pipe spray head, an injection pipe throat and an injection pipe ice inlet, and the injection pipe throat is located between the injection pipe spray head and the injection pipe ice inlet.
7. A dry ice cleaning device according to claim 6, wherein: the ice inlet of the injection pipe is formed by connecting a first section of ice inlet pipe and a second section of ice inlet pipe, the contraction angle of the first section of ice inlet pipe is 13 degrees, the horizontal length of the first section of ice inlet pipe is 20mm, the contraction angle of the second section of ice inlet pipe is 14 degrees, the horizontal length of the second section of ice inlet pipe is 30mm, the contraction pipe diameter of the second section of ice inlet pipe is 36mm, and the second section of ice inlet pipe is connected with the throat pipe of the injection pipe.
8. A dry ice cleaning device according to claim 7, wherein: the inner surface of the first section of the ice inlet pipe is fully provided with threads.
9. A dry ice cleaning device according to claim 7, wherein: the inner pipe diameter of the throat of the jet pipe is 36mm, and the length of the throat of the jet pipe is 268 mm.
10. A dry ice cleaning device according to claim 9, wherein: the injection pipe shower nozzle includes first section open pipe and second section open pipe, the contained angle of first section open pipe is 3, and horizontal length is 25mm, the contained angle of second section open pipe is 4, and horizontal length is 33mm, the one end of second open pipe with first section open union coupling, the other end of second open pipe with injection pipe throat union coupling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010408541.3A CN111632950A (en) | 2020-05-14 | 2020-05-14 | Dry ice cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010408541.3A CN111632950A (en) | 2020-05-14 | 2020-05-14 | Dry ice cleaning device |
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| CN111632950A true CN111632950A (en) | 2020-09-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN202010408541.3A Pending CN111632950A (en) | 2020-05-14 | 2020-05-14 | Dry ice cleaning device |
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| CN (1) | CN111632950A (en) |
Cited By (3)
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| CN112317430A (en) * | 2020-10-29 | 2021-02-05 | 张方娥 | Track cleaning equipment |
| CN112934850A (en) * | 2021-01-26 | 2021-06-11 | 泉芯集成电路制造(济南)有限公司 | Photomask impurity removing apparatus and photomask impurity removing method |
| CN113731982A (en) * | 2021-09-01 | 2021-12-03 | 北京德高洁清洁设备有限公司 | Reation kettle cleaning machine |
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| CN113731982A (en) * | 2021-09-01 | 2021-12-03 | 北京德高洁清洁设备有限公司 | Reation kettle cleaning machine |
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Application publication date: 20200908 |