CN111206215A

CN111206215A - Mask plate

Info

Publication number: CN111206215A
Application number: CN202010131342.2A
Authority: CN
Inventors: 余强根; 王水俊; 王亚; 卓林海
Original assignee: Yungu Guan Technology Co Ltd
Current assignee: Yungu Guan Technology Co Ltd
Priority date: 2020-02-28
Filing date: 2020-02-28
Publication date: 2020-05-29

Abstract

The invention provides a mask, and belongs to the technical field of display. The mask comprises a mask body and a frame, wherein the mask body comprises a welding area and a non-welding area; the frame is used for supporting the mask plate body and comprises two opposite frames; the at least one frame of the frame is connected with the welding area of the mask body through at least two welding point groups distributed along the direction far away from the non-welding area, the at least two welding point groups comprise a first welding point group and a second welding point group which are closest to the non-welding area, and projections of a plurality of welding points of the first welding point group and the second welding point group on the plane where the connecting surface of the welding area and the non-welding area is located are at least partially not overlapped. The mask plate has uniform stress distribution, the folding degree is reduced, and the yield is improved.

Description

Mask plate

Technical Field

The invention relates to the technical field of display, in particular to a mask.

Background

The OLED (Organic Light-Emitting Diode) display technology has the characteristics of being Light and thin, low in power consumption, high in contrast, high in color gamut, capable of realizing flexible display, and the like, and thus is gradually becoming a main development direction of the flat panel display technology. The OLED display panel is generally manufactured by evaporating an organic material onto a substrate. Evaporation of organic materials typically requires the use of a reticle to form the various patterned film layers. The Mask may be a Common Metal Mask (CMM), a Fine Metal Mask (FMM), or the like. However, the mask used in the manufacture of the display panel has a wrinkle problem, which affects the quality of the OLED display panel.

Disclosure of Invention

In view of the above, the present invention provides a mask to reduce the wrinkle degree of the mask and improve the yield of the display panel.

In order to solve the technical problems, the invention adopts a technical scheme that: providing a mask plate, which comprises a mask plate body and a frame, wherein the mask plate body comprises a welding area and a non-welding area; the frame is used for supporting the mask plate body and comprises two opposite frames; the at least one frame of the frame is connected with the welding area of the mask body through at least two welding point groups distributed along the direction far away from the non-welding area, the at least two welding point groups comprise a first welding point group and a second welding point group which are adjacent, and at least part of projections of a plurality of welding points of the first welding point group and the second welding point group on the plane where the connecting surface of the welding area and the non-welding area is located are not overlapped.

The welding area is the area where the mask body is correspondingly contacted and connected with the frame. The non-welding area is the film layer of the mask plate body corresponding to the evaporation coating display panel.

At least two welding point groups are arranged between one frame of the mask and a welding area of the mask body, and at least part of welding points of the first welding point group and the second welding point group which are closest to a non-welding area are staggered because at least part of the projection of the welding points on a plane where a connecting surface of the welding area and the non-welding area is positioned is not overlapped. Therefore, the fold degree of the welding area and the non-welding area of the mask edition body can be reduced, the probability of false welding of the mask edition body on the frame of the frame is reduced, the fold degree of the non-welding area of the mask edition body is reduced, the alignment precision of the mask edition body is improved, and the yield of the mask edition is improved.

Wherein the at least two solder joint groups include two solder joint groups, three solder joint groups, or four solder joint groups. When the welding spot components are two welding spot components, the folding degree of the mask can be reduced by at least partially arranging the welding spots in the first welding spot group and the second welding spot group in a staggered manner; when three welding spot groups or four welding spot groups are arranged, the welding firmness of the mask plate body and the frame can be further improved.

The projections of the welding points of the first welding point group and the second welding point group on the plane where the welding area is located and the connecting surface of the non-welding area are not overlapped, and the welding points in the first welding point group and/or the second welding point group are arranged at equal intervals. Namely, the welding spots of the first welding spot group and the second welding spot group are all arranged in a staggered mode, so that the stress distribution of the mask body caused by the first welding spot group and the second welding spot group is more uniform. Preferably, the first welding point groups are arranged at equal intervals, so that the frame and the mask version body are welded more firmly and uniformly. More preferably, the first welding point group and the second welding point group are arranged at equal intervals, stress distribution is more uniform after the frame and the mask version body are welded through the welding points, and the folding degree of the mask version body is reduced.

At least part of welding points of the second welding point group are positioned on a perpendicular bisector of the first welding point group, wherein the centers of two adjacent welding points are connected. The two adjacent welding spots of the first welding spot group and the welding spots of the second welding spot group on the perpendicular line form an isosceles triangle, and the stress of the mask plate body on the two adjacent welding spots of the first welding spot group can be uniformly dispersed through the welding spots on the perpendicular line of the center connecting lines of the two adjacent welding spots of the first welding spot group in the second welding spot group, so that the stress distribution of the mask version body is more uniform.

Two adjacent welding spots of the first welding spot group and the welding spots of the second welding spot group on the perpendicular bisector of the central connecting line of the two adjacent welding spots of the first welding spot group form an acute triangle. When two adjacent welding spots in the first welding spot group and corresponding welding spots in the second welding spot group form an acute triangle, the relationship between the distance between the first welding spot group of the second welding spot group and the distance between two adjacent welding spots in the first welding spot group is controlled, namely, the distance between the second welding spot group and the first welding spot assembly is greater than half of the distance between two adjacent welding spots of the first welding spot group, so that the dispersion degree of the welding spots in the second welding spot group and the welding spots in the first welding spot group is greater, the stress of the mask plate body at the two adjacent welding spots of the first welding spot group can be better dispersed after the frame and the mask version body are welded, and the non-uniform stress distribution degree of the mask plate body caused after the mask plate body and the frame are welded can be greatly reduced.

And the connecting line of each welding spot in the first welding spot group is parallel to the connecting line of each welding spot in the second welding spot group. The connecting lines of the welding spots in the first welding spot group and the second welding spot group are preferably equal to each other and are respectively on the same straight line, and the connecting lines of all the welding spots in the first welding spot group and the second welding spot group are parallel, so that the stress dispersion degree uniformity of the mask plate on the first welding spot group is enhanced by the second welding spot group, the dispersion effect is improved, and the wrinkle degree of the mask plate body is further reduced.

Wherein the distance between two adjacent welding spots in the first welding spot group is 1.6-3.2 mm, and/or the distance between two adjacent welding spots in the second welding spot group is 1.6-3.2 mm. The distance between welding points can be larger, the number of the welding points is reduced, and the welding time is saved; meanwhile, the bonding strength between the mask body and the frame of the frame can be ensured, so that the mask cannot fall off or deform in the later evaporation process.

Preferably, the distance between two adjacent solder points in the first solder point group is 2.3-3.2 mm and/or the distance between two adjacent solder points in the second solder point group is 2.3-3.2 mm. The distance between the welding points is within the range, so that the welding time is short; and the bonding strength between the mask body and the frame of the frame can be ensured.

Preferably, the number of welding points in at least two welding point groups along the direction far away from the non-welding area is distributed in an equidifferent decreasing mode, and the tolerance is preferably two. The welding points at the two ends of the first welding point group close to the non-welding area of the mask body are located on the outermost sides of the two adjacent welding point groups, so that the mask is used for evaporation in-process, when the mask body is deposited on the mask body due to evaporation materials, the welding points at the two ends of the first welding point group serve as stress fulcrums, the mask body is less affected by the gravity or other forces of the evaporation materials on the mask body, and the service life of the mask body is prolonged.

At least two welding spot groups are arranged between each frame of the two opposite frames and the welding area of the mask body. This can support the fixed reticle body by two rims.

Wherein, at least two welding spot groups are all arranged on the frame. The welding liquid is arranged on the frame, so that when the mask version body is welded on the frame, the mask version body is easy to control and is less influenced by the welding liquid.

The invention has the beneficial effects that: different from the prior art, in the mask provided by the embodiment of the invention, at least two welding point groups are arranged between the frame and the welding area of the mask body, and at least part of welding points of the first welding point group and the second welding point group closest to the non-welding area are staggered due to the fact that at least part of the welding points are not overlapped in projection on the plane where the connecting surface of the welding area and the non-welding area is located, so that when the mask body is welded on one frame of the frame, the stress of the mask body is uniformly distributed, that is, the stress of the welding area and the non-welding area of the mask body is uniformly distributed. The fold degree of the welding area and the non-welding area of the mask edition body can be reduced, the probability of false welding of the mask edition body on the frame of the frame is reduced, the fold degree of the non-welding area of the mask edition body is reduced, the alignment precision of the mask edition body is improved, and the yield of the mask edition evaporation display panel is improved.

Drawings

FIG. 1 is a schematic view of a related art reticle structure;

FIG. 2 is a schematic structural diagram of an embodiment of a reticle of the present invention;

FIG. 3 is a schematic structural diagram of a first embodiment of the arrangement of solder joint groups according to the present invention;

FIG. 4 is a schematic structural diagram of a second embodiment of the arrangement of solder joint groups according to the present invention;

FIG. 5 is a schematic structural diagram of a third embodiment of the arrangement of solder joint groups according to the present invention;

FIG. 6 is a schematic structural diagram of a solder joint group arrangement according to a fourth embodiment of the present invention;

FIG. 7 is a schematic structural diagram of a fifth embodiment of the arrangement of solder joint groups according to the present invention;

FIG. 8 is a schematic structural diagram of a sixth exemplary arrangement of solder joint groups according to the present invention;

FIG. 9 is a schematic structural diagram of a seventh exemplary arrangement of solder joint groups according to the present invention;

FIG. 10 is a graph showing the wrinkle level test of the masks of the present invention and the prior art.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

In the manufacturing process of the OLED display panel, a mask plate is generally adopted to evaporate a film layer of the OLED display panel. With the improvement of the resolution of the display panel, the higher the precision requirement on the mask, the thinner the thickness of the formed mask. As shown in fig. 1, a frame 1 is generally used to support and fix a reticle body 2. During the manufacturing process of the mask body 2, an etching process is usually used to etch pixel holes (not shown) in the mask body 2. Due to the influence of the etching precision of the equipment, the etched pixel holes have difference, the etching is uneven, the tensile strength of each area is uneven, and when the mask plate body 2 is welded on the frame 1 through a welding process, wrinkles are easy to generate. In the welding process, when the mask body 2 has wrinkles, the mask body 2 is not tightly attached to the frame 1 easily, and the false welding probability of the mask body 2 and the frame 1 is increased. In addition, the wrinkle phenomenon of the mask body 2 can reduce the alignment precision of the mask body 2. When a mask is used for evaporating a film layer of a display panel, for example, evaporating light emitting layers of sub-pixels with different colors, the light emitting layer material with the color corresponding to one sub-pixel is easily evaporated into the sub-pixel adjacent to the sub-pixel, so that the color cast and color mixing risks of the evaporation of the material with different light emitting colors are increased.

The embodiment of the invention provides a mask, as shown in fig. 2, the mask comprises a mask body 2 and a frame 1, wherein the mask body 2 comprises a welding area 21 and a non-welding area 22; the frame 1 is used for supporting the mask plate body 2, and the frame 1 comprises two opposite side frames 11; at least one frame 11 of the frame 1 is connected with the welding area 21 of the mask body 2 through at least two welding point groups 3 arranged in a direction away from the non-welding area 22, as shown in fig. 2 and 3, the at least two welding point groups 3 include a first welding point group 31 and a second welding point group 32 which are closest to the non-welding area 22, and projections of a plurality of welding points 301 of the first welding point group 31 and the second welding point group 32 on a plane where a connection surface of the welding area 21 and the non-welding area 22 is located are at least partially non-overlapped. In addition, the frame 1 may further include a second pair of rims 11 disposed between the two opposing rims 11, such that the four rims 11 constitute the rectangular frame 1.

In the mask of the embodiment of the invention, at least two welding point groups 3 are arranged between one frame 11 of the mask and the welding area 21 of the mask body 2, and the projection of at least part of the welding points 301 of the first welding point group 31 and the second welding point group 32 closest to the non-welding area 22 on the plane where the connecting surface of the welding area 21 and the non-welding area 22 is located is not overlapped, so that at least part of the welding points 301 of the first welding point group 31 and the second welding point group 32 are arranged in a staggered manner, and at least part of the welding points 301 of the two welding points 3 are arranged in a staggered manner, so that when the mask body 2 is welded on one frame 11 of the frame 1, the distribution of the welding points 301 is more dispersed, the stress distribution of the mask body 2 is more uniform, and the stress distribution of the welding area 21 and the non-welding area. When the stress of the welding area 21 of the mask plate body 2 is uniformly distributed, the wrinkle degree of the welding area 21 of the mask plate body 2 can be reduced, and the probability of the false welding of the mask plate body 32 on the frame 11 of the frame 1 is reduced; when the stress distribution of the non-welding area 22 of the mask plate body 2 is uniform, the wrinkle degree of the non-welding area 22 of the mask plate body 32 is reduced, the alignment precision of the mask plate body 2 can be improved, and when the light-emitting materials of the sub-pixels with different colors are evaporated by the mask plate, the alignment precision of the non-welding area 22 of the mask plate body 2 is high, so that the color cast and color mixing risks of the evaporation of the materials with different light-emitting colors can be greatly reduced.

In the embodiment of the present invention, the at least two welding point groups 3 include two welding point groups 3, and when two welding point groups 3 are provided, the folding degree of the mask can be reduced by at least partially staggering the welding points 301 in the first welding point group 31 and the second welding point group 32. In another embodiment, as shown in fig. 8 and 9, the at least two weld spot groups 3 may also be three weld spot groups 3, including a first weld spot group 31, a second weld spot group 32, and a third weld spot group 33, wherein the second weld spot group 32 is at least partially staggered from the weld spots 301 of the first weld spot group 31, and further, as shown in fig. 8, the second weld spot group 32 is completely staggered from the weld spots 301 of the first weld spot group 31. The second pad group 32 is partially staggered with the pads 301 of the first pad group 31 as shown in FIG. 9; the third welding point group 33 and the welding points 301 of the second welding point group 32 are at least partially arranged in a staggered mode; the welding spots 301 in the first welding spot group 31 and the second welding spot group 32 are at least partially arranged in a staggered manner, so that the wrinkle degree of the mask can be reduced, and the welding firmness of the mask body 2 and the frame 1 can be further improved by the third welding spot group 33. In another embodiment, the at least two welding point sets 3 may also be four welding point sets 3, wherein the welding points 301 in the first welding point set 31 and the second welding point set 32 are at least partially staggered, and the welding firmness of the mask body 2 and the frame 3 can be further improved by the third welding point set 33 and the fourth welding point set (not shown). The welding point groups 3 within four and less than four are the preferred number of the welding point groups 3, and when the number of the welding point groups 3 is more than four, the contact surface between the mask plate body 2 and the frame 11 is easy to be too wide.

As shown in fig. 3, the projection portions of the plurality of solder joints 301 of the first solder joint group 31 and the second solder joint group 32 on the plane where the connection surface of the solder area 21 and the non-solder area 22 is located do not overlap, that is, the solder joints 301 of the first solder joint group 31 and the second solder joint group 32 are partially staggered. Further, the solder points 301 in the second solder point group 32, which overlap with the projections of the solder points 301 in the first solder point group 31 on the plane where the connection surface of the land 21 and the non-land 22 is located, may be disposed at arbitrary positions. Preferably, in order to make the stress distribution of the mask body 2 more uniform, the solder points 301 in the second solder point group 32, which overlap with the projection of the solder points 301 in the first solder point group 31 on the plane where the connecting surface of the welding area 21 and the non-welding area 22 is located, are arranged at intervals between the solder points 301 in the second solder point group 32, which overlap with the projection of the solder points 301 in the first solder point group 31 on the plane where the connecting surface of the welding area 21 and the non-welding area 22 is located, as shown in fig. 4, the solder points 322 in the second solder point group 32 are arranged between the solder points 321 and 323, wherein the solder points 322 overlap with the projection of the solder points 301 in the first solder point group 31 on the plane where the connecting surface of the welding area 21 and the non-welding area 22; the solder joints 322, 323 do not overlap with the projections of the solder joints 301 in the first solder joint group 31 on the plane where the connection surface of the soldering zone 21 and said non-soldering zone 22 is located, respectively.

Continuing with fig. 3 and 4, it is preferred that a portion of the pads 301 of the second pad set 32 be located on a perpendicular bisector between two adjacent pads 301 of the first pad set 31. Two adjacent welding points 301 of the first welding point group 31 and the welding points 301 of the second welding point group 32 on the perpendicular line form an isosceles triangle, and the dispersion degree of the stress of the mask body 2 caused by the welding points 301 of the second welding point group 32 to the two adjacent welding points 301 of the first welding point group 31 is the same, so that the stress distribution of the mask body 2 is more uniform. Meanwhile, a portion of the pads 301 in the first pad group 31 is located on a perpendicular bisector between two adjacent pads 301 in the second pad group 32. The stress of the mask body 2 at the first welding point group 31 and the second welding point group 32 can be mutually dispersed, so that the stress of the mask body 2 is uniformly distributed.

As a preferable solution of the embodiment of the present invention, as shown in fig. 5, projections of the welding spots 301 of the first welding spot group 31 and the second welding spot group 32 on a plane where the connection surface of the welding area 21 and the non-welding area 22 is located do not overlap, that is, all the welding spots 301 of the first welding spot group 31 and the second welding spot group 32 are arranged in a staggered manner, so that the stress distribution of the mask body 2 caused by the first welding spot group 31 and the second welding spot group 32 is relatively uniform. Further preferably, the first welding point sets 31 are arranged at equal intervals, that is, the first welding point sets 31 closest to the non-welding area 22 of the mask body 2 are arranged at equal intervals, so that stress distribution caused by the influence of the welding points 301 in the non-welding area 22 of the mask body 2 is relatively uniform and firm after the frame 11 is welded to the mask body 2, and the wrinkle degree of the non-welding area 22 is reduced. In a more preferable scheme, the first welding point group 31 and the second welding point group 32 are arranged at equal intervals, so that the second welding point group 32 more uniformly disperses the stress applied to the mask body 2 at the first welding point group 31, and the stress distribution of the non-welding region 22 of the mask body 2 is more uniform. In other embodiments, the second solder joint groups 32 may be arranged at equal intervals, and the intervals between the solder joints 301 of the first solder joint groups 31 are not completely equal.

More preferably, as shown in fig. 5, all the welding spots 301 of the second welding spot group 32 are located on the perpendicular bisector between two adjacent welding spots 301 of the first welding spot group 31, so that the ground stress on the mask body at the first welding spot group 31 and the second welding spot group 32 is dispersed more uniformly, and the stress distribution on the mask body 2 is more uniform.

Further preferably, two adjacent welding spots 301 of the first welding spot group 31 and the welding spots 301 of the second welding spot group 32 located on the perpendicular bisector of the central connecting line of the two adjacent welding spots 301 of the first welding spot group 31 form an acute triangle 302, and by controlling the relationship between the distance between the first welding spot group 31 of the second welding spot group 32 and the distance between the two adjacent welding spots 301 of the first welding spot group 31, that is, the distance between the second welding spot group 32 and the first welding spot group 31 is greater than half of the distance between the two adjacent welding spots 301 of the first welding spot group 31, the degree of dispersion between the welding spots 301 of the second welding spot group 32 and the welding spots 301 of the first welding spot group 31 can be greater, and the stress on the two adjacent welding spots 301 of the mask body 2 in the first welding spot group 31 can be better dispersed by the second welding spot group 32 after the frame 11 is welded with the mask body 2, so that the stress distribution of the mask body 2 caused after the mask body 2 is welded with the frame 11 can be greatly reduced To a uniform extent.

As shown in fig. 3, 4 and 5, in the embodiment of the present invention, all the pads 301 of the first pad group 31 are connected to one straight line, all the pads 301 of the second pad group 31 are connected to another straight line, and the straight line of the first pad group 31 is not overlapped and parallel with the straight line of the second pad group 32. That is, the straight line where the first welding spot group 31 is located is parallel to the straight line where the second welding spot group 32 is located, the uniformity of the stress dispersion degree of the mask plate body 2 on the first welding spot group 31 is enhanced through the second welding spot group 32, the dispersion effect is improved, and the wrinkle degree of the mask plate body 2 is further reduced. In other embodiments, as shown in fig. 6, the straight line where the first welding point group 31 is located and the straight line where the second welding point group 32 is located are in a non-parallel state, that is, an included angle exists between the second welding point group 32 and the first welding point group 31, and the included angle is greater than 0 degree and less than 180 degrees, so that the stress applied to the mask body 2 can be mutually dispersed between the second welding point group 32 and the first welding point group 31.

Wherein, as shown in fig. 5, the distance between two adjacent welding spots 301 in the first welding spot group 31 is 1.6-3.2 mm. Specifically, in the embodiment of the present invention, the distance L between the first welding point groups 31 is 1.6 to 3.2 mm, and the distance L between two adjacent welding points 301 of the first welding point groups 31 is set to be 1.6 to 3.2 mm, so that the distance L between the first welding point groups 31 is relatively large, the number of welding points 301 is reduced, and the welding time is saved; meanwhile, the stress distribution of the mask plate body 2 is more uniform, and the wrinkle degree of the mask plate body 2 is reduced; and the bonding strength between the mask plate body 2 and the frame 11 of the frame 1 can be ensured, so that the mask plate cannot fall off or deform in the later evaporation process. Specifically, in the embodiment of the present invention, the distance L between two adjacent welding points 301 in the first welding point group 31 is 1.6 mm, which is twice the distance between two adjacent welding points 301 of the conventional welding point 301, so that the welding time can be reduced; in addition, in the embodiment of the invention, the welding spots 301 are uniformly distributed, so that the stress distribution uniformity of the mask plate body 2 can be improved. In other embodiments, the distance L between two adjacent welding spots 301 of the first welding spot group 31 may also be 1.8 mm, 1.9 mm, 2.0 mm, 2.2 mm, 2.6 mm, 2.7 mm, 2.9 mm, 3.0 mm, or 3.2 mm. In another embodiment, the distance M between the welding spots 301 in the second welding spot group 32 may be 1.6-3.2 mm. Or the distance between two adjacent welding spots 301 of the first welding spot group 31 and the second welding spot group 32 is 1.6-3.2 mm, wherein the middle welding spots 301 of the first welding spot group 31 and the second welding spot group 32 can be uniformly arranged, so that the stress uniformity of the mask body 2 is easily controlled, and the wrinkle degree of the mask body 2 is easily reduced. In still another embodiment, as shown in fig. 7, the distance between two adjacent welding spots 301 in the first welding spot group 31 is only 1.6-3.2 mm, for example, the distance L1 between the first welding spot 311 and the second welding spot 312 is 1.6 mm, the distance L2 between the second welding spot 312 and the third welding spot 313 is 1.8 mm, and the distance L3 between the third welding spot 313 and the fourth welding spot 314 is 3.2 mm, so that the stress of the reticle body 2 is relatively uniform, the wrinkle degree of the reticle body 2 is reduced, and the welding firmness degree of the reticle body 2 and the frame 11 of the frame 1 is ensured.

In an embodiment, continuing with FIG. 5, the distance between two adjacent welds 301 in the first set of welds 31 is 2.3-3.2 millimeters and/or the distance between two adjacent welds 301 in the second set of welds 32 is 2.3-3.2 millimeters. When the distance between two adjacent welding spots 301 between the first welding spot group 31 and/or the second welding spot group 32 is 2.3-3.2 mm, when the mask body 2 is welded with the frame 11 of the frame 1, the welding time can be obviously reduced, the welding efficiency can be improved, and the wrinkle degree of the mask can be reduced. Specifically, in the embodiment of the present invention, the distance L between any two adjacent welding spots 301 in the first welding spot group 31 is 2.3 mm, the distance M between any two adjacent welding spots 301 in the second welding spot group 32 is also 2.3 mm, the first welding spot group 31 and the second welding spot group 32 are uniformly distributed in a staggered manner, and have equal distances, so that the stress distribution is uniform, and the wrinkle degree of the mask body 2 can be significantly reduced. In other embodiments, the distance between any two adjacent solder points 301 in the first solder point set 31 can also be 2.4 mm, 2.6 mm, 2.8 mm, or 3.1 mm. The distance M between any two adjacent pads 301 in the second pad group 32 is equal to the distance L between any two adjacent pads 301 in the first pad group 31.

In an embodiment, as shown in fig. 4 and 9, the number of the welding points 301 in at least two welding points along the direction away from the non-welding area is distributed in an equal difference decreasing manner, and the tolerance is preferably two, specifically, in an embodiment of the present invention, as shown in fig. 4, the number of the welding points 301 in the first welding point group 31 close to the non-welding area 22 is five, and the number of the welding points 301 in the second welding point group 32 is three; as shown in fig. 9, the number of the pads 301 of the first pad group 31 near the non-land 22 is six, the number of the pads 301 of the second pad group 32 is four, and the number of the pads 301 of the third pad 33 is two; the embodiment of the present invention is only a specific example, and is not limited to the specific number of the pads 301 of each pad group 3, and the number of the pads 301 of the first pad group 31 may be other numbers, and the number of the pads 301 of the first pad group 31 is determined according to the length of the intersection line (i.e., along the first direction D1 shown in fig. 2) of the connection surface of the non-pad 22 and the pad 21 of the mask version body and the plane of the frame 11. As the length of the connecting line between the non-welding region 22 and the welding region 21 of the mask body 2 and the plane of the frame 11 increases, the number of welding points 301 of the first welding point group 31 increases. In the embodiment of the present invention, the first solder joint group 31 and the second solder joint group 32 are disposed along a plane parallel to the connection surface between the soldering region 21 and the non-soldering region 22, that is, the first solder joint group 31 and the second solder joint group 32 are sequentially disposed along the first direction D1, the first solder joint group 31 and the second solder joint group 32 are disposed in a staggered manner, the number of the solder joints 301 of the first solder joint group 31 is two more than that of the solder joints 301 of the second solder joint group 32, so that the solder joints 301 at two ends of the first solder joint group 31 close to the non-soldering region 22 of the mask body 2 are located at the outermost sides of the two adjacent solder joints 3, so that when the mask body 2 is used for evaporation, when the mask body 2 is deposited on the mask body 2 due to an evaporation material, the solder joints 301 at two ends of the first solder joint group 31 serve as stress fulcrums, so that the mask body 2 is less affected by gravity or other forces of the evaporation material, the service life of the mask body 2 is prolonged. In other embodiments, as shown in FIG. 7, the number of welds 301 in the first weld set 31 may also be equal to the number of welds 301 in the second weld set 32.

In the embodiment of the present invention, as shown in fig. 2, at least two welding point groups 3 are disposed between each of the two opposite frames 11 and the welding region 21 of the mask body 2, and the two opposite frames 11 are disposed in parallel. Specifically, in the embodiment of the present invention, the welding point groups 3 in the two frames 11 are symmetrically arranged, so that the stress on the two ends of the mask body 2 is uniform, the stress distribution uniformity of the whole mask body 2 is improved, and the wrinkle degree of the mask body 2 is reduced.

Wherein, at least two welding spot groups 3 are arranged on the frame 1. In the embodiment of the present invention, the welding liquids of the first welding point group 31 and the second welding point group 32 are both disposed on the two side frames 11 of the frame 1, and then the mask body 2 is welded on the side frames 11 of the frame 1 through the welding liquids. In other embodiments, as shown in fig. 8 and 9, when there are multiple rows of welding points 301, the multiple rows of welding points 301 are disposed on the frame 11 of the frame 1. In another embodiment, the solder points 301 may also be disposed on the mask body 2, specifically, the solder solution is disposed on the mask body 2, and the mask body 2 is fixed on the frame 11 of the frame 1 by the solder solution.

Specifically, in the embodiment of the present invention, as shown in fig. 2, the degree of wrinkling of the evaporation effective region 221 of the mask body 2 is tested. The evaporation coating effective area 221 is located in the non-welding area 221 of the mask body 2 and is used for evaporation coating an effective area of a film layer of the display panel.

The mask comprises a mask frame 1 and mask bodies 2, in this embodiment, the number of the mask bodies 2 is nine, and for the convenience of distinguishing, the nine mask bodies 2 which are sequentially arranged are named as a first mask body 201, a second mask body 202, a third mask body 203, a fourth mask body 204, a fifth mask body 205, a sixth mask body 206, a seventh mask body 207, an eighth mask body 208 and a ninth mask body 209 respectively.

As shown in fig. 2 and 5, the first mask body 201, the second mask body 202, the third mask body 203 and the frame 1 are fixed in the same manner, wherein one side of the frame 1 is connected to the welding region 21 of the mask body 2 through two welding point sets 3 arranged in the direction away from the non-welding region 22, the first welding point set 31 is closest to the non-welding region 22, the other one is the second welding point set 32, projections of a plurality of welding points 301 of the first welding point set 31 and the second welding point set 32 on a plane where the connection surface of the welding region 21 and the non-welding region 22 is located are all not overlapped, the number of welding points 301 of the first welding point set 31 and the second welding point set 32 is the same, the number of welding points 301 is five, and the welding points are arranged at equal intervals, the distance between two adjacent welding points 301 in the first welding point set 31 is 2.5 mm, the distance between two adjacent welding points 301 in the second welding point set is 2.5 mm, four of the pads 301 of the second pad group 32 are located on the perpendicular bisector of the connecting line between the centers of two adjacent pads 301 of the first pad group 31, the two adjacent pads 301 of the first pad group 31 and the pads 301 of the second pad group 32 located on the perpendicular bisector of the connecting line between the centers of two adjacent pads 301 of the first pad group 31 form an acute triangle 302, and the first pad group 31 is parallel to the second pad group 32.

As shown in fig. 2 and 6, the fourth mask body 204 and the fifth mask body 205 are fixed to the frame 1 in the same manner, and the difference from the first mask body 201 is that the fourth mask body 204 and the fifth mask body 205 are parallel to the non-welding-area connection surface of the welding area with the first welding point group 31, the second welding point group 32 is not parallel to the first welding point group 31, and has a certain included angle of 30 °, and the distance between two adjacent welding points 301 in the second welding point group 32 is equal and 2.89 mm. The other fixing modes are the same as the fixing mode of the first mask body 201, namely, the distance between two adjacent welding spots 301 in the first welding spot group 31 is equal and is 2.5 mm, the connecting line of the welding spots 301 in the first welding spot group 31 is parallel to the plane where the connecting surface of the welding area 21 and the non-welding area 22 of the mask body 2 is located, the welding spots 301 in the second welding spot group 31 are located on the perpendicular bisector of the central connecting line of two adjacent welding spots 301 in the first welding spot group 32, and the two adjacent welding spots 301 in the first welding spot group 32 and the welding spots 301 in the second welding spot group 32 located on the perpendicular bisector of the central connecting line of two adjacent welding spots 301 in the first welding spot group 31 form an acute triangle 302.

As shown in fig. 2 and 4, the sixth mask body 206 and the seventh mask body 207 are fixed to the frame 1 in the same manner, two solder joint groups 3 are disposed between one frame 11 and the mask body, and projection portions of a plurality of solder joints 301 of the first solder joint group 31 and the second solder joint group 32 on a plane where the connection surface of the welding region 21 and the non-welding region 22 is located do not overlap, wherein the number of solder joints 301 in the first solder joint group 31 is five, and the solder joints are arranged at equal intervals, and a distance between two adjacent solder joints 301 is 2.0 mm; three welding spots 301 are arranged in the second welding spot group 32, the three welding spots 301 are welding spots 321, 322 and 323 in sequence, the projection parts of the welding spot 322 in the second welding spot group 32 and the welding spot 301 in the first welding spot group 31 on the plane where the connecting surface of the welding area 21 and the non-welding area 22 is located are overlapped, the welding spots 321 and 323 in the second welding spot group 32 are respectively overlapped with the projection parts of the welding spot 301 in the second welding spot group 31 on the plane where the connecting surface of the welding area 21 and the non-welding area 22 is located, the welding spots 322 are arranged between the welding spots 321 and 323 at intervals, and the connecting line of the welding spots 301 in the first welding spot group 31 and the connection lines of the welding spots 321, 322 and 323 in the second welding spot group 32 are all parallel to the connecting surface of the non-; the welding points 321 and 323 are located on the perpendicular bisector of the connecting line between the two adjacent welding points 301 of the first welding point group 31, the two adjacent welding points 301 of the first welding point group 31 and the welding points 321 and 323 of the second welding point group 32 located on the perpendicular bisector of the central connecting line between the two adjacent welding points 301 of the first welding point group 31 respectively form an acute triangle 302, and the welding point 322 is located at the welding point 301 in the first welding point group 31.

As shown in fig. 2 and 9, the eighth reticle body 208 and the ninth reticle body 209 are fixed to the frame 1 in the same manner, the eighth reticle body 208 and the ninth reticle body 209 are provided with three welding point sets 3 with the frame 1, the three welding point sets 3 include a first welding point set 31, a second welding point set 32 and a third welding point set 33 which are closest to the non-welding area 22, and a welding point 301 connection line in the first welding point set 31, a welding point 301 connection line in the second welding point set 32 and a welding point 301 connection line in the third welding point are all parallel to a connection surface between the non-welding area 22 and the welding area 21 of the reticle body 2; the number of the welding spots 301 in the first welding spot group 31 is six, the welding spots are arranged at equal intervals, and the distance between two adjacent welding spots 301 is 2.0 mm; the number of the welding spots 301 in the second welding spot group 32 is four, the number of the third welding spot 301 in the second welding spot group 32 is two, the projection parts of the welding spots 301 in the first welding spot group 31 and the second welding spot group 32 on the plane where the connecting surface of the welding area 21 and the non-welding area 22 is located are not overlapped, and the projection parts of the welding spots 301 in the third welding spot group 33 and the projection parts of the welding spots 301 in the second welding spot group 32 on the plane where the connecting surface of the welding area 21 and the non-welding area 22 is located are not overlapped. .

Testing 30 points of the evaporation effective regions 221 of the nine mask bodies 2 along the first direction D1 of the mask body 2, wherein the distance between the 30 points is 2mm, and the test result is shown in fig. 10, and the wrinkle height is about 40 micrometers; the soldering time for soldering each reticle body 2 was 7.5 minutes.

Comparative example

As shown in fig. 1, the reticle body 2 and the frame 11 in the present comparative example are connected by two solder sets 3, which is different from the above-described embodiment in that the two solder sets 3 include a first solder set 31 and a second solder set 32 closest to the non-land 22, and projections of the plurality of solder points 301 of the first solder set 31 and the second solder set 32 on a plane where the connection surface of the land 21 and the non-land 22 is located all overlap. The first solder joint groups 31 and the second solder joint assemblies 32 are arranged in two rows and are arranged in parallel, the solder joints of each solder joint group 3 are sequentially distributed at equal intervals, the interval between two adjacent solder joints 301 is 1.2 mm, the number of the solder joints 301 in each solder joint group 3 is nine, and the rest is the same as that of the above embodiment, namely, the mask in the comparative example comprises a mask body 2, a frame 1 comprises four frames 11, wherein, two welding point groups 3 are respectively arranged on each mask body between the two frames 11 which are arranged in parallel relatively and the mask body 2, the distance between any two adjacent welding points 301 of each row of welding points 301 is 1.2 mm, 30 points of the evaporation effective area of one mask body 2 along the first direction D1 of the mask body 2 are tested, wherein the spacing between 30 test points is 2mm, the test result is shown in fig. 10, and the fold height is about 80 microns; the welding time for welding each reticle body 2 was 15 minutes.

In summary, the wrinkle degree of the mask in the embodiment of the present invention can be significantly reduced, and compared with the comparative example, the stress distribution of the mask body 2 in the embodiment of the present invention is uniform, the wrinkle height of the mask body 2 can be reduced to 40 μm, and the welding time of the mask in the embodiment of the present invention can be significantly reduced, and each mask body 2 is reduced by half of the time compared with the comparative example, and can be reduced to 7.5 minutes, so that the overall welding time of the mask body 2 can be greatly reduced, and the mask manufacturing efficiency can be improved.

The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims

1. A reticle, comprising:

the mask version body comprises a welding area and a non-welding area;

the mask plate comprises a frame, a mask plate body and a mask plate, wherein the frame is used for supporting the mask plate body and comprises two opposite side frames;

at least one side of the frame is connected with a welding area of the mask plate body through at least two welding point groups distributed along the direction far away from the non-welding area, the at least two welding point groups comprise a first welding point group and a second welding point group which are closest to the non-welding area, and projections of a plurality of welding points of the first welding point group and the second welding point group on a plane where the connecting surface of the welding area and the non-welding area is located are at least partially not overlapped.

2. The reticle of claim 1, wherein the at least two solder joint groups comprise two solder joint groups, three solder joint groups, or four solder joint groups.

3. The reticle of claim 1, wherein projections of the solder points of the first and second solder point sets on a plane where a connection surface of the solder area and the non-solder area is located do not overlap, and the solder points in the first and/or second solder point sets are equally spaced.

4. The reticle of claim 1, wherein at least a portion of the welds of the second set of welds are located on a midperpendicular of a line connecting centers of two adjacent welds of the first set of welds.

5. The reticle of claim 4, wherein two adjacent pads of the first pad set form an acute triangle with a pad of the second pad set on a perpendicular bisector of a center-to-center line between the two adjacent pads of the first pad set.

6. The reticle of claim 1, wherein a line of the individual welds in the first set of welds is parallel to a line of the individual welds in the second set of welds.

7. The reticle of claim 1, wherein a distance between two adjacent solder bumps in the first solder bump group is 1.6-3.2 mm and/or a distance between two adjacent solder bumps in the second solder bump group is 1.6-3.2 mm.

8. The reticle of claim 7, wherein a distance between two adjacent solder bumps in the first solder bump group is 2.3-3.2 mm and/or a distance between two adjacent solder bumps in the second solder bump group is 2.3-3.2 mm.

9. The reticle of claim 1, wherein the number of the solder joints in the at least two solder joint groups along the direction away from the non-soldering area is distributed in an equal difference decreasing manner, and the tolerance is preferably two.

10. The reticle of any one of claims 1-9, wherein the at least two solder joint sets are both disposed on the frame.