CN110846632B - Winding type fiber coating magnetron sputtering device - Google Patents
Winding type fiber coating magnetron sputtering device Download PDFInfo
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- CN110846632B CN110846632B CN201911236566.3A CN201911236566A CN110846632B CN 110846632 B CN110846632 B CN 110846632B CN 201911236566 A CN201911236566 A CN 201911236566A CN 110846632 B CN110846632 B CN 110846632B
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- CN
- China
- Prior art keywords
- pulley
- winding
- fiber
- magnetron sputtering
- type fiber
- Prior art date
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- 239000000835 fiber Substances 0.000 title claims abstract description 65
- 238000004804 winding Methods 0.000 title claims abstract description 41
- 239000011248 coating agent Substances 0.000 title claims abstract description 31
- 238000000576 coating method Methods 0.000 title claims abstract description 31
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 18
- 230000000694 effects Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 abstract description 2
- 239000003365 glass fiber Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005269 aluminizing Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a winding type fiber coating magnetron sputtering device which comprises a fiber thread, a vacuum cavity, a lifting table and a target support, wherein a winding type fiber coating device is arranged in the vacuum cavity at a position located at one side of the target support, the winding type fiber coating device comprises a winding device and a thread frame device, the winding device unwinds the fiber thread, and the fiber thread is wound by the winding device after being opened by the thread frame device. The beneficial effects of the invention are as follows: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating for the fibre, and the fibre silk thread is around moving between the pulley, makes fibre silk thread upper cylinder surface and lower cylinder surface all can plate the membrane, has guaranteed the comprehensiveness and the homogeneity of fibre coating, has important meaning to the manufacturing field of fibre coating.
Description
Technical Field
The invention relates to the technical field of vacuum magnetron sputtering coating, in particular to a winding type fiber coating magnetron sputtering device.
Background
The fiber coating has great value in practical application, the metal-plated fiber is a composite fiber taking metal as a skin and nonmetal fiber as a core, and the metal-plated fiber can be divided into: the composite fiber has the advantages of being capable of reflecting electromagnetic waves and infrared rays, being conductive, prolonging service life and the like according to different plating layers besides the flexibility and mechanical properties of the original core fiber. For example, the metal-plated glass fiber has good electromagnetic wave reflection performance, so the metal-plated glass fiber is used as an interference wire for resisting a radar in military, and in addition, the silver-plated glass fiber can be welded and can be used as a wire; the aluminized glass fiber can reflect a large amount of heat energy and can be used as high-temperature protective clothing and the like.
In the prior art, it is generally necessary to coat the fibers with an electrochemical method, but this method is easy to cause pollution when aluminizing, and the aluminum film is not very dense. The magnetron sputtering related by the device is one of physical vapor deposition, has the advantage of strong film adhesion, and has no pollution to the environment. However, due to the fineness of the fiber, it is difficult to ensure that the surface of the fiber can be coated uniformly and comprehensively in magnetron sputtering coating, so that how to ensure the comprehensiveness and uniformity of the coating becomes a technical problem to be solved in the invention.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provide a winding type fiber coating magnetron sputtering device for improving coating integrity and uniformity.
The technical scheme of the invention is as follows:
the utility model provides a coiling formula fiber coating magnetron sputtering device, includes fiber silk thread, vacuum cavity, elevating platform and target support, its characterized in that, the inside position that is located target support one side of vacuum cavity is equipped with coiling formula fiber coating device, coiling formula fiber coating device includes coiling device and wire frame device, coiling device unreels the fiber silk thread to open the back through wire frame device and pass through coiling device to the fiber silk thread rolling.
The winding device is characterized by comprising a motor, a supporting seat, a pinion, a large gear, a transmission shaft, a winding drum and a supporting seat, wherein the pinion is arranged on the motor and is meshed with the large gear, one end of the transmission shaft is arranged on the supporting seat in a penetrating mode, the other end of the transmission shaft is connected with the large gear, and the other end of the transmission shaft is connected with the winding drum.
The winding type fiber coating magnetron sputtering device is characterized in that the wire frame device comprises a supporting frame, a sliding rod and a pulley block, the pulley block comprises a pulley I, a pulley II and a pulley III, the pulley I and the pulley II are respectively arranged on the supporting frame, and the pulley III is arranged on the sliding rod.
The winding type fiber coating magnetron sputtering device is characterized in that the winding drum consists of an upper wire groove and a lower wire groove, wherein the bottom of the lower wire groove is provided with an extending end with a rectangular section, and the extending end is directly inserted into a transmission shaft, so that connection and transmission are realized.
The winding type fiber coating magnetron sputtering device is characterized in that the sliding rod can horizontally slide on the supporting frame, a pre-tightening screw is arranged on the supporting frame, and the horizontal position of the sliding rod can be adjusted through the pre-tightening screw, so that the pre-tightening effect is achieved.
The winding type fiber coating magnetron sputtering device is characterized in that the pulley I and the pulley III are arranged on the same plane, and the pulley II, the pulley I and the pulley III are not on the same plane.
The beneficial effects of the invention are as follows: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating for the fibre, and the fibre silk thread is around moving between the pulley, makes fibre silk thread upper cylinder surface and lower cylinder surface all can plate the membrane, has guaranteed the comprehensiveness and the homogeneity of fibre coating, has important meaning to the manufacturing field of fibre coating.
Drawings
FIG. 1 is a schematic view of the installation of the present invention;
FIG. 2 is a partial block diagram of the present invention;
FIG. 3 is a diagram of a wire frame structure of the present invention;
in the figure: the device comprises a 1-sealing cover, a 2-lifting table, a 3-wire frame, a 4-winding drum, a 5-supporting bearing, a 6-supporting seat, a 7-transmission shaft, an 8-large gear, a 9-small gear, a 10-motor, a 11-fiber wire, a 12-target support, a 13-target, a 14-cavity, a 15-pre-tightening screw, a 16-pulley I, a 17-supporting frame, a 18-pulley II, a 19-sliding rod and a 20-pulley III.
Detailed Description
The technical scheme of the invention is further described below with reference to the attached drawings in the specification:
As shown in fig. 1-3, a coiled fiber coating magnetron sputtering device comprises a vacuum cavity 14, a lifting table 2 arranged on a sealing cover 1 and a target support 12 arranged at the bottom of the cavity 14, wherein a target 13 is placed on the target support 12, a cathode is connected to the target 13, an anode is connected to the lifting table 2, and after being electrified, a part of target atoms sputtered from the target 13 impact on a fiber thread 11 and finally deposit on the surface of the fiber thread 11.
The winding type fiber coating device comprises a winding device and a wire frame device, wherein a transmission system is formed by a motor 10, a pinion 9, a large gear 8, a transmission shaft 7 and a winding drum 4 in the winding device, the motor 10 drives the pinion 9 to rotate, the pinion 9 drives the large gear 8 to rotate, and the large gear 8 drives the transmission shaft 7 to rotate through key connection; the section of the extending end of the winding drum 4 is rectangular, and the transmission shaft 7 drives the winding drum 4 to rotate by being directly inserted into a rectangular groove of the transmission shaft 7. The support bearing 5 is placed in the counter bore of the support seat 6, the whole winding device is supported under force, and the support seat 6 is fixed on the surface of the cavity 14 through screws. The wire frame device comprises a support frame 17, a slide bar 19, a pre-tightening screw 15 and a pulley block, wherein the pulley block comprises a pulley I16, a pulley II 18 and a pulley III 20, the wire frame is connected with the support seat 6 through direct insertion, the pulley is welded on the support frame 17 and the slide bar 19, the surface roughness requirement of the pulley is high, and the abrasion between the fiber silk thread 11 and the pulley is as small as possible; meanwhile, the pulley II 18, the pulley I16 and the pulley III 20 are not on the same plane, when the fiber silk thread 11 slides on the pulley block, the upper segment fiber silk thread 11 is staggered with the lower segment fiber silk thread 11, and the upper cylindrical surface and the lower cylindrical surface of the fiber silk thread 11 can be plated with films.
The working process comprises the following steps:
First, the fiber yarn 11 is wound in the upper wire groove of the winding drum 4, the winding drum 4 is inserted into the transmission shaft 7, then, the fiber yarn 11 is sequentially wound around the first pulley 16, the third pulley 20 and the second pulley 18, and finally, the end of the fiber yarn 11 is fixed on the lower wire groove of the winding drum 4. The pretension screw 15 is adjusted to slide the slide bar 19 to the right so that the fiber strands 11 are in a slightly tensioned state. After the sealing cover 1 is closed, the equipment is started, when the equipment works normally, the vacuum pump starts to pump out gas, and after a certain vacuum degree is reached, the lifting table 2 is controlled to descend to reach a designated height. An electric field is applied, a part of target atoms sputtered from the target material 13 impact on the fiber yarn 11 and deposit, the motor 10 is started, the motor 10 rotates anticlockwise to drive the winding drum 4 to rotate, the upper yarn groove sends out the fiber yarn 11, the lower yarn groove winds up the fiber yarn 11, and film plating on the surface of the fiber yarn 11 begins to be carried out.
Claims (2)
1. The winding type fiber coating magnetron sputtering device comprises a fiber thread (11), a vacuum cavity (14), a lifting table (2) and a target support (12), and is characterized in that a winding type fiber coating device is arranged in the vacuum cavity (14) at a position located at one side of the target support (12), the winding type fiber coating device comprises a winding device and a wire frame device, the winding device unwinds the fiber thread (11) and winds the fiber thread (11) through the winding device after the wire frame device is opened;
The winding device comprises a motor (10), a supporting seat (6), a pinion (9), a large gear (8), a transmission shaft (7), a winding drum (4) and the supporting seat (6), wherein the pinion (9) is arranged on the motor, the pinion (9) is meshed with the large gear (8), the transmission shaft (7) is arranged on the supporting seat (6) in a penetrating way, one end of the transmission shaft is connected with the large gear (8), and the other end of the transmission shaft is connected with the winding drum (4);
The wire frame device comprises a support frame (17), a sliding rod (19) and a pulley block, wherein the pulley block comprises a pulley I (16), a pulley II (18) and a pulley III (20), the pulley I (16) and the pulley II (18) are respectively arranged on the support frame (17), and the pulley III (20) is arranged on the sliding rod (19);
the winding drum (4) consists of an upper wire groove and a lower wire groove, wherein the bottom of the lower wire groove is provided with an extending end with a rectangular section, and the extending end is directly inserted into the transmission shaft (7) so as to realize connection and transmission;
The pulley I (16) and the pulley III (20) are arranged on the same plane, and the pulley II (18), the pulley I (16) and the pulley III (20) are not arranged on the same plane.
2. The winding type fiber coating magnetron sputtering device according to claim 1, wherein the sliding rod (19) can horizontally slide on the supporting frame (17), the supporting frame (17) is provided with a pre-tightening screw (15), and the horizontal position of the sliding rod (19) can be adjusted through the pre-tightening screw (15), so that the pre-tightening effect is achieved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911236566.3A CN110846632B (en) | 2019-12-05 | 2019-12-05 | Winding type fiber coating magnetron sputtering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911236566.3A CN110846632B (en) | 2019-12-05 | 2019-12-05 | Winding type fiber coating magnetron sputtering device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110846632A CN110846632A (en) | 2020-02-28 |
| CN110846632B true CN110846632B (en) | 2024-06-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911236566.3A Active CN110846632B (en) | 2019-12-05 | 2019-12-05 | Winding type fiber coating magnetron sputtering device |
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| CN (1) | CN110846632B (en) |
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| CN115613001B (en) * | 2022-10-26 | 2024-06-11 | 四川旭虹光电科技有限公司 | Coating barrel and use method thereof |
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| CN110846632A (en) | 2020-02-28 |
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