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CN111326565B - Display panel, manufacturing method thereof and display device - Google Patents

Display panel, manufacturing method thereof and display device Download PDF

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Publication number
CN111326565B
CN111326565B CN202010277409.3A CN202010277409A CN111326565B CN 111326565 B CN111326565 B CN 111326565B CN 202010277409 A CN202010277409 A CN 202010277409A CN 111326565 B CN111326565 B CN 111326565B
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touch
layer
display area
emitting device
light
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CN111326565A (en
Inventor
徐小兵
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Yungu Guan Technology Co Ltd
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Yungu Guan Technology Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/40OLEDs integrated with touch screens
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The application relates to a display panel, a display device with the display panel and a manufacturing method of the display device, wherein the display panel comprises a display area and a non-display area, and the display panel comprises: a substrate; the substrate is sequentially stacked with a light-emitting device layer and a touch layer, the touch layer at least comprises a touch metal layer, and the touch metal layer located in the non-display area is in direct contact with at least part of the surface of the light-emitting device layer located in the non-display area, which is far away from the substrate. The beneficial effect of this application is: the display panel of this application contacts through luminescent device layer with the touch-control metal level in the non-display area, and the adhesion between reinforcing luminescent device layer and the touch-control layer improves the intensity of the non-display area rete of display panel, prevents that the touch-control rete from peeling off, producing foreign matter scheduling problem to avoid causing the influence to the display area in the non-display area of display panel.

Description

Display panel, manufacturing method thereof and display device
Technical Field
The application belongs to the technical field of display screens, and particularly relates to a display panel, a manufacturing method of the display panel and a display device.
Background
An Organic Light Emitting Diode (OLED) display panel is an Organic electroluminescent device, and is used as a display device and an illumination device by sandwiching an Organic Light Emitting material between a transparent anode and a metal reflective cathode and applying a voltage to an Organic Light Emitting film layer to emit Light, and has advantages of self-luminescence, wide viewing angle, high contrast, low power consumption, and high response speed.
Since Touch Panel (TP) or display device is a widely used electronic product, it is a focus of manufacturers to manufacture an excellent OLED display panel with touch function. The OLED display panel is combined with the characteristics of the OLED display panel, the touch layer is covered on the light-emitting device layer to achieve the touch function, the touch layer can be provided with at least one pair of film layers which are respectively used for wiring, capacitance and substrate functions, but the existing touch layer has the problems of poor adhesion, easy peeling and the like.
Disclosure of Invention
The technical problem that this application will solve is: in order to solve the problem that the touch layer is easy to fall off in the process of manufacturing the touch layer in the prior art, the display panel, the display device with the display panel and the manufacturing method of the display panel are provided.
The technical scheme adopted by the application for solving the technical problem is as follows:
a display panel including a display area and a non-display area, comprising:
a substrate;
the substrate is sequentially stacked with a light-emitting device layer and a touch layer, the touch layer at least comprises a touch metal layer, and the touch metal layer located in the non-display area is in direct contact with at least part of the surface of the light-emitting device layer located in the non-display area, which is far away from the substrate.
In one embodiment, the touch layer further includes a touch inorganic layer, the touch inorganic layer in the non-display area has at least one groove, the touch metal layer in the non-display area covers the touch inorganic layer in the non-display area, and the touch metal layer in the non-display area fills the groove and is in direct contact with at least a part of the surface of the light emitting device layer in the non-display area.
In one embodiment, the opening size of the groove becomes gradually larger in a direction away from the light emitting device layer.
In one embodiment, the projection of the groove on the substrate is a circular ring, a rectangle or a dot pattern.
In one embodiment, the area of the contact surface of the touch inorganic layer and the light-emitting device layer is smaller than the area of the contact surface of the touch metal layer and the light-emitting device layer.
In one embodiment, the ratio of the area of the touch inorganic layer and the light-emitting device layer contact surface to the area of the touch metal layer and the light-emitting device layer contact surface is greater than or equal to 1/4 and less than or equal to 1/2.
A method of manufacturing a display panel, comprising:
providing a substrate, wherein the substrate comprises a display area and a non-display area;
the method comprises the steps that a light-emitting device layer and a touch layer are sequentially prepared on a substrate, the touch layer at least comprises a touch metal layer, and the touch metal layer located in a non-display area is in direct contact with at least part of the surface, far away from the substrate, of the light-emitting device layer located in the non-display area.
In one embodiment, the process of sequentially preparing the light emitting device layer and the touch layer on the substrate further includes:
preparing a touch inorganic layer on the light-emitting device layer by adopting a chemical vapor deposition method, and removing at least part of the touch inorganic layer positioned in the non-display area to expose at least part of the surface of the light-emitting device layer; and preparing the touch metal layer by adopting a physical vapor deposition method, wherein the touch metal layer positioned in the non-display area covers the touch inorganic layer positioned in the non-display area and is in direct contact with at least part of the surface of the light-emitting device layer positioned in the non-display area.
In one embodiment, the step of removing at least a portion of the touch inorganic layer located in the non-display area includes:
and photoetching an image on the touch control inorganic layer positioned in the non-display area by adopting a yellow photoetching method, and etching the touch control inorganic layer positioned in the non-display area by using a dry etching process to form at least one groove.
A display device comprising a display panel as claimed in any one of the preceding claims.
The beneficial effect of this application is: the display panel of this application contacts through luminescent device layer with the touch-control metal level in the non-display area, and the adhesion between reinforcing luminescent device layer and the touch-control layer improves the intensity of the non-display area rete of display panel, prevents that the touch-control rete from peeling off, producing foreign matter scheduling problem to avoid causing the influence to the display area in the non-display area of display panel.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and the embodiments.
Fig. 1 is a schematic partial cross-sectional view of a non-display area of a display panel according to an embodiment of the present application.
Fig. 2 is a schematic structural diagram of a display panel according to an embodiment of the present application.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention of the present application, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
FIG. 1 is a schematic partial cross-sectional view of a non-display area of a display panel according to an embodiment of the present application; fig. 2 is a schematic structural diagram of a display panel according to an embodiment of the present application.
When preparing the touch layer of the display panel, the touch layer material is also prepared in the non-display area 1, such as the area between the two openings as shown in fig. 2, for example, the area of the screen body liu, the camera area before cutting the screen body, the screen frame, and the like. However, due to the opening of the mask plate, when the encapsulation layer is prepared on the display panel, the part of the non-display area 1 is shielded by the mask plate and cannot form an encapsulation layer material, so that when the touch layer is prepared subsequently, the touch inorganic layer in the touch layer of the non-display area 1 is in direct contact with the organic layer on the surface of the light-emitting device layer in the display panel, the adhesion force between the touch layer of the area and the surface of the light-emitting device layer is weak, the touch layer is easy to peel off, and further, the peeled foreign matters are diffused to the display area 2 of the screen body, and the touch function of the display area 2 is disabled due to the formation of metal residues.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
A display panel, comprising a display area 2 and a non-display area 1 as shown in fig. 2, wherein the cross-sectional structure of the non-display area 1 is as shown in fig. 1, the display panel comprises: a substrate 10; the light emitting device layer 20 and the touch layer 30 are sequentially stacked above the substrate 10, the touch layer 30 at least includes a touch metal layer 32, and the touch metal layer 32 located in the non-display area 1 is in direct contact with at least a part of the surface of the light emitting device layer 20 located in the non-display area 1, which is far away from the substrate 10. The touch metal layer 32 is prepared by Physical Vapor Deposition (PVD), and the material of the touch metal layer may be a metal material such as Ti, al, or an alloy thereof, and the adhesion between the touch metal layer 32 and the light emitting device layer 20 is strong, and the touch metal layer 32 may be used as a trace of the touch layer 30. The side, far away from the substrate 10, of the light-emitting device layer 20 located in the non-display area 1 is an organic layer, and the touch metal layer 32 located in the non-display area 1 is in direct contact with at least part of the surface, far away from the substrate 10, of the light-emitting device layer 20 located in the non-display area 1. It should be noted that, since the non-display area 1 does not need a touch function, the touch layer 30 of the non-display area 1 can be completely set as the touch metal layer 32, so that the adhesion is better, and the touch function and the display effect of the display area 2 are prevented from being affected by the falling of the film layer of the non-display area 1.
In one embodiment of the present application, the touch layer 30 further includes a touch inorganic layer 31. The touch inorganic layer 31 is prepared by a Chemical Vapor Deposition (CVD), and may be an inorganic material such as SixNy, siOx, or the like, and the touch inorganic layer 31 may be used as a touch capacitor or a substrate, and if the touch inorganic layer 31 is in direct contact with the surface of the light emitting device layer 20, the adhesion between the film layers is weak, which may cause the touch layer 30 in the non-display area 1 to easily peel off, and further affect the touch film layer in the display area 2, so that the touch function of the display area 2 is disabled, and the display effect is also affected. Therefore, the touch inorganic layer 31 in the non-display area 1 has at least one groove, the touch metal layer 32 in the non-display area 1 covers the touch inorganic layer 31 in the non-display area 1, and the touch metal layer 32 in the non-display area 1 fills the groove and is in direct contact with at least a portion of the surface of the light emitting device layer 20 in the non-display area 1. The bottom of the groove is the surface of the light-emitting device layer 20, the touch metal layer 32 located in the non-display area 1 can be deposited downwards from the groove to fill the groove, the touch metal layer 32 is in contact with the light-emitting device layer 20 at the bottom of the groove, so that the touch metal layer 32 located in the non-display area 1 is in effective contact with the surface of the light-emitting device layer 20 located in the non-display area 1, the adhesive force between the touch layer 30 and the light-emitting device layer 20 can be enhanced, the touch layer 30 in the non-display area 1 is prevented from being stripped to influence the touch function and the light-emitting effect of the display area, the structure between the touch layer 30 in the non-display area 1 and the touch layer in the display area 2 is more similar, the fault of the film layer cannot occur at the junction of the non-display area 1 and the display area 2, and the influence on the touch layer in the display area 2 is reduced.
Further, in one embodiment of the present application, the opening size of the groove becomes gradually larger in a direction away from the light emitting device layer 20. At this time, the contact area between the touch inorganic layer 31 and the touch metal layer 32 is large, and the connection surface between the touch metal layer 32 and the light emitting device layer 20 is also large, so that not only the adhesion between the touch inorganic layer 31 and the touch metal layer 32 can be enhanced, but also the adhesion between the touch metal layer 32 and the light emitting device layer 20 can be enhanced. In the present application, the sectional shape of the groove is not limited to a trapezoid, and it is only necessary that the groove extends toward the light emitting device layer 20 up to the surface of the light emitting device layer 20, and the opening size becomes gradually larger in a direction away from the light emitting device layer 20.
In one embodiment of the present application, the grooves are uniformly distributed in the touch inorganic layer 31. In another embodiment, the projection of the groove on the substrate 10 is a circular ring, a rectangle or a circle, when there are a plurality of grooves, the projection is in the shape of a plurality of concentric circles, a plurality of mutually parallel rectangles or a plurality of circles arranged in an array, and the uniformly distributed grooves can provide an effect of uniformly distributed adhesion force, so that the adhesion force between the touch layer 30 and the light emitting device layer 20 in the whole non-display area 1 is stronger and the stability is higher. It is worth noting that in the embodiment of the present application, the projections of the grooves on the substrate may be arranged non-uniformly, for example, the projections of the grooves in the area close to the display area are arranged sparsely, and the projections of the grooves in the area far away from the display area are arranged densely, so that the influence of the grooving on the display area can be avoided to the greatest extent.
In one embodiment of the present application, the touch inorganic layer 31 located in the non-display area 1 is uneven. The rugged touch inorganic layer 31 may include several grooves or a combination of several grooves and protrusions. At this time, a larger contact area is provided between the touch inorganic layer 31 and the touch metal layer 32, so that a certain nesting exists between the two film layers, the adhesion force between the two film layers is improved, the number of grooves can be increased or the area of the bottom surface of the groove can be increased on the premise of not affecting the adhesion force of the film layer in the touch layer 30, the contact area between the touch metal layer 32 and the surface of the light-emitting device layer 20 in the non-display area 1 is increased, and the adhesion force between the light-emitting device layer 20 and the touch layer 30 in the non-display area 1 is improved.
In order to ensure the adhesion effect, in an embodiment of the present application, the area of the contact surface of the touch inorganic layer 31 and the light emitting device layer 20 is smaller than the area of the contact surface of the touch metal layer 32 and the light emitting device layer 20, and further, the ratio of the area of the contact surface of the touch inorganic layer 31 and the light emitting device layer 20 to the area of the contact surface of the touch metal layer 32 and the light emitting device layer 20 is 1/4-1/2. The larger the area of the contact surface between the touch metal layer 32 and the light emitting device layer 20 is, the better the adhesion effect between the light emitting device layer 20 and the touch layer 30 is. When the contact surface area between the touch metal layer 32 and the light emitting device layer 20 is too small, if the ratio of the contact surface area between the touch inorganic layer 31 and the light emitting device layer 20 to the contact surface area between the touch metal layer 32 and the light emitting device layer 20 is greater than 1/2, the adhesion between the light emitting device layer 20 and the touch layer 30 is insufficient, and peeling is easily generated; however, when the contact area between the touch metal layer 32 and the light emitting device layer 20 is too large, for example, the ratio of the contact area between the touch inorganic layer 31 and the light emitting device layer 20 to the contact area between the touch metal layer 32 and the light emitting device layer 20 is smaller than 1/4, the volume occupied by the touch inorganic layer 31 in the touch layer 30 is smaller, the contact area between the touch inorganic layer 31 and the touch metal layer 32 is smaller, the adhesion force inside the touch layer 30 is weaker, and the stability is poorer. Preferably, when the ratio of the area of the contact surface between the touch inorganic layer 31 and the light emitting device layer 20 to the area of the contact surface between the touch metal layer 32 and the light emitting device layer 20 is 3/8, the adhesion with the light emitting device layer 20 is good under the condition that the adhesion between the inner film layers of the touch layer 30 is not affected.
In one embodiment of the present application, a protection layer using OC glue (organic film) is further present above the touch layer 30. The OC glue is transparent or semitransparent glue, has insulation, wear resistance and corrosion resistance, has a protective effect on the touch layer 30, and prevents the touch layer from being damaged due to environmental pollution and frequent operation. In another alternative embodiment, the substrate 10 is a TFT substrate. The TFT substrate is composed of thin film transistors, and the driving circuit containing the thin film transistors can stably supply power to the light-emitting units, so that the display panel can generate a display effect.
Based on the same inventive concept, the embodiment of the application also provides a preparation method of the display panel, which comprises the following steps:
providing a substrate 10, wherein the substrate 10 can be a TFT substrate, and the substrate 10 comprises a display area 2 and a non-display area 1; the light-emitting device layer 20 (such as an OLED device layer) and the touch layer 30 are sequentially prepared on the substrate 10, the touch layer 30 at least includes a touch metal layer 32, and the touch metal layer 32 located in the non-display region 1 is in direct contact with at least a portion of the surface of the light-emitting device layer 20 located in the non-display region 1, which is away from the substrate 10.
In an embodiment of the present application, the step of sequentially preparing the light emitting device layer 20 and the touch layer 30 on the substrate 10 further includes: preparing a touch inorganic layer 31 on the light-emitting device layer 20 by using a chemical vapor deposition method, removing at least a part of the touch inorganic layer 31 located in the non-display area 1 to expose at least a part of the surface of the light-emitting device layer 20 located in the non-display area 1, and preparing a touch metal layer 32 covering the touch inorganic layer 31 located in the non-display area 1 and directly contacting at least a part of the surface of the light-emitting device layer 20 located in the non-display area 1 by using a physical vapor deposition method.
It should be noted that the touch inorganic layer of the present application may be prepared by a chemical vapor deposition method. Chemical vapor deposition is a chemical technology, which is a method for generating a film by performing a chemical reaction on the surface of a substrate by using one or more gas-phase compounds or simple substances containing film elements. For example, a method of precipitating inorganic materials such as metals, oxides, and carbides by utilizing a gas phase reaction at a high temperature, thermal decomposition of metal halides, organic metals, hydrocarbons, and the like, hydrogen reduction, or a chemical reaction of a mixed gas thereof at a high temperature. The touch inorganic layer 31 is a thin film formed by chemical vapor deposition. Physical vapor deposition is a process of transferring atoms or molecules onto a substrate surface by using a physical process to realize mass transfer. For example, in a vacuum condition, a low-voltage and large-current arc discharge technology is adopted, a target material is evaporated by using gas discharge, an evaporated substance and gas are ionized, and the evaporated substance and a reaction product thereof are deposited on the surface of a substrate by using the acceleration action of an electric field. The touch metal layer 32 may be a film formed by physical vapor deposition.
In an embodiment of the present application, the step of removing at least a portion of the touch inorganic layer 31 in the non-display area 1 includes: and photoetching an image on the touch inorganic layer 31 positioned in the non-display area 1 by adopting a yellow light photoetching method, and etching the touch inorganic layer 31 positioned in the non-display area 1 by a dry etching process to form at least one groove so that at least part of the surface of the light-emitting device layer 20 positioned above the non-display area 1 is exposed. In the process of preparing the groove, at least part of the surface of the light emitting device layer 20 in the non-display area 1 can be exposed outside the touch inorganic layer 31 by etching the touch inorganic layer 31 in the non-display area 1 to remove part of the touch inorganic layer 31 in the non-display area 1 by using the existing equipment and process without a photomask (Mask) process of a reprinting TP process.
The preparation method of the display panel is free from the problem of film peeling caused by insufficient adhesion force, is not limited by a method for adding an adhesive of a dead plate, utilizes the existing equipment and process, and improves the adhesion force of the original film through the film by only adjusting the existing film structure, namely the touch metal layer 32 in the groove, so that a good effect is achieved, and the process and the cost are saved.
Based on the same inventive concept, an embodiment of the present application further provides a display device, which may include: the display panel provided by the embodiment of the invention.
Specifically, the display device may be any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, and a navigator. Other essential components of the display device are understood by those skilled in the art, and are not described herein or should not be construed as limiting the invention.
The beneficial effect of this application is: the display panel of this application contacts through luminescent device layer with the touch-control metal level in the non-display area, and the adhesion between reinforcing luminescent device layer and the touch-control layer provides the intensity of the non-display area rete of display panel, prevents that the touch-control rete from peeling off, producing foreign matter scheduling problem to avoid causing the influence to the display area in the non-display area of display panel.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.

Claims (8)

1. A display panel including a display area and a non-display area, comprising:
a substrate;
a light-emitting device layer and a touch layer are sequentially stacked above the substrate, the touch layer at least comprises a touch metal layer, and the touch metal layer positioned in the non-display area is in direct contact with at least part of the surface, far away from the substrate, of the light-emitting device layer positioned in the non-display area;
the touch layer further comprises a touch inorganic layer, the touch inorganic layer located in the non-display area is provided with at least one groove, the touch metal layer located in the non-display area covers the touch inorganic layer located in the non-display area, and the touch metal layer located in the non-display area fills the groove and is in direct contact with at least part of the surface of the light-emitting device layer located in the non-display area.
2. The display panel according to claim 1, wherein an opening size of the groove becomes gradually larger in a direction away from the light-emitting device layer.
3. The display panel according to claim 2, wherein a projection of the groove on the substrate is a circular ring, a rectangular shape, or a circular shape.
4. The display panel according to claim 1, wherein an area of a contact surface of the touch inorganic layer with the light-emitting device layer is smaller than an area of a contact surface of the touch metal layer with the light-emitting device layer.
5. The display panel according to claim 4, wherein a ratio of an area of a contact surface of the touch inorganic layer and the light-emitting device layer to an area of a contact surface of the touch metal layer and the light-emitting device layer is 1/4 or more and 1/2 or less.
6. A method for manufacturing a display panel, comprising:
providing a substrate, wherein the substrate comprises a display area and a non-display area;
preparing a light-emitting device layer and a touch layer in sequence on the substrate, wherein the touch layer at least comprises a touch metal layer, and the touch metal layer positioned in the non-display area is in direct contact with at least part of the surface, far away from the substrate, of the light-emitting device layer positioned in the non-display area;
the process of sequentially preparing the light-emitting device layer and the touch layer on the substrate further comprises:
preparing a touch inorganic layer on the light-emitting device layer by adopting a chemical vapor deposition method, and removing at least part of the touch inorganic layer positioned in the non-display area to expose at least part of the surface of the light-emitting device layer;
and preparing the touch metal layer by adopting a physical vapor deposition method, wherein the touch metal layer positioned in the non-display area covers the touch inorganic layer positioned in the non-display area and is in direct contact with at least part of the surface of the light-emitting device layer positioned in the non-display area.
7. The method according to claim 6, wherein the step of removing at least a portion of the touch inorganic layer in the non-display area comprises:
and photoetching an image on the touch control inorganic layer positioned in the non-display area by adopting a yellow photoetching method, and etching the touch control inorganic layer positioned in the non-display area by using a dry etching process to form at least one groove.
8. A display device characterized by comprising the display panel according to any one of claims 1 to 5.
CN202010277409.3A 2020-04-10 2020-04-10 Display panel, manufacturing method thereof and display device Active CN111326565B (en)

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CN111769080B (en) * 2020-06-24 2022-07-12 武汉华星光电半导体显示技术有限公司 Display panel
CN114489377B (en) * 2021-12-31 2024-02-27 湖北长江新型显示产业创新中心有限公司 Touch display panel and touch display device

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