CN110987089A - Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application - Google Patents
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Abstract
本发明属于传感器设计与制造领域，并具体公开了一种单金属层电极的多功能柔性变胞传感器、制备方法及应用。所述传感器包括金属功能层以及柔性基底，金属功能层包括第一应变栅、第一叉指电极、引线一以及引线二，第一应变栅包括M个首尾依次连接且平行布置的S型结构，第一叉指电极包括M根平行布置的叉指结构。所述制备方法包括基底层和牺牲层的制备、金属功能层的制备、传感器的剥离。本发明多功能柔性变胞传感器可应用于温度、应变、流速和湿度的测量。本发明可通过引线之间的变拓扑切换实现多功能小尺寸原位感知，同时，可实现少量引脚的变拓扑多模态的变胞感知，还可采用两种原理测量相互补充验证提高系统的鲁棒性和稳定性。
The invention belongs to the field of sensor design and manufacture, and specifically discloses a multifunctional flexible metamorphic sensor with a single metal layer electrode, a preparation method and an application. The sensor includes a metal functional layer and a flexible substrate, the metal functional layer includes a first strain grid, a first interdigitated electrode, a lead 1 and a lead 2, and the first strain grid includes M S-shaped structures connected end to end and arranged in parallel, The first interdigital electrode includes M interdigital structures arranged in parallel. The preparation method includes the preparation of the base layer and the sacrificial layer, the preparation of the metal functional layer, and the peeling of the sensor. The multifunctional flexible metamorphic sensor of the present invention can be applied to the measurement of temperature, strain, flow velocity and humidity. The invention can realize multi-functional and small-size in-situ sensing through the variable topology switching between the leads, and at the same time, can realize the variable topology and multi-modal metamorphic sensing of a small number of pins, and can also use two principles to measure and complement each other to verify and improve the system. robustness and stability.
Description
Technical Field
The invention belongs to the field of sensor measurement, and particularly relates to a multifunctional flexible metamorphic sensor with a single metal layer electrode, a preparation method and application.
Background
The sensing device plays an important role in systems such as human health monitoring, human-computer interaction, wind tunnel measurement, aerospace intelligent skin and the like. Temperature, deformation, flow field and humidity are important factors influencing human health and organism health. If the temperature is too high, an electronic system of an airplane can be influenced, the body can be cracked due to large deformation, the efficiency of the airplane body can be influenced by a flow field, and the corrosion of parts can be accelerated due to humidity. Similarly, for electronic skin, the body surface temperature, tension, respiratory system and environmental flow field, body surface humidity, etc. are also relevant to human health and comfort. However, most of the currently used test sensors are single-function sensors, and a plurality of sensors are used for measurement in a combined mode, so that the functions are few, the size is large, and the real-time measurement is inconvenient. Therefore, for the occasions needing to measure a plurality of quantities, the design of the sensor integrating the measurement of temperature, strain, flow velocity and humidity is significant.
Moreover, the design of the sensor can sense a plurality of parameters, and other factors are also required to be considered for influence, so that the application scene of the sensor is limited due to the overlarge size, and the precision is influenced. The hard substrate can not be completely attached to the surface to be measured, so that measurement errors are generated, a large number of leads can be generated due to integration of a plurality of functional sensors, the size and operability are greatly affected, the multiplexing can cause mutual interference among the leads, and the sensing function can be completely failed due to local damage. Therefore, the design of the sensor needs to take account of the volume, flexibility, lead count and robustness.
At present, the design of the multifunctional sensor has been developed to a certain extent, but a plurality of problems are still not solved. For example, patent 201620798993.6 discloses a multifunctional sensor for humidity, temperature and light intensity, which is realized by a side-by-side interdigital structure. The sensor has the advantages of less functions, more pins and poor robustness. Wang et al have realized the collection of signals such as temperature, humidity, ECG on the same surface in the way of adopting the epidermis electron (Wang Y, Qiu Y, America S K, et al, Low-cost, μm-thick, tape-free electronic pitch sensors with minimized movement and sweet areas [ J ]. npj Flexible Electronics), but this kind of collection mode area is big, the lead wire quantity used is big, and the metal pattern is apt to damage and leads to the whole function to be out of order, the robustness is poor. Similar problems exist with other multi-function sensors, and to address these problems, multiple aspects of influence need to be considered.
In conclusion, the research on the high-robustness single-layer metal electrode sensor which is on the flexible substrate, has the characteristics of small size, light weight and high integration degree and can realize multi-mode functional metamorphic measurement through a small number of leads has very important significance.
Disclosure of Invention
Aiming at the defects or improvement requirements of the prior art, the invention provides a multifunctional flexible metamorphic sensor of a single metal layer electrode, a preparation method and application, wherein the characteristics of the flexible metamorphic sensor and the multifunctional coupling process characteristics are combined, the multifunctional flexible metamorphic sensor is correspondingly designed, the structure of key components of the multifunctional flexible metamorphic sensor, such as a metal functional layer and the specific setting mode of the structure are researched and designed, the multifunctional small-size in-situ sensing can be correspondingly realized through variable topology switching among leads, meanwhile, the variable topology multi-modal metamorphic sensing of a small number of pins can be realized, and the invention can adopt two principles to measure and mutually complement to verify so as to improve the robustness and stability of the system. The invention designs a multifunctional flexible metamorphic sensor based on a single-layer metal functional layer, and the invention designs multi-modal perception of the metamorphic sensor, and the design concept reduces mutual interference among the metamorphic sensors, so that the metamorphic sensor can be used for combined measurement and split measurement. Therefore, the system is particularly suitable for measuring the temperature, the strain, the flow rate and the humidity, and the application range of the system is greatly improved.
In order to achieve the above object, the present invention provides a multifunctional flexible metamorphic sensor with a single metal layer electrode, which comprises a metal functional layer and a flexible substrate, wherein the metal functional layer is disposed on the flexible substrate,
the metal functional layer comprises a first functional module, the first functional module comprises a first strain grid, a first interdigital electrode, a first lead wire and a second lead wire, one end of the first strain grid is connected with the first lead wire, the first interdigital electrode is connected with the second lead wire, the first strain grid and the first interdigital electrode are correspondingly arranged on the same side, and the first lead wire and the second lead wire are arranged in parallel;
the first strain gate comprises M S-shaped structures which are sequentially connected end to end and are arranged in parallel, the first interdigital electrode comprises M interdigital structures which are arranged in parallel, each S-shaped structure is arranged in parallel corresponding to one interdigital structure, each interdigital structure extends into the S-shaped structure corresponding to the interdigital structure and keeps a certain gap with the S-shaped structure, in this way, the first strain gate and the first interdigital electrode are connected to form a capacitor sensor, when the flexible substrate absorbs moisture, the dielectric constant of the capacitor sensor is changed, the in-situ sensing of the external environment humidity is realized according to the change amount of the dielectric constant, and M is an integer larger than 1.
Preferably, the metal functional layer further includes a second functional module, the second functional module has the same structure as the first functional module, and the second functional module and the first functional module are symmetrically arranged; the second functional module comprises a second interdigital electrode, a second strain grid, a lead wire three and a lead wire four, wherein the second interdigital electrode is connected with the lead wire three, the second strain grid is connected with the lead wire four, one end of the first strain grid, far away from the lead wire one, is connected with one end of the second strain grid, far away from the lead wire four, in this way, the first strain grid and the first interdigital electrode or the second interdigital electrode and the second strain grid form a capacitance sensor by respectively connecting the lead wire one and the lead wire two or the lead wire three and the lead wire four, and the measurement results of the two capacitors can be mutually verified; meanwhile, the first lead wire and the fourth lead wire are connected, and the first strain grating and the second strain grating form a temperature sensor.
As a further preferred, the metal function layer further comprises a third function module, the third function module comprises a thermocouple metal electrode and a lead wire five, wherein one end of the thermocouple metal electrode is connected with the lead wire five, and the other end of the thermocouple metal electrode is connected with the first strain grating and the second strain grating, in this way, by respectively connecting the lead wire one and the lead wire five or the lead wire four and the lead wire five, the thermocouple metal electrode and the first strain grating or the thermocouple metal electrode and the second strain grating form a temperature sensor or a heat loss type flow rate sensor, wherein the temperature sensor realizes temperature measurement of the environment through electromotive force generated by the thermocouple metal electrode and the first strain grating or the thermocouple metal electrode and the second strain grating, and the measurement results of the two temperature sensors can be mutually verified, the heat loss type flow velocity sensor controls heating of the thermocouple metal electrode, and then realizes measurement of parameters such as resistance, voltage and the like of the heat loss type flow velocity sensor according to the Wheatstone bridge and the linear compensation network, so that measurement of heat loss type flow velocity in the environment is realized.
As a further preferred, the metal functional layer further includes a fourth functional module, one end of the fourth functional module is connected to one interdigital of the first interdigital electrode closest to the thermocouple metal electrode, and the other end of the fourth functional module is connected to one interdigital of the second interdigital electrode closest to the thermocouple metal electrode, and the fourth functional module includes a plurality of U-shaped structures that are sequentially connected end to end and are arranged in parallel, in this way, when the second lead wire and the third lead wire are connected, the first interdigital electrode and the second interdigital electrode constitute a strain measurement sensor; when the second lead wire and the third lead wire are connected with a high-voltage power supply as a heat source, the upstream temperature is measured by connecting the first lead wire and the fifth lead wire, the downstream temperature is measured by connecting the fourth lead wire and the fifth lead wire, and the measurement of the heat loss type flow velocity in the environment is obtained according to a formula of thermal temperature difference.
Preferably, the multifunctional flexible metamorphic sensor further comprises a metal attaching layer, the metal attaching layer is arranged on one side, far away from the metal functional layer, of the flexible substrate, in this way, the metal attaching layer, the flexible substrate and the thermocouple metal electrode form a microstrip patch antenna, and strain change of an environment is obtained through change of resonant frequency of the microstrip patch antenna.
Preferably, in the invention, the first lead, the second lead, the third lead, the fourth lead, the fifth lead, the thermocouple metal electrode, the fourth functional module, the first strain gate, the first interdigital electrode, the second interdigital electrode and the second strain gate are all arranged on the same horizontal plane.
Preferably, the first lead, the second lead, the third lead, the fourth lead and the fourth functional module, the first strain gate, the first interdigital electrode, the second interdigital electrode and the second strain gate have the same thickness and are all 100nm to 400 nm; the thickness of the lead wire V is the same as that of the thermocouple metal electrode, and the thickness of the lead wire V is 50 nm-350 nm.
Preferably, the first strain gauge and the second strain gauge are made of platinum metal.
As a further preferred, the first interdigital electrode and the second interdigital electrode are both made of constantan.
Preferably, the thermocouple metal electrode is made of platinum-rhodium alloy, and the length-width ratio of the thermocouple metal electrode is 0.2-1.
According to another aspect of the present invention, there is provided a method for preparing a multifunctional flexible cell sensor based on a single metal layer electrode, comprising the steps of:
s1, preparing a base layer and a sacrificial layer;
removing the pretreated silicon wafer, spin-coating a PMMA solution on the silicon wafer, heating to obtain a PMMA film as a sacrificial layer, and spin-coating a polyimide solution on the sacrificial layer to obtain a flexible substrate prepared on the sacrificial layer;
s2 preparing a metal functional layer;
photoetching and sputtering a pattern of a metal functional layer on the flexible substrate by adopting a photoetching method, thereby preparing the metal functional layer with the specified thickness on the flexible substrate;
peeling off the S3 sensor;
and removing the sacrificial layer by adopting a laser stripping technology, and stripping the flexible substrate and the metal functional layer from the silicon wafer to obtain the multifunctional flexible metamorphic sensor.
According to another aspect of the invention, the application of the multifunctional flexible metamorphic sensor based on the single metal layer electrode in measuring temperature, strain, flow velocity and humidity is further provided.
Generally, compared with the prior art, the above technical solution conceived by the present invention mainly has the following technical advantages:
1. the invention designs a single-metal-layer multifunctional metamorphic sensor structure, integrates sensors with multiple functions, enables the sensors to have more functions in a smaller area, and solves the problems of excessive measuring points and large measuring point arrangement area during measurement of multiple functions.
2. The invention designs a lead wire inter-use mode, realizes the collection of multiple functions by utilizing a small number of lead wires through metamorphic combination of the lead wires of the sensor, and solves the problem of excessive and disordered lead wires when the multifunctional sensor is used.
3. The metal functional layer is an effective area, and the functions of wind speed, strain and temperature are realized by adopting two functions through the combination of metamorphic leads. The robustness of the sensor is improved, and the problem that the sensor is easy to damage and fail in the using process is solved.
4. According to the invention, the thin film metal and the flexible substrate are adopted, the manufactured sensor has flexibility, can be attached to a curved surface in a conformal manner better, the surface of the model cannot be damaged, and the accuracy of the data measured by the sensor is further improved
Drawings
FIG. 1 is a schematic structural diagram of a multi-functional flexible metamorphic sensor with a single metal layer electrode according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view A-A of FIG. 1;
fig. 3 is a schematic structural diagram and a schematic diagram of a temperature measuring part in a metamorphic sensor according to an embodiment of the present invention, wherein (a) in fig. 3 is a schematic structural diagram of a temperature measuring part in a metamorphic sensor according to an embodiment of the present invention, (b) in fig. 3 is a schematic structural diagram of a temperature measuring part in a metamorphic sensor according to another embodiment of the present invention, and (c) in fig. 3 is a schematic diagram of a temperature measurement of a metamorphic sensor according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram and a schematic diagram of a strain measurement portion in a metamorphic sensor according to an embodiment of the present invention, wherein (a) in fig. 4 is a schematic structural diagram of a strain measurement portion in a metamorphic sensor according to an embodiment of the present invention, fig. 4 (b) is a schematic structural diagram of a strain measurement portion in a metamorphic sensor according to another embodiment of the present invention, and fig. 4 (c) is a schematic diagram of a strain measurement of a metamorphic sensor according to the present invention;
fig. 5 is a schematic structural diagram and a schematic diagram of a flow rate measuring part in a metamorphic sensor according to an embodiment of the present invention, fig. 5 (a) is a schematic structural diagram of a flow rate measuring part in a metamorphic sensor according to an embodiment of the present invention, fig. 5 (b) is a schematic structural diagram of a flow rate measuring part in a metamorphic sensor according to another embodiment of the present invention, fig. 5 (c) is a schematic diagram of a flow rate measurement of the metamorphic sensor according to fig. 5 (a), and fig. 5 (d) is a schematic diagram of a flow rate measurement of the metamorphic sensor according to fig. 5 (b);
FIG. 6 is a schematic structural diagram of a humidity measuring part of the metamorphic sensor according to the embodiment of the invention;
fig. 7 is a flowchart of a multi-functional flexible cell sensor with a single-metal layer electrode according to an embodiment of the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-lead I, 2-lead II, 3-lead III, 4-lead IV, 5-lead V, 6-thermocouple metal electrode, 7-fourth functional module, 8-first strain gate, 9-first interdigital electrode, 10-second interdigital electrode and 11-second strain gate.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1, the multifunctional flexible metamorphic sensor with the single metal layer electrode of the invention comprises a metal functional layer and a flexible substrate, wherein the metal functional layer is arranged on the flexible substrate, the metal functional layer comprises a first functional module, the first functional module comprises a first strain gate 11, a first interdigital electrode 10, a first lead 1 and a second lead 2, one end of the first strain gate 11 is connected with the first lead 1, the first interdigital electrode 10 is connected with the second lead 2, the first strain gate 11 and the first interdigital electrode 10 are correspondingly arranged on the same side, and the first lead 1 and the second lead 2 are arranged in parallel on the same side.
Further, the metal functional layer further comprises a second functional module, the second functional module has the same structure as the first functional module, and the second functional module and the first functional module are symmetrically arranged; the second functional module comprises a second interdigital electrode 9, a second strain grating 8, a lead wire three 3 and a lead wire four 4, wherein the second interdigital electrode 9 is connected with the lead wire three 3, the second strain grating 8 is connected with the lead wire four 4, one end of the first strain grating 11 far away from the lead wire 1 is connected with one end of the second strain grating 8 far away from the lead wire four 4, in this way, by respectively connecting the lead wire 1 with the lead wire two 2 or the lead wire three 3 with the lead wire four 4, the first strain grating 11 and the first interdigital electrode 10 or the second interdigital electrode 9 and the second strain grating 8 form a capacitance sensor, and the measurement results of the two capacitors can be mutually verified; meanwhile, the first strain gauge 11 and the second strain gauge 8 form a temperature sensor by connecting the first lead 1 and the fourth lead 4.
Further, the metal function layer further comprises a third function module, the third function module comprises a thermocouple metal electrode 6 and a lead wire five 5, wherein one end of the thermocouple metal electrode 6 is connected with the lead wire five 5, and the other end is connected with the first strain gauge 11 and the second strain gauge 8, in this way, by respectively connecting the lead wire 1 and the lead wire five 5 or the lead wire four 4 and the lead wire five 5, the thermocouple metal electrode 6 and the first strain gauge 11 or the thermocouple metal electrode 6 and the second strain gauge 8 form a temperature sensor or a heat loss type flow rate sensor, wherein the temperature sensor realizes temperature measurement of the environment through electromotive force generated by the thermocouple metal electrode 6 and the first strain gauge 11 or the thermocouple metal electrode 6 and the second strain gauge 8, and measurement results of the two temperature sensors can be mutually verified, the heat loss type flow velocity sensor controls heating of the thermocouple metal electrode 6, and then realizes measurement of parameters such as resistance and voltage of the heat loss type flow velocity sensor according to a Wheatstone bridge and a linear compensation network, so that measurement of heat loss type flow velocity in the environment is realized.
Further, the metal functional layer further comprises a fourth functional module 7, one end of the fourth functional module 7 is connected with one interdigital of the first interdigital electrode 10 closest to the thermocouple metal electrode 6, and the other end of the fourth functional module 7 is connected with one interdigital of the second interdigital electrode 9 closest to the thermocouple metal electrode 6, the fourth functional module 7 comprises a plurality of U-shaped structures which are sequentially connected end to end and are arranged in parallel, in this way, when the second lead 2 and the third lead 3 are connected, the first interdigital electrode 10 and the second interdigital electrode 9 form a strain measurement sensor; when the second lead 2 and the third lead 3 are connected with a high-voltage power supply as a heat source, the upstream temperature is measured by connecting the first lead 1 with the fifth lead 5, the downstream temperature is measured by connecting the fourth lead 4 with the fifth lead 5, and the measurement of the heat loss type flow rate in the environment is realized according to a formula of thermal temperature difference.
Furthermore, the multifunctional flexible metamorphic sensor further comprises a metal attaching layer, the metal attaching layer is arranged on one side, far away from the metal functional layer, of the flexible substrate, in this way, the metal attaching layer, the flexible substrate and the thermocouple metal electrode 6 form a microstrip patch antenna, and strain change of the environment is obtained through change of resonant frequency of the microstrip patch antenna.
According to the invention, a first lead, a second lead, a third lead, a fourth lead, a fifth lead, a thermocouple metal electrode, a fourth functional module, a first strain grating, a first interdigital electrode, a second interdigital electrode and a second strain grating are all arranged on the same horizontal plane. According to the invention, a first lead, a second lead, a third lead, a fourth functional module, a first strain grid, a first interdigital electrode, a second interdigital electrode and a second strain grid are the same in thickness and are all 100 nm-400 nm; the thickness of the lead wire V is the same as that of the thermocouple metal electrode, and the thickness of the lead wire V is 50 nm-350 nm.
Further, the first strain gate 11 and the second strain gate 8 are both made of platinum metal.
Further, the first interdigital electrode 10 and the second interdigital electrode 9 are both made of constantan.
Further, the thermocouple metal electrode 6 is made of platinum-rhodium alloy, and the length-width ratio of the thermocouple metal electrode 6 is 0.2-1.
Specifically, the multi-modal metamorphic sensor comprises a metal functional layer, a flexible substrate and a metal attaching layer. The metal functional layer comprises a functional part and a lead part, the metal functional layer is attached to the substrate, the external lead comprises a first lead, a second lead, a third lead, a fourth lead and a fifth lead, and the variable topology switching among the leads can realize robust measurement of seven principles with four functions. The metal functional layer contains three metals respectively comprising constantan, platinum and rhodium, and the functions are not simply combined together but the multimode high-precision stable measurement is realized through topological multiplexing of the lead.
The first mode is capacitance measurement, a capacitance sensor is formed by connecting a first lead and a second lead or a third lead and a fourth lead, the capacitance sensor can be used for measuring humidity, body surface hydration and strain, and the flexible substrate of the film is made of high polymer material polyimide. When humidity changes, the polyimide absorbs partial moisture to cause the dielectric constant of the humidity-sensitive capacitor to change, the capacitance of the capacitance sensor also changes, and the capacitance changes in direct proportion to the humidity change, so the humidity changes can be obtained through the change of the capacitance, the result obtained by the combination of the two groups of pins in the measurement is the same, the damage of lead electrodes can be prevented, and the stability of the sensor is improved. In addition, when the sensor is strained, the dead areas of the two ends of the capacitor are changed, and the strain of the sensor can be measured by measuring the capacitance.
The second mode is resistance measurement, the resistance measurement can be used for representing strain and temperature, constantan metal is arranged between the second lead and the third lead, and the second lead is a common metal material for manufacturing a strain gate. Along with the deformation of the substrate, the metal foil can extend or shorten along with the strain, the resistance of the metal foil can also increase or decrease along with the extension or shortening of the foil, and the structural strain can be obtained by measuring the resistance change between the second lead and the third lead. A loop formed by the first lead and the fourth lead is used for measuring the temperature of the thermal resistor, platinum is adopted between the two leads, and the temperature of the environment is obtained by measuring the resistance at the two ends of the leads.
The third mode is potential measurement, a loop formed by connecting the first lead and the fifth lead or the fourth lead and the fifth lead adopts a thermocouple measurement principle, metal platinum and metal platinum rhodium are a thermocouple temperature measurement material combination with excellent performance, when temperature gradients exist at two ends of a thermocouple, corresponding electromotive force can be generated in the thermocouple loop, and the ambient temperature can be obtained by measuring the electromotive force at the cold end.
The fourth mode is frequency measurement, and the measurement of the frequency can be used for representing the performance of the antenna and further representing the magnitude of the dependent variable. The radiation source is composed of a lead five and a platinum-rhodium metal area (metal copper can also be used), polyimide is a medium base layer, a metal attaching layer is a grounding plate, the three form a rectangular microstrip patch antenna, a coaxial cable of the vector network analyzer and an SMA adapter are attached to the lead to monitor the resonant frequency of the antenna, and the inherent resonant frequency is changed due to the change of the rectangular size when the strain changes. The strain change is known by the change in the resonant frequency.
The fifth mode is combined mode flow velocity measurement, a heat loss detection principle and a thermal temperature difference detection principle are adopted, wherein a first lead and a fifth lead or a fourth lead and a fifth lead are connected to form a heat loss type flow velocity sensor, platinum metal is heated through control circuits such as CCA (continuous cooling channel), and meanwhile parameters such as resistance and voltage of the sensor are measured through a Wheatstone bridge and a linear compensation network, a king formula is used for obtaining the working temperature of a hot spot, and therefore measurement of the wind speed is achieved. On the other hand, a constant voltage source or a constant current source is loaded on the second lead and the third lead to heat the grid to become a heat source, the upstream temperature is measured through the resistance change of the first lead and the fifth lead, the downstream temperature is measured through the resistance change of the fourth lead and the fifth lead, the flow rate can be deduced through a formula of thermal temperature difference, performance parameters of two flow rate measurement modes are slightly different, wherein the heat loss type measurement precision is low, but the measurement range is large, the thermal temperature difference type measurement mode is high in precision, and the measurement range is small. The two flow rate measuring modes are realized through topological multiplexing of the pins, the two flow rate measuring modes are mutually verified in an overlapping area of a measuring range and mutually supplemented in a non-overlapping area, and the robustness performance and the comprehensive performance of measurement are improved.
The sixth mode is a combined mode, two different principles measure the strain sensor, and the two principles do not interfere with each other in principle. When two modes work simultaneously, even if one strain mode fails, the strain mode still works normally. Meanwhile, mutual verification between strain measurements can be completed through resistance strain measurement in the mode two and frequency strain measurement in the mode four.
The seventh mode is a combined mode, measures temperature through two principles, and can be applied to extreme environments such as spaceflight, ships and weapon systems. The mode is realized through a second mode and a third mode, the platinum resistor is measured through the second mode, temperature is measured through a thermocouple of the third mode, and the temperatures measured in the two modes are verified and supplemented with each other.
More specifically, as shown in fig. 3, when the multifunctional flexible cell sensor of the present invention is used to constitute a capacitive sensor, the calculation formula of the thermocouple is as follows:
it can be seen that the thermocouple is a function of temperature, a first strain gate is connected to one lead, a thermocouple metal electrode is connected to five leads, and electromotive force is measured by a voltmeter at a reference end, i.e., a test end, and since a standard combination of metals is used, the temperature of the hot end can be obtained by querying a thermocouple scale after EAB (T0, T) at a reference temperature T0 is obtained.
The multifunctional flexible metamorphic sensor can approximately express the relationship between the resistance and the temperature of the heat loss type flow velocity sensor in a certain range as follows:
Rt＝R0(1+At+Bt2)
where A, B is a constant, the measured temperature can be inferred by resistance by looking for the relevant constant value.
As shown in fig. 4, constantan resistance can be measured through lead two and lead three, and the resistance is affected by the length and cross-sectional area:
where ρ is the resistivity, L is the length of the wire, and S is the cross-sectional area of the wire. And because Δ R/R ═ K0And e, the relation between the strain and the resistance can be obtained, and after a corresponding curve is fitted, the curve can be tested by using a Wheatstone bridge.
Meanwhile, for a microstrip patch antenna, namely a patch sensor, the following formula can be obtained:
wherein c is the speed of light, ΔL is the compensation length, L is the radiation source length, εreThe relation between the resonance frequency and the size is known for the effective dielectric constant, the vector network analyzer is connected with the lead wire five, the related resonance frequency is tested, a test curve is fitted, and the strain can be measured through the resonance frequency of the antenna.
As shown in fig. 5, in which lead one (or four) and lead five constitute a heat loss type flow rate sensor, the formula for the heat loss type flow rate sensor is:
wherein q (v), Δ T, v are sensor heat loss, sensor and measured fluid temperature difference and fluid velocity, respectively, A, B is constant, measured temperature is calculated by pt resistance side quantity formula in fig. 3 description, relation between temperature and flow velocity is fitted through data, and A, B parameter is calibrated for measurement. The first lead, the second lead, the third lead, the fourth lead and the fifth lead form a thermal differential flow velocity sensor together, and for the thermal differential flow velocity sensor, the formula is as follows:
the relation between the temperature and the flow rate can be known, wherein the first lead wire and the fifth lead wire form an upstream temperature measuring unit, the fourth lead wire and the fifth lead wire form a downstream temperature measuring unit, the second lead wire and the third lead wire form a heating resistor, and the A 'constant and the B' constant are fitted by measuring the relation between the temperature difference and the flow rate of the upstream and the downstream, so that a complete curve can be fitted for measurement.
As shown in fig. 6, an interdigital capacitor is formed between the lead-platinum electrode and the lead-constantan electrode, and the basic principle is only explained here, the relative humidity of polyimide is approximately linear, and the capacitance in the capacitance formula is also in direct proportion to the dielectric constant of the medium, so that the measured humidity and the measured capacitance can be used for fitting, and the fitted curve is used as a standard curve to calibrate the measured environment.
The invention carries out key consideration and structural design on the reduction of interference among sensors with different functional modes, wherein the back interdigital design on the lead of the strain sensor can reduce the influence of capacitance interdigital resistance on the strain resistance. The close resistivity of constantan and platinum can eliminate the influence of resistance on the measurement accuracy of the capacitance sensor. Due to the design of the interdigital capacitor with bilateral symmetry, on one hand, the length of platinum is improved, the measurement precision of the thermal resistance is increased, on the other hand, the facing area of the interdigital capacitor is improved, the size of the capacitor pair is improved, and the measurement precision is increased. The platinum-rhodium alloy patch antenna part has the advantages that the whole area is wide, the resistance is small, the interference of metal materials with different thermocouple functions on the thermal resistance type temperature sensor is reduced, the relative size of the joint with different resistivity is small due to the change of the materials of the upper connecting part and the lower connecting part, and the interference of the lower part of the sensor on the patch antenna is reduced.
As shown in fig. 7, the sensor of the present invention is manufactured as follows:
s1 preparation of base layer and sacrificial layer. And removing the pretreated silicon wafer, spin-coating a PMMA solution on the silicon wafer, heating to obtain a PMMA film as a sacrificial layer, and spin-coating a polyimide solution on the sacrificial layer to obtain the flexible substrate prepared on the sacrificial layer. Specifically, a clean silicon wafer is prepared, the silicon wafer is soaked in acetone for 40W, the silicon wafer is taken out after 10min of ultrasonic cleaning, the silicon wafer is blown dry by using nitrogen after being washed by deionized water, then the silicon wafer is soaked in alcohol for 40W, the silicon wafer is taken out after 3min of ultrasonic cleaning, the silicon wafer is blown dry by using nitrogen after being washed by deionized water, and finally the silicon wafer is ultrasonically cleaned by using deionized water for 40W for 1min and is dried for later use. Adopting PMMA as a sacrificial layer, adopting a rubber head to strip and drip a PMMA solution, and spin-coating on a silicon wafer with the parameters of 500 r/min and 10 s; then 3000 r/min, 30 s; acceleration of 500r/s2And heating at 180 ℃ for 3min to obtain the PMMA film with the thickness of 1 um. Sputtering parameters of the bottom layer of metal aluminum (or other metals can be not sputtered, and the sensor is only attached to the metal surface during testing) are 0.6Pa,85W and 10 minutes. Spin coating polyimide substrate, PI with spin coating parameters 500 rpm, 15s, then 1500 rpm, 45s acceleration r/s2Pre-baking at 90 deg.C with viscosity of 1000-2000cpThe polyimide solution is spin-coated once, then the polyimide solution with the viscosity of 5000-6000cp is spin-coated twice, the baking temperature is unchanged before the spin-coating parameters are changed, finally the polyimide solution is placed into an oven for heat preservation at 220 ℃ for 3 hours, and the polyimide film with the thickness of 10 mu m is obtained through imidization treatment of the polyimide.
S2 preparation of metal functional layer. And photoetching and sputtering the pattern of the metal functional layer on the flexible substrate by adopting a photoetching method, thereby preparing the metal functional layer with the specified thickness on the flexible substrate. Specifically, a platinum rhodium metal pattern is photoetched and sputtered, AZ5214 photoresist is spin-coated, the spin-coating parameter is 1000rpm, the spin-coating time is 10s, then 12s are spin-coated at the speed of 2000 rpm, and 15s are spin-coated at the speed of 3000 rpm; acceleration of 500r/s2Heating at 110 deg.C for 1min to evaporate solvent, ultraviolet exposing for 8s, developing, and sputtering for 20 min at sputtering parameters of 0.6pa and 70 w. Degumming by using acetone to obtain a metal film with the thickness of about 200 nm. And photoetching and sputtering a platinum metal pattern to obtain a metal film with the thickness of about 200nm according to the parameters. Photoetching and sputtering constantan metal patterns, wherein the photoetching parameters and the sputtering parameters are 70W for 15 minutes, and then degumming by using acetone to obtain the constantan metal film with the thickness of 150 nm.
And (S3) peeling of the sensor. And removing the sacrificial layer by adopting a laser stripping technology, and stripping the flexible substrate and the metal functional layer from the silicon wafer to obtain the multifunctional flexible metamorphic sensor. Specifically, the TRT transfer tape is used for stripping and is adhered to the upper layer of the metamorphic sensor, then the metamorphic sensor is slightly torn off, the TRT transfer tape is placed on a hot plate at 130 ℃ after the stripping is successful, the TRT transfer tape automatically falls off after 1 minute, the complete sensor is obtained, and the TRT transfer tape is adhered to the surface of the metal to be tested.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
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