CN110658240A - Toxic and harmful gas detection sensor and detection method - Google Patents
Toxic and harmful gas detection sensor and detection method Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 77
- 231100000331 toxic Toxicity 0.000 title claims abstract description 42
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Abstract
The invention relates to a toxic and harmful gas detection sensor and a detection method, and belongs to the technical field of gas detection. This poisonous and harmful gas detection sensor includes: the top end of the shell is open; the dielectric substrate is horizontally arranged and arranged in the shell, and the lower surface of the dielectric substrate is fixedly connected with the inner wall of the bottom end of the shell; the sensitive dielectric film is fixedly connected to the upper surface of the dielectric substrate; the artificial plasmon resonator is fixedly connected to the sensitive dielectric film; one end of the metal microstrip transmission band is fixedly connected and electrically connected with the artificial plasmon resonator, the other end of the metal microstrip transmission band penetrates through the shell, and the metal microstrip transmission band is fixedly connected to the sensitive dielectric film. The gas detection sensor has the advantages of small volume, low power consumption, strong external interference resistance, easy integration and high detection sensitivity.
Description
Technical Field
The invention belongs to the technical field of gas detection, and particularly relates to a toxic and harmful gas detection sensor and a detection method.
Background
With the increasing of living standard, building decoration is more and more entered into people's life, can improve people's living quality of living through decorating, but what accompanies is that a large amount of poisonous harmful substance that contains in the ornamental material, along with people's increasing of this degree of attention to this day to the requirement of building house ornamentation field to environmental protection material is increasing day by day, and the market is to the demand of all kinds of high sensitivity poisonous harmful gas sensor rapid growth.
At present, the gas sensor mainly comprises a semiconductor gas sensor, an electrochemical gas sensor and an infrared gas sensor. The sensors have the problems of poor detection stability, low detection sensitivity and the like, so that the toxic and harmful gases are not accurately detected, and the physical condition of residents is influenced.
Disclosure of Invention
The invention provides a toxic and harmful gas detection sensor and a detection method for solving the technical problems, which can detect toxic and harmful gas with high precision and have good detection stability, and meanwhile, the gas detection sensor has small volume, low power consumption, strong external interference resistance and easy integration.
The technical scheme for solving the technical problems is as follows: a toxic and harmful gas detection sensor, comprising: the top end of the shell is open; the dielectric substrate is horizontally arranged, the dielectric substrate is arranged in the shell, and the lower surface of the dielectric substrate is fixedly connected with the inner wall of the bottom end of the shell; the sensitive dielectric film is fixedly connected to the upper surface of the dielectric substrate; the artificial plasmon resonator is fixedly connected to the sensitive dielectric film; one end of the metal micro-strip transmission band is fixedly connected and electrically connected with the artificial plasmon resonator, the other end of the metal micro-strip transmission band penetrates through the shell, and the metal micro-strip transmission band is fixedly connected to the sensitive dielectric film.
The invention has the beneficial effects that: thereby adsorb poisonous and harmful gas through sensitive dielectric film and change the dielectric constant of whole gas detection sensor, again through sending the microwave to artifical plasmon syntonizer, produce resonance and scattering transmission wave after artifical plasmon syntonizer receives the microwave, obtain the resonance frequency point through resonance frequency and the input reflection coefficient relation to artifical plasmon syntonizer, and the resonance frequency point can take place the skew along dielectric constant's change, when resonance frequency point sends the drift, explain promptly to detect poisonous and harmful gas, it is high to poisonous and harmful gas's detectivity through this gas detection sensor, it is high to detect the accuracy, this gas detection sensor structure is little simultaneously, can be fine integrated with other microwave circuit, can be better be applicable to in the big environment of thing networking now.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the artificial plasmon resonator comprises a metal micro-strip ring and a plurality of metal strips, a resonant cavity is formed in the metal micro-strip ring, the metal strips are located in the resonant cavity and wound around the circle center of the metal micro-strip ring in an annular radial distribution mode, one end of each metal strip is fixedly connected with the inner ring wall of the metal micro-strip ring, the other end of each metal strip is wound around the circle center of the metal micro-strip ring to form a circular gap, the circle center of the circular gap is coincided with the circle center of the metal micro-strip ring, gaps are reserved between every two metal strips, and the gaps are communicated with the circular gaps.
The beneficial effect of adopting the further scheme is that: through the annular distribution of the circle centers of a plurality of metal strips around the metal microstrip ring, an electromagnetic field can be bound in the resonant cavity, the interference of external electromagnetic signals on the gas detection sensor can be greatly reduced, and the detection precision can be further improved.
Further, the diameter of the circular gap is 2-10 mm.
The beneficial effect of adopting the further scheme is that: the constraint on the electromagnetic field is improved, and the anti-interference capability is increased.
Furthermore, the outer diameter of the metal microstrip ring is 10-30mm, and the inner diameter of the metal microstrip ring is 6-28 mm.
The beneficial effect of adopting the further scheme is that: the method is suitable for detection in environments with different sizes.
Further, the metal strips are fan-shaped, the side length of each metal strip is 2-9mm, the arc-shaped edges of the metal strips are fixedly connected with the inner annular wall of the metal microstrip circular ring, the central angle corresponding to each metal strip is 10-30 degrees, the number of the metal strips is 12-36, and the number of the gaps is 12-36.
The beneficial effect of adopting the further scheme is that: the binding effect on the electromagnetic field is better, and the detection sensitivity of the gas detection sensor can be improved.
Further, the thickness of the sensitive dielectric film is 0.02-0.1mm, and the shape of the sensitive dielectric film is consistent with the shapes of the artificial plasmon resonator and the metal microstrip transmission band.
The beneficial effect of adopting the further scheme is that: is beneficial to the sensitive medium film to absorb toxic and harmful gases.
Further, the sensitive dielectric film is a tin oxide film.
The beneficial effect of adopting the further scheme is that: most of toxic and harmful substances can be adsorbed by the tin oxide film.
And the metal substrate is fixedly arranged between the lower surface of the medium substrate and the inner wall of the bottom end of the shell.
The beneficial effect of adopting the further scheme is that: the connection strength of the dielectric substrate and the shell is improved.
Furthermore, the thickness of the medium substrate is 0.2-0.8 mm.
The beneficial effect of adopting the further scheme is that: the strength of the whole gas detection sensor is improved.
The invention also provides a detection method adopting the toxic and harmful gas detection sensor, which comprises the following steps:
s1, taking a microwave generator, and communicating the output end of the microwave generator with the metal microstrip transmission band;
s2, the microwave generator generates microwaves, the microwaves are transmitted to the artificial plasmon resonator through the metal micro-strip transmission band, and the artificial plasmon resonator generates resonance and scatters transmission waves outwards;
s3, detecting the input reflection coefficient of the transmission wave generated in the step S2 and the resonance frequency of the artificial plasmon resonator to obtain a standard input reflection coefficient and a standard resonance frequency, and drawing a standard relation curve of the standard resonance frequency and the standard input reflection coefficient to obtain a standard resonance frequency point;
s4, after the gas detection sensor is placed in an environment to be detected for a period of time, detecting to obtain a rear input reflection coefficient and a rear resonance frequency, and drawing a rear relation curve according to the rear input reflection coefficient and the rear resonance frequency to obtain a rear resonance frequency point;
s5, comparing the standard resonance frequency point obtained in the step S3 with the rear resonance frequency point obtained in the step S4, and observing whether the rear resonance frequency point shifts, wherein if toxic and harmful gas is detected, the rear resonance frequency point shifts, otherwise, no toxic and harmful gas is detected.
The detection method has the advantages that: the detection method for detecting the poisonous and harmful gas is more convenient, and compared with the existing detection method, the detection method has the advantages of high detection efficiency and high detection precision.
Drawings
FIG. 1 is a top view of a gas detection sensor according to the present invention;
FIG. 2 is a front cross-sectional view of a gas detection sensor in accordance with the present invention;
FIG. 3 is a graph of the relationship between the input reflection coefficient and the resonant frequency of the present invention;
FIG. 4 is a diagram showing an electric field distribution in an operating state of the gas sensor according to the present invention.
In the drawings, the components represented by the respective reference numerals are listed below:
1. the device comprises a shell, 2, a dielectric substrate, 3, a metal micro-strip transmission band, 4, a metal micro-strip ring, 5, a metal strip, 6, a gap, 7, a circular gap, 8, a sensitive dielectric film, 9 and a metal substrate.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
Examples
As shown in fig. 1 to 2, the present embodiment provides a toxic and harmful gas detection sensor, including: the device comprises a shell 1, a dielectric substrate 2, a sensitive dielectric film 8, an artificial plasmon resonator and a metal microstrip transmission band 3.
The top end of the shell 1 is open, wherein the shell 1 is rectangular, and the shell 1 is used for placing a dielectric substrate 2, a sensitive dielectric film 8, an artificial plasmon resonator and a metal microstrip transmission band 3, so that components in the shell 1 are protected. The medium substrate 2 is horizontally arranged, the medium substrate 2 is arranged in the shell 1, and the lower surface of the medium substrate 2 is fixedly connected with the inner wall of the bottom end of the shell 1. The sensitive dielectric film 8 is fixedly connected to the upper surface of the dielectric substrate 2. The sensitive dielectric film 8 is used for adsorbing toxic and harmful gases in the environment, and the media on the sensitive dielectric film 8 are different and are different aiming at the adsorbed toxic and harmful gases, so that the detection of different toxic and harmful gases can be realized. The artificial plasmon resonator is fixedly connected to the sensitive dielectric film 8. One end of the metal micro-strip transmission band 3 is fixedly connected and electrically connected with the artificial plasmon resonator, the other end of the metal micro-strip transmission band penetrates through the side wall of the shell 1 and is used for being conveniently connected with a microwave generator, and the metal micro-strip transmission band 3 is fixedly connected on the sensitive dielectric film 8. Wherein, the microwave generator is connected with the metal micro-strip transmission band 3, so that the microwave is transmitted into the artificial plasmon resonator, and the microwave generates resonance in the artificial plasmon resonator. After the sensitive dielectric film 8 adsorbs toxic and harmful gases, the dielectric constant on the dielectric substrate 2 is changed, so that the resonance frequency of the artificial plasmon resonator is changed, and the detection of the toxic and harmful gases is realized. The artificial plasmon resonator and the metal microstrip transmission band 3 are exposed from the opening of the shell 1, so that the detection of toxic and harmful gases in the environment is facilitated.
The width of the metal microstrip transmission band 3 can be determined according to the dielectric constant of the dielectric substrate 2, and needs to be satisfied, and the input impedance of the metal microstrip transmission band 3 is standard 50 ohms so as to perform good impedance matching with an external circuit. In addition, two metal microstrip transmission bands 3 are arranged and are respectively positioned on two sides of the artificial plasmon resonator.
Specifically, in this embodiment, the artificial plasmon resonator includes a metal microstrip ring 4 and a plurality of metal strips 5, where the metal microstrip ring 4 and the plurality of metal strips 5 are made of the same material, a resonant cavity is formed in the metal microstrip ring 4, the plurality of metal strips 5 are located in the resonant cavity and radially distributed in a ring shape around the center of the metal microstrip ring 4, one end of the plurality of metal strips 5 is fixedly connected to an inner annular wall of the metal microstrip ring 4, a circular gap 7 is formed at the other end of the plurality of metal strips 5 around the center of the metal microstrip ring 4, the circular gap 7 is a virtual circle, two ends of the plurality of metal strips 5 close to the center of the metal microstrip ring 4 are not connected to each other, the center of the circular gap 7 coincides with the center of the metal microstrip ring 4, gaps 6 are left between two metal strips 5, and the gaps 6 are both connected to the circular gap 7. Through set up a plurality of metal strips 5 in the plasmon resonant cavity to can form the constraint effect to the electromagnetic wave, enlarge resonant frequency variation, greatly reduced external electromagnetic signal in addition to the interference of gas detection sensor, thereby improved the detectivity to poisonous and harmful gas.
Specifically, the diameter of the circular gap 7 in this embodiment is 2 to 10 mm. The outer diameter of the metal micro-strip ring 4 is 10-30mm, the inner diameter of the metal micro-strip ring 4 is 6-28mm, and the width of the metal micro-strip ring 4 is 1.5-3 mm. The thickness of the dielectric substrate 2 is 0.2-0.8 mm.
Specifically, in this embodiment, the metal strip 5 is a sector, the side length of the metal strip 5 is 2-9mm, the arc-shaped edge of the metal strip 5 is fixedly connected with the inner annular wall of the metal microstrip circular ring 4, the central angle corresponding to the metal strip 5 is 10-30 °, the number of the metal strips 5 is 12-36, and the number of the gaps 6 is 12-36. The sensitivity of the gas detection sensor is higher. The method can be more favorable for detecting toxic and harmful gases.
Specifically, in this embodiment, the thickness of the sensitive dielectric film 8 is 0.02-0.1mm, the shape of the sensitive dielectric film 8 is consistent with the shape of the artificial plasmon resonator and the metal microstrip transmission band 3, wherein the part of the sensitive dielectric film 8 connected with the artificial plasmon resonator is circular, and the part connected with the metal microstrip transmission band 3 is strip-shaped. Therefore, the effect of adsorbing toxic and harmful gases by the sensitive dielectric film 8 is better, and the detection accuracy of the gas detection sensor can be improved.
Specifically, the sensitive dielectric film 8 in this embodiment is a tin oxide film. Of course, the sensitive dielectric film 8 can also be made of other materials, and can be selected according to the type of the toxic and harmful gas to be detected. Wherein the tin oxide film or other materials can be coated on the substrate by screen printing or magnetron sputtering.
Preferably, the embodiment further comprises a metal substrate 9, the metal substrate 9 is fixedly arranged between the lower surface of the dielectric substrate 2 and the inner wall of the bottom end of the housing 1, and the connection strength between the dielectric substrate 2 and the housing 1 is improved through the metal substrate 9.
In addition, the present embodiment provides a detection method using the toxic and harmful gas detection sensor, including the following steps:
and S1, taking the microwave generator, and communicating the output end of the microwave generator with the metal microstrip transmission band 3.
And S2, generating microwaves by a microwave generator, transmitting the microwaves to the artificial plasmon resonator through the metal micro-strip transmission band 3, receiving and dispersing the microwaves by the artificial plasmon resonator, and generating resonance and scattering transmission waves outwards when the microwaves are received by the artificial plasmon resonator.
S3, detecting the input reflection coefficient of the transmission wave generated in the step S2 and the resonance frequency of the artificial plasmon resonator, obtaining a standard input reflection coefficient and a standard resonance frequency because the dielectric constant of the dielectric substrate 2 is a stable value, drawing a standard relation curve of the standard resonance frequency and the standard input reflection coefficient according to the standard input reflection coefficient and the standard resonance frequency, and obtaining a standard resonance frequency point according to the standard relation curve of the drawn standard resonance frequency and the standard input reflection coefficient.
S4, after the gas detection sensor is placed in the environment to be detected for a period of time, the gas detection sensor continues to send microwaves to the artificial plasmon resonator through the microwave generator after being placed in the environment to be detected for a period of time, the microwaves are detected to obtain a postposition input reflection coefficient and postposition resonance frequency, and a postposition relation curve is drawn according to the postposition input reflection coefficient and the postposition resonance frequency to obtain a postposition resonance frequency point.
And S5, comparing the standard resonance frequency point obtained in the step S3 with the rear resonance frequency point obtained in the step S4, observing whether the rear resonance frequency point shifts, if the toxic and harmful gas is detected, shifting the rear resonance frequency point, otherwise, not detecting the toxic and harmful gas.
The detection principle is as follows: when the gas detection sensor is placed in an environment to be detected, the sensitive dielectric film 8 can adsorb toxic and harmful gases in the environment, when the sensitive dielectric film 8 absorbs poisonous and harmful gas, the dielectric constant is changed, thereby changing the dielectric constant of the whole gas detection sensor, when the artificial plasmon resonator receives the microwaves, the electromagnetic field of the artificial plasmon resonator is highly localized, due to the change of the dielectric constant of the whole gas detection sensor, the resonance frequency of the artificial plasmon resonator is linearly changed along with the change of the dielectric constant, therefore, the measured rear resonance frequency changes, and a rear relation curve is drawn according to the rear input reflection coefficient and the rear resonance frequency and is changed, so that the obtained rear resonance frequency point deviates relative to the standard resonance frequency point.
The following is a case of performing specific measurement using the above-described example.
A toxic and harmful gas detecting sensor sample was prepared according to the above-described embodiment, and the geometric parameters of each part thereof are shown in table 1.
TABLE 1
| Component part | Value of |
| Length of metal microstrip transmission band | 20mm |
| Outer diameter of metal micro-strip ring | 20mm |
| Inner diameter of metal microstrip ring | 16mm |
| Length of side of metal strip | 6mm |
| Corresponding central angle of metal strip | 15o |
| Number of metal strips | 24 are provided with |
| Width of metal substrate | 40mm |
| Length of metal substrate | 60mm |
| Width of metal micro-strip ring | 1.08mm |
| Thickness of dielectric substrate | 0.5mm |
| Thickness of sensitive dielectric film | 0.05mm |
Wherein the dielectric substrate 2 has a dielectric constant ε r of 3.52. The dielectric constant ∈ r of the entire gas detection sensor was 3.0.
The gas detection sensor is placed in a preset environment to be detected for testing, and the input reflection coefficient S is obtained according to the gas detection sensor11And the resonant frequency, wherein the sensitive dielectric film 8 in the gas detection sensor continuously adsorbs toxic and harmful gases, so that the dielectric constant is continuously increased, and the specific inventor selects the conditions of the dielectric constants Epsilon of 7.0, 11.0, 15.0 and 19.0 and the relation curve of the dielectric constant Epsilon of 3.0, and integrates the relationsTogether, as shown in fig. 3 in particular, it can be seen from fig. 3 that the resonant frequency point shifts continuously with the change of the dielectric constant. Therefore, whether the toxic and harmful gas can be accurately detected by the toxic and harmful gas detection sensor or not can be demonstrated, and the detection accuracy is very high.
In addition, the inventor also detects the electric field distribution of the gas detection sensor in the working state, specifically as shown in fig. 4, it can be seen from fig. 4 that when the gas detection sensor works, the electric field energy is mainly concentrated in the resonant cavity of the artificial plasmon resonator, so that the anti-electromagnetic interference capability of the gas detection sensor is greatly enhanced.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent replacements, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A toxic and harmful gas detection sensor, comprising:
the device comprises a shell (1), wherein the top end of the shell (1) is open;
the dielectric substrate (2) is horizontally arranged, the dielectric substrate (2) is arranged in the shell (1), and the lower surface of the dielectric substrate (2) is fixedly connected with the inner wall of the bottom end of the shell (1);
the sensitive dielectric film (8), the sensitive dielectric film (8) is fixedly connected to the upper surface of the dielectric substrate (2);
the artificial plasmon resonator is fixedly connected to the sensitive dielectric film (8);
the metal microstrip transmission band (3), one end of the metal microstrip transmission band (3) with artifical plasmon syntonizer fixed connection and electricity are connected, and the other end passes casing (1), metal microstrip transmission band (3) fixed connection be in on sensitive dielectric film (8).
2. The toxic harmful gas detection sensor according to claim 1, wherein the artificial plasmon resonator comprises a metal microstrip ring (4) and a plurality of metal strips (5), a resonant cavity is arranged in the metal micro-strip ring (4), a plurality of metal strips (5) are positioned in the resonant cavity, and are distributed in a ring-shaped radial manner around the center of the metal micro-strip ring (4), one end of a plurality of metal strips (5) is fixedly connected with the inner ring wall of the metal micro-strip ring (4), the other end of the plurality of metal strips (5) forms a circular gap (7) around the center of the metal micro-strip ring (4), the circle center of the circular gap (7) is coincident with that of the metal micro-strip ring (4), a gap (6) is reserved between every two metal strips (5), and the gaps (6) are communicated with the circular gap (7).
3. The toxic harmful gas detection sensor according to claim 2, wherein the circular gap (7) has a diameter of 2-10 mm.
4. The toxic and harmful gas detection sensor according to claim 2, wherein the metal microstrip ring (4) has an outer diameter of 10-30mm, and the metal microstrip ring (4) has an inner diameter of 6-28 mm.
5. The poisonous and harmful gas detection sensor of claim 2, wherein the metal strips (5) are fan-shaped, the side length of the metal strips (5) is 2-9mm, the arc-shaped sides of the metal strips (5) are fixedly connected with the inner ring wall of the metal microstrip ring (4), the corresponding central angles of the metal strips (5) are 10-30 °, the number of the metal strips (5) is 12-36, and the number of the gaps (6) is 12-36.
6. The toxic and harmful gas detection sensor according to claim 1, wherein the thickness of the sensitive dielectric film (8) is 0.02-0.1mm, and the shape of the sensitive dielectric film (8) is consistent with the shapes of the artificial plasmon resonator and the metal microstrip transmission band (3).
7. The toxic and harmful gas detection sensor according to claim 6, wherein the sensitive dielectric film (8) is a tin oxide film.
8. The toxic and harmful gas detection sensor according to any one of claims 1 to 7, further comprising a metal substrate (9), wherein the metal substrate (9) is fixedly disposed between the lower surface of the dielectric substrate (2) and the inner wall of the bottom end of the housing (1).
9. The toxic harmful gas detection sensor according to any one of claims 1 to 7, wherein the dielectric substrate (2) has a thickness of 0.2 to 0.8 mm.
10. A detection method using the toxic harmful gas detection sensor according to any one of claims 1 to 9, comprising the steps of:
s1, taking a microwave generator, and communicating the output end of the microwave generator with the metal microstrip transmission band (3);
s2, the microwave generator generates microwaves, the microwaves are transmitted to the artificial plasmon resonator through the metal micro-strip transmission band (3), and the artificial plasmon resonator generates resonance and scatters transmission waves outwards;
s3, detecting the input reflection coefficient of the transmission wave generated in the step S2 and the resonance frequency of the artificial plasmon resonator to obtain a standard input reflection coefficient and a standard resonance frequency, and drawing a standard relation curve of the standard resonance frequency and the standard input reflection coefficient to obtain a standard resonance frequency point;
s4, after the gas detection sensor is placed in an environment to be detected for a period of time, detecting to obtain a rear input reflection coefficient and a rear resonance frequency, and drawing a rear relation curve according to the rear input reflection coefficient and the rear resonance frequency to obtain a rear resonance frequency point;
s5, comparing the standard resonance frequency point obtained in the step S3 with the rear resonance frequency point obtained in the step S4, and observing whether the rear resonance frequency point shifts, wherein if toxic and harmful gas is detected, the rear resonance frequency point shifts, otherwise, no toxic and harmful gas is detected.
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| CN111969286A (en) * | 2020-08-18 | 2020-11-20 | 贵州民族大学 | Waveguide component based on composite film resonator |
| CN113991274A (en) * | 2021-12-24 | 2022-01-28 | 东南大学 | High Q value resonator based on artificial surface plasmon |
| WO2023123853A1 (en) * | 2021-12-27 | 2023-07-06 | 东南大学 | On-chip quadrilateral resonator based on spoof surface plasmon polaritons |
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