CN111562038A - Flexible capacitive pressure sensor and flexible capacitive pressure array sensor - Google Patents
Flexible capacitive pressure sensor and flexible capacitive pressure array sensor Download PDFInfo
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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Abstract
The invention provides a flexible capacitive pressure sensor and a flexible capacitive pressure array sensor, and relates to the technical field of sensors. The flexible capacitive pressure sensor comprises an upper flexible substrate, an upper electrode, an upper insulating glue layer, a pressure sensitive layer, a lower insulating glue layer, a lower electrode and a lower flexible substrate which are sequentially arranged. The upper flexible substrate and the lower flexible substrate are silk membranes or silk/polyurethane composite membranes. The pressure sensitive layer is an elastomer composite film doped with conductive fillers. The dielectric constant of the pressure sensitive layer is greatly improved by adding the conductive filler, and the sensitivity of the obtained pressure sensor is also greatly improved and the stability is better because the dielectric constant is changed under the condition of pressure. In addition, the invention also provides a flexible capacitive pressure array sensor, which is used for sensing the contact interaction force among the flexible contact interface, the curved surface and the irregular contact interface.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a flexible capacitive pressure sensor and a flexible capacitive pressure array sensor.
Background
In recent years, with the rapid development of wearable products, flexible sensor assemblies have become one of the hot topics explored by researchers. Among them, the flexible pressure sensor has received a wide attention especially, and has a very broad market prospect in the fields including electronic skin, flexible touch screen, intelligent robot and medical health.
Currently, research into flexible pressure sensors may be based on a variety of operating principles, including primarily capacitive, resistive, and piezoelectric. In order to meet the requirement of the flexible sensor for detecting the micro pressure signal of the human body, the detection sensitivity of the sensor needs to be improved. Most of the existing researches are carried out by carrying out structural design on the surface of an elastomer and adopting the principle of a parallel plate capacitor
For a prepared pressure sensor with a fixed shape, the electrode area of the sensor is unchanged, the larger the distance Δ d between the electrode plates is, the larger the capacitance change Δ C is, and this is the principle of improving the sensitivity by surface structuring. The electrical signal of the pressure sensor is greatly changed under the pressure condition through the surface structured design, however, the structured design increases the complexity of the process, increases the preparation cost, and is difficult to ensure the consistency of the surface microstructure in each die-reversing process. The use of sensors is limited by the fact that large areas of pressure-sensitive material cannot be obtained by surface structuring.
Disclosure of Invention
The invention aims to provide a flexible capacitive pressure sensor which has the advantages of good flexibility, good stability, high sensitivity and the like, and the dielectric constant and the distance between polar plates are changed under the condition of pressure.
Another object of the present invention is to provide a flexible capacitive pressure array sensor, which can sense the contact interaction force between a flexible contact interface, a curved surface and an irregular contact interface.
The technical problem to be solved by the invention is realized by adopting the following technical scheme.
The invention provides a flexible capacitive pressure sensor which comprises an upper flexible substrate, an upper electrode, an upper insulating glue layer, a pressure sensitive layer, a lower insulating glue layer, a lower electrode and a lower flexible substrate which are sequentially arranged; wherein the upper flexible substrate and the lower flexible substrate are silk membranes or silk/polyurethane composite membranes; the pressure sensitive layer is an elastomer composite film doped with conductive fillers.
Further, in a preferred embodiment, the thickness of the pressure sensitive layer is 80-110 μm, and the thickness of the flexible capacitive pressure sensor is less than or equal to 300 μm.
Further, in a preferred embodiment, the pressure sensitive layer has microscopic and mesoscopic capacitances formed therein.
Further, in a preferred embodiment, the conductive filler is selected from one or more of carbon-based conductive substance, conductive polymer, metal oxide, metal nanowire and metal nanoparticle; the carbon-based conductive substance is selected from one or more of single-layer graphene, multi-layer graphene, carbon black, single-walled carbon nanotubes and multi-walled carbon nanotubes, and the conductive polymer is selected from one or more of poly (3, 4-ethylenedioxythiophene) with acidic or neutral pH value, polystyrene sulfonic acid, polyaniline, polythiophene and polypyrrole.
Further, in preferred embodiments, the elastomer in the elastomer composite film is selected from one or more of polydimethylsiloxane, polyurethane, and polybutylene adipate/terephthalate blends.
Further, in a preferred embodiment, the conductive filler and the elastomer are mixed by grinding or solvent dispersion.
Further, in a preferred embodiment, the insulating adhesive layer is disposed by dispensing.
The invention also provides a flexible capacitive pressure array sensor, which is prepared according to the following steps:
arranging a plurality of column electrodes arranged at intervals on an upper flexible substrate, wherein each column electrode comprises a column electrode connecting line and a plurality of upper electrodes arranged on the column electrode connecting line at intervals, and the column electrode connecting line extends to a row lead port;
an upper insulating glue layer, a pressure sensitive layer and a lower insulating glue layer are sequentially arranged on each upper electrode;
arranging a plurality of row electrodes arranged at intervals on a lower flexible substrate, wherein each column electrode comprises a row electrode connecting line and a plurality of lower electrodes arranged on the row electrode connecting line at intervals and corresponding to the upper electrodes, and the row electrode connecting line extends to a row lead port;
combining the row electrodes with the lower insulating glue layer to form a flexible capacitive pressure array sensor, wherein the positions of the lower electrodes and the upper electrodes correspond to each other one by one during combination to form a plurality of array electrode areas; wherein the upper flexible substrate and the lower flexible substrate are both silk/polyurethane composite films; the pressure sensitive layer is an elastomer composite film doped with conductive fillers.
Further, in a preferred embodiment, the upper flexible substrate is a square sheet structure, and the column electrodes are obtained by magnetron sputtering on the upper flexible substrate layer through a mask.
Further, in a preferred embodiment, the lower flexible substrate is configured to be cut to fit the shape of the row electrodes.
The flexible capacitive pressure sensor and the flexible capacitive pressure array sensor have the advantages that:
the pressure sensor is a capacitance pressure sensor, a pressure sensitive layer material is obtained by doping a certain amount of conductive filler in elasticity, the dielectric constant of the material is changed under a compression state, and the dielectric constant of the material is as high as 64.2 under 100 Hz. The obtained pressure sensor has the advantages that under the condition of compression, the dielectric constant and the distance between the polar plates are changed, and therefore the flexible capacitive pressure sensor with high sensitivity is obtained. The sensor can detect the vibration of the throats of breathing, speaking, drinking, coughing and the like, and can be used for the change of the tiny pressure of the human body.
In addition, the flexible pressure array sensor can be well attached between curved surfaces or other irregular contact interfaces, and plays a vital role in sensing dynamic distribution information.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a flexible capacitive pressure sensor according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an equivalent circuit of a flexible capacitive pressure array sensor in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of a flexible capacitive pressure array sensor according to an embodiment of the present invention with column electrodes formed on an upper flexible substrate;
FIG. 4 is a schematic structural view of an upper insulating glue layer, a pressure sensitive layer and a lower insulating glue layer formed on the structure of FIG. 3;
fig. 5 is a schematic structural diagram of a flexible capacitive pressure array sensor formed by combining a lower flexible substrate provided with a lower electrode on the structure of fig. 4.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. The examples, in which specific conditions are not specified, were conducted under conventional conditions or conditions recommended by the manufacturer. The reagents or instruments used are not indicated by the manufacturer, and are all conventional products available commercially.
The flexible capacitive pressure sensor and the flexible capacitive pressure array sensor according to the embodiments of the present invention are specifically described below.
Referring to fig. 1, an embodiment of the invention provides a flexible capacitive pressure sensor 10, which includes an upper flexible substrate 101, an upper electrode 102, an upper insulating glue layer 103, a pressure sensitive layer 104, a lower insulating glue layer 105, a lower electrode 106, and a lower flexible substrate 107, which are sequentially disposed.
In the present embodiment, the upper flexible substrate 101 and the lower flexible substrate 107 are selected from a silk film or a silk/polyurethane composite film. The silk membrane is regenerated silk fibroin membrane. The silk fibroin is a natural biological protein, has good biocompatibility, biodegradability and optical performance, is compounded with polyurethane, takes the silk/polyurethane composite membrane as a flexible substrate, and has the advantages of small skin irritation, good flexibility, high wound surface cell growth speed, low price and the like.
In one embodiment, the flexible substrate is silk membrane, and the silk membrane is prepared by the following steps: cutting clean silkworm cocoon, degumming in sodium bicarbonate solution, cleaning silkworm cocoon, and repeating for 3 times. Soaking in 60 deg.C deionized water for 20min, and repeating for 3 times to obtain silk fibroin fiber. Dissolving silk fibroin fibers by using LiBr, soaking for 6 hours to obtain a tawny silk fibroin solution dissolved by the LiBr, and finally dialyzing in deionized water for 48 hours to obtain a regenerated silk fibroin solution. The regenerated silk fibroin solution is dried in a constant temperature and humidity box to obtain the regenerated silk fibroin film which is used as a flexible substrate.
In one embodiment, the flexible substrate is a silk/polyurethane composite film, and the preparation method of the silk/polyurethane composite film comprises the following steps: cutting clean silkworm cocoon, degumming in sodium bicarbonate solution, cleaning silkworm cocoon, and repeating for 3 times. Soaking in 60 deg.C deionized water for 20min, and repeating for 3 times to obtain silk fibroin fiber. Dissolving silk fibroin fibers by using LiBr, soaking for 6 hours to obtain a tawny silk fibroin solution dissolved by the LiBr, and finally dialyzing in deionized water for 48 hours to obtain a regenerated silk fibroin solution. Mixing the regenerated silk fibroin solution with 10 wt% of polyurethane solution according to the mass ratio of 5:1, and performing ultrasonic dispersion uniformly to obtain a mixed solution. Pouring the mixed solution on a substrate, standing for 4 hours in a constant temperature and humidity box with the temperature of 45 ℃ and the relative humidity of 60%, and drying and curing to obtain the silk/polyurethane composite membrane. The silk fibroin and the polyurethane are blended, so that the flexibility and the toughness of the flexible substrate are better, the packaging protection effect of the sensor is achieved, and the biocompatibility is good.
Further, the upper insulating glue layer 103 and the lower insulating glue layer 105 are formed by insulating glue through a glue dispensing manner. The insulating glue is selected from polyester, epoxy, polyurethane, polybutadiene acids, organic silicon, polyesterimide and polyimide insulating glue. The whole sensor still keeps good flexibility after the insulating glue is bonded.
In the present embodiment, the pressure sensitive layer 104 is an elastomer composite film doped with a conductive filler. In a preferred embodiment, the conductive filler is selected from one or more of carbon-based conductive material, conductive polymer, metal oxide, metal nanowire and metal nanoparticle. Wherein the carbon-based conductive substance is selected from one or more of single-layer graphene, multi-layer graphene, carbon black, single-walled carbon nanotubes and multi-walled carbon nanotubes.
Further, in a preferred embodiment, the conductive polymer is selected from one or more of poly (3, 4-ethylenedioxythiophene) having an acidic or neutral pH, polystyrenesulfonic acid, polyaniline, polythiophene, and polypyrrole.
Further, in a preferred embodiment, the elastomer in the elastomer composite film is selected from one or more of Polydimethylsiloxane (PDMS), Polyurethane (PU), and polybutylene adipate/terephthalate blend (Ecoflex).
Further preferably, in the embodiment, the conductive fillers include conductive fillers with high aspect ratio and conductive fillers with low aspect ratio, the conductive fillers with low aspect ratio do not agglomerate in the elastomer composite film to form micro capacitance, and the conductive fillers with high aspect ratio agglomerate in the elastomer composite film to form a conductive phase structure with mesoscopic size (10-30 μm) to form mesoscopic capacitance between each other. Preferably, in this embodiment, the conductive filler is multi-walled carbon nanotubes. Further preferably, the multi-walled carbon nanotubes comprise high-aspect-ratio multi-walled carbon nanotubes with aspect ratios of 80-120 and low-aspect-ratio carbon nanotubes with aspect ratios of 5-20.
Further, in the present embodiment, the mass fraction of the conductive filler in the elastomer composite film is 10 to 20%. By adjusting the dosage of the conductive filler, the elastic composite material reaches a state close to but not yet conductive, and the dielectric property of the elastic composite film reaches the best. At this level, the dielectric constant of the pressure sensitive layer 104The number is up to 64.2 at 100Hz, and the sensitivity of the prepared sensor is up to 3.8kPa-1。
Further, in a preferred embodiment, the thickness of the pressure sensitive layer 104 is 80-110 μm, and the thickness of the entire flexible capacitive pressure sensor is less than or equal to 300 μm. The thickness of the pressure sensitive layer 104 and the entire pressure sensor is controlled so that the product has good flexibility and can be bent and deformed to fit the skin well.
Further, in a preferred embodiment, the conductive filler and elastomer are mixed by grinding or solvent dispersion. Preferably, in this embodiment, the specific steps of preparing the pressure-sensitive layer are: PDMS is used as an elastomer, multi-walled carbon nanotubes (MWCNTs) are used as a conductive filler, and the weight ratio of PDMS is determined by taking a stock solution: the curing agent is prepared from the following components in percentage by mass: 1, dispersing multi-arm carbon nanotubes (MWCNTs) and mixed PDMS, uniformly grinding, vacuumizing for 30min to obtain a MWCNTs/PDMS mixed solution, and scraping and coating the mixed solution on plane glass to obtain the MWCNTs/PDMS composite material, namely the pressure-sensitive layer 104.
Further, in a preferred embodiment, the material of the upper electrode and the lower electrode may be selected from a material of a combination of one or more of gold, platinum, nickel, silver, indium, and conductive carbon. The upper electrode and the lower electrode may be formed on the flexible substrate by printing, magnetron sputtering, or the like.
The invention also provides a flexible capacitive pressure array sensor, which is prepared according to the following steps:
s1, disposing a plurality of spaced apart column electrodes 302 on the upper flexible substrate 301, each column electrode 302 including a column electrode connecting line 303 and a plurality of upper electrodes 304 spaced apart on the column electrode connecting line 303, the column electrode connecting line 303 extending to the row lead port 306. Referring to fig. 3, in the present embodiment, the upper flexible substrate is a square sheet structure, and the column electrodes 302 are obtained by magnetron sputtering on the upper flexible substrate 301.
S2, an upper insulating glue layer, a pressure sensitive layer 401 and a lower insulating glue layer are sequentially disposed on each upper electrode 304. The materials of the upper insulating glue layer, the lower insulating layer and the pressure sensitive layer 401 are as described above for the arrangement of the flexible capacitive pressure sensor 10.
S3, disposing a plurality of spaced row electrodes 501 on the lower flexible substrate, where each row electrode 501 includes a row electrode connecting line 502 and a plurality of lower electrodes 503 spaced on the row electrode connecting line 502. The lower electrode 503 is disposed at a position corresponding to the position of the upper electrode 304. The row electrode connections 502 extend to row lead ports 505.
S4, combining the row electrodes 501 with the lower insulating adhesive layer to form a flexible capacitive pressure array sensor, and corresponding the positions of the lower electrodes 503 and the upper electrodes 304 one by one during the combination to form a plurality of array electrode regions 201. The array electrode regions 201 are connected by electrode wires 202 into a pressure array sensor.
Preferably, in step S3, the entire piece of flexible substrate is cut to fit the shape of the row electrodes 501. I.e. the lower flexible substrate only covers the corresponding area of the row electrode 501. This setting makes array sensor can better adapt to irregular structures such as curved surface, and is more accurate to the sensing of dynamic distribution information.
Example 1
The present embodiment provides a flexible capacitive pressure sensor, which is manufactured according to the following steps:
(1) preparation of the pressure sensitive layer: PDMS was prepared as stock solution: curing agent 10: 1, dispersing the MWCNTs and the mixed PDMS, grinding uniformly, vacuumizing for 30min, and then scraping and coating the MWCNTs/PDMS mixed solution on plane glass to obtain the MWCNTs/PDMS composite material. Wherein the mass fraction of MWCNTs/PDMS is 17%.
(2) Preparation of flexible substrate: cutting clean silkworm cocoon, degumming in sodium bicarbonate solution, cleaning silkworm cocoon, and repeating for 3 times. Soaking in 60 deg.C deionized water for 20min, and repeating for 3 times to obtain silk fibroin fiber. Dissolving silk fibroin fibers by using LiBr, soaking for 6 hours to obtain a tawny silk fibroin solution dissolved by the LiBr, and finally dialyzing in deionized water for 48 hours to obtain a regenerated silk fibroin solution. And drying the regenerated silk fibroin solution in a constant temperature and humidity box to obtain the regenerated silk fibroin flexible substrate.
(3) Preparing electrodes on a flexible substrate: and (3) cutting the label paper into an electrode shape by laser cutting to be used as a mask plate, sticking the mask plate on the surface of the flexible substrate obtained in the step (2), then coating a layer of conductive carbon oil in a scraping way, drying for 24 hours at room temperature, and tearing off the label paper to obtain the electrode.
4) The flexible substrate with the electrodes and the pressure sensitive layer are assembled into a sandwich structure flexible capacitive pressure sensor shown in fig. 1 by using insulating glue.
The sensitivity of the pressure sensor was measured to be 3.8kPa-1。
Example 2
The present embodiment provides a flexible capacitive pressure sensor, which is different from embodiment 1 in that polyaniline is used as a conductive polymer in a pressure sensitive layer, and the mass fraction of the polyaniline is 17%.
The sensitivity of the pressure sensor was measured to be 2.1kPa-1。
Example 3
This embodiment provides a flexible capacitive pressure sensor which is different from embodiment 1 in that the mass fraction of the conductive polymer in the pressure-sensitive layer is 8%.
The sensitivity of the pressure sensor was measured to be 1.8kPa-1。
Example 4
The present embodiment provides a flexible capacitive pressure array sensor, which is manufactured according to the following steps:
(1) a laser-cut 4 x 4 array electrode mask was attached to a flexible substrate (see preparation procedure in example 1) and a silver electrode was obtained by magnetron sputtering. The flexible pressure sensitive layer is cut into a square shape that substantially conforms to the silver electrodes. The pressure-sensitive layer (see preparation procedure of example 1) was fixed on the flexible substrate provided with the electrodes with an insulating paste.
(2) And cutting the other flexible substrate into an electrode array shape, carrying out magnetron sputtering on the silver electrode to obtain a flexible substrate provided with row electrodes, and then adhering the flexible substrate on the pressure sensitive layer by using insulating glue to obtain the flexible pressure array sensor.
Comparative example 1
This comparative example provides a flexible capacitive pressure sensor which differs from example 1 in that the pressure sensitive layer does not contain a conductive polymer.
The sensitivity of the pressure sensor was measured to be 0.9kPa-1。
The embodiments described above are some, but not all embodiments of the invention. The detailed description of the embodiments of the present invention is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Claims (10)
1. A flexible capacitive pressure sensor is characterized by comprising an upper flexible substrate, an upper electrode, an upper insulating glue layer, a pressure sensitive layer, a lower insulating glue layer, a lower electrode and a lower flexible substrate which are sequentially arranged; wherein the upper flexible substrate and the lower flexible substrate are silk membranes or silk/polyurethane composite membranes; the pressure sensitive layer is an elastomer composite film doped with conductive fillers.
2. The flexible capacitive pressure sensor according to claim 1, wherein the pressure sensitive layer has a thickness of 80-110 μm and the flexible capacitive pressure sensor has a thickness of less than or equal to 300 μm.
3. The flexible capacitive pressure sensor of claim 1, wherein the interior of the pressure sensitive layer forms microscopic and mesoscopic capacitances.
4. The flexible capacitive pressure sensor of claim 1, wherein the conductive filler is selected from one or more of a carbon-based conductor, a conductive polymer, a metal oxide, a metal nanowire, a metal nanoparticle; the carbon-based conductive substance is selected from one or more of single-layer graphene, multi-layer graphene, carbon black, single-walled carbon nanotubes and multi-walled carbon nanotubes, and the conductive polymer is selected from one or more of poly (3, 4-ethylenedioxythiophene) with acidic or neutral pH value, polystyrene sulfonic acid, polyaniline, polythiophene and polypyrrole.
5. The flexible capacitive pressure sensor of claim 1, wherein the elastomer in the elastomer composite film is selected from one or more of polydimethylsiloxane, polyurethane, and polybutylene adipate/terephthalate blends.
6. The flexible capacitive pressure sensor of claim 5, wherein the conductive filler and the elastomer are mixed by grinding or solvent dispersion.
7. The flexible capacitive pressure sensor of claim 1, wherein the layer of insulating glue is applied by dispensing.
8. A flexible capacitive pressure array sensor, characterized in that it is made according to the following steps:
arranging a plurality of column electrodes arranged at intervals on an upper flexible substrate, wherein each column electrode comprises a column electrode connecting line and a plurality of upper electrodes arranged on the column electrode connecting line at intervals, and the column electrode connecting line extends to a row lead port;
an upper insulating glue layer, a pressure sensitive layer and a lower insulating glue layer are sequentially arranged on each upper electrode;
arranging a plurality of row electrodes arranged at intervals on a lower flexible substrate, wherein each column electrode comprises a row electrode connecting line and a plurality of lower electrodes arranged on the row electrode connecting line at intervals and corresponding to the upper electrodes, and the row electrode connecting line extends to a row lead port;
combining the row electrodes with the lower insulating glue layer to form a flexible capacitive pressure array sensor, wherein the positions of the lower electrodes and the upper electrodes correspond to each other one by one during combination to form a plurality of array electrode areas; wherein the upper flexible substrate and the lower flexible substrate are both silk/polyurethane composite films; the pressure sensitive layer is an elastomer composite film doped with conductive fillers.
9. The flexible capacitive pressure array sensor of claim 8, wherein the upper flexible substrate is a square sheet structure, and the column electrodes are obtained by magnetron sputtering on the upper flexible substrate layer through a mask.
10. The flexible capacitive pressure array sensor of claim 8, wherein the lower flexible substrate is configured to be cut to fit the shape of the row electrodes.
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