CN111220623B

CN111220623B - Substrate detection device and substrate detection method

Info

Publication number: CN111220623B
Application number: CN201910912273.6A
Authority: CN
Inventors: 崔汉铉; 河完龙; 徐正欢
Original assignee: Top Engineering Co Ltd
Current assignee: Top Engineering Co Ltd
Priority date: 2018-11-26
Filing date: 2019-09-25
Publication date: 2023-05-12
Anticipated expiration: 2039-09-25
Also published as: KR102215123B1; CN111220623A; KR20200062417A; CN211374551U

Abstract

The substrate detection device according to the embodiment of the invention comprises: a substrate detection unit disposed in the substrate detection region to detect a surface of the substrate; a first clamp module positioned on the upstream side of the substrate transfer direction based on the substrate detection area; and a second gripper module positioned on a downstream side in a transfer direction of the substrate with respect to the substrate detection area, wherein the first detection module moves in a state of gripping a first portion of the substrate existing adjacent to or at a trailing end of the substrate, thereby allowing a second portion of the substrate existing adjacent to or at a leading end of the substrate to pass through the substrate detection area, and after the second portion passes through the substrate detection area, the first portion is released, and before or while the first gripper module releases the first portion, the second gripper module moves in a state of gripping the second portion, thereby allowing the first portion to pass through the substrate detection area.

Description

Substrate detection device and substrate detection method

Technical Field

The present invention relates to a substrate inspection apparatus and a substrate inspection method for inspecting a surface of a substrate.

Background

In general, a liquid crystal display panel, an organic electroluminescence display panel, an inorganic electroluminescence display panel, a transmissive projector substrate, a reflective projector substrate, and the like for a flat panel display use a unit glass panel obtained by cutting a brittle mother glass panel (hereinafter, referred to as a "substrate") such as glass into a predetermined size.

The substrate requires a process of inspecting the surface of the substrate before the substrate is used in a product. In order to detect the surface of the substrate, various substrate detection devices are used. The substrate detection device includes a camera disposed opposite to the substrate surface, and detects a defect of the substrate surface from an image of the substrate surface captured by the camera.

In a conventional substrate detection apparatus, when a substrate passes through a substrate detection area provided with a camera in a state in which an edge portion of the substrate (an end portion of the substrate in a lateral direction perpendicular to a transfer direction of the substrate) is gripped by a pickup module, an upper surface or a lower surface of the substrate is imaged by the camera. However, since the edge portion of the substrate gripped by the pickup module is blocked by the gripping module, the edge portion of the substrate cannot be photographed by the camera. Therefore, a process of photographing the edge portion with a camera to detect the edge portion is additionally provided. This causes a problem that the number of steps for inspecting the substrate increases, and the time required for inspecting the substrate increases.

Disclosure of Invention

The present invention has been made to solve the above-described problems of the conventional art, and an object of the present invention is to provide a substrate inspection apparatus and a substrate inspection method capable of inspecting the entire upper surface and/or the lower surface of a substrate including an edge portion of the substrate at one time, thereby reducing the number of steps for inspecting the substrate and the time required for inspecting the substrate.

An embodiment of the present invention provides a substrate detection method for detecting a surface of a substrate using a substrate detection apparatus including: a substrate detection unit disposed in the substrate detection region for detecting a surface of the substrate; a first jig module provided on an upstream side in a transfer direction of the substrate with respect to the substrate detection area; a second jig module provided on a downstream side in a transfer direction of the substrate with respect to the substrate detection area,

the substrate detection method may include:

(a) A step of holding a first portion of the substrate existing adjacent to or at a trailing end of the substrate by the first clamp module;

(b) A step of moving the first jig module so that a second portion of the substrate existing adjacent to or at the leading end of the substrate passes through the substrate detection area;

(c) A step of holding the second portion having passed through the substrate detection area by the second clamp module, the first clamp module releasing the first portion; and

(d) And a step of moving the second jig module to pass the first portion through the substrate detection area.

In the step (c), the first clamp module may release the first portion and the second clamp module may hold the second portion at the same time.

In the step (c), the operation of releasing the first portion by the first gripper module and the operation of holding the second portion by the second gripper module may be performed when the first gripper module and the second gripper module move at the same speed.

As another example, in the step (c), the operation of releasing the first portion by the first gripper module and the operation of holding the second portion by the second gripper module may be performed when the first gripper module and the second gripper module move at a constant speed.

According to the substrate detection method of the embodiment of the invention, the method may further include: accelerating the second gripper module before the second portion passes through the substrate detection area.

In addition, the substrate detection apparatus according to the embodiment of the present invention may include: a substrate detection unit configured in the substrate detection area and detecting the surface of the substrate; a first jig module positioned on an upstream side of the substrate transfer direction with respect to the substrate detection area; and a second gripper module that is positioned on a downstream side in the transfer direction of the substrate with respect to the substrate detection area, wherein the first gripper module moves in a state of gripping a first portion of the substrate that is present adjacent to or at a trailing end of the substrate, and causes a second portion of the substrate that is present adjacent to or at a leading end of the substrate to pass through the substrate detection area, and releases the first portion after the second portion passes through the substrate detection area; before or while the first gripper module releases the first portion, the second gripper module moves in a state of gripping the second portion that has passed through the substrate detection area so that the first portion passes through the substrate detection area.

The first gripper module may be configured to release the first portion and the second gripper module may be configured to hold the second portion when the first gripper module and the second gripper module move at the same speed.

As another example, the operation of releasing the first portion by the first gripper module and the operation of holding the second portion by the second gripper module may be performed when the first gripper module and the second gripper module move at a constant speed.

The second gripper module may accelerate before the second portion passes through the substrate detection area.

The substrate detection unit may include a lower surface detection module that detects a lower surface of the substrate, and an upper surface detection module that detects an upper surface of the substrate; the lower surface detection module and the upper surface detection module may be spaced apart from each other in the transfer direction of the substrate.

An intermediate loading stage for supporting the substrate may be provided between the lower surface detection module and the upper surface detection module.

The lower surface detection module or the upper surface detection module may include: a light source for irradiating light to the lower surface or the upper surface of the substrate; and a camera shooting the lower surface or the upper surface of the substrate, wherein the camera is configured to be capable of adjusting an angle towards the substrate.

Effects of the invention

According to the substrate detection apparatus and the substrate detection method provided by the embodiments of the present invention, the first gripper module provided on the upstream side in the substrate transfer direction moves in a state of gripping the first portion of the substrate so that the second portion of the substrate passes through the substrate detection area, after the second portion passes through the substrate detection area, the first portion is released, and before or while the first gripper module releases the first portion, the second gripper module provided on the downstream side in the substrate transfer direction moves in a state of gripping the second portion that has passed through the detection area so that the first portion passes through the substrate detection area. Therefore, the whole upper surface and the whole lower surface of the substrate are not shielded by the first clamp module or the second clamp module and are exposed to the upper side and the lower side in the process of passing the substrate detection area. Therefore, the whole of the upper surface and the lower surface including the edge portion of the substrate can be detected by the substrate detecting unit at one time, thereby reducing the number of steps for detecting the substrate and shortening the time required for detecting the substrate.

Drawings

Fig. 1 is a side view schematically illustrating a substrate detection apparatus according to an embodiment of the present invention.

Fig. 2 is a plan view schematically illustrating a substrate inspection apparatus according to an embodiment of the present invention.

Fig. 3 is a schematic view schematically illustrating a first transfer unit or a second transfer unit of the substrate detection apparatus according to an embodiment of the present invention.

Fig. 4 is a graph showing a change in speed of a first chuck module and a second chuck module with time of a substrate inspection apparatus according to an embodiment of the present invention.

Fig. 5 to 8 are diagrams sequentially showing a process of detecting a substrate using the substrate detection apparatus shown in the embodiment of the present invention.

Description of the reference numerals

10: substrate detection unit

21: first loading table

22: second loading table

23: intermediate loading table

40: substrate conveying unit

70: first transfer unit

71: first clamp module

80: second transfer unit

81: second clamp module

A: substrate detection area

Detailed Description

A substrate detection apparatus and a substrate detection method according to an embodiment of the present invention will be described below with reference to the drawings.

Referring to fig. 1 and 2, in detecting the surface of the substrate S, a direction in which the substrate S is transferred to the substrate detection area a is defined as a Y-axis direction, and a direction perpendicular to the transfer direction (Y-axis direction) of the substrate S is defined as an X-axis direction. The direction perpendicular to the X-Y plane in which the substrate S is placed is defined as the Z-axis direction. The Y-axis direction is the longitudinal direction of the substrate S, and the X-axis direction is the width direction of the substrate S. Further, a region existing adjacent to or at the trailing end of the substrate S is defined as a first portion S1, and a region existing adjacent to or at the leading end of the substrate S opposite to the trailing end of the substrate S is defined as a second portion S2, with reference to the center in the longitudinal direction (Y-axis direction) of the substrate S.

As shown in fig. 1 and 2, the substrate detection apparatus according to the embodiment of the present invention includes: a substrate detection unit 10 disposed in the substrate detection region a to detect the surface of the substrate S; the first loading table 21 is disposed on the upstream side of the substrate S in the transfer direction with the substrate detection area a as a center, and the substrate S loaded from the outside is positioned on the first loading table 21; a second loading table 22 disposed on the downstream side of the substrate S in the transfer direction with respect to the substrate detection area a, the substrate S passing through the substrate detection area a being positioned on the second loading table 22; a first transfer unit 70 that transfers the substrate S from the first loading table 21 to the substrate detection unit 10; and a second transfer unit 80 that transfers the substrate S from the substrate detection unit 10 to the second loading stage 22.

For example, the item detected by the substrate detection unit 10 is to detect whether or not there is a surface defect such as a scratch or a stain formed on the surface of the substrate S. The substrate detection unit 10 may be configured to measure the shape, depth, size, width, amplitude, and the like of such surface defects.

The substrate detection unit 10 includes a lower surface detection module 11 that detects a lower surface of the substrate S and an upper surface detection module 12 that detects an upper surface of the substrate S.

The lower surface detection module 11 may be disposed on the upstream side of the substrate detection area a, and the upper surface detection module 12 may be disposed on the downstream side of the substrate detection area a. Therefore, when the substrate S passes through the substrate detection area a, the lower surface of the substrate is first detected by the lower surface detection module 11, and then the upper surface of the substrate S is detected by the upper surface detection module 12. However, the present invention is not limited to the above configuration, and the configuration in which the lower surface detection module 11 is disposed downstream of the substrate detection area a and the upper surface detection module 12 is disposed upstream of the substrate detection area a is also applicable to the present invention. The configuration having only one of the lower surface detection module 11 and the upper surface detection module 12 is also applicable to the present invention.

For example, the lower surface detection module 11 may be arranged in plurality at a predetermined pitch in the X-axis direction. Accordingly, the plurality of lower surface detection modules 11 can photograph all areas of the lower surface of the substrate S in the X-axis direction at one time, and thus the time required to detect the lower surface of the substrate S can be shortened.

Also, the upper surface detection module 12 may be arranged in plurality at a predetermined pitch in the X-axis direction. Thus, the plurality of upper surface detection modules 12 can photograph all areas of the upper surface of the substrate S in the X-axis direction at one time, and thus the time required to detect the upper surface of the substrate S can be shortened.

However, the number and pitch of the lower surface detection modules 11 and the upper surface detection modules 12 may be different depending on the detection capability (resolution, number of pixels, etc.) of the lower surface detection modules 11 and the upper surface detection modules 12, the width of the substrate S, the kind of surface defect to be detected, and the like.

The plurality of lower surface detection modules 11 may be arranged in a row in the X-axis direction, and the plurality of upper surface detection modules 12 may be arranged in a row in the X-axis direction. However, the present invention is not limited to the above configuration, and a configuration in which one or more lower surface detection modules 11 and one or more upper surface detection modules 12 are alternately arranged in a row on the upstream side and/or the downstream side of the substrate detection area a is also applicable to the present invention.

On the other hand, the lower surface detection module 11 and the upper surface detection module 12 are not arranged in a row in the up-down direction (Z-axis direction). In the substrate inspection apparatus according to the embodiment of the present invention, the lower surface inspection module 11 and the upper surface inspection module 12 are arranged at intervals in the Y-axis direction. Therefore, particularly in the case where the substrate S is a transparent substrate, the image of the upper surface detection module 12 can be prevented from being included in the image captured by the lower surface detection module 11, and also the image of the lower surface detection module can be prevented from being included in the image captured by the upper surface detection module 12. That is, the lower surface detection module 11 and the upper surface detection module 12 are arranged at intervals in the Y-axis direction, and when an image of the substrate S is acquired to detect a surface defect of the substrate S, the lower surface detection module 11 and the upper surface detection module 12 can be prevented from interfering with each other.

In the configuration in which the lower surface detection module 11 and the upper surface detection module 12 are arranged to be spaced apart from each other in the Y-axis direction, an intermediate stage 23 for supporting the substrate S may be provided between the lower surface detection module 11 and the upper surface detection module 12. The intermediate loading stage 23 supports the substrate S during passage of the substrate S through the substrate detection area a where the lower surface detection module 11 and the upper surface detection module 12 are disposed, whereby sagging of the substrate S between the lower surface detection module 11 and the upper surface detection module 12 can be prevented.

The intermediate loading table 23 may be constituted by a pneumatic table (air-table) including a plurality of air ejection holes communicating with an air supply source (not shown in the figure). Therefore, when the substrate S is transferred on the intermediate loading stage 23, the substrate S may float from the upper surface of the intermediate loading stage 23. However, the present invention is not limited to the configuration in which the intermediate loading table 23 is constituted by a pneumatic table. The intermediate loading table 23 is also applicable to the present invention in a structure constituted by a conveyor belt.

The lower surface detection module 11 includes a light source 111 and a camera 112, wherein the light source 111 irradiates light to the lower surface of the substrate S, and the camera 112 photographs the lower surface of the substrate S.

For example, the light source 111 may be configured to emit linear light in a straight line shape. However, the present invention is not limited to the form of the light emitted from the light source 111, and the light source 111 may emit light of various forms. The form of the light may be different depending on the kind of surface defect to be detected. For example, the plurality of light sources 111 included in each of the plurality of lower surface detection modules 11 may emit light rays having different forms from each other.

On the other hand, the image characteristics such as sharpness and brightness of the surface defect photographed by the camera 112 are different depending on the angle at which the camera 112 faces the lower surface of the substrate S. Therefore, in order to be able to detect various surface defects, the camera 112 may be configured to be able to adjust an angle with the substrate S. For this, the lower surface detection module 11 includes a camera rotation motor 113 that is connected to the camera 112 and rotates the camera 112 about a central axis (or horizontal axis) parallel to the X-axis or the Y-axis. The camera 112 is rotated by the camera rotation motor 113 to adjust the angle of the camera 112 toward the lower surface of the substrate S, whereby various surface defects can be detected. The number of cameras 112 can be reduced in the case where the cameras 112 are rotated to adjust the angle of the cameras 112 toward the lower surface of the substrate S, as compared with the case where more cameras 112 fixed at different angles are disposed toward the lower surface of the substrate S, and thus the cost required for manufacturing the substrate detection device can be reduced.

Similarly, the upper surface detection module 12 includes a light source 121 that irradiates light toward the upper surface of the substrate S and a camera 122 that photographs the upper surface of the substrate S.

For example, the light source 121 may be configured to emit linear light in a straight line shape, but the present invention is not limited to the shape of the light emitted by the light source 121. The light source 121 may be configured to emit light in various forms. The form of the light may be different depending on the kind of surface defect to be detected. For example, the plurality of light sources 121 provided in each of the plurality of upper surface detection modules 12 may emit light rays having different forms from each other.

Also, in order to detect various surface defects, the camera 122 may be configured to be able to adjust an angle with respect to the substrate S. For this, the upper surface detection module 12 includes a camera rotation motor 123 connected to the camera 122 and rotating the camera 122 about a central axis (or horizontal axis) parallel to the X-axis or the Y-axis. The camera 122 is rotated by the camera rotation motor 123 to adjust the angle of the camera 122 toward the upper surface of the substrate S, whereby various surface defects can be detected. The number of cameras 122 can be reduced in the case where the cameras 122 are rotated to adjust the angle of the cameras 122 toward the upper surface of the substrate S, as compared with the case where more cameras 122 fixed at different angles are disposed toward the upper surface of the substrate S, and thus the cost required for manufacturing the substrate detection apparatus can be reduced.

The first loading table 21 and the second loading table 22 may be configured by a pneumatic table including a plurality of air ejection holes communicating with an air supply source (not shown). Therefore, when the substrate S is transferred on the upper portions of the first loading table 21 and the second loading table 22, the substrate S can float from above the first loading table 21 and the second loading table 22. However, the present invention is not limited to the configuration in which the first loading table 21 and the second loading table 22 are configured by the air-operated table, and the configuration in which the first loading table 21 and the second loading table 22 are configured by the conveyor belt is also applicable to the present invention.

The substrate inspection unit according to the embodiment of the present invention includes a substrate transfer unit 40, and the substrate transfer unit 40 transfers the substrate S to be inspected to the first loading table 21.

The substrate transfer unit 40 includes a pickup module 41, a support frame 42, a transfer module 43, and a lift module 44, wherein the pickup module 41 is configured to hold and transfer the substrate S, the support frame 42 extends in the Y-axis direction and supports the pickup module 41 such that the pickup module 41 is movable in the Y-axis direction, the transfer module 43 is configured to move the pickup module 41 along the support frame 42 in the Y-axis direction, and the lift module 44 is configured to move the pickup module 41 in the Z-axis direction.

As the transfer module 43 and the lifting module 44, a linear movement mechanism such as an actuator operated by air pressure or oil pressure, a linear motor operated by electromagnetic interaction, or a ball screw mechanism can be used. The pick-up module 41 may comprise a plurality of suction pads 413 connected to a vacuum source (not shown in the figures) via vacuum tubes.

As shown in fig. 2 and 3, the first transfer unit 70 serves to hold the first portion S1 of the substrate S and transfer the substrate S in the Y-axis direction. The first transfer unit 70 includes a pair of first gripper modules 71 that grip both ends (edge portions) of the substrate S in the X-axis direction, and a pair of guide rails 72 that are provided so as to extend in the Y-axis direction. The first gripper module 71 can be transferred along the guide rail 72 in the Y-axis direction.

On the other hand, in the substrate detection apparatus according to the embodiment of the present invention, the pair of first clamp modules 71 hold both ends of the substrate S in the X-axis direction. However, the present invention is not limited to this, and the configuration in which one first clamp module 71 grips only one of the two ends of the substrate S in the X-axis direction is also applicable to the present invention.

As shown in fig. 3, the first clamp module 71 includes a connection block 73, a moving block 75, a pair of holding members 76, and a driving block 77, wherein the connection block 73 is connected to the guide rail 72, the moving block 75 is movably provided on the connection block 73 in the X-axis direction, the pair of holding members 76 are mounted on the moving block 75, and the pair of holding members 76 are movable adjacent to or spaced apart from each other, and the driving block 77 moves the moving block 75 in the X-axis direction.

A linear movement mechanism such as an actuator using air pressure or oil pressure, a linear motor operating under electromagnetic interaction, or a ball screw mechanism may be provided between the connection block 73 and the guide rail 72. Accordingly, in a state where the gripping member 76 grips the substrate S, the connection block 73 can be moved in the Y-axis direction along the guide rail 72 by the linear movement mechanism, and thereby the substrate S can be moved in the Y-axis direction.

The pair of holding members 76 can be linearly moved in a direction adjacent to or spaced apart from each other by a linear movement mechanism such as an actuator using air pressure or oil pressure, a linear motor operating under electromagnetic interaction, or a ball screw mechanism. As another example, the pair of holding members 76 may be configured to rotate in directions adjacent to each other or spaced apart from each other by a rotation mechanism.

The substrate S can be gripped by the pair of gripping members 76 by moving the pair of gripping members 76 in the direction of approaching each other across the substrate S.

The driving block 77 may be constituted by a linear movement mechanism such as an actuator using air pressure or oil pressure, a linear motor operating under electromagnetic interaction, or a ball screw mechanism, which is connected to the moving block 75.

The moving block 75 is moved toward the substrate S by the driving block 77, and the pair of holding members 76 can hold the substrate S. When the holding members 76 release the substrate S, the driving block 77 moves the moving block 75 in a direction away from the substrate, and the pair of holding members 76 can be spaced apart from the substrate S.

As shown in fig. 2 and 3, the second transfer unit 80 serves to hold the second portion S2 of the substrate S and move the substrate S in the Y-axis direction. The second transfer unit 80 includes a pair of second gripper modules 81 that grip both ends (edge portions) of the substrate S in the X-axis direction, and a pair of guide rails 82 that extend in the Y-axis direction. The second gripper module 81 is movable along the guide rail 82 in the Y-axis direction.

On the other hand, in the substrate detection apparatus according to the embodiment of the present invention, the pair of second clamp modules 81 hold both ends of the substrate S in the X-axis direction. However, the present invention is not limited to this, and the configuration in which one second clamp module 81 holds only one of the two ends of the substrate S in the X-axis direction is also applicable to the present invention.

As shown in fig. 3, the second clamp module 81 includes a connection block 83, a moving block 85, a pair of holding members 86, and a driving block 87, wherein the connection block 83 is connected to the guide rail 82, the moving block 85 is provided on the connection block 83 in a manner movable in the X-axis direction, the pair of holding members 86 are mounted on the moving block 85, and the pair of holding members 86 are movable in a manner adjacent to or spaced apart from each other, and the driving block 87 moves the moving block 85 in the X-axis direction.

A linear movement mechanism such as an actuator using air pressure or oil pressure, a linear motor operating under electromagnetic interaction, or a ball screw mechanism may be provided between the connection block 83 and the guide rail 82. Accordingly, in a state where the holding member 86 holds the substrate S, the connection block 83 can be moved in the Y-axis direction along the guide rail 82 by the linear movement mechanism, whereby the substrate S can be moved in the Y-axis direction.

The pair of holding members 86 can be linearly moved by a linear movement mechanism such as an actuator using pneumatic or hydraulic pressure, a linear motor operating under electromagnetic interaction, or a ball screw mechanism, and the pair of holding members 86 can be moved in directions adjacent to or spaced apart from each other. As another example, the pair of holding members 86 may be rotated in directions adjacent to each other or spaced apart from each other by a rotation mechanism.

The pair of holding members 86 move so as to be adjacent to each other with the substrate S therebetween, and the substrate S is held by the pair of holding members 86.

The driving block 87 may be configured as a linear movement mechanism such as an actuator using air pressure or oil pressure, a linear motor operating under electromagnetic interaction, or a ball screw mechanism, which is connected to the moving block 85.

The moving block 85 is moved toward the substrate S by the driving block 87, and the pair of holding members 86 can hold the substrate S. When the holding members 86 release the substrate S, the driving block 87 moves the moving block 85 in a direction away from the substrate, and the pair of holding members 86 are spaced apart from the substrate S.

On the other hand, the first clamp module 71 is disposed on the upstream side in the transfer direction of the substrate S with the substrate detection area a as the center, and the second clamp module 81 is disposed on the downstream side in the transfer direction of the substrate S with the substrate detection area a as the center.

The first clamp module 71 holds the first portion S1 of the substrate S existing adjacent to or at the rear end of the substrate S and moves in the Y-axis direction, and thus the substrate S can move from the first loading table 21 to the substrate detection unit 10. Thus, the second portion of the substrate S existing adjacent to the leading end of the substrate S or existing at the trailing end of the substrate S may pass through the substrate detection area a.

The second clamp module 81 holds the second portion S2 passing through the substrate detection area a and moves in the Y-axis direction, and thus the substrate S can move from the substrate detection unit 10 to the second loading table 22. Thereby, the first portion S1 may pass through the substrate detection area a.

Here, the second clamp module 81 does not hold the second portion S2 in the process of holding the first portion S1 by the first clamp module 71 and moving the second portion S2 through the substrate detection area a. That is, the holding member 86 of the second clamp module 81 is kept spaced apart from the substrate S by the driving block 87.

Therefore, in the process of passing the second portion S2 through the substrate detection area a, the entire upper and lower surfaces of the substrate S corresponding to the second portion S2 are not blocked by the second clamp module 81, and are exposed upward and downward, respectively. Accordingly, the entirety of the upper and lower surfaces of the substrate S corresponding to the second portion S2 can be detected by the substrate detection unit 10.

In the process of holding the second portion S2 by the second clamp module 81 and moving the first portion S1 through the substrate detection area a, the first clamp module 71 does not hold the first portion S1. At this time, the holding member 76 of the first clamp module 71 is kept spaced apart from the substrate S by the driving block 77.

Therefore, in the process of passing the first portion S1 through the substrate detection area a, the entire upper and lower surfaces of the substrate S corresponding to the first portion S1 are not blocked by the first clamp module 71, and are exposed upward and downward, respectively. Accordingly, the entire upper and lower surfaces of the substrate S corresponding to the first portion S1 can be detected by the substrate detection unit 10.

A substrate detection method using the substrate detection apparatus according to the embodiment of the present invention will be described in detail below with reference to fig. 4 to 8.

Fig. 4 is a graph showing the time-dependent change in the speed of the first jig module 71 and the second jig module 81.

First, in a state where air is discharged from the air discharge holes of the first loading table 21 and the second loading table 22, the substrate S is carried into the first loading table 21 by the substrate carrying unit 40. As shown in fig. 4 and 5, at a 1 st point t1, the first clamp module 71 holds the first portion S1 of the substrate S.

Then, in the section between the 1 st time t1 and the 2 nd time t2, the substrate S starts to move as the first gripper module 71 accelerates toward the substrate detection unit 10. At this time, the second clamp module 81 may be positioned in the waiting position in advance.

Again, at time t2, the first gripper module 71 starts moving at a constant speed. As shown in fig. 4 and 6, at time t3, the second portion S2 enters the substrate detection area a. Then, between the 3 rd time t3 and the 4 th time t4, the substrate S is moved at a constant speed by the first clamp module 71, and the entire upper and lower surfaces of the substrate S corresponding to the second portion S2 are detected by the substrate detecting unit 10.

At this time, the second gripper module 81 may accelerate in advance before the 4 th time t4, and the second gripper module 81 may move at the same speed as the first gripper module 71 at the 4 th time t 4.

Then, as shown in fig. 4 and 7, at time t5, the first clamp module 71 releases the first portion S1 and the second clamp module 81 grips the second portion S2 passing through the substrate detection area a. At this time, the first clamp module 71 releases the first portion S1, and the second clamp module 81 does not hold the second portion S2, but the first clamp module 71 may release the first portion S1 immediately after the second clamp module 81 holds the second portion S2. The first clamp module 71 and the second clamp module 81 move at the same speed and at the same time, the first clamp module 71 releases the first portion S1 and the second clamp module 81 grips the second portion S2. Therefore, the substrate S does not stop or the speed of the substrate S does not decrease, and the substrate S can pass through the substrate detection area a at a constant speed, so that the process of detecting the substrate S can be rapidly performed. Also, since the substrate S can pass through the substrate detection area a at a constant speed, the image of the surface of the substrate S obtained by the substrate detection unit 10 is uniform, so that the surface of the substrate S can be detected more accurately and precisely.

Then, after the 5 th time t5, the first gripper module 71 decelerates and stops, and returns to the initial waiting position.

As shown in fig. 4 and 8, between the 5 th time t5 and the 6 th time t6, the first portion S1 passes through the substrate detection area a because the substrate S continues to move at a constant speed toward the second loading table 22 while being held by the second clamp module 81. Thereby, the entirety of the upper and lower surfaces of the substrate S corresponding to the first portion S1 can be detected by the substrate detecting unit 10.

After the entire upper and lower surfaces of the substrate S pass through the substrate detection area a (after time t6 of the 6 th time), the second clamp module 81 decelerates and stops, and at time t7 of the 7 th time, the second clamp module 81 releases the second portion S2.

Then, the inspected substrate S is carried out from the second loading table 22 to a subsequent process by the substrate carrying unit 40. At this time, the second clamp module 81 returns to the initial waiting state.

According to the substrate detection apparatus and the substrate detection method of the embodiment of the invention, the first clamp module 71 is provided on the upstream side with respect to the substrate detection area a, the second clamp module 81 is provided on the downstream side with respect to the substrate detection area a, the first clamp module 71 moves in a state of holding the first portion S1 of the substrate S existing adjacent to the trailing end of the substrate S or existing at the trailing end of the substrate S, the second portion S2 of the substrate S existing adjacent to the leading end of the substrate S or existing at the trailing end of the substrate S passes through the substrate detection area a, the first portion S1 is released after the second portion S2 passes through the substrate detection area a, and the second clamp module 81 moves in a state of holding the second portion S2 having passed through the substrate detection area a before or while the first clamp module 71 releases the first portion S1, so that the first portion S1 passes through the substrate detection area a. Therefore, the entire upper and lower surfaces of the substrate S are not blocked by the first and

second clamp modules

71 and 81 and are exposed above and below the substrate S during the process of passing the substrate S through the substrate detection area a. Thus, the entirety of the upper surface and the lower surface including the edge portion of the substrate S can be detected by the substrate detection unit 10 at one time. Therefore, the number of steps for inspecting the substrate can be reduced, and the time required for inspecting the substrate can be reduced.

While the preferred embodiments of the present invention have been described in the examples, the scope of the present invention is not limited to the specific embodiments, and may be appropriately modified within the scope of the claims.

Claims

1. A substrate detection method, wherein the substrate detection method detects a surface of a substrate using a substrate detection apparatus, the substrate detection apparatus comprising: a substrate detection unit disposed in the substrate detection region for detecting a surface of the substrate; a first jig module provided on an upstream side in a transfer direction of the substrate with respect to the substrate detection area; a second jig module provided on a downstream side in a transfer direction of the substrate with respect to the substrate detection area,

the substrate detection method comprises the following steps:

(b) A step of moving the first jig module so that a second portion of the substrate existing adjacent to the leading end of the substrate or existing at the trailing end of the substrate passes through the substrate detection area;

(c) Accelerating the second gripper module while moving the first gripper module;

(d) A step of holding the second portion having passed through the substrate detection area by the second clamp module, the first clamp module releasing the first portion; and

(e) And a step of moving the second jig module to pass the first portion through the substrate detection area.

2. The substrate inspection method according to claim 1, wherein,

in the step (d), the action of releasing the first portion by the first clamp module and the action of holding the second portion by the second clamp module are performed simultaneously.

3. The substrate detection method according to claim 1 or 2, wherein,

in the step (d), the operation of releasing the first portion by the first gripper module and the operation of holding the second portion by the second gripper module are performed while the first gripper module and the second gripper module are moving at the same speed.

4. The substrate detection method according to claim 1 or 2, wherein,

in the step (d), the first gripper module releases the first portion and the second gripper module holds the second portion, and the first gripper module and the second gripper module are moved at a constant speed.

5. The substrate inspection method according to claim 1, wherein,

in the step (c), acceleration of the second gripper module is performed before the second portion passes through the substrate detection area.

6. A substrate detection apparatus, wherein the substrate detection apparatus comprises:

a substrate detection unit configured in the substrate detection area and detecting the surface of the substrate;

a first jig module positioned on an upstream side of the substrate transfer direction with respect to the substrate detection area; and

a second jig module positioned on a downstream side in a transfer direction of the substrate with respect to the substrate detection area,

the first clamp module moves in a state of holding a first part of the substrate existing adjacent to or at a trailing end of the substrate, so that a second part of the substrate existing adjacent to or at a leading end of the substrate passes through the substrate detection region, and after the second part passes through the substrate detection region, the first part is released;

accelerating the second gripper module while moving the first gripper module in a state where the first gripper module holds the first portion;

before or while the first gripper module releases the first portion, the second gripper module moves in a state of gripping the second portion that has passed through the substrate detection area so that the first portion passes through the substrate detection area.

7. The substrate detection apparatus according to claim 6, wherein,

the first gripper module releasing the first portion and the second gripper module holding the second portion are performed while the first gripper module and the second gripper module are moving at the same speed.

8. The substrate detection apparatus according to claim 6, wherein,

the first gripper module releases the first portion and the second gripper module holds the second portion, and the first gripper module and the second gripper module move at a constant speed.

9. The substrate detection apparatus according to claim 6, wherein,

acceleration of the second gripper module is performed before the second portion passes through the substrate detection area.

10. The substrate detection apparatus according to claim 6, wherein,

the substrate detection unit comprises a lower surface detection module for detecting the lower surface of the substrate and an upper surface detection module for detecting the upper surface of the substrate;

the lower surface detection module and the upper surface detection module are spaced apart from each other in a transfer direction of the substrate.

11. The substrate detection apparatus according to claim 10, wherein,

an intermediate loading stage supporting the substrate is provided between the lower surface detection module and the upper surface detection module.

12. The substrate detection apparatus according to claim 10, wherein,

the lower surface detection module or the upper surface detection module includes:

a light source for irradiating light to the lower surface or the upper surface of the substrate; and

a camera shooting the lower surface or the upper surface of the substrate,

the camera is configured to be adjustable in angle towards the substrate.