CN111421469A - Slurry transportation pipeline and slurry transportation system - Google Patents
Slurry transportation pipeline and slurry transportation system Download PDFInfo
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- CN111421469A CN111421469A CN202010330803.9A CN202010330803A CN111421469A CN 111421469 A CN111421469 A CN 111421469A CN 202010330803 A CN202010330803 A CN 202010330803A CN 111421469 A CN111421469 A CN 111421469A
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- slurry
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
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Abstract
The invention provides a slurry transport pipeline and a slurry transport system, wherein the slurry transport pipeline comprises: the slurry feeding device comprises a plurality of bending sections, a plurality of feeding devices and a plurality of discharging devices, wherein each bending section comprises a bending inlet and a bending outlet, and the flowing direction of the slurry at the bending inlet is different from that of the slurry at the bending outlet; and the straight line segment is connected between two adjacent bending segments. According to the slurry conveying pipeline provided by the embodiment of the invention, the slurry can generate turbulence when passing through the bent section in the pipeline, so that the uniformity of the slurry in the conveying process is ensured, and the negative influence on the processing quality of a workpiece caused by the non-uniform slurry is avoided.
Description
Technical Field
The invention relates to the technical field of slurry transportation, in particular to a slurry transportation pipeline and a slurry transportation system.
Background
Wire saws are used for cutting workpieces such as semiconductor materials, magnetic materials, and ceramics in the production process of semiconductor wafers, solar cells, and the like. A wire saw is a device that cuts a workpiece by pressing the workpiece against a wire while reciprocating the wire and supplying a cutting fluid mixed with free abrasive grains such as silicon carbide. An oil-based coolant or a water-based coolant is sometimes used for the slurry, but the uniformity of the cutting fluid is ensured. In a process of polishing a workpiece, such as a silicon wafer, by grinding or polishing, polishing slurry is generally supplied from a slurry supply unit and rubbed against the workpiece by rotation of a surface plate, and the dispersion of the slurry affects the result of grinding or polishing.
However, in the current slurry transportation process, only the uniformity of the slurry at the initial mixing is ensured, but the uniformity of the slurry in the subsequent transportation process is neglected, that is, in the slurry transportation process, the materials with different particle diameters in the slurry can be layered and deposited, and the uniformity of the slurry finally supplied to the outlet is low; if the slurry is transported to the cutting part and dispersed unevenly, the line mark caused by cutting is deepened, the line mark is difficult to remove in subsequent work, and if the slurry is transported to the grinding part and dispersed unevenly, the uneven grinding is caused.
Disclosure of Invention
In view of the above, the invention provides a slurry transportation pipeline and a slurry transportation system, which are used for solving the problems that in the prior art, slurry is not uniform due to layered deposition in a transportation process, and the processing quality of a workpiece is affected.
In order to solve the technical problems, the invention adopts the following technical scheme:
an embodiment of an aspect of the present invention provides a slurry transport pipeline, including:
the slurry feeding device comprises a plurality of bending sections, a plurality of feeding devices and a plurality of discharging devices, wherein each bending section comprises a bending inlet and a bending outlet, and the flowing direction of the slurry at the bending inlet is different from that of the slurry at the bending outlet;
and the straight line segment is connected between two adjacent bending segments.
Optionally, an angle formed between the flow direction of the slurry at the bent inlet and the flow direction of the slurry at the bent outlet is 30 to 180 °.
Optionally, the bending section is arc-shaped.
Optionally, the flow direction of the slurry at the bend inlet is opposite to the flow direction of the slurry at the bend outlet.
Optionally, the number of the bending sections is at least 5.
Optionally, the method further includes:
coat in the coating of the inner wall of pipeline under the condition that the pipeline is used for transporting hydrophilic thick liquids, the coating is hydrophobic coating under the condition that the pipeline is used for transporting oily thick liquids, the coating is hydrophilic coating.
Optionally, the diameter of the pipeline is 0.2 cm-1.5 cm.
Optionally, the distance between two adjacent straight line segments is 0.25 cm-1.5 cm.
In another aspect, the present invention provides a slurry transport system, including the slurry transport pipeline as described in any one of the above.
Optionally, the slurry transport pipeline is connected with the slurry outlet.
The technical scheme of the invention has the following beneficial effects:
according to the slurry conveying pipeline provided by the embodiment of the invention, the slurry can generate turbulence when passing through the bent section in the pipeline, so that the uniformity of the slurry in the conveying process is ensured, and the negative influence on the processing quality of a workpiece caused by the non-uniform slurry is avoided.
Drawings
Fig. 1 is a schematic view of a slurry transport pipeline according to an embodiment of the present invention;
FIG. 2 is a schematic view of a bending section according to an embodiment of the present invention;
FIG. 3 is a second schematic view of a bending section provided in an embodiment of the present invention;
FIG. 4 is a third schematic view of a bending section according to an embodiment of the present invention;
FIG. 5 is a schematic view of a coating on the inner wall of a pipe provided by an embodiment of the present invention;
FIG. 6 is a schematic view of a slurry flowing in a conduit according to an embodiment of the present invention;
fig. 7 is a schematic view illustrating an arrangement relationship between a bending section and a straight line section according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
As shown in fig. 1, in one embodiment of the present invention, a slurry transport pipeline is provided, where the pipeline 10 includes a plurality of bending sections 11 and straight sections 12, where each bending section 11 includes a bending inlet and a bending outlet (not shown in the figure), and a flow direction of slurry at the bending inlet of the bending section 11 is different from a flow direction of slurry at the bending outlet, that is, the flow direction of slurry after passing through the bending section 11 is changed; the two adjacent bending sections 11 are connected by straight sections 12, that is, the bending sections 11 and the straight sections 12 are alternately arranged.
Reynolds number is a dimensionless number used to characterize fluid flow, where Reynolds number Re is ρ vd/μ, where v, ρ, and μ are the flow velocity, density, and viscosity coefficient of the fluid, and d is a characteristic length, such as the equivalent diameter of a circular pipe when the fluid flows through the pipe. Analysis shows that when the Reynolds number is small, the influence of the viscous force on the flow field is greater than that of inertia, the disturbance of the flow velocity in the flow field is attenuated due to the viscous force, and the fluid flows stably and is laminar flow; on the contrary, if the reynolds number is larger, the influence of inertia on the flow field is larger than the viscous force, the fluid flow is unstable, the small change of the flow velocity is easy to develop and strengthen, and a turbulent flow field with disorder and irregularity is formed.
Therefore, as shown in fig. 6, in the process of transporting the slurry in the pipe 10 according to the embodiment of the present invention, since the pipe has a plurality of bent sections 11 and straight sections 12, the flow of the slurry is laminar when the slurry passes through the straight sections 12, and when the slurry passes through the bent sections 11, the reynolds number of the slurry changes, the flow of the slurry changes into a flocculent flow (also called turbulent flow), so that the slurry is sufficiently mixed at the bent sections 11, thereby improving the uniformity of the slurry, that is, the slurry is continuously switched between the laminar flow and the flocculent flow during the process of flowing in the pipe 10, so that the slurry is sufficiently mixed, thereby maintaining the uniformity of the slurry during the transportation process, and reducing the problem of non-uniformity of the slurry due to a long transportation process.
In some embodiments of the present invention, the angle between the flow direction of the slurry at the bend inlet of the bend section 11 and the flow direction of the slurry at the bend outlet is 30 ° to 180 °, that is, in the case that the flow direction of the slurry at the bend inlet and the flow direction of the slurry at the bend outlet are not consistent, there should be at least a certain angle, so as to ensure that the slurry can flocculate at the bend section 11 to enable the slurry to be sufficiently mixed, and prevent the problem of non-uniformity of the slurry due to the abrasive settling caused by single laminar flow.
As shown in fig. 2-4, in some embodiments of the present invention, the bend section 11 may be angled, notched, curved, etc. to provide turbulence and thus thorough mixing of the slurry at the bend section 11. Preferably, the bending section 11 may be an arc shape, and since there are generally small particles in the slurry, if the slurry is an angular shape or a concave shape, the slurry is likely to impact and wear the bending section 11 of the pipeline 10, and if the slurry is an arc shape, the above situation can be avoided.
In some embodiments of the present invention, the flow direction of the slurry at the inlet of the bend of the bending section 11 is opposite to the flow direction of the slurry at the outlet of the bend, that is, the angle between the flow direction of the slurry at the inlet of the bend and the flow direction of the slurry at the outlet of the bend is 180 °, in this case, the turbulence phenomenon of the slurry is significant, which is beneficial to the sufficient mixing of the slurry.
In some embodiments of the present invention, the number of the bending sections 11 is at least 5, that is, when the pipe 10 in the embodiments of the present invention is used for transporting slurry, at least 5 bending sections 11 should be provided, so that the slurry can be sufficiently mixed during the transportation process, so as to ensure the uniformity of the output slurry.
In other embodiments of the present invention, the duct 10 further comprises: the coating 13 is coated on the inner wall of the pipeline 10, and the coating 13 can reduce the viscous force between the slurry and the inner wall of the pipeline 10 and is beneficial to the mixing of the slurry; specifically, under the condition that pipeline 10 is used for transporting hydrophilic thick liquids, coating 13 can set up to hydrophobic coating, and under the condition that pipeline 10 is used for transporting oily thick liquids, coating 13 can set up to hydrophilic coating, through such collocation mode, can ensure effectively to reduce viscous force, improves the mixed effect.
As shown in fig. 6, in the embodiment of the present invention, the diameter of the pipe 10 may be 0.2cm to 1.5cm, the diameter of the pipe 10 is related to the mesh number of the abrasive particles in the slurry, the abrasive particles are generally larger than 1000 mesh, and are mostly 2000 mesh, 5000 mesh, 8000 mesh, 10000 mesh, etc., and the pipes 10 with different diameters may be selected according to the different mesh numbers of the abrasive particles, so as to avoid the mixing unevenness caused by the too small diameter; when the bending section 11 is arc-shaped and the flow direction of the slurry at the bending inlet is opposite to the flow direction of the slurry at the bending outlet, the distance between two adjacent straight line sections 12 is 0.25 cm-1.5 cm, namely 1/2 which is the distance between the section A in the figure, and at this time, the two straight line sections 12 are arranged in parallel. More specifically, the maximum distance (i.e. the distance B in the figure) of two adjacent bending sections 11 in the direction of the straight line 12 satisfies: 1.0< B/a <5.0, whereby the length layout of the bend section 11 and straight section 12 of the pipe 10 is defined such that the pulp is switched between laminar flow and flock flow in good time, ensuring that the pulp is sufficiently mixed.
According to the slurry conveying pipeline provided by the embodiment of the invention, the slurry can generate turbulence when passing through the bent section in the pipeline, so that the uniformity of the slurry in the conveying process is ensured, and the negative influence on the processing quality of a workpiece caused by the non-uniform slurry is avoided.
In another aspect, an embodiment of the present invention further provides a slurry transportation system, including the slurry transportation pipeline described in any one of the above embodiments, where the slurry transportation pipeline in the above embodiment has the above beneficial effects, and the slurry transportation system in the embodiment of the present invention also has the above beneficial effects, and details are not repeated herein.
In the embodiment of the invention, the slurry transport pipeline can be applied to the whole transport pipeline, and can also be used as a section of the transport pipeline of the slurry transport system, and more specifically, the slurry transport pipeline can be connected with the slurry outlet, so that the slurry flowing through the slurry transport pipeline alternately generates laminar flow and flocculation flow, the slurry can be fully mixed, the uniformity of the slurry flowing out of the slurry outlet is ensured, and the processing quality of workpieces is further ensured.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (10)
1. A slurry transport pipeline, comprising:
the slurry feeding device comprises a plurality of bending sections, a plurality of feeding devices and a plurality of discharging devices, wherein each bending section comprises a bending inlet and a bending outlet, and the flowing direction of the slurry at the bending inlet is different from that of the slurry at the bending outlet;
and the straight line segment is connected between two adjacent bending segments.
2. A duct according to claim 1, wherein the direction of flow of the slurry at the bend inlet and the direction of flow of the slurry at the bend outlet form an angle of between 30 ° and 180 °.
3. The duct of claim 1, wherein the bend segment is arcuate.
4. A duct according to claim 3, wherein the direction of flow of slurry at the bend inlet is opposite to the direction of flow of slurry at the bend outlet.
5. A duct according to claim 3, wherein the number of bends is at least 5.
6. The duct of claim 1, further comprising:
coat in the coating of the inner wall of pipeline under the condition that the pipeline is used for transporting hydrophilic thick liquids, the coating is hydrophobic coating under the condition that the pipeline is used for transporting oily thick liquids, the coating is hydrophilic coating.
7. The conduit according to claim 1, wherein the conduit has a diameter of 0.2cm to 1.5 cm.
8. The pipeline of claim 4, wherein the distance between two adjacent straight line segments is 0.25 cm-1.5 cm.
9. A slurry transport system comprising a slurry transport conduit according to any of claims 1 to 8.
10. The system of claim 9, wherein the slurry transport conduit is connected to a slurry outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010330803.9A CN111421469A (en) | 2020-04-24 | 2020-04-24 | Slurry transportation pipeline and slurry transportation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010330803.9A CN111421469A (en) | 2020-04-24 | 2020-04-24 | Slurry transportation pipeline and slurry transportation system |
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| Publication Number | Publication Date |
|---|---|
| CN111421469A true CN111421469A (en) | 2020-07-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010330803.9A Pending CN111421469A (en) | 2020-04-24 | 2020-04-24 | Slurry transportation pipeline and slurry transportation system |
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| CN (1) | CN111421469A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5939295B2 (en) * | 1980-06-17 | 1984-09-21 | 積水化学工業株式会社 | Manufacturing method of reinforced resin pipe joints |
| JPS60234193A (en) * | 1984-04-30 | 1985-11-20 | コンバツシヨン・エンヂニアリング・インコーポレーテツド | Elbow |
| CN1682057A (en) * | 2002-09-06 | 2005-10-12 | 株式会社Ork | Metal bellows tube, method of producing the same, and flexible tube for high-pressure fluid |
| CN104226135A (en) * | 2014-07-14 | 2014-12-24 | 杜海成 | Hollow-core pipeline mixer |
| CN105715895A (en) * | 2016-04-06 | 2016-06-29 | 南京普能新材料科技有限公司 | Slurry insulating, defoaming and delivering pipe of perfluorinated ionomer membrane for tape casting |
| CN107906372A (en) * | 2017-11-21 | 2018-04-13 | 贵州理工学院 | Mortar conveys eddy flow depressurized system |
-
2020
- 2020-04-24 CN CN202010330803.9A patent/CN111421469A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5939295B2 (en) * | 1980-06-17 | 1984-09-21 | 積水化学工業株式会社 | Manufacturing method of reinforced resin pipe joints |
| JPS60234193A (en) * | 1984-04-30 | 1985-11-20 | コンバツシヨン・エンヂニアリング・インコーポレーテツド | Elbow |
| CN1682057A (en) * | 2002-09-06 | 2005-10-12 | 株式会社Ork | Metal bellows tube, method of producing the same, and flexible tube for high-pressure fluid |
| CN104226135A (en) * | 2014-07-14 | 2014-12-24 | 杜海成 | Hollow-core pipeline mixer |
| CN105715895A (en) * | 2016-04-06 | 2016-06-29 | 南京普能新材料科技有限公司 | Slurry insulating, defoaming and delivering pipe of perfluorinated ionomer membrane for tape casting |
| CN107906372A (en) * | 2017-11-21 | 2018-04-13 | 贵州理工学院 | Mortar conveys eddy flow depressurized system |
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Effective date of registration: 20211027 Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant after: Xi'an yisiwei Material Technology Co.,Ltd. Applicant after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: Room 1323, block a, city gate, No.1 Jinye Road, high tech Zone, Xi'an, Shaanxi 710065 Applicant before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |
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Application publication date: 20200717 |