CN111465293A - Ultrathin soaking plate and manufacturing method thereof - Google Patents
Ultrathin soaking plate and manufacturing method thereof Download PDFInfo
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- CN111465293A CN111465293A CN202010415546.9A CN202010415546A CN111465293A CN 111465293 A CN111465293 A CN 111465293A CN 202010415546 A CN202010415546 A CN 202010415546A CN 111465293 A CN111465293 A CN 111465293A
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- H05K7/20336—Heat pipes, e.g. wicks or capillary pumps
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Abstract
The invention discloses an ultrathin soaking plate and a manufacturing method thereof. Porous media with different structures, thicknesses and pores are used as liquid absorbing cores and connected to the inner surfaces of the upper shell plate and the lower shell plate with different thicknesses, and the ultrathin soaking plate is manufactured through processes of welding, vacuumizing, liquid injection, packaging and the like. The middle steam cavity of the soaking plate adopts porous metal with a single structure or a patterned structure as a supporting layer, so that the working medium is ensured to flow quickly after being gasified, the gas-to-liquid phase change is promoted to flow back quickly, and the working medium phase change circulation is accelerated. The structure and the internal gap of the liquid absorbing core and the porous metal supporting layer are regulated and controlled, so that a component which has good capillary suction and permeability and very high heat conductivity can be prepared, the manufactured soaking plate has high heat dissipation efficiency, light weight and good reliability, is suitable for manufacturing an ultrathin structure, can meet the requirements of high heat conduction efficiency and ultrathin property required by electronic equipment with high heat flow density, can be prepared by a roll-to-roll continuous production process, has extremely high production efficiency, and is very suitable for large-scale industrial production.
Description
Technical Field
The invention belongs to the technical field of heat conduction, relates to a vapor chamber technology, and particularly relates to an ultrathin vapor chamber and a manufacturing method thereof.
Background
Miniaturization of electronic devices has become a mainstream trend in the development of modern electronic equipment. The ever decreasing feature sizes of electronic devices (e.g., feature sizes of microprocessors decrease from 0.35 to 0.18 μm from 1990 to 2000), the integration level, packaging density, and operating frequency of chips are increasing, which all rapidly increase the heat flux density of the chips. Studies have shown that over 55% of failure modes of electronic equipment are caused by excessive temperatures, and therefore the design of thermal reliability of electronic devices plays a significant role in the development of electronic devices.
With the improvement of integration and thinning degree of electronic products such as mobile phones, tablet computers, O L ED televisions, wearable device intelligence and the like, people expect that products have thinner appearance, and also expect higher computing speed and better multimedia performance to meet the requirements of high speed, portability, mobile work or mobile entertainment.
The heat pipe is a phase-change heat transfer device and has high heat conductivity coefficient and heat transfer power, when the heat pipe works, heat flow of a heat source is transferred from an evaporation end to a condensation end, then the heat flow is transferred from the condensation end to a heat sink with a large surface area in a heat conduction mode, and finally heat is taken away in a convection heat transfer mode, wherein the heat conductivity coefficient of the heat pipe is dozens of times to hundreds of times of that of the existing metal material. However, the conventional heat pipe is above millimeter from diameter to thickness, and is difficult to adapt to a narrow space in a mobile phone, for example, the thickness of a notebook computer or a tablet computer is reduced by 10mm, the thickness of the mobile phone is generally below 8mm, and the heat dissipation gap of a fuel cell is only 3 mm. At present, the commonly used cylindrical heat pipe or flattened heat pipe is difficult to meet the heat dissipation requirement of compact high-power electronic equipment, which promotes the development of the heat pipe towards the direction of light weight and thinness. However, as the thickness of the heat pipe is reduced, the interfacial shear force caused by the high-speed vapor-liquid convection inside the heat pipe is increased, and the heat transfer capability is limited. Therefore, the heat pipe must have a strong heat transfer capability while ensuring ultra-thinning, which is a difficult point in the field of ultra-thin heat pipes and a hotspot of research in the field of heat pipes.
The thickness reserved for heat dissipation devices in the design of modern smart phones, tablet computers and other equipment is very small, mostly less than 1mm, and mutually separated gas-liquid channels are required to be arranged in the thin heat pipes to ensure the efficient gas-liquid circulation heat transfer in work, which has very high requirements on the design and manufacturing process of common heat pipes.
In the prior art, the liquid absorbing core of the vapor chamber is generally a copper powder sintered type or a metal wire mesh. The soaking plate using the sintered copper powder liquid absorption core is difficult to produce and difficult to ensure consistency because metal powder is required to be filled into a thin-wall metal pipe and then sintered in the manufacturing process, and wrinkles are easy to appear due to the fact that the thermal expansion coefficients of a metal shell layer and a copper powder sintered layer are different in high-temperature sintering. The soaking plate using the metal wire mesh has the characteristics of large permeability and small capillary force due to the wire mesh structure, and meanwhile, the working medium amount is too small due to the fact that single-layer wire mesh is easy to crack and the thickness is too small in sintering, so that multilayer structure stacking sintering is often adopted in common wire mesh sintering. The multilayer sintered silk screen structure is easy to have poor interlayer contact, and the heat transfer performance is weakened.
The foam metal is a porous material with higher porosity, the porosity of the foam metal is generally more than 70 percent, even can reach 98 percent, the pore diameter and the porosity are easier to adjust, and the high porosity ensures that the foam metal liquid absorption core has higher permeability and can effectively reduce the fluid resistance; the foam metal has large specific surface area, can increase the contact area between the liquid absorption core and the working medium, is beneficial to the evaporation of the working medium and reduces the evaporation thermal resistance; the foam metal also has the characteristic of low density, the weight is only 20-60% of that of the metal with the same volume, and the thickness can be as low as 0.2mm, so that the conductive thermal resistance can be effectively reduced, and the foam metal is expected to be applied to an ultrathin soaking plate on a large scale.
Chinese patent (CN 104764350) discloses a method for manufacturing a soaking plate with foam copper as a liquid absorbing core, which adopts foam copper (the thickness is 0.1 mm-3 mm, the aperture is 300 nm-1000 mu m, and the porosity is 40% -95%) sintered on an upper cover plate and a lower base plate which are made of corresponding copper plates or copper foils with different thicknesses as the liquid absorbing core, a middle steam cavity adopts foam copper with a certain thickness (more than or equal to 0.8 mm) and a cylindrical or square structure as a supporting column, and the soaking plate is manufactured after welding, vacuumizing, liquid injection and packaging. The diameter of the support columns is 3-8 mm, and the interval between the support columns is 10-15 mm.
Chinese patent (CN 104896983) discloses a method for manufacturing a soaking plate taking ultrathin foamed silver as a liquid absorbing core, which is characterized in that the foamed silver (with the thickness of 0.1-2 mm, the aperture of 300-1000 mu m and the porosity of 40-95%) is sintered on an upper cover plate and a lower base plate which are made of corresponding pure copper plates or copper foils with different thicknesses to be used as the liquid absorbing core, a middle steam cavity adopts the foamed silver or copper with a cylindrical or square structure with a certain thickness (more than or equal to 0.8 mm) as a supporting column, and the soaking plate is manufactured by processes of welding, vacuumizing, liquid injection, packaging and the like. The diameter or size of the support columns is 2-8 mm, and the interval between the support columns is 8-15 mm. The separated support columns are difficult to produce continuously on a large scale.
In both of the above prior art, metal foam is used as the wick and support posts. The effect of support column is steam chamber in the middle of the support, makes its structure after the soaking plate is the evacuation degasification not collapse, because the interval (8 ~ 15 mm) between the support column is bigger, if use thinner copper foil as upper and lower apron, the copper foil will have caves in the interval play of support column, influences the heat conductivility of soaking plate, therefore the apron thickness that he used can not be less than 0.1mm, and the thickness of soaking plate has just been restricted to this kind of structure.
In addition, the prior art foam metal wicks are constructed of interconnected pores of varying pore size distribution, the pores in the inner layer of the foam being completely microporous, and the pores in the outermost layer being fragmented and attached to the outer layer of the intact pores in a manner similar to a microcolumn structure, having a wicking effective radius greater than the effective radius of the inner layer and a capillary force less than that of the inner layer, so that at least one layer of intact pore channels is retained within the foam metal wick for good performance. If a foam metal wick with a relatively large pore size is used for high permeability, the thickness of the wick is relatively thick, and the capillary force of the wick is reduced; if a foam metal wick with a small pore size is used for a low thickness and a large capillary suction force, the flow resistance of the liquid inside the wick is large, and the heat transfer capability of the soaking plate is reduced.
The liquid absorption core in the prior art is difficult to simultaneously meet the three characteristics of thin thickness, large capillary suction force and high permeability. When the ultrathin upper and lower shell plates are used or the soaking plate with ultrathin thickness (< 1 mm) is manufactured, the structure of the soaking plate is difficult to support without collapse by adopting the independent and separated supporting columns.
Disclosure of Invention
The invention discloses an ultrathin soaking plate and a manufacturing method thereof, and the ultrathin average heating plate can quickly transfer heat from a heat source to a heat sink in a one-dimensional direction like a common heat pipe and also can quickly diffuse the heat on a two-dimensional plane along the radial direction.
The technical scheme of the invention is as follows:
the utility model provides an ultra-thin vapor chamber, the structure is the ultra-thin airtight chamber of compriseing upper crust board, lower crust board, imbibition core, porous metal supporting layer and working medium, its characterized in that:
(1) the upper shell plate and the lower shell plate have the thickness of 0.01-1.0 mm and are made of metal and alloy thereof or nonmetal and compound material with good heat conductivity and sealing property;
(2) the thickness of the liquid absorption core is 0.02 mm-1.5 mm, and the liquid absorption core is composed of at least one of the following four materials: sintering metal powder with the average grain diameter of 0.01 mm-0.5 mm to obtain a porous medium; or a loose and porous capillary layer obtained by electroplating on the inner surfaces of the upper shell plate and the lower shell plate; or the porous medium is obtained by compressing one or more layers of foam metal with the average thickness of 0.4 mm-3 mm, wherein the porosity of the compressed foam metal is 30% -90%; or metal powder with the average grain diameter of 0.01 mm-0.5 mm is filled into one or more layers of superimposed foam metal, and the porous medium is obtained by sintering, wherein the porosity of the porous medium obtained by sintering is 30% -90%;
(3) the porous metal supporting layer is provided with a three-dimensional open-pore reticular structure with the thickness of 0.1-15 mm, and the structure can be a patterned structure or a single structure, wherein: the patterning structure is that grooves are arranged on the porous metal supporting layer, the depth of each groove is 0.02-14.5 mm, the width of the bottom of each groove is 0.05-30 mm, and the width of the top of each groove is 0.05-30 mm; the single structure is porous metal with uniform thickness and without local compression or local mechanical thinning processing;
(4) the working medium is filled in the closed inner cavity of the shell, is a liquid material and accounts for 50-300% of the gap of the liquid absorbing core.
The upper and lower shell plates are made of any one of copper, aluminum, silver, nickel, titanium, carbon materials, mica and boron nitride or a composite material made of any two or more of the copper, aluminum, silver, nickel and titanium alloy; or a composite material consisting of any one of graphite, diamond, mica and boron nitride;
the metal powder is a single metal material formed by any metal of copper, aluminum, silver, nickel and titanium, or a copper alloy, aluminum alloy, silver alloy, nickel alloy and titanium alloy material, or a multilayer composite material with the material as a substrate and the surface coated or coated.
The more than two layers of superposed foam metal for forming the liquid absorbing core can be made of the same material and specification, or different pore numbers (PPI), thicknesses, surface densities and materials;
the grooves of the patterned structure of the porous metal support layer can be arranged in parallel to the length direction or the width direction, or arranged at a specific angle with the length direction or the width direction, or mutually crossed on the porous metal support layer, or arranged outwards and radially by taking a certain point as a central point on the porous metal support layer.
The porous metal supporting layer is porous foam metal with an open-pore three-dimensional net-shaped structure, which is obtained by depositing a metal layer on the surface of polyurethane sponge and sintering and reducing the metal layer.
The volume of the working medium accounts for 80-150% of the pores of the liquid absorbing core.
The working medium is any one or a mixture of the following materials: ammonia, freon, ethane, acetone, butanone, water, ethanol, methanol, toluene, Thermomum-A and Thermomum-E.
The liquid absorption core comprises a hydrophilic metal oxide nanostructure arranged on the surface of the liquid absorption core, and the shape of the metal oxide nanostructure comprises at least one of a nanowire, a nanoparticle and a nanosheet;
the upper shell plate and the lower shell plate comprise metal sheets obtained by rolling and electrolysis processes, or single crystal metal obtained by performing heat treatment on the rolled metal sheets, or liquid metal.
The carbon material includes artificial graphite, natural graphite or diamond.
The artificial graphite comprises a composite material obtained by depositing a metal layer on the surface of an artificial graphite sheet by utilizing a vacuum plating, electrodeposition or a combination process of the vacuum plating and the electrodeposition, wherein the artificial graphite sheet is prepared by carbonizing and graphitizing a Polyimide film (Polyimide abbreviated as PI) at high temperature.
The metal layer refers to any one of copper, tin, silver and titanium or a composite material made of any two or more of the copper, tin, silver and titanium.
The manufacturing method of the ultrathin soaking plate is characterized by comprising the following process steps:
manufacturing an upper shell plate and a lower shell plate;
(II) the wick is manufactured by at least one of the following methods: sintering metal powder with the average grain diameter of 0.05 mm-0.5 mm to obtain the powder; or a loose porous capillary layer obtained on the inner surfaces of the upper shell plate and the lower shell plate in an electrodeposition mode; or is obtained by compressing one or more layers of foam metal with the average thickness of 0.4 mm-3 mm; or filling metal powder with the average grain diameter of 0.05 mm-0.5 mm into one or more layers of superimposed foam metal, and performing pressure sintering to obtain the foam metal;
thirdly, connecting metal sheets serving as an upper shell plate and a lower shell plate with the liquid absorbing core;
(IV) manufacturing a porous metal supporting layer;
placing the porous metal supporting layer between the upper shell plate and the lower shell plate connected with the liquid absorption core;
sixthly, assembling by using a welding process, welding the peripheries of the upper shell plate and the lower shell plate together, and reserving a liquid filling port;
filling a working medium into a closed inner cavity between the upper shell plate and the lower shell plate;
(VIII) welding and sealing.
In the liquid absorption core manufacturing procedure, when the liquid absorption core is obtained by compressing the foam metal, the foam metal can be stretched in any specific direction before and after compression or during compression, and the length-diameter ratio of internal holes after stretching is 1: 1-10: 1.
The porous metal supporting layer can be manufactured in any one of the following two modes:
directly cutting the porous metal into required specification and size;
the grooves which are arranged in parallel to the length direction or the width direction are processed on the porous metal in a rolling way, or the grooves which are arranged in a specific angle with the length direction or the width direction are processed on the porous metal, or the grooves which are mutually crossed on the porous metal supporting layer, or the grooves which are arranged on the porous metal supporting layer in an outward radial way by taking a certain point as a central point.
The porous metal supporting layer can be used for stretching the porous metal before or while the groove is machined in a rolling mode, and the length-diameter ratio of internal holes of the stretched porous metal supporting layer is 1: 1-10: 1.
After the porous metal supporting layer is processed with grooves on the porous metal in a rolling mode, the metal layer can be continuously electrodeposited on the surface of the porous metal.
The larger the effective capillary aperture of the liquid absorption core is, the larger the permeability of the liquid absorption core is, but the larger the effective capillary aperture of the liquid absorption core is, the smaller the capillary suction force generated by the liquid absorption core is, and the adverse effect on working medium backflow is caused; the smaller the effective capillary pore size of the liquid absorption core is, the larger the capillary suction force generated by the liquid absorption core is, but the too small effective pore size of the liquid absorption core can cause the permeability of the capillary core to be rapidly reduced, so that the flow resistance of the working medium in the capillary core is increased rapidly. In order to enable the foam metal liquid absorption core to have larger capillary suction force, permeability and smaller thickness at the same time, in the technical scheme of the invention, one or more layers of foam metal are compressed, and original foam metal with different pore numbers (PPI), surface density and thickness and different compression ratios are selected, and original foam metal with the same or different pore numbers (PPI), surface density and thickness is selected to be matched when more than two layers of foam metal are laminated and compressed, so that the pore shape, pore size and pore size distribution of the liquid absorption core are regulated and controlled, and the liquid absorption core with larger capillary suction force, permeability and smaller thickness can be obtained. Meanwhile, with the compression of the foam metal, the microcolumn formed by the external broken hole is compressed to form a new closed small hole again, so that the capillary force of the outer layer hole of the foam metal is enhanced, the backflow of the liquefied working medium is promoted, and the defects in the prior art are overcome. The foam metal structure is three-dimensional net-shaped and has random topology, the metal framework is branched and mutually overlapped to form countless mutually communicated cell bodies (cells), each cell body consists of 10-14 surfaces, each surface is provided with a hole, the shape of each hole is approximately 3-6 sides, the connection part of the holes is a hole edge, when two or more layers of foam metal layers are overlapped and compressed, the holes in the foam metal become flatter and flatter along with the compression, if the foam metal layers are continuously compressed, the hole edges of each layer of foam metal can enter the inner parts of the adjacent foam metal to divide the holes in the foam metal for the second time to form a foam metal with a new structure, and liquid absorbing cores with different capillary suction forces, permeability and thickness can be designed according to different working conditions of the soaking plate through the regulation and control of the process, when the soaking plate with ultra-thin thickness is manufactured, wicks having both high capillary suction, permeability and ultra-thin thickness can be provided.
When the porous medium liquid absorption core is obtained by compressing the foam metal, the foam metal can be axially stretched before and after compression or during compression, and the pore shape of the foam metal is changed into a slender hole from an approximate round hole through stretching, so that the capillary suction force of the liquid absorption core can be enhanced.
In the technical scheme of the invention, in order to enhance the permeability of the soaking plate and promote the rapid backflow of the working medium, a loose and porous capillary layer can be deposited on one surface of the upper shell plate and the lower shell plate in the modes of electroplating, sand suspension composite electroplating and the like, the surface with the capillary layer is used as a liquid absorption core of the soaking plate, and the size of a gap of the capillary layer is regulated by regulating and controlling electroplating parameters or the particle size of metal particles used in the sand suspension composite electroplating, so that the backflow capacity of the liquid working medium is enhanced.
In the technical scheme of the invention, in order to further enhance the capillary performance of the liquid absorption core, the metal oxide nanostructure can be prepared on the surface of the liquid absorption core optionally, and comprises at least one of nanowires, nanoparticles and nanosheets, so that the surface of the liquid absorption core has super-hydrophilic performance. The super-hydrophilic surface has excellent wettability, and the working medium liquid commonly used in the two-phase heat transfer device can be rapidly spread on the surface and enter the pores of the microstructure, which shows that the super-hydrophilic structure has good capillary suction to the working medium liquid, and the better the wettability is, the stronger the capillary suction is. A super-hydrophilic structure is constructed on the wall surface of the liquid absorption core with the porous structure, so that the capillary pressure of the liquid absorption core is greatly improved, the limitation of a single liquid absorption core structure is broken, and the capillary performance of the liquid absorption core structure is obviously improved.
In the technical scheme of the invention, the porous metal supporting layer plays two main roles, namely, the porous metal supporting layer is used as a steam channel, and the characteristics of high porosity and low gas resistance of the foam metal are utilized; and the second layer is used as a supporting layer of the soaking plate shell to prevent the structure of the soaking plate from collapsing in the air exhaust process and work. In the prior art, a single metal foam cylindrical block or a single square block is used as supporting columns, the interval between the supporting columns is large, so that the supporting capacity is limited, and in order to prevent the local collapse of the soaking plate, the upper shell plate and the lower shell plate also need to be provided with certain compressive strength by using a thick metal foil, so that the thickness of the soaking plate manufactured by the prior art is less than 1 mm. In the technical scheme of the invention, the whole supporting layer processed by the foam metal is used, in order to reduce the resistance of steam flow, the technical scheme of the invention also provides a scheme for processing various grooves with patterned structures on the foam metal in a rolling mode, and the center distance of the grooves is only 0.05-3 mm, so that more supports can be provided for the upper shell plate and the lower shell plate, the heat soaking plate structure is ensured not to collapse at any time, and the metal sheets with the thickness of less than 0.1mm can be used for manufacturing the upper shell plate and the lower shell plate of the heat soaking plate, so that the whole thickness of the heat soaking plate is greatly reduced, and the heat soaking plate with the whole thickness of less than 1mm can be manufactured. And after the partial foam metal formed at the bottom of the groove through rolling processing is compressed, the capillary force of the partial foam metal is increased, and when the soaking plate works, the partial foam metal at the bottom of the groove can be used as a liquid absorbing core to provide a channel for the backflow of the liquefied working medium, so that the heat transfer performance of the soaking plate is enhanced.
In the technical scheme of the invention, the porous metal supporting layer can adopt a processing mode of rolling a groove on the surface of the porous metal, so that the porous metal supporting layer can be continuously processed by using a roll-to-roll process. In order to improve the supporting ability of the porous metal support layer, it is necessary to use a porous metal having a relatively high surface density to improve the structural strength, but the higher the surface density, the more difficult the roll processing. Therefore, in the technical scheme of the invention, porous metal with lower surface density can be used, the grooves are processed in a rolling mode, and then a thicker metal layer can be electrodeposited on the surface of the porous metal to improve the structural strength of the porous metal supporting layer, so that the processing difficulty is reduced, and the large-scale production is facilitated.
In summary, in the technical solution of the present invention, the wick prepared by electroplating, compressing the foam metal, stretching the foam metal, and preparing the superhydrophobic structure has high capillary attraction and permeability, and may have a small thickness. The whole porous metal is used as the supporting layer, and compared with supporting columns which are mutually independent and separated, the supporting structure has stronger structural supporting capacity, and the structure of the soaking plate is ensured not to collapse; in order to make the vapor resistance smaller, a rolling process can be used for preparing patterned grooves on the porous metal, and meanwhile, part of the porous metal compressed at the bottom of the grooves after rolling processing can be used as a liquid absorbing core to enhance the backflow capacity of the liquefied working medium of the vapor chamber. The liquid absorption core and the supporting layer in the technical scheme of the invention can be processed by a roll-to-roll continuous process, the production efficiency is extremely high, and the method is suitable for large-scale industrial production.
Drawings
FIG. 1 is a schematic view of an ultra-thin vapor chamber according to a first embodiment;
FIG. 2 is a schematic view of an ultra-thin vapor chamber according to the second embodiment;
FIG. 3 is a schematic view of an ultra-thin soaking plate according to the third, fourth, fifth or sixth embodiment;
FIG. 4 is a schematic view of a porous metal support layer in an ultra-thin soaking plate according to one of the first and third embodiments;
FIG. 5 is a schematic view of a porous metal support layer in an ultra-thin soaking plate of the fourth example;
FIG. 6 is a schematic view of a porous metal support layer in an ultra-thin soaking plate of example five;
FIG. 7 is a schematic view of a porous metal support layer in an ultra-thin soaking plate of example six;
fig. 8 is a structural diagram of a copper oxide nanosheet having superhydrophilic characteristics in example two.
Detailed Description
The ultra-thin soaking plate and the manufacturing method thereof according to the present invention will be further described with reference to the following embodiments.
The first embodiment is as follows:
as shown in fig. 1, the ultrathin soaking plate has a structure of an ultrathin closed chamber consisting of an upper shell plate (11), a lower shell plate (12), a liquid absorption core (13), a porous metal supporting layer (14) and a working medium;
the upper shell plate (11) and the lower shell plate (12) are copper foils with the thickness of 0.05mm, and a layer of alumina barrier film is deposited on the outer surfaces of the copper foils;
the liquid absorbing core (13) is obtained by sintering copper balls with the average grain diameter of 0.03mm on the inner surfaces of the upper shell plate (11) and the lower shell plate (12), and the thickness of the liquid absorbing core is 0.06 mm;
the porous metal supporting layer (14) is a patterned structure, is arranged between two layers of liquid absorbing cores (13), adopts foam copper with an open-pore three-dimensional net-shaped structure, the thickness of the foam copper is 0.4mm, the average pore diameter is 0.1mm, and is prepared by arranging grooves parallel to the width direction on the foam copper (as shown in figure 4), wherein the depth of the grooves is 0.3mm, the width of the groove bottom is 0.08mm, and the width of the groove top is 0.09 mm;
water was used as the working medium and the volume of the fill water was 110% of the void of the wick.
A manufacturing method of an ultrathin soaking plate comprises the following steps:
(1) cutting an upper shell plate (11) and a lower shell plate (12) according to the size of the soaking plate required by design;
(2) sintering copper balls with the average grain diameter of 0.03mm on the inner surfaces of the upper shell plate (11) and the lower shell plate (12) to obtain a porous capillary layer serving as a liquid absorbing core (13);
(3) preparation of the porous metal support layer (14): processing a groove parallel to the width direction on the foam copper by using a rolling method, wherein the depth of the groove is 0.3mm, the width of the bottom of the groove is 0.08mm, and the width of the top of the groove is 0.09 mm;
(4) a porous metal supporting layer (14) is arranged between an upper layer of liquid absorption core and a lower layer of liquid absorption core (13), the peripheries of an upper shell plate and a lower shell plate are connected together in a welding mode to form a closed inner cavity, and a liquid filling port is reserved;
(5) and filling water into the shell after vacuumizing to serve as a working medium, wherein the volume of the filled water is 110% of the gap of the liquid absorbing core, and finally sealing to obtain the ultrathin soaking plate.
Example two:
as shown in fig. 2, the ultrathin soaking plate has a structure of an ultrathin closed chamber consisting of an upper shell plate (21), a lower shell plate (22), a liquid absorption core (23), a porous metal supporting layer (24) and a working medium;
the upper shell plate (21) and the lower shell plate (22) are copper foils with the thickness of 0.1 mm;
wick (23) Two layers of foam copper are superposed (the specification of the foam copper is: the number of pores (PPI) is 95, the thickness is 1.8mm, and the surface density is 280g/m2) The porosity of the compressed foam copper is 70%, the thickness of the compressed foam copper is 0.2mm, a layer of copper oxide nanosheet structure with super-hydrophilic characteristic is prepared on the surface of the foam copper, and the structure of the nanosheet is shown in FIG. 8;
the porous metal supporting layer (24) has a single structure, is arranged between the two layers of liquid absorption cores (23), and is prepared by using foamed nickel with a three-dimensional net-shaped structure with open pores, the thickness of the foamed nickel is 0.6mm, and the average pore diameter of the foamed nickel is 0.08 mm;
ethanol was used as the working medium and the volume of the filled ethanol was 110% of the void of the wick.
A manufacturing method of an ultrathin soaking plate comprises the following steps:
(1) cutting an upper shell plate (21) and a lower shell plate (22) according to the size of the soaking plate required by design;
(2) manufacturing a wick (23): and two layers of foam copper are superposed, and the porous medium is obtained through compression, wherein the porosity of the compressed porous medium is 70%, and the thickness of the compressed porous medium is 0.2 mm. Welding the obtained porous medium to the inner surfaces of the upper shell plate and the lower shell plate, and then preparing a layer of copper oxide nanosheet structure with super-hydrophilic characteristic on the surface of the porous medium;
(3) according to the size required by design, cutting foamed nickel with the thickness of 0.6mm and the average pore diameter of 0.08mm to obtain a porous metal supporting layer (24);
(4) a porous metal supporting layer (24) is arranged between an upper layer of liquid absorption core (23) and a lower layer of liquid absorption core (23), the peripheries of an upper shell plate and a lower shell plate are connected together in a welding mode to form a closed inner cavity, and a liquid filling port is reserved;
(5) and filling ethanol serving as a working medium into the shell after vacuumizing, wherein the volume of the filled ethanol is 80% of the gap of the liquid absorbing core, and finally sealing to obtain the ultrathin soaking plate.
Example three:
as shown in fig. 3, the ultrathin soaking plate has a structure of an ultrathin closed chamber consisting of an upper shell plate (31), a lower shell plate (32), a liquid absorption core (33), a porous metal supporting layer (34) and a working medium;
the upper shell plate (31) and the lower shell plate (32) are aluminum foils with the thickness of 0.5mm, the surfaces of the aluminum foils are covered with a layer of tin film, and the inner surfaces of the upper shell plate and the lower shell plate are connected with the liquid absorption core (33);
the liquid absorption core (33) is a porous medium obtained by compressing a layer of foam copper, the foam copper is stretched before compression, the length-diameter ratio of the internal pore diameter of the stretched foam copper is 3:1, the porosity of the compressed foam copper is 50%, and the thickness of the compressed foam copper is 0.5 mm;
the porous metal supporting layer (34) has a patterned structure, is arranged between two layers of liquid absorbing cores (33), is prepared by arranging grooves parallel to the length direction on a foamy copper with a three-dimensional net-shaped structure with open pores, the thickness of the foamy copper is 2mm, and the average pore diameter of the foamy copper is 0.5mm (shown in figure 4), wherein the depth of each groove is 0.1mm, the width of the bottom of each groove is 0.2mm, and the width of the top of each groove is 0.3 mm;
toluene was used as the working medium and the volume of the toluene charged was 110% of the void of the wick.
A manufacturing method of an ultrathin soaking plate comprises the following steps:
(1) cutting an upper shell plate (31) and a lower shell plate (32) according to the size of the soaking plate required by the design;
(2) production of wick (33): a layer of foam copper (specification of foam copper: pore number (PPI) is 50, thickness is 2.2mm, and surface density is 330g/m2) Firstly, stretching, wherein the length-diameter ratio of the inner pore diameter of the stretched porous medium is 3:1, and then compressing the obtained porous medium, wherein the porosity of the compressed porous medium is 50%, and the thickness of the compressed porous medium is 0.5 mm;
(3) preparation of the porous metal support layer (34): processing a groove parallel to the length direction on the foam copper by using a rolling method, wherein the depth of the groove is 0.1mm, the width of the bottom of the groove is 0.2mm, and the width of the top of the groove is 0.3 mm;
(4) a porous metal supporting layer (34) is arranged between an upper layer of liquid absorption core (33) and a lower layer of liquid absorption core (33), the peripheries of an upper shell plate and a lower shell plate are connected together in a welding mode to form a closed inner cavity, and a liquid filling port is reserved;
(5) and filling toluene serving as a working medium into the shell after vacuumizing, wherein the volume of the filled toluene is 110% of the gap of the liquid absorption core, and finally sealing to obtain the ultrathin soaking plate.
Example four:
as shown in fig. 3, the ultrathin soaking plate has a structure of an ultrathin closed chamber consisting of an upper shell plate (31), a lower shell plate (32), a liquid absorption core (33), a porous metal supporting layer (34) and a working medium;
the upper shell plate (31) and the lower shell plate (32) are made of copper-nickel alloy foils with the thickness of 1mm, and the inner surfaces of the upper shell plate and the lower shell plate are connected with a liquid absorption core (33);
the liquid absorbing core (33) is prepared by filling silver-coated copper powder with average particle size of 0.08mm into a layer of foam copper (specification of foam copper: pore number (PPI) is 110, thickness is 2.5mm, and surface density is 380g/m2) The porosity of the obtained porous medium is 30 percent and the thickness of the porous medium is 1.5 mm;
the porous metal supporting layer (34) has a patterned structure, is arranged between two layers of liquid absorbing cores (33), and is formed by preparing grooves (shown in figure 5) which are respectively parallel to the length direction and the width direction and are arranged in a crossed manner on foamy copper with a three-dimensional net structure with open pores, the thickness of the foamy copper is 5mm, the average pore diameter of the foamy copper is 0.8mm, wherein the depth of each groove is 4.5mm, the width of the groove bottom is 9mm, and the width of the groove top is 10 mm;
ammonia was used as the working medium and the volume of ammonia charged was 110% of the void of the wick.
A manufacturing method of an ultrathin soaking plate comprises the following steps:
(1) cutting an upper shell plate (31) and a lower shell plate (32) according to the size of the soaking plate required by the design;
(2) production of wick (33): uniformly mixing silver-coated copper powder with the average particle size of 0.08mm with a binder, filling the mixture into the inner gap of a layer of foam copper in a spraying mode, and compressing and sintering the mixture to obtain the porous medium. Welding the liquid absorption core to the inner surfaces of the upper shell plate and the lower shell plate;
(3) preparation of the porous metal support layer (34): preparing grooves which are respectively parallel to the length direction and the width direction and are arranged in a mutually crossed manner by using a rolling method, wherein the depth of each groove is 4.5mm, the width of the bottom of each groove is 9mm, and the width of the top of each groove is 10 mm;
(4) a porous metal supporting layer (34) is arranged between an upper layer of liquid absorption core (33) and a lower layer of liquid absorption core (33), the peripheries of an upper shell plate and a lower shell plate are connected together in a welding mode to form a closed inner cavity, and a liquid filling port is reserved;
(5) and filling ammonia serving as a working medium into the shell after vacuumizing, wherein the volume of the filled ammonia is 110% of the gap of the liquid absorption core, and finally sealing to obtain the ultrathin soaking plate.
Example five:
as shown in fig. 3, the ultrathin soaking plate has a structure of an ultrathin closed chamber consisting of an upper shell plate (31), a lower shell plate (32), a liquid absorption core (33), a porous metal supporting layer (34) and a working medium;
the upper shell plate (31) and the lower shell plate (32) are artificial graphite sheets with the thickness of 0.8mm, and copper films are deposited on the surfaces of the artificial graphite sheets, wherein the thickness of the copper films is 0.2mm, and the thickness of the artificial graphite sheets is 0.4 mm;
the liquid absorption core (33) is formed by filling copper-nickel alloy balls with the average grain diameter of 0.05mm into two layers of superposed copper foams with different specifications (the specification of the copper foams is that the number of pores (PPI) is 85, the thickness is 1.2mm, and the surface density is 320g/m2And a pore number (PPI) of 75, a thickness of 1.6mm and an areal density of 250g/m2) The porosity of the obtained porous medium is 60 percent and the thickness of the porous medium is 0.8 mm;
the porous metal supporting layer (34) is provided with a patterned structure, is arranged between two layers of liquid absorbing cores (33), is a three-dimensional net-shaped structure with openings, has the thickness of 6mm and the average pore diameter of 1mm, and is formed by preparing two groups of grooves which are respectively arranged in a cross way on the foamed nickel, wherein one group of grooves forms an angle of 45 degrees with the length direction, the other group of grooves is parallel to the width direction (as shown in figure 6), the depth of each groove is 1mm, the width of the bottom of each groove is 2mm, and the width of the top of each groove is 4 mm;
acetone was used as the working medium and the volume of acetone charged was 120% of the wick void.
A manufacturing method of an ultrathin soaking plate comprises the following steps:
(1) cutting an upper shell plate (31) and a lower shell plate (32) according to the size of the soaking plate required by the design;
(2) production of wick (33): uniformly mixing copper-nickel alloy balls with the average grain diameter of 0.05mm and a binder, filling the inner gaps of two layers of laminated foamy copper with different specifications in a spraying mode, and compressing and sintering to obtain the porous medium. Welding the liquid absorption core to the inner surfaces of the upper shell plate and the lower shell plate;
(3) preparation of the porous metal support layer (34): using a rolling method to prepare two groups of grooves which are respectively arranged in a cross way on the foamed nickel, wherein one group of grooves forms an angle of 45 degrees with the length direction, the other group of grooves is parallel to the width direction, the depth of each groove is 1mm, the width of the bottom of each groove is 2mm, and the width of the top of each groove is 4 mm;
(4) a porous metal supporting layer (34) is arranged between an upper layer of liquid absorption core (33) and a lower layer of liquid absorption core (33), the peripheries of an upper shell plate and a lower shell plate are connected together in a welding mode to form a closed inner cavity, and a liquid filling port is reserved;
(5) filling acetone serving as a working medium into the shell after vacuumizing, wherein the volume of the filled acetone is 120% of the gap of the liquid absorption core, and finally sealing to obtain the ultrathin soaking plate.
Example six:
as shown in fig. 3, the ultrathin soaking plate has a structure of an ultrathin closed chamber consisting of an upper shell plate (31), a lower shell plate (32), a liquid absorption core (33), a porous metal supporting layer (34) and a working medium;
the upper shell plate (31) and the lower shell plate (32) are copper foils with the thickness of 1.5mm, and the copper foils are single crystal copper foils obtained by performing heat treatment on rolled copper foils. The inner surfaces of the upper shell plate and the lower shell plate are connected with a liquid absorbing core (33);
the liquid absorption core (33) is a porous medium obtained by superposing and compressing three layers of foam metal with different specifications, the porosity of the compressed foam metal is 40 percent, and the thickness of the compressed foam metal is1 mm. The three layers of foam metal with different specifications are respectively as follows: the number of pores (PPI) is 35, the thickness is 2.0mm, and the surface density is 300g/m2The copper foam has a pore number (PPI) of 95, a thickness of 1.2mm and an areal density of 350g/m2The copper foam has a pore number (PPI) of 110, a thickness of 1.5mm and an areal density of 280g/m2The nickel foam of (4);
the porous metal supporting layer (34) is provided with a patterned structure, is arranged between two layers of liquid absorbing cores (33), adopts a three-dimensional net structure with open pores, has the thickness of 8mm and the average pore diameter of 2mm, is stretched to obtain the copper foam, has the length-diameter ratio of the internal pore diameter of 2:1, and is further processed into a groove (shown in figure 7) which radiates outwards by a central circle with the diameter of 2mm, wherein the depth of the groove is 2mm, the width of the groove bottom is 5mm, and the width of the groove top is 6 mm;
methanol was used as the working medium and the volume filled with methanol was 130% of the void of the wick.
A manufacturing method of an ultrathin soaking plate comprises the following steps:
(1) cutting an upper shell plate (31) and a lower shell plate (32) according to the size of the soaking plate required by the design;
(2) production of wick (33): three layers of foam metal with different specifications are superposed, and the porous medium is obtained through compression, wherein the porosity of the porous medium is 40%, and the thickness of the porous medium is 1 mm. Welding the liquid absorption core to the inner surfaces of the upper shell plate and the lower shell plate;
(3) preparation of the porous metal support layer (34): firstly, the foamed copper is subjected to stretching processing, the length-diameter ratio of the internal pore diameter of the stretched foamed copper is 2:1, and then a groove (shown in figure 7) which is radiated outwards by a central circle with the diameter of 2mm is processed on the foamed copper by using a continuous die pressing method, wherein the depth of the groove is 2mm, the width of the groove bottom is 5mm, and the width of the groove top is 6 mm;
(4) a porous metal supporting layer (34) is arranged between an upper layer of liquid absorption core (33) and a lower layer of liquid absorption core (33), the peripheries of an upper shell plate and a lower shell plate are connected together in a welding mode to form a closed inner cavity, and a liquid filling port is reserved;
(5) and filling methanol serving as a working medium into the shell after vacuumizing, wherein the volume of the filled methanol is 130% of the gap of the liquid absorbing core, and finally sealing to obtain the ultrathin soaking plate.
Claims (18)
1. The utility model provides an ultra-thin soaking plate, the structure is the ultra-thin airtight chamber of compriseing last coverboard, lower coverboard, imbibition core, porous metal supporting layer and working medium, its characterized in that:
(1) the upper shell plate and the lower shell plate have the thickness of 0.01-1.0 mm and are made of metal and alloy thereof or nonmetal and compound material with good heat conductivity and sealing property;
(2) the thickness of the liquid absorption core is 0.02 mm-1.5 mm, and the liquid absorption core is composed of at least one of the following four materials: sintering metal powder with the average grain diameter of 0.01 mm-0.5 mm to obtain a porous medium; or a loose and porous capillary layer obtained by electroplating on the inner surfaces of the upper shell plate and the lower shell plate; or the porous medium is obtained by compressing one or more layers of foam metal with the average thickness of 0.4 mm-3 mm, wherein the porosity of the compressed foam metal is 30% -90%; or metal powder with the average grain diameter of 0.01 mm-0.5 mm is filled into one or more layers of superimposed foam metal, and the porous medium is obtained by sintering, wherein the porosity of the porous medium obtained by sintering is 30% -90%;
(3) the porous metal supporting layer is provided with a three-dimensional open-pore reticular structure with the thickness of 0.1-15 mm, and the structure can be a patterned structure or a single structure, wherein: the patterning structure is that grooves are arranged on the porous metal supporting layer, the depth of each groove is 0.02-14.5 mm, the width of the bottom of each groove is 0.05-30 mm, and the width of the top of each groove is 0.05-30 mm; the single structure is porous metal with uniform thickness and without local compression or local mechanical thinning processing;
(4) the working medium is filled in the closed inner cavity of the shell, is a liquid material and accounts for 50-300% of the gap of the liquid absorbing core.
2. The ultra-thin soaking plate according to claim 1, wherein the upper and lower shell plates are made of any one of copper, aluminum, silver, nickel, titanium, carbon material, mica and boron nitride or a composite material made of any two or more of them, or a copper alloy, aluminum alloy, silver alloy, nickel alloy and titanium alloy material; or a composite material composed of any one of graphite, diamond, mica, and boron nitride.
3. An ultra-thin vapor chamber as in claim 1, wherein the metal powder is a single metal material formed by any one of copper, aluminum, silver, nickel and titanium, or a copper alloy, aluminum alloy, silver alloy, nickel alloy and titanium alloy material, or a multi-layer composite material with the above materials as the substrate for surface coating or coating.
4. An ultra-thin soaking plate according to claim 1, wherein the two or more layers of superimposed metal foams used to form the wick are made of the same material and specification, or different pore numbers (PPI), thickness, areal density, and material.
5. An ultra-thin vapor chamber as in claim 1, wherein the grooves of the patterned porous metal support layer are parallel to the length or width direction, or are arranged at a specific angle to the length or width direction, or are crossed with each other on the porous metal support layer, or are arranged radially outward from a certain point on the porous metal support layer.
6. An ultra-thin soaking plate according to claim 1, characterized in that the porous metal supporting layer is porous foam metal with open three-dimensional net structure obtained by depositing a metal layer on the surface of polyurethane sponge and sintering and reducing.
7. An ultra-thin vapor chamber as in claim 1 wherein the volume of the working medium is 80% to 150% of the void of the wick.
8. An ultra-thin soaking plate according to claim 1, characterized in that the working medium is any one or mixture of the following materials: ammonia, freon, ethane, acetone, butanone, water, ethanol, methanol, toluene, Thermomum-A and Thermomum-E.
9. An ultra-thin vapor chamber as in claim 1, wherein the wick comprises metal oxide nanostructures disposed on a surface thereof, wherein the metal oxide nanostructures comprise at least one of nanowires, nanoparticles, and nanoplates.
10. An ultra-thin soaking plate according to claims 1 and 2, characterized in that the upper and lower shell plates comprise metal sheets obtained by rolling, electrolytic process, or single crystal metal obtained by heat treatment using rolled metal sheets, or liquid metal.
11. An ultra-thin soaking plate according to claim 2, characterized in that the carbon material comprises artificial graphite, natural graphite or diamond.
12. An ultra-thin vapor chamber as claimed in claim 11, wherein the artificial graphite comprises a composite material obtained by depositing a metal layer on the surface of an artificial graphite sheet by vacuum plating, electrodeposition or a combination thereof, wherein the artificial graphite sheet is made of Polyimide film (Polyimide abbreviated as PI) through high temperature carbonization and graphitization.
13. An ultra-thin soaking plate according to claim 12, characterized in that the metal layer is any one of copper, tin, silver and titanium or a composite material made of any two or more of them.
14. The manufacturing method of the ultrathin soaking plate as claimed in claim 1, characterized by comprising the following process steps:
manufacturing an upper shell plate and a lower shell plate;
(II) the wick is manufactured by at least one of the following methods: sintering metal powder with the average grain diameter of 0.05 mm-0.5 mm to obtain the powder; or a loose porous capillary layer obtained on the inner surfaces of the upper shell plate and the lower shell plate in an electrodeposition mode; or is obtained by compressing one or more layers of foam metal with the average thickness of 0.4 mm-3 mm; or filling metal powder with the average grain diameter of 0.05 mm-0.5 mm into one or more layers of superimposed foam metal, and performing pressure sintering to obtain the foam metal;
thirdly, connecting metal sheets serving as an upper shell plate and a lower shell plate with the liquid absorbing core;
(IV) manufacturing a porous metal supporting layer;
placing the porous metal supporting layer between the upper shell plate and the lower shell plate connected with the liquid absorption core;
sixthly, assembling by using a welding process, welding the peripheries of the upper shell plate and the lower shell plate together, and reserving a liquid filling port;
filling a working medium into a closed inner cavity between the upper shell plate and the lower shell plate;
(VIII) welding and sealing.
15. The method of claim 14, wherein in the step of forming the wick, the metal foam is stretched in any particular direction before or after compression or during compression when the wick is formed by compression of the metal foam, and the aspect ratio of the internal pores after stretching is 1:1 to 10: 1.
16. The method of claim 14 wherein the porous metal support layer is fabricated by either of two methods:
directly cutting the porous metal into required specification and size;
the grooves which are arranged in parallel to the length direction or the width direction are processed on the porous metal in a rolling way, or the grooves which are arranged in a specific angle with the length direction or the width direction are processed on the porous metal, or the grooves which are mutually crossed on the porous metal supporting layer, or the grooves which are arranged on the porous metal supporting layer in an outward radial way by taking a certain point as a central point.
17. The method for manufacturing the ultrathin soaking plate according to claims 14 and 16, characterized in that the porous metal supporting layer can be stretched before or while processing the grooves by a rolling method, and the length-diameter ratio of the internal pores after stretching is 1: 1-10: 1.
18. The method of claim 14 and 16, wherein the porous metal support layer is further processed by rolling to form grooves on the porous metal, and then the metal layer is electrodeposited on the surface of the porous metal.
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